Interlocking fastening upper electrode assembly with improved fastening force and plasma device including the same

Abstract

The present invention is designed to an interlocking fastening upper electrode assembly with improved fastening force, in which a bushing inserted into a silicon electrode protrudes above the silicon electrode, and the protruding portion is inserted into and connected to an anodized plate to inhibit rotation of the bushing, and the assembly includes: an inner and outer tapping composite nut, which is connected to an assembly groove of the silicon electrode and an anodized plate to prevent rotation; an inner and outer tapping nut, which is assembled in the assembly groove of the silicon electrode and assembled around the inner and outer tapping composite nut; and an assembly module, which is connected through the internal part of the through-portion of the anodized plate and assembled with the inner and outer tapping composite nut to fix the anodized plate arranged above the silicon electrode.

Description

Technical Field

[0001] The present disclosure relates to an interlocking fastening upper electrode assembly with improved fastening force. More specifically, the present disclosure relates to an interlocking fastening upper electrode assembly with improved fastening force and a plasma device including the interlocking fastening upper electrode assembly, the assembly being configured to constrain the rotation of a bushing inserted into and protruding above a silicon electrode so that a protruding portion of the bushing is inserted into and coupled to an anodized plate. Background Art

[0002] Generally, a plasma apparatus for a semiconductor wafer etching process includes a cathode installed parallel to a wafer positioned inside a plasma chamber, receives a reaction gas injected through a plurality of holes formed thereon, and generates plasma for etching the semiconductor wafer by applying a high frequency voltage.

[0003] A conventional cathode is connected to a plate inside a plasma chamber by means of bolts. In bolt fastening, a plurality of bolt insertion holes having threads therein are formed in each of the cathode and the plate in the chamber, and the bolt insertion holes are vertically matched, and then bolts are inserted into the holes to connect the cathode to the plate.

[0004] In the bolt-fastening structure, the bolt-fastening tool is damaged by the movement of the bolts caused by the high-pressure plasma environment, resulting in the consumption of the expensive cathode. In addition, a gap is generated between the cathode and the plate due to the loosening of the threaded connection, resulting in the degradation of the wafer etching process performance.

[0005] At the same time, as a method for solving the above problems, a circular through hole is formed in the cathode, and the bushing is inserted into the through hole while being fixed with the help of a step, and an assembly ring is provided between the external space of the bushing and the internal space of the through hole of the cathode, and then the assembly screws connected to the plate of the plasma chamber are connected to the bushing in a screwed manner, thereby suppressing damage to the threaded joint. When damage occurs, a configuration is adopted in which only the damaged bushing is replaced.

[0006] However, in the above configuration, there is a problem that the bushing inserted into the through hole of the cathode moves and is damaged due to contact with the side of the through hole. As with the general bolt connection structure, there is still a problem that the etching performance is deteriorated because the bushing moves during the wafer etching process and the screw connection between the assembly screw and the bushing is loosened to generate a gap between the cathode and the plate. Summary of the invention

[0007] Technical issues

[0008] Therefore, the present disclosure is made keeping in mind the above problems arising in the prior art, and one object of the present disclosure is to provide an interlocking fastening upper electrode assembly with improved fastening force, wherein the assembly is configured so that the upper portion of the inner and outer tapping composite nut forms a polygonal anti-rotation portion, the anti-rotation portion is inserted into the silicon electrode and connected to the clamping bolt to connect the anodized plate to the silicon electrode, and the anti-rotation portion protrudes above the silicon electrode so as to be inserted into and connected to the anodized plate, thereby preventing the inner and outer tapping composite nut from rotating and creating a gap in the anodized plate, thereby minimizing the load and improving its productivity.

