Adjustable machining parameters electrical discharge machining apparatus and electrical discharge machining method

Abstract

This invention relates to an adjustable electrical discharge machining (EDM) apparatus and method, comprising a stage and an EDM unit. The stage is used to place a workpiece with a defined processing target area. The EDM unit's discharge electrode cuts the processing target area of ​​the workpiece along a first cutting direction using at least one processing parameter. The processing parameter is adjusted according to changes in a specified parameter of the workpiece to a first value, thereby using the adjusted processing parameter to perform a second cutting step on the processing target area of ​​the workpiece. This invention proposes a segmented cutting technique, which can solve the problem of cutting speed (mm) caused by changes in specified EDM cutting parameters. 2 The problem of slowing down ( / min) and increasing the total cutting time.

Description

Technical Field

[0001] This invention relates to a processing apparatus and a processing method, and more particularly to an electrical discharge machining apparatus and a method for adjusting processing parameters. Background Technology

[0002] With the booming development of the semiconductor industry, electrical discharge machining (EDM) technology is commonly used to process ingots or wafers. EDM is a manufacturing process that uses electrical discharge to generate sparks, shaping the workpiece into a desired form. Two electrodes are separated by a dielectric material and a voltage is applied, generating a periodically changing, rapidly varying current discharge to process the workpiece. EDM uses two electrodes: one called the tool electrode or discharge electrode, and the other called the workpiece electrode, which is connected to the workpiece. During EDM, there is no actual contact between the discharge electrode and the workpiece electrode.

[0003] When the potential difference between two electrodes increases, the electric field between them also increases until the electric field strength exceeds the dielectric strength. At this point, dielectric collapse occurs, current flows through the electrodes, and some material is removed. When the current stops, new dielectric material flows into the electric field between the electrodes, removing the previously removed material and restoring the dielectric insulation effect. After the current flows through, the potential difference between the two electrodes returns to its state before dielectric collapse, thus allowing for a new dielectric collapse cycle. However, traditional electrical discharge machining (EDM) techniques suffer from limitations due to the large cutting thickness, which affects the cutting speed (i.e., the product of the feed rate of the discharge electrode across the workpiece and the cutting thickness during machining; mm). 2 The problem of slow speed ( / min). Summary of the Invention

[0004] In view of this, one of the objectives of the present invention is to provide an electrical discharge machining apparatus and an electrical discharge machining method with adjustable processing parameters, so as to solve the problems of the prior art.

[0005] To achieve the aforementioned objectives, the present invention provides an adjustable electrical discharge machining (EDM) apparatus for performing a cutting procedure, comprising: a stage for placing at least one workpiece, the workpiece defining a processing target area; and an EDM unit for cutting the processing target area of ​​the workpiece along a first cutting direction using at least one discharge electrode of the EDM unit with at least one processing parameter in a first cutting step of the cutting procedure, wherein the processing parameter is adjusted accordingly based on a change in a specified parameter of the workpiece to a first value, thereby performing a second cutting step on the processing target area of ​​the workpiece using the adjusted processing parameter.

[0006] The processing parameters include one or more of the following: an directional parameter, a discharge electrical parameter, a debris removal parameter, and a movement and tension parameter.

[0007] The orientation parameter is a processing direction relative to the workpiece; the discharge electrical parameter includes one or more of the following: a peak current (the maximum current passing between the two poles of the discharge electrode during discharge), a voltage when the workpiece is far from the discharge electrode, a discharge pulse duration, a discharge pulse pause time, and a servo reference voltage between the discharge electrode and the workpiece; the slag discharge parameter includes the flow rate of the slag discharge liquid provided on the discharge electrode; and the movement and tension parameter includes one or more of the following: a movement speed of the discharge electrode and a tension of the discharge electrode.

[0008] The specified parameter includes a first cutting thickness of one of the workpieces to be processed. The processing parameter is adjusted accordingly when the first cutting thickness of one of the workpieces to be processed increases to the first value, so as to use the adjusted processing parameter to perform the second cutting step on the processing target area of ​​the workpiece.

[0009] The processing parameter is a directional parameter. When the first cutting thickness of the workpiece increases to the first value, the electrical discharge machining (EDM) unit changes the directional parameter from the first cutting direction to a second cutting direction, thereby performing the second cutting step on the processing target area of ​​the workpiece along the second cutting direction.

[0010] The second cutting direction and the first cutting direction have a first angle between them, and the first angle is between 0 degrees and 360 degrees.

[0011] The first included angle is 180 degrees.

[0012] In the second cutting step, the thickness of the workpiece to be cut is less than the first value.

[0013] In this second cutting step, the cutting speed of the discharge electrode on one of the workpieces is greater than the cutting speed of the discharge electrode on the workpiece when the first cutting thickness is the first value.

[0014] When the second cutting thickness of the workpiece increases to a second value in the second cutting step, the electrical discharge machining (EDM) unit changes the orientation parameter from the second cutting direction to a third cutting direction, thereby performing a third cutting step on the processing target area of ​​the workpiece along the third cutting direction, wherein the workpiece has a third cutting thickness in the third cutting step.

