Electrical testing apparatus and method of electrical testing

Abstract

An electrical testing apparatus and an electrical testing method thereof are disclosed. The electrical testing apparatus includes a main body, a first flexible substrate, a second flexible substrate, a plurality of pressure sensing elements, and a plurality of metal contact pads. The first flexible substrate includes a first surface and a second surface opposite to the first surface. The second flexible substrate includes a third surface and a fourth surface opposite to the third surface, and the fourth surface is connected to the main body. The pressure sensing elements are respectively connected between the second surface and the third surface. The metal contact pads are disposed on the first surface and at least partially overlap the pressure sensing elements, and the metal contact pads are configured to abut against a test object.

Description

Technical Field

[0001] This invention relates to an electrical testing device and a corresponding electrical testing method. Background Technology

[0002] With the advancement of technology, various electronic products have become an indispensable part of people's lives, thus creating a huge consumer market.

[0003] In order to win the favor of consumers, in addition to investing resources in research and development to improve product performance and operation, strengthening quality control is undoubtedly an important aspect that manufacturers cannot ignore. Summary of the Invention

[0004] One of the objectives of this invention is to provide an electrical testing device that can improve the reliability of electrical test results.

[0005] According to one embodiment of the present invention, an electrical testing device includes a main body, a first flexible substrate, a second flexible substrate, a plurality of pressure sensing elements, and a plurality of metal contact pads. The first flexible substrate includes opposing first and second surfaces. The second flexible substrate includes opposing third and fourth surfaces, with the fourth surface connected to the main body. The pressure sensing elements are respectively connected between the second and third surfaces. The metal contact pads are disposed on the first surface and at least partially overlap with the pressure sensing elements, and are configured to abut against the test object.

[0006] In one or more embodiments of the present invention, the above-described electrical testing device further includes a support portion and a flexible support element. The support portion is connected to the main body. The flexible support element is connected between the fourth surface and the support portion, and the flexible support element is aligned with the pressure sensing element and is separate from the main body.

[0007] In one or more embodiments of the present invention, the pressure sensing element described above is a resistive pressure sensing element.

[0008] In one or more embodiments of the present invention, the pressure sensing element described above is a capacitive pressure sensing element.

[0009] In one or more embodiments of the present invention, the above-described electrical testing device further includes an adhesive material. The adhesive material is attached between the second surface and the third surface and at least partially surrounds the pressure sensing element.

[0010] In one or more embodiments of the present invention, the electrical testing device further includes a plurality of first lines and a plurality of second lines. The first lines are disposed on the second surface and are electrically connected to corresponding pressure sensing elements. The second lines are disposed on the third surface and are electrically connected to corresponding pressure sensing elements.

[0011] In one or more embodiments of the present invention, the electrical testing device further includes a first protective layer and a second protective layer. A first circuit is at least partially located between the first protective layer and the second surface. A second circuit is at least partially located between the second protective layer and the third surface.

[0012] In one or more embodiments of the present invention, the second lines described above are connected to each other.

[0013] In one or more embodiments of the present invention, the electrical testing device further includes a plurality of third lines and a third protective layer. The third lines are disposed on the first surface and are electrically connected to corresponding metal contact pads. The third lines are at least partially located between the third protective layer and the first surface.

[0014] In one or more embodiments of the present invention, the pressure sensing element described above includes a first sub-pressure sensing element and a second sub-pressure sensing element. The first sub-pressure sensing element is connected to a second surface. The second sub-pressure sensing element is connected to a third surface and aligned with the first sub-pressure sensing element, and a gap is defined between the first sub-pressure sensing element and the second sub-pressure sensing element.

[0015] In one or more embodiments of the present invention, the electrical testing device further includes a plurality of first lines and a plurality of second lines. The first lines are disposed on the second surface and are electrically connected to corresponding pressure sensing elements. The second lines are disposed on the second surface and are electrically connected to corresponding pressure sensing elements, and the second lines are separate from the first lines.

[0016] In one or more embodiments of the present invention, the electrical testing device further includes a first protective layer. The first circuit and the second circuit are at least partially located between the first protective layer and the second surface.

