Machine preventive maintenance detection method, device, equipment and medium

Abstract

The present disclosure provides a machine preventive maintenance detection method, device, equipment and medium, and relates to the technical field of semiconductors. The method specifically comprises: obtaining machine operation data, determining that the machine has been reset according to the machine operation data, obtaining current machine preventive maintenance material requisition information of the machine, and determining whether the machine has performed the current machine preventive maintenance at the current reset according to the current machine preventive maintenance material requisition information. Through the scheme provided in the embodiments of the present disclosure, it can be accurately determined whether the machine has performed a PM operation after performing a reset operation, so as to improve the qualified rate of products.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of semiconductor technology, and particularly relates to a machine preventive maintenance detection method and device, a computer device and a computer readable storage medium. BACKGROUND

[0002] In the field of collection circuit and semiconductor technology, PM is an abbreviation of the first letter of the English word Preventive Maintenance.

[0003] In the related art, when the machine needs to perform PM, an alarm message is sent to inform the relevant personnel, and when the relevant personnel perform PM, the machine is manually operated to reset the data. After the data is reset, the machine will not continue to send the alarm message to the relevant personnel.

[0004] However, because the operation of data reset and the operation of performing PM are independent. For example, the work order can first perform PM, and then reset the data; or first reset the data, and then perform PM. That is, when the personnel mistakenly reset the data, the machine does not perform the actual PM action, thereby causing the original materials, parts, etc. not to be replaced in time, and continuing to produce (run goods) products in this condition will affect the product qualification rate.

[0005] It should be noted that the information disclosed in the above background section is only used to strengthen the understanding of the background of the present disclosure, and therefore can include information that does not constitute prior art known to those of ordinary skill in the art. SUMMARY

[0006] The present disclosure provides a machine preventive maintenance detection method, device, equipment and medium, which at least partially overcomes the problem of low product qualification rate caused by missed PM in the related art.

[0007] Other characteristics and advantages of the present disclosure will become apparent from the following detailed description, or will be learned by practice of the present disclosure.

[0008] According to one aspect of the present disclosure, a machine preventive maintenance detection method is provided, the method comprising:

[0009] obtaining machine running data;

[0010] determining that the machine has been reset according to the machine running data;

[0011] obtaining current machine preventive maintenance material requisition information of the machine;

[0012] determining whether the machine has performed current machine preventive maintenance at the current reset according to the current machine preventive maintenance material requisition information.

[0013] In one embodiment of the present disclosure, determining whether the machine has performed the current machine preventive maintenance at the current reset according to the current machine preventive maintenance material requisition information comprises:

[0014] determining current machine preventive maintenance required material data of the machine;

[0015] judging whether the current machine preventive maintenance required material corresponding to the current machine preventive maintenance required material data has been requisitioned according to the current machine preventive maintenance material requisition information;

[0016] if the current machine preventive maintenance required material has not been requisitioned, determining that the machine has not performed the current machine preventive maintenance at the current reset;

[0017] if the current machine preventive maintenance required material has been requisitioned, determining that the machine has performed the current machine preventive maintenance at the current reset.

[0018] In one embodiment of the present disclosure, determining the current machine preventive maintenance required material data of the machine comprises:

[0019] determining a current type of the current machine preventive maintenance;

[0020] determining the current machine preventive maintenance required material data according to the machine and the current type.

[0021] In one embodiment of the present disclosure, the machine operation data comprises current batch machine operation data;

[0022] wherein, determining the current type of the current machine preventive maintenance comprises:

[0023] determining the current type according to the current batch machine operation data.

[0024] In one embodiment of the present disclosure, determining the current machine preventive maintenance required material data according to the machine and the current type comprises:

[0025] obtaining machine preventive maintenance required material data of the machine corresponding to each machine preventive maintenance type;

[0026] determining the current machine preventive maintenance required material data according to the current type of the machine and the machine preventive maintenance required material data of the machine corresponding to each machine preventive maintenance type.

[0027] In one embodiment of the present disclosure, obtaining the machine preventive maintenance required material data of the machine corresponding to each machine preventive maintenance type comprises:

[0028] obtain historical machine preventive maintenance material data of the machine preventive maintenance type corresponding to the machine;

[0029] determine machine preventive maintenance mandatory material data corresponding to the machine preventive maintenance type of the machine according to the historical machine preventive maintenance material data of the machine preventive maintenance type corresponding to the machine.

[0030] In an embodiment of the present disclosure, determining machine preventive maintenance mandatory material data corresponding to the machine preventive maintenance type of the machine according to the historical machine preventive maintenance material data of the machine preventive maintenance type corresponding to the machine includes:

[0031] determining preventive maintenance material existing in historical machine preventive maintenance of the machine preventive maintenance type according to the historical machine preventive maintenance material data of the machine preventive maintenance type corresponding to the machine;

[0032] regarding the preventive maintenance material existing in the historical machine preventive maintenance of the machine preventive maintenance type as the machine preventive maintenance mandatory material data corresponding to the machine preventive maintenance type.

[0033] In an embodiment of the present disclosure, determining current machine preventive maintenance mandatory material data of the machine includes:

[0034] obtaining current machine preventive maintenance execution time of the machine;

[0035] determining whether the current machine preventive maintenance execution time of the machine meets current machine preventive maintenance execution specifications;

[0036] if the current machine preventive maintenance execution specifications are met, obtaining current machine preventive maintenance mandatory material data of the machine.

