A control method, system, device and storage medium of a micromechanical gyroscope

Abstract

The invention discloses a control method, system, device and storage medium of a micromechanical gyroscope, and relates to the field of micromechanical gyroscope control. Firstly, a vibration displacement electric signal is obtained by converting the capacitance change of a gyroscope detection electrode into an electric signal by a signal pickup circuit and demodulating the electric signal through a carrier demodulator. The vibration displacement electric signal is demodulated by using a fundamental wave and a harmonic wave respectively to obtain a fundamental wave amplitude and a harmonic wave amplitude. The quotient of the harmonic wave amplitude divided by the fundamental wave amplitude is used as the harmonic fundamental wave amplitude ratio, thereby eliminating the influence of the gain of the signal pickup circuit, and further making the method of generating an excitation signal by using the harmonic fundamental wave amplitude ratio and a reference amplitude value not affected by the external environment and the circuit structure of the signal pickup circuit, thereby ensuring the high stability of the control of the vibration displacement of the micromechanical gyroscope.

Description

Technical Field

[0001] The present invention relates to the field of micromechanical gyroscope control, and in particular to a control method, system, device and storage medium for a micromechanical gyroscope. Background Art

[0002] Micromechanical gyroscopes can detect the angle and angular velocity of rotation, and have been widely used in military and civilian fields due to their advantages such as small size, light weight and low cost. In order to achieve accurate angular velocity detection based on micromechanical gyroscopes, it is usually necessary to control the vibration displacement of the micromechanical gyroscope to remain stable. In the prior art, the vibration displacement electrical signal is demodulated to obtain the fundamental amplitude, and an excitation signal is output based on the difference between the fundamental amplitude and the reference amplitude value to adjust the vibration displacement of the micromechanical gyroscope and keep the vibration displacement stable. Among them, the vibration displacement electrical signal is an electrical signal obtained by the signal pickup circuit based on the capacitance change amount of the gyro detection electrode in the micromechanical gyroscope, and then demodulated by the carrier demodulator. However, the gain of the signal pickup circuit will change with the temperature of the external environment, resulting in the vibration displacement electrical signal output by the signal pickup circuit also being affected by the external environment, which in turn causes the vibration displacement of the micromechanical gyroscope in the prior art to be unable to remain stable. Summary of the invention

[0003] The purpose of the present invention is to provide a control method, system, device and storage medium for a micromechanical gyroscope, which can be unaffected by the external environment and the circuit structure of a signal pickup circuit when controlling the micromechanical gyroscope, thereby ensuring high stability in controlling the vibration displacement of the micromechanical gyroscope.

[0004] In order to solve the above technical problems, the present invention provides a control method of a micromechanical gyroscope, comprising:

[0005] Acquire a vibration displacement electrical signal, wherein the vibration displacement electrical signal is a signal obtained by converting a capacitance change of a gyro detection electrode in a micromechanical gyroscope into an electrical signal by a signal pickup circuit and demodulating the electrical signal through a carrier demodulator;

[0006] Demodulating the vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and demodulating the vibration displacement electrical signal using a harmonic wave to obtain a harmonic wave amplitude;

[0007] The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio;

[0008] An excitation signal is generated based on the harmonic fundamental wave amplitude ratio and a reference amplitude value, and the excitation signal is output to an excitation electrode of the micromechanical gyroscope so as to adjust the vibration displacement of the micromechanical gyroscope.

[0009] Preferably, when the gyro detection electrode of the micromechanical gyroscope is a unilateral detection electrode, demodulating the vibration displacement electrical signal by using harmonics to obtain the harmonic amplitude comprises:

[0010] Demodulating the vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude;

[0011] The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, comprising:

[0012] The quotient of the second harmonic amplitude divided by the fundamental wave amplitude is taken as the harmonic-to-fundamental wave amplitude ratio.

[0013] Preferably, when the gyro detection electrode of the micromechanical gyroscope is a differential detection electrode, demodulating the vibration displacement electrical signal by using harmonics to obtain the harmonic amplitude comprises:

[0014] Demodulating the vibration displacement electrical signal using the third harmonic to obtain the third harmonic amplitude;

[0015] The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, comprising:

[0016] The quotient of the third harmonic amplitude divided by the fundamental wave amplitude is taken as the harmonic-to-fundamental wave amplitude ratio.

[0017] Preferably, before using the fundamental wave to demodulate the vibration displacement electrical signal to obtain the fundamental wave amplitude, and using the harmonic wave to demodulate the vibration displacement electrical signal to obtain the harmonic wave amplitude, the method further includes:

[0018] Demodulating the vibration displacement electrical signal using a cosine signal having an angular frequency equal to the vibration angular frequency of the micromechanical gyroscope to obtain a fundamental wave phase;

[0019] Obtaining a fundamental wave angular frequency and a harmonic angular frequency based on the fundamental wave phase;

[0020] Generate a first sinusoidal signal whose angular frequency is the fundamental wave angular frequency, use the first sinusoidal signal as the fundamental wave, and enter the step of demodulating the vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude;

[0021] Generate a second sinusoidal signal with an angular frequency equal to the harmonic angular frequency, use the second sinusoidal signal as the harmonic, and enter the step of demodulating the vibration displacement electrical signal using the harmonic to obtain the harmonic amplitude.

