A feeding mechanism for preheating a semiconductor substrate on a production line and the production line

Abstract

The present invention relates to the technical field of semiconductor manufacturing equipment, and specifically discloses a feeding mechanism for preheating semiconductor substrates on a production line, which includes at least two groups of conveyor belts, a conveyor belt support frame, a conveyor belt rotating device, a conveyor belt driving device, a substrate positioning device, and a substrate pushing device. The two ends of the two groups of conveyor belts are respectively rotatably connected to both sides of the conveyor belt support frame, the middle part of the conveyor belt support frame is connected to the rotating end of the conveyor belt rotating device, the conveyor belt driving device is drivingly connected to the conveyor belt, the substrate positioning device is arranged inside the conveyor belt, and the substrate pushing device is arranged on one side of the conveyor belt support frame. It can achieve automatic symmetric and efficient feeding of double substrates and adapt to automated operations in a dust-free workshop.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing equipment, and particularly to a semiconductor substrate preheating production line loading mechanism and a production line. Background Art

[0002] In the manufacture of semiconductor dust-free packaging, before resin sealing using a resin sealing unit with a molding die, by preheating a substrate (also referred to as a base material or a lead frame) carrying semiconductor elements, deformation of the base material caused by heat can be suppressed when the base material is placed on the high-temperature die of the resin sealing unit. If the deformation of the substrate is small, since the transportation and transfer can be smoothly carried out between each step of the substrate, the damage to the semiconductor elements and wires adhered to the base material can also be suppressed to a small extent, and the yield of the packaged chips can be improved. Therefore, in the manufacture of semiconductor packaging, preheating the substrate with semiconductor elements before resin sealing has obvious effects. By preheating the substrate with a preheating device for a short time, damage to the substrate during encapsulation in the high-temperature die can be suppressed. The loading efficiency of the preheating device directly affects the preheating effect of the substrate, and during mass production, it affects the packaging efficiency of the chips.

[0003] Patent Document (Chinese Patent Publication No. CN204102863U) discloses a fully automatic encapsulation system for lead frames. Its specification specifically discloses a strip preheating unit and the feeding and discharging methods of the strip preheating unit. As described in the specification, during operation, first, the lead frame is placed in a cartridge. After starting production, the push rod device in the feeding unit pushes the cartridge into the lead frame alignment unit and clamps the cartridge. The push rod behind the lead frame alignment unit pushes out the lead frame, and the strip traction unit sends the lead frame into the strip preheating unit. At the same time, the resin vibration unit sends the resins into the resin alignment unit one by one, and then the manipulator in the resin alignment unit sends the resins into the resin fixtures in the resin lifting unit one by one. The fixtures rise with the resin lifting unit to the waiting position. The loading manipulator moves along the IO / UL guide rail unit to above the waiting positions of the strip preheating unit and the resin lifting unit, and brings the lead frame and the resin into the press unit for encapsulation. The existing alignment unit, although it can neatly arrange the substrates in the cartridge and stack them layer by layer to prevent mutual damage during the transfer of such high-precision substrates (lead frames), still has the following problems: 1. The efficiency of the strip traction unit in sending the lead frame into the strip preheating unit is unknown; 2. There are generally multiple press units, which can improve the chip encapsulation efficiency. Through the strip traction unit, the traction efficiency is low and it cannot well meet the simultaneous feeding operation for multiple press units or encapsulation molds. In addition, the encapsulation mold is generally equipped with devices such as negative pressure, unloading, and heating, and is placed side by side. If the loading manipulator grabs them one by one, the grabbing efficiency is too low; 3. When the strip traction unit sends the lead frame into the strip preheating unit, it is not easy to accurately position. Since the lead frame cannot be symmetrically conveyed, it cannot be symmetrically positioned during positioning, which affects subsequent processes such as pouring. It cannot pour synchronously from the pouring center to both sides, affecting the encapsulation quality; 4. Generally, the strip traction unit has low stiffness and is unstable when conveying the lead frame.

[0004] Therefore, it is necessary to propose a semiconductor substrate preheating production line and a feeding mechanism with high efficiency, good stability, and accurate positioning to improve the preheating efficiency of the substrate and thus improve the automatic encapsulation efficiency of the whole machine. Summary of the Invention

[0005] The purpose of the present invention is to provide a feeding mechanism for a semiconductor substrate preheating production line to achieve double-substrate automatic symmetric and efficient feeding.

[0006] The purpose of the present invention can be achieved by the following technical solutions:

[0007] A semiconductor substrate preheating production line loading mechanism, comprising at least two groups of conveyor belts, a conveyor belt support frame, a conveyor belt rotating device, a conveyor belt driving device, a substrate positioning device and a substrate pushing device. The two ends of the two groups of conveyor belts are respectively rotatably connected to both sides of the conveyor belt support frame. The middle part of the conveyor belt support frame is connected to the rotating end of the conveyor belt rotating device. The conveyor belt driving device is drivingly connected to the conveyor belt. The substrate positioning device is arranged inside the conveyor belt. The substrate pushing device is arranged on one side of the conveyor belt support frame.

