Position calibration method for positioning tooling and manipulator

Abstract

The present application discloses a positioning tool and a method for calibrating the position of a manipulator, wherein the positioning tool comprises a base, a clamping assembly and a positioning assembly; the base is used to be detachably arranged on a positioning position of a carrying surface of a carrier plate in a semiconductor process equipment; the clamping assembly comprises a support member and a clamping member, the support member is slidably arranged on the base, the clamping member is arranged on the side of the support member away from the base, a positioning portion is provided on the support member, the positioning portion is used to cooperate with the corresponding position of the manipulator to position the manipulator, the clamping member and the support member are used to clamp and fix the manipulator; the positioning assembly is provided on the support member, a limiting portion is provided on the base, the positioning assembly and the limiting portion cooperate to fix the support member at the calibration position of the base. The above-mentioned positioning tool can solve the problem that the current method of correcting the position of the manipulator has poor accuracy and is prone to have serious adverse effects on the cleanliness of the wafer.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a method for calibrating the position of a positioning tool and a manipulator. Background Art

[0002] The epitaxial process is an important process in semiconductor manufacturing. The epitaxial process is usually carried out in epitaxial equipment. Since particle contamination has a decisive influence on the yield of the epitaxial process, the cleanliness requirements for each link in the epitaxial process are relatively high.

[0003] During the epitaxial growth process, a robotic arm is typically used to transport wafers within the epitaxial growth equipment. Wafers stored in cassettes are removed, purged, and corrected before being transferred to a vacuum chamber for transition between atmospheric and vacuum environments. Currently, the robotic arm's position is typically adjusted using a steel ruler, and correction is achieved by manually manipulating the arm's displacement in three dimensions. This correction method suffers from poor accuracy, and the ruler and the user's hand can easily come into contact with the robotic arm, causing contamination and severely negatively impacting wafer cleanliness. Summary of the Invention

[0004] The present application discloses a method for calibrating the position of a positioning tool and a robot arm, so as to solve the problem that the current method of correcting the position of the robot arm has poor accuracy and is likely to have a serious adverse effect on the cleanliness of the wafer.

[0005] In order to solve the above problems, this application adopts the following technical solutions:

[0006] In a first aspect, the present application discloses a positioning tool for calibrating the position of a robot in a semiconductor process equipment, the positioning tool comprising a base, a clamping assembly, and a positioning assembly;

[0007] The base is used to be detachably arranged on a positioning position of a carrying surface of a carrying plate in the semiconductor process equipment;

[0008] The clamping assembly includes a support member and a clamping member, the support member is slidably arranged on the base, the clamping member is arranged on the side of the support member away from the base, the support member is provided with a positioning portion, the positioning portion is used to cooperate with the corresponding position of the manipulator to position the manipulator, and the clamping member and the support member are used to clamp and fix the manipulator;

[0009] The positioning assembly is arranged on the support member, and a limiting portion is provided on the base. The positioning assembly and the limiting portion cooperate to fix the support member at a calibration position of the base.

[0010] In a second aspect, the present application discloses a position calibration method for a manipulator, which is applied to the above-mentioned positioning tooling, and the position calibration method includes:

[0011] The base of the positioning tool is arranged at a positioning position on the carrying surface of the carrying plate in the semiconductor process equipment;

[0012] Positioning the manipulator at a corresponding position of the positioning portion, and clamping and fixing the manipulator between the support member and the clamping member;

[0013] Controlling the support member to drive the manipulator to slide relative to the base until the positioning assembly and the limiting portion engage;

[0014] The relative position information between the robot arm and the carrier plate is obtained and recorded.

[0015] The technical solution adopted in this application can achieve the following beneficial effects:

[0016] The embodiment of the present application discloses a positioning fixture for calibrating the position of a manipulator in a semiconductor process equipment. In the positioning fixture, the base can be detachably set on the positioning position of the carrying surface of the carrier plate in the semiconductor process equipment, so that the positioning fixture and the carrier plate serving as the position reference of the manipulator form a relatively fixed relationship, providing a position reference for the subsequent position calibration of the manipulator. In addition, the clamping assembly in the positioning fixture can clamp and fix the manipulator through its support member and clamping member, and in the process of clamping and fixing the manipulator, the manipulator is positioned by the positioning portion of the clamping assembly, ensuring that the relative position between the manipulator and the clamping assembly is unique before each position calibration of the manipulator, thereby ensuring that the manipulator has a high position calibration accuracy. At the same time, the support member in the clamping assembly is slidably set on the base, so that in the process of adjusting the relative position between the manipulator and the base, the clamping assembly can be used as a medium to drive the manipulator to move in the horizontal direction relative to the base and find the calibration position. In this process, since the manipulator will not come into contact with other living things or objects, the manipulator will not be contaminated during the position calibration process, ensuring that the manipulator has a high degree of cleanliness, thereby ensuring that the yield rate of wafers that need to come into contact with the manipulator in the future is high. Accordingly, in the process of the manipulator moving in the horizontal direction relative to the base, if the support member (or manipulator) is at the calibration position of the base, the positioning assembly on the support member can cooperate with the limiting part on the base to fix the support member at the calibration position of the base, completing the position calibration of the manipulator, and by recording the position information parameters of the manipulator at this time, the position information parameters of the manipulator relative to the carrier plate when in the calibration state can be obtained, providing a reference for subsequent processing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0018] Figure 1 This is an exploded schematic diagram of the positioning tool disclosed in the embodiment of this application;

[0019] Figure 2 This is a schematic structural diagram of the base and upper cover in the positioning tool disclosed in the embodiment of the present application;

[0020] Figure 3 This is a schematic structural diagram of the base in another direction in the positioning tool disclosed in an embodiment of the present application;

[0021] Figure 4 for Figure 2 The structure shown is a schematic cross-sectional view in the AA direction;

[0022] Figure 5 for Figure 3 The structure shown is a schematic cross-sectional view in the BB direction;

[0023] Figure 6 for Figure 2 The structure shown is a schematic cross-sectional view in the CC direction;

[0024] Figure 7 A schematic diagram of a partial structure including a clamping assembly, etc., of a positioning tool disclosed in an embodiment of the present application;

[0025] Figure 8 for Figure 7 A schematic diagram of the structure shown in another direction;

[0026] Figure 9 for Figure 8 The structure shown is a schematic cross-sectional view in the AA direction;

[0027] Figure 10 This is an assembly diagram of the positioning tool disclosed in the embodiment of this application;

[0028] Figure 11 A schematic diagram of the self-positioning process of the positioning tool disclosed in an embodiment of the present application;

[0029] Figure 12 This is a schematic diagram of the process of positioning the manipulator using the positioning tool disclosed in the embodiment of the present application;

[0030] Figure 13 A schematic structural diagram of a reference device that cooperates with the positioning tool disclosed in the embodiment of the application;

[0031] Figure 14This is a flow chart of the position calibration method of the manipulator disclosed in an embodiment of the present application.