[0017] In one or more embodiments of the present invention, the second lines described above are connected to each other.

[0018] In one or more embodiments of the present invention, the above-described electrical testing device further includes a conductive layer. The conductive layer is disposed between the third surface and the pressure sensing element.

[0019] According to one embodiment of the present invention, an electrical testing device includes a main body, a support portion, a flexible substrate, a plurality of sensing metal pads, a flexible support element, and a plurality of metal contact pads. The support portion is connected to the main body. The flexible substrate includes a first surface and a second surface opposite to each other, the second surface being connected to the main body. The sensing metal pads are connected to the second surface and are separate from the main body. The flexible support element is connected between the sensing metal pads and the support portion, and is also separate from the main body. The metal contact pads are disposed on the first surface and at least partially overlap with the sensing metal pads, the metal contact pads being configured to abut against the test object.

[0020] In one or more embodiments of the present invention, the above-described electrical testing device further includes a plurality of first lines. The first lines are disposed on the second surface and are electrically connected to corresponding inductive metal pads.

[0021] In one or more embodiments of the present invention, the electrical testing device further includes a plurality of second lines and a protective layer. The second lines are disposed on the first surface and are electrically connected to corresponding metal contact pads. The second lines are at least partially located between the protective layer and the first surface.

[0022] One of the objectives of this invention is to provide an electrical testing method that can improve the reliability of electrical test results.

[0023] According to one embodiment of the present invention, an electrical testing method includes: contacting a test object with a plurality of metal contact pads along a working direction; and sensing the reaction force borne by the metal contact pads along the working direction when they contact the test object.

[0024] In one or more embodiments of the present invention, the above-described step of sensing the reaction force further includes: obtaining the reaction force by means of a resistive pressure sensing element through a change in resistance.

[0025] In one or more embodiments of the present invention, the above-described step of sensing the reaction force further includes: obtaining the reaction force by means of capacitance change using a capacitive pressure sensing element.

[0026] The above-described embodiments of the present invention have at least the following advantages: Since the pressure sensing element can sense the magnitude of the reaction force borne by the corresponding metal contact pad when it comes into contact with different conductive parts on the test object, the user can easily determine whether the individual metal contact pad and the test object are in good contact during electrical testing based on the magnitude of the reaction force sensed by the pressure sensing element, thereby improving the reliability of the electrical test results. Attached Figure Description

[0027] Figure 1 This is a side cross-sectional view of an electrical testing device according to an embodiment of the present invention;

[0028] Figure 2 for Figure 1 Cross-sectional view along line segment AA;

[0029] Figure 3 for Figure 1 Cross-sectional view along line segment BB;

[0030] Figure 4 for Figure 1 Cross-sectional view along line segment CC;

[0031] Figure 5This is a cross-sectional view of an electrical testing device according to another embodiment of the present invention, wherein the second lines are connected to each other;

[0032] Figure 6 This is a partially enlarged side view of an electrical testing device according to another embodiment of the present invention, wherein the pressure sensing element includes a first sub-pressure sensing element and a second sub-pressure sensing element.

[0033] Figure 7 This is a partially enlarged side view of an electrical testing device according to another embodiment of the present invention, wherein both the first line and the second line are disposed on the second surface;

[0034] Figure 8 for Figure 7 Cross-sectional view along line segment DD;

[0035] Figure 9 This is a cross-sectional view of an electrical testing device according to another embodiment of the present invention, wherein a first line and a second line are both disposed on the second surface, and the second lines are connected to each other.

[0036] Figure 10 This is a partially enlarged side view of an electrical testing device according to another embodiment of the present invention, wherein the electrical testing device further includes a conductive layer;

[0037] Figure 11 This is a partially enlarged side view of an electrical testing device according to another embodiment of the present invention, wherein the pressure sensing element is a capacitive pressure sensing element.

[0038] Figure 12 This is a side view of an electrical testing device according to another embodiment of the present invention;

[0039] Figure 13 for Figure 12 A cross-sectional view along line segment EE.