[0037] According to another aspect of the present disclosure, a machine preventive maintenance detection device is provided, and the device includes:

[0038] an obtaining unit configured to obtain machine operation data;

[0039] a determining unit configured to determine whether a machine has been reset according to the machine operation data;

[0040] the obtaining unit is further configured to obtain current machine preventive maintenance material use information of the machine;

[0041] the determining unit is further configured to determine whether the machine has performed current machine preventive maintenance at the current reset according to the current machine preventive maintenance material use information.

[0042] In an embodiment of the present disclosure, the determining unit is further configured to:

[0043] determine current machine preventive maintenance required material data of the machine;

[0044] determine whether the current machine preventive maintenance required material corresponding to the current machine preventive maintenance required material data has been used according to the current machine preventive maintenance material use information;

[0045] if the current machine preventive maintenance required material has not been used, it is determined that the machine has not performed the current machine preventive maintenance at the current reset;

[0046] if the current machine preventive maintenance required material has been used, it is determined that the machine has performed the current machine preventive maintenance at the current reset.

[0047] In an embodiment of the present disclosure, the machine preventive maintenance detection device further comprises:

[0048] a locking unit configured to trigger a first locking signal to lock the machine if it is determined that the machine has not performed the current machine preventive maintenance at the current reset.

[0049] In an embodiment of the present disclosure, the determining unit is further configured to:

[0050] determine a current type of the current machine preventive maintenance;

[0051] determine the current machine preventive maintenance required material data according to the machine and the current type.

[0052] In an embodiment of the present disclosure, the determining unit is further configured to:

[0053] determine the current type according to the current batch machine operation data.

[0054] In an embodiment of the present disclosure, the determining unit is further configured to:

[0055] obtain machine preventive maintenance required material data corresponding to each type of machine preventive maintenance of the machine;

[0056] determine the current machine preventive maintenance required material data according to the current type of the machine and the machine preventive maintenance required material data corresponding to each type of machine preventive maintenance of the machine.

[0057] In an embodiment of the present disclosure, the determining unit is further configured to:

[0058] obtain historical machine preventive maintenance use material data of the machine corresponding to the type of machine preventive maintenance.

[0059] According to the historical machine preventive maintenance material data of the machine preventive maintenance type corresponding to the machine, machine preventive maintenance material data necessary for the machine preventive maintenance type corresponding to the machine is determined.

[0060] In an embodiment of the present disclosure, the determination unit is further configured to:

[0061] According to the historical machine preventive maintenance material data of the machine preventive maintenance type corresponding to the machine, machine preventive maintenance material data necessary for the machine preventive maintenance type corresponding to the machine is determined.

[0062] The machine preventive maintenance material data necessary for the machine preventive maintenance type corresponding to the machine is determined.

[0063] In an embodiment of the present disclosure, the determination unit is further configured to:

[0064] The current machine preventive maintenance execution time of the machine is obtained.

[0065] It is determined whether the current machine preventive maintenance execution time of the machine meets the current machine preventive maintenance execution specification.

[0066] If the current machine preventive maintenance execution specification is met, the current machine preventive maintenance material data necessary for the machine is obtained.

[0067] In an embodiment of the present disclosure, the determination unit is further configured to:

[0068] If the current machine preventive maintenance execution specification is not met, a second locking signal is sent to lock the machine.

[0069] In an embodiment of the present disclosure, the determination unit is further configured to:

[0070] If the data amount of the current batch of machine operation data is less than the data amount of the previous batch of machine operation data, it is determined that the machine has been reset.

[0071] According to still another aspect of the present disclosure, a computer device is provided, comprising a processor, a memory, and an input / output interface; the processor is connected with the memory and the input / output interface respectively, wherein the input / output interface is configured to receive and output data, the memory is configured to store a computer program, and the processor is configured to call the computer program to enable the computer device to execute the machine preventive maintenance detection method in any embodiment of the present disclosure.

[0072] According to still another aspect of the present disclosure, there is provided a computer readable storage medium storing a computer program adapted to be loaded and executed by a processor to cause a computer device having the processor to perform the machine preventive maintenance detection method in any of the embodiments of the present disclosure.

[0073] According to still another aspect of the present disclosure, there is provided a computer program product, which, when executed by a processor, implements the machine preventive maintenance detection method in any of the embodiments of the present disclosure.

[0074] It should be understood that the foregoing general description and the following detailed description are only exemplary and explanatory, and are not restrictive of the present disclosure.

[0075] By the above manner, the machine running data is acquired, and if it is determined according to the machine running data that the machine is currently reset, the current machine preventive maintenance material requisition information of the machine is acquired, and it is determined according to the current machine preventive maintenance material requisition information whether the machine has performed the current machine preventive maintenance at the current reset. That is, by determining that the machine is currently reset, it can be determined according to the current machine preventive maintenance material requisition information of the machine whether the machine has actually performed the PM, so that when it is determined that the machine has not actually performed the PM, the machine is prevented from continuing to run the goods, and the product yield is improved. BRIEF DESCRIPTION OF DRAWINGS

[0076] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and serve to explain the principles of the present disclosure. It is readily apparent to one of ordinary skill in the art that the accompanying drawings only illustrate some embodiments of the present disclosure, and other drawings can be obtained by one of ordinary skill in the art without any creative effort based on the accompanying drawings.