[0022] Preferably, after generating the first sinusoidal signal having an angular frequency equal to the fundamental wave angular frequency, the method further comprises:

[0023] generating a cosine signal having an angular frequency equal to the fundamental wave angular frequency;

[0024] Generating an excitation signal based on the harmonic fundamental wave amplitude ratio and a reference amplitude value, comprising:

[0025] adjusting the amplitude value of the excitation signal according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value;

[0026] The excitation signal is obtained by multiplying the cosine signal and the amplitude value of the excitation signal.

[0027] Preferably, adjusting the amplitude of the excitation signal according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value comprises:

[0028] The amplitude of the excitation signal is adjusted in a proportional-integral control manner according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value.

[0029] In order to solve the above technical problems, the present invention also provides a control system of a micromechanical gyroscope, comprising:

[0030] An acquisition unit, used for acquiring a vibration displacement electrical signal, wherein the vibration displacement electrical signal is a signal obtained by converting a capacitance change of a gyro detection electrode in a micromechanical gyroscope into an electrical signal by a signal pickup circuit and demodulating the electrical signal through a carrier demodulator;

[0031] A demodulation unit, used to demodulate the vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and to demodulate the vibration displacement electrical signal using a harmonic wave to obtain a harmonic wave amplitude;

[0032] a harmonic-to-fundamental wave amplitude ratio determining unit, configured to take the quotient of the harmonic amplitude divided by the fundamental wave amplitude as the harmonic-to-fundamental wave amplitude ratio;

[0033] The modulation unit is used to generate an excitation signal based on the harmonic fundamental wave amplitude ratio and a reference amplitude value, and output the excitation signal to the excitation electrode of the micromechanical gyroscope so as to adjust the vibration displacement of the micromechanical gyroscope.

[0034] In order to solve the above technical problems, the present invention also provides a control device for a micromechanical gyroscope, comprising:

[0035] Memory for storing computer programs;

[0036] A processor is used to implement the steps of the control method of the micromechanical gyroscope when executing the computer program.

[0037] Preferably, it also includes:

[0038] A signal pickup circuit is used to convert the capacitance change of the gyro detection electrode in the micromechanical gyroscope into an electrical signal;

[0039] The carrier demodulator is used to demodulate the electrical signal and generate a vibration displacement electrical signal.

[0040] In order to solve the above technical problem, the present invention further provides a storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the control method of the micromechanical gyroscope are implemented.

[0041] The present invention provides a control method, system, device and storage medium for a micro-mechanical gyroscope. Firstly, a vibration displacement electric signal is obtained by converting the capacitance change of a gyroscope detection electrode into an electric signal by a signal pickup circuit and demodulating the electric signal through a carrier demodulator. The vibration displacement electric signal is demodulated by using a fundamental wave and a harmonic wave respectively to obtain a fundamental wave amplitude and a harmonic wave amplitude. The quotient of the harmonic wave amplitude divided by the fundamental wave amplitude is used as the harmonic-fundamental wave amplitude ratio, thereby eliminating the influence of the gain of the signal pickup circuit. Further, the method of generating an excitation signal by using the harmonic-fundamental wave amplitude ratio and a reference amplitude value is not affected by the external environment and the circuit structure of the signal pickup circuit, thereby making the control of the vibration displacement of the micro-mechanical gyroscope more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the prior art and the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0043] Figure 1 A flow chart of a control method of a micromechanical gyroscope provided by the present invention;

[0044] Figure 2 A schematic structural diagram of a control system of a micromechanical gyroscope provided by the present invention;

[0045] Figure 3 A schematic structural diagram of another control system of a micromechanical gyroscope provided by the present invention;

[0046] Figure 4 A schematic structural diagram of a control device for a micromechanical gyroscope provided by the present invention. DETAILED DESCRIPTION

[0047] The core of the present invention is to provide a control method, system, device and storage medium for a micromechanical gyroscope, which can be unaffected by the external environment and the circuit structure of the signal pickup circuit when controlling the micromechanical gyroscope, thereby ensuring high stability in controlling the vibration displacement of the micromechanical gyroscope.

[0048] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] At present, when controlling the vibration displacement of a micromechanical gyroscope, the vibration displacement electrical signal output by the signal pickup circuit and the carrier demodulator is directly demodulated to obtain the fundamental amplitude, and then the excitation signal is adjusted by using the difference between the fundamental amplitude and the preset reference amplitude value, and then the vibration displacement of the micromechanical gyroscope is adjusted by the excitation signal. It can be seen that the fundamental amplitude is directly related to the gain of the signal pickup circuit, but the gain of the signal pickup circuit will be affected by the external environment. For example, when the temperature changes, the gain of the signal pickup circuit will also change, which makes the control of the vibration displacement of the micromechanical gyroscope unstable, resulting in the zero bias and scale factor of the micromechanical gyroscope being affected.