[0008] In a further solution, the conveyor belt support frame includes a left and right frame body, belt pulleys, axle shafts and driven wheels. The belt pulleys are rotatably connected to both ends of the left and right frame body through the axle shafts. The middle part of the left and right frame body is connected to the rotating end of the conveyor belt rotating device. The driven wheels and the belt pulleys are coaxially connected through the axle shafts. The two groups of conveyor belts are respectively sleeved on the belt pulleys on the left and right frame body.

[0009] In a further solution, the conveyor belt rotating device includes a mounting frame, a rotating driver, a rotating table, a rotating table limiting unit and a first position sensing unit. The housing of the rotating driver is fixedly connected to the mounting frame. The rotating table is connected to the rotating end of the rotating driver. The middle part of the left and right frame body is connected to the table top of the rotating table. The rotating table limiting unit is connected between the mounting frame and the rotating table. The first position sensing unit is arranged on one side of the rotating table limiting unit.

[0010] In a further solution, the rotating table limiting unit includes a stop block and an elastic limiting seat. The stop block is connected below the rotating table. The elastic limiting seat is connected to the mounting frame. The stop block is limited by the elastic limiting seat.

[0011] In a further solution, the conveyor belt driving device includes a driving wheel, a driving motor, a first lifting driver and a second position sensing unit. The driving wheel is connected to the rotating shaft of the driving motor. The housing of the driving motor is connected to the lifting end of the first lifting driver. The fixed end of the first lifting driver is connected to the mounting frame. The driving wheel corresponds to the driven wheel. The second position sensing unit is connected between the mounting frame and the conveyor belt support frame.

[0012] In a further solution, the substrate positioning device includes a substrate limiting unit, a second lifting driver and a substrate position sensor. The substrate limiting unit is slidably connected to both ends of the conveyor belt support frame. The second lifting driver is drivingly connected to the substrate limiting unit. The substrate position sensor is connected to the mounting frame and is located on the side of the substrate limiting unit close to the middle of the conveyor belt support frame.

[0013] In a further embodiment, the substrate limiting unit includes a limiting plate, a placement groove, a T-shaped connecting rod, and a return spring. The placement groove is provided on the left and right frames. A groove is provided on the upper surface of the limiting plate and is located within the placement groove. The vertical end of the T-shaped connecting rod sequentially passes through the return spring and the conveyor belt support frame and is connected to the bottom of the limiting plate.

[0014] In a further embodiment, the substrate pushing device includes a push rod, a lateral movement assembly, and a longitudinal lifting assembly. One end of the push rod is provided above the conveyor belt, and the other end is connected to the lifting end of the longitudinal lifting assembly. The fixed end of the longitudinal lifting assembly is connected to the moving end of the lateral movement assembly, and the fixed end of the lateral movement assembly is connected to one side of the conveyor belt rotating device.

[0015] In a further embodiment, the lateral movement assembly includes a screw slide linear module and a connecting seat. The screw slide linear module is connected to the upper part of the connecting seat. The connecting seat is connected to one side of the conveyor belt support frame. The longitudinal lifting assembly includes a connecting rod lifting mechanism, a third lifting driver, a push rod, a roller, and a connecting plate. One end of the push rod is connected to the other end of the push rod. The other end of the push rod passes through the slide of the screw slide linear module and is connected to the connecting plate. The connecting plate is rotatably connected to the roller, and the roller is slidably connected to the lifting end of the connecting rod lifting mechanism.

[0016] The object of the present invention is also to provide a semiconductor substrate preheating production line to achieve automatic symmetric high-speed feeding of double substrates and unified preheating.

[0017] The object of the present invention can be achieved by the following technical solutions:

[0018] A semiconductor substrate preheating production line includes a feeding mechanism, a substrate preheating table, and a connecting frame. The feeding mechanism and the substrate preheating table are sequentially connected to the connecting frame. The feeding mechanism includes at least two groups of conveyor belts, a conveyor belt support frame, a conveyor belt rotating device, a conveyor belt driving device, a substrate positioning device, and a substrate pushing device. The two ends of the two groups of conveyor belts are respectively rotatably connected to both sides of the conveyor belt support frame. During use, the output end of the conveyor belt corresponds to the preheating unit on the substrate preheating table. The middle of the conveyor belt support frame is connected to the rotating end of the conveyor belt rotating device. The fixed end of the conveyor belt rotating device is installed on the connecting frame. The conveyor belt driving device is drivingly connected to the conveyor belt. The substrate positioning device is provided inside the conveyor belt. The substrate pushing device is connected to one side of the substrate preheating table.

[0019] The beneficial effects of the present invention:

[0020] 1. The present invention can convey two groups of substrates through two groups of conveyor belts. The conveyor belt rotating device can drive the rotation of the conveyor belt support frame, so that each substrate pushed out from the outlet of the cartridge can be symmetrical about the axis of rotation of the conveyor belt rotating device, which is convenient for the accuracy of the conveying track during the double conveying of the two groups of substrates, and is convenient for accurately pushing them to the preheating units on the substrate preheating table simultaneously through the substrate pushing device. Compared with the pushing device using double cylinders, the number of pushing power components can be omitted and the air pressure can be adjusted to maintain the synchronization of the two simultaneous pushes, which simplifies the structure and improves the working efficiency while doing so.

