Sample processing equipment

Abstract

The present invention discloses a sample processing device, which includes a frame assembly, as well as a feeding assembly, a discharging assembly, a first material transferring assembly and a second material transferring assembly connected to the frame assembly. The frame assembly has a processing area, and at least an acid tank for storing acid solution is provided in the processing area. The sample processing device is configured as follows: the feeding assembly is used to transfer the sample to be processed to the first material transferring assembly, and the sample to be processed can be transferred to the second material transferring assembly through the first material transferring assembly, and is transferred to the processing area through the second material transferring assembly for processing. The processed sample can be transferred to the first material transferring assembly through the second material transferring assembly, and the discharging assembly is used to transfer the processed sample from the first material transferring assembly. By arranging the first material transferring assembly to receive the sample to be processed from the feeding assembly and output the processed sample to the discharging assembly, the feeding assembly and the discharging assembly do not directly contact the acid solution in the acid tank, which can extend the service life of the feeding assembly and the discharging assembly and reduce the maintenance cost.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor device detection, and more particularly to a sample processing device. Background Art

[0002] When performing failure detection on samples such as packaged devices, it is necessary to remove the package outside the packaged device with acid solution to expose its internal structure. The above operations are usually completed by experimental personnel. Specifically, the experimental personnel put the sample into a container containing acid solution and soak it for a certain period of time, and then take out the soaked sample for cleaning. In order to reduce the safety hazards existing in the manual operation of experimental personnel, there are also automatic processing devices on the market at present, which can move the sample into and out of the acid tank through a manipulator. However, the manipulator is prone to corrosion due to contact with the acid solution during the working process, and it is necessary to frequently maintain or even replace the manipulator, which increases the use cost of the automatic processing device. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. For this purpose, the present invention provides a sample processing device, which can reduce the cost of the sample processing device.

[0004] The sample processing device according to the first embodiment of the present invention includes a frame assembly, and a loading assembly, an unloading assembly, a first material transfer assembly and a second material transfer assembly connected to the frame assembly. The frame assembly has a processing area, and at least an acid tank for storing acid solution is arranged in the processing area.

[0005] Wherein, the sample processing device is configured as follows: the loading assembly is used to transfer the sample to be processed to the first material transfer assembly, and the sample to be processed can be transferred to the second material transfer assembly through the first material transfer assembly, and is transferred to the processing area through the second material transfer assembly for processing. The processed sample can be transferred to the first material transfer assembly through the second material transfer assembly, and the unloading assembly is used to transfer the processed sample from the first material transfer assembly.

[0006] The sample processing device according to the first embodiment of the present invention has at least the following beneficial effects:

[0007] By setting the first material transfer assembly to receive the sample to be processed from the loading assembly and output the processed sample to the unloading assembly, the loading assembly and the unloading assembly do not directly contact the second material transfer assembly, and even less directly contact the acid solution in the acid tank, which can improve the problem of corrosion and damage of the loading assembly and the unloading assembly, extend the service life of the loading assembly and the unloading assembly, reduce the maintenance cost. At the same time, since the loading assembly and the unloading assembly do not need to be made of corrosion-resistant materials, the production cost of the automatic device can also be reduced.

[0008] In other embodiments of the present invention, a cleaning tank for storing a cleaning liquid is further provided in the processing area, and the acid tank and the cleaning tank are arranged along a first horizontal direction;

[0009] The first material transfer component is configured to: be able to sequentially carry a sample to be etched, a sample to be cleaned, and a processed sample along the first horizontal direction, and be able to synchronously drive the sample to be etched, the sample to be cleaned, and the processed sample to move along the first horizontal direction, so that the sample to be etched moves from the loading station corresponding to the loading component to the etching station corresponding to the acid tank, the sample to be cleaned moves from the etching station to the cleaning station corresponding to the cleaning tank, and the processed sample moves from the cleaning station to the unloading station corresponding to the unloading component.

[0010] In other embodiments of the present invention, the first material transfer component includes a first support, and a first material transfer part, a second material transfer part, and a third material transfer part that are sequentially connected to the first support along the first horizontal direction. The first material transfer part is used to carry the sample to be etched, the second material transfer part is used to carry the sample to be cleaned, and the third material transfer part is used to carry the processed sample;

[0011] The second material transfer component includes a second support, and a first lifting part and a second lifting part that are sequentially connected to the second support along the first horizontal direction. The first lifting part is located at the etching station and is used to carry and drive the sample to be etched into the acid tank, and the second lifting part is located at the cleaning station and is used to carry and drive the sample to be cleaned into the cleaning tank;

[0012] The sample processing device is configured to: the first support can move between a first position and a second position. When the first support is in the first position, the first material transfer part, the second material transfer part, and the third material transfer part are respectively located at the loading station, the etching station, and the cleaning station, and are used to transfer the sample to be etched from the loading component to the first material transfer part, transfer the sample to be cleaned from the first lifting part to the second material transfer part, and transfer the processed sample from the second lifting part to the third material transfer part; when the first support is in the second position, the first material transfer part, the second material transfer part, and the third material transfer part are respectively located at the etching station, the cleaning station, and the unloading station, and are used to transfer the sample to be etched from the first material transfer part to the first lifting part, transfer the sample to be cleaned from the second material transfer part to the second lifting part, and transfer the processed sample from the third material transfer part to the unloading component.

[0013] In other embodiments of the present invention, the first material transfer component includes a material transfer member capable of moving between a third position and a fourth position along a second horizontal direction, and the second material transfer component includes a lifting member capable of moving in the vertical direction;

[0014] The sample processing device is configured such that: when the material transfer member is at the third position, the lifting member can carry the sample and move in the vertical direction; when the material transfer member is at the fourth position and the lifting member moves upward from the bottom, it can transfer the sample carried on the material transfer member to the lifting member; when the material transfer member is at the fourth position and the lifting member moves downward from the top, it can transfer the sample carried on the lifting member to the material transfer member.

[0015] In other embodiments of the present invention, the sample processing device includes at least one of the following solutions:

[0016] The first material transfer component includes a first bracket and a material transfer member, and the material transfer member is made of a corrosion-resistant material and is detachably connected to the first bracket;

[0017] The second material transfer component includes a second bracket and a lifting member, and the lifting member is made of a corrosion-resistant material and is detachably connected to the second bracket;

[0018] The loading component includes a multi-axis manipulator;

[0019] The unloading component includes a multi-axis manipulator.

