Electronic gas leakage concentration detection device

Abstract

The present invention belongs to the field of gas detection technology and provides an electronic gas leakage concentration detection device, which includes: a base and a detection box and a processing box located on the base; wherein the processing box is also provided with a dissolution chamber and a filter chamber; a detection mechanism located in the detection box; a delay component connected to the detection box, used for delaying the discharge of the electronic gas processed by the detection mechanism; a dissolution mechanism located in the dissolution chamber; wherein the dissolution mechanism includes a dissolution component and a buffer component used in conjunction with the dissolution component, used for dissolving and disinfecting the leaked electronic gas; and a filter component located in the filter chamber. The present invention has an innovative structure, which facilitates the detection of electronic gas leakage concentration while also enabling pre-processing of the leaked electronic gas, thereby ensuring the safety of production and processing.

Description

Technical Field

[0001] The present invention relates to the technical field of gas detection, and in particular to an electronic gas leakage concentration detection device. Background Art

[0002] Electronic gas is a general term for gases used in the semiconductor industry. With the continuous upgrading of consumer electronic products, the electronics industry has increasingly stringent requirements for the purity of electronic gas sources and the prevention of secondary contamination in the delivery system. Because electronic gases can pose hazards such as asphyxiation, corrosiveness, toxicity, flammability, and explosiveness, detecting electronic gas leak concentrations is crucial.

[0003] Most existing electronic gas leakage concentration detection devices can only detect the leakage gas concentration and provide an alarm. There is always a certain time delay between the operation of the safety system when the gas leaks into the gas storage workshop. When the device lacks the function of pre-processing the leaked gas, there will be certain safety hazards, which is not conducive to the safe production of the electronics industry.

[0004] As can be seen from the above, most of the existing electronic gas leakage concentration detection devices have single functions and cannot perform pre-treatment operations on the leaked gas. They pose serious safety hazards and endanger the health of workers. Therefore, they are difficult to be widely used. Summary of the Invention

[0005] The purpose of the embodiments of the present invention is to provide an electronic gas leakage concentration detection device, which aims to solve the following problem: most existing electronic gas leakage concentration detection devices have single functions and cannot perform pre-treatment operations on leaked gas. They pose serious safety hazards and endanger the health of workers, and are therefore difficult to be widely used.

[0006] The embodiment of the present invention is implemented as follows: an electronic gas leakage concentration detection device, the electronic gas leakage concentration detection device comprising:

[0007] A base and a detection box and a processing box located on the base; wherein the processing box is further provided with a dissolution chamber and a filtration chamber;

[0008] A detection mechanism, located in the detection box, for detecting the leakage concentration of electronic gas;

[0009] A delay component, connected to the detection box, for delaying the discharge of the electronic gas processed by the detection mechanism, and for connecting the detection box to the processing box;

[0010] A dissolving mechanism is located in the dissolving chamber; wherein the dissolving mechanism includes a dissolving component and a buffer component used in conjunction with the dissolving component, and is used to dissolve and disinfect the leaked electronic gas; and

[0011] The filter assembly is located in the filter chamber and is used to filter the electronic gas processed by the dissolution mechanism.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] The present invention is provided with a delay component, a dissolving mechanism and a filtering component. The setting of the delay component realizes the delayed discharge of the detected gas, avoiding the phenomenon that the leaked electronic gas is re-emitted into the air after detection. The setting of the dissolving mechanism realizes the dissolution treatment of the leaked electronic gas, avoiding the toxic substances in the gas from damaging people's health and effectively preventing the leaked electronic gas from exploding, thereby ensuring the safety of production and processing. The setting of the filtering component realizes the filtering of the leaked electronic gas, ensuring the safe discharge of the gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 2 is a schematic diagram of the main structure of an embodiment of the present invention.

[0015] Figure 2 2 is a side structural diagram of an embodiment of the present invention.

