Confocal imaging system

Abstract

The confocal imaging system of the present application, by corresponding symmetrical arrangement of the first light source and the second light source, the first optical assembly and the second optical assembly, and the first processing assembly and the second processing assembly, taking the first light source, the first optical assembly, the emission surface of the object to be measured, the second optical assembly and the first processing assembly as the first light path, and taking the second light source, the second optical assembly, the emission surface of the object to be measured, the first optical assembly and the second processing assembly as the second light path, effectively increases the area of the spectrum covering the object to be measured, thereby increasing the test range, avoiding the problem of sacrificing the measurement accuracy for increasing the coverage area in a single light path, i.e. effectively ensuring the measurement accuracy, realizing the super-wide spectrum high-sensitivity detection of the same system, reducing the production cost, and the first processing assembly and the second processing assembly can obtain the position information, material information, etc. of the object to be measured according to the received reflection spectrum of the object to be measured, with fast measurement speed, high precision and high stability.

Description

Technical Field

[0001] This invention relates to the field of optical imaging, and more particularly to a confocal imaging system. Background Technology

[0002] Spectral confocal microscopy is a measurement method derived from confocal microscopy. Its main principle is to focus different wavelengths of a light source onto surfaces at different heights, achieving a correspondence between height and wavelength. Height is measured by detecting the confocal wavelength. It features high precision, high speed, and high stability, and is commonly used in industrial inspection technology, especially for measuring transparent objects.

[0003] In the prior art, Chinese utility model patent CN213481255U discloses a spectral confocal sensor that can measure the confocal wavelength along a single line, measuring the height position information of one line at a time. However, in practical applications, the coverage area of ​​the aforementioned confocal sensor cannot meet actual needs. Increasing the coverage area based on a single-path confocal sensor would sacrifice measurement accuracy. Furthermore, while using broadband testing would not sacrifice measurement accuracy by increasing the testing area, it would increase the cost of the camera. A single camera cannot achieve ultra-wideband, high-sensitivity detection. Summary of the Invention

[0004] The purpose of this invention is to solve the above problems and provide a confocal imaging system that splits the optical path into two paths to achieve spectral testing. A spectral response camera corresponding to the selected optical path can be selected, which ensures the testing accuracy, increases the testing range, and does not sacrifice the testing energy at the camera end.

[0005] To achieve the above objectives, the present invention provides a confocal imaging system, comprising a first light source and a second light source arranged symmetrically, a first optical component and a second optical component arranged symmetrically, and a first processing component and a second processing component arranged symmetrically.

[0006] The light from the first light source is dispersed by the first optical component, reflected by the object under test, received and converged by the second optical component, and focused at different positions on the first image sensor by the first processing component to form a first optical path;

[0007] The light from the second light source is dispersed by the second optical component, reflected by the object under test, received and converged by the first optical component, and focused at different positions on the second image sensor by the second processing component to form a second optical path.

[0008] In the above technical solution, a first semi-reflective and semi-transparent element is provided between the first optical component and the second processing component, and the line connecting the two lenses of the first optical component that are closest to the second processing component is perpendicular to the first light source.

[0009] A second semi-reflective and semi-transparent element is disposed between the second optical component and the first processing component, and the line connecting the two lenses of the second optical component that are closest to the first processing component is perpendicular to the second light source.

[0010] In the above technical solution, the surface of the first semi-reflective and semi-transparent element is covered with a first polarizing film, and the surface of the second semi-reflective and semi-transparent element is covered with a second polarizing film. The polarization directions of the first polarizing film and the second polarizing film are perpendicular to each other.

[0011] In the above technical solution, a phase delay device is provided between the first semi-reflective and semi-transparent element and the object under test, or

[0012] A phase delay device is provided between the second semi-reflective and semi-transparent element and the object under test; or

[0013] A phase delay device is provided between the first processing component and the corresponding aperture or slit, and a phase delay device is provided between the second processing component and the corresponding aperture or slit.

