Ejector auxiliary installation device

Through the lifting mechanism and pressure plate structure of the thimble auxiliary mounting device, the thimble on the thimble mounting base is neatly on the same horizontal plane, solving the chip fragmentation problem caused by incomplete thimbles, ensuring the success of wafer chip removal and chip integrity.

CN115642124BActive Publication Date: 2025-09-02ZHIRUI SEMICON CO LTD
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Patent Information

Application Number
CN202211428866.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-11-15
Publication Date
2025-09-02
Estimated Expiration
2042-11-15

AI Technical Summary

Technical Problem

During the wafer chip removal process, the chip fragmentation is likely to occur because the thimble is not on the same horizontal plane.

Method used

A thimble auxiliary mounting device is provided, including a frame structure, a lifting mechanism and a pressure plate structure, and the lifting mechanism drives the pressure plate to press the thimble on the thimble mounting seat so that it is on the same horizontal plane.

Benefits of technology

It effectively avoids chip fragmentation caused by the thimble being not on the same level, achieves the neat effect of the thimble and ensures the quality of the chip.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application relates to a device for assisting the installation of ejector pins, comprising a frame structure, a lifting mechanism and a pressure plate structure. The frame structure comprises a top plate, a side plate and a bottom plate. A first through hole is provided on the top plate, a screw fixing structure is fixed on the inner wall surface of the side plate, the screw fixing structure comprises a second through hole, the second through hole and the first through hole are coaxially arranged, and the bottom plate is used to fix the ejector pin mounting seat. The lifting mechanism comprises a guide rod, a screw rod and a guide rod rotating structure. The guide rod is located on the periphery of the screw rod, the screw rod passes through the first through hole, and its bottom end is fixed in the second through hole. The pressure plate mechanism comprises a pressure plate and a pressure plate fixing structure. The bottom surface of the pressure plate is arranged in a horizontal direction and is fixed to the periphery of the guide rod between the top plate and the screw fixing structure through the pressure plate fixing structure. The embodiment of the present application provides a device for assisting the installation of ejector pins, which drives the pressure plate to press down on all the ejector pins of the ejector pin mounting seat through the lifting mechanism, so that they are on the same horizontal plane, effectively ensuring the chip quality during ejector pin-assisted chip removal.
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Description

Technical Field

[0001] The present application relates to the technical field of wafer auxiliary removal, and in particular to a pin-assisted installation device. Background Art

[0002] Ejectors can assist the equipment in removing wafers, but when installing the ejectors, it is necessary to ensure that each ejector is on the same horizontal plane, otherwise it is easy to cause the chip on the wafer to break when removing the wafer. Summary of the Invention

[0003] The embodiment of the present application provides a pin-assisted installation device to solve the technical problem in the related art that when auxiliary equipment is used to remove wafers, multiple pins are not on the same horizontal plane, which easily causes chip breakage during wafer removal.

[0004] In the first aspect, the present application provides a pin auxiliary installation device, including a frame structure, a lifting mechanism and a pressure plate structure, the frame mechanism including a top plate, a side plate and a bottom plate, the top plate, the side plate and the bottom plate enclosing a frame structure with an open front, the top plate being provided with a first through hole, the inner wall surface of the side plate being fixed with a screw fixing structure, the screw fixing structure being provided with a second through hole, the second through hole and the first through hole being coaxially arranged, and the bottom plate being used to fix the pin mounting seat; the lifting mechanism including a guide rod, a screw rod and a guide rod rotating structure, the guide rod being located at the outer periphery of the screw rod, the screw rod passing through the first through hole, and its bottom end being fixed in the second through hole, the guide rod rotating structure being fixed to the top end of the guide rod, and being used to drive the guide rod to rotate relative to the screw rod under the action of external force to perform a lifting and lowering movement; the pressure plate mechanism including a pressure plate and a pressure plate fixing structure, the bottom surface of the pressure plate being arranged in a horizontal direction, and being fixed to the outer periphery of the guide rod between the top plate and the screw fixing structure through the pressure plate fixing structure; the pressure plate being used to press down the pin on the pin mounting seat.

[0005] In some embodiments, the guide rod rotation structure includes a first guide sleeve and a countersunk joint, and the countersunk joint is fixed to the outer periphery of the guide rod located above the top plate through the first guide sleeve.

[0006] In some embodiments, the countersunk hole is a hexagonal countersunk hole.