[0020] In other embodiments of the present invention, the sample processing device is configured such that: the second material transfer component can drive multiple groups of samples to be acid-etched to sequentially complete acid etching through the acid tank, and the acid etching time of the latter group of samples is longer than that of the former group of samples.

[0021] In other embodiments of the present invention, the sample processing device includes at least one of the following solutions:

[0022] The sample processing device further includes a first heating device, which is thermally connected to the acid tank, and the first heating device is configured to: heat the acid solution in the acid tank to a first temperature, and heat the acid solution in the acid tank to a second temperature when acid etching the sample, where the second temperature is greater than the first temperature;

[0023] The sample processing device further includes a second heating device and a cleaning tank, the cleaning tank is used to store the cleaning solution, and the second heating device is used to heat the cleaning solution in the cleaning tank.

[0024] In other embodiments of the present invention, the sample processing device further includes a sample storage component for storing samples to be processed. The feeding component can obtain the samples to be processed from the sample storage component. Alternatively, the sample storage component is used to store processed samples, and the discharging component can transfer the processed samples to the sample storage component. The sample storage component includes at least one of the following solutions:

[0025] The sample storage component includes a storage rack and rollers connected to the storage rack, and the storage rack can move through the rollers;

[0026] The sample storage component includes a plurality of storage positions for storing samples to be processed. The sample processing device further includes a controller configured to record the sample information corresponding to each storage position and control the feeding component to obtain the samples to be processed from the target storage position based on the sample information;

[0027] The sample storage component includes a plurality of storage positions for storing samples to be processed. The sample processing device further includes a controller and an identification device. The identification device is used to obtain the sample information of the samples to be processed, and the controller is configured to control the feeding component to obtain the samples to be processed from the target storage position based on the sample information.

[0028] In other embodiments of the present invention, the frame assembly includes an operating table and a housing. The operating table has the processing area, and the housing is connected to the operating table and has an opening. The frame assembly includes one of the following solutions:

[0029] The frame assembly further includes a soft curtain connected to the housing and closing the opening. At least the processing area is located inside the housing, and the feeding component can drive the samples to be processed to push the soft curtain to enter and exit the housing;

[0030] The frame assembly further includes a soft curtain connected to the housing and closing the opening. At least the processing area is located inside the housing, and the discharging component can drive the processed samples to push the soft curtain to enter and exit the housing;

[0031] The sample processing device further includes a sample storage component. The sample storage component includes a storage rack and rollers connected to the storage rack. The storage rack can move through the rollers and can be positioned at a set position to cover the opening. At least the feeding component and the processing area are located inside the housing, and the feeding component can obtain the samples to be processed from the storage rack when the storage rack covers the opening;

[0032] The sample processing device further includes a sample storage component, the sample storage component includes a storage rack and rollers connected to the storage rack, the storage rack can move through the rollers and can be positioned at a set position to cover the opening, at least the blanking device and the processing area are located inside the housing, and the blanking device can transfer the processed sample to the storage rack when the storage rack covers the opening;

[0033] The housing has an air extraction port for connecting to a negative pressure source.

[0034] In other embodiments of the present invention, the sample processing device further includes a plurality of sedimentation tanks, the plurality of sedimentation tanks are interconnected for the acid solution to flow sequentially, and the acid tank is connected to the first sedimentation tank.

[0035] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0036] The present invention will be further described below in conjunction with the drawings and embodiments, where:

[0037] Figure 1 is a three-dimensional schematic diagram of the sample processing device in an embodiment of the present invention;

[0038] Figure 2 is Figure 1 a three-dimensional schematic diagram of the sample processing device in hiding the housing and the sample storage component;

[0039] Figure 3 is Figure 2 a top view of the sample processing device in;

[0040] Figure 4 is Figure 1 a three-dimensional schematic diagram of the first material transfer component in;

[0041] Figure 5 is Figure 1 a three-dimensional schematic diagram of the second material transfer component in;

[0042] Figure 6 is Figure 2 a top view of the sample processing device in hiding the first support, where the first support is in the first position;

[0043] Figure 7 is Figure 2 a top view of the sample processing device in hiding the first support, where the first support is in the second position;

[0044] Figure 8 is Figure 1Side view of a cooperation state between the first lifting component and the second material transfer component;

[0045] Figure 9 For Figure 1 Side view of another cooperation state between the first lifting component and the second material transfer component;

[0046] Figure 10 For Figure 1 Side view of another cooperation state between the first lifting component and the second material transfer component;

[0047] Figure 11 Schematic diagram of sample transfer by the transfer component and the lifting component;

[0048] Figure 12 For Figure 1 Stereoscopic schematic diagram of the connection between the acid tank and the first heating device;

[0049] Figure 13 For Figure 1 Stereoscopic schematic diagram of the sample storage component.

[0050] Reference numerals:

[0051] Frame assembly 100, acid tank 110, cleaning tank 120, operation table 130, housing 140, opening 141, air extraction port 142, treatment area 101;

[0052] Feeding assembly 200;

[0053] Discharging assembly 300;

[0054] First material transfer assembly 400, first bracket 410, first material transfer component 420, second material transfer component 430, third material transfer component 440, first power device 450;

[0055] Second material transfer assembly 500, second bracket 510, first lifting component 520, second lifting component 530;

[0056] First heating device 600;

[0057] Sample storage component 700, storage rack 710, storage position 720;

[0058] Sample 800;

[0059] Connecting piece 900, inclined section 910, connecting section 920, hanging part 930;

[0060] Feeding station A, acid etching station B, cleaning station C, discharging station D. Detailed implementation manner

[0061] Embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention and should not be construed as limiting the present invention.

[0062] In the description of the present invention, it should be understood that the orientation descriptions, such as upper, lower, front, rear, left, right, etc., refer to the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. This is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as limiting the present invention.

[0063] In the description of the present invention, the meaning of "several" is more than one, the meaning of "multiple" is more than two, and understandings such as "greater than", "less than", "exceeding", etc. do not include the recited number, and understandings such as "above", "below", "within", etc. include the recited number. If there is a description of "first", "second", etc., it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0064] In the description of the present invention, unless otherwise clearly defined, terms such as "set", "installed", "connected", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific content of the technical solution.