[0014] In the above technical solution, the first optical component includes a first collimating element, a first dispersing element, and a first focusing element arranged sequentially, used to disperse the light emitted by the first light source and focus light of different wavelengths at different heights, or

[0015] It is used to receive the light reflected from the surface of the object under test by the second light source and focus it to different positions.

[0016] In the above technical solution, the second optical component includes a second collimating element, a second dispersing element, and a second focusing element arranged sequentially, used to disperse the light emitted by the second light source and focus light of different wavelengths at different heights, or

[0017] It is used to receive the light reflected from the surface of the object under test by the first light source and focus it to different positions.

[0018] In the above technical solution, the first processing component includes a third collimating element, a first reflecting element, a third focusing element and the first image sensor arranged in sequence, for receiving light of different wavelengths obtained after passing through the first optical component and the second optical component of the first light source, and focusing it on different positions on the first image sensor.

[0019] In the above technical solution, the second processing component includes a fourth collimating element, a second reflecting element, a fourth focusing element and a second image sensor arranged in sequence, for receiving light of different wavelengths obtained after passing through the second optical component and the first optical component of the second light source, and focusing it on different positions on the second image sensor.

[0020] In the above technical solution, a small hole or slit is provided between the second optical component and the first processing component;

[0021] A small hole or slit is provided between the first optical component and the second processing component.

[0022] The above technical solution also includes:

[0023] The processor is used to obtain information about the object under test by detecting the position of the light spot on the first image sensor and / or the second image sensor.

[0024] In the above technical solution, the first light source and the second light source are any one or two of visible light, near-infrared light or ultraviolet light.

[0025] In the above technical solution, the first light source and the second light source have the same divergence angle, which is greater than 60°.

[0026] In the above technical solution, the optical power of both the first collimating element and the second collimating element is not zero.

[0027] In the above technical solution, both the first focusing element and the second focusing element have positive optical power.

[0028] This invention discloses a confocal imaging system. By symmetrically arranging a first light source and a second light source, a first optical component and a second optical component, and a first processing component and a second processing component, and using the first light source, the first optical component, the emission surface of the object under test, the second optical component, and the first processing component as the first optical path, and the second light source, the second optical component, the emission surface of the object under test, the first optical component, and the second processing component as the second optical path, the system effectively increases the spectral coverage area of ​​the object under test, thereby increasing the testing range. This avoids the problem of sacrificing measurement accuracy for increasing coverage area in a single optical path, effectively ensuring measurement accuracy. It achieves ultra-wide spectral and high-sensitivity detection within the same system, reducing production costs. The first and second processing components can obtain the position information and material information of the object under test (when the first and second light sources are polarized light sources, the material information of the object under test can be obtained) based on the received reflected light spectrum of the object under test. The system offers fast measurement speed, high accuracy, high stability, and simple and convenient operation. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the planar structure of the dual-optical-path confocal imaging system in Embodiment 1 of the present invention.

[0030] Figure 2 This is the object plane spectral distribution diagram of the dual-path confocal imaging system in Embodiment 1 of the present invention.

[0031] Figure 3 This is a schematic diagram of the first optical path planar structure of the dual-optical-path confocal imaging system in Embodiment 1 of the present invention.

[0032] Figure 4 This is a schematic diagram of the second optical path planar structure of the dual-optical-path confocal imaging system in Embodiment 1 of the present invention.

[0033] Figure 5 This is a spectral distribution diagram of the first image sensor of the dual-path confocal imaging system in Embodiment 1 of the present invention.

[0034] Figure 6 This is a spectral distribution diagram at the second image sensor of the dual-path confocal imaging system in Embodiment 1 of the present invention.

[0035] Figure 7 This is a schematic diagram of the planar structure of the dual-optical-path confocal imaging system in Embodiment 2 of the present invention.

[0036] Figure 8 This is the object plane spectral distribution diagram of the dual-path confocal imaging system in Embodiment 2 of the present invention.