[0021] 2. The present invention rotates to receive materials through the conveyor belt rotating device, which can improve the material receiving efficiency. At the same time, the rotary conveying can also improve the conveying efficiency of the substrate.

[0022] 3. The present invention can improve the substrate conveying efficiency by selectively conveying materials through the cooperation of the conveyor belt rotating device, the conveyor belt, and the conveyor belt driving device.

[0023] 4. The present invention can simultaneously push the substrates on the two groups of conveyor belts through the substrate positioning device and the substrate pushing device, which improves the pushing efficiency and can also ensure the position accuracy requirements when pushing to the preheating table.

[0024] 5. The structural layout adopts a central symmetry arrangement of two strips, which is convenient for the next injection molding process to achieve center point injection. After being sent to the preheating table, it is positioned through the preheating table, and different preheating units with different sizes are designed for different strips.

[0025] 6. The substrate feeding process is driven by pushing or the strip, and the movement track is designed to be smooth to prevent the occurrence of material jamming. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 It is a connection schematic diagram of a feeding mechanism for a semiconductor substrate preheating production line in an embodiment of the present invention;

[0028] Figure 2 It is a schematic diagram of the installation of a feeding mechanism for a semiconductor substrate preheating production line in an embodiment of the present invention Figure 1 ;

[0029] Figure 3 It is a schematic diagram of the installation of a feeding mechanism for a semiconductor substrate preheating production line in an embodiment of the present invention Figure 2;

[0030] Figure 4 It is a connection schematic diagram of the conveyor belt support frame in the embodiment of the present invention;

[0031] Figure 5 It is a connection schematic diagram of the conveyor belt rotating device in the embodiment of the present invention;

[0032] Figure 6 It is a connection schematic diagram of the rotating table limiting unit in the embodiment of the present invention;

[0033] Figure 7 It is a connection schematic diagram of the rotary drive in the embodiment of the present invention;

[0034] Figure 8 It is a connection schematic diagram of the conveyor belt drive device in the embodiment of the present invention;

[0035] Figure 9 It is a connection schematic diagram of the substrate pushing device in the embodiment of the present invention;

[0036] Figure 10 is Figure 2 The enlarged schematic diagram at position A in

[0037] Figure 11 is Figure 4 The enlarged schematic diagram at position B in

[0038] In the figure: 1. Loading mechanism; 11. Conveyor belt; 12. Conveyor belt support frame; 121. Left and right frame bodies; 122. Pulley; 123. Axle; 124. Driven wheel; 125. Guide key; 13. Conveyor belt rotation device; 131. Mounting frame; 132. Rotation driver; 133. Rotating table; 1331. Z-shaped plate; 1332. Central axis; 1333. Central axis bearing seat; 134. Rotating table limit unit; 1341. Stopper; 1342. Elastic limit seat; 135. First position sensing unit; 1351. First sensing plate; 1352. First sensor; 14. Conveyor belt drive device; 141. Driving wheel; 142. Driving motor; 143. First lifting driver; 144. Second position sensing unit; 1441. Second sensing plate; 1442. Second sensor; 15. Substrate positioning device; 151. Substrate limit unit; 1511. Limit plate; 1512. Placing groove; 1513. T-shaped connecting rod; 1514. Return spring; 1515. Groove; 152. Second lifting driver; 153. Substrate position sensor; 16. Substrate pushing device; 161. Push rod; 162. Transverse movement assembly; 1621. Lead screw slide linear module; 1622. Connecting seat; 1623. Third sensor; 163. Longitudinal lifting assembly; 1631. Link lifting mechanism; 1632. Third lifting driver; 1633. Jacking rod; 1634. Roller; 1635. Connecting plate; 2. Substrate preheating table; 21. Avoidance groove; 3. Connecting frame. Detailed implementation manners

[0039] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0040] As Figure 1 shown, a loading mechanism for a semiconductor substrate preheating production line includes at least two groups of conveyor belts 11, a conveyor belt support frame 12, a conveyor belt rotation device 13, a conveyor belt drive device 14, a substrate positioning device 15, and a substrate pushing device 16. The two ends of the two groups of conveyor belts 11 are respectively rotatably connected to both sides of the conveyor belt support frame 12. The middle of the conveyor belt support frame 12 is connected to the rotating end of the conveyor belt rotation device 13. The conveyor belt drive device 14 is drivingly connected to the conveyor belt 11. The substrate positioning device 15 is arranged inside the conveyor belt 11, and the substrate pushing device 16 is arranged on one side of the conveyor belt support frame 12.

