Substrate manufacturing system, autonomous mobile cart, and substrate manufacturing method

Abstract

The substrate manufacturing system includes: an autonomously traveling cart (31) that conveys articles used in a substrate processing apparatus (15) on an installation line (10); a robot arm (40) provided on the autonomously traveling cart that conveys articles used in the substrate processing apparatus relative to the substrate processing apparatus; and a control unit (32) provided on the autonomously traveling cart that controls the driving of the robot arm. The control unit is configured to control the driving of the robot arm to carry in and out articles used in the substrate processing apparatus within the movable range in plan view of the working section (154a) in the substrate processing apparatus.

Description

Technical Field

[0001] The present invention relates to a substrate manufacturing system, an autonomous mobile vehicle, and a substrate manufacturing method. Background Art

[0002] Conventionally, a substrate manufacturing system has been known. The substrate manufacturing system is disclosed, for example, in Japanese Unexamined Patent Application Publication No. 2017-216379.

[0003] In the substrate manufacturing system disclosed in Japanese Unexamined Patent Application Publication No. 2017-216379, there are provided: a component mounting device that mounts components on a substrate; and a self-propelled component supply device that supplies components to be mounted in the component mounting device to the component mounting device. In the substrate manufacturing system of Japanese Unexamined Patent Application Publication No. 2017-216379, the self-propelled component supply device is configured to supply a reel wound with a tape holding components to a tape feeder that is disposed in the component mounting device and supplies the components held by the tape.

[0004] Prior Art Documents

[0005] Patent Documents

[0006] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2017-216379 Summary of the Invention

[0007] Problems to be Solved by the Invention

[0008] In the substrate manufacturing apparatus of Japanese Unexamined Patent Application Publication No. 2017-216379, since a reel wound with a tape holding components is supplied to a tape feeder disposed in the component mounting device by the self-propelled component supply device, an operator does not need to perform an operation of supplying components to the component mounting device. However, for articles used inside the component mounting device and inside other substrate processing devices (for example, suction nozzles, support pins, etc.), since they need to be supplied by an operator, there is a problem that it is difficult to reduce the workload of the operator.

[0009] The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a substrate manufacturing system, an autonomous mobile vehicle, and a substrate manufacturing method that can reduce the workload of an operator when loading and unloading articles used inside a substrate processing device with respect to the substrate processing device.

[0010] Means for Solving the Problems

[0011] To achieve the above object, the substrate manufacturing system according to the first aspect of the present invention includes: a mounting line including a plurality of substrate working devices, the substrate working device including a component mounting device for mounting components on a substrate; an autonomous mobile cart for transporting articles used in the substrate working devices on the mounting line; a robotic arm provided on the autonomous mobile cart for transporting articles used in the substrate working devices relative to the substrate working devices; and a control unit provided on the autonomous mobile cart or the robotic arm for controlling the driving of the robotic arm. The substrate working device includes a working unit for working on the substrate. The control unit is configured to control the driving of the robotic arm to carry in and out articles used in the substrate working device within the movable range viewed from above the working unit in the substrate working device. The control unit is configured to control the driving of the robotic arm to hand over articles used in the substrate working device between the robotic arm and the working unit within the substrate working device.

[0012] In the substrate manufacturing system according to the first aspect of the present invention, as described above, the control unit is configured to control the driving of the robotic arm to carry in and out articles used in the substrate working device within the movable range viewed from above the working unit in the substrate working device. Thereby, it is possible to carry in and out articles (e.g., suction nozzles, support pins, waste bins, calibration jigs, etc.) used in the substrate working device by the robotic arm. Therefore, an operator does not need to carry in and out articles with respect to the substrate working device. As a result, it is possible to reduce the work load of the operator when carrying in and out articles used in the substrate working device with respect to the substrate working device. In addition, different from the case where an operator carries in and out articles into and from the substrate working device, it is not necessary to completely stop the operation of the substrate working device. Thereby, it is possible to suppress a decrease in the efficiency (productivity) of substrate manufacturing performed by the substrate working device. Further, in the substrate working device, if necessary, it is possible to carry in and out articles by the robotic arm. Therefore, when necessary, articles used in the substrate working device are prepared, and there is no need to provide a storage space for storing articles within the substrate working device. Thereby, it is possible to miniaturize the substrate working device.

[0013] In the substrate manufacturing system according to the above first aspect, since it is possible to hand over articles between the robotic arm and the working unit that works on the substrate, there is no need to provide a dedicated member for handing over articles between the robotic arm and the working unit. Thereby, it is possible to suppress an increase in the number of components of the substrate working device and to suppress complication of the device structure.

[0014] In the substrate manufacturing system according to the above first aspect, preferably, the substrate working device is configured to identify an article carried into the movable range of the working unit and receive the article from the robotic arm by the working unit based on the identification result. If configured in this way, it is possible to accurately identify the position of the carried-in article, and thereby it is possible to reliably receive the carried-in article by the working unit.

[0015] In the substrate manufacturing system having the structure in which the operation unit receives an article from the robotic arm based on the recognition result of the carried-in article, preferably, the substrate operation device is configured to recognize the type of the article carried into the movable range of the operation unit. If configured in this way, the article can be received by a method more suitable for the operation unit according to the type of the carried-in article.