[0016] Figure 3 Schematic diagram of a partial structure of the dissolution mechanism in an embodiment of the present invention.

[0017] Figure 4 Schematic diagram of the three-dimensional structure of the mounting member in an embodiment of the present invention.

[0018] Figure 5 for Figure 1 Schematic diagram of the enlarged structure at point A in the middle.

[0019] Figure 6 for Figure 1 Schematic diagram of the enlarged structure at point B in the middle.

[0020] Figure 7 for Figure 1 Schematic diagram of the enlarged structure at point C in the middle.

[0021] Description of reference numerals:

[0022] 1. Base; 2. Detection box; 3. First drive assembly; 4. Dust collecting part; 5. Screw; 6. Induction probe; 7. Air inlet; 8. Transmission part; 9. Linkage part; 10. Alarm; 11. Induced draft fan; 12. Delay part; 13. Conduit; 14. Cleaning part; 15. First exhaust port; 16. Dissolution chamber; 17. Connecting part; 18. Treatment chamber; 19. Filter chamber; 20. Heating part; 21. Second exhaust port; 22. Pushing part; 23. Moving wheel; 24. Buffer chamber; 25. Piston; 26. Feed port; 27. First support member; 28. Second drive assembly; 29. ​​Sewage outlet; 30. Second support member; 31. Air outlet; 32. Sliding part; 33. Agitating part; 34. Spoiler; 35. Drive member; 36. Filter member; 37. First connecting member; 38. Sliding block; 39. Second connecting member. DETAILED DESCRIPTION

[0023] In order to better understand the above technical solution, the above technical solution will be described in detail below with reference to the accompanying drawings and specific implementation methods.

[0024] The specific implementation of the present invention is described in detail below with reference to specific embodiments.

[0025] See also Figure 1 、 2 , an embodiment of the present invention provides an electronic gas leakage concentration detection device, which includes a base 1, a detection box 2 and a processing box 18 located on the base 1, wherein the processing box 18 is also provided with a dissolution chamber 16 and a filtering chamber 19; a detection mechanism is provided in the detection box 2 for detecting the electronic gas leakage concentration; a delay component is connected to the detection box 2, for delaying the discharge of the electronic gas processed by the detection mechanism, and is also used for the connection between the detection box 2 and the processing box 18; a dissolution mechanism is located in the dissolution chamber 16; wherein the dissolution mechanism includes a dissolution component and a cache component used in conjunction with the dissolution component, for dissolving and disinfecting the leaked electronic gas; and a filtering component is located in the filtering chamber 19, for filtering the electronic gas processed by the dissolution mechanism.

[0026] During operation, the device can be stably supported by the base 1, the detection mechanism can be used to detect the concentration of electronic gas leakage, and the delay component can be used to delay the discharge of the gas processed by the detection mechanism. At the same time, the air detected to have leaked electronic gas can be introduced into the dissolution mechanism to prevent the leaked electronic gas from being re-emitted into the air after being detected by the detection mechanism, thereby affecting the normal production of the electronics industry. The toxic substances in the electronic gas can be dissolved by the dissolution component, thereby realizing the pretreatment of the leaked electronic gas. At the same time, the mixture between the liquid dissolving agent and the electronic gas can effectively prevent the explosion of the electronic gas, thereby protecting the personal safety of the staff. After the dissolution component is completed, part of the solvent agent in the dissolution chamber 16 can be absorbed by the cache component, thereby facilitating the introduction of the gas processed by the dissolution component into the filter component. The gas processed by the dissolution component can be filtered by the filter component, thereby facilitating gas discharge.

[0027] In one embodiment of the present invention, see Figure 1 and Figure 2 The detection mechanism includes: at least one set of air inlets 7, which are arranged on the detection box 2; and a sensing probe 6, which is located in the detection box 2 and is used to detect the leakage concentration of electronic gas.

