Cleaning result detection method and device of material conveying box

Abstract

The present invention provides a method for detecting the cleaning results of a material conveying box, which is implemented in a cleaning processing area station of the material conveying box, and performs cleaning results detection including humidity and dust falling amount on the material conveying box or its box body after cleaning; wherein the cleaning results detection of the box body is carried out in a drying chamber with a negative pressure environment in the cleaning processing area station, and the cleaning results detection of the material conveying box is carried out on a platform provided in the cleaning processing area station; in addition, the present invention also includes a cleaning results detection device for implementing the above method, which is used to control the results and pass rate of the material conveying box after automatic cleaning.

Description

Technical Field

[0001] The present invention relates to a conveying box for loading and transferring materials between different processing areas, and also relates to a cleaning result detection technology including humidity and dust amount of the conveying box after wet cleaning, and in particular to a cleaning result detection method and device of a material conveying box. Background Art

[0002] In the prior art, the material transfer box that is closest to the present invention is a front opening unified pod (FOUP) for carrying semiconductor wafers.

[0003] During the production process of semiconductor wafers, especially within each processing area and during the transportation of wafers between processing areas, very high cleanliness requirements are required, especially to avoid the appearance of dust particles in the environment that affect the production qualification rate of wafers.

[0004] It is known that the transport of semiconductor wafers commonly uses the above-mentioned wafer transfer boxes. Through the operation of the automated handling system, multiple wafer transfer boxes can respectively capture and accommodate wafers in each processing station, and can transfer wafers between each processing station, and then unload the wafers when arriving at the target processing station.

[0005] The wafer transfer box is composed of an openable front cover and a box body that are interlocked with each other. The inner side walls of the box body are provided with comb-shaped ribs for supporting the wafers contained therein, so that each wafer transfer box can accommodate a plurality of wafers.

[0006] Based on the high standard requirements for cleanliness, the wafer transfer box must be automatically cleaned after being used for a certain period of time. At present, the more advanced technologies for automatically cleaning the wafer transfer box are known in patents such as CN102804332B, TW201400202A (Taiwan patent), CN1082222A, and US20140069467A1. These patents disclose that a cleaning station is set up in the wafer production line, and the wafer transfer box to be cleaned is transferred to a load port of the cleaning station by an automated handling system, and the wafer transfer box on the load port is captured by an automatic arm (robot) in the cleaning station, and the front cover and the box body of the wafer transfer box are separated first, and then the front cover and the box body are automatically captured and sequentially passed through the steps of wet cleaning and drying of the cleaning liquid to purify the particles that may remain on the inner and outer surfaces of the front cover and the box body, thereby improving the cleanliness of dust-free transmission.

[0007] It is also known that the wafer transfer box used for dust-free transfer of wafers has been applied to the occasion of dust-free transfer of high-level circuit carriers, such as circuit carriers for embedded multi-die interconnect bridge (EMIB) or circuit carriers using ABF as a build-up material, etc. The surface area of ​​these high-level circuit carriers is relatively larger than that of traditional PCBs, and they are presented in a rectangular layout mode, making the hardness of high-level circuit carriers relatively softer than traditional PCBs. Accordingly, when the contents in the transfer box must be changed from wafers to high-level circuit carriers, the internal structure of the transfer box must be changed so that each transfer box can stably accommodate multiple high-level circuit carriers.

[0008] See also Figure 1 , Figure 2 and Figure 3 , discloses a material transfer box 10 for accommodating the high-order circuit carrier 16 (hereinafter referred to as the carrier 16), wherein the box body 11 and the front cover 12 have the same features as the wafer transfer box, especially including ribs 13 protruding in a comb shape on the double side walls 11a of the box body 11. In addition, since the surface area of ​​the carrier 16 as the accommodating object is relatively large and relatively soft, a suspended support rod 15 protruding from the bottom 11b to the accommodating cavity 14 must be formed in the box body 11, so that the double-sided ribs 13 are used to support the double ends 16a of the carrier 16, and the suspended support rod 15 is used to support the middle section 16b of the carrier 16, so as to prevent the carrier 16 from collapsing or interfering with each other in the material transfer box 10 (for details, see Figure 1 , Figure 2 and Figure 3 shown).

[0009] It can be seen that the differences in the contents will affect the complexity of the internal structure of the transfer box. In particular, the overall structure of the comb-shaped ribs 13 and the hanging support rods 15 in the box body 11 of the material transfer box 10 for loading the carrier 16 is relatively more complex than that of the wafer transfer box. However, the material transfer box targeted by the present invention includes not only the above-mentioned wafer transfer box but also the material transfer box 10 for loading the carrier.

[0010] After the above-mentioned material transfer boxes are subjected to the above-mentioned cleaning technology, in order to ensure that the residual water molecules in the box can be fully removed to achieve the ideal drying effect and to prevent the wafers or carriers to be loaded from being affected by moisture, it is usually necessary to perform humidity detection on the cleaned material transfer box or its box body; in this regard, the CN102804332B patent conceptually teaches that a humidity sensor can be used to monitor the drying process and end point in the drying process in a chamber environment with a negative pressure after wet cleaning of the front cover and the box body; however, the CN102804332B patent does not further teach how the humidity sensor can monitor the humidity of the cleaned and dried transfer box in the drying chamber or other locations; in response to this shortcoming, the present invention further proposes a specific technology to overcome this shortcoming. Summary of the invention

[0011] The purpose of the present invention is to improve the existing conveying box for materials such as wafers or carriers, so that the cleaning results can be detected in sequence after automatic cleaning, and the cleaning results include humidity and dust amount detection.

[0012] To this end, the present invention specifically integrates cleaning results detection technology into the cleaning processing area station of the material conveying box to ensure that when the cleaned material conveying box is output from the cleaning processing area station, the humidity and dust amount of the inner surface around the material conveying box, or the humidity and dust amount of the inner and outer surfaces around its box body, can meet the ideal dryness and cleanliness requirements, so as to facilitate quality control cleaning results.

[0013] To achieve the above object, the technical solution adopted by the present invention is:

[0014] A method for detecting the cleaning results of a material transfer box is implemented in a cleaning processing station, wherein the cleaning processing station can sequentially perform the following steps (1) to (4) of cleaning the material transfer box:

[0015] Step (1), separating the material transfer box before cleaning into a front cover and a box body;

[0016] Step (2), wet cleaning the front cover and the box body;

[0017] Step (3), drying the front cover and the box body, wherein at least the box body is dried under a vacuum environment, wherein the vacuum environment is formed by generating a negative pressure in at least one drying chamber in the cleaning processing area station; and

[0018] Step (4), combining the front cover and the box body to form a cleaned material transfer box;

[0019] The cleaning result detection method comprises performing the following steps (3-1) to (3-4):

[0020] Step (3-1), selecting the drying chamber capable of generating a vacuum as a testing location, and using at least one of the front cover and the box body that have been dried in the drying chamber as a testing object;

[0021] Step (3-2), introducing clean dry air into the drying chamber to release the vacuum, and generating a positive pressure dry air in the drying chamber to contact the inner surface and the outer surface around the detection object, so that the positive pressure dry air absorbs at least one cleaning result judgment factor remaining on the inner surface and the outer surface around the detection object after drying;

[0022] Step (3-3), capturing positive pressure dry air in the drying chamber; and

[0023] Step (3-4) uses at least one detection element to detect the content of the cleaning result judgment factor in the positive pressure dry air.

[0024] The cleaning result detection method of the material conveying box further comprises the step of removing liquid from the front cover and the box body between wet cleaning and drying the front cover and the box body.

[0025] In the cleaning result detection method of the material conveying box, the detection element is a humidity sensor, and the cleaning result judgment factor is the water molecules absorbed by the positive pressure dry air.

[0026] In the cleaning result detection method of the material conveying box, the detection element is a particle counter, and the cleaning result judgment factor is the dust particles absorbed by the positive pressure dry air.

[0027] In the cleaning result detection method of the material conveying box, the detection object is the box body, at least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the detection object includes the surrounding surface of the suspended support rod.