[0015] The third cutting direction and the second cutting direction have a second included angle, which is between 0 degrees and 360 degrees.

[0016] The second included angle is 90 degrees.

[0017] Wherein, the thickness of the workpiece to be cut in the third cutting step is less than the first value or the second value.

[0018] In the third cutting step, the cutting speed of the discharge electrode on one of the workpieces is greater than the cutting speed of the discharge electrode on the workpiece when the first cutting thickness is the first value or when the second cutting thickness is the second value.

[0019] It also includes a heat source that heats the workpiece during the cutting process.

[0020] The discharge electrode is used to cut the target area of ​​the workpiece in a fluid.

[0021] The processing target area is provided with a filling material to fill the surface cracks formed on the processing target area during the cutting process.

[0022] The filling material is formed on the processing target area by means of a heat source, thereby filling the surface cracks formed on the processing target area during the cutting process.

[0023] It also includes an external force disturbance source that causes a filling material to fill surface cracks in the target area during the cutting process.

[0024] The quantity of the work to be processed is one or more.

[0025] The number of discharge electrodes is one or multiple.

[0026] The discharge electrode is used to cut the target area of ​​the workpiece in a vacuum environment.

[0027] To achieve the aforementioned objectives, the present invention proposes an electrical discharge machining method with adjustable machining parameters, which uses the aforementioned electrical discharge machining apparatus with adjustable machining parameters to perform a cutting process.

[0028] To achieve the aforementioned objectives, the present invention proposes an adjustable electrical discharge machining (EDM) method for performing a cutting process, comprising the following steps: providing at least one workpiece placed on a stage, the workpiece defining a processing target area; performing a first cutting step, wherein a discharge energy is applied to the processing target area of ​​the workpiece along a first cutting direction via at least one discharge electrode with at least one processing parameter, thereby cutting the processing target area of ​​the workpiece; performing a first adjustment step, wherein the processing parameter is adjusted accordingly based on a first cutting thickness of the workpiece increasing to a first value; and performing a second cutting step, wherein the discharge energy is applied to the processing target area of ​​the workpiece via the discharge electrode with the processing parameter adjusted in the first adjustment step, thereby cutting the processing target area of ​​the workpiece.

[0029] The processing parameter is a directional parameter. In the first cutting step, when the first cutting thickness of the workpiece increases to a first value, the first adjustment step is performed to change the directional parameter from the first cutting direction to a second cutting direction, and the second cutting step is performed on the processing target area of ​​the workpiece along the second cutting direction.

[0030] In the second cutting step, the thickness of the workpiece to be cut is less than the first value.

[0031] In the second cutting step, when the second cutting thickness of the workpiece cut by the discharge electrode increases to a second value, a second adjustment step is performed to change the orientation parameter from the second cutting direction to a third cutting direction, and a third cutting step is performed on the processing target area of ​​the workpiece along the third cutting direction.

[0032] It also includes a third cutting step, which involves cutting the processing target area of ​​the workpiece along the third cutting direction.

[0033] In the third cutting step, the thickness of the workpiece to be cut is less than the first value or the second value.

[0034] The first adjustment step involves changing the orientation of one of the workpieces to be processed in order to adjust the processing parameters.

[0035] The first adjustment step involves changing the feed direction of the discharge electrode relative to one of the workpieces to adjust the processing parameters.

[0036] The first adjustment step involves using the stage to change the orientation of one of the workpieces to be processed in order to adjust the processing parameters.

[0037] It also includes a filling step to fill surface cracks formed on the target area during the cutting process.

[0038] In summary, the adjustable processing parameters electrical discharge machining apparatus and method of the present invention have the following advantages:

[0039] (1) By using segmented cutting technology, the problem of long total cutting time caused by large thickness of electrical discharge machining can be solved.

[0040] (2) By using segmented cutting technology, when the specified parameters change to the set value, the feed direction is immediately changed.

[0041] (3) By using segmented cutting technology, when the thickness to be cut is greater than the set value, the feed direction is immediately changed, which can divide the thick surface to be cut into several thinner cutting surfaces, thereby solving the problem of slow cutting speed caused by large thickness in electrical discharge machining.

[0042] To enable you to have a better understanding of the technical features and effects of this invention, preferred embodiments and detailed descriptions are provided below. Attached Figure Description

[0043] Figure 1 This is a flowchart illustrating the steps of the adjustable processing parameters electrical discharge machining method of the present invention.

[0044] Figure 2 This is a schematic diagram of the first embodiment of the electrical discharge machining apparatus with adjustable processing parameters according to the present invention.

[0045] Figure 3 This is a schematic diagram of a second embodiment of the electrical discharge machining apparatus with adjustable processing parameters according to the present invention.

[0046] Figure 4a and Figure 4b These are, respectively, a front view and a cross-sectional side view of the workpiece to be processed during the first cutting step in this invention.