[0050] Please refer to Figure 1 , Figure 1 A flow chart of a control method of a micromechanical gyroscope provided by the present invention, the method comprising:

[0051] S1: Acquire a vibration displacement electrical signal, wherein the vibration displacement electrical signal is a signal obtained by converting the capacitance change of the gyro detection electrode in the micromechanical gyroscope into an electrical signal by a signal pickup circuit and demodulating the electrical signal through a carrier demodulator;

[0052] In order to control the vibration displacement of the micromechanical gyroscope, it is first necessary to obtain a vibration displacement electrical signal that can reflect the vibration displacement of the micromechanical gyroscope. Since the gyro detection electrodes of the micromechanical gyroscope usually adopt the method of plate electrode capacitance, the capacitance change between the gyro detection electrodes in the micromechanical gyroscope can be converted into an electrical signal through a signal pickup circuit. In addition, since the high-frequency carrier generator generates a high-frequency carrier to be loaded on the mass block of the micromechanical gyroscope to modulate the capacitance change of the gyro detection electrodes of the micromechanical gyroscope, it is also necessary to use a carrier demodulator to demodulate the electrical signal modulated by the high-frequency carrier to generate the final vibration displacement electrical signal.

[0053] S2: demodulating the vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude, and demodulating the vibration displacement electrical signal using the harmonic wave to obtain the harmonic wave amplitude;

[0054] S3: The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio;

[0055] In the closed-loop detection of the micromechanical gyroscope force balance, the zero bias and scale factor of the micromechanical gyroscope are closely related to the vibration displacement. The zero bias can be expressed as The scaling factor can be expressed as Among them, τ represents the decay time constant, m represents the effective mass of the oscillator, and θ τ is the damping axis deflection angle, ω x is the resonant frequency, ||x|| is the amplitude of the vibration displacement, is the driving mode phase shift, K VF is the conversion factor from voltage to driving force, A g is the angular gain.

[0056] It can be seen that both the zero bias and the scale factor are related to ||x||, which is usually controlled at a fixed value. However, since the gain of the signal pickup circuit is affected by environmental changes, ||x|| may change slightly. For micromechanical gyroscopes, this slight change will significantly affect the long-term stability of the zero bias and scale factor.

[0057] In order to solve the problem in the prior art that when the excitation signal is adjusted directly based on the difference between the fundamental wave amplitude and the reference amplitude value, the fundamental wave amplitude will be affected by the gain of the signal pickup circuit, resulting in inaccurate adjustment of the excitation signal and the inability to keep the vibration displacement of the micromechanical gyroscope stable, the quotient of the harmonic amplitude divided by the fundamental wave amplitude is used as the adjustment basis in the present application, thereby eliminating the influence of the gain of the signal pickup circuit and keeping the control of the vibration displacement of the micromechanical gyroscope accurate.

[0058] Specifically, in the present application, the vibration displacement electrical signal is first demodulated using the fundamental wave to obtain the fundamental wave amplitude, wherein the fundamental wave can be a sinusoidal signal with an external angular velocity of the vibration angular frequency of the micromechanical gyroscope; and then the vibration displacement electrical signal is demodulated using the harmonic wave to obtain the harmonic amplitude, wherein the harmonic wave can be a sinusoidal signal with an external angular velocity of the vibration angular frequency of the micromechanical gyroscope, where N is a positive integer not less than 2. It should also be noted that the present application does not specifically limit the specific value of N, and the quotient of the Nth harmonic amplitude divided by the fundamental wave amplitude can be selected as the harmonic fundamental wave amplitude ratio according to the actual application.

[0059] The fundamental amplitude is related to the gain of the signal pickup circuit, and the harmonic amplitude is also related to the gain of the signal pickup circuit. The gain of the signal pickup circuit is eliminated by dividing the fundamental amplitude by the harmonic amplitude to obtain the harmonic-primary ratio (HPR) that is not affected by the gain of the signal pickup circuit. The harmonic-primary ratio can characterize the true vibration amplitude of the micromechanical gyroscope. Therefore, when the vibration displacement of the micromechanical gyroscope is controlled by the harmonic-primary ratio, it will not be affected by factors such as the temperature of the external environment.

[0060] For example, in this application, the quotient of the second harmonic divided by the fundamental wave is used as the harmonic-to-fundamental wave amplitude ratio, the second harmonic amplitude is A2, the fundamental wave amplitude is A1, and the harmonic-to-fundamental wave amplitude ratio is Among them, p1 is the amplitude of the fundamental wave, p2 is the amplitude of the second harmonic, K CV is the gain of the signal pickup circuit, x r is the ratio of the vibration amplitude to the gap between the gyro detection electrodes. It can be seen that the relationship between the harmonic fundamental amplitude ratio and the actual vibration displacement is:

[0061] S4: generating an excitation signal based on the harmonic fundamental wave amplitude ratio and the reference amplitude value, and outputting the excitation signal to the excitation electrode of the micromechanical gyroscope to adjust the vibration displacement of the micromechanical gyroscope.

