A cleaning and drying device for residual fluorine oil on the surface of integrated circuit

Abstract

The present invention provides a cleaning and drying device for residual fluorine oil on the surface of an integrated circuit, comprising a box (1), characterized in that: a group of fans (3) are installed on a box cover (1a), a duct (2) is provided in the box (1), a clamping device (5) corresponding to a cleaning tray (4) is provided below the duct (2), a cleaning tank (6) is provided in the box (1) below the clamping device (5), a lifting platform (7) corresponding to the cleaning tray (4) is provided in the cleaning tank (6), an air duct device (8) corresponding to the cleaning tray (4) is provided on the cleaning tank (6), and an exhaust fan (8) is provided on the box (1) on one side of the cleaning tank (6). During the entire cleaning process of the present invention, the solvent and the operator can be isolated while ensuring the cleaning effect, and the air drying method is adopted to replace the high-temperature drying method, thereby avoiding safety hazards.

Description

Technical Field

[0001] The invention relates to the field of cleaning equipment, in particular to a cleaning and drying device for residual fluorine oil on the surface of an integrated circuit. Background Art

[0002] With the increasing demand for leak detection tests, the conventional manual cleaning method of fluorine oil on the circuit surface has shown the disadvantages of low cleaning efficiency and poor cleaning effect, and there are safety hazards. Now the cleaning method is improved and a semi-sealed one-way air supply cleaning device is designed. The cleaning process mainly includes immersion cleaning → air drying.

[0003] Since the solution used in the rough leak test is a perfluorinated solution, which is not volatile, a large amount of it will remain on the surface of the inspected circuit after the test. In order not to affect other subsequent inspection matters, the roughly inspected circuit needs to be cleaned.

[0004] The most commonly used solvent for cleaning fluorine oil is a volatile, flammable, fat-soluble solvent - anhydrous ethanol. The conventional cleaning method is to first immerse the circuit in a container containing anhydrous ethanol, let it stand for a while, wait for the fluorine oil to fully dissolve and diffuse into the anhydrous ethanol, and then take out the circuit; the second step is to place the circuit under a blower, which blows out high-temperature air to dry the surface of the circuit. Summary of the invention

[0005] The present invention aims to overcome the deficiencies in the prior art and provides a cleaning and drying device for residual fluorine oil on the surface of an integrated circuit.

[0006] This application provides the following technical solutions:

[0007] A cleaning and drying device for residual fluorine oil on the surface of an integrated circuit, comprising a box body, characterized in that: a group of fans are installed on the box cover, a duct is provided in the box body, a clamping device corresponding to a cleaning tray is provided below the duct, a cleaning tank is provided in the box body below the clamping device, a lifting platform corresponding to the cleaning tray is provided in the cleaning tank, an air duct device corresponding to the cleaning tray is also provided on the cleaning tank, and an exhaust fan is provided on the box body on one side of the cleaning tank;

[0008] The air duct device comprises a group of air guide plates, a group of air ducts are arranged on the air guide plates, a group of protruding cavities connected in sequence are arranged on the air ducts, and an air guide block is arranged in each protruding cavity. A group of connecting columns are also penetrated on the group of air guide plates, and guard plates corresponding to the air guide plates are connected at both ends of the connecting columns. Guide rods are penetrated on the guard plates, and both ends of the guide rods are connected to the box wall. A lifting device connected to the guard plates is arranged on the box wall.

[0009] The group of protruding cavities are distributed at intervals on the left and right sides of the air duct; the air guide block is in the shape of a water guide drop with a round top and a pointed bottom.

[0010] On the basis of the above technical solutions, there are also the following further technical solutions:

[0011] A group of air inlet holes communicated with the duct are arranged on the box cover.

[0012] An exhaust passage is connected to one end of the exhaust fan.

[0013] Two lifting devices with opposite output directions are connected to each guard plate.