[0077] Figure 1 Fig. 1 shows a structure schematic diagram of a machine preventive maintenance detection system in an embodiment of the present disclosure;

[0078] Figure 2 Fig. 2 shows a flow schematic diagram of a machine preventive maintenance detection method in an embodiment of the present disclosure;

[0079] Figure 3 Fig. 3 shows a flow schematic diagram of another machine preventive maintenance detection method in an embodiment of the present disclosure;

[0080] Figure 4 Fig. 4 shows a structure schematic diagram of another machine preventive maintenance detection device in an embodiment of the present disclosure;

[0081] Figure 5 Fig. 5 shows a structure schematic diagram of a computer device in an embodiment of the present disclosure;

[0082] Figure 6 FIG. 1 shows a schematic diagram of a computer-readable storage medium according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0083] Example implementations are now described with reference to the following drawings. Example implementations can, however, be implemented in many different forms and should not be construed as limited to the examples set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example implementations to those skilled in the art. The described features, structures, or characteristics can be combined in one or more implementations.

[0084] In addition, the drawings are only schematic and are non-limiting. Identical components have been given the same reference numerals in the various drawings and the same reference designators have been used throughout the drawings and the detailed description for consistency and ease of understanding. It should be noted, that for clarity and ease of illustration these drawings can show certain elements magnified in size that are not necessarily to scale. The same reference numerals in different drawings represent the same or similar elements.

[0085] The flow diagrams shown in the various figures, are examples only and are not necessarily to scale. For example, some of the steps can also be combined or partially combined, and the order of execution can be changed, so the actual executed order can be different from that shown.

[0086] In the related art, because the process of performing PM and the process of resetting data are independent of each other, there can be a situation in which the machine data is reset, but PM is not actually performed. In this case, the machine continues to run without performing PM, which can cause abnormal running of the machine, thereby affecting product quality and reducing the yield of the product.

[0087] In view of this, the embodiments of the present disclosure obtain machine running data, and when it is determined according to the machine running data that the machine has been currently reset, obtain current machine preventive maintenance material consumption information of the machine, and determine whether the machine has performed current machine preventive maintenance at the current reset according to the current machine preventive maintenance material consumption information. That is, by determining that the machine has been currently reset, it can be determined according to the current machine preventive maintenance material consumption information of the machine whether the machine has actually performed PM, so that when it is determined that the machine has not actually performed PM, the machine is prevented from continuing to run, thereby improving the yield of the product.

[0088] In order to facilitate the overall understanding of the technical solutions provided by the embodiments of the present disclosure, next, the machine preventive maintenance detection system provided by the embodiments of the present disclosure will be described.

[0089] Figure 1 A system architecture diagram of a machine preventive maintenance detection system is shown. As shown, the machine preventive maintenance detection system 100 can include a machine 101, a fault detection and classification module 102, and a computer device 103. Figure 1

[0090] The machine 101 is used for producing products. The machine 101 can be any semiconductor manufacturing equipment. For example, the machine 101 can be an etching machine.

[0091] The fault detection and classification module 102 can be a fault detection and classification system (FDC). The fault detection and classification module 102 can be used to report machine operation data of the machine 101 to the computer device 103.

[0092] The computer device 103 is used to obtain the machine operation data reported by the fault detection and classification module 102, and execute the machine preventive maintenance detection method in the present disclosure.

[0093] The computer device 103 in the present disclosure includes but is not limited to a terminal device or a server. In other words, the computer device 103 can be a server or a terminal device, or a system composed of a server and a terminal device. The terminal device mentioned above can be an electronic device, including but not limited to a mobile phone, a tablet computer, a desktop computer, a notebook computer, a palm computer, a vehicle-mounted device, an augmented reality / virtual reality (AR / VR) device, a head-mounted display, a smart television, a wearable device, a smart speaker, a digital camera, a camera, and other mobile internet devices (MIDs) with network access capabilities, or terminal devices in scenarios such as trains, ships, and airplanes. The server mentioned above can be a standalone physical server, or a server cluster or distributed system composed of multiple physical servers, or a cloud server providing cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, vehicle-road cooperation, content delivery networks (CDNs), and big data and artificial intelligence platforms, etc.

[0094] ​The following specific embodiments are used to explain the machine preventive maintenance detection method in the present disclosure. The machine preventive maintenance detection method in the present disclosure can be implemented by a computer device, that is, the computer device can execute each step of the machine preventive maintenance detection method in the present disclosure. In this case, the machine preventive maintenance detection device can be included in the computer device.

[0095] Figure 2 A flowchart of a machine preventive maintenance detection method in an embodiment of the present disclosure is shown. As shown in Figure 2 The machine preventive maintenance detection method in the present disclosure includes the following steps:

[0096] S202: Obtain machine running data.

[0097] In a possible embodiment, the machine in the present disclosure can be a semiconductor manufacturing device. When the machine is running, the machine running data is obtained to facilitate monitoring the running condition of the machine.

[0098] Exemplarily, the obtained machine running data can be reported through FDC, but the present disclosure is not limited thereto. The FDC can periodically report the machine running data, or the reporting of the machine running data can be triggered by an event, for example, after detecting that a batch of products is produced, or detecting a fault in the production process of the products, the reporting of the machine running data is automatically triggered. The period of reporting the machine running data can be preset, and the machine running data reported by the FDC is collected every first preset time period. For example, the machine running data reported by the FDC is collected every ten minutes, but the present disclosure is not limited thereto. The ten minutes are only used for illustration.

[0099] The machine running data refers to any data collected by the machine in the running process of producing products. For example, it can include any one or more of product quantity data, consumable consumption data, running time, etc. The machine running data can include current batch machine running data and previous batch machine running data. The current batch machine running data refers to the relevant data collected in the production process of the current batch of products. The previous batch machine running data refers to the relevant data collected in the production process of the previous batch of products. The products produced by the machine in the present disclosure can be semiconductor products such as wafers.

[0100] The product quantity data can specifically include wafer quantity data (Wafer Count), and the consumable consumption data can specifically include power consumption data in kilowatt hours (kWh), film thickness consumption data, etc. The running time refers to the running time of the machine.