[0062] Finally, an excitation signal is generated based on the harmonic fundamental amplitude ratio and the reference amplitude value, wherein the reference amplitude value is preset, and the specific value of the reference amplitude value is not particularly limited in this application, and can be set according to the actual application scenario. In addition, the intensity of the generated excitation signal can be adjusted in a proportional integral manner by the difference between the harmonic fundamental amplitude ratio and the reference amplitude value, and this is also not particularly limited in this application.

[0063] After determining the excitation signal, the excitation signal is output to the excitation electrode of the micromechanical gyroscope. The vibration displacement of the micromechanical gyroscope is affected by the excitation signal, and the vibration displacement of the micromechanical gyroscope is then reflected by the capacitance change of the gyroscope detection electrode. The above process is repeated to achieve the stability of the vibration displacement control of the micromechanical gyroscope.

[0064] In summary, the present invention provides a control method for a micromechanical gyroscope. First, a vibration displacement electrical signal is obtained by converting the capacitance change of a gyroscope detection electrode into an electrical signal by a signal pickup circuit and demodulating the electrical signal through a carrier demodulator. The vibration displacement electrical signal is demodulated using a fundamental wave and a harmonic wave respectively to obtain a fundamental wave amplitude and a harmonic wave amplitude. The quotient of the harmonic amplitude divided by the fundamental wave amplitude is used as the harmonic-to-fundamental wave amplitude ratio, thereby eliminating the influence of the gain of the signal pickup circuit. Further, the method of generating an excitation signal using the harmonic-to-fundamental wave amplitude ratio and a reference amplitude value is not affected by the external environment and the circuit structure of the signal pickup circuit, thereby making the control of the vibration displacement of the micromechanical gyroscope more precise.

[0065] The present application constructs a closed-loop control of the vibration displacement of the micromechanical gyroscope based on the harmonic fundamental wave amplitude ratio, which can effectively ensure the stability of the vibration displacement control and further reduce the temperature sensitivity of the zero bias and scale factor of the micromechanical gyroscope.

[0066] Based on the above embodiments:

[0067] As a preferred embodiment, when the gyro detection electrode of the micromechanical gyroscope is a unilateral detection electrode, the harmonic amplitude obtained by demodulating the vibration displacement electrical signal using harmonics includes:

[0068] The vibration displacement electrical signal is demodulated using the second harmonic to obtain the second harmonic amplitude;

[0069] The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, including:

[0070] The quotient of the second harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio.

[0071] The gyro detection electrode of the micro-mechanical gyroscope is divided into a unilateral detection electrode and a differential detection electrode. The gyro detection electrode includes a positive electrode and a negative electrode. The so-called unilateral detection electrode means that when the micro-mechanical gyroscope vibrates, only the capacitance on one of the positive electrode or the negative electrode will change. Therefore, in this embodiment, when the gyro detection electrode is a unilateral detection electrode, the vibration displacement electrical signal is demodulated using the second harmonic to obtain the second harmonic amplitude.

[0072] It should be noted that, in fact, when the gyroscope detection electrode is a unilateral detection electrode, the quotient of any other harmonic amplitude except the fundamental amplitude and the fundamental amplitude can be selected as the harmonic-to-fundamental amplitude ratio. However, selecting the quotient of the second harmonic amplitude divided by the fundamental amplitude as the harmonic-to-fundamental amplitude ratio can most realistically and accurately characterize the vibration displacement of the micromechanical gyroscope, thereby further ensuring the high stability of the vibration displacement control of the micromechanical gyroscope.

[0073] As a preferred embodiment, when the gyro detection electrode of the micromechanical gyroscope is a differential detection electrode, the harmonic amplitude obtained by demodulating the vibration displacement electrical signal using harmonics includes:

[0074] The vibration displacement electrical signal is demodulated using the third harmonic to obtain the third harmonic amplitude;

[0075] The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, including:

[0076] The quotient of the third harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio.

[0077] The gyro detection electrode of the micromechanical gyroscope is divided into a unilateral detection electrode and a differential detection electrode. The gyro detection electrode includes a positive electrode and a negative electrode. The so-called differential detection electrode means that the capacitance on the positive electrode and the negative electrode will change when the micromechanical gyroscope vibrates. In addition, when the gyro detection electrode is a differential detection electrode, the even harmonics will be offset, and the amplitude of the odd harmonics will be doubled. Therefore, it is necessary to use the quotient of the amplitude of the odd harmonics divided by the amplitude of the fundamental wave as the harmonic fundamental wave amplitude ratio. Therefore, in this embodiment, the third harmonic is selected to demodulate the vibration displacement electrical signal to obtain the third harmonic amplitude.

