A method and system for synchronizing wafer test data

Abstract

This application relates to a method and system for synchronizing wafer test data. The method includes: obtaining the test result data and test equipment location of the Nth step of the wafer test process from a local server; determining whether the test equipment location of the Nth step is the same as that of the (N+1)th step; if they are the same, using the test result data of the Nth step as the basic test data for the (N+1)th step through the local server of the Nth step; if they are different, sending the test result data of the Nth step to the local server of the (N+1)th step as the basic test data for the (N+1)th step. This application improves the timeliness of data transmission, reduces the possibility of errors during manual operation, and thus ensures the accuracy of test data as much as possible.

Description

Technical Field

[0001] This application relates to the field of data processing technology, and in particular to a method and system for synchronizing wafer test data. Background Technology

[0002] A wafer is a silicon wafer used to manufacture silicon semiconductor circuits; its raw material is silicon. Wafer production requires data testing, which necessitates the use of wafer testing equipment. However, this equipment is highly susceptible to network interference; therefore, to ensure equipment stability, test data is typically stored only on a local network.

[0003] The wafer manufacturing process involves multiple steps, and testing may be conducted in different locations during different steps. Each step of the test requires the test data from the previous step, so the relevant operators need to export the locally stored data and send it to the relevant testing site.

[0004] Regarding the aforementioned issues, the inventors believe that operating in the above manner will result in insufficient timeliness of data transmission, and manual operation is prone to errors, leading to inaccurate subsequent test data. Summary of the Invention

[0005] To improve the timeliness of data transmission, reduce the possibility of errors during manual operation, and thus ensure the accuracy of test data as much as possible, this application provides a method and system for synchronizing wafer test data.

[0006] In a first aspect, this application provides a method for synchronizing wafer test data, employing the following technical solution:

[0007] A method for synchronizing wafer test data includes:

[0008] The test result data and test equipment location of the Nth step are obtained from the local server of the Nth step of the wafer testing process.

[0009] Determine whether the location of the test equipment in step N is the same as the location of the test equipment in step N+1.

[0010] If they are the same, the test result data of step N is used as the test basis data of step N+1 through the local server of step N.

[0011] If they are different, the test result data of step N is sent to the local server of step N+1 as the test basis data of step N+1.

[0012] By adopting the above technical solution, it is determined whether the test equipment locations are the same, and whether it is necessary to automatically send the test result data of step N to the local server of step N+1 as the test basis data for step N+1. This eliminates the need for manual data export, thereby improving the timeliness of data transmission, reducing the possibility of errors during manual operation, and ensuring the accuracy of the test data as much as possible.

[0013] Preferably, the step of sending the test result data of the Nth step to the local server of the N+1th step as the test basis data for the N+1th step includes:

[0014] Obtain the basic test data for the N+1th step;

[0015] Determine whether the test data of the (N+1)th step is the same as the test result data of the Nth step.

[0016] If they are different, then obtain the difference data between the test base data of the N+1th step and the test result data of the Nth step;

[0017] The difference data is sent to the local server of the N+1 step to update the test base data of the N+1 step.

[0018] By adopting the above technical solution, when the test base data of step N+1 differs from the test result data of step N, the difference data is obtained to update the test base data of step N+1. It is not necessary to modify all the data, and the processing is relatively simple.

[0019] Preferably, obtaining the test result data for the Nth step includes:

[0020] The test result data for the Nth test and the test result data for the N+1th test are obtained from the local server in the Nth step.

[0021] The local server in step N determines whether the test result data of the (N+1)th test is the same as the test result data of the Nth test.

[0022] If they are different, the local server of the Nth step process will be used to obtain the test result data of the N+1th test and the adjustment data of the Nth test result data.

[0023] The test result data for step N is adjusted based on the adjustment data to obtain new test result data for step N.

[0024] By adopting the above technical solution, the test result data of the N+1th test and the adjustment data of the Nth test result data are obtained only through the local server of the Nth step, and the test result data of the Nth step is adjusted according to the adjustment data. Similarly, it is not necessary to replace all the data, and the data processing pressure is small.