[0009] Technical Solution

[0010] In order to achieve the above objectives, according to one embodiment of the present disclosure, there is provided an interlocking fastening upper electrode assembly with improved fastening force, the assembly comprising: an inner and outer tapping composite nut 100, which is connected to the assembly groove 11 of the silicon electrode 10 and the anodized plate 20 to prevent rotation; an inner and outer tapping nut 200, which is assembled in the assembly groove 11 of the silicon electrode 10 and assembled around the inner and outer tapping composite nut 100; and an assembly module 300, which is connected through the interior of the through portion 21 of the anodized plate 20 and assembled with the inner and outer tapping composite nut 100 to fix the anodized plate 20 arranged above the silicon electrode 10.

[0011] The internal and external tapping composite nut 100 may include: an insertion portion 110, which is inserted into the assembly groove 11 below the internal and external tapping composite nut to be in close contact with the inner surface of the assembly groove; a fastening portion 120, which extends above the insertion portion 110 and includes a tapping portion T1, so as to be fastened to the internal and external tapping nut 200; an anti-rotation portion 130, which is located on the fastening portion 120 and is connected to the through portion 21 of the anodized plate 20 to prevent the internal and external tapping composite nut 100 from rotating; and a fastening groove 140, which has threads to allow the assembly module to be fastened through the anti-rotation portion 130.

[0012] The anti-rotation portion 130 may protrude above the silicon electrode 10 and may be inserted into the anodized plate 20 assembled by the assembling module 300 , and may have a triangular or hexagonal polygonal shape to prevent the internal and external tapping composite nut 100 from rotating.

[0013] A gap S around the anti-rotation portion 130 may be generated in the through portion 21 , and the gap is an empty space remaining after the anti-rotation portion is coupled to the through portion.

[0014] The inner and outer tapping nut 200 may include a tapping portion T2 on its exterior so as to be fastened into the assembly groove 11 of the silicon electrode 10, and the inner and outer tapping nut may have a connecting groove 210 having a thread therein so that the inner and outer tapping composite nut 100 may pass through the upper and lower ends of the inner and outer tapping nut to be connected to the inner and outer tapping nut.

[0015] The assembly module 300 may include: a clamping bolt 310, which is inserted into the through-portion 21 of the anodized plate 20 and fastened to the inner and outer tapped composite nut 100; an annular washer 320, which is arranged on the outside of the clamping bolt 310 and assembled into the through-portion 21 of the anodized plate 20; a spring washer 330, which is assembled around the clamping bolt 310 and located above the annular washer 320; and a plurality of first anti-loosening washers 340 and second anti-loosening washers 350, which may be located above the spring washer 330 and prevent the clamping bolt 310 from loosening.

[0016] A plurality of seating grooves 341 may be formed at predetermined intervals on an upper portion of the first locking washer 340 , and a plurality of seating protrusions 351 may be provided on a lower portion of the second locking washer 350 to be seated in the corresponding seating grooves 341 .

[0017] As another embodiment of the present disclosure, a plasma device may be provided, which includes an interlocking fastening electrode assembly with improved fastening force, wherein the electrode assembly connects the anodized plate 20 with the silicon electrode 10, wherein the electrode assembly may include an inner and outer tapping composite nut 100, an inner and outer tapping nut 200, and an assembly module 300.

[0018] The inner and outer tapped composite nut 100 may include: an insertion portion 110, which is inserted into the assembly groove 11 of the silicon electrode 10 to be in close contact with the inner surface of the bottom surface of the assembly groove; a fastening portion 120, which extends above the insertion portion and includes a tapping portion T1 formed on the outside of the fastening portion; and an anti-rotation portion 130, which is arranged on the fastening portion 120 and inserted into the through portion 21 of the anodized plate 20.

[0019] The inner and outer tapping nut 200 may be assembled around the inner and outer tapping composite nut 100 and assembled into the assembly groove 11 of the silicon electrode 10 .

[0020] The assembly module 300 is coupled through the inner space of the through-portion 21 of the anodized plate 20 and assembled with the inner and outer tapping composite nut 100 , so that the anodized plate 20 can be fixed to the silicon electrode 10 .