[0032] Description of reference numerals:

[0033] 100-base, 110-first movable groove, 111-first groove body, 112-second groove body, 113-transition groove body, 120-pin hole, 130-first positioning member, 140-crane positioning baseline, 150-guide notch,

[0034] 200-upper cover, 210-second movable slot,

[0035] 310-support body, 320-clamping piece, 330-profile part,

[0036] 410-slider, 420-connecting shaft,

[0037] 510- positioning pin, 520- elastic member, 530- limiting member, 540- connecting member, 550- limiting boss,

[0038] 910 - carrier plate, 911 - second positioning member, 920 - robot arm. DETAILED DESCRIPTION

[0039] To make the purpose, technical solutions, and advantages of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with the specific embodiments of this application and the corresponding drawings. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0040] The technical solutions disclosed in various embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0041] The present application discloses a positioning tool that can be used in the robot position calibration process in the semiconductor manufacturing process. Specifically, in the process of epitaxial growth,

[0042] The wafers before processing are stored in a cassette and hoisted to the wafer loading device of the EFEM (Equipment Front-End Module) by an overhead crane. The robot in the EFEM takes the wafers in the atmospheric environment out of the cassette, and after purging and correction, transfers them to the wafer pre-evacuation chamber for conversion between atmospheric and vacuum environments, so as to continue the next process. During this process, it is necessary to ensure that the robot has a precise wafer picking and placing position.

[0043] As described above, the positioning fixture disclosed in the embodiment of the present application is an instrument for calibrating the position of the manipulator in the semiconductor process equipment. The positioning fixture can be installed on the carrier plate in the semiconductor process equipment to provide a calibration function for the position of the manipulator relative to the carrier plate. To this end, it is necessary to form a positioning relationship between the positioning fixture and the carrier plate. Specifically, the positioning fixture can be supported as a whole on the bearing surface of the carrier plate, so that the two form a positioning relationship in the vertical direction, so that the positioning fixture can be positioned at the positioning position of the bearing surface of the carrier plate. More specifically, at least three second positioning members 911 can be provided on the bearing surface, and each second positioning member 911 is used to cooperate with the first positioning member 130 on the positioning fixture to form a positioning relationship with the bearing surface in the horizontal direction, so as to ensure that the positioning fixture and the carrier plate can form a relatively fixed state. On this basis, the positioning fixture can be used to provide a position calibration function for the manipulator.

[0044] like Figures 1-12 As shown, the positioning tool disclosed in the embodiment of the present application includes a base 100, a clamping assembly and a positioning assembly.

[0045] The base 100 can be removably mounted on the carrier surface of the carrier plate 910 in the semiconductor processing equipment, providing a positioning reference for the entire positioning tool. Alternatively, the base 100 can be secured to the carrier plate 910 using removable fasteners such as multiple latches or bolts. Furthermore, a horizontal groove engraved on the top surface of the base 100 serves as the overhead crane positioning baseline 140, which serves as a lateral positioning reference for the overhead crane during installation.

[0046] In another embodiment of the present application, Figures 1-6 As shown, the base 100 is provided with at least three first positioning members 130. The first positioning members 130 can be a structure forming a positioning relationship between the base 100 and the carrier plate 910, such as Figure 13 As shown, a second positioning member 911 is provided on the supporting plate 910, and multiple first positioning members 130 and multiple second positioning members 911 are provided. The multiple first positioning members 130 and the multiple second positioning members 911 are plugged in and matched one by one, so that the base 100 and the supporting plate 910 can form a relatively fixed relationship in the horizontal direction.

[0047] Specifically, one of the first positioning member 130 and the second positioning member 911 can be a columnar structure, and the other can be a hole-shaped structure. By plugging and fitting multiple first positioning members 130 and multiple second positioning members 911 in a one-to-one correspondence, a horizontal positioning function can be provided for the base 100 and the carrier plate 910. It should be noted that the thickness direction of the base 100 can be the aforementioned vertical direction, and the horizontal direction is a direction perpendicular to the thickness direction of the base 100.

[0048] Optionally, the number of the first positioning members 130 is at least three, and the first positioning members 130 are arranged around the vertical direction. When the number of the first positioning members 130 and the second positioning members 911 is greater, the stability of the relative fixed relationship between the base 100 and the carrier plate 910 in the horizontal direction can be further improved. Furthermore, when the second positioning member 911 is a cylindrical structure, the first positioning member 130 can be a long strip groove structure. According to the number of the first positioning members 130, the extension direction of the first positioning member 130 can be determined accordingly, so that multiple first positioning members 130 can be adapted to second positioning members 911 of different size distributions, thereby improving the scope of application of the positioning tooling. For example, when the number of the first positioning members 130 is three, the line connecting the three second positioning members 911 can form an equilateral triangle. In this case, the extension direction of the first positioning member 130 can be the direction of the line connecting the corresponding second positioning member 911 and the center of the aforementioned triangle.

[0049] In addition, when the first positioning member 130 is a groove-shaped structure, the first positioning member 130 can include a trapezoidal guide groove and a linear positioning groove, and the larger groove in the trapezoidal guide groove can be located on the lower surface of the base 100, so that the trapezoidal guide groove can provide a guiding function for the second positioning member 911, thereby reducing the difficulty of matching between the first positioning member 130 and the second positioning member 911.

[0050] The clamping assembly is a component used to clamp the manipulator 920 in the positioning tooling. The clamping assembly includes a support member and a clamping member 320. The support member is slidably arranged on the base 100, so that under the action of the clamping assembly, the staff can directly use the clamping assembly to change the relative position between the manipulator 920 and the base 100, thereby preventing the staff from directly contacting the manipulator 920 and further preventing the manipulator 920 from being contaminated by the staff. Optionally, the upper surface of the base 100 is a plane, which allows the support member to slide on the upper surface of the base 100, thereby changing the relative position between the clamping assembly and the base 100. In order to improve the stability of the positional relationship between the clamping assembly and the base 100 in the vertical direction, the support member and the base 100 can be formed into a magnetically coupled relationship to position the clamping assembly and the base 100 relative to each other in the vertical direction.

[0051] The clamping member 320 is disposed on the side of the support member facing away from the base 100. By making the support member and the clamping member 320 adjustable in the thickness direction of the base 100, it is ensured that the two can clamp and fix the manipulator 920. Specifically, the support member and the clamping member 320 can both be plate-shaped structural members, and a spring or other device can be provided between the two. This allows the support member and the clamping member 320 to increase the distance between the support member and the clamping member 320 by stretching the spring, allowing the manipulator 920 to extend into the space between the two. Subsequently, under the elastic action of the spring itself, the manipulator 920 can be clamped and fixed between the clamping member and the support member.

