A microsheet transfer device and a microsheet transfer method

Abstract

The present application relates to the technical field of semiconductor devices, and discloses a microsheet transfer device and a microsheet transfer method, the microsheet transfer device comprising a contact for transferring a microsheet and a probe for driving the contact to adjust a pose, the contact being made of a transparent material, the probe being offset from the contact, and the probe being fixedly connected with or integrally formed with the contact. The microsheet transfer device provided by the present application can provide favorable conditions for an operator to observe from above using a microscope, thereby improving the accuracy of microsheet transfer operation.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor devices, in particular to a micro sheet transfer device and a micro sheet transfer method. BACKGROUND

[0002] For a long time, friction and wear problems are not only closely related to manufacturing industry, but also directly related to energy, environment and health. According to statistics, about one-third of the world's energy is consumed in the process of friction, and about 80% of machine parts failure is caused by wear. Structural super-slip is one of the ideal solutions to solve the problem of friction and wear. Structural super-slip refers to the phenomenon that the friction and wear between two atomically smooth and non-commensurate van der Waals solid surfaces (such as graphene, molybdenum disulfide and other two-dimensional material surfaces) are almost zero.

[0003] Due to the influence of factors such as the difficulty of preparing large-scale graphite single crystal materials, the size of the existing single super-slip sheet is still micron-scale, so it is more and more difficult to realize large-scale super-slip only by the preparation of single crystal materials. Therefore, researchers have proposed a scheme to arrange and combine multiple small-scale super-slip structures to form a large-scale structure super-slip. However, the assembly of large-scale structure super-slip requires the combination and transfer of multiple super-slip sheets. Because the size of a single super-slip sheet is small, a microscope must be used during the transfer, and the transfer and control of the super-slip sheet must be observed from above. The structure of the existing transfer device itself limits the effect of observation and transfer control, affecting the accuracy of the transfer operation.

[0004] Therefore, there is an urgent need for a micro sheet transfer device and a micro sheet transfer method to solve the above technical problems. SUMMARY

[0005] Based on the above, the purpose of the present application is to provide a micro sheet transfer device and operation method, which provides favorable conditions for the operator to observe from above using a microscope, and improves the accuracy of the micro sheet transfer operation.

[0006] To achieve the above purpose, the present application adopts the following technical solutions:

[0007] On the one hand, a micro sheet transfer device is provided, comprising:

[0008] A contact for transferring a micro sheet, the contact is made of transparent material;

[0009] A probe for driving the contact to adjust the pose, the probe is offset from the contact, and the probe is fixedly connected or integrally formed with the contact.

[0010] Specifically, the contact of the microchip transfer device is made of transparent material, the probe is connected to the contact in a biased manner, and the transparent contact is adapted to the microscope used by the operator to observe from above, so that the operator can observe the microchip on the substrate through the contact, and the operator can also observe whether the microchip is adhered to the adhesive part and the number of the adhered microchip, and drive the contact to adjust the pose according to the observation result, thereby improving the accuracy of the microchip transfer operation.

[0011] As an optional technical solution of the microchip transfer device, the bottom of the contact has an adhesive part for adhering the microchip, and the adhesive part is made of elastic transparent material with adsorption force.

[0012] As an optional technical solution of the microchip transfer device, the side of the adhesive part facing the microchip is a plane or an arc surface.

[0013] As an optional technical solution of the microchip transfer device, the shape of the adhesive part is a hemisphere, and the arc surface of the hemisphere faces the microchip.

[0014] As an optional technical solution of the microchip transfer device, the area of the side of the adhesive part facing the microchip is greater than 100 μm 2 and less than 100 mm 2 .

[0015] As an optional technical solution of the microchip transfer device, the probe and the contact are fixedly connected through a connecting piece.

[0016] As an optional technical solution of the microchip transfer device, the connecting piece is detachably connected to the probe.

[0017] As an optional technical solution of the microchip transfer device, a transfer driving mechanism for driving the contact to horizontally displace or vertically rotate is further included.

[0018] As an optional technical solution of the microchip transfer device, the transfer driving mechanism includes a telescopic rod and a control piece for controlling the telescopic rod to extend and retract, the telescopic rod is hingedly connected to the probe through a hinge, and the included angle between the telescopic rod and the probe is controlled by the hinge.

