An electron microscope imaging method, device, computer equipment and storage medium

Abstract

The application discloses an electron microscope imaging method and device, computer equipment and a storage medium. The method comprises the following steps: scanning a target object by using an electron beam emitted at a low voltage to obtain a first imaging signal set corresponding to the target object; amplifying a first imaging signal in the first imaging signal set to obtain a second imaging signal set, wherein the first imaging signal is any imaging signal in the first imaging signal set; when it is determined that there is a free storage location in a current preset storage space, storing the second imaging signal in the current preset storage space, or when it is determined that there is no free storage location in the current preset storage space, storing the second imaging signal in a next preset storage space until each second imaging signal in the second imaging signal set is stored in a preset storage space; and obtaining a target image corresponding to the target object according to all third imaging signals. The method reduces damage to the surface of the target object and improves the accuracy of imaging.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electron microscope imaging, and in particular to an electron microscope imaging method and device, a computer device and a storage medium. BACKGROUND

[0002] A scanning electron microscope is a large precision instrument. The scanning electron microscope emits an electron beam from an electron gun, focuses the electron beam on a sample surface, scans the electron beam on the sample, and the electron beam and the sample interact to generate signal electrons. The signal electrons are collected by a detector and converted into photons, and finally imaged on a display system. The results of the electron microscope system and the imaging method are described in detail in CN109300759A. In the prior art, the electron beam is emitted and focused in a high voltage state. The electron beam in the high voltage state can cause damage to the sample surface. Therefore, a new electron microscope imaging method is urgently needed. SUMMARY

[0003] Therefore, to solve the problems of the prior art, the embodiments of the present application provide an electron microscope imaging method and device, a computer device and a storage medium.

[0004] According to a first aspect, the embodiments of the present application disclose an electron microscope imaging method, comprising:

[0005] scanning a target object with an electron beam emitted at a low voltage to obtain a first imaging signal set corresponding to the target object;

[0006] amplifying a first imaging signal in the first imaging signal set to obtain a second imaging signal set, the first imaging signal being any one of the first imaging signal set;

[0007] storing the second imaging signal in a current preset storage space when it is determined that the current preset storage space has a free storage location, or storing the second imaging signal in a next preset storage space when it is determined that the current preset storage space does not have a free storage location, until each second imaging signal in the second imaging signal set is stored in one of the preset storage spaces, the preset storage spaces including at least one;

[0008] filtering all the second imaging signals in the first preset storage space to obtain a third imaging signal set corresponding to the first preset storage space, wherein the third imaging signal set is composed of third imaging signals corresponding to each second imaging signal in the first preset storage space, and the third imaging signal is an imaging signal obtained by filtering the second imaging signal;

[0009] obtaining a target image corresponding to the target object according to all the third imaging signal sets.

[0010] Optionally, the first imaging signal is amplified to obtain a second imaging signal set, specifically comprising:

[0011] After the first imaging signal is phase-synchronized with a preset reference signal, a signal matched with the reference signal is screened from the first imaging signal.

[0012] The signal is amplified to obtain a second imaging signal.

[0013] Optionally, the method further comprises:

[0014] According to other second imaging signals in the first preset storage space except the i-th second imaging signal, the i-th second imaging signal is filtered to obtain an i-th third imaging signal corresponding to the i-th second imaging signal.

[0015] Optionally, according to other second imaging signals in the first preset storage space except the i-th second imaging signal, the i-th second imaging signal is filtered to obtain an i-th third imaging signal corresponding to the i-th second imaging signal, specifically comprising:

[0016] According to all second imaging signals in the first preset storage space, a data sequence is obtained.

[0017] The data sequence is filtered to obtain an i-th third imaging signal.

[0018] According to a second aspect, the embodiments of the present application further disclose an electron microscope imaging device, comprising:

[0019] An acquisition module is configured to acquire a first imaging signal set corresponding to a target object by scanning the target object with an electron beam emitted at a low voltage.

[0020] An amplification module is configured to amplify a first imaging signal in the first imaging signal set to obtain a second imaging signal set, the first imaging signal being any imaging signal in the first imaging signal set.

[0021] A storage module is configured to store the second imaging signal in a current preset storage space when it is determined that the current preset storage space has an idle storage location, or store the second imaging signal in a next preset storage space when it is determined that the current preset storage space has no idle storage location, until all second imaging signals in the second imaging signal set are stored in one preset storage space, the preset storage space including at least one.