[0052] Furthermore, a positioning portion is provided on the support member, which is used to cooperate with the corresponding position of the manipulator 920 to position the manipulator 920, thereby ensuring that before each position calibration of the manipulator 920 using the positioning fixture, the relative position between the manipulator 920 and the clamping assembly of the positioning fixture is unique, thereby ensuring the calibration accuracy of the positioning fixture. Optionally, the positioning portion is a positioning mark, which provides a calibration function for the relative position relationship between the manipulator 920 and the support member by engraving the positioning mark on the surface of the support member, ensuring that when the relative position between the clamping assembly and the base 100 is aligned, the relative position between the manipulator 920 and the base 100 is also aligned.

[0053] In order to ensure that the clamping assembly and the base 100 are positioned in a thickness direction of the base 100, a positioning assembly is provided on the support member, and a stopper is provided on the base 100, so that the positioning assembly cooperates with the stopper to fix the support member at a calibrated position on the base 100. In other words, based on the relative positional relationship between the manipulator 920 and the base 100 when they are in an aligned state, a stopper is pre-formed on the base 100, and the positioning assembly is provided at a corresponding position on the support member, so that when the positioning assembly and the stopper are in a mating relationship, the manipulator 920 and the base 100 are confirmed to be aligned.

[0054] Specifically, the limiting portion can be a limiting groove, and the positioning assembly can include a positioning block. By setting the structure and number of the positioning block and the limiting groove, when the positioning block and the limiting groove cooperate with each other, the support member and the base 100 can form a relatively fixed relationship in both the horizontal direction and the direction around the vertical direction. For example, the positioning block and the limiting groove are both non-circular structural members, and there is only one of each. The limiting groove is recessed on the upper surface of the base 100, and the positioning block is protruding on the lower surface of the clamping member. During the sliding process of the clamping member relative to the base 100, when the position of the positioning block corresponds to the position of the limiting groove, the positioning block can slide into the limiting groove, thereby limiting the clamping member and the base 100 in the horizontal direction and the direction around the vertical direction. Alternatively, there may be multiple positioning blocks and multiple limiting grooves. In this case, the multiple positioning blocks correspond to the multiple limiting grooves one-to-one. Even if the positioning blocks and the corresponding limiting grooves are circular structures, the multiple positioning blocks can be matched in the multiple limiting grooves one-to-one, so that the clamping member and the base 100 are mutually limited in the horizontal direction and in the direction around the vertical direction. Of course, the structural forms of the positioning assembly and the limiting portion can also be other, but for the sake of brevity, they are not listed here one by one.

[0055] In addition, when the above-mentioned technical solution is used to position the clamping member and the base 100 relative to each other, after completing the position calibration of the manipulator 920 once, in order to ensure that the positioning tooling has the ability to perform the next position calibration of the manipulator 920, it is necessary to restore the clamping member and the base 100 to a state where they have the ability to slide relative to each other in the horizontal direction. Based on this, the clamping member can be restored to a state of relative sliding with the base 100 by applying a pulling force to the clamping member and causing the positioning block to disengage from the limit groove, thereby preparing for the next calibration function.

[0056] The embodiment of the present application discloses a positioning fixture for calibrating the position of a manipulator 920 in a semiconductor process device. In the positioning fixture, the base 100 can be detachably set on the positioning position of the carrying surface of the carrier plate 910 in the semiconductor process device, so that the positioning fixture and the carrier plate 910 serving as the position reference of the manipulator 920 form a relatively fixed relationship, providing a position reference for the subsequent position calibration of the manipulator 920. In addition, the clamping assembly in the positioning fixture can clamp and fix the manipulator 920 through its support member and clamping member 320, and in the process of clamping and fixing the manipulator 920, the manipulator 920 is positioned by the positioning portion of the clamping assembly, ensuring that before each position calibration of the manipulator 920, the relative position between the manipulator 920 and the clamping assembly is unique, thereby ensuring that the manipulator 920 has a high position calibration accuracy. At the same time, the support member in the clamping assembly is slidably set on the base 100, so that in the process of adjusting the relative position between the manipulator 920 and the base 100, the clamping assembly can be used as a medium to drive the manipulator 920 to move horizontally relative to the base 100 and find the calibration position. In this process, since the manipulator 920 will not come into contact with other living things or objects, the manipulator 920 will not be contaminated during the position calibration process, ensuring that the manipulator 920 has a high degree of cleanliness, thereby ensuring that the yield rate of the wafers that need to contact the manipulator 920 in the future is high. Accordingly, during the horizontal movement of the manipulator 920 relative to the base 100, if the support member (or manipulator 920) is at the calibration position of the base 100, the positioning component on the support member can cooperate with the limiting portion on the base 100 to fix the support member at the calibration position of the base 100, thereby completing the position calibration of the manipulator 920. By recording the position information parameters of the manipulator 920 at this time, the position information parameters of the manipulator 920 relative to the carrier plate 910 when the manipulator 920 is in the calibration state can be obtained, providing a reference for subsequent processing technology.

[0057] In order to reduce the difficulty of position calibration between the base 100 and the support, the range of relative sliding between the support and the base 100 can be limited to increase the probability of alignment of the calibration position of the support and the base, thereby reducing the difficulty of position calibration of the manipulator 920.

[0058] Specifically, a first movable groove 110 can be provided on the base 100. The first movable groove 110 is a structure of the base 100 for slidingly cooperating with the support member, allowing the support member to slide horizontally within the first movable groove 110 to adjust the relative position between the manipulator and the base 100. The specific shape and size of the first movable groove 110 can be determined based on the shape and size of the support member (the portion within the first movable groove 110), and ensure that the support member can move horizontally within the first movable groove 110. The specific shapes and sizes of the first movable groove 110 and the first movable groove 110 are not limited.

[0059] As described above, the limiting portion can be a limiting groove. More specifically, the limiting portion is a pin hole 120, which is provided on the base 100. Furthermore, the pin hole 120 is provided in the first movable groove 110 to ensure that the positioning assembly provided on the support member can cooperate with the pin hole 120. Specifically, the pin hole 120 extends toward the lower surface of the base 100. That is, the pin hole 120 is recessed relative to the first movable groove 110, so that when the positioning assembly extends into the pin hole 120, the pin hole 120 can provide a horizontal positioning function for the positioning assembly. The pin hole 120 can be a blind hole or a through hole, and the depth of the pin hole 120 can be determined according to actual conditions. Optionally, the depth of the pin hole 120 is greater than the vertical dimension of the portion of the positioning assembly located outside the support member, thereby ensuring a more stable plug-in fit between the positioning assembly and the pin hole 120 and improving the reliability of the positioning relationship between the base 100 and the support member.