[0037] Figure 9 This is the S-beam path of the dual-path confocal imaging system in Embodiment 2 of the present invention.

[0038] Figure 10 This is the P-beam path of the dual-path confocal imaging system in Embodiment 2 of the present invention.

[0039] Figure 11 This is a spectral distribution map of the first or second image sensor of the dual-path confocal imaging system in Embodiment 2 of the present invention. Detailed Implementation

[0040] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly described below. Obviously, the drawings described below are merely some embodiments of the present invention, and those skilled in the art can obtain other drawings based on these drawings without creative effort.

[0041] When describing embodiments of the present invention, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" express orientations or positional relationships based on the orientations or positional relationships shown in the relevant drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on the present invention.

[0042] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. The embodiments cannot be described in detail here, but the embodiments of the present invention are not limited to the following embodiments.

[0043] like Figures 1 to 11 As shown, a confocal imaging system of the present invention includes a first light source 1 and a second light source 2 arranged symmetrically, a first optical component 20 and a second optical component 30 arranged symmetrically, and a first processing component 40 and a second processing component 50 arranged symmetrically.

[0044] The light from the first light source 1 is dispersed by the first optical component 20, reflected by the object under test, received and converged by the second optical component 30, and focused at different positions on the first image sensor by the first processing component 40 to form the first optical path.

[0045] The light from the second light source 2 is dispersed by the second optical component 30, reflected by the object under test, received and converged by the first optical component 20, and focused at different positions on the second image sensor by the second processing component 50 to form a second optical path.

[0046] In this embodiment, by symmetrically arranging the first light source 1 and the second light source 2, the first optical component 20 and the second optical component 30, and the first processing component 40 and the second processing component 50, the first light source 1, the first optical component 20, the emission surface of the object under test, the second optical component 30, and the first processing component 40 form the first optical path, and the second light source 2, the second optical component 30, the emission surface of the object under test, the first optical component 20, and the second processing component 50 form the second optical path. This effectively increases the spectral coverage area of ​​the object under test, thereby increasing the test range and avoiding the problem of sacrificing measurement accuracy for increasing coverage area in a single optical path. In other words, it effectively ensures measurement accuracy and achieves ultra-wide spectrum and high sensitivity detection within the same system, reducing production costs. The first processing component 40 and the second processing component 50 can obtain the position information and material information of the object under test (when the first light source 1 and the second light source 2 are polarized light sources, the material information of the object under test can be obtained) based on the received reflected light spectrum of the object under test. The measurement speed is fast, the accuracy is high, the stability is high, and the operation is simple and convenient.

[0047] Specifically, the first light source 1 and the second light source 2 each contain light of at least one wavelength. The first optical component 20 disperses the light from the first light source 1 before illuminating the surface of the object under test. The light emitted from the surface of the object under test is then converged by the second optical component 30 and focused onto the first image sensor by the first processing component 40. The first optical component 20 and the second optical component 30 are symmetrically arranged. When the light from the first light source 1 passes through the first optical component 20 from top to bottom, the first optical component 20 disperses the light. Conversely, when the light reflected from the object under test by the second light source 2 passes through the first optical component 20 from bottom to top, the light disperses the light. After passing through the first optical component 20, the first optical component 20 has a converging effect. Similarly, the function and principle of the second optical component 30 are the same. Therefore, the symmetrical arrangement of the first light source 1 and the second light source 2, the symmetrical arrangement of the first optical component 20 and the second optical component 30, and the symmetrical arrangement of the first processing component 40 and the second processing component 50 can make the confocal imaging system structure more compact. Under the premise of the same measurement performance, the volume of the confocal imaging system can be effectively reduced, and the same set of components (first optical component 20 and second optical component 30) can be used to reduce production costs.