[0065] In the description of the present invention, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0066] In the related art, the method of acid etching is usually adopted to remove the encapsulation body outside the encapsulated device. The acid solution used for acid etching is commonly a mixed solution prepared from sulfuric acid and nitric acid, which has extremely high corrosiveness. In order to reduce the operation risk of experimental personnel, there are automated devices on the market that can transfer samples in the acid etching process through mechanical devices such as manipulators. However, the highly corrosive acid solution will also damage the manipulator, resulting in frequent maintenance or replacement of the manipulator, increasing the later maintenance cost. If the manipulator is made of corrosion-resistant materials, the manufacturing cost needs to be increased. Based on the above problems, the present invention proposes a sample processing device. By setting up a first material transfer component and a second material transfer component for transfer, the contact between the manipulator and the acid solution can be reduced, and the service life of the manipulator can be extended. The following will be specifically described with reference to the accompanying drawings.

[0067] Referring to Figures 1 to 3 , the sample processing device includes a frame assembly 100 and a loading assembly 200, a unloading assembly 300, a first material transfer assembly 400 and a second material transfer assembly 500 connected to the frame assembly 100. The loading assembly 200, the unloading assembly 300, the first material transfer assembly 400 and the second material transfer assembly 500 all have moving parts that can move actively to realize the transfer of samples.

[0068] Referring to Figure 3 , the frame assembly 100 includes a processing area 101. The sample to be processed can perform corresponding processing in the processing area 101. It should be noted that the processing referred to in the present invention can include a single processing step or multiple processing steps. In either case, the processing of the sample at least includes an acid etching step. In some other embodiments, in addition to the acid etching step, other steps such as cleaning and drying can also be included. Therefore, when describing the processing of the sample or the sample to be processed, without special instructions, it can be understood as acid etching the sample, or it can be understood as cleaning or drying the sample, etc. In addition, the processed sample refers to the sample that has completed all the processing links in the processing area 101 and can be unloaded by the unloading assembly 300.

[0069] It should also be noted that the aforementioned processing area 101 is a virtual area divided to define its function. Devices for realizing corresponding processing functions are arranged inside the processing area 101, and the shape and size of the processing area 101 are not limited. Specifically, at least an acid tank 110 is arranged in the processing area 101. The acid tank 110 is used to store the acid solution for acid etching and is made of corrosion-resistant materials. Taking the illustration as an example, the top of the acid tank 110 has an opening for the sample to enter and exit the acid tank 110.

[0070] The feeding component 200, the discharging component 300, the first material transferring component 400 and the second material transferring component 500 respectively undertake different functions. Among them, the feeding component 200 is used to obtain the sample to be processed and transfer the sample to be processed (it should be noted that the sample to be processed here specifically refers to the sample to be acid-etched) to the first material transferring component 400. The first material transferring component 400 can transfer the sample to be processed to the second material transferring component 500. The second material transferring component 500 can transfer the sample to be processed to the processing area 101 to perform corresponding processing, and can transfer the processed sample to the first material transferring component 400. The discharging component 300 can transfer the processed sample from the first material transferring component 400.

[0071] Based on the above, the sample processing device is configured to be able to complete the following operations: First, transfer the sample to be processed to the first material transferring component 400 through the feeding component 200. The sample to be processed is transferred from the first material transferring component 400 to the second material transferring component 500, and then transferred by the second material transferring component 500 to the processing area 101 for acid etching and other processing. The processed sample is then transferred from the second material transferring component 500 to the first material transferring component 400 and finally removed by the discharging component 300. It can be understood that the second material transferring component 500 needs to drive the sample for acid etching, so the probability of it contacting the acid solution is the highest. In this embodiment, by setting the first material transferring component 400 to receive the sample to be processed from the feeding component 200 and output the processed sample to the discharging component 300, the feeding component 200 and the discharging component 300 do not directly contact the second material transferring component 500, and even less directly contact the acid solution in the acid tank 110, realizing the spatial isolation of the feeding component 200, the discharging component 300 and the acid solution, which can improve the problem of corrosion and damage of the feeding component 200 and the discharging component 300, extend the service life of the feeding component 200 and the discharging component 300, reduce the maintenance cost. At the same time, the feeding component 200 and the discharging component 300 do not need to be made of corrosion-resistant materials, which can also reduce the production cost of the automation equipment.

[0072] In some embodiments, referring to Figure 2 , in the processing area 101, a cleaning tank 120 for storing cleaning liquid is further provided. The sample after acid etching can enter the cleaning tank 120 for cleaning, so as to remove the acid solution remaining on the sample. The cleaning liquid can be water or a reagent such as acetone. In this embodiment, the cleaning tank 120 and the acid tank 110 are arranged along the first horizontal direction, and the first horizontal direction can be the direction from left to right in the figure.

[0073] When the acid tank 110 and the cleaning tank 120 are provided, for the convenience of description, referring to Figure 3, the area corresponding to the loading component 200 can be defined as the loading station A, the area corresponding to the acid tank 110 can be defined as the acid etching station B, the area corresponding to the cleaning tank 120 can be defined as the cleaning station C, and the area corresponding to the unloading component 300 can be defined as the unloading station D. The loading station A, the acid etching station B, the cleaning station C, and the unloading station D are arranged in sequence along the first horizontal direction. Among them, the loading component 200 can transfer the sample to be processed to the first transfer component 400 at the loading station A, and the second transfer component 500 can perform acid etching and cleaning of the sample at the acid etching station B and the cleaning station C respectively. The unloading component can transfer the processed sample from the first transfer component 400 at the unloading station D.

[0074] In this embodiment, the first transfer component 400 can sequentially carry the sample to be acid-etched, the sample to be cleaned, and the processed sample along the first horizontal direction, and can synchronously drive the sample to be acid-etched, the sample to be cleaned, and the processed sample to move along the first horizontal direction, so that the sample to be acid-etched moves from the loading station A to the acid etching station B, the sample to be cleaned moves from the acid etching station B to the cleaning station C, and the processed sample moves from the cleaning station C to the unloading station D. That is, in addition to being able to realize the transfer of the sample between the loading component 200 and the second transfer component 500, and the transfer between the unloading component 300 and the second transfer component 500, the first transfer component 400 can also synchronously transport the samples in different processing stages between different stations.

[0075] As a specific implementation manner for realizing the above solution, first, the first transfer component 400 and the second transfer component 500 are introduced respectively. Refer to Figure 4 , the first transfer component 400 includes a first bracket 410 and a first power device 450. The first bracket 410 is connected to the output end of the first power device 450, so that it can be driven by the first power device 450 to move along the first horizontal direction. The first power device 450 can be a power device mainly composed of a motor and a synchronous belt, or a power device mainly composed of a motor and a lead screw, or a cylinder.