[0028] A cleaning result detection device for a material conveying box is arranged in a cleaning processing area station of the material conveying box. The material conveying box can be separated into a front cover and a box body in the cleaning processing area station. The front cover and the box body can be cleaned by a plurality of chambers in the processing area station individually or together, and then combined into a cleaned material conveying box. The cleaning processing area station is characterized in that the configuration includes:

[0029] At least one cleaning chamber is provided with a plurality of spray nozzles capable of spraying cleaning liquid to wet-clean the front cover and the box body;

[0030] At least one drying chamber is provided with a negative pressure channel and a plurality of thermal energy elements. The negative pressure channel is connected between the at least one drying chamber and an air pump to extract the air in the at least one drying chamber to generate a vacuum environment. The plurality of thermal energy elements can dry the front cover and the box body.

[0031] The detection device uses at least one of the front cover and the box body as a detection object, and the detection device is installed in at least one of the drying chambers, and includes:

[0032] an air inlet, provided at one side of at least one of the drying chambers and connected to an air supply machine, the air inlet can guide clean dry air into at least one of the drying chambers to release the vacuum and generate positive pressure dry air that can contact the inner and outer surfaces around the detection object to absorb at least one cleaning result judgment factor remaining on the detection object after drying;

[0033] a positive pressure channel, formed by connecting at least one of the drying chambers with a multi-way pipe, for discharging positive pressure dry air in at least one of the drying chambers; and

[0034] At least one detection element is installed on the multi-way pipe to detect the content of the cleaning result judgment factor in the positive pressure dry air.

[0035] The cleaning result detection device of the material conveying box, wherein the cleaning chamber is also provided with a plurality of blowing elements to remove liquid from the front cover and the box body after the cleaning liquid is sprayed.

[0036] The cleaning result detection device of the material conveying box, wherein the cleaning processing area station is also equipped with at least one dehydration chamber, and at least one of the dehydration chambers is provided with a plurality of blowing elements to dehydrate the front cover and the box body after spraying the cleaning liquid.

[0037] In the cleaning result detection device of the material conveying box, the negative pressure channel and the positive pressure channel share the multi-way pipe, and the vacuum pump is connected to at least one of the drying chambers via the multi-way pipe.

[0038] The cleaning result detection device of the material conveying box, wherein at least one of the drying chambers is provided with a negative pressure capture hole, and the multi-way pipe is connected to the at least one of the drying chambers via the negative pressure capture hole.

[0039] The cleaning result detection device of the material conveying box, wherein the positive pressure channel is formed in the multi-way tube, at least one of the drying chambers is also provided with a positive pressure capture hole, and the multi-way tube is connected to at least one of the drying chambers via the positive pressure capture hole.

[0040] The cleaning result detection device of the material conveying box, wherein the detection element is a humidity sensor, and the cleaning result judgment factor is the water molecules absorbed by the positive pressure dry air.

[0041] The cleaning result detection device of the material conveying box, wherein the detection element is a particle counter, and the cleaning result judgment factor is the dust particles absorbed by the positive pressure dry air.

[0042] The cleaning result detection device of the material conveying box, wherein the detection object is the box body, at least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the detection object includes the surrounding surface of the suspended support rod.

[0043] A method for detecting the cleaning results of a material transfer box, characterized in that the cleaning processing area station can sequentially perform the following steps (1) to (4) of cleaning the material transfer box:

[0044] Step (1), separating the material transfer box before cleaning into a front cover and a box body;

[0045] Step (2), wet cleaning the front cover and the box body;

[0046] Step (3), drying the front cover and the box body; and

[0047] Step (4), combining the front cover and the box body to form a cleaned material transfer box;

[0048] The cleaning result detection method includes using the material transfer box formed after drying as a detection object and sequentially performing the following steps (4-1) to (4-4):

[0049] Step (4-1), selecting a platform of the cleaning processing area station as a testing location, and placing and positioning the test object on the platform;

[0050] Step (4-2), guiding clean dry air into a closed chamber of the inspection object via the platform, so that a positive pressure dry air is generated in the closed chamber to contact the inner surface around the closed chamber, so that the positive pressure dry air absorbs at least one cleaning result judgment factor remaining on the inner surface around the closed chamber after drying;

[0051] Step (4-3), capturing the positive pressure dry air in the closed accommodation chamber; and

[0052] Step (4-4) uses at least one detection element to detect the content of the cleaning result judgment factor in the positive pressure dry air.

[0053] The cleaning result detection method of the material conveying box, wherein the box body is dried in a vacuum environment.

[0054] In the cleaning result detection method of the material transfer box, the platform is a loading port in the cleaning processing area station for placing the material transfer boxes before and after cleaning.

[0055] The cleaning result detection method of the material conveying box further comprises the step of removing liquid from the front cover and the box body between wet cleaning and drying the front cover and the box body.

[0056] In the cleaning result detection method of the material conveying box, the detection element is a humidity sensor, and the cleaning result judgment factor is the water molecules absorbed by the positive pressure dry air.

[0057] In the cleaning result detection method of the material conveying box, the detection element is a particle counter, and the cleaning result judgment factor is the dust particles absorbed by the positive pressure dry air.

[0058] In the cleaning result detection method of the material conveying box, at least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the box body includes the surrounding surface of the suspended support rod.

[0059] A cleaning result detection device for a material conveying box is arranged in a cleaning processing area station of the material conveying box. The material conveying box can be separated into a front cover and a box body in the cleaning processing area station. The front cover and the box body can be cleaned by a plurality of chambers in the processing area station individually or together, and then combined into a cleaned material conveying box as a detection object. The cleaning processing area station is characterized in that the configuration includes:

[0060] At least one cleaning chamber is provided with a plurality of spray nozzles capable of spraying cleaning liquid to wet-clean the front cover and the box body;

[0061] At least one drying chamber is provided with at least a plurality of thermal energy elements for drying the front cover and the box body;

[0062] At least one platform for placing and positioning the detection object, the detection object having a first interface and a second interface;

[0063] The detection device is installed on at least one of the platforms and includes:

[0064] an air inlet nozzle, disposed on one side of at least one of the platforms and connected to the first interface, and the air inlet nozzle is connected to an air supply machine, for guiding clean dry air to enter a closed accommodating chamber of the detection object in sequence through the air inlet nozzle and the first interface, and generating positive pressure dry air that can contact the inner surface of the closed accommodating chamber, for absorbing at least one cleaning result judgment factor remaining on the inner surface of the closed accommodating chamber after drying;

[0065] an exhaust nozzle, disposed on the other side of at least one of the platforms and connected to the second interface, the exhaust nozzle being used to guide the positive pressure dry air in the closed accommodation cabin to be discharged to the outside;

[0066] a multi-way pipe connected to the exhaust nozzle for collecting positive pressure dry air in the closed accommodation chamber; and

[0067] A detection element is installed on the multi-way pipe to detect the content of the cleaning result judgment factor in the positive pressure dry air.

[0068] The cleaning result detection device for the material conveying box, wherein at least one of the platforms is a loading port in the cleaning processing area station for placing the material conveying boxes before and after cleaning.

[0069] The cleaning result detection device of the material conveying box, wherein at least one of the cleaning chambers is further provided with a plurality of blowing elements to remove liquid from the front cover and the box body after the cleaning liquid is sprayed.

[0070] The cleaning result detection device of the material conveying box, wherein the cleaning processing area station is also equipped with at least one dehydration chamber, and at least one of the dehydration chambers is provided with a plurality of blowing elements to dehydrate the front cover and the box body after spraying the cleaning liquid.

[0071] The cleaning result detection device of the material conveying box, wherein at least one of the drying chambers is also provided with a negative pressure channel, the negative pressure channel is connected to an exhaust pump to extract the air in at least one of the drying chambers to generate a vacuum, and at least the box system is dried in at least one of the vacuum drying chambers.

[0072] In the cleaning result detection device of the material conveying box, the multi-way pipe is also connected to an air pump, so that the detection element is installed in the multi-way pipe between the exhaust nozzle and the air pump.