[0007] In some embodiments, the pressure plate fixing structure includes a second guide sleeve, a pressure plate mounting hole is opened on the pressure plate, the guide rod passes through the pressure plate mounting hole, and the pressure plate is fixed to the outer periphery of the guide rod located between the top plate and the screw rod fixing structure through the second guide sleeve.

[0008] In some embodiments, the screw fixing structure includes a fixing block, which includes two lugs and a second through hole opened in the middle thereof. The two lugs are screwed and fixed to the inner side of the side plate, and the bottom end of the screw is fixed in the second through hole.

[0009] In some embodiments, a circular groove is formed on the bottom plate, and the circular groove is used to fix the ejector mounting seat.

[0010] In some embodiments, there is a gap between the outer periphery of the guide rod and the wall of the first through hole.

[0011] In some embodiments, a nut fixed to the outer periphery of the guide rod is provided at the bottom of the first guide sleeve.

[0012] In some embodiments, the gap between the nut and the top plate is greater than the maximum downward movement distance of the pressure plate.

[0013] In some embodiments, the bottom end of the screw rod is fixed in the second through hole via a coaxial flange.

[0014] The beneficial effects of the technical solution provided by this application include:

[0015] An embodiment of the present application provides a pin-assisted mounting device, which drives a pressure plate to press down all the pins on the pin mounting seat through a lifting mechanism so that they are on the same horizontal plane. This avoids the problem of chips on the wafer being broken due to the pins on the pin mounting seat being not on the same horizontal plane when the auxiliary equipment is performing wafer retrieval. The device has a simple structure and is easy to implement. It has a good pin alignment effect, which effectively guarantees the chip quality during pin-assisted retrieval. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0017] Figure 1 A schematic structural diagram of the ejector pin auxiliary installation device provided in an embodiment of the present application;

[0018] Figure 2 Another structural schematic diagram of the ejector pin auxiliary installation device provided in an embodiment of the present application.

[0019] In the figure: 11, top plate; 12, side plate; 13, bottom plate; 130, circular groove; 14, fixing block; 140, second through hole; 21, countersunk joint; 22, first guide sleeve; 23, guide rod; 25, screw rod; 31, second guide sleeve; 32, pressure plate. DETAILED DESCRIPTION

[0020] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0021] The embodiment of the present application provides a pin-assisted mounting device, which can solve the technical problem in the prior art that the pins on the pin mounting seat are not on the same horizontal plane, causing the chip to be easily broken when the pin assists in wafer removal.

[0022] As mentioned above, the auxiliary wafer removal is to assist in removing chips from the wafer.

[0023] First, please refer to Figure 1 The present application provides a device for auxiliary installation of an ejector pin, including a frame structure, a lifting mechanism and a pressure plate 32 structure, wherein the frame structure includes a top plate 11, a side plate 12 and a bottom plate 13, wherein the top plate 11, the side plate 12 and the bottom plate 13 are enclosed to form a frame structure with an open front, a first through hole is formed on the top plate 11, a screw rod 25 fixing structure is fixed on the inner wall surface of the side plate 12, and a second through hole 140 is formed on the screw rod 25 fixing structure, and the second through hole 140 and the first through hole are coaxially arranged, and the bottom plate 13 is used to fix the ejector mounting seat; the lifting mechanism includes a guide rod 23, a screw rod 25 and a guide rod 23 rotating Rotating structure, the guide rod 23 is located at the outer periphery of the screw rod 25, the screw rod 25 passes through the first through hole, and its bottom end is fixed in the second through hole 140, the guide rod 23 rotating structure is fixed to the top of the guide rod 23, and is used to drive the guide rod 23 to rotate and perform lifting movement relative to the screw rod 25 under the action of external force; the pressing plate 32 mechanism includes a pressing plate 32 and a pressing plate 32 fixing structure, the bottom surface of the pressing plate 32 is arranged in the horizontal direction, and is fixed to the outer periphery of the guide rod 23 between the top plate 11 and the screw rod 25 fixing structure through the pressing plate 32 fixing structure; the pressing plate 32 is used to press down the ejector pins on the ejector pin mounting seat to align the top ends of all ejector pins.

[0024] The embodiment of the present application provides a pin-assisted mounting device, which drives a pressure plate 32 to press down on all the pins of the pin mounting seat through a lifting mechanism, so that the top ends of all the pins are on the same horizontal plane, thereby avoiding the problem of all the pins on the pin mounting seat not being on the same horizontal plane when the auxiliary equipment is performing wafer removal, causing the chip on the wafer to be broken. The device has a simple structure and is easy to implement, and has a good pin alignment effect, effectively ensuring the chip quality during pin-assisted wafer removal.