[0076] The first material transfer component 400 further includes a first material transfer member 420, a second material transfer member 430, and a third material transfer member 440 that are sequentially connected to the first bracket 410 along the first horizontal direction. Among them, the first material transfer member 420 is used to carry the sample to be etched, the second material transfer member 430 is used to carry the sample to be cleaned, and the third material transfer member 440 is used to carry the processed sample. The structures of the first material transfer member 420, the second material transfer member 430, and the third material transfer member 440 may be the same or different. Taking the illustration as an example, the first material transfer member 420, the second material transfer member 430, and the third material transfer member 440 all include a hook structure. The samples 800 to be processed can be first connected in series by corrosion-resistant ropes, and then the ropes are hung on the hooks. In some other embodiments, the samples 800 to be processed can also be placed in a box made of corrosion-resistant material with through holes in the box wall, such as a quartz box, and then the box is hung on the hook.

[0077] Referring to Figure 5 , the second material transfer component 500 includes a second bracket 510 and a second power device (not shown). The second bracket 510 is connected to the output end of the second power device, so that it can be driven by the second power device to move in the vertical direction. The second power device can be a power device mainly composed of a motor and a synchronous belt, or a power device mainly composed of a motor and a lead screw, or a cylinder.

[0078] The second material transfer component 500 further includes a first lifting member 520 and a second lifting member 530 that are sequentially connected to the second bracket 510 along the first horizontal direction. Referring to Figure 6 , Figure 7 , the first lifting member 520 is located at the etching station B and is used to carry and drive the sample to be etched into the acid tank 110. The second lifting member 530 is located at the cleaning station C and is used to carry and drive the sample to be cleaned into the cleaning tank 120. Similarly, the first lifting member 520 and the second lifting member 530 both include a hook structure.

[0079] The following describes the movement process of this embodiment in combination with the structures of the first material transfer component 400 and the second material transfer component 500:

[0080] The first bracket 410 can reciprocate between a first position and a second position under the drive of the first power device 450. Referring to Figure 6, when the first bracket 410 is in the first position, the first material transfer member 420 is located at the loading station A, the second material transfer member 430 is located at the acid etching station B, and the third material transfer member 440 is located at the cleaning station C. At this time, the loading assembly 200 can transfer the sample to be acid-etched to the first material transfer member 420, the first lifting member 520 can transfer the sample to be cleaned to the second material transfer member 430, and the second lifting member 530 can transfer the processed sample to the third material transfer member 440. That is, the first material transfer assembly 400 carries the sample to be acid-etched, the sample to be cleaned, and the processed sample in sequence along the first horizontal direction at this time.

[0081] When the first bracket 410 moves along the first horizontal direction to the second position, the first material transfer member 420 is located at the acid etching station B, the second material transfer member 430 is located at the cleaning station C, and the third material transfer member 440 is located at the unloading station D. At this time, the first material transfer member 420 can transfer the sample to be acid-etched to the first lifting member 520 so that the first lifting member 520 drives the sample to be acid-etched into the acid tank 110 for acid etching, the second material transfer member 430 can transfer the sample to be cleaned to the second lifting member 530 so that the second lifting member 530 drives the sample to be cleaned into the cleaning tank 120 for cleaning, and the unloading assembly 300 can transfer the processed sample from the third material transfer member 440.

[0082] Based on the above, by the linear reciprocating movement of the first bracket 410 between the first position and the second position, the samples in different processing stages can be continuously transferred to the corresponding processing stations for processing. The transfer efficiency is high, there is no need to set multiple sets of power devices, the structure is simple, and it helps to reduce the production cost of the equipment.

[0083] In some embodiments, the first material transfer assembly 400 and the second material transfer assembly 500 realize the exchange of samples through the movement of the moving parts in the vertical direction. Specifically, the first material transfer assembly 400 includes a material transfer member that can move between the third position and the fourth position along the second horizontal direction. The second horizontal direction intersects with the first horizontal direction, and more specifically, they are perpendicular to each other. The second material transfer assembly 500 includes a lifting member that can move between the fifth position and the sixth position along the vertical direction. It should be noted that the material transfer member here can be any one of the first material transfer member 420, the second material transfer member 430, and the third material transfer member 440 in the foregoing embodiments, and the lifting member can be any one of the first lifting member 520 and the second lifting member 530 in the foregoing embodiments.

[0084] Taking the figure as an example, the first material moving assembly 400 further includes a third power device, which is arranged corresponding to each material moving component and is used to drive the material moving component to move between the third position and the fourth position, that is, each material moving component can follow the first bracket 410 to move between the first position and the second position as a whole, and at the same time, the material moving component can be driven by the third power device to move independently between the third position and the fourth position. The third power device can be a cylinder.

[0085] Based on the above structure, Figure 8 The second material moving component 430 and the first lifting component 520 are used as an example to illustrate. Figure 8 When the second material moving component 430 is in the third position, the second material moving component 430 and the first lifting component 520 are offset in the horizontal direction (the left and right direction in the figure), and the first lifting component 520 can drive the sample to move freely in the vertical direction, so that the sample can be sent into the acid tank 110 for acid etching, and the sample after acid etching can be driven out of the acid tank 110.

[0086] Reference Figure 9 When the second material moving component 430 is in the fourth position, the first lifting component 520 carries the sample that has been acid-etched and is waiting to be cleaned, and the first lifting component 520 is located in the fifth position above the second material moving component 430, as the first lifting component 520 moves from top to bottom, the first lifting component 520 passes over the second material moving component 430 in the vertical direction, and the sample carried on the first lifting component 520 is transferred to the second material moving component 430.

[0087] Reference Figure 10 When the second material moving component 430 is in the fourth position, the second material moving component 430 carries the sample to be acid-etched, and the first lifting component 520 is located at the sixth position below the second material moving component 430, as the first lifting component 520 moves from bottom to top, the first lifting component 520 passes over the second material moving component 430 in the vertical direction, and the sample carried on the second material moving component 430 is transferred to the first lifting component 520.

[0088] In this embodiment, the lifting and lowering of the lifting component can enable the sample to enter and exit the acid tank 110 or the cleaning tank 120 on the one hand, and can also realize the transfer of the sample between the material moving component and the lifting component on the other hand. For the lifting component, it only needs to move in the vertical direction, so only one power device is required, which can simplify the structure of the second material moving component 500 and the control of the lifting component.