[0073] The cleaning result detection device of the material conveying box, wherein the detection element is a humidity sensor, and the cleaning result judgment factor is the water molecules absorbed by the positive pressure dry air.

[0074] The cleaning result detection device of the material conveying box, wherein the detection element is a particle counter, and the cleaning result judgment factor is the dust particles absorbed by the positive pressure dry air.

[0075] The cleaning result detection device of the material conveying box, wherein at least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the closed accommodating chamber includes the surrounding surface of the suspended support rod.

[0076] According to the above, the technical effects that the present invention can present are:

[0077] 1. Use the existing drying chamber in the cleaning processing area station, which can establish negative pressure and generate vacuum conditions as a detection site for cleaning results judgment factors (including water molecules and dust particles) contained in the detection object (including at least one of the box body and the front cover) after cleaning, and can rely on the means of introducing positive pressure dry air into the drying chamber to release the vacuum (i.e., break the vacuum), and further in the process of guiding and discharging the positive pressure dry air during the vacuum breaking, effectively capture and detect the content and quantity of the cleaning results judgment factors contained in the positive pressure dry air; in this way, not only can the positive pressure dry air be used as drainage to effectively and conveniently detect whether the inner and outer surfaces of the box body after wet cleaning and drying meet the ideal dryness and cleanliness requirements, but also the structural complexity of the cleaning results detection device can be simplified.

[0078] 2. A platform in the cleaning processing area station on which a material transfer box can be placed is used as a detection site for the cleaning result judgment factors (including water molecules and dust particles) contained in the detection object (i.e., the material transfer box after cleaning). The platform can be a platform provided by an existing loading port in the cleaning processing area station, or an independent table constructed in the cleaning processing area station, or the top surface of the chamber is used as the platform, so that the existing or newly configured inlet and exhaust nozzles on the platform can be used, especially the inlet nozzle can be used to guide clean dry air into the closed storage chamber of the detection object to generate positive pressure dry air, and the exhaust nozzle can be used to discharge and collect the positive pressure dry air; in this way, when the platform provided on the loading port is used as the detection site, not only can the existing inlet and exhaust nozzles on the loading port be used to guide the positive pressure dry air, but also the positive pressure dry air can be used as drainage, thereby effectively and conveniently detecting whether the inner surface of the closed storage chamber of the detection object meets the ideal dryness and cleanliness requirements, and in addition, the structural complexity of the cleaning result detection device can be simplified.

[0079] The features and technical effects of the embodiments disclosed herein will be presented in the following description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0080] Figure 1It is a three-dimensional exploded view of the material transfer box.

[0081] Figure 2 and Figure 3 They are cross-sectional views of the material transfer box from different perspectives.

[0082] Figure 4 It is a flowchart of steps and processes of a first embodiment of a cleaning result detection method for a material conveying box of the present invention.

[0083] Figure 5 It is a flowchart of steps and processes of a second embodiment of the cleaning result detection method of a material conveying box of the present invention.

[0084] Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10a , Fig.10b , Fig.11 , Fig.12 The following are the action schematic diagrams of the cleaning result detection method of the present invention.

[0085] Fig.13 It is a schematic diagram of the configuration of the cleaning processing area station of the present invention.

[0086] Fig.14 yes Fig.13 Schematic diagram of the platform provided by the loading port.

[0087] Fig.15 yes Fig.13 Cross-sectional view of the drying chamber of the middle box.

[0088] Explanation of reference numerals: 10-material transfer box; 10a-enclosed storage compartment; 11-box body; 11a-wall; 11b-bottom; 11c-opening; 11d-first interface; 11e-second interface; 11f-inner surface; 11g-outer surface; 12-front cover; 13-rib; 14-storage chamber; 15-support rod; 16-carrier; 16a-double ends; 16b-middle section; 20-robot arm; 30-loading port; 31-platform; 32-linear drive; 33-rotator; 34-exhaust nozzle; 35-intake nozzle; 36-side wall; 40-front cover cleaning chamber; 50-box body cleaning chamber; 50a-cover plate; 51-liquid spray nozzle; 511-wall liquid spray nozzle; 512-rotator Rotating liquid spray nozzle; 60-box body deliquid removal chamber; 70-box body drying chamber; 70a-cover plate; 71-negative pressure channel; 71a-negative pressure capture hole; 72-thermal energy element; 721-vertical electric heating plate; 722-wall-type electric heating plate; 73-positive pressure channel; 73a-positive pressure capture hole; 74-insulation layer; 75-air inlet; 76-vacuum pump; 77-vacuum fan; 78-air supply fan; 80-multi-channel pipe; 81-humidity sensor; 82-particle counter; 90-cleaning processing area station; D-predetermined direction; L-opening position; S1 to S4-step description of the first and second embodiments; S3-1 to S3-3-process description of the first embodiment; S4-1 to S4-process description of the second embodiment. DETAILED DESCRIPTION

[0089] In the specific implementation of the present invention described below, the term "cleaning" is not the same as the term "washing", wherein "cleaning" includes the steps of "wet cleaning and drying". In addition, the present invention uses the term "step" to indicate the procedure of performing the cleaning on an object in a cleaning processing area station, and uses the term "process" to indicate the procedure of performing "cleaning results detection" on a material transfer box or detection object contained in the above-mentioned cleaning step.

[0090] See also Figure 4 , which is a flowchart of the steps and processes of the first embodiment of the present invention, illustrates the cleaning result detection method of the material transfer box provided by the present invention, which is implemented in a cleaning processing area station 90 (such as Fig.13 The cleaning processing area station 90 can be surrounded by a chamber and related equipment for performing wet cleaning and drying of the material transfer box 10 to form a polygonal station area, and the cleaning processing area station 90 is also equipped with a robot arm 20 (such as Fig.13 As shown), accordingly, the cleaning processing area station 90 is used to perform the following cleaning processing steps S1 to S4 on the material conveying box 10:

[0091] Step S1: Separate the material transfer box

[0092] Please refer to the combined Figure 7 and Fig.13 , explaining that the transfer equipment (not shown) around the cleaning processing area station 90 will first transfer the material transfer box 10 to be cleaned into the cleaning processing area station 90, and then the robot arm 20 will grab and move the material transfer box 10 to an opening position L in the cleaning processing area station 90 by clamping the outer walls of the box body 11 of the material transfer box 10 on both sides; the opening position L is provided with a retaining member and a cover opening key (not shown) set for the front cover 12 of the material transfer box 10, and the retaining member can be implemented as a suction cup or other components such as a movable hook, and the front cover 12 is originally provided with a keyhole corresponding to the cover opening key (not shown); when the robot arm 20 grabs and moves When the animal material conveying box 10 reaches the cover opening position L, the predetermined opening 11c position of the box body 11 can just face the direction of the cover opening position L, and the front cover 12 can contact the retaining member on the cover opening position L, so that the retaining member absorbs or embeds the front cover 12 on the box body 11. At this time, the cover opening key on the cover opening position L can be implanted in the keyhole of the front cover 12, and the cover opening key starts to rotate to release the state of mutual fastening between the front cover 12 and the box body 11 through the tenon, and then the robot arm 20 that has clamped the box body 11 produces a retracting movement to complete the cover opening action, and then the robot arm 20 moves the box body 11 away from the front cover 12, so that the opening 11c of the box body 11 is exposed to the outside.

[0093] Step S2: Wet cleaning of the front cover and the box body

[0094] See also Fig.13 , discloses the example of wet cleaning of the front cover 12 and the box body 11 in the cleaning processing area station 90, as an implementation description, including that when the front cover 12 is cleaned (including the wet cleaning step), it is carried out in a front cover cleaning chamber 40, and the wet cleaning step of the box body 11 is carried out in a box body cleaning chamber 50, and the front cover cleaning chamber 40 and the box body cleaning chamber 50 can be distributed around the cleaning processing area station 90.