[0014] Advantages of the invention:

[0015] During the entire cleaning process of the present invention, the cleaning effect can be ensured while the solvent and the operator can be isolated. The air drying method is used instead of the high-temperature drying method, thereby effectively avoiding potential safety hazards. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of the present invention;

[0017] Figure 2 yes Figure 1 Schematic diagram after removing the fan;

[0018] Figure 3 yes Figure 2 Schematic diagram after removing the box cover;

[0019] Figure 4 yes Figure 3 Schematic diagram after removing the duct;

[0020] Figure 5 yes Figure 4 A schematic diagram of the structure of the mid-air duct device;

[0021] Figure 6 It is a schematic diagram of the structure of the air guide block constituting the air duct device;

[0022] Figure 7 It is a schematic diagram of the structure of the cleaning tank, the lifting platform and the cleaning tray;

[0023] Figure 8 It is a schematic diagram of the lifting platform when it is raised and lowered;

[0024] Fig. 9 is a schematic diagram of the installation position of the card connection device;

[0025] Fig.10 This is a schematic diagram of the installation position of the exhaust fan;

[0026] Fig.11 This is a schematic diagram of the cleaning tank, lifting platform and air duct device installed in the bottom box. DETAILED DESCRIPTION

[0027] like Figure 1-11 As shown, a cleaning and drying device for residual fluorine oil on the surface of an integrated circuit comprises a housing 1,

[0028] The box body 1 comprises a bottom box body 1b, on which a second box body 1c is stacked, sealing gaskets (not shown) are installed on the corresponding stoppers of the bottom box body 1b and the second box body 1c, and a box cover 1a is hinged on the second box body 1c.

[0029] A set of fans 3 are installed on the box cover 1a, a set of air inlet holes 1d are provided on the box cover 1a below the fans 3, and a duct 2 is installed in the second layer box body 1c below the air inlet holes 1d. A clamping device 5 is installed on both sides of the air outlet at the lower end of the duct 2. The clamping device 5 includes a housing 5a, a cylinder is installed in the housing 5a, and a locking tongue 5b with one end extending out of the housing 5a is installed at the end of the output shaft of the cylinder. The locking tongue 5b corresponds to the handle 4a of the cleaning tray 4 mentioned below.

[0030] A cleaning tank 6 is installed at the bottom of the bottom box 1b, in which anhydrous ethanol is stored, and a lifting platform 7 is installed at the bottom of the cleaning tank 6 below the liquid level of the anhydrous ethanol. The lifting platform 7 is a multi-stage lifting cylinder in the prior art, and its structure is the prior art so it is not described here. A leakproof sealing ring corresponding to the adjacent level is installed on each level of the lifting platform.

[0031] An exhaust fan 9 is installed on the bottom box 1b on one side of the cleaning tank 6, and one end of the exhaust fan is connected to an exhaust passage not shown in the figure. A movable air duct device 8 is installed in the box above the cleaning tank 6.

[0032] The air duct device 8 includes a group of air guide plates 8a, a group of sunken air ducts 8b are arranged on the air guide plates 8a, and a group of protruding cavities 8c are arranged on each air duct 8b, which are sequentially connected to the sunken air guide plates 8a. The group of protruding cavities 8c are distributed on the left and right sides of the air duct 8b in an interval distribution. The upper end of the protruding cavity 8c is arc-shaped, and the lower end gradually narrows. There is an air guide block 8d distributed in each protruding cavity 8c. The upper surface of the air guide block 8d is flush with the surface of the air guide plate 8a, and the air guide block 8d is a water drop shape with a round upper part and a pointed lower part. Through the arrangement of the air guide block and the protruding cavity, the wind enters the air duct from the air inlet above the air guide plate, and smoothly flows out of the air duct from the air outlet below the air guide plate. However, due to the arc-shaped upper end of the protruding cavity and the teardrop-shaped wind guide block, most of the wind flowing in from the air outlet below the wind plate will turn and flow downward under the guidance of these two, so that only a small amount of wind can overflow from the air inlet above the wind guide plate, which can be ignored.

[0033] A connecting column (not shown) is respectively inserted into the mounting holes 8t at the four corners of the set of air guide plates 8a, and the two ends of the connecting column are connected to the guard plates 8g corresponding to the air guide plates 8a. Thus, the set of air guide plates are connected together to form a rectangular structure. A guide rod 8h distributed along the wide section direction of the box body 1 is also inserted into the thickness end surface of the guard plate 8g, and the two ends of the guide rod 8h are connected and fixed to the box wall.