[0025] In one embodiment, the number of the side panels 12 can be one, two or three, as long as the frame formed by the top panel 11, the bottom panel 13 and the side panels 12 has a front opening to facilitate placement of the ejector mounting seat on the bottom panel 13 from the front opening.

[0026] In one embodiment, the number of the side panel 12 is one, and the top panel 11, the side panel 12 and the bottom panel 13 form a semi-enclosed frame with front and back openings.

[0027] In one embodiment, there are two side panels 12 , and the top panel 11 , the two side panels 12 and the bottom panel 13 form a frame with front and back openings.

[0028] In one embodiment, there are three side panels 12 , and the top panel 11 , the three side panels 12 , and the bottom panel 13 form a frame with a front opening.

[0029] In one embodiment, the ejector mounting device provided by the present application includes a frame mechanism, a lifting mechanism and a pressure plate 32 mechanism, the frame mechanism includes a top plate 11, a side plate 12 and a bottom plate 13, the top plate 11, the side plate 12 and the bottom plate 13 enclose a frame structure with an open front, a first through hole is opened on the top plate 11, a screw rod 25 fixing structure is fixed on the inner wall surface of the side plate 12, the screw rod 25 fixing structure is opened with a second through hole 140, the second through hole 140 and the first through hole are coaxially arranged, and the bottom plate 13 is used to fix the ejector mounting seat; the lifting mechanism includes a guide rod 23, a screw rod 25, a first guide sleeve 22 and a countersunk joint 21, the guide rod 23 is located on the outer periphery of the screw rod 25, and the screw rod 25 passes through The first through hole has its bottom end fixed in the second through hole 140, and the countersunk joint 21 is coaxially fixed to the top end of the guide rod 23 through the first guide sleeve 22, and is used to drive the countersunk joint 21 to drive the guide rod 23 to rotate relative to the screw rod 25 when an external force acts on the countersunk hole of the countersunk joint 21, thereby driving the guide rod 23 to rotate and move up and down relative to the screw rod 25; the pressure plate 32 structure includes a pressure plate 32 and a pressure plate 32 fixing structure, and the bottom plate 13 of the pressure plate 32 is arranged in the horizontal direction. The pressure plate 32 is fixed to the outer periphery of the guide rod 23 between the top plate 11 and the screw rod 25 fixing structure through the pressure plate 32 fixing structure. The guide rod 23 moves up and down relative to the screw rod 25, driving the pressure plate 32 to move up and down, thereby pressing all the ejectors on the ejector mounting seat so that they are on the same horizontal plane. The auxiliary installation device for ejector pins provided in the present application acts on the countersunk hole through external force, driving the guide rod 23 to rotate, thereby driving the pressure plate 32 to press down all the ejector pins on the ejector pin mounting seat. The operation is simple, and the guide rod 23 moves up and down along the screw rod 25. The lifting and lowering motion control accuracy is high. It is suitable for fine parts, especially the alignment operation on the ejector pin mounting seat, without causing damage to the ejector pins during the alignment process.

[0030] As described above, the alignment is achieved by pressing down the top ends of the ejector pins on the ejector pin mounting seat through the bottom plate 13 of the pressing plate 32 so that the top ends of all the ejector pins are on the same horizontal plane.

[0031] In one embodiment, the countersunk hole on the countersunk joint 21 is a hexagonal countersunk hole. A hexagonal screwdriver is used in conjunction with the hexagonal countersunk hole to drive the guide rod 23 to rotate, and the pressure plate 32 is pressed down by manual operation. The operation is highly precise, and all the ejector pins on the ejector pin mounting seat can be aligned without damaging the ejector pins.

[0032] In one embodiment, the guide rod 23 passes through the first through hole and is screwed and fixed to the top plate 11 through the first guide sleeve 23 .