[0025] Preferably, after obtaining the test result data of the Nth step, the method further includes:

[0026] Generate an M-level version number based on the test results data from step N;

[0027] An M+1 version number is generated based on the M-level version number and the test result data of the new Nth step, while retaining the test result data of the Nth step and the M-level version number.

[0028] By adopting the above technical solution, while obtaining the N+1 level version number and new test result data, the M level version number and the original test result data are retained for easy subsequent querying.

[0029] Preferably, before the local server in the Nth step of the wafer testing process obtains the test result data and test equipment location, the process further includes:

[0030] Get the previous time when the local server retrieved the test result data for the Nth step of the wafer testing process;

[0031] Get the current time;

[0032] The interval duration is obtained based on the current time and the acquisition time.

[0033] Determine whether the interval duration is greater than or equal to a preset duration;

[0034] If the interval duration is greater than or equal to the preset duration, then a data acquisition instruction is obtained;

[0035] Based on the data acquisition instructions, the test result data of the Nth step of the wafer testing process is obtained from the local server of the Nth step process.

[0036] If the interval duration is less than the preset duration, then no data acquisition instruction will be obtained.

[0037] By adopting the above technical solution, the test result data of the Nth step of the wafer test can be obtained from the local server of the Nth step of the wafer test based on the relationship between the interval duration and the preset duration. This eliminates the need for constant data acquisition and reduces the pressure on data processing.

[0038] As a preferred option, it also includes:

[0039] The test equipment parameters for the Nth step of the wafer testing process are obtained from the local server.

[0040] Determine whether the test equipment parameters are the same for all the steps in step N;

[0041] If they are different, then the locations of the test devices with different test device parameters are obtained based on the test device parameters.

[0042] By adopting the above technical solution, it is possible to determine whether the test equipment parameters of all Nth step processes are the same, and not to record the corresponding test equipment positions at the same time, which facilitates the inspection of the test equipment.

[0043] Preferably, after obtaining the locations of test devices with different test device parameters based on the test device parameters, the method further includes:

[0044] Obtain adjustment records of different test equipment parameters for the same process;

[0045] Based on the adjustment records, determine whether the adjustment of the test equipment parameters of the test equipment with different parameters is standardized;

[0046] If the test is not performed correctly, an alarm message will be generated based on the location of the test equipment.

[0047] By adopting the above technical solution, an alarm message is generated when the parameters of the testing equipment are not adjusted in accordance with regulations, which facilitates reminders to relevant personnel.

[0048] As a preferred option, it also includes:

[0049] If the test equipment parameters are adjusted according to specifications, the test result data of the adjusted test equipment will be obtained as the adjustment test data;

[0050] The adjusted test data will overwrite the test base data of the local server where the different test devices are located in other next-step processes.

[0051] By adopting the above technical solution, when the test equipment parameters are adjusted to the standard, the adjusted test data will cover the test base data of the local server where the different test equipment in the next step of the process is located, which facilitates the provision of accurate test data for subsequent processes.

[0052] Secondly, this application provides a wafer test data synchronization system, which adopts the following technical solution:

[0053] A system for synchronizing wafer test data includes: a management server, a local server, and test equipment;

[0054] The testing equipment is used to generate test result data and the location of the testing equipment in the Nth step of the wafer testing process;

[0055] The local server is used to obtain the test result data and the location of the test equipment;

[0056] The management server is used to receive the test result data and the location of the test equipment sent by the local server;

[0057] The management server is also used to determine whether the location of the test equipment in step N is the same as the location of the test equipment in step N+1. If they are the same, the test result data of step N is used as the test basis data of step N+1 through the local server of step N. If they are different, the test result data of step N is sent to the local server of step N+1 as the test basis data of step N+1.