[0060] As described above, the support member is used to slide with the base 100, and the support member is also used to clamp and fix the manipulator with the clamping member 320. To this end, the support member includes multiple parts, and the functions of the multiple parts are different. Specifically, the support member may include a support body 310, a slider 410 and a connecting shaft 420, wherein the slider 410 is fixedly connected to the support body 310 via the connecting shaft 420. Specifically, the support body 310, the slider 410 and the connecting shaft 420 can all be formed of a hard material such as metal, and any two adjacent ones of the slider 410, the connecting shaft 420 and the support body 310 can be formed by integral molding, or can be fixedly connected by welding or the like; of course, the aforementioned adjacent two can also be detachably fixedly connected by threaded connectors or the like.

[0061] As described above, a portion of the support member can extend into the first movable groove 110 so that the support member and the base 100 form a sliding fit relationship in the horizontal direction. Specifically, the slider 410 can be slidably set on the base 100, and the slider 410 is located in the first movable groove 110 of the base 100, so that the support member can slide relative to the base 100 in the horizontal direction. At the same time, the positioning assembly can be set on the slider 410. Optionally, the positioning assembly can be formed on the side of the slider 410 away from the connecting shaft 420 by a fixed connection method such as integral molding, so as to cooperate with the pin hole 120 formed on the bottom surface of the first movable groove 110. Of course, the positioning assembly can also have other structural forms and can be connected to the slider 410 by other assembly methods. Considering the simplicity of the text, it will not be described in detail here.

[0062] In the above embodiment, the support member can be slidably set on the upper surface of the base 100, or the support member can also be slidably set in the first movable groove 110 of the base 100 through its slider 410. In this type of technical solution, a certain downward pressure can be applied to the support member, or the support member and the base 100 can be magnetically coupled, so that the support member and the base 100 form a stable relative fixed relationship in the vertical direction, thereby ensuring that the manipulator 920 and the base 100 form a precise positional relationship in the vertical direction.

[0063] In another embodiment of the present application, the positioning fixture further comprises an upper cover 200, which is fixed and positioned above the base 100. The upper cover 200 is provided with a second movable groove 210, and a connecting shaft 420 is movably positioned in the second movable groove 210 in a direction perpendicular to the thickness of the base 100. That is, the connecting shaft 420 can move horizontally within the second movable groove 210. To this end, the connecting shaft 420 can be used to drive the slider 410 in the horizontal direction relative to the base 100 by driving the support body 310. The second movable groove 210 does not hinder the movement of the slider 410 in the first movable groove 110. Specifically, after the slider 410 is installed in the first movable groove 110, the upper cover 200 can be fixed to the base 100 using threaded connectors or the like. Of course, if both the base 100 and the upper cover 200 are formed of metal or other materials, welding can also be used to form a reliable fixed connection between the upper cover 200 and the base 100.

[0064] Furthermore, by adjusting the thickness of the slider 410 (i.e., the vertical dimension of the slider 410), after the upper cover 200 and the base 100 are vertically fixed, the slider 410 can be constrained between the upper cover 200 and the base 100 in the thickness direction of the base 100 (i.e., the vertical direction). More specifically, the thickness of the slider 410 can be made equivalent to the thickness of the first movable groove 110, so that the slider 410 can move horizontally in the first movable groove 110. When the above technical solution is adopted, after the slider 410 is installed in the first movable groove 110 and the upper cover 200 is fixed to the base 100, it is ensured that 410 cannot move vertically relative to the base 100, thereby reducing the difficulty of calibrating the position of the positioning tooling robot 920 and improving the convenience of the positioning tooling.

[0065] In addition, when adopting the above-mentioned technical solution, a receiving hole can be set at the bottom of the slider 410, and the positioning component can be movably placed in the receiving hole; and by making the size of the positioning component in the thickness direction larger than the size of the pin hole 120, when the slider 410 drives the positioning component to move to the position where the pin hole 120 is located in the base 100, a part of the positioning component can slide out of the receiving hole under the action of its own gravity and be embedded in the pin hole 120, providing a position anchoring effect for the slider 410, so that the support member and the base 100 form a relatively fixed relationship in the horizontal direction and the direction around the vertical direction.

[0066] Furthermore, the positioning assembly includes a positioning pin 510 and an elastic member 520, and the elastic member 520 is connected to the positioning pin 510, so that the positioning pin 510 can be movably connected to the slider 410 through the elastic member 520, and the elastic member 520 is configured to drive a portion of the positioning pin 510 to extend out of the receiving hole and into the pin hole 120, so as to fix the support body at the calibration position of the base 100.

[0067] Specifically, the shape and size of the receiving hole can be determined based on the shape and size of the positioning pin 510, ensuring that the positioning pin 510 can be received within the receiving hole. The elastic member 520 can be disposed between the positioning pin 510 and the slider 410, with opposite ends of the elastic member 520 connected to the bottoms of the receiving holes of the positioning pin 510 and the slider 410, respectively. When the positioning pin 510 does not extend out of the receiving hole, the elastic member 520 is in a compressed state. Therefore, when the positioning pin 510 is only acted upon by the force of the elastic member 520, a portion of the positioning pin 510 can be extended out of the receiving hole. When the positioning pin 510 is positioned in a manner consistent with the pin hole 120, a portion of the positioning pin 510 is driven into the pin hole 120, thereby securing the support member and the base 100 in the horizontal direction and in directions around the vertical direction. Of course, the elastic member 520 can also be disposed in other positions, and the state of the elastic member 520 can be changed accordingly. For the sake of brevity, this will not be discussed here.

[0068] In addition, in order to ensure that the plug-fit locating pin 510 and the pin hole 120 can form a limited fit relationship between the base 100 and the support member in the horizontal direction, the locating pin 510 and the pin hole 120 need to be of similar size to ensure that the locating pin 510 does not shake in the horizontal direction inside the pin hole 120. At the same time, in order to ensure that the plug-fit locating pin 510 and the pin hole 120 can form a limited fit relationship between the base 100 and the support member in the direction around the vertical direction, the number of locating pins 510 and the pin hole 120 can be multiple and one-to-one corresponding. In another embodiment of the present application, the images of the locating pin 510 and the pin hole 120 cut by a plane perpendicular to the thickness direction of the base 100 (i.e., a horizontal plane) are both non-circular structures, so that the locating pin 510 plugged into the pin hole 120 can provide a limiting effect in the horizontal direction and in the direction around the vertical direction for the base 100 and the clamping assembly.

[0069] Alternatively, the pin hole 120 may be a through hole, and a holding force may be applied to the pin 510 from the lower surface of the base 100, so that the positioning pin 510 overcomes the elastic force of the elastic member 520 and retracts into the receiving hole of the slider 410, thereby removing the restriction on the sliding movement of the slider 410 relative to the base 100. Of course, the pin hole 120 may also be a blind hole. In this case, the positioning pin 510 may be formed of a magnetic material, and the magnetic repulsive force may be utilized to enable the positioning pin 510 to overcome the elastic force of the elastic member 520. Alternatively, the receiving hole may be a through hole, and a pulling force may be applied to the positioning pin 510 from the end of the receiving hole facing away from the base 100, so that the positioning pin 510 overcomes the elastic force of the elastic member 520 and retracts into the receiving hole.