[0019] As an optional technical solution of the microchip transfer device, the hinge is an electrically operated hinge.

[0020] On the other hand, a microchip transfer method is provided, which uses a microscope and the microchip transfer device as described above, the microscope is located directly above the microchip transfer device, and the microchip transfer method includes the following steps:

[0021] The micro sheet is located directly below the microscope, and the probe drives the contact to the micro sheet and the microscope;

[0022] The probe controls the contact to move to pick up one or more micro sheets to be transferred;

[0023] The probe controls the contact to move to the target substrate, and uses van der Waals force to place the micro sheet to be transferred on the contact on the target substrate.

[0024] As an optional technical solution of the micro sheet transfer method, the shape of the pick-up part is an arc surface, a hemisphere or a sphere, and the probe controls the contact to rotate to pick up one or more micro sheets to be transferred.

[0025] The micro sheet transfer device provided by the application has the following beneficial effects:

[0026] The contact of the micro sheet transfer device provided by the application is made of transparent material, the probe is connected to the contact in a biased manner, and is matched with the transparent contact, which provides favorable conditions for an operator to observe from above using a microscope. The operator can observe the micro sheet on the substrate through the contact, and also can observe whether the pick-up part has the micro sheet and the number of the micro sheets picked up, and drive the contact to adjust the pose according to the observation result, thereby improving the accuracy of the micro sheet transfer operation.

[0027] The micro sheet transfer method provided by the application can make the micro sheet adhere to the contact by driving the contact to press against the micro sheet to be transferred on the substrate, and can transfer the micro sheet to the target substrate by using van der Waals force. An operator can observe the pick-up condition from above through the contact using a microscope, thereby improving the accuracy of the micro sheet transfer operation. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the description of the embodiments of the application. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of the contents of the embodiments of the application and the drawings.

[0029] Figure 1 is a structural schematic diagram of the micro sheet transfer device provided by the application;

[0030] Figure 2 is a state schematic diagram of the micro sheet transfer device provided by the application Figure One ;

[0031] Figure 3 is a state schematic diagram of the micro sheet transfer device provided by the application Figure Two ;

[0032] Figure 4 is a state diagram of the micro sheet transfer device provided by the present application Figure Three

[0033] Figure 5 is a connection structure diagram of the contact and the probe provided by the present application

[0034] Figure 6 is a flow chart of the micro sheet transfer method provided by the present application

[0035] In the figure:

[0036] 1, contact; 2, connecting piece; 21, main body part; 22, connecting part; 3, probe; 4, telescopic rod; 5, control piece; 6, hinge; 7, magnetic attraction assembly; 10, base; 20, microscope. DETAILED DESCRIPTION

[0037] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present application will be further described in detail below with reference to the drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0038] As shown in the figure, the present embodiment provides a micro sheet transfer device, which is used in cooperation with a microscope 20 and is used for small-batch transfer of granular micro sheets such as super-smooth sheets. The micro sheet transfer device comprises a contact 1 and a probe 3. The bottom of the contact 1 is provided with a sticking part for sticking the micro sheet. The contact 1 is made of transparent material. The sticking part is made of elastic transparent material with adsorption force. Figures 1-4 Specifically, the contact 1 of the micro sheet transfer device provided by the present embodiment is made of transparent material. The probe 3 is connected to the contact 1 in a biased manner. The transparent contact 1 is adapted to the transparent contact 1, which provides favorable conditions for the operator to observe from above using the microscope 20. The operator can observe the micro sheet on the base 10 through the contact 1. It is also convenient for the operator to observe whether the sticking part is stuck with the micro sheet and the number of the micro sheets stuck. According to the observation result, the operator can drive the contact 1 to adjust the pose, thereby improving the accuracy of the micro sheet transfer operation. The sticking part is made of elastic material, so that the contact between the sticking part and the micro sheet is flexible contact, so as to improve the stress condition of the micro sheet when being stuck.