[0058] By adopting the above technical solution, the local server obtains the test result data and the location of the test equipment for the Nth step of wafer testing generated by the test equipment. Then, the management server determines whether the location of the test equipment in the Nth step is the same as the location of the test equipment in the (N+1)th step. If they are the same, the local server for the Nth step uses the test result data of the Nth step as the basic test data for the (N+1)th step. If they are different, the test result data of the Nth step is sent to the local server for the (N+1)th step as the basic test data for the (N+1)th step. This eliminates the need for manual data export, thereby improving the timeliness of data transmission, reducing the possibility of errors during manual operation, and ensuring the accuracy of the test data as much as possible.

[0059] In summary, this application includes at least one of the following beneficial technical effects:

[0060] 1. Determine if the test equipment locations are the same to decide whether the test results from step N need to be automatically sent to the local server of step N+1 as the basis for testing in step N+1. This eliminates the need for manual data export, improving the timeliness of data transmission, reducing the possibility of errors during manual operation, and thus ensuring the accuracy of the test data as much as possible.

[0061] 2. When the test base data of step N+1 differs from the test result data of step N, the difference data is obtained to update the test base data of step N+1. It is not necessary to modify all the data, and the process is relatively simple. Attached Figure Description

[0062] Figure 1This is a flowchart illustrating a method for synchronizing wafer test data provided in an embodiment of this application;

[0063] Figure 2 This is a flowchart illustrating steps S11 to S14 in one embodiment of this application;

[0064] Figure 3 This is a flowchart illustrating steps S21 to S24 in one embodiment of this application;

[0065] Figure 4 This is a flowchart illustrating steps S31 to S32 in one embodiment of this application;

[0066] Figure 5 This is a flowchart illustrating steps S41 to S47 in one embodiment of this application;

[0067] Figure 6 This is a flowchart illustrating steps S51 to S53 in one embodiment of this application;

[0068] Figure 7 This is a flowchart illustrating steps S61 to S63 in one embodiment of this application;

[0069] Figure 8 This is a flowchart illustrating steps S71 to S72 in one embodiment of this application;

[0070] Figure 9 This is a structural block diagram of a wafer test data synchronization system provided in an embodiment of this application.

[0071] Explanation of reference numerals in the attached figures:

[0072] 1. Testing equipment; 2. Local service; 3. Management server. Detailed Implementation

[0073] The following is in conjunction with the appendix Figures 1 to 9 This application will be described in further detail.

[0074] This application discloses a method for synchronizing wafer test data.

[0075] Reference Figure 1 Methods for synchronizing wafer test data include:

[0076] S1. Obtain the test result data and test equipment location of step N from the local server of step N of the wafer testing process;

[0077] S2. Determine whether the location of the test equipment in step N is the same as the location of the test equipment in step N+1;

[0078] S3. If they are the same, the test result data of step N is used as the test basis data of step N+1 through the local server of step N.

[0079] S4. If they are different, the test result data of step N is sent to the local server of step N+1 as the test basis data of step N+1.

[0080] Specifically, during wafer production testing, to facilitate timely sharing of wafer test data across different processes and regions, the test results and equipment location for the Nth step of the wafer testing process are first obtained from the local server of that step. In other words, during production testing, the testing equipment records relevant production test data and uploads it to the local server. For example, if the test is the first step, the testing equipment corresponding to that first step will upload its test data to the local server corresponding to that first step. The uploaded data is primarily binary data, containing a wafer test map, which can be parsed to generate production graphical data.

[0081] After the local server obtains the test result data and test equipment location for step N, it uploads them to the management server, which is a shared server among different local servers in different regions. The test equipment location can be configured so that each test device corresponds to a different code. When the local server obtains the test result data, the test device simultaneously sends its own code to the local server. The management server has a pre-set code location table, which includes several codes and their corresponding device locations. Once the corresponding code is obtained, the location of the corresponding test equipment can be determined by comparing it with the code location table.