[0047] Figure 5a and Figure 5b These are, respectively, a front view and a cross-sectional side view of the workpiece to be processed during the second cutting step in this invention.

[0048] Figure 6a and Figure 6b These are, respectively, the front view and the cross-sectional side view of the workpiece to be processed during the third cutting step in this invention.

[0049] Figure 7a This is a schematic diagram illustrating the present invention of cutting multiple workpieces using a single discharge electrode. Figure 7bThis is a schematic diagram illustrating the present invention of cutting a single workpiece using multiple discharge electrodes. Figure 7c This is a schematic diagram illustrating the present invention of cutting multiple workpieces using multiple discharge electrodes, wherein... Figure 7a The perspective is different Figure 7b and Figure 7c .

[0050] Explanation of reference numerals in the attached figures:

[0051] 10: Electrical Discharge Machining Equipment

[0052] 20: Platform

[0053] 22: Jig

[0054] 50: Electrical Discharge Machining (EDM) Unit

[0055] 52: Discharge electrode

[0056] 54: Power source

[0057] 56a: Cable feeder and reel

[0058] 56b: Cable reel

[0059] 57a, 57b: Pulleys

[0060] 59a: Liquid tank

[0061] 59b: Liquid

[0062] 60: Microwave or radio frequency source

[0063] 70: Heat source

[0064] 95: Ultrasonic Unit

[0065] 100: Work to be processed

[0066] 100a, 100b, 100c: Cutting surfaces

[0067] 110: Processing target area

[0068] S10, S20, S30, S40, S50, S60: Steps

[0069] D1: First cutting direction

[0070] D2: Second cutting direction

[0071] D3: Third cutting direction

[0072] T1: First thickness to be cut

[0073] T2: Second thickness to be cut

[0074] T3: Third thickness to be cut Detailed Implementation

[0075] To facilitate understanding of the technical features, content, advantages, and effects of this invention, the invention is described in detail below with reference to accompanying drawings and embodiments. The drawings used are for illustrative purposes only and do not necessarily represent the actual scale and precise configuration of the invention in practice. Therefore, the scale and configuration of the accompanying drawings should not be used to interpret or limit the scope of the invention in actual implementation. Furthermore, for ease of understanding, the same components in the following embodiments are indicated by the same symbols.

[0076] Furthermore, unless otherwise specified, the terms used throughout this specification and claims generally have their ordinary meaning in the context of this art, the disclosure herein, and the specific content. Certain terms used to describe the invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

[0077] The use of terms such as "first," "second," and "third" in this document does not specifically refer to any order or sequence, nor is it intended to limit the invention. Rather, it is merely used to distinguish components or operations described using the same technical terms.

[0078] Secondly, when this article uses terms such as "contains", "includes", "has", or "contains", these are all open-ended terms, meaning that they include but are not limited to.

[0079] This invention proposes a segmented cutting technique, preferably in which the processing parameters are adjusted when specified parameters change to corresponding set values ​​(first value, second value, third value, ...), thereby solving the problem of slow cutting speed and long total cutting time caused by changes in specified parameters in the electrical discharge machining (EDM) process. The specified parameters are, for example, the thickness of the workpiece to be cut or the cutting speed. Taking the thickness of the workpiece as an example, in the first cutting step of the EDM process, when the first thickness of the workpiece to be cut increases to the corresponding set value (e.g., the first value), the processing parameters are adjusted, and the subsequent second cutting step is performed with the adjusted processing parameters, and so on. Similarly, taking the cutting speed of the workpiece as an example, in the first cutting step of the EDM process, when the first cutting speed of the workpiece decreases to the corresponding set value (e.g., the first value), the processing parameters are adjusted, and the subsequent second cutting step is performed with the adjusted processing parameters, and so on.

[0080] Please see Figure 1 and Figure 2 , Figure 1 This is a flowchart illustrating the steps of the adjustable processing parameters electrical discharge machining method of the present invention. Figure 2 This is a schematic diagram of a first embodiment of the adjustable processing parameter electrical discharge machining (EDM) apparatus of the present invention. The present invention proposes a segmented cutting technique, which adjusts the processing parameters as specified parameters change to corresponding set values, thereby solving the problem of slow cutting speed and long total cutting time caused by large cutting thicknesses in EDM. In the first embodiment of the present invention, the EDM apparatus 10 includes a stage 20 and an EDM unit 50 for performing EDM processes on the workpiece 100, such as a cutting process, to achieve slicing or thinning effects. The stage 20 may be equipped with a fixture 22, and the stage 20 can be a movable stage or a fixed stage.

[0081] First, the electrical discharge machining method of the present invention provides a workpiece 100 (step S10), and places the workpiece 100 on a stage 20 using a fixture 22. The workpiece 100 has a defined processing target area 110, which can be located at any suitable processing position on the workpiece 100. The workpiece 100 can be any conductor or semiconductor structure, such as a wafer or ingot, but the cross-section of the workpiece 100 is not limited to a circle; it can be any shape.