[0028] In this embodiment, the air inlet 7 can adopt a rectangular structure, and a dustproof net is further provided on the air inlet 7. The dustproof net can be made of low-carbon steel plate or galvanized plate, and the surface of the dustproof net is provided with electrostatic powder spraying treatment to effectively prevent dust from entering. The sensing probe 6 can adopt existing public technology. A data processing module can be provided in the detection box 2, and the data processing module is electrically connected to the sensing probe 6; when working, the gas is easily introduced into the detection box 2 through the air inlet 7, and the gas entering the detection box 2 can be detected by the sensing probe 6, and the data generated by the detection of the sensing probe 6 can be analyzed by the data processing module, wherein the air inlet 7 is sequentially provided with multiple groups on the side of the detection box 2, which is convenient for realizing comprehensive detection of air in different height areas, improving the accuracy of the device in detecting the electronic gas leakage concentration, and improving the detection quality of the device.

[0029] In one embodiment of the present invention, see Figure 1 The delay component includes: a delay element 12, connected to the detection box 2, for realizing delayed discharge of the electronic gas processed by the detection mechanism; a first exhaust end 15, connected to the delay element 12; and a conduit 13, for connecting the delay element 12 and the dissolution mechanism.

[0030] In this embodiment, the first exhaust end 15 can be a gas duct, and the output end of the first exhaust end 15 is also provided with a dustproof net to prevent dust from entering. The delay element 12 can adopt a structural setting of multiple groups of U-shaped tubes connected to each other, so as to prolong the residence time of the gas in the delay element 12. The position where the delay element 12 contacts the detection box 2 is also provided with an induced draft fan 11, which facilitates the introduction of the gas processed by the detection mechanism into the delay element 12 through the induced draft fan 11. The first exhaust end 15 is connected to the end of the delay element 12, and an electromagnetic valve is also provided at the connection between the first exhaust end 15 and the delay element 12. A solenoid valve is also provided on the duct 13 to facilitate control of the flow state of the pipeline. The processing box 18 is also provided with a rod for supporting the delay element 12 to improve the stability of the delay element 12 during operation.

[0031] During operation, the induced draft fan 11 can accelerate the gas detected by the detection mechanism to enter the delay element 12. The delay element 12 can extend the gas discharge time, providing sufficient reaction time for the data processing module and the sensing probe 6. When no electronic gas leakage is detected, the gas will be directly discharged through the first exhaust port 15. When electronic gas leakage is detected, the solenoid valve located at the first exhaust port 15 will be closed, and the gas will enter the dissolution component through the conduit 13, thereby completing subsequent processing work and effectively avoiding the single function of the device. The delay element 12 can also adopt a box body, and the box body can be used to temporarily store the detected gas to achieve the purpose of delayed discharge.

[0032] In one embodiment of the present invention, see Figure 1 、 Figure 3 and Figure 4 The dissolution component includes: a feed port 26, which is arranged on the dissolution chamber 16 and is used to add a dissolving agent into the dissolution chamber 16; a second support member 30, which is connected to the dissolution chamber 16; a sliding member 32, which is connected to the second support member 30; at least one group of stirring members 33, which is used to achieve sufficient mixing between the electronic gas and the dissolving agent; a first support member 27, which is used to connect the stirring member 33 and the sliding member 32; and a second driving component 28, which is used to drive the stirring member 33 to move.

[0033] In this embodiment, a drain port is further provided in the dissolving bin 16, the second support member 30 is rotatably connected to the dissolving bin 16 via a rotating tube, and the rotating tube is sealed and rotatably connected to the conduit 13, an air outlet 31 is further provided on the second support member 30, and the air outlet 31 is communicated with the conduit 13, the second support member 30 adopts a rectangular block structure, the sliding member 32 is slidably connected to the second support member 30, and the sliding member 32 can be a semicircular ring plate, the first support member 27 can be a connecting rod, and the first support member 27 and the sliding member 32 are connected. Rotationally connected, the second drive assembly 28 includes a servo motor and a drive member 35, one end of the drive member 35 is fixedly connected to the output shaft of the servo motor, and the other end of the drive member 35 is rotationally connected to the first support member 27, the stirring member 33 includes a circular plate and a spoiler 34, the circular plate and the first support member 27 can be fixedly connected, the spoiler 34 can be provided with multiple groups on the circular plate, wherein the spoiler 34 can be a plate with a trapezoidal structure, and the spoiler 34 is also provided with several groups of through holes, so as to facilitate the turbulence effect on the dissolved agent.