[0033] In one embodiment, the ejector mounting device provided by the present application includes a frame mechanism, a lifting mechanism and a pressure plate 32 mechanism, the frame mechanism includes a top plate 11, a side plate 12 and a bottom plate 13, the top plate 11, the side plate 12 and the bottom plate 13 enclose a frame structure with an open front, a first through hole is provided on the top plate 11, a screw rod 25 fixing structure is fixed on the inner wall surface of the side plate 12, the screw rod 25 fixing structure is provided with a second through hole 140, the second through hole 140 and the first through hole are coaxially arranged, and the bottom plate 13 is used to fix the ejector mounting seat; the lifting mechanism includes a guide rod 23, a screw rod 25, a first guide sleeve 22 and a countersunk joint 21, the guide rod 23 is located on the outer periphery of the screw rod 25, the screw rod 25 is provided with a first guide sleeve 22 and a countersunk joint 21, the guide rod 23 is located on the outer periphery of the screw rod 25, and the screw rod 25 is provided with a first guide sleeve 22 and a countersunk joint 21. 25 passes through the first through hole, and its bottom end is fixed in the second through hole 140. The countersunk joint 21 is coaxially fixed to the top end of the guide rod 23 through the first guide sleeve 22, and is used to drive the countersunk joint 21 to rotate and thereby drive the guide rod 23 to move up and down relative to the screw rod 25 when an external force acts on the countersunk hole of the countersunk joint 21; the pressure plate 32 structure includes a pressure plate 32 and a second guide sleeve. The bottom plate 13 of the pressure plate 32 is arranged in the horizontal direction. The pressure plate 32 is fixed on the outer periphery of the guide rod 23 between the top plate 11 and the screw rod 25 fixing structure through the second guide sleeve. The guide rod 23 moves up and down relative to the screw rod 25, driving the pressure plate 32 to move up and down, thereby pressing all the ejectors on the ejector mounting seat so that they are on the same horizontal plane.

[0034] In one embodiment, the second guide sleeve is screwed and fixed on the pressing plate 32 .

[0035] In one embodiment, the ejector mounting device provided by the present application includes a frame mechanism, a lifting mechanism and a pressure plate 32 mechanism, the frame mechanism includes a top plate 11, a side plate 12 and a bottom plate 13, the top plate 11, the side plate 12 and the bottom plate 13 enclose a frame structure with an open front, the top plate 11 is provided with a first through hole, a fixing block 14 is fixed on the inner wall surface of the side plate 12, the fixing block 14 is provided with a second through hole 140, the second through hole 140 and the first through hole are coaxially arranged to ensure that the guide rod 23 is vertically lifted and moved, and the bottom plate 13 is used to fix the ejector mounting seat; the lifting mechanism includes a guide rod 23, a screw rod 25, a first guide sleeve 22 and a countersunk joint 21, and the guide rod 23 is located on the outer periphery of the screw rod 25 The screw rod 25 passes through the first through hole, and its bottom end is fixed in the second through hole 140. The countersunk joint 21 is coaxially fixed to the top of the guide rod 23 through the first guide sleeve 22, and is used to drive the countersunk joint 21 to rotate and thereby drive the guide rod 23 to move up and down relative to the screw rod 25 when an external force acts on the countersunk hole of the countersunk joint 21; the pressure plate 32 structure includes a pressure plate 32 and a second guide sleeve. The bottom plate 13 of the pressure plate 32 is arranged in the horizontal direction. The pressure plate 32 is fixed to the outer periphery of the guide rod 23 between the top plate 11 and the screw rod 25 fixing structure through the second guide sleeve. The guide rod 23 moves up and down relative to the screw rod 25, driving the pressure plate 32 to move up and down, thereby pressing all the ejectors on the ejector mounting seat so that they are on the same horizontal plane. In this application, the screw rod 25 is vertically fixed to the side plate 12 by the fixing block 14, and the guide rod 23 is driven to move up and down by external force, and the guide rod 23 drives the pressure plate 32 to move up and down, thereby pressing down all the ejectors on the ejector mounting seat to achieve ejector alignment.

[0036] In one embodiment, the fixing block 14 includes two lugs and a second through hole 140 opened in the middle of the fixing block 14 . The two lugs are screwed and fixed to the inner side of the side plate 12 , and the bottom end or bottom of the screw rod 25 is fixed in the second through hole 140 .

[0037] In one embodiment, the bottom or the bottom end of the screw rod 25 is fixed in the second through hole 140 via a coaxial flange.

[0038] In one embodiment, the bottom end or bottom of the screw rod 25 is fixed to the fixing block 14 .

[0039] In one embodiment, the bottom of the screw rod 25 is fixed on the fixing block 14 , and the second through hole 140 extends out of the bottom end.

[0040] In one embodiment, the bottom of the screw rod 25 is fixed in the second through hole 140 of the fixing block 14, and its bottom end extends out of the second through hole 140, so that the screw rod 25 is passed through and fixed in the fixing seat, thereby achieving a better vertical fixing effect. There is a gap between the bottom of the screw rod 25 and the bottom plate 13 to prevent the bottom plate 13 from interfering with the bottom end of the screw rod 25 and affecting its vertical fixing effect or affecting the reliability of the fixed connection between the screw rod 25 and the fixing block 14.