[0021] The internal and external tapping composite nut 100 may have a fastening groove 140 having threads, thereby allowing the assembly module 300 to be fastened through the anti-rotation portion 130 .

[0022] The anti-rotation portion 130 may protrude above the silicon electrode 10 and may be inserted into the anodized plate 20 , and may have a triangular or hexagonal polygonal shape, thereby preventing the internal and external tapping composite nut 100 from rotating.

[0023] The through-portion 21 of the anodized plate 20 may be provided with a gap S around the anti-rotation portion 130 , and the gap may be an empty space remaining after the anti-rotation portion 130 is coupled to the through-portion of the anodized plate.

[0024] The inner and outer tapping nut 200 may include a tapping portion T2 on its exterior so as to be fastened into the assembly groove 11 of the silicon electrode 10, and the inner and outer tapping nut may include a connecting groove 210 in which a thread is formed, thereby allowing the inner and outer tapping composite nut 100 to pass through the upper and lower ends of the inner and outer tapping nut to connect with the inner and outer tapping nut.

[0025] The assembly module 300 may include: a clamping bolt 310, which is inserted into the through-portion 21 of the anodized plate 20 and fastened to the inner and outer tapped composite nut 100; an annular washer 320, which is arranged on the outside of the clamping bolt 310 and assembled into the through-portion 21 of the anodized plate 20; a spring washer 330, which is assembled around the clamping bolt 310 and located above the annular washer 320; and a plurality of first anti-loosening washers 340 and second anti-loosening washers 350, which may be located above the spring washer 330 and may prevent the clamping bolt 310 from loosening.

[0026] The width of the gap, which is an empty space remaining after the anti-rotation portion 130 is coupled to the through portion 21 of the anodized plate 20 , may be in the range of 0.1 mm to 0.3 mm.

[0027] Beneficial effects

[0028] As described above, according to the interlocking fastening upper electrode assembly with improved fastening force of the present disclosure, when the clamping bolt inserted into the anodized plate to connect the silicon electrode and the anodized plate is fastened to the inner and outer tapping composite nut, the inner and outer tapping composite nut is fastened to the silicon electrode, the inner and outer tapping composite nut protrudes upward, and the polygonal anti-rotation portion is inserted into the through-portion of the anodized plate and coupled thereto, thereby preventing the inner and outer tapping composite nut from rotating. Therefore, the silicon electrode and the anodized plate can be stably coupled to each other, and productivity and user satisfaction can be maximized. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is an exploded perspective view illustrating an interlocking fastening upper electrode assembly having an improved fastening force according to the present disclosure.

[0030] Figure 2 is a coupling perspective view showing an interlocking fastening upper electrode assembly with improved fastening force according to the present disclosure.

[0031] Figure 3 is a cross-sectional view illustrating an interlocking fastening upper electrode assembly having an improved fastening force according to the present disclosure.

[0032] Figure 4 is a cross-sectional view illustrating a pre-installed state of an interlocking fastening upper electrode assembly having a fastening force according to the present disclosure.

[0033] Figure 5 is a cross-sectional view illustrating a mounted state of an interlocking fastening upper electrode assembly having an improved fastening force according to the present disclosure.

[0034] Figure 6 is an enlarged perspective view showing an inner and outer tapped composite nut for interlockingly fastening an upper electrode assembly with improved fastening force according to the present disclosure.

[0035] Figure 7 It shows that according to Figure 6 Front view of an internally and externally tapped composite nut.

[0036] Figure 8 is an enlarged perspective view showing a first locking washer and a second locking washer interlockingly fastening an upper electrode assembly with improved fastening force according to the present disclosure.