[0034] During operation, the electronic gas can be introduced into the dissolution chamber 16 through the gas outlet 31, and the first support member 27 can be driven by the second drive component 28 to rotate at the contact end with the drive member 35 with the servo motor as the axis, thereby driving the sliding member 32 to slide on the second support member 30, and the second support member 30 rotates with the rotating tube as the axis, thereby realizing the swing of the stirring member 33 in the vertical and horizontal directions, realizing sufficient mixing between the electronic gas and the dissolving agent, effectively dissolving and disinfecting the electronic gas, and at the same time, the liquid dissolving agent can effectively avoid the risk of explosion due to excessive electronic gas concentration, thereby ensuring production safety.

[0035] In one embodiment of the present invention, see Figure 1 The cache component includes: a cache chamber 24 connected to the dissolution chamber 16; and a compression member located in the cache chamber 24.

[0036] In this embodiment, the buffer chamber 24 and the dissolving chamber 16 are connected to each other, and the compression member includes a piston 25 and a pushing member 22. The piston 25 is slidably installed in the buffer chamber 24, and the pushing member 22 is connected to the piston 25; during operation, the piston 25 can be driven to move in the buffer chamber 24 by the pushing member 22. When the pushing member 22 drives the piston 25 to move toward the side of the pushing member 22, the dissolved agent in the dissolving chamber 16 can be sucked into the buffer chamber 24, thereby achieving a decrease in the liquid level in the dissolving chamber 16, which is convenient for discharging the treated gas into the filter chamber 19, and can effectively prevent the dissolved agent from entering the filter chamber 19, thereby improving the working performance of the device. When the pushing member 22 drives the piston 25 to move toward the side of the dissolving chamber 16, the dissolved agent in the buffer chamber 24 can be pushed back into the dissolving chamber 16, which is convenient for the normal progress of subsequent work. The pushing member 22 can adopt an electric telescopic rod or a hydraulic cylinder to drive the piston 25 to slide.

[0037] In one embodiment of the present invention, see Figure 1 and Figure 7 The filter assembly includes: a connecting piece 17 for connecting the dissolution chamber 16 and the filter chamber 19; at least one set of filter elements 36 located in the filter chamber 19 for filtering the electronic gas processed by the dissolution assembly; and a heating element 20 connected to the filter chamber 19.

[0038] In this embodiment, the connecting member 17 may include a fan and an air duct, the air duct is used for communication between the dissolving chamber 16 and the filtering chamber 19, the fan is connected to the air duct, and the gas processed by the dissolving component can be accelerated to enter the filtering chamber 19 by the fan, wherein a one-way valve is also provided on the air duct, the filter element 36 can be an activated carbon plate, and two groups of filter elements 36 can be provided in the filtering chamber 19, the filter element 36 and the heating element 20 both adopt an inverted L-shaped structure, and the heating element 20 is provided between the two groups of filter elements 36, The heating element 20 can be an electric heating net, and the processing box 18 is also provided with a second exhaust end 21, and the second exhaust end 21 is connected to the filter chamber 19; during operation, the electronic gas entering the filter chamber 19 can be filtered through the filter element 36, and the filtered gas can be discharged through the second exhaust end 21, wherein the second exhaust end 21 is also provided with a solenoid valve, and after the filtration is completed, the filter element 36 can be heated and dried by the heating element 20, which is convenient for multiple use, effectively improving the quality of the device's treatment of leaked electronic gas, and thus ensuring the safety of processing and production.