[0082] Then, it's determined whether the test equipment location in step N is the same as that in step N+1. In other words, it's determined whether the test equipment for adjacent steps is located in the same region, i.e., whether they share the same local server. This can be done by obtaining the test equipment code for step N to get its location, then obtaining the test equipment code for step N+1 to get its location, and finally comparing the two locations. Alternatively, the device location can be a local area network (LAN) address. If the LAN addresses are the same, then the test equipment locations in steps N and N+1 are the same; otherwise, they are different.

[0083] If they are the same, the test result data of step N is used as the test basis data of step N+1 through the local server of step N. At this time, the management server generates a prohibition upload command and sends it to the local server of step N. The test data of the two adjacent steps can be shared on the local server. Therefore, the data obtained after the wafer has undergone one test is used as the basis data for the next test and can be called on the local server. That is, the test result data of step N is used as the test basis data of step N+1 through the local server.

[0084] If they are different, it means that two adjacent steps in the same wafer test are being conducted in different regions or on different local area networks. In this case, the test result data obtained from the first step needs to be transmitted through the management server to the local server where the test equipment for the next step is located, as the test basis data for the next step. That is, the test result data of the Nth step is sent to the local server of the N+1th step as the test basis data for the N+1th step.

[0085] This process eliminates the need for manual data export and enables interactive sharing of test data, thereby improving the timeliness of data transmission, reducing the possibility of errors during manual operation, and ensuring the accuracy of test data as much as possible.

[0086] Reference Figure 2 Furthermore, to reduce the complexity of the data interaction process and the server load during data processing, in another embodiment, step S2 involves sending the test result data of step N to the local server of step N+1 as the test basis data for step N+1, including:

[0087] S11. Obtain the basic test data for the N+1th step;

[0088] S12. Determine whether the test data of step N+1 is the same as the test result data of step N;

[0089] S13. If they are different, obtain the difference data between the test base data of step N+1 and the test result data of step N;

[0090] S14. Send the difference data to the local server of step N+1 to update the test base data of step N+1.

[0091] Specifically, during the process of sending the test result data of step N to the local server of step N+1 as the test basis data of step N+1, the management server obtains the test basis data of step N+1 by uploading it from the local server to the management server.

[0092] Then, it is determined whether the test data of step N+1 is the same as the test result data of step N. In other words, it is determined whether the test result data of the previous step of wafer testing has changed, and whether the test data of the next step can still be used.

[0093] For example, the test result data of step N before the data change is uploaded to the management server and used as the test base data for step N+1. When the test equipment obtains the test result data of step N of the wafer test again, it needs to determine whether the test result data this time is the same as the previous test result data, and then determine whether the test result data previously obtained and stored in the local server of step N+1 needs to be updated.

[0094] If they are the same, no update is needed; if they are different, then the difference data between the test base data of step N+1 and the test result data of step N is obtained, that is, the test result data of step N is obtained again, and this result data is compared with the test result data stored in the local server of step N+1 last time, and the different data in the test result data of step N is obtained, that is, the difference data.

[0095] Finally, the difference data is sent to the local server of step N+1 to update the test base data of step N+1. Alternatively, the local server can download the difference data from the management server and update the test base data in the local server of step N+1 to obtain new test base data, and then use this new test base data to overwrite and replace the old test base data.

[0096] Using the above method, it is not necessary to overwrite or replace all the basic test data on the local server, which can reduce the data processing pressure on the management server when updating data to the management server.

[0097] Reference Figure 3 Furthermore, to further reduce the server's pressure on data processing, in another embodiment, obtaining the test result data of step N includes:

[0098] S21. Obtain the test result data for the Nth test and the test result data for the N+1th test through the local server of the Nth step;

[0099] S22. Determine whether the test result data of the (N+1)th test is the same as the test result data of the Nth test through the local server of the Nth step;

[0100] S23. If they are different, then obtain the adjustment data of the test result data of the N+1th test and the test result data of the Nth test through the local server of the Nth step.

[0101] S24. Adjust the test result data of step N based on the adjustment data to obtain new test result data for step N.