[0022] The filtering module is configured to filter all the second imaging signals in the first preset storage space respectively to obtain a third imaging signal set corresponding to the first preset storage space, wherein the third imaging signal set is composed of third imaging signals corresponding to each of the second imaging signals in the first preset storage space, and the third imaging signal is an imaging signal obtained by filtering the second imaging signal.

[0023] The determining module is configured to obtain a target image corresponding to the target object according to all the third imaging signal sets.

[0024] Optionally, the amplifying module specifically comprises:

[0025] The synchronizing module is configured to synchronize the first imaging signal with a preset reference signal in phase, and then screen a signal matched with the reference signal from the first imaging signal.

[0026] The amplifying submodule is configured to amplify the signal to obtain the second imaging signal.

[0027] Optionally, the device further comprises:

[0028] The filtering submodule is configured to filter the i-th second imaging signal according to other second imaging signals in the first preset storage space except the i-th second imaging signal to obtain an i-th third imaging signal corresponding to the i-th second imaging signal.

[0029] Optionally, the filtering submodule is specifically configured to:

[0030] Obtain a data sequence according to all the second imaging signals in the first preset storage space;

[0031] Filter the data sequence to obtain the i-th third imaging signal.

[0032] According to a third aspect, the embodiments of the present application further disclose a computer device, comprising: at least one processor; and a memory communicatively connected with the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to perform the steps of the electron microscope imaging method according to the first aspect or any optional implementation manner of the first aspect.

[0033] According to a fourth aspect, the embodiments of the present application further disclose a computer readable storage medium, which stores a computer program, and the computer program is executed by a processor to implement the steps of the electron microscope imaging method according to the first aspect or any optional implementation manner of the first aspect.

[0034] The technical scheme of the present application has the following advantages:

[0035] The electron microscope imaging method, device, computer device and storage medium provided by the application comprise the following steps: a target object is scanned by an electron beam emitted at a low voltage to obtain a first imaging signal set corresponding to the target object, and the scanning of the target object by the electron beam emitted at the low voltage can greatly reduce damage to the surface of the target object; each first imaging signal in the first imaging signal set is amplified to obtain a second imaging signal corresponding to each first imaging signal, the first imaging signal is detected to obtain a target signal, and the second imaging signal set obtained has an improved signal-to-noise ratio; after the second imaging signal set is obtained, the second imaging signal set is stored in a preset storage space, the preset storage space is at least one, and after the second imaging signal set is stored in the preset storage space, the subsequent processing of the second imaging signal is facilitated, so that the output signal is neat when the second imaging signal is processed; each second imaging signal in the preset storage space is filtered to obtain a third imaging signal corresponding to the first preset storage space, and a target image of the target object can be obtained according to the third imaging signal, so that the noise in the target image is reduced without causing damage to the target object. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the specific embodiments of the application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or prior art description. Obviously, the drawings described below are some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0037] Figure 1 A flow chart of a specific example of the electron microscope imaging method in the embodiment of the application;

[0038] Figure 2 A schematic diagram of a specific example of the electron microscope imaging method in the embodiment of the application;

[0039] Figure 3 A schematic diagram of a specific example of the electron microscope imaging method in the embodiment of the application;

[0040] Figure 4 A schematic diagram of a specific example of the electron microscope imaging method in the embodiment of the application;

[0041] Figure 5 A principle block diagram of a specific example of the electron microscope imaging device in the embodiment of the application;

[0042] Figure 6 A specific example of the computer device in the embodiment of the application. DETAILED DESCRIPTION

[0043] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only part of, rather than all of, the embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0044] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0045] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements inside, it can be wireless connection, or it can be wired connection. For a person of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0047] For the technical problems mentioned in the background art, the embodiments of the present application provide an electron microscope imaging method, which is specifically described with reference to Figure 1 The method comprises the following steps:

[0048] Step 101, using an electron beam emitted at a low voltage to scan a target object, to obtain a first imaging signal set corresponding to the target object.

[0049] For example, electron microscopy imaging typically involves an electron gun emitting an electron beam, which, under the influence of an accelerating voltage, is converged by a magnetic lens system to form an electron beam with a diameter of 5 nm. This beam is then focused onto the surface of the target object. Under the influence of deflection coils between the second condenser lens and the objective lens, the electron beam performs a grating-like scan on the target object. The electrons interact with the target object to generate signal electrons, which are collected by a detector and converted into photons, ultimately forming an image on a display system. In this process, the electron beam emitted by the scanning electron microscope is emitted under high voltage conditions, which can cause some damage to the surface of the target object. Therefore, using a low-voltage electron beam emission method can effectively protect the surface of the scanned target object.