[0040] Symbol Explanation

[0041] 100: Electrical testing equipment

[0042] 110: Main Body

[0043] 120: First flexible substrate

[0044] 121: First Surface

[0045] 122: Second Surface

[0046] 130: Second flexible substrate

[0047] 131: Third Surface

[0048] 132: Fourth Surface

[0049] 140: Pressure sensing element

[0050] 141: First Sub-pressure Sensing Element

[0051] 142: Second Sub-pressure Sensing Element

[0052] 143: Inductive metal pad

[0053] 150: Metal contact pad

[0054] 160: Support section

[0055] 165: Flexible support element

[0056] 170: Adhesive material

[0057] 181: Route 1

[0058] 182: Second Line

[0059] 183: Third Route

[0060] 186: First protective layer

[0061] 187: Second protective layer

[0062] 188: Third protective layer

[0063] 190: Conductive layer

[0064] 200: Test Item

[0065] 210: Conductive part

[0066] AA, BB, CC, DD, EE: line segments

[0067] DO: Assignment Direction

[0068] G: Gap Detailed Implementation

[0069] The following describes several embodiments of the present invention with reference to the accompanying drawings. For clarity, many practical details will be described in the following description. However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not essential. Furthermore, for the sake of simplicity, some conventional structures and elements will be shown in the drawings in a simple schematic manner, and in all drawings, the same reference numerals will be used to denote the same or similar elements. And, where feasible, features of different embodiments may be applied interchangeably.

[0070] Unless otherwise defined, all terms used herein (including technical and scientific terms) have their ordinary meanings, which are understandable to those skilled in the art. Furthermore, the definitions of the foregoing terms in commonly used dictionaries should be interpreted in the context of this specification as having the meaning consistent with the relevant field of this invention. Unless specifically defined, these terms will not be construed as having idealized or overly formal meanings.

[0071] Please refer to Figures 1-2 . Figure 1 A side cross-sectional view of an electrical testing apparatus 100 according to an embodiment of the present invention is shown. Figure 2 For illustration Figure 1 A cross-sectional view along line segment AA. In this embodiment, as... Figures 1-2 As shown, the electrical testing device 100 includes a main body 110, a first flexible substrate 120, a second flexible substrate 130, a plurality of pressure sensing elements 140, and a plurality of metal contact pads 150. The first flexible substrate 120 includes opposing first surfaces 121 and second surfaces 122. The second flexible substrate 130 includes opposing third surfaces 131 and fourth surfaces 132, with the fourth surface 132 connected to the main body 110. The pressure sensing elements 140 are respectively connected between the second surface 122 of the first flexible substrate 120 and the third surface 131 of the second flexible substrate 130. The metal contact pads 150 are disposed on the first surface 121 of the first flexible substrate 120, and the metal contact pads 150 overlap with the pressure sensing elements 140. Furthermore, the metal contact pads 150 are configured to abut against the test object 200. For example, such as... Figure 2 As shown, the number of metal contact pads 150 and pressure sensing elements 140 are the same, but the present invention is not limited thereto. Depending on the actual situation, in other embodiments, the number of metal contact pads 150 and pressure sensing elements 140 may not be the same. Specifically, the metal contact pads 150 respectively abut against different conductive portions 210 on the test object 200. For example, the test object 200 may be a light-emitting diode (LED) display, but the present invention is not limited thereto.

[0072] In practical applications, when operating the electrical testing equipment 100, the user moves the equipment 100 towards the test object 200 along the operating direction DO, and causes the metal contact pads 150 to contact different conductive parts 210 on the test object 200 along the operating direction DO, thereby performing electrical testing on the test object 200. When the metal contact pads 150 contact different conductive parts 210 on the test object 200 along the operating direction DO, the metal contact pads 150 apply a certain force to the test object 200 by pressing against it. At the same time, the test object 200 generates a reaction force on each metal contact pad 150 that is opposite in direction but equal in strength to the applied force. Since the metal contact pads 150 are aligned with the corresponding pressure sensing elements 140, the reaction force of the contact area can compress the corresponding pressure sensing elements 140, and the pressure sensing elements 140 can determine the magnitude of the reaction force based on the degree of compression. In other words, the pressure sensing element 140 can sense the magnitude of the reaction force experienced by the corresponding metal contact pad 150 when it comes into contact with different conductive areas 210 on the test object 200. In this way, based on the magnitude of the reaction force sensed by the pressure sensing element 140, the user can easily determine whether the individual metal contact pad 150 and the test object 200 are in good contact during electrical testing, thereby improving the reliability of the electrical test results.