[0095] In addition, the separated front cover 12 and the box body 11 can also be wet-cleaned synchronously in the same cleaning chamber, which is also an application covered by the present invention. However, for the box body 11 whose structure is relatively more complicated than the front cover 12, the present invention recommends using a separate box body cleaning chamber 50 to wet-clean the box body 11, which can achieve a better cleaning effect. However, for the front cover 12 whose structure is relatively simple (not complicated) compared to the box body 11, the steps of wet cleaning and liquid removal can be performed in sequence in a dedicated front cover cleaning chamber 40, which can achieve a cleaning effect.

[0096] With regard to the wet cleaning of the box body 11, it must be explained that since the opening 11c can be exposed to the outside when the robot arm 20 carries the box body 11 for movement, when the box body 11 is wet cleaned, the robot arm 20 can place the opening 11c of the box body 11 in a downward manner (that is, in the same direction as the action of gravity) into the box body cleaning chamber 50, so that the cleaning liquid remaining on the inner surface 11f and the outer surface 11g around the box body 11 can conform to the force of gravity and leave the box body 11 more smoothly through the opening 11c, thereby reducing or eliminating the burden of subsequent liquid removal.

[0097] In addition, the above-mentioned wet cleaning step S2 may or may not include the step of removing liquid from the front cover 12 and the box body 11 after wet cleaning; further, a plurality of liquid spray elements and a plurality of air blowing elements may be arranged simultaneously in the front cover cleaning chamber 40, the box body cleaning chamber 50 or the cleaning chamber shared by the front cover and the box body, so that the plurality of liquid spray elements first spray the cleaning liquid to the surrounding surfaces of the front cover 12 and the box body 11 for wet cleaning, and then the plurality of air blowing elements spray dry gas to the surrounding surfaces of the front cover 12 and the box body 11, so that the cleaning liquid attached to the surrounding surfaces of the front cover 12 and the box body 11 can be fully blown away, thereby completing the wet cleaning step S2 of the front cover 12 and the box body 11.

[0098] When the wet cleaning step S2 does not include the dehydration step, at least one dehydration chamber may be added to the cleaning processing area station 90, particularly including a box body dehydration chamber 60 (such as a box body 11) dedicated to the box body 11. Fig.13 As shown) or a deliquiding chamber shared by the box body and the front cover, and multiple blowing elements can be arranged in the deliquiding chamber to deliquid the front cover 12 and the box body 11 after wet cleaning.

[0099] See also Figure 8, indicating that when the box body 11 is wet-cleaned in the box body cleaning chamber 50, a plurality of liquid spraying nozzles 51 can be arranged in the box body cleaning chamber 50 as the liquid spraying elements to spray the cleaning liquid on the inner surface 11f and the outer surface 11g of the box body 11 to complete the wet cleaning step of the box body 11. The plurality of liquid spraying nozzles 51 include a plurality of wall liquid spraying nozzles 511 arranged on the inner walls around the box body cleaning chamber 50, and a plurality of rotating liquid spraying nozzles 512 that can be implanted in the accommodating cavity 14 of the box body 11; the plurality of wall liquid spraying nozzles 511 can spray the cleaning liquid to wash the outer surface 11g around the box body 11, and the plurality of rotating liquid spraying nozzles 512 can spray the cleaning liquid to wash the inner surface 11f around the box body 11 in a 360-degree rotational manner. In addition, the inner surface 11f of the box body 11 also includes the surrounding surfaces of the comb-like ribs 13 and the suspended support rod 15 arranged in the box body 11; therefore, the multiple rotating liquid spray nozzles 512 can especially perform a 360-degree rotating spraying action of the cleaning liquid on the surrounding surfaces of the comb-like ribs 13 and the suspended support rod 15, so that the dirt on the comb-like ribs 13 and the suspended support rod 15 can be fully rinsed by the cleaning liquid at multiple angles and leave the inner surface 11f. The box cleaning chamber 50 is provided with a retractable cover 50a. When the cover 50a is opened, the box cleaning chamber 50 is connected to the outside, so that the robot arm 20 can place the box 11 to be wet cleaned into the box cleaning chamber 50, or capture the box 11 that has completed the wet cleaning from the box cleaning chamber 50. On the contrary, when the cover 50a is closed, a closed space is formed in the box cleaning chamber 50, which is beneficial to the wet cleaning step of the box 11 in the box cleaning chamber 50 and can prevent the cleaning liquid from splashing outside the box cleaning chamber 50 when the wet cleaning step is performed on the box 11.

[0100] Step S3: Drying the front cover and the box body

[0101] See also Figure 4 and Fig.13 , illustrating the steps of drying the front cover 12 and the box body 11 in the cleaning processing area station 90; wherein, since the structure of the surface around the front cover 12 is relatively simple, the drying step of the front cover 12 can be integrated into the front cover cleaning chamber 40, or two or more front cover cleaning chambers 40 can be used to perform the wet cleaning and drying steps of the front cover 12 respectively. The drying step of the box body 11 is performed in a box body drying chamber 70, and the box body drying chamber 70 is arranged in the cleaning processing area station 90.

[0102] See also Fig. 9, indicating that the box body 11 can be dried in the box body drying chamber 70 with the opening 11c facing downward; in this implementation (first embodiment), the inside of the box body drying chamber 70 must be a vacuum chamber environment that can generate negative pressure, and multiple thermal energy elements 72 are used in combination; in addition, the thermal energy element 72 can be a planar electric heating plate, so that when the box body 11 is placed inside the box body drying chamber 70, the multiple planar electric heating plates can be distributed around the inner surface 11f and the outer surface 11g of the box body 11, and the inner surface 11f and the outer surface 11g of the box body 11 are subjected to the drying step after wet cleaning. In addition, the multiple thermal energy elements 72 can also be infrared heaters, but the effect is less ideal, so it is not repeated.

[0103] In particular, in the present invention, in this embodiment (i.e., the first embodiment), the cleaning result detection method is included in the box body drying process of the above step S3. Specifically, the cleaning result detection method can perform the following cleaning result detection of the box body 11 or the front cover 12 from step S3-1 to step S3-3. Among them:

[0104] Step S3-1: Select the testing location and test objects

[0105] See also Fig.10a In this embodiment, the box drying chamber 70 is selected as the detection place, and the box 11 that has been dried under a vacuum environment is used as the detection object, so that the cleaning result of the box 11 after cleaning can be detected.

[0106] Step S3-2: Introduce dry air to break the vacuum in the testing area

[0107] like Fig.10a As shown, it is explained that clean dry air is introduced into the selected box body drying chamber 70 (i.e., the detection site) so that the dry air can be used to release the vacuum state in the box body drying chamber 70 (i.e., break the vacuum), and the introduced dry air can generate a positive pressure dry air in the box body drying chamber 70, that is, the air pressure in the box body drying chamber 70 is greater than the external atmospheric pressure, so that the positive pressure dry air can contact the inner surface 11f and the outer surface 11g of the box body 11, and the positive pressure dry air can be used to absorb the water molecules of the cleaning solution that have not yet evaporated on the inner and outer surfaces 11f and 11g of the box body 11; the present invention uses the water molecules absorbed by the positive pressure dry air as a cleaning result judgment factor in the subsequent detection.

[0108] Step S3-3: Capturing positive pressure dry air

[0109] like Fig.10a As shown, it is explained that the positive pressure dry air in the box drying chamber 70 is captured by a negative pressure flow below 1 atm (which can be provided by a vacuum pump).

[0110] Process S3-4: Detection of cleaning results judgment factors

[0111] like Fig.10a As shown, it is explained that at least one detection element is used to detect the content of the cleaning result judgment factor in the positive pressure dry air. Further, the detection element can be a humidity sensor 81 or a particle counter 82; the humidity sensor 81 and the particle counter 82 can also exist at the same time.