[0070] As described above, the positioning fixture includes a positioning assembly. Optionally, the positioning pin 510 and the elastic member 520 in the positioning fixture can be arranged outside the connecting shaft 420, and a guide member or other structure can be provided for the elastic member 520 to improve the movement stability of the elastic member 520 and the positioning pin 510. In another embodiment of the present application, Figure 9 As shown, connecting shaft 420 has an inner cavity. That is, connecting shaft 420 is a hollow structural member, and the inner cavity has an opening located at the end of connecting shaft 420 facing away from slider 410. In other words, the inner cavity can be connected to the end of connecting shaft 420 facing away from slider 410 through the opening, so that other devices can be installed in the inner cavity of connecting shaft 420 through the opening of connecting shaft 420. At the same time, by having the receiving hole penetrate the slider 410 along the thickness direction of base 100 and connecting the receiving hole to the inner cavity, the elastic member 520 can be accommodated in the inner cavity, and the elastic member 520 can also drive the positioning pin 510 to move relative to the slider 410. In this case, connecting shaft 420 can provide guidance and limiting functions for elastic member 520, thereby making the movement stability of elastic member 520 relatively higher.

[0071] To further enhance the stability of the fit between the elastic member 520 and the positioning pin 510, a limiting boss 550 is optionally provided in the middle of the positioning pin 510. Specifically, the positioning pin 510 and the limiting boss 550 can be integrally formed, with the limiting boss 550 protruding relative to the outer circumference of the positioning pin 510. In other words, the limiting boss 550 is larger than the positioning pin 510 in the horizontal direction. Therefore, during assembly of the positioning pin 510 and the elastic member 520, the elastic member 520 can be sleeved onto the positioning pin 510, thereby utilizing the positioning pin 510 to provide guidance and limiting functions for the elastic member 520, thereby enhancing the elastic stability of the elastic member 520 and the reliability of the fit between the positioning pin 510 and the elastic member 520. Accordingly, connecting one end of the elastic member 520 to the limiting boss 550 ensures that the elastic member 520 provides elasticity for the positioning pin 510, thereby driving a portion of the positioning pin 510 to extend out of the through-hole of the slider 410.

[0072] Furthermore, if a limiting boss 550 is provided on the periphery of the locating pin 510, one end surface of the limiting boss 550 can be limited to the surface of the slider 410 facing the support body 310. That is, the limiting boss 550 can restrict the relative sliding relationship between the locating pin 510 and the slider 410, preventing the locating pin 510 from completely moving to the side of the slider 410 facing away from the support member. More specifically, the horizontal dimension of the limiting boss 550 can be larger than the horizontal dimension of the receiving hole. If both the limiting boss 550 and the receiving hole are circular, the diameter of the limiting boss 550 can be larger than the diameter of the receiving hole. Of course, when determining the position of the limiting boss 550, it is necessary to ensure that, when the limiting boss 550 and the slider 410 are mutually limited, a portion of the locating pin 510 can pass through the receiving hole of the slider 410.

[0073] In the above-described technical solution, the support body 310 and the connecting shaft 420 can be integrally formed. To this end, the opening in the inner cavity of the connecting shaft 420, located at the end facing away from the slider 410, is open. After the elastic member 520 and the positioning pin 510 are installed in the inner cavity and the receiving hole through this opening, the support body 310 does not provide a position-limiting function for the elastic member 520 at the end of the inner cavity where the opening is located. To this end, the opposing ends of the elastic member 520 can be fixedly connected between the positioning pin 510 and the slider 410 by bonding or other means. When the positioning pin 510 does not extend out of the receiving hole of the slider 410, the elastic member 520 is in a stretched state. Therefore, when the positioning pin 510 is not subjected to any other forces (i.e., when the positioning pin 510 is aligned with the pin hole 120), the elastic member 520 can cause a portion of the positioning pin 510 to extend from the receiving hole of the slider 410 and into the pin hole 120 of the base 100.

[0074] Alternatively, the support body 310 and the connecting shaft 420 can be formed separately, and after the elastic member 520 is installed into the inner cavity and the accommodating hole through the opening of the inner cavity, the support body 310 and the connecting shaft 420 are fixedly connected in a detachable or non-detachable manner, so that one end of the elastic member 520 can abut against the support body 310, and the other end of the elastic member 520 can abut against the positioning pin 510, and the elastic member 520 is used to provide an elastic driving force for the positioning pin 510.

[0075] Optionally, a clearance hole can be provided on the support body 310 at a position corresponding to the inner cavity of the connecting shaft 420, so that the inner cavity of the connecting shaft 420 can communicate with the side of the support body 310 facing away from the slider 410 through the clearance hole. That is, the inner cavity of the connecting shaft 420 still has an opening communicating with the side of the support body 310. This ensures that the connection process between the support body 310 and the connecting shaft 420 does not hinder the installation process of the positioning pin 510 and the elastic member 520. In the above technical solution, the support body 310, the connecting shaft 420 and the slider 410 can be integrally formed by split-mold casting to improve the reliability of the fixed relationship between the three.

[0076] In the above technical solution, the positioning pin 510 and the elastic member 520 can be installed into the inner cavity of the connecting shaft 420 through the avoidance hole, with the opposite ends of the elastic member 520 connected between the slider 410 and the positioning pin 510. At the same time, when the positioning pin 510 does not extend outside the receiving hole of the slider 410, the elastic member 520 is in a stretched state. Furthermore, in the above technical solution, when it is necessary to separate the positioning pin 510 from the pin hole 120 of the base 100, the positioning pin 510 can be pulled through the avoidance hole, causing it to overcome the elastic force and escape from the pin hole 120, thereby achieving the purpose of separating the positioning pin 510 from the base 100.

[0077] Based on the above embodiment, the positioning assembly may further include a stopper 530, which is fixed to and covers the avoidance hole, that is, the opening of the connecting shaft 420. The stopper 530 provides a blocking effect for the positioning pin 510 and the elastic member 520 accommodated in the inner cavity of the connecting shaft 420, thereby improving the installation stability of the positioning pin 510 and the elastic member 520 in the connecting shaft 420. Specifically, the stopper 530 may be a plate-shaped structural member, and it may be formed of a hard material such as metal. The stopper 530 may be fixed to the support body 310 by a non-detachable method such as welding; or, as shown in FIG. Figure 9 As shown, the limit member 530 can be detachably fixed to the support body 310 by a connecting member 540 such as a screw, and blocks the opening of the connecting shaft 420 (that is, the avoidance hole of the support body 310), which facilitates the inspection and maintenance of the positioning pin 510 and the elastic member 520.