[0101] It should be noted that the current batch machine running data represents the machine running data corresponding to the batch (i.e. the current batch) closest to the current time and having produced a batch of products. The previous batch machine running data refers to the machine running data corresponding to a batch adjacent to the current batch and before the current batch.

[0102] S204: Determine whether the machine has been reset according to the machine running data.

[0103] In a possible embodiment, whether the machine has been reset can be determined by comparing the data amount of the current batch machine running data and the data amount of the previous batch machine running data in the machine running data. For example, whether the current batch machine running data reported by the FDC is the machine running data reported by the FDC after the machine has been reset and then run can be determined.

[0104] For example, when the data amount of the current batch machine running data reported by the FDC is less than the data amount of the previous batch machine running data, it can be determined that the machine has been reset. After it is determined that the machine has been reset, subsequent steps can be performed to determine whether the state of the machine after being reset is reasonable, whether the process conforms to the standard, and the like.

[0105] When it is determined that the state after being reset is unreasonable, the machine can be directly locked and relevant staff can be notified to handle. When it is determined that the PM operation is not in compliance, the machine can also be locked and relevant staff can be notified to handle.

[0106] Further, when the data amount of the current batch machine running data reported by the FDC is greater than or equal to the data amount of the previous batch machine running data, it can be determined that the machine has not been reset. If the machine has not been reset, it is not necessary to determine whether the machine has actually performed PM.

[0107] S206: Obtain the current machine preventive maintenance material requisition information of the machine.

[0108] In a possible embodiment, for any machine, when PM needs to be performed, the machine needs to requisition the material for performing PM, and the requisition information of the material will be left in the machine preventive maintenance material requisition record when the material for performing PM is requisitioned. This requisition information can be referred to as machine preventive maintenance material requisition information. Therefore, if the machine has actually performed PM in the current reset state, the current machine preventive maintenance material requisition information corresponding to the machine can be obtained from the machine preventive maintenance material requisition record of the machine.

[0109] If the current machine preventive maintenance material requisition information of the machine is not acquired, it indicates that the machine has not executed the requisition record of the material of the PM, and the PM process is not actually executed. At this time, it can be determined that the machine has not executed the current preventive maintenance of the machine at the current reset, and the first locking signal can be triggered to lock the machine. When the machine is locked, the staff can be notified to prevent the machine from continuing to run and produce unqualified products.

[0110] If the current machine preventive maintenance material requisition information of the machine is acquired, step S208 is continued.

[0111] S208: According to the current machine preventive maintenance material requisition information, it is determined whether the machine has executed the current preventive maintenance of the machine at the current reset.

[0112] In a possible embodiment, the current machine preventive maintenance material requisition information can be acquired through the material requisition application sheet of the machine. The material requisition application sheet indicates that the machine needs to apply for requisition of the material needed to execute the PM before executing the PM, that is, the material requisition application sheet needs to be opened. Therefore, the machine preventive maintenance material requisition information can be acquired from the material requisition application sheet. To acquire the current machine preventive maintenance material requisition information, it can be acquired from the material requisition application sheet corresponding to the current batch.

[0113] The machine whether has executed the current preventive maintenance of the machine at the current reset can be determined by the following method: determining the current machine preventive maintenance required material data of the machine, determining whether the current machine preventive maintenance required material corresponding to the current machine preventive maintenance required material data has been requisitioned according to the current machine preventive maintenance material requisition information, if the current machine preventive maintenance required material has not been requisitioned, it is determined that the machine has not executed the current preventive maintenance of the machine at the current reset, and if the current machine preventive maintenance required material has been requisitioned, it is determined that the machine has executed the current preventive maintenance of the machine at the current reset.

[0114] Further, to determine whether the machine has executed the current preventive maintenance of the machine at the current reset, it is necessary to first determine which data the current machine preventive maintenance required material data of the machine includes, and the specific method is as follows: determining the current type of the current machine preventive maintenance, and determining the current machine preventive maintenance required material data according to the machine and the current type.

[0115] In an exemplary embodiment, the current type of the current machine preventive maintenance is determined in the following manner: the current type is determined according to the current batch machine running data.

[0116] Exemplarily, the PM types of each machine in performing PM are different, and the required materials data of the machine preventive maintenance can also be different. The current type can be determined through the current batch machine running data, and the current machine preventive maintenance required material data can be determined through the current type.

[0117] In the process of the machine producing products, the amount of consumables consumed by the machine is checked, and the running time of the machine is checked. The consumables can be any one or more of the power consumed by the machine in producing products, the target material or chemicals consumed by the machine in producing products, etc.

[0118] For example, by determining how many products the machine produces in the current batch, determining how much power the machine consumes in the current batch, determining how much film thickness the machine consumes in the current batch, etc., to determine which PM type corresponds to each unit in the above data corresponds to a PM type. Therefore, the PM type can be determined by the current batch machine running data in the machine running data.

[0119] Each unit in the above data corresponds to a PM type, which can be understood as: according to the data type in the above data and the condition that meets a certain specification, a PM type can be determined.

[0120] Because the number of products produced by the machine in the working state is different, or the amount of power consumed is different, the preventive maintenance required is also different. For example, if 5000 products are produced in the current batch, the type of PM that needs to be performed can be type A. If 10000 products are produced in the current batch, the type of PM that needs to be performed can be type B. Or, if the power consumed in the current batch is 50kWh, the type of PM that needs to be performed can be type C, and if the power consumed in the current batch is 1000kWh, the type of PM that needs to be performed can be type D.