[0016] In the substrate manufacturing system having the structure in which the operation unit receives an article from the robotic arm based on the recognition result of the carried-in article, preferably, the substrate operation device includes a camera that recognizes the substrate to be processed, and is configured to photograph the article carried into the movable range of the operation unit using the camera and recognize the article based on the photographing result. If configured in this way, the carried-in article can be photographed and recognized using the camera that recognizes the substrate, so there is no need to provide a dedicated member for recognizing the carried-in article. As a result, it is possible to suppress an increase in the number of elements of the substrate operation device and suppress the complication of the device structure.

[0017] In the substrate manufacturing system according to the first aspect described above, preferably, the control unit is configured to control the driving of the robotic arm to transfer the article used in the component mounting device to the mounting head that is the operation unit of the component mounting device. If configured in this way, since the article used in the component mounting device can be transferred to the mounting head of the component mounting device using the robotic arm, the work load of the operator when loading and unloading the article used in the component mounting device with respect to the component mounting device can be reduced.

[0018] In the substrate manufacturing system according to the first aspect described above, preferably, the substrate manufacturing system further includes a server capable of communicating with the autonomous mobile cart and a plurality of substrate operation devices. The server is configured to receive information on the required article from the substrate operation device and send an instruction to convey the article to the substrate operation device to the corresponding autonomous mobile cart. If configured in this way, the management of the articles conveyed to the plurality of substrate operation devices can be performed together using the server, so the conveyance of articles to the plurality of substrate operation devices can be performed efficiently.

[0019] In the substrate manufacturing system according to the first aspect described above, preferably, the control unit is configured to recognize the position of the opening into which the robotic arm is inserted into the substrate operation device and move the autonomous mobile cart to the position of the opening. If configured in this way, the robotic arm can be easily inserted into the opening of the substrate operation device, and thus the article can be easily loaded and unloaded with respect to the substrate operation device using the robotic arm.

[0020] In the substrate manufacturing system according to the first aspect described above, preferably, the control unit is configured to control the driving of the robotic arm to transport an article used in the substrate processing device to a position indicated by the substrate processing device or a preset position of the substrate processing device. If configured in this way, since the article used in the substrate processing device can be transported to a specified position by the robotic arm, the transported article can be easily transferred by a specified operation of the substrate processing device.

[0021] In the substrate manufacturing system according to the first aspect described above, preferably, the substrate processing device is configured to retract the working part when the robotic arm is inserted so as not to interfere with the robotic arm. If configured in this way, during the process of transporting an article by the robotic arm, the situation where the robotic arm interferes with the working part of the substrate processing device can be suppressed, and thus the situation where the article falls from the robotic arm can be suppressed.

[0022] In the substrate manufacturing system according to the first aspect described above, preferably, the article used in the substrate processing device includes at least one of a support pin for supporting a substrate, a nozzle for sucking an element, a waste box for discarding an element, and a calibration jig used for calibration of the substrate processing device. If configured in this way, the working burden of an operator when transporting the support pin, nozzle, waste box, and calibration jig to the substrate processing device can be reduced.

[0023] The autonomous mobile cart according to the second aspect of the present invention includes: an autonomous mobile cart main body that transports an article used in a substrate processing device on an installation line including a plurality of substrate processing devices, the substrate processing device including an element mounting device for mounting an element on a substrate; a robotic arm provided on the autonomous mobile cart that transports an article used in the substrate processing device relative to the substrate processing device; and a control unit provided on the autonomous mobile cart or the robotic arm that controls the driving of the robotic arm. The control unit is configured to control the driving of the robotic arm to carry in and out an article used in the substrate processing device within a movable range under a top view of a working part that processes the substrate in the substrate processing device, and the control unit is configured to control the driving of the robotic arm to transfer an article used in the substrate processing device relative to the working part within the substrate processing device.

[0024] In the autonomous mobile cart according to the second aspect of the present invention, as described above, the control unit is configured to control the driving of the robotic arm to carry in and out the articles used in the substrate processing apparatus within the movable range seen from above of the processing unit in the substrate processing apparatus. Thereby, it is possible to carry in and out the articles used in the substrate processing apparatus by the robotic arm, and thus the operator does not need to carry in and out the articles with respect to the substrate processing apparatus. As a result, it is possible to provide an autonomous mobile cart that can reduce the work load of the operator when carrying in and out the articles used in the substrate processing apparatus with respect to the substrate processing apparatus. In addition, different from the case where the operator carries in and out the articles into and from the substrate processing apparatus, it is not necessary to completely stop the operation of the substrate processing apparatus. Thereby, it is possible to suppress a decrease in the efficiency (productivity) of substrate manufacturing performed by the substrate processing apparatus. Further, in the substrate processing apparatus, when necessary, it is possible to carry in and out the articles by the robotic arm. Therefore, when necessary, the articles used in the substrate processing apparatus are prepared, and there is no need to provide a storage space for storing the articles in the substrate processing apparatus. Thereby, miniaturization of the substrate processing apparatus can be achieved.

[0025] The substrate manufacturing method according to the third aspect of the present invention is a substrate manufacturing method in an installation line including a plurality of substrate processing apparatuses, the substrate processing apparatus including an element mounting apparatus for mounting elements on a substrate, wherein the substrate manufacturing method includes the following steps: conveying the articles used in the substrate processing apparatuses in the installation line by an autonomous mobile cart; driving the robotic arm to carry in and out the articles used in the substrate processing apparatus within the movable range seen from above of the processing unit that processes the substrate in the substrate processing apparatus; and driving the robotic arm to transfer the articles used in the substrate processing apparatus with respect to the processing unit within the substrate processing apparatus.