[0039]

[0040] ​​Optionally, the side of the sticking part facing the micro sheet is a plane or an arc surface. When the sticking part is a plane, multiple micro sheets on the same plane can be directly stuck to achieve synchronous sticking of multiple micro sheets. When the sticking part is an arc surface, multiple micro sheets can be simultaneously stuck, and the edge is curved to avoid affecting adjacent micro sheets during sticking.

[0041] In this embodiment, the side of the sticking part facing the micro sheet is an arc surface, and more specifically, the shape of the sticking part is a hemisphere, and the arc surface of the hemisphere faces the micro sheet. During operation, the probe 3 drives the contact 1 to move in space to adjust the position of the contact 1 and press the sticking part against the micro sheet to be transferred. The probe 3 can also drive the contact 1 to rotate in space. Under the drive of the probe 3, the contact 1 moves in space and can press against the micro sheet to be transferred on the base 10 at different angles. Multiple micro sheets can be bonded to different positions of the sticking part to achieve the function of simultaneously transferring multiple micro sheets, greatly improving the surface utilization of the contact 1. Even if the spacing between the micro sheets to be transferred is not equal and the position is irregular, the pose of the contact 1 can still be adjusted by the transfer driving mechanism to stick the micro sheets one by one. It is suitable for transferring small batches of irregularly placed micro sheets.

[0042] Further, since the bottom surface of the contact 1 has a large contact surface, the micro sheet transfer device provided by this embodiment can transfer micro sheets with a size of several microns to several hundred microns, i.e., the size of the operable object ranges from micro to meso, and has a wide range of applications.

[0043] In other embodiments where the side of the sticking part facing the micro sheet is an arc surface, the sticking part can also be in the shape of a sphere or other convex structures with an arc outer surface that is asymmetric and irregular, which is not uniquely limited here.

[0044] Preferably, the area of the side of the sticking part facing the micro sheet is greater than 100 μm 2 and less than 100 mm 2 to ensure a large contact area and ensure uniform contact of the entire contact surface with the micro sheet. It is suitable for micro sheets with a size of 1*1 μm to 700*700 μm.

[0045] In other embodiments where the side of the sticking part facing the micro sheet is a plane, the bottom of the sticking part is provided with a plane with an area of not less than 100 um*100 um. When the sticking part contacts the micro sheet, the included angle between the plane and the base 10 is less than 0.3°.

[0046] Preferably, the contact 1 is made of AB glue, PDMS (Polydimethylsiloxane), or other transparent polymer materials. The AB glue can be transparent epoxy resin AB glue.

[0047] Optionally, the microsheet transfer device further comprises a connecting member 2, the connecting member 2 is arranged as a rigid structure, the probe 3 is fixedly connected with the contact 1 through the connecting member 2, the contact 1 is arranged at the bottom of the connecting member 2, the probe 3 is offset connected with the connecting member 2, the connecting member 2 is made of transparent material to avoid blocking the operator from observing from above using the microscope 20. Preferably, the connecting member 2 can also be made of transparent materials such as transparent epoxy resin AB glue, and the type of transparent material is not uniquely limited here.

[0048] Further, the connecting member 2 comprises a main body part 21 and a connecting part 22, the main body part 21 is arranged as a cylindrical structure, the contact 1 is arranged at the bottom of the main body part 21, the connecting part 22 is arranged at the peripheral part of the main body part 21, and the probe 3 is connected with the connecting part 22. Of course, the connecting part 22 can also be arranged at a non-central position on the top surface of the main body part 21, and the same effect of offset connection for observation through the connecting member 2 can also be achieved.

[0049] Preferably, the contact 1 is detachably connected with the connecting member 2; and / or, the connecting member 2 is detachably connected with the probe 3, specifically, the contact 1, the connecting member 2 and the probe 3 can be connected through buckle, adhesive or magnetic attraction structure, so as to individually replace the connecting member 2, the contact 1 or the probe 3, save the amount of material, improve the service life of the microsheet transfer device and reduce the marginal cost.

[0050] In this embodiment, as shown in Figure 5 The contact 1 is connected with the probe 2 through the magnetic attraction assembly 7, specifically, the opposite sides of the contact 1 and the probe 2 are respectively provided with annular magnets with opposite magnetic pole directions, or one side is provided with a magnet and the other side is provided with a ferromagnetic metal, so as to individually replace the contact 1 or the probe 2, facilitate disassembly and replacement, and save the amount of material.