[0041] In one embodiment, a circular recess is formed on the outer periphery of the second through hole 140. This recess provides downward movement space for the guide rod 23 and acts as a limiter for further downward movement. Therefore, the height of the fixing block 14 fixed to the inner side of the side plate 12 can be set based on the maximum downward displacement of the ejector pin on the ejector pin mounting seat.

[0042] In one embodiment, a circular groove 130 is formed on the bottom plate 13 , and the circular groove 130 is used to install a circular ejector mounting seat, which is convenient and simple to implement.

[0043] In other embodiments of the present application, the base plate 13 may also be provided with a detachable mounting boss, on which a circular groove 130 is provided for mounting an ejector pin mounting seat. By detachably mounting bosses with circular grooves 130 of different sizes, the ejector pins on the ejector pin mounting seat adapted to wafers of different sizes can be aligned.

[0044] The principle / use method of the embodiment of this application is as follows:

[0045] The first step is to install the ejector pin mounting seat in the circular groove 130 of the bottom plate 13;

[0046] In the second step, fit the hexagonal screwdriver into the hexagonal countersunk hole of the countersunk connector 21, rotate the hexagonal screwdriver to move the guide sleeve and the pressure plate 32 downward, press down the ejector on the ejector mounting seat, and align the top of the ejector.

[0047] In the description of this application, it should be noted that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0048] It should be noted that, in this application, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element.

[0049] The foregoing is merely a list of specific embodiments of the present application, intended to enable those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the broadest scope consistent with the principles and novel features of the present application.

Claims

1. A thimble auxiliary installation device, characterized in that: include: The frame mechanism includes a top plate, side plates, and a bottom plate, wherein the top plate, side plates, and bottom plate enclose a frame structure with an open front, the top plate having a first through hole, the inner wall surface of the side plate having a screw fixing structure fixed thereto, the screw fixing structure having a second through hole, the second through hole being coaxially arranged with the first through hole, and the bottom plate being used to fix an ejector pin mounting seat; The lifting mechanism includes a guide rod, a screw rod, and a guide rod rotating structure. The guide rod is located on the periphery of the screw rod. The screw rod passes through a first through hole and its bottom end is fixed in a second through hole. The guide rod rotating structure is fixed to the top of the guide rod and is used to drive the guide rod to rotate and perform lifting motion relative to the screw rod under the action of an external force. A pressure plate mechanism, comprising a pressure plate and a pressure plate fixing structure, wherein the bottom surface of the pressure plate is arranged in a horizontal direction and is fixed to the outer periphery of the guide rod between the top plate and the screw fixing structure through the pressure plate fixing structure; The pressing plate is used to press down the ejector pin on the ejector pin mounting seat.

2. The ejector pin auxiliary installation device according to claim 1, characterized in that: The guide rod rotating structure includes a first guide sleeve and a countersunk joint, and the countersunk joint is fixed to the outer periphery of the guide rod located above the top plate through the first guide sleeve.

3. The ejector pin auxiliary installation device according to claim 2, characterized in that: The countersunk hole is a hexagonal countersunk hole.

4. The ejector auxiliary installation device according to claim 1, wherein the pressure plate fixing structure includes a second guide sleeve, a pressure plate mounting hole is opened on the pressure plate, the guide rod passes through the pressure plate mounting hole, and the pressure plate is fixed to the outer periphery of the guide rod located between the ejector plate and the screw fixing structure through the second guide sleeve.

5. The ejector pin auxiliary installation device according to claim 1, characterized in that: The screw rod fixing structure includes a fixing block, which includes two lugs and a second through hole opened in the middle. The two lugs are screwed and fixed to the inner side of the side plate, and the bottom end of the screw rod is fixed in the second through hole.

6. The ejector pin auxiliary installation device according to claim 1, characterized in that: A circular groove is provided on the bottom plate, and the circular groove is used to fix the ejector mounting seat.

7. The ejector pin auxiliary installation device according to claim 1, characterized in that: There is a gap between the outer periphery of the guide rod and the hole wall of the first through hole.

8. The ejector pin auxiliary installation device according to claim 2, characterized in that: A nut fixed to the outer periphery of the guide rod is provided at the bottom of the first guide sleeve.

9. The ejector pin auxiliary installation device according to claim 8, characterized in that: The gap between the nut and the top plate is greater than the maximum downward movement distance of the pressing plate.

10. The ejector pin auxiliary installation device according to claim 1, wherein: The bottom end of the screw rod is fixed in the second through hole through a coaxial flange.

Citation Information

Patent Citations

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