[0089] The following combination Figure 11Describe a specific solution for sample transfer between the transfer component and the lifting component. As shown in the figure, taking the second material transfer component 430 and the first lifting component 520 as examples, multiple samples are connected by a connecting piece 900. The connecting piece 900 has a certain strength and can maintain a certain shape. Taking the example shown in the figure, the connecting piece 900 includes an inclined section 910 and a connecting section 920. Both the inclined section 910 and the connecting section 920 are provided in two. The tops of the two inclined sections 910 are connected to form a hanging portion 930. The connecting section 920 is connected to the lower end of the inclined section 910. The sample is fixed on the connecting section 920 by welding or other means. Both the second material transfer component 430 and the first lifting component 520 include hooks. The connecting piece 900 can be hung on the hook of the second material transfer component 430 or the hook of the first lifting component 520 through the hanging portion 930.

[0090] The hooks of the second material transfer component 430 and the hooks of the first lifting component 520 are horizontally staggered from each other to avoid interference between the two. At the same time, the connecting piece 900 is configured such that when the second material transfer component 430 hangs the connecting piece 900, there is a set distance between the side of the first lifting component 520 facing away from the second material transfer component 430 and the sample, ensuring that the first lifting component 520 does not touch the sample; when the first lifting component 520 hangs the connecting piece 900, there is a set distance between the side of the second material transfer component 430 facing away from the first lifting component 520 and the sample, ensuring that the second material transfer component 430 does not touch the sample; in this way, the probability of the second material transfer component 430 and the first lifting component 520 coming into contact with the acid solution can be reduced.

[0091] Figure 11 Among them, the connecting piece 900 is hung on the second material transfer component 430, and the second material transfer component 430 is located at the fourth position. The first lifting component 520 is located on one side of the second material transfer component 430 and at the sixth position. As the first lifting component 520 moves upward, the hook of the first lifting component 520 will contact the inclined section 910 on one side of the connecting piece 900. As the first lifting component 520 further rises, the second material transfer component 430 is separated from the connecting piece 900, and the connecting piece 900 slides relative to the first lifting component 520, so that the hook of the first lifting component 520 finally hangs on the hanging portion 930 of the connecting piece 900, thus completing the transfer of the sample from the second material transfer component 430 to the first lifting component 520.

[0092] Combined with the foregoing structure, the following refers to Figure 6 、 Figure 7 Describe the working process in a specific embodiment of the present invention:

[0093] 1. The first bracket 410 is in the first position, and the feeding assembly 200 transfers the samples to be etched (such asFigure 6 as shown

[0094] Second, the first bracket 410 moves along the first horizontal direction to the second position, the first material transfer component 420 moves along the second horizontal direction to the fourth position, and the first lifting component 520 moves upward from the sixth position to the fifth position, where the fifth position is higher than the fourth position, so as to transfer the sample to be acid-etched from the first material transfer component 420 (such as Figure 7 , Figure 10 as shown

[0095] Third, the first material transfer component 420 resets to the third position, the first bracket 410 resets to the first position, and the first lifting component 520 moves downward from the fifth position to the sixth position, so as to immerse the sample to be acid-etched in the acid solution for acid etching (such as Figure 6 , Figure 8 as shown

[0096] Fourth, the loading component 200 transfers the sample to be acid-etched to the first material transfer component 420 again at the loading station A. At the same time, after the first lifting component 520 waits for the sample in the acid tank 110 to be processed, it drives the sample (the sample to be cleaned) upward to the fifth position, then the second material transfer component 430 moves to the fourth position, and the first lifting component 520 moves downward to the sixth position again, so as to transfer the sample to be cleaned to the second material transfer component 430 (such as Figure 6 , Figure 9 as shown

[0097] Fifth, the second material transfer component 430 resets to the third position, the first bracket 410 moves to the second position again, and the first material transfer component 420 and the first lifting component 520 transfer the sample to be acid-etched from the first material transfer component 420 to the first lifting component 520 in the manner of step two. During this process, at the same time, the second material transfer component 430 moves to the fourth position, and the second lifting component 530 moves upward from the sixth position to the fifth position, so as to transfer the sample to be cleaned from the second material transfer component 430 (such as Figure 7 , Figure 10 as shown

[0098] Sixth, the first material transfer component 420 and the second material transfer component 430 reset to the third position, the first bracket 410 resets to the first position, the first lifting component 520 moves downward from the fifth position to the sixth position, so as to immerse the sample to be acid-etched in the acid solution for acid etching, and the second lifting component 530 moves downward from the fifth position to the sixth position, so as to immerse the sample to be cleaned in the cleaning solution for cleaning (such as Figure 6 , Figure 8 as shown

[0099] VII. The loading component 200 transfers the sample to be etched to the first material transfer component 420 again at the loading station A. The first lifting component 520 and the second material transfer component 430 transfer the sample to be cleaned from the first lifting component 520 to the second material transfer component 430 in the manner described in Step IV. Generally, the cleaning time of the sample is shorter than the etching time. After the sample in the acid tank 110 is processed, the sample in the cleaning tank 120 is also processed. As the first lifting component 520 rises, the second lifting component 530 simultaneously drives the sample (the cleaned sample) upward to the fifth position. Then, the third material transfer component 440 moves to the fourth position, and the second lifting component 530 moves downward to the sixth position, thereby transferring the processed sample to the third material transfer component 440 (as shown in Figure 6 , Figure 9 ).

[0100] VIII. The first material transfer component 420, the second material transfer component 430, and the third material transfer component 440 return to the third position. The first bracket 410 moves to the second position again. The first material transfer component 420 and the first lifting component 520 transfer the sample to be etched from the first material transfer component 420 to the first lifting component 520 in the manner described in Step II. The second material transfer component 430 and the second lifting component 530 transfer the sample to be cleaned from the second material transfer component 530 to the second lifting component 530 in the manner described in Step V. The unloading component 300 then transfers the processed sample from the third material transfer component 440 at the unloading station D.

[0101] IX. The first material transfer component 420, the second material transfer component 430, and the third material transfer component 440 return to the third position. The first bracket 410 returns to the first position. By repeating the above Steps VII and VIII, continuous operation can be achieved.