[0051] Optionally, the connecting part 22 is provided with a threaded hole, the output end of the transfer driving mechanism is arranged as a screw structure matched with the threaded hole, that is, one end of the probe 3 connected with the connecting member 2 is provided with an external thread, and the probe 3 is threadedly connected with the connecting part 22. Of course, the probe 3 and the connecting member 2 can also be detachably connected through clamping, insertion or other ways.

[0052] In some embodiments, according to actual use requirements, the contact 1 and the connecting member 2 can also be integrally formed, and / or the connecting member 2 and the probe 3 can also be integrally formed.

[0053] Optionally, the microsheet transfer device further comprises a transfer driving mechanism for driving the horizontal displacement or vertical rotation of the contact head 1, and specifically, the transfer driving mechanism comprises a telescopic rod 4 and a control member 5 for controlling the telescopic rod 4, the telescopic rod 4 is hinged to the probe 3 through a hinge 6, and the included angle between the telescopic rod 4 and the probe 3 is controlled by the hinge 6. Preferably, the hinge 6 is an electrically operated hinge, and the rotation of the probe 3 can be automatically controlled by the hinge 6, which is more convenient to control and simpler in structure. Of course, the rotation angle of the hinge 6 can also be controlled by an external electric control or a manual control, or by a linear driving member connected between the telescopic rod 4 and the probe 3, which is not limited in a unique manner.

[0054] Preferably, the control member 5 is a mechanical arm. The output end of the mechanical arm is provided with a clamping clamp in a cylindrical structure, and the end of the telescopic rod 4 away from the hinge 6 is smooth and inserted into the clamping hole of the clamping clamp for connection. Of course, the clamping clamp in a cylindrical structure can also be provided on the telescopic rod 4, and the output end of the mechanical arm is provided with a rod-shaped structure with a smooth surface matched therewith.

[0055] As shown in Figure 6 , the embodiment also provides a microsheet transfer method, which adopts a microscope 20 and the above-mentioned microsheet transfer device, the microscope 20 is located directly above the microsheet transfer device, and the microsheet transfer method specifically comprises the following steps:

[0056] The microsheet is located directly below the microscope 20, and the contact head 1 is driven to move between the microsheet and the microscope 20;

[0057] The probe 3 controls the contact head 1 to move to stick one or more microsheets to be transferred;

[0058] The probe 3 controls the contact head 1 to move to the target substrate 10, and uses the Van der Waals force to place the microsheet to be transferred on the contact head 1 on the target substrate 10.

[0059] In the embodiment, the contact head 1 with an arc-shaped surface, a hemispherical body or a spherical body-shaped sticking part can stick multiple microsheets to be transferred at one time, and the specific transfer steps are as follows:

[0060] S1, set the included angle between the probe 3 and the horizontal plane to 90° and lock it, as shown in Figure 3 ;

[0061] S2, use the control member 5 to control the movement of the contact head 1 in space, adjust the bottom of the contact head 1 to the microsheet area to be operated under the microscope 20, and fine-tune the vertical height to lower the contact head 1 until the contact head 1 is in contact with the microsheet on the substrate 10, and then raise it in the vertical direction, so that the microsheet is adhered to the contact head 1;

[0062] S3, adjust the angle between the probe 3 and the horizontal plane to 60° and lock, as shown in Figure 2

[0063] S4, repeat the above step S2 to make another micro sheet adhere to another position of the contact 1;

[0064] S5, adjust the angle between the probe 3 and the horizontal plane to 120° and lock, as shown in Figure 4

[0065] S6, repeat the above step S2 to make another micro sheet adhere to the corresponding position of the contact 1;

[0066] Through steps S1-S6, the contact 1 is pressed against the micro sheet to be transferred on the substrate 10, which can transfer multiple micro sheets at a time, or adjust the pose of the contact 1 by adjusting the different angles between the probe 3 and the horizontal plane through the control member 5 to stick the micro sheets to the different tangent planes of the contact 1 one by one, which is suitable for transferring small batches of irregularly placed micro sheets, which is a function that the traditional probe 3 does not have. In some embodiments, the angle between the probe 3 and the horizontal plane can be further adjusted to paste a larger number of micro sheets.