[0112] When the detection element is a humidity sensor 81, the cleaning result judgment factor is the water molecules absorbed by the positive pressure dry air, so that the content of the water molecules can be read through the humidity sensor 81, and then it is determined whether the humidity of the inner and outer surfaces 11f, 11g of the box body 11 after cleaning has met the established dryness standard. In addition, when the detection element is a particle counter 82, the cleaning result judgment factor is the dust particles absorbed by the positive pressure dry air, so that the content of the dust particles can be read through the particle counter 82, and then it is determined whether the cleanliness of the inner and outer surfaces 11f, 11g of the box body 11 after cleaning has met the established cleaning standard.

[0113] Step S4: Combine the front cover and the box body

[0114] This step is performed after completing the above step S3-4. Fig.11 , indicating that the front cover 12 that has undergone the wet cleaning and drying steps is first placed in the open cover position L, and the open cover position L can also be regarded as a closed cover position. Specifically, after the front cover 12 completes the wet cleaning (including liquid removal) and drying, and the box body 11 also completes the wet cleaning (including liquid removal) and drying steps, they can be respectively carried by the robot arm 20 and assembled at the open cover position L (i.e., the closed cover position) to form a material transfer box 10 that meets the dual standards of dryness and cleanliness after cleaning and completion of cleaning results testing.

[0115] On the other hand, the present invention further provides a cleaning result detection device for a material conveying box, so that the cleaning result detection method for the material conveying box of the first embodiment mentioned above can be easily implemented.

[0116] To do this, please refer again to Fig.13 , illustrating the assembly state of the cleaning achievement detection device of the present invention, which is arranged in the cleaning processing area station 90 of the material conveying box. As mentioned above, the cleaning processing area station 90 includes at least one of the cleaning chambers and at least one of the drying chambers framed by the front cover 12 and the box body 11, and the cleaning processing area station 90 is provided with the mechanical arm 20, so that the front cover 12 and the box body 11 can receive the cleaning processing of multiple chambers in the processing area station 90 separately or together (please refer to the above, no further description is given).

[0117] Please read further Fig.10a and Fig.10b , indicating that the cleaning result detection device of the present invention is installed in at least one of the drying chambers, and uses at least one of the front cover 12 and the box body 11 as a detection object. Fig.10a and Fig.10b In the embodiment, at least one of the drying chambers is taken as a box body drying chamber 70, and the box body 11 is taken as an example of a detection object, and the box body drying chamber 70 is provided with a negative pressure channel 71 and a plurality of thermal energy elements 72. The negative pressure channel 71 is connected between the box body drying chamber 70 and an exhaust pump 76 to extract the air in the box body drying chamber 70 to generate a vacuum environment. The plurality of thermal energy elements 72 can dry the box body 11 implanted in the box body drying chamber 70.

[0118] The cleaning result detection device is provided in the drying chamber 70 of the box body and includes a negative pressure capture hole 71a, an air inlet hole 75, a multi-way pipe 80 and at least one detection element.

[0119] The negative pressure extraction hole 71a is disposed on one side of the box body drying chamber 70 to connect to the vacuum pump 76 capable of generating a negative pressure power source, thereby constructing a negative pressure channel 71 of the box body drying chamber 70 to guide the negative pressure generated by the vacuum pump 76 to form the vacuum environment in the box body drying chamber 70.

[0120] The air inlet 75 is disposed on the other side of the box drying chamber 70 and can be connected to a pipeline to directly capture ultra-pure air (X-CDA) capable of generating positive pressure power into the box drying chamber 70; alternatively, the air inlet 75 can be connected to an air supply machine 78 equipped with a filter element via a pipeline, or the filter element can be installed on the pipeline between the air inlet 75 and the air supply machine 78, and the air supply machine 78 can generate positive pressure power, thereby providing clean dry air (CDA) to be introduced into the box drying chamber 70 through the air inlet 75. According to such configuration, the negative pressure environment in the box body drying chamber 70 can be transformed into a positive pressure environment to release the vacuum state in the box body drying chamber 70, and positive pressure dry air is generated in the box body drying chamber 70 to contact the inner and outer surfaces 11f and 11g around the box body 11 to absorb the cleaning result judgment factor. The positive pressure dry air absorbing the cleaning result judgment factor can be discharged to the multi-way pipe 80 through the negative pressure capture hole 71a for a certain period of time, so that the humidity sensor 81 and the particle counter 82 (i.e., the detection element) can smoothly take samples from the positive pressure dry air (i.e., the cleaning result judgment factor) to detect the humidity and the content of dust particles.

[0121] The multi-way tube 80 is a tubular object or flow channel having multiple interconnected interfaces, so that one of the multiple interfaces of the multi-way tube 80 is connected to the box body drying chamber 70; further, the connection mode between the multi-way tube 80 and the box body drying chamber 70 and the effect produced therefrom can be selected in two ways in the present invention. Among them, Fig.10a The first connection method of the multi-way pipe 80 is disclosed. Fig.10b A second connection method of the multi-way pipe 80 is disclosed.

[0122] exist Fig.10a In practice, the multi-way tube 80 can be used as both the negative pressure channel 71 and the positive pressure channel 73 of the box body drying chamber 70; more specifically, two of the multiple passage ports of the multi-way tube 80 are respectively connected between the negative pressure capture hole 71a and the vacuum pump 76 to be used as the negative pressure channel 71 of the box body drying chamber 70, and at the same time, another one or two of the multiple passage ports of the multi-way tube 80 are used to install at least one of the detection elements, so that the multi-way tube 80 can also be used as the positive pressure channel 73 for discharging positive pressure dry air. It must be noted that the multi-way tube 80 has a plurality of forked (i.e. non-serial) channels, and the plurality of passage ports of the multi-way tube 80 are distributed in the forked channels, so that the detection elements and the vacuum pump 76 installed or assembled at the ports can be located in the non-serial channels of the multi-way tube 80, so that the multi-way tube 80 can guide the negative pressure flow and the positive pressure dry air flow in a diversion manner; in addition, at least one of the detection elements can be a humidity sensor 81 or a particle counter 82, or a humidity sensor 81 and a particle counter 82; when the humidity sensor 81 and the particle counter 82 are configured together, they can be installed on two ports in the same channel in the forked channel to detect the content of the cleaning result judgment factor in the positive pressure dry air, and when the detection element is detecting, the vacuum pump 76 is not started, so the positive pressure dry air can be smoothly discharged through the positive pressure channel 73 of the multi-way tube 80, and then accept the detection element to detect the content of the cleaning result judgment factor in the positive pressure dry air.

[0123] exist Fig.10bIn practice, it is disclosed that the multi-way tube 80 is only used as the positive pressure channel 73 for discharging positive pressure dry air from the box drying chamber 70, and is not used as the negative pressure channel 71. The negative pressure channel 71 can be connected between the negative pressure extraction hole 71a of the box drying chamber 70 and the vacuum pump 76 using a general pipe or flow channel, and is responsible for guiding the negative pressure generated by the vacuum pump 76 to the drying chamber to form a vacuum. In this application, the box drying chamber 70 must also be provided with a positive pressure extraction hole 73a, and the multi-way tube 80 is connected to the box drying chamber 70 via the positive pressure extraction hole 73a, so that the multi-way tube 80 becomes the positive pressure channel 73 for guiding the positive pressure dry air to be discharged to the outside, and at least one of the detection elements detects the content of the cleaning result judgment factor in the positive pressure dry air in the positive pressure channel 73.