[0078] In fact, when the gyro detection electrode is a differential detection electrode, the quotient between the harmonic amplitude of other harmonics except the even harmonics and the fundamental wave and the fundamental wave amplitude can be selected as the harmonic fundamental wave amplitude ratio, but selecting the quotient of the third harmonic amplitude divided by the fundamental wave amplitude as the harmonic fundamental wave amplitude ratio can most truly and accurately characterize the vibration displacement of the micromechanical gyroscope, thereby further ensuring the high stability of the vibration displacement control of the micromechanical gyroscope. As a preferred embodiment, before using the fundamental wave to demodulate the vibration displacement electrical signal to obtain the fundamental wave amplitude and using the harmonic wave to demodulate the vibration displacement electrical signal to obtain the harmonic amplitude, it also includes:

[0079] The vibration displacement electric signal is demodulated by using a cosine signal whose angular frequency is the vibration angular frequency of the micromechanical gyroscope to obtain a fundamental wave phase;

[0080] The fundamental wave angular frequency and the harmonic angular frequency are obtained based on the fundamental wave phase;

[0081] Generate a first sinusoidal signal whose angular frequency is the fundamental wave angular frequency, use the first sinusoidal signal as the fundamental wave, and enter the step of demodulating the vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude;

[0082] A second sinusoidal signal having an angular frequency that is a harmonic angular frequency is generated, the second sinusoidal signal is used as a harmonic, and the step of demodulating the vibration displacement electrical signal using the harmonic to obtain the harmonic amplitude is entered.

[0083] In this embodiment, in addition to using the fundamental wave and the harmonic wave to demodulate the vibration displacement electrical signal to obtain the fundamental wave amplitude and the harmonic wave amplitude respectively, the fundamental wave and the harmonic wave are generated in advance, which further improves the automation and integrity of the control of the micromechanical gyroscope in this application.

[0084] Specifically, the vibration displacement electrical signal is first demodulated using a cosine signal whose angular frequency is the vibration angular frequency of the micromechanical gyroscope and a fundamental wave phase is obtained. Then, the fundamental wave angular frequency and the harmonic angular frequency are obtained through the fundamental wave phase, wherein the fundamental wave angular frequency is the angular frequency corresponding to the fundamental wave, that is, the vibration angular frequency, and the harmonic angular frequency is N times the fundamental wave angular frequency, where N is a positive integer not less than 2. The first sinusoidal signal whose angular frequency is the fundamental wave angular frequency is used as the fundamental wave, and the second sinusoidal signal whose angular frequency is the harmonic angular frequency is used as the harmonic, so as to control the vibration displacement of the micromechanical gyroscope using the fundamental wave and the harmonic.

[0085] As a preferred embodiment, after generating the first sinusoidal signal with an angular frequency equal to the fundamental angular frequency, the method further comprises:

[0086] generating a cosine signal having an angular frequency equal to the fundamental wave angular frequency;

[0087] Generate an excitation signal based on the harmonic fundamental amplitude ratio and a reference amplitude value, including:

[0088] Adjusting the amplitude value of the excitation signal according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value;

[0089] The excitation signal is obtained by multiplying the cosine signal and the amplitude value of the excitation signal.

[0090] In this embodiment, considering that a cosine signal having an angular frequency equal to the vibration angular frequency is needed when generating an excitation signal based on the harmonic fundamental wave amplitude ratio and the reference amplitude value, a cosine signal having an angular frequency equal to the fundamental wave angular frequency is generated while generating a first sine signal having an angular frequency equal to the fundamental wave angular frequency. Then, the amplitude value of the excitation signal can be adjusted according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value, and then the cosine signal is multiplied by the amplitude value of the excitation signal to obtain the excitation signal, thereby further improving the automation and integrity of the control of the micromechanical gyroscope in this application.

[0091] As a preferred embodiment, adjusting the amplitude of the excitation signal according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value includes:

[0092] The amplitude of the excitation signal is adjusted in a proportional-integral control manner according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value.

[0093] In this embodiment, when the excitation signal is adjusted according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value, it is adjusted specifically in a proportional integral manner. The use of the proportional integral method to adjust the excitation signal has the advantages of timely adjustment and ultimately eliminating the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value, that is, keeping the vibration displacement of the micromechanical gyroscope stable.

[0094] Please refer to Figure 2 , Figure 2 A schematic diagram of the structure of a control system of a micromechanical gyroscope provided by the present invention, Figure 2 Each unit in the dotted box is a virtual unit integrated in the computer software to realize different functions. Among them, the demodulator is used to obtain the vibration displacement electrical signal and respectively according to the third harmonic (that is, Figure 2 sin(3ω d t),ω d is the vibration displacement angular frequency) and the fundamental wave (that is, Figure 2 sin(ω d t)) demodulates the vibration displacement electrical signal, and finally obtains the third harmonic amplitude A3 and the fundamental amplitude A1 respectively. The HPR calculator is used to calculate the quotient of the third harmonic amplitude divided by the fundamental amplitude (that is, Figure 2 The PI controller is used to obtain the amplitude value A of the excitation signal based on the difference between the HPR3 harmonic ratio and the reference amplitude value. d , then the cosine signal is multiplied by the amplitude value of the excitation signal to obtain the excitation signal, and finally the excitation signal is fed back to the excitation electrode of the micromechanical gyroscope.