[0078] At the same time, when adopting the above technical solution, the elastic member 520 can also be abutted between the stopper 530 and the positioning pin 510. That is, one end of the elastic member 520 abuts the stopper 530, and the other end of the elastic member 520 abuts the positioning pin 510. This abutting installation method can reduce the difficulty of installing the elastic member 520, and the stability and reliability of the abutting installation method are relatively high. Accordingly, after both the positioning pin 510 and the elastic member 520 are installed in the inner cavity of the connecting shaft 420, the stopper 530 is fixedly connected to the support body 310, so that the elastic member 520 is confined between the positioning pin 510 and the stopper 530. Moreover, in the technical solution disclosed in this embodiment, when the positioning pin 510 does not extend out of the accommodating hole of the slider 410, the elastic member 520 is in a compressed state, and then when the positioning pin 510 is not subjected to other forces, the elastic member 520 can drive a part of the positioning pin 510 to extend out of the accommodating hole and into the pin hole 120.

[0079] As described above, the elastic member 520 can abut between the stopper 530 and the positioning pin 510. Of course, in other embodiments of the present application, the elastic member 520 can also abut between the support body 310 and the positioning pin 510. Specifically, with respect to the end of the elastic member 520 that engages with the positioning pin 510, the elastic member 520 can abut against the end surface of the positioning pin 510 that is closer to the support body 310. In this case, along a direction perpendicular to the thickness of the base 100, the size of the positioning pin 510 is larger than the size of the elastic member 520, ensuring that the elastic member 520 can abut against the end surface of the positioning pin 510 with relative stability. In another embodiment of the present application, as described above, a stopper boss 550 can be provided outside the positioning pin 510. To this end, the end of the elastic member 520 that faces away from the stopper 530 can abut against the end surface of the stopper boss 550 that faces away from the base 100. Under the guidance of the positioning pin 510, the elastic member 520 can also be more stable in its expansion and contraction.

[0080] As described above, the clamping member 320 and the support member (the support body 310) are adjustably connected in the thickness direction of the base 100, and the two can achieve the purpose of clamping the manipulator 920 by providing a spring with a tensioning effect. In the case where the positioning assembly includes a limiter 530 fixedly connected to the support body 310, the limiter 530 can be provided with an external thread, and the clamping member 320 can be provided with a threaded hole, so that the clamping member 320 can be adjusted vertically with the support body 310 through a threaded connection. In this case, on the one hand, the limiter 530 can provide a guiding effect for the clamping member 320, ensuring that the distance between any position on the clamping member 320 and the support body 310 is substantially equal. On the other hand, the limiter 530 can also provide the clamping member 320 with the ability to change its position, so that the clamping member 320 can provide a reliable clamping effect on the manipulator 920 by selecting a certain number of turns, ensuring that the manipulator 920 is clamped and fixed by the clamping member 320 and the support body 310.

[0081] As described above, the avoidance hole can be used to reset the positioning pin 510 (that is, the positioning pin 510 disengages from the pin hole 120 and retracts into the accommodating hole of the slider 410). In another embodiment of the present application, optionally, the pin hole 120 is arranged through the base 100 along the thickness direction of the base 100, that is, the pin hole 120 is a through hole. In this case, when it is necessary to separate the positioning pin 510 from the base 100, a supporting force can be applied to the positioning pin 510 located in the pin hole 120 through the side of the base 100 away from the clamping assembly, so that the positioning pin 510 overcomes the elastic force of the elastic member 520 and moves in the direction of disengaging from the pin hole 120 and retracting into the accommodating hole, thereby separating the positioning pin 510 from the base 100.

[0082] When using the above-described technical solution, the separation process between the positioning pin 510 and the base 100 is relatively simple and highly reliable. Furthermore, there is no need to provide a relief structure on the end of the connecting shaft 420 facing away from the slider 410, making the entire mechanism relatively more sealed. Furthermore, in this embodiment, the dimensions of the pin hole 120 and the positioning pin 510 can be restricted to minimize the possibility that a portion of the positioning pin 510 can pass through the through hole and then pass through the pin hole 120, thereby compromising the stability of the positioning relationship between the base 100 and the carrier plate 910.

[0083] As described above, the slider 410 and the connecting shaft 420 can be installed in the first movable groove 110 and the second movable groove 210, respectively. In the horizontal direction, the slider 410 can be moved in the first movable groove 110, and the connecting shaft 420 can be moved in the second movable groove 210. In addition, the slider 410 can be installed in the first movable groove 110 before the upper cover 200 and the base 100 are fixedly connected.

[0084] In another embodiment of the present application, the first movable groove 110 is provided with a first slot connected to the outside of the base 100, and the first slot is located on the side of the base 100 adjacent to the upper surface of the base 100, so that during the assembly of the positioning tooling, the slider 410 can be installed from the first slot into the first movable groove 110.

[0085] Correspondingly, the second movable groove 210 is provided with a second slot connected to the outside of the upper cover 200, and the second slot is located on the side of the upper cover 200 adjacent to the bottom surface of the upper cover 200, so that during the assembly of the positioning tooling, the connecting shaft 420 can be installed from the second slot into the second movable groove 210.

[0086] Furthermore, in order to reduce the probability of the slider 410 being disengaged from the first notch and the connecting shaft 420 being disengaged from the second notch during the movement of the clamping assembly relative to the base 100, Figure 1 As shown, along the horizontal direction perpendicular to the direction in which the first notch points to the first movable groove, the size of the first notch is made smaller than the size of the first movable groove, and the size of the second notch is made smaller than the size of the second movable groove. When this technical solution is adopted, while ensuring that there is a relatively large relative range of motion between the clamping assembly and the base 100, the sizes of the first notch and the second notch can also be ensured to be relatively small, thereby preventing the slider 410 from sliding out of the first notch and preventing the connecting shaft 420 from sliding out of the second notch. It should be noted that the horizontal direction perpendicular to the direction in which the first notch points to the first movable groove is a special horizontal direction in this application, which is perpendicular to the thickness direction of the base 100 and perpendicular to the direction in which the first notch points to the first movable groove. Correspondingly, it is also perpendicular to the direction in which the second notch points to the second movable groove.

[0087] As described above, since the positioning pin 510 is equipped with an elastic member 520, and the elastic member 520 is used to drive a portion of the positioning pin 510 to extend from the accommodating hole of the slider 410, before the slider 410 is matched with the base 100, the positioning pin 510 can be manually driven to retract into the accommodating hole of the slider 410, so that the sliding assembly can be extended into the first movable groove 110, and the slider 410 is limited by the upper cover 200 and is limited to each other in the thickness direction of the base 100.

[0088] In another embodiment of the present application, in order to reduce the difficulty of matching between the slider 410 and the base 100, as shown in FIG. Figure 4 As shown, the first movable groove 110 can include a first groove body 111, a second groove body 112, and a transition groove body 113. The first dimension of the first groove body 111 in the thickness direction is larger than the second dimension of the groove body in the thickness direction, and the distance between the bottom surface of the upper cover 200 and the groove bottom of the second groove body 112 is equal to the dimension of the slider 410 in the thickness direction. Therefore, along the thickness direction, the slider 410 can be constrained between the upper cover 200 and the second groove body 112.