[0067] On the other hand, the size range of the micro sheet that can be transferred by the above method is much larger than that of the conventional chemical etching probe, and the micro sheet with a size of 1*1 μm to 700*700 μm can be operated, so the size of the micro sheet that can be operated ranges from micro to meso (sub-millimeter), while the conventional chemical etching probe can only manipulate micro sheets with a size of microns, such as micro sheets with a size of 20*20 μm or less. The applicable range of the micro sheet transfer method provided in the embodiment far exceeds that of the conventional chemical etching probe transfer method.

[0068] Further, the micro sheet transfer method provided in the embodiment further comprises the following steps:

[0069] S7, take another clean target substrate 10, use the control member 5 to control the movement of the contact 1 in space, adjust the bottom of the contact 1 to the target substrate 10 area under the microscope 20, fine-tune the vertical height to lower the contact 1, until the contact 1 contacts the target area and the micro sheet is placed, completing the transfer of the micro sheet;

[0070] S8, set the angle between the probe 3 and the horizontal plane to 60° and lock;

[0071] S9, repeat step S7 to complete the transfer of the corresponding micro sheet.

[0072] Among them, the specific angles of 30° and 60° in the above embodiment can be adjusted according to actual needs, and the different angles are related to the number of micro sheets to be transferred and the size of the sticking part.​​

[0073] Note that the above merely describes the preferred embodiments of the present application and the principles of the technology applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, modifications and substitutions can be made by those skilled in the art without departing from the scope of the present application. Therefore, although the present application has been described in detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the claims.

Claims

1. A micro-chip transfer device, characterized in that, include: A contact (1) for transferring microplates, the contact (1) being made of a transparent material; A probe (3) is used to drive the contact (1) to adjust its position. The probe (3) is offset from the contact (1), and the probe (3) is fixedly connected to the contact (1) or integrally formed. The bottom of the contact (1) has an adhesive part for adhering to micro-pieces, the adhesive part being made of an elastic transparent material with adsorption force; The side of the adhesive portion facing the micro-piece is either flat or curved.

2. The micro-chip transfer device according to claim 1, characterized in that, The adhesive part is hemispherical in shape, with the arc-shaped surface of the hemisphere facing the micro-piece.

3. The micro-chip transfer device according to claim 1, characterized in that, The area of ​​the side of the adhesive portion facing the microsheet is greater than 100 μm. 2 and less than 100mm 2 .

4. The micro-chip transfer device according to claim 1, characterized in that, It also includes a connector (2), through which the probe (3) and the contact (1) are fixedly connected.

5. The micro-chip transfer device according to claim 4, characterized in that, The connector (2) is detachably connected to the probe (3).

6. The micro-chip transfer device according to claim 1, characterized in that, It also includes a transfer drive mechanism for driving the contact (1) to horizontal displacement or vertical rotation.

7. The micro-chip transfer device according to claim 6, characterized in that, The transfer drive mechanism includes a telescopic rod (4) and a control element (5) for controlling the extension and retraction of the telescopic rod (4). The telescopic rod (4) is hinged to the probe (3) by a hinge (6), and the included angle between the telescopic rod (4) and the probe (3) is controlled by the hinge (6).

8. The micro-chip transfer device according to claim 7, characterized in that, The hinge (6) is an electrically actuated hinge.

9. A method for transferring micro-pieces, characterized in that, Using a microscope (20) and the microslide transfer apparatus as described in any one of claims 1-8, wherein the microscope (20) is positioned directly above the microslide transfer apparatus, the microslide transfer method includes the following steps: The microplate is located directly below the microscope (20), driving the contact (1) between the microplate and the microscope (20); The probe (3) controls the contact (1) to move and pick up one or more micro-pieces to be transferred; The probe (3) controls the contact (1) to move to the target substrate (10) and uses van der Waals forces to place the micro-piece to be transferred on the contact (1) onto the target substrate (10).

10. The micro-piece transfer method according to claim 9, characterized in that, The shape of the adhesive part is an arc surface, a hemisphere or a sphere, and the probe (3) controls the contact (1) to rotate and adhesive one or more micro-pieces to be transferred.

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