[0095] Figure 2 The demodulator in the PLL is used to obtain the vibration displacement electrical signal and demodulate the vibration displacement electrical signal according to the cosine signal whose angular frequency is the vibration angular frequency of the micromechanical gyroscope to obtain the fundamental phase, and then the fundamental angular frequency and the harmonic angular frequency are obtained based on the fundamental phase through the PI controller, and finally the first sinusoidal signal with the angular frequency of the fundamental angular frequency, i.e. the fundamental wave, is generated by the numerically controlled oscillator, and the second sinusoidal signal with the angular frequency of the harmonic angular frequency, i.e. the harmonic, is generated.

[0096] Please refer to Figure 3 , Figure 3 A schematic diagram of the structure of another control system of a micromechanical gyroscope provided by the present invention, the control system comprising:

[0097] An acquisition unit 11 is used to acquire a vibration displacement electrical signal, wherein the vibration displacement electrical signal is a signal obtained by converting a capacitance change of a gyro detection electrode in a micromechanical gyroscope into an electrical signal by a signal pickup circuit and demodulating the electrical signal through a carrier demodulator;

[0098] A demodulation unit 12, used to demodulate the vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude, and to demodulate the vibration displacement electrical signal using the harmonic wave to obtain the harmonic wave amplitude;

[0099] a harmonic-to-fundamental wave amplitude ratio determining unit 13, configured to take the quotient of the harmonic amplitude divided by the fundamental wave amplitude as the harmonic-to-fundamental wave amplitude ratio;

[0100] The modulation unit 14 is used to generate an excitation signal based on the harmonic fundamental wave amplitude ratio and the reference amplitude value, and output the excitation signal to the excitation electrode of the micromechanical gyroscope so as to adjust the vibration displacement of the micromechanical gyroscope.

[0101] For the relevant introduction of the control system of a micromechanical gyroscope provided by the present invention, please refer to the embodiment of the control method of the micromechanical gyroscope mentioned above, and this application will not elaborate on it here.

[0102] Based on the above embodiments:

[0103] As a preferred embodiment, when the gyro detection electrode of the micromechanical gyroscope is a unilateral detection electrode, the demodulation unit 12 is specifically used to demodulate the vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude, and to demodulate the vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude;

[0104] The harmonic-to-fundamental wave amplitude ratio determining unit 13 is specifically configured to take the quotient of the second harmonic amplitude divided by the fundamental wave amplitude as the harmonic-to-fundamental wave amplitude ratio.

[0105] As a preferred embodiment, when the gyro detection electrode of the micromechanical gyroscope is a differential detection electrode, the demodulation unit 12 is specifically used to demodulate the vibration displacement electrical signal using the third harmonic to obtain the third harmonic amplitude;

[0106] The harmonic-to-fundamental wave amplitude ratio determining unit 13 is specifically configured to take the quotient of the third harmonic amplitude divided by the fundamental wave amplitude as the harmonic-to-fundamental wave amplitude ratio.

[0107] As a preferred embodiment, it also includes:

[0108] A fundamental wave phase determination unit is used to demodulate the vibration displacement electrical signal using a cosine signal having an angular frequency equal to the vibration angular frequency of the micromechanical gyroscope and obtain a fundamental wave phase before demodulating the vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude and demodulating the vibration displacement electrical signal using a harmonic to obtain a harmonic amplitude;

[0109] A fundamental wave and harmonic angular frequency determination unit, used for obtaining the fundamental wave angular frequency and the harmonic angular frequency based on the fundamental wave phase;

[0110] A fundamental wave generating unit, used for generating a first sinusoidal signal having an angular frequency equal to the fundamental wave angular frequency, taking the first sinusoidal signal as the fundamental wave, and triggering the demodulation unit 12;

[0111] The harmonic generation unit is used to generate a second sinusoidal signal with an angular frequency being a harmonic angular frequency, use the second sinusoidal signal as a harmonic, and trigger the demodulation unit 12.

[0112] As a preferred embodiment, it also includes:

[0113] A cosine signal generating unit, configured to generate a cosine signal having an angular frequency equal to the fundamental wave angular frequency after generating a first sine signal having an angular frequency equal to the fundamental wave angular frequency;

[0114] The modulation unit 14 comprises:

[0115] An amplitude value adjustment unit, used for adjusting the amplitude value of the excitation signal according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value;

[0116] An excitation signal determination unit, used for multiplying the cosine signal and the amplitude value of the excitation signal to obtain the excitation signal;

[0117] The excitation signal output unit is used to output the excitation signal to the excitation electrode of the micromechanical gyroscope.