[0089] At the same time, along the direction from the first slot body 111 to the second slot body 112, the size of the transition slot body 113 in the thickness direction of the base 100 gradually decreases from the first size to the second size, the transition slot body 113 is connected between the first slot body 111 and the second slot body 112, and the transition slot body 113 is connected to the first slot opening of the first movable slot 110 through the first slot body 111.

[0090] That is, different positions on the first movable groove 110 have different dimensions in the thickness direction of the base 100. As the slider 410 moves from the slot of the first movable groove 110 into the first movable groove 110 and continues to go deeper, the dimension of the first movable groove 110 in the thickness direction of the base 100 tends to decrease, and is eventually reduced to a dimension that can limit the movement of the slider 410 relative to the base 100 in the thickness direction of the base 100 (that is, the slider 410 and the second groove body 112 are in a state of upper limit cooperation in the thickness direction).

[0091] Furthermore, when the elastic member 520 is in its natural state, the elastic member 520 can drive a portion of the positioning pin 510 to extend from the receiving hole of the slider 410 and to be located on the side of the slider 410 facing away from the support body 310. Based on the first movable groove 110 of the above-described structure, in the embodiment of the present application, the portion of the positioning pin 510 extending outside the slider 410 can be made equal to or less than the difference between the first dimension and the second dimension in the thickness direction of the base 100. In other words, even when the elastic member 520 is in its natural state, the portion of the positioning pin 510 extending outside the slider 410 and the slider 410, as a combined structure, can extend through the first notch of the first movable groove 110 and into the first groove body 111 of the first movable groove 110. Moreover, as the slider continues to extend, the positioning pin 510 can cooperate with the transition groove body 113. Under the action of the transition groove body 113, the positioning pin 510 can be driven to overcome the elastic force and retract into the receiving hole of the slider 410. Until the slider 410 moves to the second groove body 112, the part of the positioning pin 510 outside the slider 410 can be completely retracted. By continuously moving and rotating the slider 410, the receiving hole of the slider 410 and the pin hole 120 of the base 100 can correspond to each other. At the same time, the positioning pin 510 can be extended out of the receiving hole of the slider 410 again under the action of the elastic member 520, and extended into the pin hole 120 of the base 100, thereby achieving the purpose of fixing the sliding assembly and the base 100 in a direction perpendicular to the thickness direction of the base 100 and in a direction around the thickness direction of the base 100.

[0092] In order to further improve the stability of the positioning relationship between the base 100 and the carrier plate 910, the number of the second positioning members 911 can be at least three, and the second positioning members 911 are arranged around the pin hole 120, so that the pin hole 120 is centered relative to the base 100, thereby improving the stability and reliability of the matching relationship between the clamping assembly and the base 100. In addition, as mentioned above, in order to ensure that the slider 410 can form a matching relationship with the base 100, the first notch and the second notch are both connected to the outside of the base 100. In this case, since the position of the pin hole 120 on the base 100 is relatively centered, and in order to ensure that the first movable groove 110 and the second movable groove 210 can both be connected to the outside of the base 100, the sizes of the first movable groove 110 and the second movable groove 210 may be relatively large.

[0093] To this end, in another embodiment of the present application, a guide notch 150 may be further provided on the base 100. The guide notch 150 is set through the base 100 in the thickness direction, and the guide notch 150 extends from the first notch of the first movable groove 110 to the edge of the base 100, thereby utilizing the guide notch 150 to reduce the size of the portion of the base 100 where the first movable groove 110 needs to be set, thereby making the size of the first movable groove 110 relatively small. On the one hand, it reduces the difficulty of positioning between the slider 410 and the base 100, and on the other hand, it can reduce the difficulty of processing the first movable groove 110, and can also make the entire positioning tooling lightweight.

[0094] Specifically, the specific shape and size of the guide notch 150 can be determined according to the overall shape of the base 100, and the shape and size of the guide notch 150 can be determined according to the number and distribution of the first positioning members 130 set on the base 100, to ensure that the existence of the guide notch 150 will not interfere with the layout of the first positioning members 130.

[0095] As described above, by providing positioning marks on the support member, the manipulator 920 can be positioned at a predetermined position on the support member, ensuring relatively high accuracy when the clamping assembly is used to characterize the position of the manipulator 920. In another embodiment of the present application, the support member may include a support body 310 and a contoured portion 330, with the contoured portion 330 fixedly connected to the support body 310. Specifically, the contoured portion 330 and the support body 310 may be integrally formed to enhance the reliability of the connection between the two.

[0096] At the same time, the outer edge of the contouring portion 330 forms a positioning portion, which is used to conform to the inner edge of the manipulator 920 and limit the position of the manipulator 920 in a direction perpendicular to the thickness direction of the base 100. Specifically, by making the contouring portion 330 protrude toward the side of the support body 310 facing the clamping member 320, and determining the shape of the inner edge of the contouring portion 330 based on the contour shape of the outer edge of the manipulator 920, the manipulator 920 can conform to the contouring portion 330 when the manipulator 920 is supported on the support body 310. The contouring portion 330 provides a limiting function for the manipulator 920 in a direction perpendicular to the thickness direction of the base 100, thereby forming a positioning relationship between the manipulator 920 and the support body 310, and ensuring that a relatively high-precision corresponding position relationship is formed between the manipulator 920 and the support body 310.

[0097] In addition, in order to ensure that the contoured portion 330 protruding from the support body 310 does not hinder the support body 310 and the clamping member 320 from providing a clamping effect to the manipulator 920, as shown in FIG. Figure 8As shown, at least a portion of the projections of the respective edges of the support body 310 and the clamping member 320 in the thickness direction of the base 100 are located outside the contoured portion 330, thereby ensuring that the support body 310 and the clamping portion can still provide clamping action for the manipulator 920 through their respective portions located outside the contoured portion 330.

[0098] Based on the positioning tool disclosed in any of the above embodiments, the embodiment of the present application further discloses a position calibration method for a manipulator, and the position calibration method can be applied to any of the above positioning tool to calibrate and record the position of the manipulator.

[0099] like Figure 14 As shown, and combined Figure 12 , position calibration methods include:

[0100] S1. Place the base of the positioning tool on the positioning position of the carrying surface of the carrier plate in the semiconductor process equipment. Specifically, positioning structures respectively provided on the base and the carrying surface can be used to provide positioning for the base and the carrying surface.