[0073] Furthermore, such as Figures 1-2 As shown, the electrical testing device 100 further includes a support portion 160 and a flexible support element 165. The support portion 160 is connected to the main body 110, while the flexible support element 165 is connected between the fourth surface 132 of the second flexible substrate 130 and the support portion 160, and the flexible support element 165 is aligned with the pressure sensing element 140 and separated from the main body 110. In this way, when the metal contact pad 150 is subjected to a reaction force, the reaction force is sequentially transmitted to the first flexible substrate 120, the pressure sensing element 140, and the second flexible substrate 130, and the support portion 160 and the flexible support element 165 can provide support for the second flexible substrate 130 so that the pressure sensing element 140 can accurately sense the magnitude of the reaction force by being pressed. Since the flexible support element 165 is located between the second flexible substrate 130 and the support portion 160, the chance of the second flexible substrate 130 being scratched when it is pressed against the flexible support element 165 and supported by the flexible support element 165 can be reduced.

[0074] In practical applications, the pressure sensing element 140 can be a resistive pressure sensing element, which derives the reaction force from the change in resistance when pressure is applied. Please refer to... Figure 3 . Figure 3 For illustration Figure 1 A cross-sectional view along line segment BB. In this embodiment, as... Figures 1-3As shown, when the pressure sensing element 140 is a resistive pressure sensing element, the electrical testing device 100 further includes an adhesive material 170. The adhesive material 170 is connected between the second surface 122 of the first flexible substrate 120 and the third surface 131 of the second flexible substrate 130, and at least partially surrounds the pressure sensing element 140.

[0075] Furthermore, such as Figures 1-3 As shown, the electrical testing device 100 also includes a plurality of first lines 181. The first lines 181 are disposed on the second surface 122 of the first flexible substrate 120 and are electrically connected to the corresponding pressure sensing elements 140 respectively.

[0076] Please refer to Figure 4 . Figure 4 For illustration Figure 1 A cross-sectional view along line segment CC. In this embodiment, as... Figures 1-2 , Figure 4 As shown, the electrical testing device 100 also includes a plurality of second lines 182. The second lines 182 are disposed on the third surface 131 of the second flexible substrate 130 and are electrically connected to the corresponding pressure sensing elements 140 respectively.

[0077] The pressure sensing element 140 is electrically connected to the corresponding pressure sensing element 180 via the first line 181 and the second line 182. The resistance change of the pressure sensing element 140 under pressure is transmitted to the processor (not shown) via the first line 181 and the second line 182. The processor can then calculate the magnitude of the reaction force experienced by the pressure sensing element 140 under pressure based on the signal transmitted via the first line 181 and the second line 182. In other words, based on the magnitude of the reaction force sensed by the pressure sensing element 140, the processor can determine whether the individual metal contact pad 150 and the test object 200 are in good contact during electrical testing, thereby improving the reliability of the electrical test results.

[0078] Furthermore, such as Figure 1 , Figure 3 As shown, the electrical testing equipment 100 further includes a first protective layer 186, and a first line 181 is at least partially located between the first protective layer 186 and the second surface 122 of the first flexible substrate 120. In this way, the first protective layer 186 can provide protection and insulation for the first line 181, preventing the first line 181 from being scratched, damaged, or short-circuited.

[0079] Similarly, such as Figure 1 , Figure 4As shown, the electrical testing equipment 100 further includes a second protective layer 187, and the second line 182 is at least partially located between the second protective layer 187 and the third surface 131 of the second flexible substrate 130. In this way, the second protective layer 187 can provide protection and insulation for the second line 182, preventing the second line 182 from being scratched, damaged, or short-circuited.