[0034] Two connecting holes 8k parallel to the guide rod 8h are provided on the guard plate 8g below the guide rod 8h, and the opening ends of the two connecting holes 8k are distributed on the left and right sides of the guard plate 8g. A jacking device 8e (cylinder or oil cylinder) is connected to the corresponding box wall of each connecting hole 8k, and the output end of the jacking device 8e is connected to one end of the connecting hole 8k through a connecting plate, and the output directions of the two jacking devices 8e are opposite.

[0035] Through the output of the lifting device 8e, a group of air guide plates are formed into a rectangular structure and can move along the guide rod. The diameter of the connecting hole 8k is larger than the diameter of the cylinder of the lifting device 8e, so that the cylinder of the lifting device 8e can be retracted into the connecting hole 8k. Since the opening ends of the connecting hole 8k are distributed on the left and right sides of the guard plate 8g, the output directions of the two lifting devices 8e connected to each guard plate 8g are opposite.

[0036] Working process:

[0037] Open the box cover and place the cleaning tray 4 carrying the integrated circuit to be cleaned on the upper surface of the rectangular structure formed by a group of air guide plates, which is located directly below the duct outlet, and then close the box cover. Start the clamping device 5, so that the lock tongue extends out and inserts under the handle of the cleaning tray 4, and then the lifting device starts to drive the rectangular structure to move so as to leak out of the cleaning tank 6, and then the lifting platform 7 rises until the highest level supports the cleaning tray 4, and then the clamping device 5 is started to retract the lock tongue 5b, and then the lifting platform 7 descends to immerse the cleaning tray 4 under the liquid surface of anhydrous ethanol and let it stand for 15s. The lifting platform 7 rises to the highest point again, and the clamping device 5 controls the lock tongue 5b to insert under the handle of the cleaning tray 4, and then the lifting platform retracts, and at the same time, the lifting device drives a group of air guide plates to form a rectangular structure and move it below the cleaning tray 4, and then the lock tongue 5b retracts, and the fan 3 is started to blow air for 15s to air dry the integrated circuit in the cleaning tray 4, and then the fan 3 is stopped, and finally the box cover 1a is opened to take out the integrated circuit. The exhaust fan 9 is always in operation during the whole cleaning process.

Claims

1. A cleaning and drying device for residual fluorine oil on the surface of an integrated circuit, comprising a housing (1), characterized in that: A group of fans (3) is installed on the box cover (1a), a duct (2) is provided in the box body (1), a clamping device (5) corresponding to the cleaning tray (4) is provided below the duct (2), a cleaning tank (6) is provided in the box body (1) below the clamping device (5), a distribution lifting platform (7) corresponding to the cleaning tray (4) is provided in the cleaning tank (6), an air duct device (8) corresponding to the cleaning tray (4) is also provided on the cleaning tank (6), and an exhaust fan (9) is provided on the box body (1) on one side of the cleaning tank (6); The air duct device (8) comprises a group of air guide plates (8a), a group of air ducts (8b) are arranged on the air guide plates (8a), a group of protruding cavities (8c) connected in sequence are arranged on the air ducts (8b), and an air guide block (8d) is arranged in each protruding cavity (8c). The group of air guide plates (8a) are also provided with a group of connecting columns, and guard plates (8g) corresponding to the air guide plates (8a) are connected at both ends of the connecting columns. A guide rod (8h) is provided on the guard plate (8g), and both ends of the guide rod (8h) are connected to the box wall. A lifting device (8e) connected to the guard plate (8g) is provided on the box wall. The group of protruding cavities (8c) are distributed at intervals on the left and right sides of the air duct (8b); and the air guide block (8d) is in the shape of a water guide droplet with a round top and a pointed bottom.

2. The cleaning and drying device for residual fluorine oil on the surface of an integrated circuit according to claim 1, characterized in that: A group of air inlet holes (1d) connected to the duct (2) are provided on the box cover (1a).

3. The cleaning and drying device for residual fluorine oil on the surface of an integrated circuit according to claim 1, characterized in that: An exhaust passage is connected to one end of the exhaust fan (9).

4. The cleaning and drying device for residual fluorine oil on the surface of an integrated circuit according to claim 1, characterized in that: Two lifting devices (8e) with opposite output directions are connected to each of the guard plates (8g).

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