[0082] The electrical discharge machining (EDM) unit 50 of the electrical discharge machining apparatus 10 of the present invention has at least a discharge electrode 52, which may be, for example, a linear conductive wire, a plate-shaped conductive plate, or other conductive structures. The EDM unit 50 of the present invention may also optionally have a wire feeder 56a and a wire take-up reel 56b, wherein the two ends of the discharge electrode 52 are respectively connected to the wire feeder 56a and the wire take-up reel 56b, and the wire feeder 56a and the wire take-up reel 56b may selectively utilize pulleys 57a and 57b respectively to engage the discharge electrode 52, thereby positioning the discharge electrode 52 and, for example, adjusting the tension of the discharge electrode 52.

[0083] Please continue reading. Figure 2 The electrical discharge machining (EDM) unit 50 of the present invention further includes a power source 54, which is connected to the discharge electrode 52 by an electrical circuit to generate a voltage difference between the discharge electrode 52 and the workpiece 100 and to provide discharge energy to the processing target area 110 of the workpiece 100, thereby cutting the workpiece 100 along the processing target area 110 (step S20).

[0084] The present invention may also optionally include a microwave or radio frequency source 60 to supply microwave or radio frequency energy to the processing target area 110 of the workpiece 100, thereby providing heating, annealing, or polishing effects, effectively reducing surface roughness and avoiding the need for subsequent mechanical or chemical polishing steps. Similarly, the microwave or radio frequency source 60 of the present invention can also supply microwave or radio frequency energy to the processing target area 110 of the workpiece 100 via the discharge electrode 52. Taking microwaves as an example, the wavelength range of the microwaves in the present invention is from about 1 mm to about 1 m, the frequency range is from about 300 GHz to about 0.3 GHz, and the power range is from about 200 watts to about 5,000 watts. The material of the discharge electrode 52 can be selected from, for example, the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, and zinc. The thickness of the discharge electrode 52 is approximately less than 300 μm, preferably approximately 30 μm to 300 μm.

[0085] To elaborate, such as Figure 2 and Figure 4a As shown, in step S20, the discharge electrode 52 applies discharge energy to the processing target area 110 of the workpiece 100 along the first cutting direction D1 with at least one processing parameter, thereby cutting the processing target area 110 of the workpiece 100. Taking the workpiece 100 as a cylindrical ingot as an example, the processing target area 110 is defined, for example, in the radial direction of the ingot, such as... Figure 4b and Figure 5bThe dotted lines indicate the uncut processing target area 110, while the solid lines indicate the cut processing target area 110. Since the thickness of the ingot to be cut is not a fixed value but varies, for example, when the discharge electrode 52 cuts parallel from top to bottom, the thickness to be cut at the top of the ingot is the minimum, while the maximum thickness is its diameter. Furthermore, typically when the thickness of the ingot to be cut exceeds a certain value, the cutting speed decreases non-linearly with increasing thickness. Therefore, the specified parameters in the segmented cutting technology proposed in this invention are based on the thickness to be cut, that is, the processing parameters are adjusted accordingly based on the thickness of the workpiece 100 to be cut. For example, when the overlap length between the discharge electrode 52 and the workpiece 100 (i.e., the cutting thickness of the workpiece 100) reaches a set value, the processing parameters can be changed, such as changing the feed direction relative to the workpiece 100. This allows the subsequent cutting thickness of the workpiece 100 to be less than this set value, thus optimizing the overall cutting time of the workpiece. For instance, the present invention can adjust the processing parameters (step S30) according to the first cutting thickness T1 of the workpiece 100 in the first cutting step S20. That is, it determines whether the first cutting thickness T1 of the workpiece 100 in the first cutting step S20 reaches the aforementioned set value (first value). If "yes", the processing parameters can be adjusted, and then the adjusted processing parameters are used to perform the second cutting step S40 on the processing target area 110 of the workpiece 100.

[0086] Taking the orientation parameter (i.e., the direction of processing relative to the workpiece) as an example, in the first cutting step S20, the discharge electrode 52 applies discharge energy to the processing target area 110 of the workpiece 100 with at least one processing parameter, thereby cutting the workpiece 100 along the first cutting direction D1. However, when the first cutting thickness T1 of the workpiece 100 increases to a set value (first value), the present invention performs a first adjustment step S30 to change the orientation parameter from the first cutting direction D1 to the second cutting direction D2. Then, the second cutting step S40 is performed. The second cutting direction D2 and the first cutting direction D1 have a first angle, for example, 180 degrees. However, the present invention is not limited to this; the range of the first angle is, for example, between 0 degrees and 360 degrees.