[0080] Furthermore, such as Figures 1-2 As shown, the electrical testing equipment 100 also includes multiple third lines 183 and a third protection layer 188 (see [link to third protection layer 188]). Figure 1 The third line 183 is disposed on the first surface 121 of the first flexible substrate 120 and is electrically connected to the corresponding metal contact pads 150, so that the metal contact pads 150 can perform electrical tests on the test object 200 and obtain the results of the electrical tests. The third line 183 is at least partially located between the third protective layer 188 and the first surface 121 of the first flexible substrate 120. Therefore, the third protective layer 188 can provide protection and insulation for the third line 183, preventing the third line 183 from being scratched, damaged, or short-circuited.

[0081] Please refer to Figure 5 . Figure 5 A cross-sectional view of an electrical testing apparatus 100 according to another embodiment of the present invention is shown, wherein the second lines 182 are connected to each other. In this embodiment, as... Figure 5 As shown, the second lines 182 disposed on the third surface 131 of the second flexible substrate 130 are connected to each other, so the number of second lines 182 can be reduced.

[0082] Please refer to Figure 6 . Figure 6 To illustrate a partially enlarged side view of an electrical testing apparatus 100 according to another embodiment of the present invention, wherein the pressure sensing element 140 includes a first sub-pressure sensing element 141 and a second sub-pressure sensing element 142. In this embodiment, as Figure 6As shown, the pressure sensing element 140 includes a first sub-pressure sensing element 141 and a second sub-pressure sensing element 142. The first sub-pressure sensing element 141 is connected to the second surface 122 of the first flexible substrate 120, and the second sub-pressure sensing element 142 is connected to the third surface 131 of the second flexible substrate 130 and aligned with the first sub-pressure sensing element 141. A gap G is defined between the first sub-pressure sensing element 141 and the second sub-pressure sensing element 142. When the metal contact pad 150 is subjected to a reaction force from the object under test 200, the first sub-pressure sensing element 141 is pushed towards the second sub-pressure sensing element 142 by the metal contact pad 150 and the first flexible substrate 120 until the first sub-pressure sensing element 141 contacts the second sub-pressure sensing element 142, causing the gap G to disappear. At this time, the first sub-pressure sensing element 141 and the second sub-pressure sensing element 142 are electrically connected to each other.

[0083] Please refer to Figures 7-8 . Figure 7 To illustrate a partially enlarged side view of an electrical testing apparatus 100 according to another embodiment of the present invention, wherein both the first line 181 and the second line 182 are disposed on the second surface 122. Figure 8 For illustration Figure 7 A cross-sectional view along line segment DD. In this embodiment, as... Figures 7-8 As shown, the first line 181 is disposed on the second surface 122 of the first flexible substrate 120 and is electrically connected to the corresponding pressure sensing element 140. The second line 182 is also disposed on the second surface 122 of the first flexible substrate 120 and is electrically connected to the corresponding pressure sensing element 140. The second line 182 and the first line 181 are separated from each other, that is, the second line 182 and the first line 181 are not in direct contact.

[0084] Furthermore, such as Figures 7-8 As shown, the electrical testing equipment 100 further includes a first protective layer 186. The first line 181 and the second line 182 are at least partially located between the first protective layer 186 and the second surface 122. In this way, the first protective layer 186 provides protection and insulation for the first line 181 and the second line 182, preventing scratches, damage, and short circuits.

[0085] Please refer to Figure 9 . Figure 9 To illustrate a cross-sectional view of an electrical testing apparatus 100 according to another embodiment of the present invention, a first line 181 and a second line 182 are both disposed on the second surface 122, and the second lines 182 are connected to each other. In this embodiment, as... Figure 9As shown, the second lines 182 disposed on the second surface 122 of the first flexible substrate 120 are connected to each other, so the number of second lines 182 can be reduced.