[0039] In one embodiment of the present invention, see Figure 1 、 Figure 5 and Figure 6The detection mechanism also includes at least one set of cleaning components, which include: a cleaning part 14, used to clean the sensing probe 6; a moving part, connected to the detection box 2, used to drive the cleaning part 14 to move; a first driving component 3, used to drive the moving part to work; a rotating component, used to drive the cleaning part 14 to rotate; and a dust collecting part 4 located in the detection box 2, used to process dust and debris generated by the cleaning part 14 during operation.

[0040] In this embodiment, the cleaning member 14 adopts a disc-shaped plate, and several groups of brush heads are also provided on the cleaning member 14. The moving member includes a screw rod 5 and a slider 38. The screw rod 5 is rotatably installed in the detection box 2, and the slider 38 is threadedly connected to the screw rod 5. The cleaning member 14 and the slider 38 are connected by a rotating shaft. The first driving assembly 3 includes a servo motor and a first connecting member 37. The first connecting member 37 is used for connecting the servo motor and the screw rod 5, wherein the first connecting member 37 includes an incomplete gear and at least one group of helical gears, and the incomplete gears are connected to the servo motor. The helical gears are symmetrically arranged in two groups on the screw rod 5, and the helical gears and the incomplete gears are engaged with each other. The dust collecting member 4 includes a guide plate and a sewage outlet 29. The guide plate is arranged at the bottom of the sensing probe 6, and the sewage outlet 29 is connected to the guide plate.

[0041] During operation, the first driving component 3 can drive the screw rod 5 to rotate, thereby driving the cleaning piece 14 to move in the vertical direction. The rotating component can drive the cleaning piece 14 to rotate while moving, thereby realizing the cleaning work of the surface of the sensing probe 6, which is convenient for improving the detection accuracy of the sensing probe 6. A rectangular plate for auxiliary support of the screw rod 5 is also provided in the detection box 2 to improve the stability of the device during use. The dust and debris cleaned can be discharged through the dust collecting piece 4. An electromagnetic valve is also provided on the sewage outlet 29, and the electromagnetic valve is closed during detection.

[0042] In one embodiment of the present invention, see Figure 1 and Figure 6 The rotating assembly includes: a transmission member 8, connected to the detection box 2; a linkage member 9, used for connecting one end of the transmission member 8 and the moving member; and a second connecting member 39, used for connecting the other end of the transmission member 8 and the cleaning member 14.

[0043] In this embodiment, the transmission member 8 can be a telescopic rod, and the transmission member 8 is rotatably connected to the detection box 2. The linkage member 9 includes a driving gear and a driven gear. The driving gear is connected to the screw rod 5, and the driven gear is connected to the transmission member 8, and the driven gear is meshed with the driving gear. The second connecting member 39 includes a fixed frame and a group of transmission gears. The transmission gear is used to connect the transmission member 8 and the cleaning member 14. The fixed frame facilitates the fixation between the transmission member 8 and the slider 38; during operation, the transmission member 8 can be driven to rotate by rotating the screw rod 5, thereby driving the cleaning member 14 mounted on the slider 38 to rotate, thereby realizing the cleaning member 14 to move in the vertical direction and rotate at the same time, which is convenient for achieving thorough cleaning of the sensing probe 6 and avoiding the single function of the device.

[0044] In one embodiment of the present invention, see Figure 1 , also includes an alarm 10, which is connected to the detection box 2. The alarm 10 can be a hazard warning light or a buzzer. The alarm 10 facilitates timely feedback of information on electronic gas leakage, effectively improving the practicality of the device and thereby achieving full protection for the staff.

[0045] In one embodiment of the present invention, see Figure 1 , and also includes at least one set of moving wheels 23, which are connected to the base 1. The moving wheels 23 facilitate moving the device, wherein the moving wheels 23 can adopt existing public technology and will not be described in detail here.