[0087] Similarly, in the second cutting step S40, the discharge electrode 52 cuts the workpiece 100 in the second cutting direction D2. In the second cutting step S40, when the second cutting thickness T2 of the workpiece 100 cut by the discharge electrode 52 increases to a second value, the electrical discharge machining (EDM) unit 50 adjusts the orientation parameter again (step S50) to change the orientation parameter from the second cutting direction D2 to the third cutting direction D3, and then performs a third cutting step S60 along the third cutting direction D3 on the processing target area 110 of the workpiece 100. In the third cutting step S60, the third cutting thickness T3 of the workpiece 100 in the third cutting direction D3 has a third value. The second value is, for example, less than, greater than, or equal to the first value. The aforementioned third value is, for example, less than, greater than, or equal to the first value or the second value. In one embodiment of the present invention, the second value is equal to the first value, and the third value is less than the first value (second value). In this invention, a second included angle exists between the third cutting direction D3 and the second cutting direction D2, which is between 0 degrees and 360 degrees, for example, 90 degrees. However, the invention is not limited to this; the range of the second included angle is, for example, between 0 degrees and 360 degrees. However, in another embodiment of the invention, taking a two-stage cutting as an example, if the second value equals the first value, and the second cutting thickness T2 of the workpiece 100 cut by the discharge electrode 52 does not increase to the second value (first value) in the second cutting step S40, then the invention can cut the workpiece 100 using the second cutting direction D2 until the cutting is complete. Since the second cutting thickness T2 of the invention is smaller than the diameter of the ingot in the two-stage cutting, the cutting speed of the workpiece 100 by the invention can still be faster than the conventional unsegmented cutting technology, and the total cutting time required is shorter.

[0088] Taking the workpiece 100 as a crystal ingot as an example, one feature of this invention is that the values ​​of specified parameters (such as the first cutting thickness T1, the second cutting thickness T2, and the third cutting thickness T3) are all smaller than the diameter of the crystal ingot. Therefore, it can solve the problem of slow cutting speed caused by the large cutting thickness in traditional electrical discharge machining technology. Moreover, taking the three-segment cutting example above, the third value of the third cutting thickness T3 of this invention is smaller than the first value of the first cutting thickness T1 (i.e., the second value of the second cutting thickness T2), and of course smaller than the diameter of the crystal ingot. Therefore, if the crystal ingot is completely cut along the third cutting direction D3 (from left to right), the cutting speed of the workpiece 100 of this invention can be faster than that of traditional unsegmented cutting technology, and the total cutting time required is shorter.

[0089] The aforementioned set values ​​can be obtained, for example, through calculation. For instance, the user can first measure the dimensions of the workpiece to be processed to obtain values ​​that meet the condition that the first value of the first cutting thickness T1 is greater than the third value of the third cutting thickness T3. These values ​​can then be manually input into the electrical discharge machining (EDM) unit 50 so that the EDM unit 50 can adjust the processing parameters for different cutting thicknesses. The optimal solution for setting these values ​​can be found based on the relationship between the cutting thickness and the cutting speed. Alternatively, the values ​​of the first cutting thickness T1, the second cutting thickness T2, and the third cutting thickness T3 can also be obtained, for example, through a learning algorithm. For instance, a database can be established based on multiple actual processing data to provide processing parameters optimized by the learning algorithm, thereby automatically adjusting the processing parameters for different thicknesses. Alternatively, the present invention may not require consideration of the numerical relationship between the first cutting thickness T1, the second cutting thickness T2, and the third cutting thickness T3. Instead, the user may directly specify a first value for the first cutting thickness T1 and / or a second value for the second cutting thickness T2, wherein this first and / or second value can be any value greater than 0 and less than the ingot diameter. For example, if the radial cross-section of the workpiece 100 is a perfect circle, the aforementioned set value (first value) may be, for example, between the side length of the square inside the circle and the diameter of the circle. However, in other embodiments, the aforementioned set value (first value) may also be, for example, less than or equal to the side length of the square inside the circle. That is, as long as the aforementioned second cutting thickness T2 or third cutting thickness T3 is less than the ingot diameter, it helps to improve the overall cutting speed. For example, in other embodiments, if the discharge electrode 52 partially cuts the processing target area 110 of the workpiece 100 along the first cutting direction D1 in the first cutting step S20, then the present invention can, for example, change the processing direction opposite to the workpiece 100 from the first cutting direction D1 to the second cutting direction D2, and perform the second cutting step S40 along the second cutting direction D2. Similarly, if the discharge electrode 52 partially cuts the processing target area 110 of the workpiece 100 along the second cutting direction D2 in the second cutting step S40, then the present invention can, for example, change the processing direction opposite to the workpiece 100 from the second cutting direction D2 to the third cutting direction D3, and perform the third cutting step S60 along the third cutting direction D3, and so on. Furthermore, although the segmented cutting technology of this invention is exemplified by three-segment cutting, this invention is not limited to the three-segment cutting example mentioned above. This invention can also perform two-segment cutting, four-segment cutting, or even more segment cutting. As long as the overall cutting speed can be better than the traditional unsegmented cutting technology, it can be applied to this invention.