[0102] Specifically, in the process of obtaining the test result data of the Nth step, which is the process of the management server obtaining the test result data, the Nth test result data and the N+1th test result data are first obtained through the local server of the Nth step. That is, the local server in the same region or the same local area network address obtains the test result data of the Nth step of the wafer testing by the test equipment. Then, the previous test result data is compared with the next test result data, that is, the Nth test result data and the N+1th test result data are compared.

[0103] The local server then checks whether the test result data of the Nth test is the same as that of the (N+1)th test, i.e., whether the wafer test data has changed. If they are the same, that is, no change has occurred, then there is no need to continue uploading the test result data to the management server.

[0104] If they are different, it proves that the test result data has changed. At this time, the local server obtains the data that differs between the (N+1)th test result data and the Nth test result data, i.e., the adjusted data. Then, the local server uploads the adjusted data to the management server, thereby adjusting the test result data of the Nth step. That is, the adjusted data overwrites and replaces the parts of the Nth test result data in the management server that differ from the (N+1)th test result data, thus updating the test result data in the management server.

[0105] By using the above method to update the test results data to the management server, it is not necessary to overwrite all the data, which can reduce the data processing pressure on the server when the local server uploads the data to the management server.

[0106] Reference Figure 4 Furthermore, to facilitate viewing historical data in the management server, in another embodiment, after obtaining the test result data of step N, the following is also included:

[0107] S31. Generate an M-level version number based on the test result data of step N;

[0108] S32. Generate an M+1 version number based on the M-level version number and the test result data of the new Nth step, and retain the test result data of the Nth step and the M-level version number.

[0109] Specifically, after the management server obtains the test result data of step N, it generates an M-level version number based on the test result data of step N. That is, when the management server obtains the test result data for the first time, it generates a first-level version number; when it obtains new test result data, it obtains a second-level version number; when the test result data is updated again, it obtains a third-level version number, and so on. In other words, an M+1-level version number is generated based on the initial version number and the new test result data of step N.

[0110] Furthermore, the test record data and M-level version number of step N are retained. That is, each time the test result data is updated, the original data and the original version number are retained for easy retrieval from the management server later.

[0111] Reference Figure 5 Furthermore, during wafer testing, the data does not change frequently; therefore, the management server does not need to obtain data from the local server in real time. Thus, in another embodiment, before step S1 (i.e., obtaining the test result data and test equipment location of the Nth step process from the local server of the Nth step of wafer testing), the following step is also included:

[0112] S41. Obtain the previous acquisition time of the test result data of step N of the wafer testing process from the local server;

[0113] S42. Get the current time;

[0114] S43. Obtain the interval duration based on the current time and the time of acquisition;

[0115] S44. Determine whether the interval duration is greater than or equal to the preset duration;

[0116] S45. If the interval duration is greater than or equal to the preset duration, then obtain the data acquisition command;

[0117] S46. Based on the data acquisition command, obtain the test result data of the Nth step of the wafer testing process from the local server of the Nth step process;

[0118] S47. If the interval is less than the preset duration, the data acquisition command will not be retrieved.

[0119] Specifically, before obtaining the test result data and test equipment location of step N, the system obtains the previous acquisition time of the test result data of step N obtained by the local server of step N through wafer testing, which is the time when the management server last updated the data. Then, it obtains the current time and calculates the interval between the current time and the acquisition time, which is the absolute value of the value obtained by subtracting the acquisition time from the current time.

[0120] Then, it is determined whether the interval duration is greater than or equal to the preset duration, that is, whether the time to obtain the next data has been reached. If the interval duration is less than the preset duration, it proves that the time to obtain the next data has not been reached. At this time, the data acquisition instruction is not obtained. The data acquisition instruction can be obtained by preset and then calling, or it can be generated directly.