[0037] Description of Reference Numerals

[0038] 10: Silicon electrode 11: Assembly groove

[0039] 20: Anodized plate 21: Through portion

[0040] 100: Internal and external tapping compound nut 110: Insertion part

[0041] 120: Fastening part 130: Anti-rotation part

[0042] 140: Fastening groove 200: Internal and external tapping nut

[0043] 210: coupling groove 220: rotation groove

[0044] 300: Assembly module 310: Clamping bolt

[0045] 311: Main body 312: Head

[0046] 312a: Tool insertion groove 320: Ring washer

[0047] 330: Spring washer 340: First anti-loosening washer

[0048] 341: mounting groove 350: second locking washer

[0049] 351: Placement protrusion S: Clearance

[0050] T1, T2: Tapping part DETAILED DESCRIPTION

[0051] The present disclosure may be modified in various ways and may have various exemplary embodiments, so the embodiments of the present disclosure are shown in the drawings and will be described in detail with reference to the drawings. However, it should be understood that the present disclosure is not limited to specific embodiments, but the present disclosure includes various modifications, equivalents, supplements and substitutions within the scope and spirit of the present disclosure.

[0052] In the accompanying drawings, the embodiments of the present disclosure may not be limited to the specific shapes shown, and may be exaggeratedly drawn to clearly understand the present disclosure. It should be understood that the specific terms used herein are for the purpose of describing the present disclosure, and are not intended to limit the meaning of the elements or to limit the scope and ideas of the present disclosure described in the claims.

[0053] In this specification, the expression "and / or" is used to indicate that at least one of the elements listed before and after is included. In addition, the expression "connected / coupled" is used in such a sense that it includes being directly connected to another element or being indirectly connected through another element. As used herein, unless the context clearly indicates, the singular forms "a", "an" and "the" are intended to also include the plural forms. In addition, elements, steps, operations and devices referred to as "comprising" refer to the presence or addition of one or more other elements, steps, operations and devices.

[0054] Furthermore, terms such as “a first item and a second item” may be used to explain various constituent elements, but the order or other characteristics between the constituent elements should not be limited to these terms.

[0055] In the description of the embodiments, each layer (film), region, pattern or structure is described as being formed “on a substrate” or “under a substrate”, and each side (film), region, pad or pattern includes “directly formed” and “formed with another layer interposed therebetween”. The standard of “on / over” or “under / under” each layer will be described with reference to the drawings.

[0056] Hereinafter, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.

[0057] Figure 1 is an exploded perspective view illustrating an interlocking fastening upper electrode assembly having an improved fastening force according to the present disclosure. Figure 2 is a coupling perspective view showing an interlocking fastening upper electrode assembly with improved fastening force according to the present disclosure. Figure 3 is a cross-sectional view of an interlocking fastening upper electrode assembly showing a particularly improved fastening force according to the present disclosure. Figure 4 is a cross-sectional view illustrating a pre-installed state of an interlocking fastening upper electrode assembly having a fastening force according to the present disclosure. Figure 5 is a cross-sectional view illustrating a mounted state of an interlocking fastening upper electrode assembly having an improved fastening force according to the present disclosure.

[0058] Figure 6 is an enlarged perspective view showing an inner and outer tapped composite nut for interlockingly fastening an upper electrode assembly with improved fastening force according to the present disclosure. Figure 7 It shows that according to Figure 6 Front view of an internally and externally tapped composite nut. Figure 8 is an enlarged perspective view showing a first locking washer and a second locking washer interlockingly fastening an upper electrode assembly with improved fastening force according to the present disclosure.

[0059] like Figures 1 to 8 As shown in , the interlocking fastening upper electrode assembly with improved fastening force according to the present disclosure includes an inner and outer tapping composite nut 100 , an inner and outer tapping nut 200 , and an assembling module 300 .

[0060] The inner and outer tapping composite nut 100 is fastened into the assembly groove 11 of the silicon electrode 10 , and the upper portion thereof can be inserted into the through portion 21 of the anodized plate 20 and coupled thereto.