[0041] Refer to Figure 2 and Figure 3As shown, its working principle or usage method is as follows: First, install the above-mentioned semiconductor substrate preheating production line feeding mechanism between the existing alignment unit or the outlet of the cassette and the substrate preheating table 2. When installing, the output end of the conveyor belt 11 corresponds to the preheating unit on the substrate preheating table 2. When the substrate is pushed out from the outlet of the existing alignment unit or the cassette (the existing automatic discharging method, not shown in the figure), it lands on a predetermined position at one end of the first group of conveyor belts 11 on the feeding mechanism 1. Then, control the conveyor belt driving device 14 to drive the conveyor belt 11 to convey forward. After reaching the substrate positioning device 15 on the conveyor belt support frame 12, after being positioned by the substrate positioning device 15, when the substrate reaches the predetermined position of the substrate positioning device 15, the conveyor belt 11 disengages from the power under the action of the conveyor belt driving device 14. Subsequently, under the action of the conveyor belt rotating device 13, it rotates 180°. When the end of the second group of conveyor belts 11 close to the substrate preheating table 2 reaches the feeding position of the first group of conveyor belts 11 before, the substrate continues to be pushed out from the existing alignment unit or the cassette and lands on a predetermined position at the other end of the second group of conveyor belts 11. After reversing 180°, the other end of the first group of conveyor belts 11 continues to receive the material and is pushed to the predetermined position on the substrate positioning device 15 at this end by the substrate pushing device 16. At the same time, at this moment, the substrates positioned at the predetermined positions by the substrate positioning devices 15 at the same end of the two groups of conveyor belts 11 are both sensed. Then, the two substrates can be pushed onto the preheating unit on the substrate preheating table 2 together by the substrate pushing device 16. Through the conveyance of the conveyor belt rotating device 13, it can be ensured that the substrate is symmetric about the rotation center, so as to maintain symmetry in the subsequent processes. For example, after being pushed by the substrate pushing device 16 to the substrate preheating table 2, it can still maintain central symmetry, ensuring that the two substrates can be symmetrically encapsulated synchronously from the central injection port in the next packaging process.

[0042] In addition, compared with the existing method of pushing single substrates one by one, the pushing efficiency is significantly higher, which makes the preheating efficiency also higher. It can also ensure that the two substrates can be preheated synchronously, so that the two substrates can reach the same temperature without further temperature regulation, which is convenient for entering the next process at the same time. In addition, by rotating the conveyor belt support frame 12 through the conveyor belt rotating device 13, it is convenient for the two ends of the two groups of conveyor belts to take turns feeding, improving the feeding efficiency of the conveyor belt 11. The substrate positioning device 15 can ensure that the material receiving position and the material pushing position are basically the same, facilitating the substrates to be pushed onto the substrate preheating table 2 at the same time. Compared with the existing single-machine conveying or side-by-side double-machine conveying structure, it can save the substrate positioning time and the cumbersome automatic control of the time for simultaneous pushing after positioning. Obviously, the efficiency will be higher, and there are also many shared parts in the structure, which can save costs. In addition, since the conveyor belt rotating device 13 can rotate 180° to quickly convey the substrate to the other end of the conveyor belt 11, and at the same time, a group of conveyor belts 11 itself can also realize the conveyance of the substrate, the substrates can be conveyed simultaneously in this way, improving the conveyance efficiency of the substrates.

[0043] According to the above working principle, some preferred implementation structures are as follows Figure 4 As shown, the conveyor belt support frame 12 includes left and right frame bodies 121, belt pulleys 122, wheel axles 123 and driven wheels 124. The belt pulleys 122 are rotatably connected to both ends of the left and right frame bodies 121 through the wheel axles 123. The middle part of the left and right frame bodies 121 is connected to the rotating end of the conveyor belt rotating device 13. The driven wheels 124 and the belt pulleys 122 are coaxially connected through the wheel axles 123. Two groups of conveyor belts 11 are respectively sleeved on the belt pulleys 122 on the left and right frame bodies 121. This can provide a certain stiffness to the conveyor belt 11. The overall structure is reasonably designed, facilitating the installation and rotation of the conveyor belt and the conveyance of the substrate. The number of wheel axles 123 can be four, and the number of driven wheels 124 can be four, facilitating the requirement of individually driving a single conveyor belt.

[0044] Refer to Figure 4 、 Figure 5 and Figure 7 As shown, the conveyor belt rotating device 13 includes a mounting frame 131, a rotating drive 132, a rotating table 133, a rotating table limit unit 134 and a first position sensing unit 135. The housing of the rotating drive 132 is fixedly connected to the mounting frame 131. The rotating table 133 is connected to the rotating end of the rotating drive 132. The middle part of the left and right frame bodies 121 is connected to the tabletop of the rotating table 133. The rotating table limit unit 134 is connected between the mounting frame 131 and the rotating table 133. The first position sensing unit 135 is arranged on one side of the rotating table limit unit 134. The rotating drive 132 can be a rotating cylinder or a rotating electric cylinder or a motor or other rotating mechanisms. Taking the rotating cylinder as an example, the rotating drive 132 drives the rotation of the rotating table 133, which can drive the rotation of the left and right frame bodies 121 on the rotating table 133. Through the rotating table limit unit 134, the conveyor belt 11 can be limited after rotating 180°, preventing over-rotation and causing positioning errors. The first position sensing unit 135 can provide a signal indicating that the rotating table 133 is in place to the controller of the entire production line. Of course, the first position sensing unit 135 here can also be designed to directly sense the signal indicating that the left and right frame bodies 121 are in place when rotating forward 180° and the signal indicating that they are in place when rotating backward 180°, so as to accurately limit the position of the conveyor belt 11 on the left and right frame bodies 121 when it reaches the final material receiving or pushing position after rotation.