[0090] Continuing, taking the machining parameters as orientation parameters (i.e., the machining direction relative to the workpiece) as an example, the present invention can, for example, achieve the effect of changing the feed direction by adjusting the placement direction of the workpiece 100. Taking the automatic change of the placement direction of the workpiece 100 as an example, such as... Figure 2 As shown, the stage 20 of the present invention can be, for example, a movable stage with a multi-axis (e.g., 2-axis, 3-axis, or more) motor, thereby changing the processing direction of the fixture 22 relative to the discharge electrode 52, so that the discharge electrode 52 can cut the workpiece 100 from the aforementioned first cutting direction D1, second cutting direction D2, third cutting direction D3, or other directions. Or, as Figure 2 As shown, the electrical discharge machining (EDM) unit 50 of the present invention, for example, its wire feeder 56a and take-up 56b, may be equipped with a multi-axis (e.g., 2-axis, 3-axis or more) motor. By adjusting the feed direction of the EDM unit 50, the processing direction of the discharge electrode 52 relative to the workpiece 100 can be changed, so that the discharge electrode 52 can cut the workpiece 100 from the aforementioned first cutting direction D1, second cutting direction D2, third cutting direction D3 or other directions. Taking manually changing the placement direction of the workpiece 100 as an example, the user can, for example, manually change the placement direction of the workpiece 100 on the stage 20, so that the discharge electrode 52 can cut the workpiece 100 from the aforementioned first cutting direction D1, second cutting direction D2, third cutting direction D3 or other directions.

[0091] Furthermore, although the processing parameters of this invention are exemplified by orientation parameters, they are not intended to limit the invention. The processing parameters may also be, for example, one or more of orientation parameters, discharge electrical parameters, slag removal parameters, and movement and tension parameters. Specifically, the orientation parameter is, for example, the processing direction relative to the workpiece; the discharge electrical parameters include one or more of the following: peak current (the maximum current passing between the two poles of the discharge electrode during discharge), voltage when the workpiece is far from the discharge electrode, discharge pulse duration, discharge pulse pause time, and servo reference voltage between the discharge electrode and the workpiece; the slag removal parameters include the flow rate of the slag removal liquid provided on the discharge electrode, which is, for example, water, preferably deionized water, and is provided, for example, between the two ends of the discharge electrode; the movement and tension parameters include one or more of the following: the movement speed of the discharge electrode and the tension of the discharge electrode. The inter-electrode voltage (voltage between the discharge electrode and the workpiece electrode) ranges from approximately 0 to approximately 300V, the discharge pulse duration ranges from approximately 5μs to approximately 2400μs, and the discharge pulse pause time ranges from approximately 5μs to approximately 2400μs. In other words, the processing parameters of this invention may include, for example, various electrical discharge machining parameters, and are not limited to adjusting one or more of these processing parameters. Moreover, this invention preferably allows for adjustment of the above-mentioned processing parameters according to different cutting thicknesses.

[0092] In addition, such as Figure 3 and Figure 4b As shown, a gap exists between the surface of the discharge electrode 52 and the workpiece 100 on both the surface in the traveling direction (cutting surface 100a) and the surface in the non-traveling direction (cutting surfaces 100b, 100c). This gap is filled with an insulating material such as air, deionized water, or oil, or other suitable insulating substances, to serve as a dielectric material. For example, if the discharge processing step is performed in deionized water, the deionized water will fill the aforementioned gap. Similarly, if the discharge processing step is performed in an atmospheric environment, air will fill the aforementioned gap. Furthermore, as... Figure 3 As shown, in the second embodiment of the present invention, if the electrical discharge machining step is performed in the liquid tank 59a, the liquid 59b will fill the aforementioned gap. Furthermore, the liquid 59b in the liquid tank 59a, such as a heatable liquid like oil, can reduce thermal shock or increase thermal uniformity. In addition, during the electrical discharge machining process, the present invention uses liquid pressure to reduce vibration in the workpiece 100, reducing the surface roughness of the cut surfaces 100b and 100c, thus helping to improve the quality of the electrical discharge machining. As described above, the present invention is illustrated by using a single discharge electrode 52 (a single conductive structure) to cut a single workpiece (i.e., a single solid structure). Figure 4a As shown, however, the present invention is not limited thereto. The discharge electrode 52 of the present invention can also, for example, simultaneously perform discharge processing on multiple workpieces 100 (i.e., multiple solid structures), such as... Figure 7a As shown, the discharge electrode 52 can simultaneously cut multiple workpieces 100. Similarly, the present invention can also use multiple separate discharge electrodes 52 (multiple conductive structures) to simultaneously process a single workpiece 100 (such as...). Figure 7b (as shown) or multiple items to be processed (such as...) Figure 7c The cutting process is performed as shown. Furthermore, the electrical discharge machining process of the present invention is not limited to being performed in the aforementioned liquid or gaseous fluids; it can also be performed in a vacuum environment. In other words, the electrical discharge machining process of the present invention can perform wet cutting of the workpiece 100 by the discharge electrode 52 (i.e., in the liquid tank 59a) or dry cutting of the workpiece 100 by the discharge electrode 52 (i.e., in air or a vacuum environment). During the dry cutting of the workpiece 100 by the discharge electrode 52, the present invention can selectively cool the discharge electrode 52. For example, a cooling fluid such as a liquid or gas can be used to cool or maintain the temperature of the discharge electrode 52, or the discharge electrode 52 can be heated by the discharge energy, i.e., without using a cooling fluid such as a liquid or gas.