[0061] The internal and external tapping composite nut 100 includes an inserting portion 110 inserted into the assembly groove 11 to closely contact the inner surface of the bottom of the assembly groove 11 of the silicon electrode 10. The internal and external tapping composite nut 100 includes a fastening portion 120 extending above the inserting portion 110 and having a tapping portion T1 on the outside thereof to be fastened to the inside of the internal and external tapping nut 200.

[0062] In other words, the insertion portion 110 is inserted into the assembly groove 11 and placed on the bottom surface of the assembly groove 11, stably inserted into the assembly groove 11 while being in close contact with the inner surface without shaking, and when the inner and outer tapping nut 200 is fastened into the assembly groove 11 in a state where the inner and outer tapping composite nut 100 is inserted into the assembly groove 11, the inner and outer tapping nut 200 can be connected to the fastening portion 120.

[0063] In addition, an anti-rotation portion 130 may be provided on an upper portion of the fastening portion 120 so as to be coupled with the through portion 21 of the anodized plate 20 .

[0064] When the inner and outer tapping composite nut 100 is inserted into the assembly groove 11 of the silicon electrode 10 , the anti-rotation portion 130 is configured to protrude above the silicon electrode 10 so as to be coupled with the through portion 21 of the anodized plate 20 .

[0065] In addition, the anti-rotation portion 130 is inserted into the through portion 21 of the anodized plate 20 and has a polygonal shape such as an ellipse, a triangle, or a hexagon to prevent the rotation of the inside-out tapping composite nut 100 .

[0066] In other words, when the anodized plate 20 is in close contact with the upper portion of the silicon electrode 10 with the insertion portion 110 and the fastening portion 120 inserted into the assembly groove 11 of the silicon electrode 10, the anti-rotation portion 130 is inserted into the through portion 21 of the anodized plate 20, and since the anti-rotation portion 130 has a polygonal shape, the rotation of the inner and outer tapped composite nut 100 and the rotation of the assembly module 300 can be prevented, thereby stably connecting the silicon electrode 10 and the anodized plate 20 to each other.

[0067] Furthermore, the shape of the through portion 21 at the position where the anti-rotation portion 130 is inserted may be the same as the outer shape of the anti-rotation portion 130 .

[0068] In addition, if Figure 5 As shown in FIG. 1 , the through portion 21 into which the anti-rotation portion 130 is inserted may have a gap S which is an empty space provided so that the anti-rotation portion 130 is inserted into the through portion 21 and a predetermined space remains.

[0069] The gap S may be in the range of 0.1 mm to 0.3 mm.

[0070] A fastening groove 140 having threads may be formed at a central portion of the internal and external tapping composite nut 100 so that a clamping bolt 310 (described below) of the assembly module 300 may be fastened through the anti-rotation portion 130 to assemble the silicon electrode 10 and the anodized plate 20 together.

[0071] The internal and external tapping nut 200 is assembled into the assembly groove 11 of the silicon electrode 10 , and is assembled to the internal and external tapping composite nut 100 by being fitted around the exterior of the internal and external tapping composite nut 100 .

[0072] In addition, the inner and outer tapping nut 200 may have a tapping portion T2 on the outer portion thereof so as to be fastened into the assembly groove 11 of the silicon electrode 10 .

[0073] In addition, a coupling groove 210 having threads may be formed inside the internal tapping nut 200 so that the internal tapping composite nut 100 may pass through the upper and lower ends of the internal tapping nut 200 and be coupled to the internal tapping nut 200 .

[0074] In addition, in order to assemble the inner and outer tapping nut 200 to the inner and outer tapping composite nut 100 and the assembly groove 11, a rotation groove 220 can be formed on the upper opposing parts of the inner and outer tapping nut 200 so that the inner and outer tapping nut 200 can be rotated with the aid of a tightening tool (not shown).

[0075] In other words, when the inner and outer tapping composite nut 100 is inserted into the assembly groove 11 of the silicon electrode 10, the inner and outer tapping nut 200 is fastened into the assembly groove 11, and the inner and outer tapping nut 200 can be assembled between the inner and outer tapping composite nut 100 and the assembly groove 11 to prevent the inner and outer tapping composite nut 100 from separating.