[0026] In the substrate manufacturing method according to the third aspect of the present invention, as described above, the robot arm is configured to be driven to carry in and out articles used in the substrate processing apparatus within the movable range in plan view of the processing unit that processes the substrate in the substrate processing apparatus. Thus, it is possible to carry in and out the articles used in the substrate processing apparatus by the robot arm, and therefore the operator does not need to carry in and out the articles with respect to the substrate processing apparatus. As a result, it is possible to provide a substrate manufacturing method that can reduce the working burden of the operator when carrying in and out the articles used in the substrate processing apparatus with respect to the substrate processing apparatus. In addition, unlike the case where the operator carries in and out articles into and out of the substrate processing apparatus, it is not necessary to completely stop the operation of the substrate processing apparatus. Thus, it is possible to suppress a decrease in the efficiency (productivity) of substrate manufacturing performed by the substrate processing apparatus. Further, in the substrate processing apparatus, if necessary, it is possible to carry in and out articles by the robot arm. Therefore, when necessary, it is possible to prepare the articles used in the substrate processing apparatus without providing a storage space for storing the articles in the substrate processing apparatus. Thus, it is possible to miniaturize the substrate processing apparatus.

[0027] Advantages of the Invention

[0028] According to the present invention, as described above, it is possible to reduce the working burden of the operator when carrying in and out the articles used in the substrate processing apparatus with respect to the substrate processing apparatus. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a schematic block diagram showing a substrate manufacturing system according to an embodiment of the present invention.

[0030] Figure 2 is a schematic block diagram showing an autonomous mobile cart according to an embodiment of the present invention.

[0031] Figure 3 is a perspective view showing an autonomous mobile cart according to an embodiment of the present invention.

[0032] Figure 4 is a top view showing the structure of a component mounting apparatus according to an embodiment of the present invention.

[0033] Figure 5 is a front view showing the structure of a component mounting apparatus according to an embodiment of the present invention.

[0034] Figure 6 is a perspective view showing a robot arm according to an embodiment of the present invention.

[0035] Figure 7 is a front view showing an inlet of a component mounting apparatus according to an embodiment of the present invention.

[0036] Figure 8It is a top view of a tool conveyed by a robotic arm according to an embodiment of the present invention.

[0037] Figure 9 It is a diagram showing an example of information on an autonomous mobile cart managed by a server according to an embodiment of the present invention.

[0038] Figure 10 It is a diagram showing an example of information on a tool box of an autonomous mobile cart managed by a server according to an embodiment of the present invention.

[0039] Figure 11 It is a diagram showing an example of information on a production plan of a component mounting apparatus managed by a server according to an embodiment of the present invention.

[0040] Figure 12 It is a diagram showing an example of position information of a component mounting apparatus managed by a server according to an embodiment of the present invention.

[0041] Figure 13 It is a perspective view of a hand holding part of a robotic arm according to an embodiment of the present invention.

[0042] Figure 14 It is a diagram for explaining the holding of a nozzle magazine by a robotic arm according to an embodiment of the present invention.

[0043] Figure 15 It is a diagram for explaining the holding of a support pin magazine by a robotic arm according to an embodiment of the present invention.

[0044] Figure 16 It is a side view showing a state where the movement of a robotic arm according to an embodiment of the present invention is restricted.

[0045] Figure 17 It is a perspective view for explaining the connection of an autonomous mobile cart to a component mounting apparatus according to an embodiment of the present invention.

[0046] Figure 18 It is a top view for explaining the connection of an autonomous mobile cart to a component mounting apparatus according to an embodiment of the present invention.

[0047] Figure 19 It is a side view for explaining the insertion of a robotic arm into an inlet of a component mounting apparatus according to an embodiment of the present invention.

[0048] Figure 20 It is a side view for explaining the insertion of a robotic arm into an opening generated by removing a component supply cart from a component mounting apparatus according to an embodiment of the present invention.

[0049] Figure 21 It is a front view of a waste box of a component mounting apparatus according to an embodiment of the present invention.

[0050] Figure 22 This is a front view showing the setting of the calibration jig for the component mounting device for explaining the embodiments of the present invention.

[0051] Figure 23 This is the first flowchart for explaining the tool supply process of the embodiments of the present invention.

[0052] Figure 24 This is the second flowchart for explaining the tool supply process of the embodiments of the present invention. Specific Embodiments

[0053] Hereinafter, embodiments for embodying the present invention will be described based on the drawings.

[0054] (Structure of Substrate Manufacturing System)

[0055] Refer to Figure 1 , the structure of the substrate manufacturing system 100 of the embodiments of the present invention will be described.

[0056] The substrate manufacturing system 100 of the present embodiment is configured to manufacture a substrate S with components E mounted thereon by mounting components E on the substrate S. As Figure 1 shown, the substrate manufacturing system 100 includes a mounting line 10, a server 20, and a plurality of autonomous mobile carts 30.

[0057] A plurality of mounting lines 10 are provided. In addition, the mounting line 10 includes a loader 11, a printer 12, a printing inspection machine 13, a dispenser device 14, a plurality of component mounting devices 15, an appearance inspection device 16, a reflow soldering device 17, an appearance inspection device 18, and an unloader 19. In addition, the mounting line 10 is configured to convey the substrate S along the manufacturing line from the upstream side (left side) to the downstream side (right side). In addition, the loader 11, the printer 12, the printing inspection machine 13, the dispenser device 14, the component mounting device 15, the appearance inspection device 16, the reflow soldering device 17, the appearance inspection device 18, and the unloader 19 are an example of the "substrate processing device" within the scope of protection.