[0118] As a preferred embodiment, the amplitude value adjustment unit is specifically used to adjust the amplitude of the excitation signal in a proportional-integral control manner according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value.

[0119] Please refer to Figure 4 , Figure 4 A schematic structural diagram of a control device for a micromechanical gyroscope provided by the present invention, the control device comprising:

[0120] A memory 21, used for storing computer programs;

[0121] The processor 22 is used to implement the steps of the control method of the micromechanical gyroscope when executing the computer program.

[0122] For the relevant introduction of the control device of a micromechanical gyroscope provided by the present invention, please refer to the embodiment of the control method of the micromechanical gyroscope mentioned above, and this application will not elaborate on it here.

[0123] Based on the above embodiments:

[0124] As a preferred embodiment, it also includes:

[0125] A signal pickup circuit is used to convert the capacitance change of the gyro detection electrode in the micromechanical gyroscope into an electrical signal;

[0126] The carrier demodulator is used to demodulate the electrical signal and generate a vibration displacement electrical signal.

[0127] In this embodiment, the control device of the micromechanical gyroscope also includes a signal pickup circuit and a carrier demodulator. Since the gyro detection electrodes of the micromechanical gyroscope usually adopt the method of plate electrode capacitance, the capacitance change between the gyro detection electrodes in the micromechanical gyroscope can be converted into an electrical signal by the signal pickup circuit. In addition, since the high-frequency carrier generator generates a high-frequency carrier to be loaded on the mass block of the micromechanical gyroscope to modulate the capacitance change of the gyro detection electrodes of the micromechanical gyroscope, it is also necessary to use a carrier demodulator to demodulate the electrical signal modulated by the high-frequency carrier to generate the final vibration displacement electrical signal.

[0128] The present invention also provides a storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the control method of the micromechanical gyroscope are implemented.

[0129] For the relevant introduction of a storage medium provided by the present application, please refer to the embodiment of the control method of the above-mentioned micromechanical gyroscope, and the present application will not elaborate on it here.

[0130] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0131] It should also be noted that the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0132] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A control method for a micromechanical gyroscope, characterized in that: include: Acquire a vibration displacement electrical signal, wherein the vibration displacement electrical signal is a signal obtained by converting a capacitance change of a gyro detection electrode in a micromechanical gyroscope into an electrical signal by a signal pickup circuit and demodulating the electrical signal through a carrier demodulator; Demodulating the vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and demodulating the vibration displacement electrical signal using a harmonic wave to obtain a harmonic wave amplitude; The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio; generating an excitation signal based on the harmonic fundamental wave amplitude ratio and a reference amplitude value, and outputting the excitation signal to an excitation electrode of the micromechanical gyroscope so as to adjust the vibration displacement of the micromechanical gyroscope; The fundamental wave amplitude is related to the gain of the signal pickup circuit, and the harmonic amplitude is also related to the gain of the signal pickup circuit. By dividing the fundamental wave amplitude by the harmonic amplitude, a harmonic-to-fundamental wave amplitude ratio that is not affected by the gain of the signal pickup circuit is obtained; the harmonic-to-fundamental wave amplitude ratio can represent the real vibration amplitude of the micromechanical gyroscope; The relationship between the harmonic fundamental amplitude ratio and the actual vibration displacement is: Wherein, HPR2 is harmonic fundamental amplitude ratio; When the gyro detection electrode of the micromechanical gyroscope is a unilateral detection electrode, the harmonic amplitude is obtained by demodulating the vibration displacement electrical signal using harmonics, including: Demodulating the vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude; The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, comprising: The quotient of the second harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio; Alternatively, when the gyro detection electrode of the micromechanical gyroscope is a differential detection electrode, the harmonic amplitude is obtained by demodulating the vibration displacement electrical signal using harmonics, including: Demodulating the vibration displacement electrical signal using the third harmonic to obtain the third harmonic amplitude; The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, comprising: The quotient of the third harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio; Before demodulating the vibration displacement electrical signal by using the fundamental wave to obtain the fundamental wave amplitude and demodulating the vibration displacement electrical signal by using the harmonic wave to obtain the harmonic wave amplitude, the method further includes: Demodulating the vibration displacement electrical signal using a cosine signal having an angular frequency equal to the vibration angular frequency of the micromechanical gyroscope to obtain a fundamental wave phase; Obtaining a fundamental wave angular frequency and a harmonic angular frequency based on the fundamental wave phase; Generate a first sinusoidal signal whose angular frequency is the fundamental wave angular frequency, use the first sinusoidal signal as the fundamental wave, and enter the step of demodulating the vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude; Generate a second sinusoidal signal with an angular frequency equal to the harmonic angular frequency, use the second sinusoidal signal as the harmonic, and enter the step of demodulating the vibration displacement electrical signal using the harmonic to obtain the harmonic amplitude.