[0121] If the interval is greater than or equal to the preset duration, it indicates that the next data can be acquired. Therefore, a data acquisition command is obtained and sent to the corresponding local server. The local server then uploads the test results data of step N and the location of the test equipment to the management server according to the data acquisition command. This reduces resource consumption, lowers the data processing pressure on the management server and local server, and consequently reduces energy consumption.

[0122] Reference Figure 6 Furthermore, to facilitate locating the test device where the error occurred, in another embodiment, the synchronization method further includes:

[0123] S51. Obtain the test equipment parameters for the Nth step of the wafer testing process from the local server;

[0124] S52. Determine whether the test equipment parameters are the same for all steps in step N;

[0125] S53. If they are different, then obtain the location of the test equipment with different test equipment parameters based on the test equipment parameters.

[0126] Specifically, under normal circumstances, the parameters of the same wafer testing equipment are the same in the same step of the wafer production testing process. If they are different, it may be that the test parameters of the testing equipment have been incorrect or have been modified by humans. In order to facilitate the staff to confirm, the test equipment parameters of the Nth step of the wafer testing process are first obtained from the local server of the Nth step process. That is, the testing equipment uploads its own test parameters to the local server, and then the local server uploads them to the management server, so that the corresponding test equipment parameters can be determined.

[0127] Then, it is determined whether the test equipment parameters for all Nth step processes are the same, that is, whether the test equipment parameters for the same step process in all regions are the same. This allows us to determine whether the test equipment parameters are set identically and whether the wafer test results are accurate. Of course, this process is also set according to a preset interval, the size of which can be adjusted according to actual conditions, such as half an hour or an hour.

[0128] If they are the same, no further action is needed. If they are different, it indicates that the relevant parameters of the test equipment may be incorrect. In this case, the location of the test equipment with different parameters should be obtained based on the test equipment parameters, which include the corresponding test equipment code. After comparing the code with the code location table, the device location corresponding to the corresponding code can be identified, thus obtaining the test equipment location.

[0129] Finally, the management server outputs this location to other display devices, such as monitors or terminal devices with displays, so as to remind staff and facilitate their management of the corresponding test equipment according to the obtained test equipment location.

[0130] Reference Figure 7 To further determine the cause of the parameter differences, in another embodiment, after obtaining the locations of the test devices with different test device parameters based on the test device parameters, the method further includes:

[0131] S61. Obtain adjustment records of different test equipment parameters for the same process;

[0132] S62. Based on the adjustment records, determine whether the adjustment of test equipment parameters for test equipment with different parameters is standardized;

[0133] S63. If not in compliance with regulations, an alarm message will be generated based on the location of the test equipment.

[0134] Specifically, after obtaining the locations of different test equipment based on the test equipment parameters, the adjustment records of different test equipment parameters for the same process are obtained. Specifically, the test equipment can upload the parameter adjustment records to the local server, and then the local server can upload them to the management server.

[0135] Then, based on the adjustment records, determine whether the parameter adjustments for different test equipment are standardized. Specifically, determine whether the parameter adjustments were performed correctly only after entering and confirming the change password; that is, check if the adjustment records show a log entry of the correct change password. If so, the parameter adjustments are standardized; otherwise, they are not.

[0136] If the parameters are correct, no further action is needed. If they are incorrect, it indicates an error in the adjustment of the test equipment parameters. Therefore, after obtaining the location of the test equipment, an alarm message is generated based on the location. The alarm message can be sent to the display screen or a terminal device with a display screen as a warning message after obtaining the location of the test equipment, thereby prompting relevant personnel to handle the problem in a timely manner.

[0137] Reference Figure 8 Furthermore, in another embodiment, if the test equipment parameters are adjusted to specifications, the method further includes:

[0138] S71. Obtain the test result data of the adjusted test equipment as the adjustment test data;

[0139] S72. Adjust the test data to cover the test base data of the local server where the different test equipment of other next-step procedures are located.

[0140] Specifically, when the test equipment parameters are adjusted to the specified standard, the test result data of the adjusted test equipment is obtained as the adjusted test data. That is, after the parameter adjustment, the test equipment uploads the test result data obtained from wafer testing to the local server and then to the management server to obtain the adjusted test data.