[0045] Such as Figure 5 and Figure 6As shown, the rotating platform limiting unit 134 includes a stopper 1341 and an elastic limiting seat 1342. The stopper 1341 is connected to the bottom of the rotating platform 133, and the elastic limiting seat 1342 is connected to the mounting frame 131. The stopper 1341 is limited by the elastic limiting seat 1342. The stopper 1341 and the elastic limiting seat 1342 are mutually opposed to each other to limit the position of the rotating platform 133.

[0046] The first position sensing unit 135 includes a first sensing plate 1351 and a first sensor 1352. The first sensing plate 1351 is connected to the rotating table 133, and the first sensor 1352 is connected to the mounting frame 131 and senses the first sensing plate 1351. The first sensor 1352 may be a photoelectric sensor. The first sensing plate 1351 causes the electrical signal of the first sensor 1352 to change, thereby sensing the position of the rotating table 133 and providing a position signal or a position signal of the corresponding rotating table 133 to the assembly line controller.

[0047] See Figure 1 、 Figure 4 、 Figure 7 and Figure 8 As shown, the conveyor belt drive device 14 includes a driving wheel 141, a driving motor 142, a first lifting driver 143 and a second position sensing unit 144. The driving wheel 141 is connected to the rotating shaft of the driving motor 142, the shell of the driving motor 142 is connected to the lifting end of the first lifting driver 143, the fixed end of the first lifting driver 143 is connected to the mounting frame 131, the driving wheel 141 corresponds to the driven wheel 124, and the second position sensing unit 144 is connected between the mounting frame 131 and the conveyor belt support frame 12. The driven wheel 124 can drive the wheel shaft 123 and the pulley 122 to rotate through the driving wheel, thereby driving the conveyor belt 11 to transport. After the first jacking driver 143 senses the initial position signal of the conveyor belt support frame 12 in the second position sensing unit 144, the jacking drive motor 142 is lifted to drive the driving wheel 141 and the driven wheel 124 to engage and transmit. When the conveyor belt rotating device 13 drives the conveyor belt support frame 12 to rotate, the first jacking driver 143 can drive the driving wheel 141 and the driven wheel 124 to disengage. The first jacking driver 143 can be a jacking cylinder, a telescopic electric cylinder or other linear telescopic mechanism, which will not be described here one by one. People in this field can freely choose.

[0048] See Figure 3 and Figure 4 As shown, the second position sensing unit 144 includes a second sensing plate 1441 and a second sensor 1442 . The second sensing plate 1441 is connected to the conveyor belt support frame 12 , and the second sensor 1442 is connected to the mounting frame 131 and senses the second sensing plate 1441 .

[0049] SeeFigure 5 and Figure 6 As shown in Figure 6 , the rotating table 133 includes a Z-shaped plate 1331, a central shaft 1332, and a central shaft bearing seat 1333. The middle part of the Z-shaped plate 1331 is connected to one end of the central shaft 1332. The middle part of the central shaft 1332 is rotatably connected to the mounting frame 131 through the central shaft bearing seat 1333. The other end of the central shaft 1332 is connected to the driving end of the rotation driver 132. By driving the central shaft 1332 to rotate within the central shaft bearing seat 1333 by the rotation driver 132, the Z-shaped plate 1331 is driven to rotate, which can make the rotation of the Z-shaped plate 1331 stable. At the same time, the Z-shaped plate 1331 is convenient for supporting the left and right frames 121, with a simple structure and material savings.

[0050] The shape of the first induction plate 1351 is Z-shaped, which is connected to the stopper 1341 and located at the end of the Z-shaped plate 1331. This is convenient for sensing the position of the Z-shaped plate 1331, and thus convenient for sensing the position of the rotating table 133.

[0051] Refer to Figure 1 、 Figure 4 and Figure 11 As shown in Figure 1 , Figure 4 , and Figure 11 , the substrate positioning device 15 includes a substrate limiting unit 151, a second lifting driver 152, and a substrate position sensor 153. The substrate limiting unit 151 is slidably connected to both ends of the conveyor belt support frame 12. The second lifting driver 152 is drivingly connected to the substrate limiting unit 151. The substrate position sensor 153 is connected to the mounting frame 131 and located on the side of the substrate limiting unit 151 close to the middle of the conveyor belt support frame 12. The second lifting driver 152 can also be installed on the connecting frame 3 or other specially designed frames. In this way, when the substrate position sensor 153 senses that there is a substrate on the conveyor belt 11, it feeds back a signal to the controller, and the controller controls the second lifting driver 152 to drive the substrate limiting unit 151 to rise to the substrate pre-positioning place to complete the positioning of the substrate.

[0052] The substrate limiting unit 151 includes a limiting plate 1511, a placement groove 1512, a T-shaped connecting rod 1513, and a return spring 1514. The placement groove 1512 is provided on the left and right frames 121. A groove 1515 is provided on the upper surface of the limiting plate 1511 and is located within the placement groove 1512. The vertical end of the T-shaped connecting rod 1513 sequentially passes through the return spring 1514 and the conveyor belt support frame 12 and is connected to the bottom of the limiting plate 1511. The limiting plate 1511 can be an L-shaped bent plate or a bent plate with multiple bends. The protrusions on both sides of the groove 1515 can position two substrates simultaneously, and the recess of the groove 1515 can slide within the placement groove 1512, such that the simultaneous positioning of the substrates on the two conveyor belts 11 can be achieved by a single second lifting driver 152. Here, the second lifting driver 152 can also be various linear pushing mechanisms, such as air cylinders, electric cylinders, hydraulic cylinders, etc., which will not be elaborated one by one here.