[0058] (Structure of Mounting Line)

[0059] Next, the structure of each device constituting the mounting line 10 will be described.

[0060] The loader 11 has the function of holding the substrate S (wiring substrate) before mounting the component E and loading the substrate into the mounting line 10. In addition, the components include small sheet-like electronic components such as LSIs, ICs, transistors, capacitors, and resistors.

[0061] The printer 12 is a screen printer and has the function of coating a paste solder on the mounting surface of the substrate.

[0062] The printing inspection machine 13 has a function of inspecting the state of the paste solder printed by the printing machine 12.

[0063] The dispenser device 14 has a function of applying paste solder, adhesive, etc. to the substrate S.

[0064] The component mounting device 15 has a function of mounting (loading) the component E at a specified mounting position on the substrate printed with the paste solder. In addition, a plurality of component mounting devices 15 are arranged along the substrate conveyance direction.

[0065] The appearance inspection device 16 is provided downstream of the plurality of component mounting devices 15. The appearance inspection device 16 has a function of inspecting the appearance of the substrate S on which the component E is mounted by the component mounting device 15.

[0066] The reflow soldering device 17 has a function of melting the solder by performing a heat treatment to bond the component E to the electrode portion of the substrate S. The reflow soldering device 17 is configured to perform the heat treatment while conveying the substrate on the conveyance path.

[0067] The appearance inspection device 18 is provided downstream of the reflow soldering device 17. The appearance inspection device 18 has a function of inspecting the appearance of the substrate after the heat treatment by the reflow soldering device 17.

[0068] The unloader 19 has a function of discharging the substrate S after mounting the component E from the mounting line 10.

[0069] A passage for an operator or the autonomous mobile cart 30 to pass through or perform operations is provided between the plurality of mounting lines 10.

[0070] The server 20 manages information related to the mounting line 10. The server 20 manages the type of substrate to be manufactured by the mounting line 10, the number of sheets, the type of component E to be mounted, the inventory of the component E, and the data related to the mounting. The server 20 is configured to be able to communicate with each device (loader 11, printing machine 12, printing inspection machine 13, dispenser device 14, component mounting device 15, appearance inspection device 16, reflow soldering device 17, appearance inspection device 18, unloader 19) of the mounting line 10. In addition, the server 20 is configured to be able to communicate with the autonomous mobile cart 30. That is, the server 20 is configured to send commands to the autonomous mobile cart 30. In addition, the server 20 is configured to receive information such as images from the autonomous mobile cart 30. The server 20 is composed of a computer having a control unit such as a CPU, a storage unit, and a communication unit.

[0071] (Structure of the autonomous mobile cart)

[0072] Refer to Figures 2 to 3 , and the structure of the autonomous mobile cart 30 according to the embodiment of the present invention will be described.

[0073] The autonomous mobile cart 30 is configured to perform autonomous movement to transport articles used in the respective devices (loader 11, printing machine 12, printing inspection machine 13, dispenser device 14, multiple component mounting devices 15, appearance inspection device 16, reflow soldering device 17, appearance inspection device 18, unloader 19) on the installation line 10. Specifically, the autonomous mobile cart 30 is configured to transport and supply components E to be mounted by the component mounting device 15. The autonomous mobile cart 30 transports tools 60 such as suction nozzles 62a and support pins 61a used in the equipment on the installation line 10 for mounting the components E. In addition, the autonomous mobile cart 30 can tow and transport a component supply cart 153b to be mounted on the component mounting device 15. A plurality of component supply devices (tape feeders 153a) can be held in the component supply cart 153b.

[0074] As Figure 2 shown, the autonomous mobile cart 30 includes an autonomous mobile cart main body 31 and a robotic arm 40. The autonomous mobile cart main body 31 includes a control unit 32, a camera 33, a motor 34, a battery 35, a communication unit 36, and a movement restriction unit 37. The robotic arm 40 includes a vertical movement unit 41, a horizontal movement unit 42, a horizontal rotation unit 43, and a hand holding unit 44. In addition, the autonomous mobile cart main body 31 is an example of the "autonomous mobile cart" within the scope of the claimed invention.

[0075] The control unit 32 is provided in the autonomous mobile cart main body 31. In addition, the control unit 32 is configured to control each part of the autonomous mobile cart 30. The control unit 32 includes a CPU (Central Processing Unit) and a memory. The control unit 32 controls the motor 34 to control the autonomous movement of the autonomous mobile cart main body 31. The control unit 32 controls the autonomous mobile cart main body 31 to travel toward the destination based on the stored or acquired position information. For example, the control unit 32 acquires position information based on a tape disposed on the floor surface. Alternatively, the control unit 32 acquires and stores position information based on the configuration data of the installation line 10. Alternatively, the control unit 32 acquires position information based on a signal received from a specific position in the travel area.

[0076] In addition, the control unit 32 is configured to control the driving of the robotic arm 40.

[0077] The camera 33 is configured to photograph the state around the autonomous mobile cart 30. In addition, the camera 33 is provided on at least one of the autonomous mobile cart main body 31 and the robotic arm 40. The camera 33 is used to detect the position of the component mounting device 15 that is the destination of the conveyed item and the position of the opening of the component mounting device 15 that is the destination of the conveyed item. That is, the camera 33 photographs the periphery of the opening, and based on the photographing result, the control unit 32 detects the position of the opening. In addition, the camera 33 photographs in order to obtain information required for the autonomous driving of the autonomous mobile cart main body 31.