[0086] Please refer to Figure 10 . Figure 10 To illustrate a partially enlarged side view of an electrical testing apparatus 100 according to another embodiment of the present invention, wherein the electrical testing apparatus 100 further includes a conductive layer 190. In this embodiment, as Figure 10 As shown, when both the first line 181 and the second line 182 are disposed on the second surface 122 of the first flexible substrate 120, the electrical testing device 100 further includes a conductive layer 190, which is disposed between the third surface 131 of the second flexible substrate 130 and the pressure sensing element 140.

[0087] In practical applications, the pressure sensing element 140 can also be a capacitive pressure sensing element, which derives the reaction force from the change in capacitance when pressure is applied. Please refer to... Figure 11 . Figure 11 To illustrate a partially enlarged side view of an electrical testing apparatus 100 according to another embodiment of the present invention, wherein the pressure sensing element 140 is a capacitive pressure sensing element. In this embodiment, as Figure 11 As shown, when the pressure sensing element 140 is a capacitive pressure sensing element, the electrical testing device 100 does not contain the aforementioned adhesive material 170.

[0088] Please refer to Figures 12-13 . Figure 12 A side view of an electrical testing apparatus 100 according to another embodiment of the present invention is shown. Figure 13 For illustration Figure 12 A cross-sectional view along line segment EE. In this embodiment, as... Figures 12-13 As shown, the electrical testing device 100 includes a main body 110, a support portion 160, a first flexible substrate 120, a plurality of sensing metal pads 143, a flexible support element 165, and a plurality of metal contact pads 150. The support portion 160 is connected to the main body 110. The first flexible substrate 120 includes a first surface 121 and a second surface 122 opposite to each other, the second surface 122 being connected to the main body 110. The sensing metal pads 143 are connected to the second surface 122 of the first flexible substrate 120 and are separate from the main body 110. The flexible support element 165 is connected between the sensing metal pads 143 and the support portion 160, and the flexible support element 165 is separate from the main body 110. The metal contact pads 150 are disposed on the first surface 121 of the first flexible substrate 120 and overlap at least partially with the sensing metal pads 143. For example, as Figure 13As shown, the number of metal contact pads 150 and sensing metal pads 143 are the same, but the present invention is not limited thereto. Depending on the actual situation, in other embodiments, the number of metal contact pads 150 and sensing metal pads 143 may not be the same. Furthermore, the metal contact pads 150 are configured to abut against the test object 200. Specifically, the metal contact pads 150 abut against different conductive portions 210 on the test object 200.

[0089] Furthermore, such as Figures 12-13 As shown, the electrical testing device 100 also includes a plurality of first lines 181. The first lines 181 are disposed on the second surface 122 of the first flexible substrate 120 and are respectively connected to corresponding sensing metal pads 143. Specifically, the support portion 160 is made of a conductive metal material and is grounded, while the flexible support element 165 is made of a flexible material with an appropriate dielectric constant. When the flexible support element 165 is compressed, the sensing metal pad 143 detects the change in capacitance between itself and the support portion 160; therefore, the sensing metal pad 143 is actually a capacitive pressure sensing element.

[0090] Furthermore, such as Figure 12 As shown, the electrical testing equipment 100 further includes a plurality of third lines 183 and a first protective layer 186. The third lines 183 are disposed on the first surface 121 of the first flexible substrate 120 and are electrically connected to corresponding metal contact pads 150. The third lines 183 are at least partially located between the first protective layer 186 and the first surface 121 of the first flexible substrate 120. In this way, the first protective layer 186 can provide protection and insulation for the third lines 183, preventing scratches, damage, and short circuits.

[0091] In summary, the technical solution disclosed in the above embodiments of the present invention has at least the following advantages: Since the pressure sensing element can sense the magnitude of the reaction force borne by the corresponding metal contact pad when it comes into contact with different conductive parts on the test object, the user can easily know whether the individual metal contact pad and the test object are in good contact during the electrical test based on the magnitude of the reaction force sensed by the pressure sensing element, thereby improving the reliability of the electrical test results.