[0053] Refer to Figure 1 , Figure 2 , Figure 9 and Figure 10 As shown in

[0054] The lateral movement component 162 includes a lead screw slider linear module 1621 and a connecting seat 1622. The lead screw slider linear module 1621 is connected to the upper part of the connecting seat 1622, and the connecting seat 1622 is connected to one side of the conveyor belt support frame 12. The longitudinal lifting component 163 includes a connecting rod lifting mechanism 1631, a third jacking driver 1632, a push rod 1633, a roller 1634, and a connecting plate 1635. One end of the push rod 1633 is connected to the other end of the push rod 161. The other end of the push rod 1633 passes through the slider of the lead screw slider linear module 1621 and is connected to the connecting plate 1635. The connecting plate 1635 is rotatably connected to the roller 1634, and the roller 1634 is slidably connected to the lifting end of the connecting rod lifting mechanism 1631. The third jacking driver 1632 drives a connecting rod of the connecting rod lifting mechanism 1631 to lift, which can drive the roller 1634 connected to the connecting rod lifting mechanism 1631 to move up and down, thereby jacking up the connecting plate 1635 on the roller 1634 and the lifting of the push rod 1633, so as to drive the vertical lifting of the push rod 161. The lead screw slider linear module 1621 can drive the push rod 1633 to move laterally, thereby driving the push rod 161 to move laterally. The structure is simple, and the limit sliding between the roller 1634 and the connecting rod lifting mechanism 1631 can reduce the impact noise of the push rod 1633 on the connecting rod lifting mechanism 1631.

[0055] Third sensors 1623 are connected to both ends of the connecting seat 1622. The third sensors can be photoelectric position sensors for sensing the position of the push rod 161.

[0056] A position sensor is provided at the lifting end position of the third jacking driver 1632 for sensing the in-place signal of its lifting end and transmitting the signal to the controller, so that the controller can automatically control the operation of the next process according to the in-place signal.

[0057] Refer to Figure 4 As shown, the conveyor belt 11 is a circular strip, and the contact surface with the substrate is small, which is convenient for pushing the substrate. Each group of conveyor belts 11 has at least three circular strips. The three circular strips can better limit the substrate and ensure more stable substrate transportation.

[0058] The axle 123 is "D"-shaped, and a "D"-shaped guide key 125 is provided thereon, and the vertical planes of the two "D"-shapes are connected to each other. It is convenient to contact the substrate and guide the substrate into the conveyor belt 11.

[0059] Refer to Figures 1 - 11, during actual use, after the baseband is pushed out from the discharge port of the material box, it falls onto the conveyor belt 11. The driving wheel 141 meshes with the driven wheel 124 under the drive of the drive motor 142, driving the belt pulley 122 and the axle 123 to rotate, thereby driving the conveyor belt 11 to feed towards one end of the substrate preheating table 2. When the substrate position sensor 153 at the front end senses the in-place signal of the substrate, it feeds back to the controller. The controller controls the second lifting driver 152 to drive the limiting plate 1511 to limit the substrate, so that the substrate is positioned at a predetermined position. At the same time, it controls the first lifting driver 143 to drive the drive motor 142 and the driving wheel 141 to descend, and controls the rotation driver 132 to drive the rotating table 133 to rotate 180° so that one end of another set of conveyor belts 11 on the left and right frames 121 receives the material. After receiving the material, it continues to control the first lifting driver 143 to drive the drive motor 142 and the driving wheel 141 to rise and mesh with the driven wheel 124 at the other end, and continues to drive the belt to feed the material forward. When it reaches the predetermined position, at this time, the second lifting driver 152 drives the limiting plate 1511 to limit the double substrates. When the substrate position sensors 153 of both groups sense the substrates, it controls the third lifting driver 1632 to drive a link of the link lifting mechanism 1631 to lift and lower, which can drive the roller 1634 connected to the link lifting mechanism 1631 to move up and down, thereby lifting and lowering the connecting plate 1635 and the ejector rod 1633 on the roller 1634, and thus driving the vertical lifting of the push rod 161. The lead screw slider linear module 1621 can drive the ejector rod 1633 to move horizontally, thereby driving the push rod 161 to move horizontally and push the double substrates to the next process, such as preheating on the substrate preheating table 2.

[0060] Refer to Figure 2 and Figure 3 , obviously, according to the working principle and usage method of the above feeding mechanism 1, the feeding mechanism 1 and the substrate preheating table 2 are connected by the connecting frame 3 to form a semiconductor substrate preheating production line. Among them, the feeding mechanism 1 and the substrate preheating table 2 are sequentially connected to the connecting frame 3. The feeding mechanism 1 includes at least two groups of conveyor belts 11, a conveyor belt support frame 12, a conveyor belt rotating device 13, a conveyor belt driving device 14, a substrate positioning device 15, and a substrate pushing device 16. The two ends of the two groups of conveyor belts 11 are respectively rotatably connected to both sides of the conveyor belt support frame 12. During use, the output end of the conveyor belt 11 corresponds to the preheating unit on the substrate preheating table 2. The middle of the conveyor belt support frame 12 is connected to the rotating end of the conveyor belt rotating device 13, and the fixed end of the conveyor belt rotating device 13 is installed on the connecting frame 3. The conveyor belt driving device 14 is drivingly connected to the conveyor belt 11. The substrate positioning device 15 is arranged inside the conveyor belt 11, and the substrate pushing device 16 is connected to one side of the substrate preheating table 2.