[0121] According to different PM types, the corresponding machine preventive maintenance required material data can be different, or can be partially the same. For example, if the current type is the first PM type, the corresponding current machine preventive maintenance required material data can be A, B and C; if the current type is the second PM type, the corresponding current machine preventive maintenance required material data can be A, D and E.

[0122] After determining the current type of the machine in performing the current machine preventive maintenance, the current machine preventive maintenance required material data of the machine can be determined according to the current type of the current machine preventive maintenance.

[0123] Exemplarily, the machine obtains machine preventive maintenance required material data corresponding to each machine preventive maintenance type, and determines current machine preventive maintenance required material data according to the current type of the machine and the machine preventive maintenance required material data corresponding to each machine preventive maintenance type.

[0124] Specifically, in the machine preventive maintenance detection method provided in the embodiments of the present disclosure, a database can be constructed by machine operation data reported by FDC, and SAP material requisition information in data processing. The machine operation data reported by FDC and historical data of machine material requisition are integrated and analyzed by constructing the database, and machine preventive maintenance required material data corresponding to each PM type is accurately obtained.

[0125] The specific method of constructing the database can be as follows: obtaining historical machine preventive maintenance material data of the machine corresponding to the machine preventive maintenance type, and determining machine preventive maintenance required material data corresponding to the machine preventive maintenance type of the machine according to the historical machine preventive maintenance material data of the machine corresponding to the machine preventive maintenance type.

[0126] Exemplarily, the machine operation data reported by FDC is collected once every first preset time period, and the historical data is recorded and saved, and the historical machine preventive maintenance material data of all machines during PM is collected within a second preset time period. For example, the historical machine preventive maintenance material data of all machines during PM in the past two years is collected, and the database is constructed by saving the machine operation data reported by FDC and the historical machine preventive maintenance material data.

[0127] After the database is constructed, the historical machine preventive maintenance material data of all machines during PM can be statistically analyzed and processed when analyzing machine preventive maintenance required material data corresponding to each machine preventive maintenance type. The specific process is as follows: according to the historical machine preventive maintenance material data of the machine corresponding to the machine preventive maintenance type, the preventive maintenance material that exists in the historical machine preventive maintenance of the machine preventive maintenance type is determined, and the preventive maintenance material that exists in the historical machine preventive maintenance of the machine preventive maintenance type is taken as machine preventive maintenance required material data corresponding to the machine preventive maintenance type.

[0128] By the above manner, according to the historical machine preventive maintenance material data corresponding to the machine preventive maintenance type of the machine, the machine preventive maintenance material data that the machine exists every time in the process of historical machine preventive maintenance is determined by the big data analysis, that is, the machine preventive maintenance material data that the machine must use, the credibility is improved, and the accuracy of determining whether the machine executes the current machine preventive maintenance when the machine preventive maintenance material data is executed is ensured.

[0129] Exemplarily, when a certain machine needs to execute PM, the machine preventive maintenance material required needs to be applied for use in advance, the historical machine preventive maintenance material data of SAP within two years is summarized, and the statistical analysis method is used to judge whether the material use rate is 100% when a certain machine executes PM, that is, the material information that the machine executes PM every time, that is, the machine preventive maintenance material that the machine must use.

[0130] The material use information in the material application use list can include: order number, material number, application time, material issuing time, machine, and the like.

[0131] Taking the material number in the material use information as an example, if a certain machine exists the same material number every time the material is used when executing PM every time in the historical machine preventive maintenance material data, the material number is the material number of the machine PM material that must be used. In the subsequent judgment, the machine preventive maintenance material data that must be used can be determined by this method.

[0132] By the above manner, the machine preventive maintenance material data that must be used corresponding to the machine executing different PM types can be determined, and the machine preventive maintenance material data that must be used can be obtained by determining the current type of the current machine preventive maintenance in the process.

[0133] After the machine preventive maintenance material data that must be used is obtained, the data in the current machine preventive maintenance material use information is compared with the machine preventive maintenance material data that must be used, if the machine preventive maintenance material that must be used corresponding to the machine preventive maintenance material data that must be used is used in the current machine preventive maintenance material use information, it can be determined that the machine has executed the current machine preventive maintenance when the machine is currently reset, and the process is ended.

[0134] If it is determined that the machine has not executed the current machine preventive maintenance when the machine is currently reset, a first locking signal is triggered to lock the machine, and an alarm information is sent to notify the relevant staff.

[0135] Further, in addition to directly judging whether the machine has performed PM by judging whether the current machine preventive maintenance required material data has been acquired, the machine can also be judged by the following method. Specifically, the current machine preventive maintenance execution time of the machine is judged to determine whether the current machine preventive maintenance execution time meets the current machine preventive maintenance execution specification, to determine whether the state of the machine reset is reasonable.

[0136] In some embodiments, the current machine preventive maintenance execution specification (SPEC) can be set in advance. That is, as long as the machine is clear, the current machine preventive maintenance execution specification corresponding to the machine is pre-set, and the current machine preventive maintenance execution specification of all PM types in a machine is the same.

[0137] In other embodiments, the current machine preventive maintenance execution time and the current machine preventive maintenance execution specification of the machine are both associated with the current type of the current machine preventive maintenance.

[0138] Based on the different preventive maintenance types of the executed PM, the preventive maintenance execution time is also different. Through the above content, the current type of the current batch machine running data corresponding to the machine can be judged, and the current machine preventive maintenance execution time and the current machine preventive maintenance execution specification can be directly obtained.

[0139] For example, if the current machine preventive maintenance execution time does not meet the current machine preventive maintenance execution specification, a second locking signal can be directly sent to lock the machine. If the current machine preventive maintenance execution time meets the current machine preventive maintenance execution specification, it is further judged whether the machine has taken the current machine preventive maintenance required material.