[0141] Then, the adjusted test data overwrites the test result data of the local servers where different test devices are located for the next step of the process. In other words, the management server determines the test process represented by the test device whose test data is adjusted. This can be obtained through a preset location-process table, which includes several device locations and corresponding processes for each location. The corresponding process is then determined by comparing the location of the test device with its position in the location-process table.

[0142] Finally, the location of the next process step is obtained. The method is to determine the sequence of processes according to the preset process sequence table, thereby determining the next process step. Then, the process corresponding to the next process step is obtained through the location process table. The equipment location is determined according to the corresponding process step. Then, the corresponding local server is found through the equipment location. The adjusted test data is overwritten with the basic test data of the corresponding local server to provide accurate test parameters for the next process step, thereby improving the accuracy of wafer testing.

[0143] The implementation principle of the wafer test data synchronization method in this application embodiment is as follows: First, the test result data and test equipment location of the Nth step of the wafer test are obtained through the local server of the Nth step process. Then, it is determined whether the test equipment location of the Nth step process is the same as that of the N+1th step process. If they are the same, the test result data of the Nth step process is used as the test basis data of the N+1th step process through the local server of the Nth step process; if they are different, the test result data of the Nth step process is sent to the local server of the N+1th step process as the test basis data of the N+1th step process. This method eliminates the need for manual data export, thereby improving the timeliness of data transmission, reducing the possibility of errors during manual operation, and ensuring the accuracy of the test data as much as possible.

[0144] This application also discloses a wafer test data synchronization system that can achieve the same technical effect as the wafer test data synchronization method described above.

[0145] Reference Figure 9 The wafer test data synchronization system includes:

[0146] Management server 3, local server 2, and test device 1;

[0147] The test equipment 1 is used to generate the test result data and test equipment location for the Nth step of the wafer testing process;

[0148] The local server 2 is used to obtain the test result data and the location of the test equipment;

[0149] The management server 3 is used to receive the test result data and the location of the test equipment sent by the local server 2;

[0150] The management server 3 is also used to determine whether the test equipment location of step N is the same as that of step N+1. If they are the same, the test result data of step N is used as the test base data of step N+1 through the local server 2 of step N. If they are different, the test result data of step N is sent to the local server 2 of step N+1 as the test base data of step N+1.

[0151] Specifically, during the production testing of the wafer, test equipment 1 generates test result data and test equipment location for the Nth step of the wafer testing process, and then uploads the test result data and test equipment location to local server 2. Local server 2 receives and stores the test result data and test equipment location.

[0152] Then, local server 2 uploads the test result data and test equipment location to management server 3. Management server 3 receives the test result data and test equipment location, and determines whether the test equipment location in step N is the same as the test equipment location in step N+1.

[0153] If they are the same, the local server 2 of step N will use the test result data of step N as the test basis data of step N+1; if they are different, the management server 3 will send the test result data of step N to the local server 2 of step N+1 as the test basis data of step N+1.

[0154] This allows for data exchange and transmission via management server 3, eliminating the need for manual data export. This improves the timeliness of data transmission, reduces the likelihood of errors during manual operation, and ensures the accuracy of test data as much as possible.

[0155] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A method for synchronizing wafer test data, characterized in that, include: The test result data and test equipment location of the Nth step are obtained from the local server of the Nth step of the wafer testing process. Determine whether the location of the test equipment in step N is the same as the location of the test equipment in step N+1. If they are the same, the test result data of step N is used as the test basis data of step N+1 through the local server of step N. If they are different, the test result data of step N is sent to the local server of step N+1 as the test basis data of step N+1. The acquisition of test result data for step N includes: The test result data for the Nth test and the test result data for the N+1th test are obtained from the local server in the Nth step. The local server in step N determines whether the test result data of the (N+1)th test is the same as the test result data of the Nth test. If they are different, the local server of the Nth step process will be used to obtain the test result data of the N+1th test and the adjustment data of the Nth test result data. The test result data of the Nth step is adjusted based on the adjustment data to obtain new test result data for the Nth step. The process, following the acquisition of the test result data for step N, also includes: Generate an M-level version number based on the test results data from step N; An M+1 version number is generated based on the M-level version number and the test result data of the new Nth step, while retaining the test result data of the Nth step and the M-level version number.