[0076] The assembly module 300 passes through the through portion 21 of the anodized plate 20 and is assembled with the internal and external tapping composite nut 100 to fix the anodized plate 20 disposed above the silicon electrode 10 .

[0077] The assembly module 300 includes a clamping bolt 310 , an annular washer 320 , a spring washer 330 , a first locking washer 340 , and a second locking washer 350 .

[0078] The clamping bolt 310 may be inserted into the through portion 21 of the anodized plate 20 and fastened to the internal and external tapping composite nut 100 .

[0079] The clamping bolt 310 may include: a body portion 311 having threads for fastening to the threaded fastening groove 140 of the internal and external tapping composite nut 100; and a head portion 312 which is disposed above the body portion 311 and fastens the clamping bolt 310 to the internal and external tapping composite nut 100.

[0080] In addition, a tool insertion groove 312a for inserting a fastening tool (not shown) can be formed on the inner surface of the upper portion of the head 312, so that when the inner and outer tapped nut 200 and the inner and outer tapped composite nut 100 are assembled with each other, the clamping bolt 310 can pass through the through portion 21 and be fastened into the fastening groove 140.

[0081] The annular washer 320 is disposed outside the clamp bolt 310 , inserted into the through portion 21 of the anodized plate 20 , and fitted around the outside of the clamp bolt 310 .

[0082] The spring washer 330 may fit around the exterior of the clamping bolt 310 and may be located above the annular washer 320 .

[0083] Furthermore, the spring washer 330 may include a plurality of spring washers 330 vertically overlapping each other.

[0084] The first locking washer 340 is located above the spring washer 330 to prevent the clamping bolt 310 , which is fastened to the internal and external tapping composite nut 100 through the through portion 21 of the anodized plate 20 , from loosening.

[0085] In addition, a plurality of seating grooves 341 may be formed on an upper portion of the first locking washer 340 at predetermined intervals.

[0086] The second locking washer 350 may be disposed in close contact with an upper portion of the first locking washer 340 .

[0087] In addition, a seating protrusion 351 may be provided at a lower portion of the second locking washer 350 so that the second locking washer 350 may be seated in each seating groove 341 of the first locking washer 340 .

[0088] An operating state of the interlocking fastening upper electrode assembly with improved fastening force of the present disclosure configured in the above-mentioned structure will be described below.

[0089] The inner and outer tapped composite nut 100 and the inner and outer tapped nut 200 are assembled into the assembly groove 11 of the silicon electrode 10, and the anti-rotation portion 130 is positioned above the assembly groove 11 of the silicon electrode 10 at a height higher than the surface of the silicon electrode 10, so that the anti-rotation portion 130 protrudes above the silicon electrode 10, and thus the inner and outer tapped composite nut 100 can be assembled into the assembly groove 11.

[0090] Furthermore, the inner and outer tapping composite nut 100 and the inner and outer tapping nut 200 are assembled into the assembly groove 11 of the silicon electrode 10 , and the anodized plate 20 is in close contact with the upper portion of the silicon electrode 10 .

[0091] Furthermore, the annular washer 320 and the spring washer 330 are inserted into the through portion 21 of the anodized plate 20 , and the first locking washer 340 and the second locking washer 350 are inserted over the spring washer 330 and stacked thereon.

[0092] In addition, the clamping bolt 310 is inserted into the through portion 21 through the first anti-loosening washer 340, the second anti-loosening washer 350, the spring washer 330 and the annular washer 320 which are inserted in a stackable manner, and the clamping bolt 310 is fastened to the fastening groove 140 of the inner and outer tapped composite nut 100, so that the silicon electrode 10 and the anodized plate 20 can be tightly connected to each other.