[0061] Among them, an avoidance groove 21 is provided at one end of the substrate preheating table 2 close to the conveyor belt support frame 12. The avoidance groove 21 facilitates the rotation and material pushing of the feeding mechanism 1.

[0062] The substrate preheating table 2 is installed with heating rods and temperature sensors, and cooperates with a temperature regulating instrument to achieve precise temperature control.

[0063] As shown above, it can be obtained that the present invention can convey two groups of substrates through two groups of conveyor belts 11. The conveyor belt rotating device 13 can drive the conveyor belt support frame 12 to rotate, so that each substrate pushed out from the discharge port of the magazine can be symmetrical about the axis of rotation of the conveyor belt rotating device 13, which is convenient for the accuracy of the conveying track during the double conveying of the two groups of substrates, and is convenient for accurately pushing them to the preheating unit on the substrate preheating table 2 through the substrate pushing device at the same time. Compared with the pushing device using double cylinders, the number of pushing power components can be omitted and the air pressure can be adjusted to maintain the synchronization of the two simultaneous pushes, which simplifies the structure and improves the working efficiency while.

[0064] The present invention rotates to receive materials through the conveyor belt rotating device 13, which can improve the material receiving efficiency. At the same time, the rotating conveyance can also improve the conveying efficiency of the substrate.

[0065] The present invention can improve the substrate conveying efficiency by cooperating with the conveyor belt rotating device 13, the conveyor belt 11, and the conveyor belt driving device 14 to select the material conveyance.

[0066] The present invention can simultaneously push the substrates on the two groups of conveyor belts 11 through the substrate positioning device 15 and the substrate pushing device 16, which improves the pushing efficiency and can also ensure the position accuracy requirements when pushed onto the preheating table.

[0067] The overall structural layout meets the conveying requirements of the central symmetry arrangement of the two substrates, which is convenient for the next injection molding process to achieve central point injection. After being sent to the preheating table, it is positioned through the preheating table, and different preheating units with different sizes are designed for different substrates.

[0068] The substrate feeding process is driven by pushing or the conveyor belt 11, and the movement track is designed to be smooth to prevent the occurrence of material jamming.

[0069] It should be noted that the terms "first", "second", etc. in this application are used to distinguish similar objects and do not have to be used to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances for the embodiments of the present application described here. In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings.

[0070] In the description of this specification, the descriptions referring to terms such as "one embodiment", "example", "specific example", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0071] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments, and what is described in the above embodiments and the specification only illustrates the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. A feeding mechanism for preheating a semiconductor substrate on a production line, characterized in that, It includes at least two sets of conveyor belts (11), a conveyor belt support frame (12), a conveyor belt rotating device (13), a conveyor belt driving device (14), a substrate positioning device (15), and a substrate pushing device (16). Both ends of the two sets of conveyor belts (11) are rotatably connected to both sides of the conveyor belt support frame (12). The middle part of the conveyor belt support frame (12) is connected to the rotating end of the conveyor belt rotating device (13). The conveyor belt driving device (14) is drivingly connected to the conveyor belt (11). The substrate positioning device (15) is arranged inside the conveyor belt (11). The substrate pushing device (16) is arranged on one side of the conveyor belt support frame (12). The conveyor belt support frame (12) includes a left and right frame body (121), belt pulleys (122), axle shafts (123), and driven wheels (124). The belt pulleys (122) are rotatably connected to both ends of the left and right frame body (121) through the axle shafts (123). The middle part of the left and right frame body (121) is connected to the rotating end of the conveyor belt rotating device (13). The driven wheels (124) and the belt pulleys (122) are coaxially connected through the axle shafts (123). The two sets of conveyor belts (11) are respectively sleeved on the belt pulleys (122) on the left and right frame body (121). The conveyor belt rotating device (13) includes a mounting frame (131), a rotating driver (132), a rotating table (133), a rotating table limiting unit (134), and a first position sensing unit (135). The housing of the rotating driver (132) is fixedly connected to the mounting frame (131). The rotating table (133) is connected to the rotating end of the rotating driver (132). The middle part of the left and right frame body (121) is connected to the tabletop of the rotating table (133). The rotating table limiting unit (134) is connected between the mounting frame (131) and the rotating table (133). The first position sensing unit (135) is arranged on one side of the rotating table limiting unit (134).

2. The feeding mechanism for preheating a semiconductor substrate on a production line according to claim 1, wherein, The rotating table limiting unit (134) includes a stop block (1341) and an elastic limiting seat (1342). The stop block (1341) is connected below the rotating table (133). The elastic limiting seat (1342) is connected to the mounting frame (131). The stop block (1341) is limited by the elastic limiting seat (1342).