[0078] The motor 34 is used for driving the wheels that enable the autonomous mobile cart main body 31 to perform autonomous driving. The motor 34 is configured to drive the wheels to move the autonomous mobile cart main body 31 forward, backward, and rotate.

[0079] The battery 35 is configured to supply power to each part of the autonomous mobile cart 30. The battery 35 includes a rechargeable battery. The autonomous mobile cart main body 31 performs autonomous driving using the power of the battery 35. In addition, the robotic arm 40 is driven using the power of the battery 35. When the power of the battery 35 becomes low, the autonomous mobile cart main body 31 performs autonomous driving to go to the charging station to charge the battery 35.

[0080] The movement restricting unit 37 is configured to fix the robotic arm 40 relative to the autonomous mobile cart main body 31 so that the robotic arm 40 does not move when the autonomous mobile cart main body 31 is moving.

[0081] As Figure 3 shown, the autonomous mobile cart 30 is provided with a placement unit 50 that places various items used in the component mounting device 15. The placement unit 50 includes: a support pin placement unit 51 that places a support pin magazine 61 that stores a plurality of support pins 61a for supporting the substrate S; a nozzle placement unit 52 that places a nozzle magazine 62 that stores a plurality of nozzles 62a for adsorbing components E; and a waste placement unit 53 that houses the waste in the waste box 63.

[0082] As Figure 4 and Figure 5 shown, the component mounting device 15 has a function of mounting (loading) components E at predetermined mounting positions on a substrate S printed with paste solder. The component mounting device 15 includes a base 151, a pair of conveyors 152, a component supply unit 153, a head unit 154, a support unit 155, a pair of rail units 156, a component identification photographing unit 157, and a control unit 158. In addition, as Figure 5 shown, the component mounting device 15 includes a frame 15a and a loading port 15b provided on the frame 15a.

[0083] A pair of conveyors 152 are provided on a base 151 and configured to convey a substrate S in the X direction. Further, the pair of conveyors 152 are configured to hold the conveyed substrate S in a stopped state at the mounting operation position. Further, the pair of conveyors 152 are configured to be able to adjust the interval in the Y direction according to the size of the substrate S.

[0084] The component supply unit 153 is disposed outside the pair of conveyors 152 (on the Y1 side and the Y2 side). Further, a plurality of tape feeders 153a held by a component supply cart 153b (see Figure 20 ) are arranged in the component supply unit 153.

[0085] The tape feeder 153a holds a reel around which a tape is wound, and the tape holds a plurality of components E at regular intervals. The tape feeder 153a is configured to feed out the tape holding the component E by rotating the reel, thereby supplying the component E from the front end of the tape feeder 153a.

[0086] The head unit 154 is arranged to move between above the pair of conveyors 152 and above the component supply unit 153. Further, the head unit 154 includes a plurality of (five) mounting heads 154a having suction nozzles mounted at their lower ends and a substrate recognition imaging unit 154b. Further, the mounting head 154a is an example of the "operation unit" in the claimed scope. Further, the substrate recognition imaging unit 154b is an example of the "camera" in the claims.

[0087] The mounting head 154a is configured to perform operations on the substrate. The mounting head 154a is configured to mount the component E on the substrate S. Specifically, the mounting head 154a is configured to be able to move up and down (able to move in the Z direction), and is configured to adsorb and hold the component E supplied from the tape feeder 153a by the negative pressure generated at the front end of the suction nozzle 62a by the air pressure generating unit, and mount (install) the component E at the mounting position of the substrate S.

[0088] The substrate recognition imaging unit 154b is configured to image the fiducial mark F of the substrate S to be the operation object to identify the position and orientation of the substrate S. And by imaging and identifying the position of the fiducial mark F, the mounting position of the component 31 in the substrate S can be accurately obtained. The substrate recognition imaging unit 154b is configured to image the substrate S from above (from the Z1 direction side). Further, the substrate recognition imaging unit 154b is configured to image the article carried in by the robot arm 40 within the movable range of the mounting head 154a.

[0089] The support unit 155 includes an X-axis motor 155a. The support unit 155 is configured to move the head unit 154 in the X direction along the support unit 155 by driving the X-axis motor 155a. Both ends of the support unit 155 are supported by a pair of rail units 156.

[0090] A pair of rail parts 156 are fixed to the base 151. The rail part 156 on the X1 side includes a Y-axis motor 156a. The rail part 156 is configured such that by driving the Y-axis motor 156a, the support part 155 moves along the pair of rail parts 156 in the Y direction orthogonal to the X direction. The head unit 154 can move in the X direction along the support part 155, and the support part 155 can move in the Y direction along the rail part 156. Thus, the head unit 154 can move in the XY direction.

[0091] The component recognition imaging unit 157 is fixed to the upper surface of the base 151. The component recognition imaging unit 157 is disposed outside (Y1 side and Y2 side) of the pair of conveyors 152. The component recognition imaging unit 157 is configured to image the component E adsorbed to the nozzle of the mounting head 154a from below (Z2 direction side) to recognize the adsorption state (adsorption posture) of the component E before the installation of the component E. Thus, the adsorption state of the component E adsorbed to the nozzle of the mounting head 154a can be obtained.