[0050] Step 102: Amplify the first imaging signal in the first imaging signal set to obtain the second imaging signal set.

[0051] The first imaging signal is any one of the imaging signals in the first imaging signal set.

[0052] For example, when an electron beam emitted at low voltage obtains a first imaging signal set, there is significant noise, resulting in an inaccurate final image. To address this issue, the first imaging signal set is amplified to obtain a second imaging signal set, which contains noise filtered out from the first imaging signal set. The amplification can be performed using a dual-phase lock-in amplifier.

[0053] Among them, the lock-in amplifier is a synchronous correlation detector designed based on the cross-correlation principle. It utilizes the cross-correlation characteristics between the reference signal and the measured signal to extract the measured signal that has the same frequency and phase as the reference signal. The lock-in amplifier can detect the target signal even with external interference 100dB stronger than the measured optical signal. The superior performance of the lock-in amplifier in weak signal detection is achieved by using a low-pass filter to suppress noise. The low-pass filter's bandwidth can be made narrower, and its bandwidth is unaffected by the modulation frequency, resulting in significantly improved anti-interference capability, signal-to-noise ratio, and stability.

[0054] In one specific embodiment, the amplification of the first imaging signal can be achieved as follows:

[0055] After synchronizing the first imaging signal with a preset reference signal, a signal that matches the reference signal is selected from the first imaging signal.

[0056] The signal is amplified to obtain the second imaging signal.

[0057] For example, such as Figure 2The schematic diagram of the process of amplification by using a dual-phase lock-in amplifier is shown. The preset reference signal is a signal with the same phase and frequency as the first imaging signal. The image signal (the first imaging signal) and the reference signal are input for phase-sensitive detection, that is, the phase of the reference signal needs to be consistent with the phase of the first imaging signal, so that the best signal can be obtained when filtering according to the reference signal. After phase-sensitive detection, low-pass filtering is performed to output the image (the second imaging signal set).

[0058] Step 103: When it is determined that there is a free storage location in the current preset storage space, the second imaging signal is stored in the current preset storage space.

[0059] Or, when it is determined that there is no free storage location in the current preset storage space, the second imaging signal is stored in the next preset storage space until all the second imaging signals in the second imaging signal set are stored in one preset storage space.

[0060] The preset storage space includes at least one.

[0061] Exemplarily, after obtaining the second imaging signal set, the second imaging signal set needs to be buffered before being processed.

[0062] In the embodiment of the application, the process of filtering the second imaging signal in the second imaging signal set is to select the signal in the window of a corresponding size for processing. In order to avoid subsequent selection, the second imaging signal is stored as a window of a corresponding size, that is, a preset storage space, when buffering.

[0063] For example, the size of the preset storage space is a 3x3 window. When buffering, 3 rows of row buffers need to be designed, because in normal cases, most imaging data is one row after another, and each imaging signal (each pixel) is output from left to right and then from top to bottom. If no processing is performed, a 3x3 imaging window cannot be obtained, such as Figure 3 As shown, 3 FIFOs (First Input First Output, First In First Out) are needed. The overall idea is that the first row of data is sequentially input and written into fifo1. When the last data of the first row is written, the data in fifo1 is sequentially read out and written into fifo2, and the process is repeated. When the fourth row of data arrives, the three FIFOs output data at the same time, and the output data is the first three rows of data and is aligned.

[0064] Step 104, filtering all the second imaging signals in the first preset storage space respectively to obtain a third imaging signal set corresponding to the first preset storage space.

[0065] The third imaging signal set is composed of third imaging signals corresponding to each second imaging signal in the first preset storage space, and the third imaging signal is an imaging signal obtained by filtering the second imaging signal.

[0066] According to the second imaging signals other than the i-th second imaging signal in the first preset storage space, the i-th second imaging signal is filtered to obtain an i-th third imaging signal corresponding to the i-th second imaging signal.

[0067] Exemplarily, when filtering, each preset storage space is filtered, and the filtering method can be FFT method, multiplication gradient method and average method.

[0068] Preferably, in a specific embodiment, the implementation of filtering the second imaging signal to obtain the third imaging signal can be:

[0069] According to all the second imaging signals in the first preset storage space, a data sequence is obtained.