[0092] Although the present invention has been disclosed in conjunction with the above embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. An electrical testing device, comprising: main body; A first flexible substrate includes a first surface and a second surface opposite to each other; The second flexible substrate includes opposing third and fourth surfaces, the fourth surface being connected to the body; Multiple pressure sensing elements are respectively connected between the second surface and the third surface; as well as Multiple metal contact pads are disposed on the first surface and at least partially overlap with the pressure sensing elements, each of the metal contact pads being configured to abut against the object to be measured. The electrical testing equipment further includes: Support section, connecting the main body; and A flexible support element is connected between the fourth surface and the support portion. The flexible support element aligns with the pressure sensing elements and is separate from the main body.

2. The electrical testing apparatus of claim 1, wherein each of the pressure sensing elements is a resistive pressure sensing element.

3. The electrical testing apparatus of claim 1, wherein each of the pressure sensing elements is a capacitive pressure sensing element.

4. The electrical testing apparatus as described in claim 1, further comprising: An adhesive material is attached between the second and third surfaces and at least partially surrounds the pressure sensing element.

5. The electrical testing apparatus as described in claim 1, further comprising: Multiple first lines are disposed on the second surface and are electrically connected to the corresponding pressure sensing elements; and Multiple second lines are disposed on the third surface and are electrically connected to the corresponding pressure sensing elements.

6. The electrical testing apparatus as described in claim 5, further comprising: A first protective layer, wherein the first lines are at least partially located between the first protective layer and the second surface; and A second protective layer, wherein the second lines are at least partially located between the second protective layer and the third surface.

7. The electrical testing apparatus of claim 5, wherein the second lines are interconnected.

8. The electrical testing apparatus as described in claim 1, further comprising: Multiple third lines are disposed on the first surface and are electrically connected to the corresponding metal contact pads; and A third protective layer, wherein the third lines are at least partially located between the third protective layer and the first surface.

9. The electrical testing apparatus of claim 1, wherein each of the pressure sensing elements comprises: The first sub-pressure sensing element is connected to the second surface; and The second sub-pressure sensing element is connected to the third surface and aligned with the first sub-pressure sensing element, with a gap defined between the first sub-pressure sensing element and the second sub-pressure sensing element.

10. The electrical testing apparatus of claim 1, further comprising: Multiple first lines are disposed on the second surface and are electrically connected to the corresponding pressure sensing elements; and Multiple second lines are disposed on the second surface and electrically connected to the corresponding pressure sensing elements, and these second lines are separate from the first lines.

11. The electrical testing apparatus of claim 10, further comprising: A first protective layer, wherein the first lines and the second lines are at least partially located between the first protective layer and the second surface.

12. The electrical testing apparatus of claim 10, wherein the second lines are interconnected.

13. The electrical testing apparatus of claim 10, further comprising: A conductive layer is disposed between the third surface and the pressure sensing elements.

14. An electrical testing device, comprising: main body; Support section, connecting the main body; A flexible substrate includes opposing first and second surfaces, the second surface being connected to the body; Multiple sensing metal pads are connected to the second surface and are separate from the main body; A flexible support element is connected between the sensing metal pads and the support portion, and the flexible support element is separate from the main body; as well as Multiple metal contact pads are disposed on the first surface and overlap at least partially with the sensing metal pads, each of the metal contact pads being configured to abut against the object to be measured.

15. The electrical testing apparatus of claim 14, further comprising: Multiple first lines are disposed on the second surface and are electrically connected to the corresponding sensing metal pads.

16. The electrical testing apparatus of claim 14, further comprising: Multiple second lines are disposed on the first surface and electrically connected to corresponding metal contact pads; and A protective layer, wherein the second lines are at least partially located between the protective layer and the first surface.

17. An electrical testing method for an electrical testing device according to any one of claims 1 to 16, comprising: Multiple metal contact pads are used to contact the object to be tested along the working direction; and The reaction force experienced by each of the metal contact pads in the working direction when it comes into contact with the object under test is sensed.

18. The electrical testing method of claim 17, wherein the step of sensing each of the reaction forces further comprises: The reaction force is obtained by using a resistive pressure sensing element to detect changes in resistance.

19. The electrical testing method of claim 17, wherein the step of sensing each of the reaction forces further comprises: The reaction force is obtained by using a capacitive pressure sensing element through the change in capacitance.

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