[0092] The waste box 63 is disposed on the upper surface of the base 151. The waste box 63 is placed on the base 151 in a manner that it can be conveyed by the robotic arm 40.

[0093] The control unit 158 includes a CPU and is configured to control the overall operation of the component mounting device 15, such as the conveying operation of the substrate S by the pair of conveyors 152, the mounting operation by the head unit 154, and the imaging operations by the component recognition imaging unit 157 and the substrate recognition imaging unit 154b. In addition, the control unit 158 is configured to be able to communicate with the server 20. The control unit 158 is configured to transmit and receive information such as production information and component information with the server 20.

[0094] The housing 15a is provided to cover the component mounting device 15. The loading port 15b includes an opening leading to the inside of the component mounting device 15. The loading port 15b is configured to allow the robotic arm 40 to be inserted. When the robotic arm 40 is not inserted, the loading port 15b is covered by a cover 15d (refer to Figure 19 ). In addition, when the robotic arm 40 is inserted, the cover 15d moves to open the loading port 15b.

[0095] As Figure 3 shown, the robotic arm 40 is provided on the autonomous mobile cart body 31. In addition, the robotic arm 40 is configured to convey the items used in the component mounting device 15 relative to the component mounting device 15. As Figure 6As shown in the figure, the robotic arm 40 includes: a vertical movement part 41 having a rotation axis that rotates in the vertical direction; a horizontal movement part 42 connected to the vertical movement part 41 and telescoping in the horizontal direction; a horizontal rotation part 43 connected to the horizontal movement part 42 and rotating in the horizontal direction; and a hand holding part 44 connected to the horizontal rotation part 43 and capable of loading and unloading different types of hands 45 at the front end. The vertical movement part 41 has a base 41a, an arm 41b, and an arm 41c. The horizontal movement part 42 has a slider 42a and a slider 42b. The horizontal rotation part 43 includes an arm 43a and a connecting part 43b.

[0096] The base 41a of the vertical movement part 41 is fixed to the autonomous mobile cart body 31. The arm 41b is arranged to be rotatable about the rotation axis A1 with respect to the base 41a. The arm 41c is arranged to be rotatable about the rotation axis A2 with respect to the arm 41b.

[0097] The slider 42a of the horizontal movement part 42 is arranged to be slidable in the B1 direction (the horizontal direction when the arms 41b and 41c do not rotate) with respect to the arm 41c of the vertical movement part 41. The slider 42b is arranged to be slidable in the B2 direction (the horizontal direction when the arms 41b and 41c do not rotate) with respect to the slider 42a.

[0098] The arm 43a of the horizontal rotation part 43 is arranged to be rotatable about the rotation axis C1 with respect to the slider 42b of the horizontal movement part 42. The connecting part 43b is arranged to be rotatable about the rotation axis C2 with respect to the arm 43a.

[0099] The hand holding part 44 is arranged to be rotatable about the rotation axis D1 with respect to the connecting part 43b of the horizontal rotation part 43. The hand holding part 44 is configured to hold the hand 45 in a loadable and unloadable manner at the front end (refer to Figure 3 ). In addition, as Figure 15 shown, the hand holding part 44 is configured to hold the support pin stocker 61 in a loadable and unloadable manner. In addition, as Figure 20 shown, the hand holding part 44 is configured to be connectable to the component supply cart 153b.

[0100] As Figure 7As shown, a plurality of markers 15c are provided at the loading entrance 15b. The markers 15c are provided for being photographed and recognized by the camera 33 of the autonomous mobile cart 30. The control unit 32 of the autonomous mobile cart 30 obtains the position of the loading entrance 15b based on the photographing result of the marker 15c by the camera 33. Specifically, the control unit 32 obtains information of the component mounting device 15 where there is a request for the tool 60 (support pin 61a, suction nozzle 62a, waste box 63) to be transported from the server 20. The information to be obtained includes the type of the tool 60 requested by the component mounting device 15, the planar position information of the component mounting device 15, and the three-dimensional position information of the loading entrance 15b of the component mounting device 15. The control unit 32 moves the autonomous mobile cart main body 31 based on the planar position information of the component mounting device 15. After the control unit 32 moves the autonomous mobile cart main body 31 in front of the target component mounting device 15, it uses the camera 33 to photograph the periphery of the loading entrance 15b. The control unit 32 identifies the marker 15c provided at the loading entrance 15b according to the photographing result and obtains the position of the loading entrance 15b.

[0101] As Figure 8 shown, a plurality of markers 60a are provided on the tool 60 carried into the component mounting device 15 by the robotic arm 40. The markers 60a are provided for being photographed and recognized by the substrate recognition photographing unit 154b of the component mounting device 15. The control unit 158 of the component mounting device 15 obtains the position of the carried-in tool 60 based on the photographing result of the marker 60a by the substrate recognition photographing unit 154b. That is, the control unit 158 is configured to photograph the articles within the movable range of the mounting head 154a by using the substrate recognition photographing unit 154b and identify the articles based on the photographing result. Specifically, when the control unit 158 receives the positioning completion notification of the robotic arm 40, it moves the substrate recognition photographing unit 154b to the corresponding position according to the tool confirmation position information sent together with the notification or the predefined tool confirmation position information. Then, the control unit 158 photographs the marker 60a of the tool 60 by using the substrate recognition photographing unit 154b to obtain the position of the tool 60.

[0102] In addition, the control unit 158 is configured to identify the articles carried into the movable range of the mounting head 154a and receive the articles from the robotic arm 40 by using the mounting head 154a based on the recognition result. In addition, the control unit 158 is configured to identify the type of the articles carried into the movable range of the mounting head 154a.