[0102] In some embodiments, the first material transfer assembly 400 includes a first bracket 410 and a material transfer component. The material transfer component can be any one of the aforementioned first material transfer component 420, second material transfer component 430, and third material transfer component 440. The material transfer component is made of a corrosion-resistant material and is detachably connected to the first bracket 410. Specifically, the material transfer component can be detachably connected to the first bracket 410 by means of threaded fasteners or the like. The corrosion-resistant material can be selected as titanium alloy or the like.

[0103] In some embodiments, the second material transfer assembly 500 includes a second bracket 510 and a lifting component. The lifting component can be any one of the aforementioned first lifting component 520 and second lifting component 530. The lifting component is made of a corrosion-resistant material and is detachably connected to the second bracket 510. Specifically, the lifting component can be detachably connected to the second bracket 510 by means of threaded fasteners or the like. The corrosion-resistant material can be selected as titanium alloy or the like.

[0104] It should be noted that, on the one hand, the above embodiments extend the service life of the material transfer components and the lifting components through corrosion-resistant materials, and on the other hand, they can be replaced when the material transfer components and the lifting components are damaged. It should also be noted that compared with the feeding assembly and the discharging assembly with higher costs, the material transfer components and the lifting components have simple structures, smaller volumes, and lower replacement costs, so it is also beneficial to reduce the maintenance cost of the automated equipment.

[0105] In some embodiments, both the feeding assembly 200 and the discharging assembly include multi-axis manipulators. The multi-axis manipulators have high flexibility and can achieve free movement of samples, but their costs are relatively high. Frequent maintenance or replacement will significantly increase the costs. Therefore, in the present invention, the first material transfer assembly 400 and the second material transfer assembly 500 are provided for material transfer, so that the automated equipment can not only use the manipulator for flexible material transfer but also control the costs.

[0106] In some embodiments, the sample processing equipment can adjust the etching time of different batches of samples. Specifically, the second material transfer assembly can drive multiple groups of samples to be etched to sequentially complete etching through the acid tank 110 (it should be noted that each group of samples includes at least one sample). That is, without replacing the acid solution, after the previous group of samples is etched, the next group of samples is put in for etching, and the etching time of the next group of samples is longer than that of the previous group of samples. In this way, even if the acid solution tends to be saturated and its etching ability decreases with the increase in the number of processing times, the etching effect can be ensured by extending the etching time.

[0107] It should be noted that different soaking times of different batches of samples can be pre-input into the controller of the sample processing equipment, and the controller controls the first lifting component 520 based on the pre-input instructions. Or sensors can be set to detect the etching ability of the acid solution in real time (such as detecting the ion content in the acid solution), and the controller controls the first lifting component 520 based on the information detected in real time.

[0108] The following is an exemplary illustration through a set of data. The volume of the acid solution is 250 ml, the total number of samples is 40, which are divided into 4 groups, with 10 in each group. Among them, the soaking time of the first group is 8 minutes, the soaking time of the second group is 9 minutes, the soaking time of the third group is 11 minutes, and the soaking time of the fourth group is 15 minutes. It can be seen that as the etching ability of the acid solution decreases, the soaking time of each group is correspondingly extended.

[0109] In some embodiments, the sample processing device further includes a first heating device 600. The first heating device 600 is thermally connected to the acid tank 110 and is used to heat the acid solution in the acid tank 110. When the sample processing device is in the standby state, the first heating device 600 can heat the acid solution in the acid tank 110 to a first temperature. When acid etching of the sample is required, the first heating device 600 then heats the acid solution in the acid tank 110 to a second temperature, where the second temperature is greater than the first temperature. That is, the first heating device 600 in this embodiment can preheat the acid solution, so that the temperature of the acid solution can be quickly increased to the working temperature during use, reducing the waiting time.

[0110] In some embodiments, referring to Figure 12 , the sample processing device further includes a first heating device 600. The first heating device 600 is thermally connected to the acid tank 110 and is used to heat the acid solution in the acid tank 110. The first heating device 600 can heat at least two sides of the acid tank 110, thereby ensuring the heating rate and temperature uniformity. For example, the first heating device 600 can heat the bottom and each side wall of the acid tank 110.

[0111] In some embodiments, the sample processing device further includes a second heating device (not shown) and a cleaning tank 120. The cleaning tank 120 is used to store the cleaning solution. The second heating device is used to heat the cleaning solution in the cleaning tank 120. The heated cleaning solution can accelerate the dissolution of the residual acid solution and improve the cleaning efficiency. In addition, the sample processing device can also be provided with an ultrasonic device. The ultrasonic device is connected to the cleaning tank 120 and can perform ultrasonic cleaning on the sample. Cooperating with the heated cleaning solution can further improve the cleaning efficiency and quality.

[0112] The sample processing device further includes a sample storage component 700. The sample storage component 700 is used to store the samples to be processed. The loading component 200 can obtain the samples to be processed from the sample storage component 700. Alternatively, the sample storage component 700 can also be used to store the processed samples. The unloading component 300 can transfer the processed samples to the sample storage component 700 to Figure 1 Taking the example shown, the sample processing device includes two sample storage components 700. One of them is used to store the samples to be processed, and the other is used to store the processed samples.

[0113] In some embodiments, the sample storage assembly 700 includes a storage rack 710 and rollers connected to the storage rack 710. The storage rack 710 can be moved through the rollers, thereby enabling flexible movement of the sample storage assembly 700. For example, the sample handler can move the sample storage assembly 700 to a position convenient for operation to place the sample to be processed or take away the processed sample, and then reset the sample storage assembly 700 to the working position. In addition, the sample storage assembly 700 can be used as a transfer device to transfer samples between different positions.

[0114] In some embodiments, the sample storage assembly 700 includes a plurality of storage positions 720 for storing samples to be processed. Referring to Figure 13 , the storage positions 720 can be hooks or support members provided on the storage rack 710, and the storage positions 720 can be distributed in an array as shown in the figure.

[0115] The sample processing device of this embodiment further includes a controller. The controller can record the sample information corresponding to each storage position 720 and control the feeding assembly 200 to obtain the sample to be processed from the target storage position 720 based on the sample information. That is, this embodiment is applicable to the situation where it is difficult to set barcodes on the samples or it is difficult to identify the barcodes on the samples. The experimenter stores a group of samples in a certain storage position 720, then inputs the sample information of this group of samples into the device, and associates the sample information of this group of samples with this storage position 720. In this way, the controller can obtain the sample information of this group of samples, thereby controlling the feeding assembly 200 to obtain the sample to be processed from the target storage position.