[0048] like Figure 1 and Figure 7 As shown, in one embodiment of the present invention, preferably, a first semi-reflective and semi-transparent element 60 is disposed between the first optical component 20 and the second processing component 50, and the line connecting the two lenses of the first optical component 20 and the second processing component 50 that are closest to each other is perpendicular to the first light source 1.

[0049] A second semi-reflective and semi-transparent element 70 is disposed between the second optical component 30 and the first processing component 40, and the line connecting the two lenses of the optical component that are closest to the first processing component 40 is perpendicular to the second light source 2.

[0050] In this embodiment, by setting a first semi-reflective and semi-transparent element 60 between the first optical component 20 and the second processing component 50, it is equivalent to setting the first semi-reflective and semi-transparent element 60 at the center position between the first optical component 20, the second processing component 50 and the first light source 1. The line connecting the two lenses closest to the first optical component 20 and the second processing component 50 is perpendicular to the first light source 1. The first light source 1 is preferably set at the middle position between the first optical component 20 and the second processing component 50. The angle between the line connecting the two lenses closest to the first optical component 20 and the second processing component 50 and the first semi-reflective and semi-transparent element 60 is 45°. The angle between the first semi-reflective and semi-transparent element 60 and the horizontal plane is also 45°. That is, the light from the first light source 1 enters the first optical component 20 after being reflected by the first semi-reflective and semi-transparent element 60.

[0051] The second semi-reflective and semi-transparent element 70 is symmetrically arranged with the first semi-reflective and semi-transparent element 60, and the position and angle are set accordingly.

[0052] By setting the first semi-reflective and semi-transparent element 60 and the second semi-reflective and semi-transparent element 70, it is possible to effectively prevent the first light source 1 or the second light source 2 from blocking the reflected light of the object under test.

[0053] like Figure 7 As shown, in one embodiment of the present invention, preferably, the surface of the first semi-reflective and semi-transparent element 60 is covered with a first polarizing film 61, and the surface of the second semi-reflective and semi-transparent element 70 is covered with a second polarizing film 62, wherein the polarization directions of the first polarizing film 61 and the second polarizing film 62 are perpendicular to each other.

[0054] In this embodiment, by setting the polarization directions of the first polarizing film 61 and the second polarizing film 62 to be perpendicular to each other, that is, when the first polarizing film 61 has the function of reflecting S-waves and transmitting P-waves, the corresponding second polarizing film 62 has the function of reflecting P-waves and transmitting S-waves. The first processing component 40 and the second processing component 50 obtain the material information of the test object by detecting the P-waves or S-waves reflected by the test object.

[0055] Similarly, the first light source 1 and the second light source 2 can be directly set as polarized light. In this case, the first semi-reflective and semi-transparent element 60 and the second semi-reflective and semi-transparent element 70 do not need to be equipped with polarizing films.

[0056] In one embodiment of the present invention, preferably, a phase delay device is disposed between the first semi-reflective and semi-transparent element 60 and the object under test, or

[0057] A phase delayer is provided between the second semi-reflective and semi-transparent element 70 and the object to be measured; or

[0058] A phase delay device is provided between the first processing component 40 and the corresponding aperture or slit, and a phase delay device is provided between the second processing component 50 and the corresponding aperture or slit.

[0059] In this embodiment, based on the polarization film configured on the first semi-reflective element 60 and the second semi-reflective element 70, a phase delayer is configured between the first semi-reflective element 60 and the object under test or between the second semi-reflective element 70 and the object under test. This is beneficial for changing the polarization state of the polarized light, and the material, reflectivity, roughness, contour, etc. of the object under test can be obtained through the first processing component 40 or the second processing component 50.

[0060] The polarization state can be linearly polarized light, circularly polarized light, elliptically polarized light, etc., with any vibration direction.

[0061] The phase delayer is positioned between the first semi-reflective element 60 and the object under test or between the second semi-reflective element 70 and the object under test, and is used to change the polarization state of the emitted light; while the phase delayer is positioned between the first processing component 40 and the corresponding aperture or slit, or between the second processing component 50 and the corresponding aperture or slit, and is used to change the polarization state of the received light.