[0140] It should be noted that the current machine preventive maintenance execution specification represents the time standard for the machine to perform PM work. When the machine performs PM, there is a standard time according to the work steps.

[0141] If the current machine preventive maintenance execution time is less than the current machine preventive maintenance execution specification, it means that the current machine preventive maintenance execution time does not meet the current machine preventive maintenance execution specification. This means that the machine has missed a step in performing PM or has only switched states without actually performing PM. In either case, it can lead to subsequent shipment abnormalities and reduce product yield. Therefore, the machine needs to be locked to prevent it from continuing to run.

[0142] By the above-mentioned manner, not only the current preventive maintenance material requisition information of the machine and the current preventive maintenance material data of the machine, but also the current preventive maintenance execution time of the machine, the possible non-compliance factors of the machine when executing PM are analyzed from multiple angles, the risk of abnormal production caused by non-compliance of the machine when executing PM is completely blocked, and the problem of product unqualification caused by non-compliance of the machine when executing PM and continuing to run the subsequent production is eliminated.

[0143] The machine preventive maintenance detection method provided by some embodiments of the present disclosure acquires machine running data, determines that the machine has been reset according to the machine running data, acquires the current preventive maintenance material requisition information of the machine, and determines whether the machine has executed the current preventive maintenance when being currently reset according to the current preventive maintenance material requisition information. By judging the reset condition of the machine running data and then determining the execution condition of PM according to the material requisition condition, whether the current machine is abnormal can be accurately obtained. If the machine executes PM abnormally, the subsequent running is prevented, unnecessary loss is reduced, and product yield is improved.

[0144] In a possible implementation, for any machine in the present disclosure, the machine needs to execute PM generally in the manner of alarm information sent by the machine. After the alarm information ends, it is determined whether the machine executes PM according to the normal process and whether the machine running data is reset. If all conditions are met, the machine meets the normal work process and can continue to run.

[0145] In addition to the above-mentioned judgment of the machine needing to execute PM according to the alarm information, the following two manners can also be included:

[0146] (1) The remaining days of the machine material are estimated.

[0147] (2) The schedule PM of the machine is detected.

[0148] The schedule PM includes the PM executed by the machine every week, the PM executed by the machine every month, and the PM that needs to be executed regularly.

[0149] The above-mentioned two manners can also obtain the time when the machine needs to execute PM.

[0150] Figure 3 Another detailed machine preventive maintenance detection method is shown, as shown in Figure 3 The method includes the following steps:

[0151] S302: Acquire machine running data.

[0152] S304: According to the data amount of the current batch machine running data in the machine running data and the data amount of the previous batch machine running data in the machine running data, it is judged whether the machine has been reset currently. If the data amount of the current batch machine running data is less than the data amount of the previous batch machine running data, it is determined that the machine has been reset currently, and step S306 is executed. If the data amount of the current batch machine running data is greater than or equal to the data amount of the previous batch machine running data, it is determined that the machine has not been reset currently, and the process ends.

[0153] S306: It is judged whether the current machine preventive maintenance material consumption information of the machine is obtained. If yes, the current machine preventive maintenance material consumption information is obtained, and step S308 is executed. If no, the current machine preventive maintenance material consumption information is not obtained, and step S322 is executed.

[0154] S308: According to the current batch machine running data, the current type of the current machine preventive maintenance is determined.

[0155] S310: According to the current type of the current machine preventive maintenance, the current machine preventive maintenance execution time and the current machine preventive maintenance execution specification are determined.

[0156] S312: It is judged whether the current machine preventive maintenance execution time is less than the current machine preventive maintenance execution specification. If yes, step S320 is executed. If no, step S314 is executed.

[0157] S314: According to the current type of the current machine preventive maintenance, the current machine preventive maintenance mandatory material data of the machine is determined.

[0158] S316: According to the current machine preventive maintenance material consumption information, it is judged whether the current machine preventive maintenance mandatory material corresponding to the current machine preventive maintenance mandatory material data has been consumed. If yes, the process ends. If no, step S318 is executed.

[0159] S318: It is determined that the machine triggers the first locking signal to lock the machine at the current reset because the current machine preventive maintenance material consumption information does not include the current machine preventive maintenance mandatory material.

[0160] S320: It is determined that the machine triggers the second locking signal to lock the machine at the current reset because it does not meet the current machine preventive maintenance execution specification.

[0161] S322: It is determined that the machine triggers the third locking signal to lock the machine at the current reset because the current machine preventive maintenance material consumption information is not consumed.

[0162] Through the above embodiments, in the present disclosure, different locking signals are triggered when the machine table does not perform PM or the PM is not performed in accordance with the regulations due to different factors, so that the relevant staff can distinguish the reason for triggering the locking signal through the locking signal, and the problem can be solved faster, and the time for producing products due to processing the locking signal is reduced.

[0163] Based on the same inventive concept, the present disclosure also provides a machine table preventive maintenance detection device, as described in the following embodiments. Since the principle of solving the problem of the device embodiment is similar to that of the above-mentioned method embodiment, the implementation of the device embodiment can be referred to the implementation of the above-mentioned method embodiment, and the repeated parts will not be described again.

[0164] Figure 4 The structure diagram of a machine table preventive maintenance detection device in the embodiment of the present disclosure is shown, as shown in Figure 4 The machine table preventive maintenance detection device 40 comprises:

[0165] The acquisition unit 401 is configured to acquire machine table operation data.