[0116] In some embodiments, the sample storage assembly 700 includes a plurality of storage positions 720 for storing samples to be processed. Referring to Figure 13 , the storage positions 720 can be hooks or support members provided on the storage rack 710, and the storage positions 720 can be distributed in an array as shown in the figure.

[0117] The sample processing device of this embodiment further includes a controller and an identification device. The identification device is used to obtain the sample information of the sample to be processed. That is, a barcode is set on the sample of this embodiment, and the identification device can be a barcode scanner, which is installed on the storage rack 710 or the feeding assembly 200. When the identification device identifies the sample information of the sample, the controller can control the feeding assembly 200 to obtain the sample to be processed from the target storage position based on the sample information.

[0118] Referring to Figure 1 、 Figure 2, the frame assembly 100 includes an operating table 130 and a housing 140. The operating table 130 has the aforementioned processing area 101. The housing 140 is connected to the operating table 130 and has an opening 141. Among them, in some embodiments, the frame assembly 100 further includes a soft curtain (not shown). The soft curtain is connected to the housing 140 and closes the opening 141. At least the processing area 101 is located inside the housing 140, so as to reduce the escape of acid vapor. In some specific embodiments, the loading assembly 200 and the unloading assembly 300 are arranged inside the housing 140. The loading assembly 200 can pass through the soft curtain to obtain the sample to be processed from the outside of the housing 140, and the unloading assembly 300 can transport the processed sample through the soft curtain to the outside of the housing 140. In some other specific embodiments, the loading assembly 200 and the unloading assembly 300 can also be arranged outside the housing 140. After the loading assembly 200 obtains the sample to be processed, it can pass through the soft curtain to send it into the housing 140, and the unloading assembly 300 can pass through the soft curtain to obtain the processed sample from inside the housing 140.

[0119] In this embodiment, by setting the soft curtain, it can not only reduce the escape of acid vapor, but also does not hinder the loading assembly 200 and the unloading assembly 300 from performing the corresponding material transfer operations, and the structure is simple.

[0120] In some other embodiments, the sample processing device further includes a sample storage assembly 700. The sample storage assembly 700 includes a storage rack 710 and rollers connected to the storage rack 710. The storage rack 710 is used to store the samples to be processed, and the storage rack 710 can move through the rollers. The experimenter can drive the storage rack 710 to separate from the housing 140, put the samples to be processed into the storage rack 710, and then move the storage rack to dock with the housing 140 and position it at a set position to cover the opening 141. For example, the storage rack 710 can be set as a housing structure with side wall openings. The samples to be processed can be placed on the inner wall of the storage rack 710. When the storage rack 710 is docked with the housing, the storage rack 710 as a whole covers the opening 141, and the side wall opening of the storage rack 710 is kept in communication with the opening 141.

[0121] In this embodiment, at least the loading assembly 200 and the processing area 101 are located inside the housing 140. When the storage rack 710 covers the opening 141, the loading assembly 200 can obtain the samples to be processed from the storage rack 710 through the opening 141. In this way, it can also play a role in reducing the escape of acid liquid.

[0122] In some other embodiments, the sample processing device further includes a sample storage component 700. The sample storage component 700 includes a storage rack 710 and rollers connected to the storage rack 710. The storage rack 710 is used to store the processed samples, and the storage rack 710 can move through the rollers. The experimenter can drive the storage rack 710 to separate from the housing 140, take away the processed samples from the storage rack 710, and then move the storage rack to dock with the housing 140 and position it at a set position to cover the opening 141. For example, the storage rack 710 can be set as a housing structure with sidewall openings. The processed samples can be placed on the inner wall of the storage rack 710. When the storage rack 710 docks with the housing, the storage rack 710 as a whole covers the opening 141, and the sidewall openings of the storage rack 710 are kept in communication with the opening 141.

[0123] In this embodiment, at least the feeding component 200 and the processing area 101 are located inside the housing 140. When the storage rack 710 covers the opening 141, the discharging component 300 can put the processed samples into the storage rack 710 through the opening 141. In this way, it can also play a role in reducing the escape of acid solution.

[0124] In some other embodiments, the housing 140 is further provided with an air extraction port 142, which is used to connect with a negative pressure source, so as to extract the acid vapor in the housing 140 through the negative pressure source and prevent the acid vapor from condensing to form condensation on the inner wall of the housing 140. It should be noted that when the housing 140 adopts the foregoing embodiment to form a relatively sealed space, combined with the suction effect of the negative pressure source, the escape of acid vapor can be basically eliminated, and at the same time, it can also prevent the experimenter from accidentally contacting the acid solution, thereby further improving safety.

[0125] In some embodiments, the sample processing device further includes a plurality of sedimentation tanks, which are interconnected through communication holes between adjacent sedimentation tanks. Among them, the communication holes for the sedimentation tanks to communicate with each other are located in the upper part of the sedimentation tanks. The acid tank 110 is connected to the first sedimentation tank through a pipeline. When the acid solution in the acid tank 110 is saturated, it can enter the first sedimentation tank through the pipeline. After the liquid level in the first sedimentation tank reaches the communication hole, it will flow into the next sedimentation tank. In this way, the solid substances in the acid solution (such as the crystals generated after the encapsulation material dissolved in the acid solution cools down) can precipitate at the bottom of the sedimentation tank, so that the precipitate can be treated separately. Compared with the method of directly pouring the acid solution into the sewer, the problem of crystal blockage of the sewer can be avoided.