[0103] When the component mounting device 15 requests the tool 60, the server 20 uses Figures 9 to 12 the information shown to perform the process of transporting the tool 60 relative to the component mounting device 15 by using the autonomous mobile cart 30.

[0104] AsFigure 9 As shown, the server 20 manages the serial number of the autonomous mobile cart 30 (AGV), the name of the autonomous mobile cart 30 (AGV), the IP address of the autonomous mobile cart 30 (AGV), the IP address of the corresponding server 20, the information of the tool 60 placed on the placement unit 50 (toolbox), and the current position information of the autonomous mobile cart 30 (AGV). In addition, the server 20 manages the tool holding information (type, height, configuration information) of the autonomous mobile cart 30 (AGV).

[0105] In addition, as Figure 10 shown, the server 20 manages the information of the tool 60 corresponding to the toolbox number of the tool 60 placed on the placement unit 50 (toolbox). The information of the tool 60 includes the position information of the multiple markers 60a of the tool 60, the type information of the nozzle 62a, and the type information of the support pin 61a.

[0106] In addition, as Figure 11 shown, the server 20 manages the production plan information. The production plan information includes the model name, the production line number, the scheduled start time of production, the scheduled end time of production, and the number of production sheets. The server 20 is configured to predict the device that requires the transportation of the tool 60 based on the production plan, and perform the management of the autonomous mobile cart 30 in advance so that the autonomous mobile cart 30 can be driven towards the device.

[0107] In addition, as Figure 12 shown, the server 20 manages the position information of the multiple component mounting devices 15. The position information of the component mounting device 15 includes the production line information, the component mounting device information (mounting device name), the device position information, and the position information of the loading port 15b of the component mounting device 15.

[0108] As Figure 13 shown, the hand holding part 44 of the robot arm 40 has multiple claws 44a. The multiple claws 44a are configured to fix the hand 45 by moving inward. The claws 44a are configured to be electrically driven by the control of the control unit 32.

[0109] As Figure 14 shown, the robot arm 40 holds and transports the nozzle magazine 62 provided on the nozzle placement part 52 of the autonomous mobile cart 30. As shown in (A) of Figure 14 , the robot arm 40 moves the hand 45 to the side of the nozzle magazine 62 to be transported. Then, as Figure 14As shown in (B) of the figure, the hand 45 rotates so that a pair of gripping portions 451 of the hand 45 are arranged in the vertical direction. That is, the hand 45 rotates so that the convex portion at the front end of the telescopic portion 452 protrudes in the horizontal direction. In addition, the hand 45 is configured to be rotatable relative to the hand holding portion 44. In addition, the hand 45 is configured to be able to open and close a pair of gripping portions 451. In addition, the hand 45 is configured to be able to extend and contract the telescopic portion 452. The hand 45 is configured to be connected to a terminal and powered from the robotic arm 40 when held by the hand holding portion 44 of the robotic arm 40. In addition, the hand 45 is configured to be driven by the power supplied from the robotic arm 40.

[0110] As Figure 14 shown in (C) of the figure, the hand 45 extends the telescopic portion 452. Then, as Figure 14 shown in (D) of the figure, the hand 45 rotates so that a pair of gripping portions 451 of the hand 45 are arranged in the horizontal direction. That is, the hand 45 rotates so that the convex portion at the front end of the telescopic portion 452 protrudes in the upward direction. Thereby, the convex portion at the front end of the telescopic portion 452 is hooked on the nozzle magazine 62 to be conveyed. As Figure 14 shown in (E) of the figure, the hand 45 contracts the telescopic portion 452. As a result, the nozzle magazine 62 is pulled toward the side of the pair of gripping portions 451. As a result, the nozzle magazine 62 is held by the hand 45. In addition, in a state where the nozzle magazine 62 is held by the hand 45, the switching portion of the nozzle magazine 62 can be operated by the telescopic portion 452. Thereby, the nozzle magazine 62 held by the robotic arm 45 can be switched to a state of holding the nozzle 62a and a state of releasing the holding of the nozzle 62a.

[0111] As Figure 15 shown, the robotic arm 40 holds and conveys a support pin magazine 61 provided on the support pin placement portion 51 of the autonomous mobile cart 30. The robotic arm 40 grips the support pin magazine 61 to be conveyed from below in a state where the hand 45 is removed. Specifically, the robotic arm 40 holds the support pin magazine 61 using the hand holding portion 44. In addition, a gripped portion having the same shape as the hand 45 is provided below the support pin magazine 61.

[0112] As Figure 16 shown, the movement restricting portion 37 of the autonomous mobile cart 30 is configured to fix the robotic arm 40 relative to the autonomous mobile cart main body 31 so that the robotic arm 40 does not move when the autonomous mobile cart main body 31 travels. Specifically, by extending a rod-shaped movement restricting member upward from the autonomous mobile cart main body 31 and passing the movement restricting member through through holes provided in each part of the robotic arm 40, the robotic arm 40 is fixed relative to the autonomous mobile cart main body 31.

[0113] As Figure 17 andFigure 18 As shown, the autonomous traveling cart body 31 is connected to the component mounting device 15. Here, the component mounting device 15 has a connecting portion 70 on the path side extending parallel to the mounting line 10 for connecting and fixing the autonomous traveling cart body 31. And the robot arm 40 is configured to convey the articles used in the component mounting device 15 into the interior of the component mounting device 15 in a state where the robot arm 40 is connected to the connecting portion 70 between the autonomous traveling cart body 31 and the component mounting device 15.