[0062] In one embodiment of the present invention, preferably, the first optical component 20 includes a first collimating element 21, a first dispersing element 22, and a first focusing element 23 sequentially disposed therefrom, for dispersing the light emitted by the first light source 1 and focusing light of different wavelengths at different heights, or

[0063] It is used to receive the light reflected from the surface of the object under test by the second light source 2 and focus it to different positions.

[0064] In this embodiment, in the first optical path, the overall height angle of the first collimating element 21 is not zero, the first dispersing element 22 has the ability to separate the spectrum, that is, the ability to disperse different spectral colors, which can be achieved by using a prism or the like; the first focusing element 23 has the function of focusing, therefore, the overall optical power of the first focusing element 23 is positive, that is; the first focusing element 23 includes at least one lens with positive optical power.

[0065] In one embodiment of the present invention, preferably, the second optical component 30 includes a second collimating element 31, a second dispersing element 32, and a second focusing element 33 sequentially disposed therefrom, for dispersing the light emitted by the second light source 2 and focusing light of different wavelengths at different heights, or

[0066] It is used to receive the light reflected from the surface of the object under test by the first light source 1 and focus it to different positions.

[0067] The second collimating element 31, the second dispersive element 32, and the second focusing element 33 have the same structure and principle as the corresponding first collimating element 21, the first dispersive element 22, and the first focusing element 23.

[0068] In the corresponding first and second optical paths, the second collimating element 31, the second dispersive element 32, and the second focusing element 33 have relative functions with the corresponding first collimating element 21, the first dispersive element 22, and the first focusing element 23. For example, the first dispersive element 22 has a dispersive function in the first optical path, while in the second optical path, the first dispersive element 22 is used as a focusing element.

[0069] In one embodiment of the present invention, preferably, the first processing component 40 includes a third collimating element, a first reflecting element, a third focusing element and a first image sensor arranged in sequence, for receiving light of different wavelengths obtained after passing through the first optical component 20 and the second optical component 30 of the first light source 1, and focusing it at different positions on the first image sensor.

[0070] In one embodiment of the present invention, preferably, the second processing component 50 includes a fourth collimating element, a second reflecting element, a fourth focusing element and a second image sensor arranged in sequence, for receiving light of different wavelengths obtained after passing through the second optical component 30 and the first optical component 20 of the second light source 2, and focusing it at different positions on the second image sensor.

[0071] By configuring a third collimating element, a first reflecting element, and a third focusing element, as well as corresponding fourth collimating elements, second reflecting elements, and fourth focusing elements, light passing through the first or second optical element can be re-imaged, improving test accuracy or resolving more measurement attributes.

[0072] In one embodiment of the present invention, preferably, a small hole or slit is provided between the second optical component 30 and the first processing component 40;

[0073] A small hole or slit is provided between the first optical component 20 and the second processing component 50.

[0074] In this embodiment, a small aperture or slit can be used to filter out non-focused wavelength reflected light from the surface of the object under test, allowing only reflected light focused on the surface of the object to pass through. The aperture or slit can be two blackened metal plates. The aperture size or slit length is adjusted according to the length of the corresponding light source, and can be the same as the length of the line light source. The aperture size or slit width is adjustable and is related to the system resolution and sampling speed, and can be selected according to actual conditions. The smaller the aperture size or slit width, the fewer wavelengths enter the corresponding processing components, and the higher the resolution of the confocal imaging system; at the same time, the smaller the aperture size or slit width, the weaker the system energy, and the lower the system measurement speed.

[0075] In one embodiment of the present invention, preferably, it further includes:

[0076] The processor is used to obtain information about the object under test by detecting the position of the light spot on the first image sensor and / or the second image sensor.

[0077] In one embodiment of the present invention, preferably, the first light source 1 and the second light source 2 are any one or two of visible light, near-infrared light or ultraviolet light.