[0124] In addition, Fig.10a and Fig.10b In the implementation, the plurality of thermal energy elements 72 include a plurality of built-in vertical electric heating plates 721 and a plurality of wall-type electric heating plates 722; the vertical electric heating plates 721 are vertically placed in the box body drying chamber 70, and when the box body 11 is placed into the box body drying chamber 70, the vertical electric heating plates 721 can be implanted in the accommodating cavity 14 of the box body 11, so that the vertical electric heating plates 721 can be implanted between the double-sided ribs 13 and the hanging support rods 15. The gap provides heat radiation energy, thereby drying the inner surface 11f of the box body 11 adjacently; the multiple wall-type electric heating plates 722 are respectively attached to the surrounding outer walls of the box body drying chamber 70, and after the wall-type electric heating plates 722 are attached to the surrounding outer walls of the box body drying chamber 70, the outer periphery of the surrounding outer walls of the box body drying chamber 70 is also covered with a layer of insulation layer 74 made of insulation material, so that the wall-type electric heating plates 722 can be located between the surrounding outer walls of the box body drying chamber 70 and its insulation layer 74. According to this implementation, the heat radiation generated by the vertical electric heating plate 721 can be directly radiated to the inner surface 11f around the box body 11, and the heat radiation generated by the wall-type electric heating plate 722 can be conducted through the surrounding walls of the box body drying chamber 70, and radiate heat energy to the outer surface 11g around the box body 11; in particular, the water molecules that may remain on the inner and outer surfaces 11f and 11g of the box body 11 after liquid removal (i.e., after removing liquid droplets) can be fully evaporated by the heat radiation energy in the drying step, so as to obtain an ideal drying effect.

[0125] Furthermore, the box body drying chamber 70 is provided with a removable cover 70a. When the cover 70a is opened, the box body drying chamber 70 is connected to the outside, so that the robot arm 20 can place the box body 11 to be dried into the box body drying chamber 70, or capture the box body 11 that has completed the drying from the box body drying chamber 70; conversely, when the cover 70a is closed, a closed space is formed in the box body drying chamber 70, so as to facilitate the box body 11 in the box body drying chamber 70 to complete the drying step smoothly under a vacuum environment.

[0126] It must be noted that the negative pressure capture hole 71a, the positive pressure capture hole 73a and the air inlet hole 75 are respectively provided with automatic valves (such as solenoid valves).

[0127] exist Fig.10a In the illustrated embodiment, the automatic valve of the negative pressure extraction hole 71a can control the timing of the negative pressure flow entering the box body drying chamber 70 through the negative pressure extraction hole 71a, and the timing of the positive pressure dry air being discharged from the box body drying chamber 70 through the negative pressure extraction hole 71a, and the automatic valve of the air inlet hole 75 can control the timing of the dry air entering the box body drying chamber 70 through the air inlet hole 75 to generate positive pressure. Furthermore, when the negative pressure extraction hole 71a generates negative pressure by extracting air from the drying chamber 70 of the box body, the air inlet hole 75 is in a closed state to facilitate the generation of a vacuum environment in the drying chamber 70 of the box body; when the air inlet hole 75 is opened to guide dry air into the drying chamber 70 of the box body, the negative pressure extraction hole 71a is in a closed state to facilitate the generation of positive pressure dry air in the drying chamber 70 of the box body; and when the negative pressure extraction hole 71a is opened to discharge positive pressure dry air, the air inlet hole 75 remains in an open state, so that the dry air in the drying chamber 70 of the box body can maintain a positive pressure discharge state for a certain period of time, so as to facilitate the sampling of the cleaning result judgment factor.

[0128] exist Fig.10bIn the illustrated embodiment, the automatic valve of the negative pressure extraction hole 71a can control the timing of the negative pressure flow entering the box body drying chamber 70 through the negative pressure extraction hole 71a, and the timing of the positive pressure dry air being discharged from the box body drying chamber 70 through the positive pressure extraction hole 73a, and the automatic valve of the air inlet hole 75 can control the timing of the dry air entering the box body drying chamber 70 through the air inlet hole 75 to generate positive pressure. Furthermore, when the negative pressure extraction hole 71a generates negative pressure by extracting air from the box drying chamber 70, the positive pressure extraction hole 73a and the air inlet 75 are in a closed state, so as to facilitate the generation of a vacuum environment in the box drying chamber 70; when the air inlet 75 is opened to guide dry air into the box drying chamber 70, the negative pressure extraction hole 71a and the positive pressure extraction hole 73a are in a closed state, so as to facilitate the generation of positive pressure dry air in the box drying chamber 70; and when the positive pressure extraction hole 73a is opened to discharge positive pressure dry air, the air inlet 75 is maintained in an open state and the negative pressure extraction hole 71a is in a closed state, so that the dry air in the box drying chamber 70 can maintain a positive pressure discharge state for a certain period of time, so as to facilitate the sampling of the cleaning result judgment factor.

[0129] It must be noted here that when facing a box body 11 with a more complex structure, the hanging support rod 15 (such as Fig.10a As shown in the figure, the inner surface 11f around the box body 11 (i.e., the detection object) includes the surrounding surface of the suspended support rod 15, and through the cleaning result detection implemented by the present invention, it is possible to fully determine and control whether the box body 11 with a complex structure such as the suspended support rod 15 has actually reached the established dryness and cleanliness requirements after the cleaning process is implemented.

[0130] See also Figure 5 , which is a flow chart of steps and processes of the second embodiment of the present invention, illustrating the cleaning result detection method of the material transfer box provided by the present invention, which is substantially the same as the first embodiment, and is implemented in Fig.13In the cleaning processing area station 90 shown, the cleaning procedures of steps 1 to 4 of the first embodiment are performed on the material conveying box 10 that has not been cleaned. However, it must be noted that in the second embodiment, especially when performing step 3 of the first embodiment to dry the front cover 12 and the box body 11, it is not necessarily necessary to perform it under a vacuum environment; in other words, when the front cover 12 and the box body 11 are dried in the second embodiment, the drying chamber or the box body drying chamber 70 can only have normal pressure or can generate a vacuum environment. Furthermore, the second embodiment is different from the first embodiment, and also includes replacing the detection object with the material conveying box 10 that is combined after drying, rather than using the front cover 12 and the box body 11 that have not been combined after drying as the detection object. In other words, the cleaning results detection of the second embodiment is not performed in the drying chamber or the box body drying chamber 70. In addition, the cleaning steps of the front cover 12 and the box body 11 in the second embodiment are the same as those of the first embodiment.

[0131] Accordingly, the cleaning result detection method of the second embodiment can perform the cleaning result detection of the following steps S4-1 to S4-4 on the material transfer box 10 formed after completing step 4 and cleaning in the first embodiment. Among them:

[0132] Step S4-1: Select the testing location and test objects

[0133] In this process, a platform 31 in the cleaning processing area station 90 on which the material transfer box 10 can be placed can be selected as a place for implementing the cleaning result detection; the platform 31 can be located at any position in the cleaning processing area station 90 that can provide a flat surface, such as an independent table, the top surface of the chamber, or a loading port 30 for providing a robot arm 20 to capture the material transfer box 10 to be cleaned and after cleaning. In the second embodiment described below, the platform 31 provided by the loading port 30 will be used as the detection site.

[0134] The cover opening position L (i.e., cover closing position) described in the first embodiment can be located on a side wall 36 of the platform 31 of the loading port 30, so that the robot arm 20 can open and close the cover of the material transfer box 10 to be cleaned or cleaned and placed on the platform 31. In other words, the front cover 12 after drying can be moved to the cover closing position L by the robot arm 20, and then the box body 11 after drying can also be moved to the cover closing position L by the robot arm 20, so that the box body 11 can be combined with the front cover 12 to form a cleaned material transfer box 10, and the cleaned material transfer box 10 has a closed storage compartment 10a with a relatively high degree of dryness and cleanliness; then, the cleaned material transfer box 10 can be placed on the platform 31 (such as the platform 31) after being carried and moved by the robot arm 20. Fig.14In this procedure, the cleaned material conveying box 10 positioned on the platform 31 is selected as the detection object of the cleaning result.

[0135] Step S4-2: Introducing dry air into the testing area

[0136] In this process, the platform 31 is used to guide clean dry air into the closed storage chamber 10a of the inspection object, and a positive pressure dry air is generated in the closed storage chamber 10a to contact the inner surface 11f around the closed storage chamber 10a, so that the positive pressure dry air absorbs the cleaning result judgment factor remaining on the inner surface 11f around the closed storage chamber 10a after drying.