3. The feeding mechanism for preheating a semiconductor substrate on a production line according to claim 1, wherein, The conveyor belt driving device (14) includes a driving wheel (141), a driving motor (142), a first lifting driver (143), and a second position sensing unit (144). The driving wheel (141) is connected to the rotating shaft of the driving motor (142). The housing of the driving motor (142) is connected to the lifting end of the first lifting driver (143). The fixed end of the first lifting driver (143) is connected to the mounting frame (131). The driving wheel (141) corresponds to the driven wheel (124). The second position sensing unit (144) is connected between the mounting frame (131) and the conveyor belt support frame (12).

4. The feeding mechanism for preheating a semiconductor substrate on a production line according to claim 1, wherein The substrate positioning device (15) includes a substrate limiting unit (151), a second lifting driver (152), and a substrate position sensor (153). The substrate limiting unit (151) is slidably connected to both ends of the conveyor belt support frame (12). The second lifting driver (152) is drivingly connected to the substrate limiting unit (151). The substrate position sensor (153) is connected to the mounting bracket (131) and is located on one side of the substrate limiting unit (151) close to the middle of the conveyor belt support frame (12).

5. The feeding mechanism for preheating a semiconductor substrate on a production line according to claim 4, wherein The substrate limiting unit (151) includes a limiting plate (1511), a placement groove (1512), a T-shaped connecting rod (1513), and a return spring (1514). The placement groove (1512) is provided on the left and right frame bodies (121). The upper surface of the limiting plate (1511) is provided with a groove (1515) and is located within the placement groove (1512). The vertical end of the T-shaped connecting rod (1513) sequentially passes through the return spring (1514) and the conveyor belt support frame (12) and then is connected to the bottom of the limiting plate (1511).

6. A semiconductor substrate preheating assembly line feeding mechanism according to any one of claims 1-5, characterized in that, The substrate pushing device (16) includes a push rod (161), a lateral movement assembly (162), and a longitudinal lifting assembly (163). One end of the push rod (161) is arranged above the conveyor belt (11), and the other end is connected to the lifting end of the longitudinal lifting assembly (163). The fixed end of the longitudinal lifting assembly (163) is connected to the moving end of the lateral movement assembly (162). The fixed end of the lateral movement assembly (162) is connected to one side of the conveyor belt rotating device (13).

7. The feeding mechanism for preheating a semiconductor substrate on a production line according to claim 6, wherein The lateral movement assembly (162) includes a screw slide linear module (1621) and a connecting seat (1622). The screw slide linear module (1621) is connected to the upper part of the connecting seat (1)622). The connecting seat (1622) is connected to one side of the conveyor belt support frame (12). The longitudinal lifting assembly (163) includes a connecting rod lifting mechanism (1631), a third lifting driver (1632), a push rod (1633), a roller (1634), and a connecting plate (1635). One end of the push rod (1633) is connected to the other end of the push rod (161). The other end of the push rod (1633) passes through the slide of the screw slide linear module (1621) and is connected to the connecting plate (1635). The connecting plate (1635) is rotatably connected to the roller (1634). The roller (1634) is slidably connected to the lifting end of the connecting rod lifting mechanism (1631).

8. A semiconductor substrate preheating assembly line, characterized in that, It includes a feeding mechanism (1), a substrate preheating table (2) and a connecting frame (3). The feeding mechanism (1) and the substrate preheating table (2) are sequentially connected to the connecting frame (3). The feeding mechanism (1) includes at least two groups of conveying belts (11), a conveying belt support frame (12), a conveying belt rotating device (13), a conveying belt driving device (14), a substrate positioning device (15) and a substrate pushing device (16). The two ends of the two groups of conveying belts (11) are respectively rotatably connected to both sides of the conveying belt support frame (12). During use, the output end of the conveying belt (11) corresponds to the preheating unit on the substrate preheating table (2). The middle part of the conveying belt support frame (12) is connected to the rotating end of the conveying belt rotating device (13). The fixed end of the conveying belt rotating device (13) is installed on the connecting frame (3). The conveying belt driving device (14) is drivingly connected to the conveying belt (11). The substrate positioning device (15) is arranged inside the conveying belt (11). The substrate pushing device (16) is connected to one side of the substrate preheating table (2); The conveying belt support frame (12) includes left and right frame bodies (121), belt pulleys (122), wheel axles (123) and driven wheels (124). The belt pulleys (122) are rotatably connected to both ends of the left and right frame bodies (121) through the wheel axles (123). The middle part of the left and right frame bodies (121) is connected to the rotating end of the conveying belt rotating device (13). The driven wheels (124) and the belt pulleys (122) are coaxially connected through the wheel axles (123). The two groups of conveying belts (11) are respectively sleeved on the belt pulleys (122) on the left and right frame bodies (121); The conveying belt rotating device (13) includes a mounting frame (131), a rotation driver (132), a rotating table (133), a rotating table limiting unit (134) and a first position sensing unit (135). The housing of the rotation driver (132) is fixedly connected to the mounting frame (131). The rotating table (133) is connected to the rotating end of the rotation driver (132). The middle part of the left and right frame bodies (121) is connected to the tabletop of the rotating table (133). The rotating table limiting unit (134) is connected between the mounting frame (131) and the rotating table (133). The first position sensing unit (135) is arranged on one side of the rotating table limiting unit (134).

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