[0078] In one embodiment of the present invention, preferably, the first light source 1 and the second light source 2 have the same divergence angle, which is greater than 60°.

[0079] In one embodiment of the present invention, preferably, the optical power of both the first collimating element 21 and the second collimating element 31 is not zero.

[0080] In one embodiment of the present invention, preferably, both the first focusing element 23 and the second focusing element 33 have positive optical power.

[0081] In one embodiment of the present invention, preferably, the plane where the light source is located and the optimal convergence plane do not have to be at a 90-degree angle. The angle can be designed according to the appearance size and convenience and aesthetics.

[0082] The confocal imaging system will be described in detail below with two specific embodiments.

[0083] Example 1

[0084] In this embodiment, the dual-path confocal imaging system includes the following components arranged sequentially:

[0085] The first light source 1 has a spectral distribution of 410nm-700nm, and its first optical path is: first light source 1 → first collimating element 21 → first dispersive element 22 → first focusing element 23 → object under test → second focusing element 33 → second dispersive element 32 → second collimating element 31 → first processing component 40. The second light source 2 has a spectral distribution of 700nm-1150nm, and its second optical path is: second light source 2 → second collimating element 31 → second dispersive element 32 → second focusing element 33 → object under test → first focusing element 23 → first dispersive element 22 → first collimating element 21 → second processing component 50.

[0086] In this system, the first light source 1 and the second light source 2 have the same divergence angle, and the divergence angle is greater than 60°; the first collimating element 21 has six lenses, the first dispersive element 22 is a prism, and the first focusing element 23 has five lenses; the second collimating element 31 has six lenses, the second dispersive element 32 is a prism, and the second focusing element 33 has five lenses; the third collimating element has six lenses, the first reflecting element is a reflecting plane mirror, and the third focusing element has eight lenses; the fourth collimating element has six lenses, the second reflecting element is a reflecting plane mirror, and the fourth focusing element has eight lenses.

[0087] The spectral coverage area of ​​410nm-1150nm at the object surface is 6.6mm². Light from the first light source 1 (410nm-700nm) is reflected from the object surface and first imaged onto the slit by the imaging system. The slit is then imaged onto the first image sensor (or camera) by the first processing component 40, covering an area of ​​15mm². Light from the second light source 2 (700nm-11500nm) is reflected from the object surface and first imaged onto the slit by the imaging system. The slit is then imaged onto the second image sensor (or camera) by the second image sensor, covering an area of ​​10mm².

[0088] The spectrum reflected from the surface of the object under test is received by the sensor. The spectral value is determined based on the light signal detected by the sensor, and then the contour information, surface roughness, reflectivity and absorption spectral value of the object under test at the surface can be known.

[0089] The advantage of this embodiment is that it can increase the measurement range, which is larger than that of a single-path imaging system. The first optical path uses a visible light camera for reception, and the second optical path uses an infrared camera for reception, which improves energy utilization.

[0090] Figure 1 This is a planar structural diagram of a dual-path confocal system. Figure 2 It can be concluded that the light from the first and second optical paths converges at different heights on the object surface, resulting in a wider measurement range than a single-optical-path system. Figure 3 This is a system diagram of the first optical path. Figure 4 This is a system diagram of the second optical path. Figure 5 The spectral distribution at the first image sensor of the dual-path confocal imaging system is determined by the magnification of the imaging system, the parameters of the dispersive element, the slit size, and the size of the light source. Figure 6 The spectral distribution at the second image sensor in the second optical path of the dual-path confocal imaging system is determined by the magnification of the imaging system, the parameters of the dispersive element, the slit size, and the size of the light source.