[0070] The data sequence is filtered to obtain an i-th third imaging signal set.

[0071] Exemplarily, in the filtering process, a median filtering algorithm can be used to filter the second imaging signal, wherein the median filtering method is a nonlinear smoothing technique, which sets the gray value of each pixel point to the median value of the gray values of all pixel points in a certain neighborhood window of the point.

[0072] Median filtering is a nonlinear signal processing technique based on sorting statistical theory, which can effectively suppress noise. The basic principle of median filtering is to replace the value of a point in a digital image or digital sequence with the median value of the values of the points in a neighborhood of the point, so that the surrounding pixel values approach the true value, thereby eliminating isolated noise points.

[0073] To obtain the median value of the data in the template, the data is first sorted by size, and then the median value is found according to the ordered digital sequence. There are many mature algorithms for sorting, such as bubble sort, binary sort, etc., which are mostly software algorithms based on microcomputer platform.

[0074] The median filtering method is to select a template for the current pixel to be processed, which is composed of several adjacent pixels, sort the pixels in the template from small to large, and then replace the original pixel value with the median value of the template.

[0075] In the embodiment of the present application, 9 pixels in the neighborhood are obtained after using a 3x3 window, and 9 pixel values need to be sorted. In order to improve the sorting efficiency, the sorting algorithm idea is shown in Figure 4 Each row of pixels in the window is sorted in descending order to obtain the maximum value, the intermediate value and the minimum value. The minimum values of the three rows are compared to obtain the maximum value. The maximum values of the three rows are compared to obtain the minimum value. The intermediate values of the three rows are compared again to obtain the intermediate value. The three values obtained before are sorted again, and the obtained median value is the median value of the second imaging signal. The two-dimensional median filter output is g(x, y) = med{f(x-k, y-l), (k, l ∈ W)}, wherein f(x, y) and g(x, y) are the second imaging signal and the third imaging signal respectively, and W is a 3x3 window.

[0076] In step 105, the target image corresponding to the target object is obtained according to all the third imaging signal sets.

[0077] For example, after obtaining all the third imaging signal sets of the 3x3 window, the target image of the target object is composed of the third imaging signal of each 3x3 window.

[0078] In this way, the first imaging signal set corresponding to the target object is obtained by scanning the target object using the electron beam emitted at a low voltage. Scanning the target object using the electron beam emitted at a low voltage can greatly reduce the damage to the surface of the target object. Further, each first imaging signal in the first imaging signal set is amplified to obtain a second imaging signal corresponding to each first imaging signal. The first imaging signal is detected to obtain the target signal, thereby improving the signal-to-noise ratio of the second imaging signal set. After obtaining the second imaging signal set, the second imaging signal set is stored in a preset storage space. The preset storage space is at least one, and the second imaging signal set is stored in the preset storage space. After the second imaging signal set is stored in the preset storage space, it is beneficial to subsequent processing of the second imaging signal, so that the output signal is uniform when the second imaging signal is processed. Each second imaging signal in the preset storage space is filtered to obtain a third imaging signal corresponding to the first preset storage space. According to the third imaging signal, a complete target image of the target object can be obtained, thereby reducing the noise in the target image while avoiding damage to the target object.

[0079] The above is an embodiment of the electron microscope imaging method provided by the present application. The following describes other embodiments of the electron microscope imaging provided by the present application. For details, see the following.

[0080] The embodiment of the present application also discloses an electron microscope imaging device, as shown in Figure 5 The device comprises:

[0081] The acquisition module 501 is configured to acquire a first imaging signal set corresponding to the target object by scanning the target object with an electron beam emitted at a low voltage.

[0082] The amplification module 502 is configured to amplify a first imaging signal in the first imaging signal set to obtain a second imaging signal set, the first imaging signal being any imaging signal in the first imaging signal set.

[0083] The storage module 503 is configured to store the second imaging signal in a current preset storage space when it is determined that the current preset storage space has a free storage location, or store the second imaging signal in a next preset storage space when it is determined that the current preset storage space has no free storage location, until all the second imaging signals in the second imaging signal set are stored in one preset storage space, the preset storage space including at least one.

[0084] The filtering module 504 is configured to filter all the second imaging signals in the first preset storage space to obtain a third imaging signal set corresponding to the first preset storage space, the third imaging signal set being composed of third imaging signals corresponding to each of the second imaging signals in the first preset storage space, the third imaging signal being an imaging signal obtained by filtering the second imaging signal.