[0126] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made without departing from the spirit of the present invention within the knowledge scope of those of ordinary skill in the art. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. Sample processing equipment, characterized in that, it includes a frame assembly, a feeding assembly, a discharging assembly, a first material transferring assembly and a second material transferring assembly connected to the frame assembly. The frame assembly has a processing area, and at least an acid tank for storing acid solution is provided in the processing area; wherein, the sample processing equipment is configured as follows: the feeding assembly is used to transfer the sample to be processed to the first material transferring assembly, and the sample to be processed can be transferred to the second material transferring assembly through the first material transferring assembly, and is transferred to the processing area through the second material transferring assembly for processing. The processed sample can be transferred to the first material transferring assembly through the second material transferring assembly, and the discharging assembly is used to transfer the processed sample from the first material transferring assembly; a cleaning tank for storing cleaning solution is further provided in the processing area, and the acid tank and the cleaning tank are arranged along a first horizontal direction; the first material transferring assembly is configured as follows: it can sequentially carry the sample to be acid-etched, the sample to be cleaned and the processed sample along the first horizontal direction, and can synchronously drive the sample to be acid-etched, the sample to be cleaned and the processed sample to move along the first horizontal direction, so that the sample to be acid-etched moves from the loading station corresponding to the feeding assembly to the acid-etching station corresponding to the acid tank, the sample to be cleaned moves from the acid-etching station to the cleaning station corresponding to the cleaning tank, and the processed sample moves from the cleaning station to the discharging station corresponding to the discharging assembly; the first material transferring assembly includes a first bracket, and a first material transferring part, a second material transferring part and a third material transferring part sequentially connected to the first bracket along the first horizontal direction. The first material transferring part is used to carry the sample to be acid-etched, the second material transferring part is used to carry the sample to be cleaned, and the third material transferring part is used to carry the processed sample; the second material transferring assembly includes a second bracket, and a first lifting part and a second lifting part sequentially connected to the second bracket along the first horizontal direction. The first lifting part is located at the acid-etching station and is used to carry and drive the sample to be acid-etched into the acid tank, and the second lifting part is located at the cleaning station and is used to carry and drive the sample to be cleaned into the cleaning tank.

2. The sample processing equipment according to claim 1, characterized in that, The sample processing device is configured such that: the first support can move between a first position and a second position. When the first support is in the first position, the first material transfer member, the second material transfer member, and the third material transfer member are respectively located at the loading station, the acid etching station, and the cleaning station, and are used to transfer the sample to be acid-etched from the loading assembly to the first material transfer member, transfer the sample to be cleaned from the first lifting member to the second material transfer member, and transfer the processed sample from the second lifting member to the third material transfer member; when the first support is in the second position, the first material transfer member, the second material transfer member, and the third material transfer member are respectively located at the acid etching station, the cleaning station, and the unloading station, and are used to transfer the sample to be acid-etched from the first material transfer member to the first lifting member, transfer the sample to be cleaned from the second material transfer member to the second lifting member, and transfer the processed sample from the third material transfer member to the unloading assembly.

3. The sample processing device according to claim 1, wherein, the first material transfer assembly includes a material transfer member capable of moving between a third position and a fourth position along a second horizontal direction, and the second material transfer assembly includes a lifting member capable of moving in the vertical direction; the sample processing device is configured such that: when the material transfer member is in the third position, the lifting member can carry the sample and move in the vertical direction; when the material transfer member is in the fourth position and the lifting member moves upward from the bottom, it can transfer the sample carried on the material transfer member to the lifting member; when the material transfer member is in the fourth position and the lifting member moves downward from the top, it can transfer the sample carried on the lifting member to the material transfer member.

4. The sample processing device according to claim 1, wherein, the sample processing device includes at least one of the following solutions: the first material transfer assembly includes a first support and a material transfer member, and the material transfer member is made of a corrosion-resistant material and is detachably connected to the first support; the second material transfer assembly includes a second support and a lifting member, and the lifting member is made of a corrosion-resistant material and is detachably connected to the second support; the loading assembly includes a multi-axis manipulator; the unloading assembly includes a multi-axis manipulator.

5. The sample processing device according to claim 1, wherein, the sample processing device is configured such that: the second material transfer assembly can drive multiple groups of samples to be acid-etched to sequentially complete acid etching through the acid tank, and the acid etching time of the latter group of samples is longer than that of the former group of samples.

6. The sample processing device according to claim 1, wherein, the sample processing device includes at least one of the following solutions: The sample processing device further includes a first heating device, which is thermally connected to the acid tank, and the first heating device is configured to: heat the acid liquid in the acid tank to a first temperature, and heat the acid liquid in the acid tank to a second temperature when acid etching the sample, where the second temperature is greater than the first temperature; The sample processing device further includes a second heating device and a cleaning tank. The cleaning tank is used to store the cleaning liquid, and the second heating device is used to heat the cleaning liquid in the cleaning tank.

7. The sample processing device according to claim 1, wherein, the sample processing device further includes a sample storage component, which is used to store the samples to be processed. The loading component can obtain the samples to be processed from the sample storage component, or the sample storage component is used to store the processed samples, and the unloading component can transfer the processed samples to the sample storage component. The sample storage component includes at least one of the following solutions: The sample storage component includes a storage rack and rollers connected to the storage rack, and the storage rack can move through the rollers; The sample storage component includes a plurality of storage positions for storing the samples to be processed. The sample processing device further includes a controller, which is configured to record the sample information corresponding to each storage position and control the loading component to obtain the samples to be processed from the target storage position based on the sample information; The sample storage component includes a plurality of storage positions for storing the samples to be processed. The sample processing device further includes a controller and an identification device. The identification device is used to obtain the sample information of the samples to be processed, and the controller is configured to control the loading component to obtain the samples to be processed from the target storage position based on the sample information.

8. The sample processing device according to claim 1, wherein, the frame assembly includes an operating table and a housing. The operating table has the processing area, the housing is connected to the operating table, and the housing has an opening. The frame assembly includes one of the following solutions: The frame assembly further includes a soft curtain, which is connected to the housing and closes the opening. At least the processing area is located inside the housing, and the loading component can drive the samples to be processed to push the soft curtain to enter and exit the housing; The frame assembly further includes a soft curtain, which is connected to the housing and closes the opening. At least the processing area is located inside the housing, and the unloading component can drive the processed samples to push the soft curtain to enter and exit the housing; The sample processing device further includes a sample storage component, which includes a storage rack and rollers connected to the storage rack. The storage rack can move through the rollers and can be positioned at a set position to cover the opening. At least the loading component and the processing area are located inside the housing, and the loading component can obtain the samples to be processed from the storage rack when the storage rack covers the opening; The sample processing device further includes a sample storage component, the sample storage component includes a storage rack and rollers connected to the storage rack, the storage rack can move through the rollers and can be positioned at a set position to cover the opening, at least the blanking component and the processing area are located inside the housing, and the blanking component can transfer the processed sample to the storage rack when the storage rack covers the opening; The housing has an air extraction port, and the air extraction port is used to connect to a negative pressure source.

9. The sample processing device according to claim 1, characterized in that the sample processing device further includes a plurality of sedimentation tanks, the plurality of sedimentation tanks are interconnected for the acid solution to flow sequentially, and the acid tank is communicated with the first sedimentation tank.

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