[0091] Example 2

[0092] The dual-path confocal imaging system in this embodiment includes the following components arranged sequentially:

[0093] The first light source 1 and the second light source 2 are the same, with a spectral distribution of 450nm-650nm. The first optical path is: first light source 1 → first collimating element 21 → first dispersive element 22 → first focusing element 23 → object under test → second focusing element 33 → second dispersive element 32 → second collimating element 31 → first processing component 40. The second optical path is: second light source 2 → second collimating element 31 → second dispersive element 32 → second focusing element 33 → object under test → first focusing element 23 → first dispersive element 22 → first collimating element 21 → second processing component 50.

[0094] The first light source 1 and the second light source 2 have the same divergence angle, and the divergence angle is greater than 60°; the first collimating element 21 has seven lenses, the first dispersive element 22 is a prism, and the first focusing element 23 has seven lenses; the second collimating element 31 has seven lenses, the second dispersive element 32 is a prism, and the second focusing element 33 has seven lenses; the third collimating element has six lenses, the first reflecting element is a reflecting plane mirror, and the third focusing element has eight lenses; the fourth collimating element has six lenses, the second reflecting element is a reflecting plane mirror, and the fourth focusing element has eight lenses.

[0095] The spectral coverage area of ​​450nm-650nm at the object surface is 3mm. The S-ray from the first light source 1, after reflection from the object surface, is first imaged onto the slit by the imaging system. The slit is then imaged onto the first image sensor (or camera) by the first processing component 40, covering an area of ​​10mm. The P-ray from the second light source 2, after reflection from the object surface, is first imaged onto the slit by the imaging system. The slit is then imaged onto the second image sensor (or camera) by the second image sensor, covering an area of ​​10mm. The projection areas of the S-ray and P-ray overlap.

[0096] The spectrum reflected from the surface of the object under test is received by the sensor, and information such as the material, reflectivity, roughness, and profile of the object under test is determined based on the polarization state of the light signal detected by the sensor.

[0097] The advantage of this embodiment is that it can not only analyze the spectral information of the light reflected by the object under test, but also obtain the polarization information reflected from the surface of the object under test. The first optical path is the S-light optical path and the second optical path is the P-light optical path. The S-light information detected by the S-light optical path and the P-light information detected by the P-light optical path are integrated and analyzed. The polarization direction of the polarized light can also be changed, and multiple polarization images can be obtained by taking another picture, thereby determining the material and other properties of the object under test.

[0098] Figure 6 This is a planar structural diagram of a dual-path confocal system. Figure 7 It can be concluded that the S-beam and P-beam converge within the same area on the object surface. Figure 8 This is a system diagram of the S-optical path. Figure 9 This is a system diagram of the P-light optical path. Figure 10 This is a spectral distribution map of the first or second image sensor in a dual-path confocal imaging system. The field of view is determined by the magnification of the imaging system, the parameters of the dispersive element, the slit size, and the size of the light source.

[0099] This invention discloses a confocal imaging system. By symmetrically arranging a first light source and a second light source, a first optical component and a second optical component, and a first processing component and a second processing component, and using the first light source, the first optical component, the emission surface of the object under test, the second optical component, and the first processing component as the first optical path, and the second light source, the second optical component, the emission surface of the object under test, the first optical component, and the second processing component as the second optical path, the system effectively increases the spectral coverage area of ​​the object under test, thereby increasing the testing range. This avoids the problem of sacrificing measurement accuracy for increasing coverage area in a single optical path, effectively ensuring measurement accuracy. It achieves ultra-wide spectral and high-sensitivity detection within the same system, reducing production costs. The first and second processing components can obtain the position information and material information of the object under test (when the first and second light sources are polarized light sources, the material information of the object under test can be obtained) based on the received reflected light spectrum of the object under test. The system offers fast measurement speed, high accuracy, high stability, and simple and convenient operation.