[0093] Furthermore, the present invention can selectively perform a filling step, for example, by using an external disturbance source, such as ultrasonic unit 95 providing ultrasound, to cause the filling material to fill the surface cracks on the cut surfaces 100b and 100c of the processing target area 110, preventing these excess surface cracks from continuing to expand. This not only strengthens the structure but also achieves the effect of quickly (or even accelerating) the cutting steps S20, S40, or S60. The composition of the filling material can be, for example, Si, SiC, SiGe, Ge, GaAs, GaN, or InP, but is not limited to these. Any material suitable for filling cracks, such as fillers or adhesives, can be used in the present invention. The frequency range of the ultrasound is, for example, but not limited to, from about 15 kHz to about 30 kHz. This filling step is preferably carried out in a fluid, such as a liquid 59b, such as oil or water, or a conductive medium such as air. The ultrasound can generate fluid droplets and impact pressure waves in the fluid, causing the material particles of the filling material to embed into the surface cracks on the cut or thinned surface of the processing target area 110. Furthermore, this invention is not limited to the ultrasonic unit 95 with a specific structure, and the direction in which the ultrasonic unit 95 provides ultrasound is not particularly limited; it can be any direction, as long as it can achieve the filling effect, it can be applied to this invention. In the cutting process, this invention can also use a heat source 70 to heat the workpiece. The heat source 70 can be, for example, the aforementioned liquid tank 59a, a microwave or radio frequency source 60, or a laser source and / or an infrared light source. Additionally, this invention can also use the heat energy provided by the aforementioned heat source 70 to cause oxidation or other chemical reactions on the surface of the separated or cut solid structure (e.g., the first half structure 100a) or the surface of its modified layer 120, forming a filling material, such as silicon oxide or oxide, thereby filling surface cracks and preventing the propagation of surface cracks.

[0094] In summary, the adjustable processing parameters electrical discharge machining apparatus and method of the present invention have the following advantages:

[0095] (1) By using segmented cutting technology, the problem of long total cutting time caused by large thickness of electrical discharge machining can be solved.

[0096] (2) By using segmented cutting technology, when the cutting parameters change to the set value, the feed direction is immediately changed.

[0097] (3) By using segmented cutting technology, when the thickness to be cut is greater than the set value, the feed direction is immediately changed, which can divide the thick surface to be cut into several thinner cutting surfaces, thereby solving the problem of slow cutting speed caused by large thickness in electrical discharge machining.

[0098] The above description is merely illustrative and not restrictive. Any equivalent modifications or alterations made without departing from the spirit and scope of this invention should be included in the appended claims.

Claims

1. An electro-discharge machining apparatus capable of adjusting machining parameters for performing a cutting process, characterized by, Comprising: a table for placing at least one workpiece, the workpiece defining a machining target area; and an electrical discharge machining unit for cutting the machining target area of the workpiece along a first cutting direction with at least one machining parameter of the electrical discharge machining unit in a first cutting step of the cutting process, wherein the machining parameter is correspondingly adjusted according to a specified parameter of the workpiece varying to a first value, so as to perform a second cutting step on the machining target area of the workpiece with the adjusted machining parameter, wherein the specified parameter comprises a first cutting thickness of the workpiece, the machining parameter is correspondingly adjusted according to the first cutting thickness of the workpiece increasing to the first value, so as to perform the second cutting step on the machining target area of the workpiece with the adjusted machining parameter, wherein the machining parameter is a direction parameter, the electrical discharge machining unit changes the direction parameter from the first cutting direction to a second cutting direction when the first cutting thickness of the workpiece increases to the first value, so as to perform the second cutting step on the machining target area of the workpiece along the second cutting direction.

2. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, wherein the machining parameter comprises one or more of a direction parameter, an electrical discharge property parameter, a discharge removal parameter, and a movement and tension parameter.

3. The discharge machining apparatus capable of adjusting machining parameters according to claim 2, wherein wherein the direction parameter is a direction of machining relative to the workpiece; the electrical discharge property parameter comprises one or more of a peak current, a voltage when the workpiece and the electrical discharge electrode are far apart, a discharge pulse duration, a discharge pulse rest time, and a servo reference voltage between the electrical discharge electrode and the workpiece; the discharge removal parameter comprises a flow rate of a discharge removal liquid provided on the electrical discharge electrode; and the movement and tension parameter comprises one or more of a movement speed of the electrical discharge electrode and a tension of the electrical discharge electrode.

4. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, wherein the second cutting direction and the first cutting direction have a first included angle, the first included angle ranges between 0 degrees and 360 degrees.