[0093] Then, when the inner and outer tapping composite nut 100 is inserted into the assembly groove 11 and the anodized plate 20 is in close contact with the upper portion of the silicon electrode 10, the anti-rotation portion 130 protruding above the silicon electrode 10 is inserted into the through portion 21. Since the anti-rotation portion 130 has a polygonal shape, the inner and outer tapping composite nut 100 and the inner and outer tapping nut 200 inserted into the silicon electrode 10 can be prevented from rotating.

[0094] Furthermore, since the silicon electrode 10 and the anodized plate 20 are assembled together with the anti-rotation portion 130 that prevents the internal and external tapping composite nut 100 and the internal and external tapping nut 200 from rotating, separate insertion is not required.

[0095] Furthermore, when the anti-rotation part 130 is inserted into the through-portion 21 of the anodized plate 20 , a gap S (ie, an empty space) is formed in the through-portion 21 and the anti-rotation part 130 is inserted therein at a certain interval, thereby preventing separation caused by thermal expansion.

[0096] In addition, when the clamping bolt 310 is tightened to the internal and external tapped composite nut 100, since the first anti-loosening washer 340 and the second anti-loosening washer 350 are arranged around the outside of the clamping bolt 310, the loosening of the clamping bolt 310 can be prevented, and the silicon electrode 10 and the anodized plate 20 can be firmly and stably assembled with each other without loosening.

[0097] As described above, the present disclosure is not limited to the specific embodiments and descriptions described above, and ordinary technicians in the technical field to which the present invention belongs will understand that various modifications, additions and substitutions may be made without departing from the scope and spirit of the present invention disclosed in the appended claims, and these modifications belong to the patent protection scope of the present disclosure.

[0098] Industrial Applicability

[0099] The present disclosure is configured such that the polygonal anti-rotation portion formed on the upper portion of the inner-outer tapping composite nut is inserted into the silicon electrode and connected to the clamping bolt to connect the anodized plate to the silicon electrode, protruding above the upper portion of the silicon electrode so as to be inserted into the anodized plate and coupled therewith. Therefore, the inner-outer tapping composite nut can be prevented from rotating, and the load can be minimized by means of the gap generated in the anodized plate, thereby having the effect of improving its productivity, and its industrial application is feasible.

Claims

1. An interlocking fastening upper electrode assembly with improved fastening force, the assembly comprising: An internally and externally tapped composite nut, the internally and externally tapped composite nut being coupled to the assembly slot and the anodized plate of the silicon electrode to prevent rotation; An inner and outer tapping nut, the inner and outer tapping nut is assembled in the assembly groove of the silicon electrode and assembled around the inner and outer tapping composite nut; as well as An assembly module is connected through the internal part of the through-hole of the anodized plate and assembled with the inner and outer tapped composite nut to fix the anodized plate disposed above the silicon electrode. Wherein, the inner and outer tapping composite nut comprises: an insertion portion, the insertion portion is inserted into the assembly groove below the inner and outer tapping composite nut to be in close contact with the inner surface of the assembly groove; a fastening portion, the fastening portion extends above the insertion portion and includes a tapping portion, so as to be fastened with the inner and outer tapping nut; an anti-rotation portion, the anti-rotation portion is located on the fastening portion and is connected to the through portion of the anodized plate to prevent the inner and outer tapping composite nut from rotating; and a fastening groove, the fastening groove has a thread, so as to allow the assembly module to be fastened through the anti-rotation portion, and The anti-rotation portion protrudes above the silicon electrode and is inserted into the anodized plate assembled by the assembly module, and the anti-rotation portion has a polygonal shape of a triangle or a hexagon so as to prevent the inner and outer tapped composite nut from rotating, and a gap is generated in the through portion around the anti-rotation portion, and the gap is the empty space remaining after the anti-rotation portion is connected to the through portion.

2. The assembly according to claim 1, wherein The width of the gap, which is an empty space remaining after the anti-rotation portion is coupled to the through portion, is in the range of 0.1 mm to 0.3 mm.