[0100] The above description is merely one embodiment of the present invention and is not intended to limit the invention. Those skilled in the art will recognize that the present invention can be modified and varied in various ways. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A confocal imaging system, characterized by, The first light source (1) and the second light source (2) are symmetrically arranged, the first optical assembly (20) and the second optical assembly (30) are symmetrically arranged, and the first processing assembly (40) and the second processing assembly (50) are symmetrically arranged; The light of the first light source (1) is dispersed by the first optical assembly (20) in sequence, reflected by the object to be measured, received and converged by the second optical assembly (30), and focused on different positions on the first image sensor by the first processing assembly (40), forming a first light path; The light of the second light source (2) is dispersed by the second optical assembly (30) in sequence, reflected by the object to be measured, received and converged by the first optical assembly (20), and focused on different positions on the second image sensor by the second processing assembly (50), forming a second light path.

2. The confocal imaging system of claim 1, wherein, A first half-reflection half-transmission element (60) is arranged between the first optical assembly (20) and the second processing assembly (50), and the line connecting the two lenses of the first optical assembly (20) closest to the second processing assembly (50) is perpendicular to the first light source (1); A second half-reflection half-transmission element (70) is arranged between the second optical assembly (30) and the first processing assembly (40), and the line connecting the two lenses of the second optical assembly closest to the first processing assembly (40) is perpendicular to the second light source (2).

3. The confocal imaging system of claim 2, wherein, The surface of the first half-reflection half-transmission element (60) is covered with a first polarizing film (61), and the surface of the second half-reflection half-transmission element (70) is covered with a second polarizing film (62), and the polarization directions of the first polarizing film (61) and the second polarizing film (62) are perpendicular to each other.

4. The confocal imaging system of claim 3, wherein, A small hole or a slit is arranged between the second optical assembly (30) and the first processing assembly (40); A small hole or a slit is arranged between the first optical assembly (20) and the second processing assembly (50).

5. The confocal imaging system of claim 4, wherein, A phase retarder is arranged between the first half-reflection half-transmission element (60) and the object to be measured; or A phase retarder is arranged between the second half-reflection half-transmission element (70) and the object to be measured; or A phase retarder is arranged between the first processing assembly (40) and the corresponding small hole or slit, and a phase retarder is arranged between the second processing assembly (50) and the corresponding small hole or slit.

6. The confocal imaging system of claim 1, wherein, The first optical assembly (20) comprises a first collimating element (21), a first dispersing element (22) and a first focusing element (23) arranged in sequence, for dispersing the light emitted by the first light source (1) and focusing different wavelengths of light at different heights, or for receiving the light reflected by the object to be measured irradiated by the second light source (2) and focusing it to different positions.

7. The confocal imaging system of claim 6, wherein, The second optical assembly (30) comprises a second collimating element (31), a second dispersing element (32) and a second focusing element (33) arranged in sequence, for dispersing the light emitted by the second light source (2) and focusing different wavelengths of light at different heights, or for receiving the light reflected by the object to be measured irradiated by the first light source (1) and focusing it to different positions.

8. The confocal imaging system of claim 7, wherein, The first processing assembly (40) comprises a third collimating element, a first reflecting element, a third focusing element and the first image sensor arranged in sequence, for receiving different wavelength light rays after the first optical assembly (20) and the second optical assembly (30) of the first light source (1) and focusing the light rays on different positions of the first image sensor.

9. The confocal imaging system of claim 8, wherein, The second processing assembly (50) comprises a fourth collimating element, a second reflecting element, a fourth focusing element and the second image sensor arranged in sequence, for receiving different wavelength light rays after the second optical assembly (30) and the first optical assembly (20) of the second light source (2) and focusing the light rays on different positions of the second image sensor.

10. The confocal imaging system of claim 1, wherein, Further comprising: a processor for obtaining information of the object to be detected by detecting the light spot positions on the first image sensor and / or the second image sensor.

11. The confocal imaging system of claim 1, wherein, The first light source (1) and the second light source (2) are any one or both of visible light, near-infrared light or ultraviolet light.

12. The confocal imaging system of claim 1, wherein, The divergence angles of the first light source (1) and the second light source (2) are the same, and the divergence angle is greater than 60°.

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