[0166] The determination unit 402 is configured to determine that the machine table has been reset currently according to the machine table operation data.

[0167] The acquisition unit 401 is further configured to acquire current machine table preventive maintenance material requisition information of the machine table.

[0168] The determination unit 402 is further configured to determine whether the machine table has performed the current machine table preventive maintenance at the current reset according to the current machine table preventive maintenance material requisition information.

[0169] Figure 5 is a structure diagram of a computer device provided by the embodiment of the present disclosure. As shown in Figure 5 The computer device in the embodiment of the present disclosure can comprise one or more processors 501, a memory 502 and an input output interface 503. The processor 501, the memory 502 and the input output interface 503 are connected through a bus 504. The memory 502 is configured to store a computer program, the computer program comprising program instructions, the input output interface 503 is configured to receive data and output data, such as to perform data interaction between a host computer and the computer device, or to perform data interaction between various virtual machines in the host computer; the processor 501 is configured to execute the program instructions stored in the memory 502.

[0170] The processor 501 can perform the following operations:

[0171] acquire machine table operation data;

[0172] determine that the machine table has been reset currently according to the machine table operation data;

[0173] obtain current machine preventive maintenance material requisition information of the machine table;

[0174] determine whether the machine table has performed the current machine preventive maintenance at the current reset according to the current machine preventive maintenance material requisition information.

[0175] In some possible implementation manners, the processor 501 can be a central processing unit (CPU), and the processor can also be other general-purpose processors, digital signal processors (DSPs), application specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components, and the like. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor.

[0176] The memory 502 can include a read-only memory and a random access memory, and provide instructions and data for the processor 501 and the input output interface 503. A part of the memory 502 can further include a nonvolatile random access memory. For example, the memory 502 can further store device type information.

[0177] In specific implementation manners, the computer device can execute the implementation manners provided by each step of any method embodiment described above through various functional modules built in the computer device. For details, refer to the implementation manners provided by each step of the method shown in the above method embodiments, which will not be described herein again.

[0178] The embodiment of the present disclosure provides a computer device, including a processor, an input output interface, and a memory. The computer device acquires a computer program in the memory through the processor, and executes each step of the method shown in any embodiment described above.

[0179] The embodiment of the present disclosure further provides a computer readable storage medium, which stores a computer program, Figure 6 A schematic diagram of a computer readable storage medium in the embodiment of the present disclosure is shown as follows, Figure 6As shown, the computer readable storage medium 600 stores a program product capable of implementing the method of the present disclosure. The computer program is adapted to be loaded by the processor and execute the machine preventive maintenance detection method provided by each step of any of the above embodiments. For details, please refer to the implementation manner provided by each step of any of the above embodiments, which will not be described here. In addition, the beneficial effects of using the same method will not be described here. For technical details not disclosed in the computer readable storage medium embodiments of the present disclosure, please refer to the description of the method embodiments of the present disclosure. As an example, the computer program can be deployed to execute on one computer device, or on multiple computer devices located in one place, or on multiple computer devices distributed in multiple places and interconnected through a communication network.

[0180] The computer readable storage medium can be an internal storage unit of the machine PM detection apparatus or the computer device, such as a hard disk or a memory of the computer device. The computer readable storage medium can also be an external storage device of the computer device, such as a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, etc. Further, the computer readable storage medium can include both the internal storage unit and the external storage device of the computer device. The computer readable storage medium is used to store the computer program and other programs and data required by the computer device. The computer readable storage medium can also be used to temporarily store data that has been output or will be output.

[0181] The computer program product or computer program of the present disclosure includes computer instructions stored in a computer readable storage medium. The processor of the computer device reads the computer instructions from the computer readable storage medium, and the processor executes the computer instructions to make the computer device execute the method provided in any of the various optional manners of the above embodiments.

[0182] The terms "first", "second", etc. in the description and claims and drawings of the embodiments of the present disclosure are used to distinguish different objects, not to describe a specific order. In addition, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, device, product or equipment including a series of steps or units is not limited to the listed steps or units, but can optionally include steps or units not listed, or can optionally include other steps or units inherent to the process, method, device, product or equipment.

[0183] Those skilled in the art can appreciate that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be realized in electronic hardware, computer software, or a combination of both. In order to clearly illustrate the interchangeability of hardware and software, the components and steps of each example have been described in general terms in the specification. Whether the functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. A person skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present disclosure.

[0184] The method and related apparatus provided by the embodiments of the present disclosure are described with reference to the method flowchart and / or structural schematic diagram provided by the embodiments of the present disclosure. Each flow and / or block in the method flowchart and / or structural schematic diagram, and the combination of the flows and / or blocks in the flowchart and / or block diagram can be realized by computer program instructions. The computer program instructions can be provided to a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable application display devices to produce a machine, so that the instructions executed by the computer or other programmable application display devices produce a device that realizes the functions specified in the flowchart Figure 1 The computer program instructions can also be stored in a computer readable memory capable of causing a computer or other programmable application display device to work in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including instruction devices that realize the functions specified in the flowchart Figure 1 The computer program instructions can also be stored in a computer readable memory capable of causing a computer or other programmable application display device to work in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including instruction devices that realize the functions specified in the flowchart Figure 1 The computer program instructions can also be stored in a computer readable memory capable of causing a computer or other programmable application display device to work in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including instruction devices that realize the functions specified in the flowchart Figure 1 The computer program instructions can also be stored in a computer readable memory capable of causing a computer or other programmable application display device to work in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including instruction devices that realize the functions specified in the flowchart Figure 1 The computer program instructions can also be stored in a computer readable memory capable of causing a computer or other programmable application display device to work in a specific manner, so that the instructions stored in the computer readable memory produce a manufactured product including instruction devices that realize the functions specified in the flowchart

[0185] Other embodiments of the present disclosure will be apparent to those skilled in the art upon consideration of the specification and practice of the present disclosure. The present disclosure is intended to cover any variations, uses, or adaptations of the present disclosure following the general principles thereof and including modifications and equivalents of the present disclosure that are obvious to those skilled in the art. The specification and examples are to be regarded as illustrative only, and the true scope of the present disclosure is indicated by the appended claims.