[0137] Step S4-3: Capturing positive pressure dry air

[0138] In this process, the multi-way pipe 80 connected to the platform 31 is used to guide the positive-pressure dry air in the closed accommodation chamber 10a that has absorbed the cleaning result judgment factor to be discharged to the outside for detection; among them, since the positive-pressure dry air already has a positive pressure greater than 1atm, it can be smoothly discharged to the outside through the pipeline.

[0139] Process S4-4: Detection of cleaning results judgment factors

[0140] This process is to detect the content of the cleaning result judgment factor in the positive pressure dry air using at least one detection element on the multi-way pipe 80. The implementation content of this process and the specific objects and details of the cleaning result judgment factor that can be detected are the same as the above-mentioned process S3-4 disclosed in the first embodiment (no further description), and the cleaning result detection method of the second embodiment is completed accordingly.

[0141] On the other hand, in order to facilitate the implementation of the cleaning results detection methods of the first and second embodiments, the present invention also provides additional structural details of the cleaning results detection device.

[0142] To do this, please refer to Fig.13 and Fig.14 , revealing that the material transfer box 10 has a plurality of first interfaces 11d for injecting gas into the material transfer box 10, and a plurality of second interfaces 11e for exhausting gas; the first interface 11d and the second interface 11e are respectively provided with a check function, so that the controlled gas can only enter the material transfer box 10 in one direction through the first interface 11d, and can be discharged from the material transfer box 10 in one direction through the second interface 11e; an air inlet nozzle 35 and an air exhaust nozzle 34 are provided on the platform 31.

[0143] Furthermore, the platform 31 is also configured with at least one linear actuator 32 for moving the material transfer box 10. The material transfer box 10 is displaced on the platform 31 by the drive of the linear actuator 32. The linear actuator 32 is implemented by a plurality of rollers arranged corresponding to each other on the platform 31. Each roller can rotate synchronously through the drive of a motor or other driver, thereby driving the material transfer box 10 to move. The platform 31 is also configured with a rotator 33 for driving the material transfer box 10 to adjust the direction of the opening 11c of the box body 11. The rotator 33 is located below the linear actuator 32.

[0144] Accordingly, for the material conveying box 10 to be cleaned (i.e. before cleaning), it can be moved to the top of the rotator 33 through the drive of the linear drive 32, and then, the rotator 33 can rise to lift the material conveying box 10 to be cleaned from the linear drive 32; then, the material conveying box 10 is driven by the rotator 33 so that the opening 11c of the box body 11 faces away from the robotic arm 20 (i.e., toward the predetermined direction D), and then, the rotator 33 descends to place the turned material conveying box 10 on the linear drive 32; finally, the robotic arm 20 can capture the turned material conveying box 10 to be cleaned and move it to the cover opening position L adjacent to the end side of the platform 31, so that the material conveying box 10 is separated into the front cover 12 and the box body 11 at the cover opening position L.

[0145] In addition, for the material transfer box 10 that has been dried (i.e., cleaned), the robot arm 20 can capture the front cover 12 and the box body 11 that have been dried together in the drying chamber, or capture the box body 11 and the front cover 12 that have been cleaned in the box body drying chamber 70 and the front cover cleaning chamber 40, respectively, and make the box body 11 and the front cover 12 interlock with each other at the opening position L to form the material transfer box 10 and then place it on the platform 31.

[0146] The air inlet nozzle 35 is disposed on one side of the platform 31 and connected to the air supply machine 78. Accordingly, during the implementation of the above-mentioned steps 4-1 to 4-2 of the second embodiment, that is, when the material conveying box 10 is placed and positioned on the platform 31, the air inlet nozzle 35 can be inserted into and connected to the first interface 11d, so that the air supply machine 78 guides the clean dry air to sequentially pass through the air inlet nozzle 35 and the first interface 11d into the closed accommodation chamber 10a of the cleaned material conveying box 10 to generate positive pressure dry air.

[0147] The exhaust nozzle 34 is disposed on the other side of the platform 31, and the exhaust nozzle 34 is connected to the detection element (including the humidity sensor 81, the particle counter 82) through the multi-channel pipe 80 in the first embodiment in a manner having multiple passage ports (such as Fig.12As shown), the multi-way pipe 80 of the second embodiment may not be connected to the vacuum pump 76 of the first embodiment. Accordingly, during the implementation of the above-mentioned steps 4-1 to 4-2 of the second embodiment, that is, when the material conveying box 10 is placed and positioned on the platform 31, the exhaust nozzle 34 can be inserted into and connected to the second interface 11e, so that the positive pressure dry air in the closed storage chamber 10a of the material conveying box 10 that has absorbed the cleaning result judgment factor can be discharged to the multi-way pipe 80 through the second interface 11e and the exhaust nozzle 34, and the water molecule content in the positive pressure dry air is detected by the humidity sensor 81, and the dust amount in the positive pressure dry air is detected by the particle counter 82 (the detection method is the same as that of the first embodiment).

[0148] It must be explained here that in the above-mentioned step S4-3 of the second embodiment, an exhaust fan 77 can also be connected to the multi-way pipe 80 to generate a negative pressure flow, thereby accelerating the speed at which the positive-pressure dry air in the material conveying box 10 is detected by the humidity sensor 81 and the particle counter 82 through the multi-way pipe 80, so as to improve the speed of detecting the cleaning result judgment factor. However, the exhaust fan 77 can be installed or not depending on the exhaust efficiency of the positive-pressure dry air, and it is not absolutely necessary, and this is explained.

[0149] The above description is only illustrative rather than restrictive of the present invention. Those skilled in the art will understand that many modifications, changes or equivalents may be made without departing from the spirit and scope defined by the claims, but all will fall within the scope of protection of the present invention.

Claims

1. A method for detecting the cleaning results of a material transfer box, implemented in a cleaning processing area station, characterized in that: The cleaning processing area station can sequentially perform the following steps (1) to (4) of the cleaning material transfer box: Step (1), separating the material transfer box before cleaning into a front cover and a box body; Step (2), wet cleaning the front cover and the box body; Step (3), drying the front cover and the box body, wherein at least the box body is dried in a vacuum environment, wherein the vacuum environment is formed by generating a negative pressure in at least one drying chamber in the cleaning processing area station; and Step (4), combining the front cover and the box body to form a cleaned material transfer box; The cleaning result detection method comprises performing the following steps (3-1) to (3-4): Step (3-1), selecting the drying chamber capable of generating a vacuum as a testing location, and using at least one of the front cover and the box body that have been dried in the drying chamber as a testing object; Step (3-2), introducing clean dry air into the drying chamber to release the vacuum, and generating a positive pressure dry air in the drying chamber to contact the inner surface and the outer surface around the detection object, so that the positive pressure dry air absorbs at least one cleaning result judgment factor remaining on the inner surface and the outer surface around the detection object after drying, wherein the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air or dust particles absorbed by the positive pressure dry air; Step (3-3), capturing positive pressure dry air in the drying chamber; and Step (3-4) uses at least one detection element to detect the content of the cleaning result judgment factor in the positive pressure dry air.

2. The cleaning result detection method of the material conveying box as claimed in claim 1, characterized in that: The wet cleaning and drying of the front cover and the box body also includes a step of removing liquid from the front cover and the box body.

3. The cleaning result detection method of the material conveying box as claimed in claim 1, characterized in that: The detection element is a humidity sensor.

4. The cleaning result detection method of the material conveying box as claimed in claim 1, characterized in that: The detection element is a particle counter.

5. The cleaning result detection method of the material conveying box as claimed in claim 1, 2, 3 or 4, characterized in that: The detection object is the box body, at least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the detection object includes the surrounding surface of the suspended support rod.