[0101] S2. Position the manipulator at the corresponding position of the positioning portion and clamp the manipulator between the support member and the clamping member. Specifically, by controlling the manipulator to move to the position of the positioning portion of the clamping assembly, and using the positioning portion to calibrate the position of the manipulator, the relative position between the manipulator and the clamping assembly is guaranteed to be unique during each position calibration of the manipulator. Subsequently, the clamping member and support member, which are adjustable in the vertical direction, can be used to provide a clamping and fixing function for the manipulator, so that the manipulator and the clamping assembly form a relatively fixed relationship, so that the clamping assembly can subsequently be used to drive the manipulator to move.

[0102] S3. Control the support member to drive the manipulator to slide relative to the base until the positioning assembly and the limiter engage. Specifically, a worker or a corresponding driving device can use the support member to drive the manipulator to move horizontally relative to the base to find the alignment position on the base. When the positioning assembly and the limiter engage, it can be considered that the clamping assembly and the base are aligned, and accordingly, the manipulator and the base are also aligned.

[0103] S4. Obtain and record the relative position information between the manipulator and the carrier plate. Specifically, the relative position information between the manipulator and the carrier plate can be obtained and recorded by a control device or other device to save the position information of the manipulator relative to the carrier plate for subsequent use.

[0104] The above embodiments of this application focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0105] The foregoing is merely an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should all be included within the scope of the claims of the present application.

Claims

1. A positioning tool for calibrating the position of a manipulator in a semiconductor process equipment, characterized in that: The positioning tooling comprises a base, a clamping assembly and a positioning assembly; The base is used to be detachably arranged on a positioning position of a carrying surface of a carrying plate in the semiconductor process equipment; The clamping assembly includes a support member and a clamping member, the support member is slidably arranged on the base, the clamping member is arranged on the side of the support member away from the base, the support member is provided with a positioning portion, the positioning portion is used to cooperate with the corresponding position of the manipulator to position the manipulator, and the clamping member and the support member are used to clamp and fix the manipulator; The positioning assembly is arranged on the support member, and a limiting portion is provided on the base. The positioning assembly and the limiting portion cooperate to fix the support member at a calibration position of the base.

2. The positioning tool according to claim 1, characterized in that: The support member includes a support body, a slider and a connecting shaft. The slider is fixedly connected to the support body through the connecting shaft. The slider is slidably arranged on the base, and the positioning assembly is arranged on the slider.

3. The positioning tool according to claim 2, characterized in that: The positioning tool also includes an upper cover, which is fixed and arranged above the base. The upper cover is provided with a second movable groove. The connecting shaft is movably arranged in the second movable groove in a direction perpendicular to the thickness direction of the base. The slider is located between the upper cover and the base at the upper limit of the thickness direction.

4. The positioning tool according to claim 3, characterized in that: The slider is provided with a receiving hole, the limiting portion is a pin hole, the positioning assembly includes a positioning pin and an elastic member, the elastic member is connected to the positioning pin, the positioning pin is movably connected to the slider through the elastic member, and the elastic member is configured to drive a part of the positioning pin to extend out of the receiving hole and into the pin hole, so as to fix the support body at the calibration position of the base.

5. The positioning tool according to claim 4, characterized in that: The connecting shaft is provided with an inner cavity, and the inner cavity has an opening located at one end of the connecting shaft away from the slider, the accommodating hole passes through the slider along the thickness direction, and the accommodating hole is communicated with the inner cavity, and the elastic member is accommodated in the inner cavity.

6. The positioning tool according to claim 5, characterized in that: The connecting shaft and the supporting body are integrally formed, and the supporting body is provided with an avoidance hole, through which the inner cavity of the connecting shaft is communicated with a side of the supporting body away from the sliding block.

7. The positioning tool according to claim 6, characterized in that: The positioning assembly further includes a limiting member, which is fixed to and covers the avoidance hole, and the elastic member abuts between the limiting member and the positioning pin.

8. The positioning tool according to claim 7, characterized in that: The limiting member is provided with an external thread, the clamping member is provided with a threaded hole, and the clamping member is adjustably connected to the supporting body in the thickness direction by a threaded connection.

9. The positioning tool according to claim 4, characterized in that: A limiting boss is provided in the middle of the positioning pin, the elastic member is sleeved on the positioning pin, and one end of the elastic member abuts against the limiting boss. The end surface of the limiting boss facing away from the elastic member can be limited to the side surface of the slider facing the support body.

10. The positioning tool according to claim 4, characterized in that: The pin hole is provided through the base along the thickness direction.

11. The positioning tool according to claim 4, characterized in that: The shapes of the positioning pin and the pin hole cut by a plane perpendicular to the thickness direction are both non-circular structures, and the positioning pin and the pin hole are limitedly matched in a direction perpendicular to the thickness direction and in a direction around the thickness direction.

12. The positioning tool according to claim 4, characterized in that: The base is provided with a first movable groove, the slider is slidably arranged in the first movable groove, the first movable groove is provided with a first notch communicating with the outside of the base, and the first notch is located on a side surface of the base adjacent to the upper surface of the base, along a horizontal direction perpendicular to the direction of the first notch pointing to the first movable groove, the size of the first notch is smaller than the size of the first movable groove, and the slider can be moved into the first movable groove through the first notch; The second movable groove is provided with a second notch connected to the outside of the upper cover, and the second notch is located on the side of the upper cover adjacent to the bottom surface of the upper cover. Along the horizontal direction perpendicular to the direction of the second notch pointing to the second movable groove, the size of the second notch is smaller than the size of the second movable groove, and the connecting shaft can be moved into the second movable groove through the second notch.

13. The positioning tool according to claim 12, characterized in that: The first movable groove includes a first groove body, a second groove body and a transition groove body. The first dimension of the first groove body in the thickness direction is greater than the second dimension of the second groove body in the thickness direction. The distance between the bottom surface of the upper cover and the groove bottom of the second groove body is equal to the dimension of the slider in the thickness direction; along the direction from the first groove body to the second groove body, the dimension of the transition groove body in the thickness direction gradually decreases from the first dimension to the second dimension. The transition groove body is connected between the first groove body and the second groove body, and the transition groove body is connected to the first groove opening of the first movable groove through the first groove body.

14. The positioning tool according to claim 1, characterized in that: The support member includes a fixedly connected support body and a contoured portion, the outer edge of the contoured portion forming the positioning portion, which is used to conform to the inner edge of the manipulator to limit the position of the manipulator in a direction perpendicular to the thickness direction of the base, and at least a portion of the projections of the respective edges of the support body and the clamping member in the thickness direction are located outside the contoured portion.

15. A method for calibrating the position of a manipulator, applied to the positioning fixture according to any one of claims 1 to 14, characterized in that: The position calibration method comprises: The base of the positioning tool is arranged at a positioning position on the carrying surface of the carrying plate in the semiconductor process equipment; Positioning the manipulator at a corresponding position of the positioning portion, and clamping and fixing the manipulator between the support member and the clamping member; Controlling the support member to drive the manipulator to slide relative to the base until the positioning assembly and the limiting portion engage; The relative position information between the robot arm and the carrier plate is obtained and recorded.

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