Claims

1. A machine preventive maintenance detection method, characterized in that, include: Acquire machine operation data; Based on the machine operation data, it is determined that the machine has been reset. Obtain the current material requisition information for the machine's preventive maintenance; Determining whether the machine has performed preventive maintenance at the current reset based on the current machine preventive maintenance material requisition information includes: determining the mandatory material requisition data for the current machine preventive maintenance; determining whether the mandatory material requisition data for the current machine preventive maintenance has been requisitioned based on the current machine preventive maintenance material requisition information; if the mandatory material requisition data for the current machine preventive maintenance has not been requisitioned, it is determined that the machine has not performed preventive maintenance at the current reset; if the mandatory material requisition data for the current machine preventive maintenance has been requisitioned, it is determined that the machine has performed preventive maintenance at the current reset. If it is determined that the machine did not perform the current machine preventive maintenance during the current reset, a first locking signal is triggered to lock the machine.

2. The method of claim 1, wherein, Determine the current essential material requisition data for preventive maintenance of the machine, including: Determine the current type of preventive maintenance for the current machine; The data on materials required for preventive maintenance of the current machine are determined based on the machine and the current type.

3. The method of claim 2, wherein, The machine operation data includes the machine operation data for the current batch; Determining the current type of preventive maintenance for the current machine includes: The current type is determined based on the machine operation data of the current batch.

4. The method of claim 3, wherein, The current batch machine operation data includes at least one of the following: product quantity data, consumable consumption data, and operating time data of the machine in the current batch.

5. The method as described in claim 2, characterized in that, Based on the machine and its current type, determine the data on materials required for preventive maintenance of the current machine, including: Obtain the data on the essential materials required for each type of machine preventive maintenance for the machine; Based on the current type of the machine and the mandatory material requisition data for each type of machine preventive maintenance, the mandatory material requisition data for the current machine preventive maintenance is determined.

6. The method as described in claim 5, characterized in that, Obtain the data on the essential materials required for each type of preventive maintenance for the machine, including: Obtain historical material requisition data for the preventive maintenance of the machine corresponding to the machine's preventive maintenance type; Based on the historical material requisition data for the machine's preventive maintenance type, determine the mandatory material requisition data for the machine's preventive maintenance corresponding to that type.

7. The method as described in claim 6, characterized in that, Based on the historical material requisition data for the machine's corresponding preventive maintenance type, determine the mandatory material requisition data for the machine's preventive maintenance corresponding to that type, including: Based on the historical material requisition data of the machine preventive maintenance type corresponding to the machine, determine the preventive maintenance materials that exist in the historical machine preventive maintenance of the machine preventive maintenance type. The preventive maintenance materials that have appeared in all historical preventive maintenance of the machine tool type are taken as the mandatory preventive maintenance materials data for the machine tool type.

8. The method as described in claim 1, characterized in that, Determine the current essential material requisition data for preventive maintenance of the machine, including: Obtain the current preventive maintenance execution time of the machine. Determine whether the current preventive maintenance execution time of the machine conforms to the current preventive maintenance execution specifications; If the current machine preventive maintenance execution specifications are met, the data on the materials required for the current machine preventive maintenance will be obtained.

9. The method as described in claim 8, characterized in that, Also includes: If the current machine preventive maintenance performance specifications are not met, a second locking signal is sent to lock the machine.

10. The method as described in claim 1, characterized in that, The machine operation data includes the machine operation data of the current batch and the machine operation data of the previous batch; Determining that the machine has been reset based on the machine's operating data includes: If the amount of data in the current batch of machine operation data is less than the amount of data in the previous batch of machine operation data, then it is determined that the machine has been reset.

11. A machine tool preventive maintenance and inspection device, characterized in that, include: The acquisition unit is used to acquire machine operation data; The determining unit is used to determine, based on the machine operation data, that the machine has been reset. The acquisition unit is also used to acquire the current machine preventive maintenance material requisition information of the machine. The determining unit is further configured to determine, based on the current machine preventive maintenance material requisition information, whether the machine has performed current machine preventive maintenance at the current reset time, including: determining the mandatory material requisition data for the current machine preventive maintenance; determining, based on the current machine preventive maintenance material requisition information, whether the mandatory material requisition data for the current machine preventive maintenance has been requisitioned; if the mandatory material requisition data for the current machine preventive maintenance has not been requisitioned, then determining that the machine has not performed current machine preventive maintenance at the current reset time; if the mandatory material requisition data for the current machine preventive maintenance has been requisitioned, then determining that the machine has performed current machine preventive maintenance at the current reset time. If it is determined that the machine did not perform the current machine preventive maintenance during the current reset, a first locking signal is triggered to lock the machine.

12. A computer device, characterized in that, Includes processor, memory, and input / output interfaces; The processor is connected to the memory and the input / output interface respectively, wherein the input / output interface is used to receive data and output data, the memory is used to store computer programs, and the processor is used to call the computer programs so that the computer device executes the method according to any one of claims 1-10.

13. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program adapted to be loaded and executed by a processor to cause a computer device having the processor to perform the method of any one of claims 1-10.

Images