5. The discharge machining apparatus capable of adjusting machining parameters according to claim 4, wherein wherein the first included angle is 180 degrees.

6. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, wherein a second cutting thickness of the workpiece in the second cutting step is less than the first value.

7. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein wherein a cutting speed of the electrical discharge electrode to the workpiece in the second cutting step is greater than a cutting speed of the electrical discharge electrode to the workpiece when the first cutting thickness is the first value.

8. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein wherein when a second cutting thickness of the workpiece in the second cutting step increases to a second value, the electrical discharge machining unit changes the direction parameter from the second cutting direction to a third cutting direction, so as to perform a third cutting step on the machining target area of the workpiece along the third cutting direction, wherein the workpiece has a third cutting thickness in the third cutting step.

9. The discharge machining apparatus capable of adjusting machining parameters according to claim 8, wherein wherein the third cutting direction and the second cutting direction have a second included angle, the second included angle ranges between 0 degrees and 360 degrees.

10. The discharge machining apparatus capable of adjusting machining parameters according to claim 9, wherein, wherein the second included angle is 90 degrees.

11. The discharge machining apparatus capable of adjusting machining parameters according to claim 8, wherein, wherein the third cutting thickness of the workpiece in the third cutting step is less than the first value or the second value.

12. The discharge machining apparatus capable of adjusting machining parameters according to claim 8, wherein, wherein the discharge electrode has a cutting speed on the workpiece in the third cutting step greater than a cutting speed of the discharge electrode on the workpiece when the first thickness to be cut is the first value or a cutting speed of the discharge electrode on the workpiece when the second thickness to be cut is the second value.

13. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein further comprising a heat source that heats the workpiece during the cutting process.

14. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, wherein the discharge electrode cuts the work target area of the workpiece in a fluid.

15. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein wherein the work target area has a filler material thereon to fill surface cracks formed on the work target area during the cutting process.

16. The electric discharge machining device capable of adjusting machining parameters according to claim 15, wherein, wherein the filler material is formed on the work target area by a heat source to fill surface cracks formed on the work target area during the cutting process.

17. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, further comprising an external force disturbance source that causes a filler material to fill surface cracks on the work target area during the cutting process.

18. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, wherein the workpiece is one or a plurality of workpieces.

19. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, wherein the discharge electrode is one or a plurality of discharge electrodes.

20. The discharge machining apparatus capable of adjusting machining parameters according to claim 1, wherein, wherein the discharge electrode cuts the work target area of the workpiece in a vacuum environment.

21. An electro-discharge machining method capable of adjusting machining parameters, characterized by, performing a cutting process using the discharge machining apparatus with adjustable machining parameters of any one of claims 1 to 3.

22. An electro-discharge machining method for performing a cutting process, wherein machining parameters are adjusted, characterized in that, comprising the steps of: providing at least one workpiece, the workpiece being placed on a stage, the workpiece defining a work target area; performing a first cutting step by at least one discharge electrode applying a discharge energy to the work target area of the workpiece along a first cutting direction with at least one machining parameter, thereby cutting the work target area of the workpiece; performing a first adjusting step according to a first thickness to be cut of the workpiece increasing to a first value to correspondingly adjust the machining parameter; and performing a second cutting step by the discharge electrode applying the discharge energy to the work target area of the workpiece with the machining parameter adjusted in the first adjusting step, thereby cutting the work target area of the workpiece, wherein the machining parameter is a directional parameter, and when the first thickness to be cut of the workpiece increases to the first value in the first cutting step, the first adjusting step is performed to change the directional parameter from the first cutting direction to a second cutting direction, and the second cutting step is performed along the second cutting direction to the work target area of the workpiece.

23. The adjustable machining parameter electro-discharge machining method of claim 22 wherein, wherein a second thickness to be cut of the workpiece in the second cutting step is less than the first value.

24. The discharge machining method with adjustable machining parameters of claim 22, wherein when a second thickness to be cut of the workpiece cut by the discharge electrode increases to a second value in the second cutting step, a second adjusting step is performed to change the directional parameter from the second cutting direction to a third cutting direction, and a third cutting step is performed along the third cutting direction to the work target area of the workpiece.

25. The adjustable machining parameter electro-discharge machining method of claim 24, wherein, wherein a third thickness to be cut of the workpiece in the third cutting step is less than the first value or the second value.

26. The adjustable machining parameter electro-discharge machining method of claim 22 wherein, wherein the first adjusting step is changing a placement direction of the workpiece to adjust the machining parameter.

27. The adjustable machining parameter electrical discharge machining method of claim 22, wherein the first adjusting step is changing a feed direction of the discharge electrode relative to the workpiece to adjust the machining parameter.

28. The adjustable machining parameter electro-discharge machining method of claim 22 wherein, wherein the first adjusting step is changing a placement direction of the workpiece using the carrier to adjust the machining parameter.

29. The adjustable machining parameter electro-discharge machining method of claim 22 wherein, further comprising performing a filling step to fill surface cracks formed on the machining target area in the cutting process.

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