6. A cleaning result detection device for a material conveying box, arranged in a cleaning processing area station of the material conveying box, the material conveying box can be separated into a front cover and a box body in the cleaning processing area station, the front cover and the box body can be cleaned by a plurality of chambers in the processing area station individually or together, and then combined into a cleaned material conveying box, characterized in that: The clean processing area station configuration includes: At least one cleaning chamber is provided with a plurality of spray nozzles capable of spraying cleaning liquid to wet-clean the front cover and the box body; At least one drying chamber is provided with a negative pressure channel and a plurality of thermal energy elements. The negative pressure channel is connected between the at least one drying chamber and an air pump to extract the air in the at least one drying chamber to generate a vacuum environment. The plurality of thermal energy elements can dry the front cover and the box body. The detection device uses at least one of the front cover and the box body as a detection object, and the detection device is installed in at least one of the drying chambers, and includes: an air inlet, provided at one side of at least one of the drying chambers and connected to an air supply machine, the air inlet can guide clean dry air into at least one of the drying chambers to release the vacuum, and generate positive pressure dry air that can contact the inner and outer surfaces around the detection object, so as to absorb at least one cleaning result judgment factor remaining on the detection object after drying, wherein the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air or dust particles absorbed by the positive pressure dry air; a positive pressure channel, formed by connecting at least one of the drying chambers with a multi-way pipe, for discharging positive pressure dry air in at least one of the drying chambers; and At least one detection element is installed on the multi-way pipe to detect the content of the cleaning result judgment factor in the positive pressure dry air.

7. The cleaning result detection device of the material conveying box as claimed in claim 6, characterized in that: The cleaning chamber is also provided with a plurality of blowing elements for removing liquid from the front cover and the box body after the cleaning liquid is sprayed.

8. The cleaning result detection device of the material conveying box as claimed in claim 6, characterized in that: The cleaning processing area station is also equipped with at least one liquid removal chamber, and at least one of the liquid removal chambers is provided with a plurality of air blowing elements to remove liquid from the front cover and the box body after the cleaning liquid is sprayed.

9. The cleaning result detection device of the material conveying box as claimed in claim 6, characterized in that: The negative pressure channel and the positive pressure channel share the multi-way pipe, and the air pump is connected to at least one of the drying chambers via the multi-way pipe.

10. The cleaning result detection device of the material conveying box as claimed in claim 9, characterized in that: At least one of the drying chambers is provided with a negative pressure extraction hole, and the multi-way pipe is connected to the at least one of the drying chambers via the negative pressure extraction hole.

11. The cleaning result detection device of the material conveying box as claimed in claim 6, characterized in that: The positive pressure channel is formed in the multi-way tube, and at least one of the drying chambers is further provided with a positive pressure extraction hole, and the multi-way tube is connected with at least one of the drying chambers via the positive pressure extraction hole.

12. The cleaning result detection device of the material conveying box as claimed in claim 6, characterized in that: The detection element is a humidity sensor.

13. The cleaning result detection device of the material conveying box as claimed in claim 6, characterized in that: The detection element is a particle counter.

14. The cleaning result detection device of the material conveying box according to any one of claims 6 to 13, characterized in that: The detection object is the box body, at least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the detection object includes the surrounding surface of the suspended support rod.

15. A method for detecting the cleaning results of a material transfer box, implemented in a cleaning processing area station, characterized in that: The cleaning processing area station can sequentially perform the following steps (1) to (4) of the cleaning material transfer box: Step (1), separating the material transfer box before cleaning into a front cover and a box body; Step (2), wet cleaning the front cover and the box body; Step (3), drying the front cover and the box body, wherein the box body is dried under a vacuum environment; and Step (4), combining the front cover and the box body to form a cleaned material transfer box; The cleaning result detection method includes using the material transfer box formed after drying as a detection object and sequentially performing the following steps (4-1) to (4-4): Step (4-1), selecting a platform of the cleaning processing area station as a testing location, and placing and positioning the test object on the platform; Step (4-2), guiding clean dry air through the platform into a closed accommodating chamber of the inspection object, so that a positive pressure dry air is generated in the closed accommodating chamber to contact the inner surface of the closed accommodating chamber, so that the positive pressure dry air absorbs at least one cleaning result judgment factor remaining on the inner surface of the closed accommodating chamber after drying, and the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air or dust particles absorbed by the positive pressure dry air; Step (4-3), capturing the positive pressure dry air in the closed accommodation chamber; and Step (4-4) uses at least one detection element to detect the content of the cleaning result judgment factor in the positive pressure dry air.

16. The cleaning result detection method of the material conveying box as claimed in claim 15, characterized in that: The platform is a loading port in the cleaning processing area station for placing material transfer boxes before and after cleaning.

17. The cleaning result detection method of the material conveying box as claimed in claim 15, characterized in that: The wet cleaning and drying of the front cover and the box body also includes a step of removing liquid from the front cover and the box body.

18. The cleaning result detection method of the material conveying box as claimed in claim 15, characterized in that: The detection element is a humidity sensor.

19. The cleaning result detection method of the material conveying box as claimed in claim 15, characterized in that: The detection element is a particle counter.

20. The cleaning result detection method of the material conveying box according to any one of claims 15 to 19, characterized in that: At least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the box body includes the surrounding surface of the suspended support rod.

21. A cleaning result detection device for a material conveying box, arranged in a cleaning processing area station of the material conveying box, the material conveying box can be separated into a front cover and a box body in the cleaning processing area station, the front cover and the box body can be cleaned by a plurality of chambers in the processing area station individually or together, and then combined into a cleaned material conveying box as a detection object, characterized in that: The clean processing area station configuration includes: At least one cleaning chamber is provided with a plurality of spray nozzles capable of spraying cleaning liquid to wet-clean the front cover and the box body; At least one drying chamber is provided with at least a plurality of heat energy elements to dry the front cover and the box body. At least one of the drying chambers is also provided with a negative pressure channel, which is connected to an air pump to extract air in at least one of the drying chambers to generate a vacuum, and at least the box body is dried in the vacuum of at least one of the drying chambers. At least one platform for placing and positioning the detection object, the detection object having a first interface and a second interface; The detection device is installed on at least one of the platforms and includes: an air inlet nozzle, disposed on one side of at least one of the platforms and connected to the first interface, and the air inlet nozzle is connected to an air supply machine, for guiding clean dry air to enter a closed storage chamber of the detection object in sequence through the air inlet nozzle and the first interface, and generating positive pressure dry air that can contact the inner surface of the closed storage chamber, for absorbing at least one cleaning result judgment factor remaining on the inner surface of the closed storage chamber after drying, wherein the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air or dust particles absorbed by the positive pressure dry air; an exhaust nozzle, disposed on the other side of at least one of the platforms and connected to the second interface, the exhaust nozzle being used to guide the positive pressure dry air in the closed accommodation cabin to be discharged to the outside; a multi-way pipe connected to the exhaust nozzle for collecting positive pressure dry air in the closed accommodation chamber; and A detection element is installed on the multi-way pipe to detect the content of the cleaning result judgment factor in the positive pressure dry air.

22. The cleaning result detection device of the material conveying box as claimed in claim 21, characterized in that: At least one of the platforms is a loading port in the cleaning processing area station for placing material transfer boxes before and after cleaning.

23. The cleaning result detection device of the material conveying box as claimed in claim 21, characterized in that: At least one of the cleaning chambers is also provided with a plurality of blowing elements for removing liquid from the front cover and the box body after the cleaning liquid is sprayed.

24. The cleaning result detection device of the material conveying box as claimed in claim 21, characterized in that: The cleaning processing area station is also equipped with at least one liquid removal chamber, and at least one of the liquid removal chambers is provided with a plurality of air blowing elements to remove liquid from the front cover and the box body after the cleaning liquid is sprayed.

25. The cleaning result detection device of the material conveying box as claimed in claim 21, characterized in that: The multi-way pipe is also connected to an air pump, so that the detection element is installed on the multi-way pipe between the exhaust nozzle and the air pump.

26. The cleaning result detection device of the material conveying box as claimed in claim 21, characterized in that: The detection element is a humidity sensor.

27. The cleaning result detection device of the material conveying box as claimed in claim 21, characterized in that: The detection element is a particle counter.

28. The cleaning result detection device of the material conveying box according to any one of claims 21 to 27, characterized in that: At least one suspended support rod protrudes from the bottom of the box body, and the inner surface around the closed accommodating chamber includes the surrounding surface of the suspended support rod.

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