[0046] To sum up, the working principle of the present invention is: the detection of electronic gas leakage concentration can be realized through the detection mechanism, wherein the detection component can be cleaned and processed by the cleaning component to improve the detection accuracy of the detection component, and the gas processed by the detection mechanism can be delayed and discharged by the delay component. At the same time, the air detected to have leaked electronic gas can be introduced into the dissolution mechanism to avoid the leaked electronic gas being discharged into the air again after being detected by the detection mechanism, thereby affecting the normal production of the electronics industry. The toxic substances in the electronic gas can be dissolved by the dissolution component, thereby realizing the pretreatment of the leaked electronic gas. At the same time, the mixture between the liquid dissolving agent and the electronic gas can effectively avoid the explosion of the electronic gas and protect the personal safety of the staff. After the dissolution component is completed, part of the solvent agent in the dissolution bin can be absorbed by the cache component, so that the gas processed by the dissolution component can be conveniently introduced into the filter component, and the gas processed by the dissolution component can be filtered and processed by the filter component, thereby facilitating gas discharge.

[0047] Although preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they are aware of the basic inventive concepts. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the invention. Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the invention. Thus, the present invention is intended to include such changes and modifications as fall within the scope of the claims and their equivalents.

Claims

1. An electronic gas leakage concentration detection device, characterized in that: The electronic gas leakage concentration detection device comprises: A base and a detection box and a processing box located on the base; wherein the processing box is further provided with a dissolution chamber and a filtration chamber; A detection mechanism, located in the detection box, for detecting the leakage concentration of electronic gas; A delay component, connected to the detection box, for delaying the discharge of the electronic gas processed by the detection mechanism, and for connecting the detection box to the processing box; A dissolving mechanism is located in the dissolving chamber; wherein the dissolving mechanism includes a dissolving component and a buffer component used in conjunction with the dissolving component, and is used to dissolve and disinfect the leaked electronic gas; and A filter assembly, located in the filter chamber, for filtering the electronic gas processed by the dissolution mechanism; The delay component includes: a delay element, connected to the detection box, for achieving delayed discharge of the electronic gas processed by the detection mechanism; a first exhaust port connected to the delay element; and a conduit for connecting the delay element and the dissolving mechanism; The dissolving component comprises: A feed inlet is provided on the dissolving bin and is used to add a dissolving agent into the dissolving bin; a second support member connected to the dissolution bin; a sliding member connected to the second supporting member; At least one set of stirring elements for achieving sufficient mixing between the electronic gas and the dissolving agent; a first supporting member for connecting the stirring member and the sliding member; and a second driving assembly for driving the stirring member to move; The cache component includes: a buffer chamber connected to the dissolution chamber; and a compression member located in the buffer chamber; The filter assembly comprises: A connecting piece, used for connecting the dissolution tank and the filtration tank; at least one set of filters, located in the filter chamber, for filtering the electronic gas processed by the dissolution component; and A heating element connected to the filter chamber; The detection mechanism further includes at least one cleaning component, wherein the cleaning component includes: Cleaning piece, used to clean the induction probe; A moving part, connected to the detection box, for driving the cleaning part to move; A first driving assembly, used for driving the moving member to work; A rotating assembly, configured to drive the cleaning member to rotate; and The dust collecting part located in the detection box is used to process the dust and debris generated by the cleaning part.

2. The electronic gas leakage concentration detection device according to claim 1, characterized in that: The detection mechanism includes: at least one set of air inlets, the air inlets being disposed on the detection box; and The induction probe is located in the detection box and is used to detect the leakage concentration of the electronic gas.

3. The electronic gas leakage concentration detection device according to claim 1, characterized in that: The rotating assembly comprises: a transmission member connected to the detection box; a linkage member, used for connecting one end of the transmission member to the moving member; and The second connecting member is used to connect the other end of the transmission member to the cleaning member.

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