3. The assembly according to claim 1, wherein: The inner and outer tapping nut includes a tapping portion on an outer portion thereof so as to be fastened into the assembly groove of the silicon electrode, and The inner and outer tapping nut has a connecting groove, in which there is a thread, so that the inner and outer tapping composite nut passes through the upper and lower ends of the inner and outer tapping nut and is connected to the inner and outer tapping nut.

4. The assembly according to claim 1, wherein: Rotation grooves are respectively formed at the opposing parts of the upper portions of the inner and outer tapping nuts, thereby allowing the inner and outer tapping nuts to be rotated by means of a tightening tool.

5. The assembly according to claim 1, wherein: The assembly module comprises: a clamping bolt inserted into the through-portion of the anodized plate and fastened to the inner and outer tapped composite nut; an annular washer disposed outside the clamping bolt and fitted into the through-portion of the anodized plate; a spring washer that fits around the clamping bolt and over the annular washer; and A first anti-loosening washer and a second anti-loosening washer, wherein the first anti-loosening washer and the second anti-loosening washer are located above the spring washer and prevent the clamping bolt from loosening.

6. The assembly according to claim 5, wherein: A plurality of seating grooves are formed at predetermined intervals on the upper portion of the first locking washer, and a plurality of seating protrusions are provided on the lower portion of the second locking washer to be seated in the corresponding seating grooves.

7. A plasma device comprising an interlocking fastening electrode assembly having an improved fastening force, the electrode assembly coupling an anodized plate with a silicon electrode, in, The electrode assembly includes an internal and external tapping composite nut, an internal and external tapping nut and an assembly module. The inner and outer tapping composite nut includes: an inserting portion, which is inserted into the assembly groove of the silicon electrode to be in close contact with the inner surface of the bottom surface of the assembly groove; a fastening portion, which extends above the inserting portion and includes a tapping portion formed on the outer portion of the fastening portion; and an anti-rotation portion, which is provided on the fastening portion and inserted into the through portion of the anodized plate, The inner and outer tapping nut is assembled around the inner and outer tapping composite nut and assembled into the assembly groove of the silicon electrode. The assembly module is connected through the inner space of the through-portion of the anodized plate and assembled with the inner and outer tapping composite nut, so that the anodized plate is fixed to the silicon electrode. The internal and external tapping composite nut has a fastening groove, and the fastening groove has a thread, so as to allow the assembly module to be fastened through the anti-rotation portion, The anti-rotation portion protrudes above the silicon electrode and is inserted into the anodized plate, and has a triangular or hexagonal polygonal shape, thereby preventing the inner and outer tapping composite nut from rotating, and A gap around the anti-rotation portion is provided in the through-portion of the anodized plate, and the gap is an empty space remaining after the anti-rotation portion is coupled to the through-portion of the anodized plate.

8. The plasma device according to claim 7, wherein: The inner and outer tapping nut includes a tapping portion on an outer portion thereof so as to be fastened into the assembly groove of the silicon electrode, and The inner and outer tapping nut includes a coupling groove in which threads are formed, thereby allowing the inner and outer tapping composite nut to pass through the upper and lower ends of the inner and outer tapping nut and be coupled to the inner and outer tapping nut.

9. The plasma device according to claim 7, wherein: The assembly module comprises: a clamping bolt inserted into the through-portion of the anodized plate and fastened to the inner and outer tapped composite nut; an annular washer disposed outside the clamping bolt and fitted into the through-portion of the anodized plate; a spring washer that fits around the clamping bolt and over the annular washer; and A first anti-loosening washer and a second anti-loosening washer, wherein the first anti-loosening washer and the second anti-loosening washer are located above the spring washer and prevent the clamping bolt from loosening.

10. The plasma device according to claim 7, wherein: The width of the gap, which is an empty space remaining after the anti-rotation portion is coupled to the through portion, is in the range of 0.1 mm to 0.3 mm.

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