[0085] The determination module 505 is configured to obtain a target image corresponding to the target object according to all the third imaging signal sets.

[0086] In an optional implementation, the amplification module specifically includes:

[0087] The synchronization module is configured to synchronize the first imaging signal with a preset reference signal in phase, and then screen a signal matching the reference signal from the first imaging signal.

[0088] The amplification submodule is configured to amplify the signal to obtain the second imaging signal.

[0089] In an optional implementation, the apparatus further includes:

[0090] The filtering submodule is configured to filter the i-th second imaging signal according to other second imaging signals in the first preset storage space except the i-th second imaging signal, to obtain an i-th third imaging signal corresponding to the i-th second imaging signal.

[0091] In an optional implementation, the filtering submodule is specifically configured to:

[0092] Obtain a data sequence according to all the second imaging signals in the first preset storage space.

[0093] The data sequence is filtered to obtain the i-th third imaging signal.

[0094] The functions performed by each component in the electron microscope imaging device provided in the embodiments of the present invention have been described in detail in any of the above method embodiments, and therefore will not be repeated here.

[0095] By executing this device, an electron beam emitted at low voltage is used to scan the target object, acquiring a first imaging signal set corresponding to the target object. Scanning the target object with an electron beam emitted at low voltage can greatly reduce damage to the surface of the target object. Furthermore, each first imaging signal in the first imaging signal set is amplified to obtain a second imaging signal corresponding to each first imaging signal. Amplifying the first imaging signal allows for the detection of the target signal from the first imaging signal, thereby improving the signal-to-noise ratio of the second imaging signal set compared to the first imaging signal. After obtaining the second imaging signal set, it is stored in a preset storage space, wherein there is at least one preset storage space. Storing the second imaging signal set in the preset storage space facilitates subsequent processing of the second imaging signal, resulting in a neat signal output during processing. Each second imaging signal in the preset storage space is filtered to obtain a third imaging signal corresponding to the first preset storage space. Based on the third imaging signal, a complete target image of the target object can be obtained, thereby reducing noise in the target image while avoiding damage to the target object.

[0096] This invention also provides a computer device, such as... Figure 6 As shown, the computer device may include a processor 601 and a memory 602, wherein the processor 601 and the memory 602 may be connected via a bus or other means. Figure 6 Taking the example of a connection between China and Israel via a bus.

[0097] Processor 601 may be a central processing unit (CPU). Processor 601 may also be other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or combinations thereof.

[0098] The memory 602, as a non-transitory computer readable storage medium, can be used to store non-transitory software programs, non-transitory computer executable programs and modules, such as program instructions / modules corresponding to the electron microscope imaging method in the embodiments of the present application. The processor 601 performs various functional applications and data processing of the processor by running the non-transitory software programs, instructions and modules stored in the memory 602, that is, implements the electron microscope imaging method in the above-mentioned method embodiments.

[0099] The memory 602 can include a program storage area and a data storage area, wherein the program storage area can store an operating system and application programs required by at least one function; and the data storage area can store data created by the processor 601 and the like. In addition, the memory 602 can include a high-speed random access memory, and can also include a non-transitory memory, such as at least one magnetic disk storage device, a flash memory device, or other non-transitory solid-state memory device. In some embodiments, the memory 602 can optionally include a memory disposed remotely with respect to the processor 601, and these remote memories can be connected to the processor 601 through a network. Examples of the above-mentioned network include but are not limited to the Internet, an intranet, a local area network, a mobile communication network, and a combination thereof.

[0100] One or more modules are stored in the memory 602, and when executed by the processor 601, perform the electron microscope imaging method in the embodiments as shown. Figure 1

[0101] The above-mentioned computer device specific details can be understood by referring to the corresponding related descriptions and effects in the embodiments as shown, which will not be described here. Figure 1

[0102] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiments can be completed by a computer program instructing related hardware, and the program can be stored in a computer readable storage medium. When the program is executed, it can include the processes of the above-mentioned embodiments. The storage medium can be a magnetic disk, an optical disk, a read-only memory (ROM), a random access memory (RAM), a flash memory, a hard disk drive (HDD) or a solid-state drive (SSD), etc. The storage medium can also include a combination of the above-mentioned types of memories.