2. The control method of the micromechanical gyroscope according to claim 1, characterized in that: After generating a first sinusoidal signal having an angular frequency of the fundamental wave angular frequency, the method further comprises: generating a cosine signal having an angular frequency equal to the fundamental wave angular frequency; Generating an excitation signal based on the harmonic fundamental wave amplitude ratio and a reference amplitude value, comprising: adjusting the amplitude value of the excitation signal according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value; The excitation signal is obtained by multiplying the cosine signal and the amplitude value of the excitation signal.

3. The control method of the micromechanical gyroscope according to claim 2, characterized in that: Adjusting the amplitude of the excitation signal according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value comprises: The amplitude of the excitation signal is adjusted in a proportional-integral control manner according to the difference between the harmonic fundamental wave amplitude ratio and the reference amplitude value.

4. A control system for a micromechanical gyroscope, characterized in that: include: An acquisition unit, used for acquiring a vibration displacement electrical signal, wherein the vibration displacement electrical signal is a signal obtained by converting a capacitance change of a gyro detection electrode in a micromechanical gyroscope into an electrical signal by a signal pickup circuit and demodulating the electrical signal through a carrier demodulator; A demodulation unit, used to demodulate the vibration displacement electrical signal using a fundamental wave to obtain a fundamental wave amplitude, and to demodulate the vibration displacement electrical signal using a harmonic wave to obtain a harmonic wave amplitude; a harmonic-to-fundamental wave amplitude ratio determining unit, configured to take the quotient of the harmonic amplitude divided by the fundamental wave amplitude as the harmonic-to-fundamental wave amplitude ratio; A modulation unit, configured to generate an excitation signal based on the harmonic fundamental wave amplitude ratio and a reference amplitude value, and output the excitation signal to an excitation electrode of the micromechanical gyroscope so as to adjust the vibration displacement of the micromechanical gyroscope; The fundamental wave amplitude is related to the gain of the signal pickup circuit, and the harmonic amplitude is also related to the gain of the signal pickup circuit. By dividing the fundamental wave amplitude by the harmonic amplitude, a harmonic-to-fundamental wave amplitude ratio that is not affected by the gain of the signal pickup circuit is obtained; the harmonic-to-fundamental wave amplitude ratio can represent the real vibration amplitude of the micromechanical gyroscope; The relationship between the harmonic fundamental amplitude ratio and the actual vibration displacement is: Wherein, HPR2 is harmonic fundamental amplitude ratio; When the gyro detection electrode of the micromechanical gyroscope is a unilateral detection electrode, the harmonic amplitude is obtained by demodulating the vibration displacement electrical signal using harmonics, including: Demodulating the vibration displacement electrical signal using the second harmonic to obtain the second harmonic amplitude; The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, comprising: The quotient of the second harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio; Alternatively, when the gyro detection electrode of the micromechanical gyroscope is a differential detection electrode, the harmonic amplitude is obtained by demodulating the vibration displacement electrical signal using harmonics, including: Demodulating the vibration displacement electrical signal using the third harmonic to obtain the third harmonic amplitude; The quotient of the harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio, comprising: The quotient of the third harmonic amplitude divided by the fundamental amplitude is taken as the harmonic-to-fundamental amplitude ratio; Before demodulating the vibration displacement electrical signal by using the fundamental wave to obtain the fundamental wave amplitude and demodulating the vibration displacement electrical signal by using the harmonic wave to obtain the harmonic wave amplitude, the method further includes: Demodulating the vibration displacement electrical signal using a cosine signal having an angular frequency equal to the vibration angular frequency of the micromechanical gyroscope to obtain a fundamental wave phase; Obtaining a fundamental wave angular frequency and a harmonic angular frequency based on the fundamental wave phase; Generate a first sinusoidal signal whose angular frequency is the fundamental wave angular frequency, use the first sinusoidal signal as the fundamental wave, and enter the step of demodulating the vibration displacement electrical signal using the fundamental wave to obtain the fundamental wave amplitude; Generate a second sinusoidal signal with an angular frequency equal to the harmonic angular frequency, use the second sinusoidal signal as the harmonic, and enter the step of demodulating the vibration displacement electrical signal using the harmonic to obtain the harmonic amplitude.

5. A control device for a micromechanical gyroscope, characterized in that: include: Memory for storing computer programs; A processor, configured to implement the steps of the method for controlling a micromechanical gyroscope as claimed in any one of claims 1 to 3 when executing the computer program.

6. The control device for a micromechanical gyroscope according to claim 5, characterized in that: Also includes: A signal pickup circuit is used to convert the capacitance change of the gyro detection electrode in the micromechanical gyroscope into an electrical signal; The carrier demodulator is used to demodulate the electrical signal and generate a vibration displacement electrical signal.

7. A storage medium, characterized in that: The storage medium stores a computer program, which, when executed by a processor, implements the steps of the method for controlling a micromechanical gyroscope according to any one of claims 1 to 3.

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