2. The synchronization method according to claim 1, characterized in that, The step of sending the test result data of the Nth step to the local server of the N+1th step as the test basis data for the N+1th step includes: Obtain the basic test data for the N+1th step; Determine whether the test data of the (N+1)th step is the same as the test result data of the Nth step. If they are different, then obtain the difference data between the test base data of the N+1th step and the test result data of the Nth step; The difference data is sent to the local server of the N+1 step to update the test base data of the N+1 step.

3. The synchronization method according to claim 1, characterized in that, Before the local server in the Nth step of the wafer testing process obtains the test result data and test equipment location, the process further includes: Get the previous time when the local server retrieved the test result data for the Nth step of the wafer testing process; Get the current time; The interval duration is obtained based on the current time and the acquisition time. Determine whether the interval duration is greater than or equal to a preset duration; If the interval duration is greater than or equal to the preset duration, then a data acquisition instruction is obtained; Based on the data acquisition instructions, the test result data of the Nth step of the wafer testing process is obtained from the local server of the Nth step process. If the interval duration is less than the preset duration, then no data acquisition instruction will be obtained.

4. The synchronization method according to claim 1, characterized in that, Also includes: The test equipment parameters for the Nth step of the wafer testing process are obtained from the local server. Determine whether the test equipment parameters are the same for all the steps in step N; If they are different, then the locations of the test devices with different test device parameters are obtained based on the test device parameters.

5. The synchronization method according to claim 4, characterized in that, After obtaining the locations of test devices with different test device parameters based on the test device parameters, the method further includes: Obtain adjustment records of different test equipment parameters for the same process; Based on the adjustment records, determine whether the adjustment of the test equipment parameters of the test equipment with different parameters is standardized; If the test is not performed correctly, an alarm message will be generated based on the location of the test equipment.

6. The synchronization method according to claim 5, characterized in that, Also includes: If the test equipment parameters are adjusted according to specifications, the test result data of the adjusted test equipment will be obtained as the adjustment test data; The adjusted test data will overwrite the test base data of the local server where the different test devices are located in other next-step processes.

7. A system for synchronizing wafer test data, characterized in that, include: Management server (3), local server (2), and test equipment (1); The test equipment (1) is used to generate test result data and test equipment location for the Nth step of wafer testing. The local server (2) is used to obtain the test result data and the location of the test equipment; The management server (3) is used to receive the test result data and the location of the test equipment sent by the local server (2); The management server (3) is also used to determine whether the location of the test equipment (1) in the Nth step is the same as the location of the test equipment in the N+1th step; if they are the same, the test result data of the Nth step is used as the test base data of the N+1th step through the local server (2) of the Nth step; if they are different, the test result data of the Nth step is sent to the local server (2) of the N+1th step as the test base data of the N+1th step. The local server (2) performs the following steps: The test result data for the Nth test and the test result data for the N+1th test are obtained from the local server in the Nth step. The local server in step N determines whether the test result data of the (N+1)th test is the same as the test result data of the Nth test. If they are different, the local server of the Nth step process will be used to obtain the test result data of the N+1th test and the adjustment data of the Nth test result data. The test result data of the Nth step is adjusted based on the adjustment data to obtain new test result data for the Nth step. After obtaining the test result data of the Nth step, the local server (2) also performs the following steps: Generate an M-level version number based on the test results data from step N; An M+1 version number is generated based on the M-level version number and the test result data of the new Nth step, while retaining the test result data of the Nth step and the M-level version number.

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