[0103] Although the embodiments of the present application are described in conjunction with the accompanying drawings, various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the present application, and such modifications and changes fall within the scope defined by the appended claims.​​

Claims

1. An electron microscopy imaging method, characterized in that, The method includes: The target object is scanned using an electron beam emitted at low voltage to obtain a first imaging signal set corresponding to the target object; The first imaging signal in the first imaging signal set is amplified to obtain the second imaging signal set, wherein the first imaging signal is any one of the imaging signals in the first imaging signal set. When it is determined that there is a free storage location in the current preset storage space, the second imaging signal is stored in the current preset storage space; or, when it is determined that there is no free storage location in the current preset storage space, the second imaging signal is stored in the next preset storage space, until each of the second imaging signals in the set of all the second imaging signals is stored in a preset storage space. The preset storage space includes at least one, and the preset storage space is a two-dimensional data window. Based on the two-dimensional data window, the second imaging signal in the first preset storage space is stored, and all the second imaging signals in the first preset storage space are filtered to obtain a third imaging signal set corresponding to the first preset storage space. The third imaging signal set is composed of a third imaging signal corresponding to each of the second imaging signals in the first preset storage space. The third imaging signal is an imaging signal obtained after filtering the second imaging signal. Based on all the third imaging signal sets, a target image corresponding to the target object is obtained.

2. The method according to claim 1, characterized in that, The step of amplifying the first imaging signal to obtain the second imaging signal set specifically includes: After synchronizing the first imaging signal with a preset reference signal, a signal that matches the reference signal is selected from the first imaging signal. The signal is amplified to obtain a second imaging signal.

3. The method according to claim 1 or 2, characterized in that, The method further includes: Based on the other second imaging signals in the first preset storage space, excluding the i-th second imaging signal, the i-th second imaging signal is filtered to obtain the i-th third imaging signal corresponding to the i-th second imaging signal.

4. The method according to claim 3, characterized in that, The step of filtering the i-th second imaging signal based on other second imaging signals in the first preset storage space (excluding the i-th second imaging signal) to obtain the i-th third imaging signal corresponding to the i-th second imaging signal specifically includes: A data sequence is obtained based on all the second imaging signals in the first preset storage space; The data sequence is filtered to obtain the i-th third imaging signal.

5. An electron microscope imaging device, characterized in that, The device includes: The acquisition module is used to scan the target object using an electron beam emitted under low voltage and acquire a first imaging signal set corresponding to the target object; An amplification module is used to amplify the first imaging signal in the first imaging signal set to obtain a second imaging signal set, wherein the first imaging signal is any one of the imaging signals in the first imaging signal set. The storage module is used to store the second imaging signal into the current preset storage space when it is determined that there is a free storage location in the current preset storage space, or to store the second imaging signal into the next preset storage space when it is determined that there is no free storage location in the current preset storage space, until each of the second imaging signals in the set of all the second imaging signals is stored in a preset storage space. The preset storage space includes at least one, and the preset storage space is a two-dimensional data window. The filtering module is used to store the second imaging signal in the first preset storage space based on the two-dimensional data window, filter all the second imaging signals in the first preset storage space respectively, and obtain a third imaging signal set corresponding to the first preset storage space. The third imaging signal set is composed of a third imaging signal corresponding to each of the second imaging signals in the first preset storage space. The third imaging signal is an imaging signal obtained after filtering the second imaging signal. The determination module is used to obtain the target image corresponding to the target object based on all the third imaging signal sets.

6. The apparatus according to claim 5, characterized in that, The amplification module specifically includes: The synchronization module is used to synchronize the first imaging signal with a preset reference signal in phase, and then select a signal from the first imaging signal that matches the reference signal. The amplification submodule is used to amplify the signal to obtain a second imaging signal.

7. The apparatus according to claim 5 or 6, characterized in that, The device further includes: The filtering submodule is used to filter the i-th second imaging signal based on other second imaging signals in the first preset storage space, excluding the i-th second imaging signal, to obtain the i-th third imaging signal corresponding to the i-th second imaging signal.

8. The apparatus according to claim 7, characterized in that, The filtering submodule is specifically used for: A data sequence is obtained based on all the second imaging signals in the first preset storage space; The data sequence is filtered to obtain the i-th third imaging signal.

9. A computer device, characterized in that, include: At least one processor; The at least one processor is also connected in communication with a memory, wherein the memory stores instructions that can be executed by the at least one processor to cause the at least one processor to perform the steps of the electron microscopy imaging method as described in any one of claims 1-4.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the steps of the electron microscopy imaging method as described in any one of claims 1-4.

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