[0114] In addition, the autonomous traveling cart body 31 has: a pair of rollers 38a that can rotate about a rotation axis along the vertical direction; and a plurality of rollers 38b that can rotate about a rotation axis along the horizontal direction. One roller 38a is provided on each of the left and right sides of the autonomous traveling cart body 31. Two rollers 38b are provided on each of the left and right sides of the autonomous traveling cart body 31. A pair of rollers 38b on each of the left and right sides are arranged at intervals in the vertical direction so as to sandwich the roller 38a.

[0115] The connecting portion 70 has a pair of clamping portions 71 arranged along the horizontal direction. Each of the pair of clamping portions 71 has a tapered portion 71a and a tapered portion 71b. As Figure 18 shown, in a plan view, the tapered portion 71a is formed to have a narrowing interval as it approaches the component mounting device 15. Thus, the autonomous traveling cart body 31 is guided along the tapered portion 71a between the pair of clamping portions 71. In addition, at this time, the roller 38a of the autonomous traveling cart body 31 rotates when it abuts against the clamping portion 71. As Figure 17 shown, a pair of tapered portions 71b are arranged vertically with respect to each of the pair of clamping portions 71. The tapered portion 71b is formed to have a widening interval as it approaches the component mounting device 15. Thus, the autonomous traveling cart body 31 is guided to climb over the clamping portion 71. In addition, at this time, the roller 38b of the autonomous traveling cart body 31 rotates when it abuts against the clamping portion 71. The clamping portion 71 of the connecting portion 70 clamps and fixes the autonomous traveling cart body 31 by reducing the interval when the autonomous traveling cart body 31 is disposed therebetween.

[0116] As Figure 19 shown, the robot arm 40 is configured to convey the articles used in the component mounting device 15 into the interior of the component mounting device 15 through the opening of the component mounting device 15. Specifically, the robot arm 40 is configured to carry in and out the tool 60 used by the component mounting device 15 from the loading / unloading port 15b of the component mounting device 15. In addition, the opening (loading / unloading port 15b) of the component mounting device 15 is provided so that the robot arm 40 inserts from the front of the component mounting device 15 into the conveyor 152 (substrate conveying portion) that conveys the substrate S of the component mounting device 15. In addition, as Figure 5As shown, the opening (loading port 15b) of the component mounting device 15 is provided near one end on the conveyance direction (X direction) of the substrate S. The robot arm 40 is configured to convey the tool 60 from the loading port 15b to a height position substantially the same as the height position of the substrate S.

[0117] In addition, the control unit 32 controls the driving of the robot arm 40 to carry in and out articles used in the component mounting device 15 within the movable range in plan view of the mounting head 154a in the component mounting device 15. Specifically, the control unit 32 controls the driving of the robot arm 40 to transfer articles used in the component mounting device 15 with respect to the mounting head 154a within the component mounting device 15.

[0118] As Figure 19 shown, a cover 15d and a driving unit 15e for moving the cover 15d are provided at the loading port 15b. The cover 15d is switched between an open state in which the loading port 15b is opened and a closed state in which the loading port 15b is closed by the driving unit 15e.

[0119] As Figure 19 shown in (A) below, the autonomous mobile cart 30 arrives in front of the component mounting device 15. At this time, the control unit 32 identifies the position of the opening (loading port 15b) for inserting the robot arm 40 into the component mounting device 15, and moves the autonomous mobile cart body 31 to the position of the loading port 15b. Then, as Figure 19 shown in (B) below, the cover 15d becomes the open state. Thereby, the loading port 15b is opened. Then, as Figure 19 shown in (C) below, the robot arm 40 is inserted into the inside of the component mounting device 15 from the opened loading port 15b. At this time, in a state where the height position of the tool 60 (support pin magazine 61) to be conveyed is aligned by the vertical movement unit 41 of the robot arm 40, the tool 60 is inserted into the inside of the component mounting device 15 by extending the horizontal movement unit 42. In addition, in a state where the tool 60 is inserted into the inside of the component mounting device 15, the position of the tool 60 is adjusted by rotating the horizontal rotation unit 43.

[0120] Here, the control unit 32 controls the driving of the robot arm 40 to convey articles used in the component mounting device 15 to a position indicated by the component mounting device 15 or a preset position of the component mounting device 15. In addition, when inserting the robot arm 40, the component mounting device 15 retracts the mounting head 154a so as not to interfere with the robot arm 40.

[0121] As Figure 20As shown, the robot arm 40 is configured to remove the component supply cart 153b from the component mounting device 15, and convey the articles used in the component mounting device 15 to the inside of the component mounting device 15 through the opening created by removing the component supply cart 153b from the component mounting device 15.

[0122] As Figure 20 shown in (A) therein, the robot arm 40 holds the component supply cart 153b using the hand holding part 44. In addition, a held part having the same shape as the hand 45 is provided outside the component supply cart 153b. As Figure 20 shown in (B) therein, in a state where the component supply cart 153b is held and connected by the robot arm 40, the autonomous mobile cart 30 moves to remove the component supply cart 153b from the component mounting device 15.

[0123] After that, the autonomous mobile cart 30 moves the component supply cart 153b to a position where it does not become an obstacle. Then, the robot arm 40 releases the holding of the component supply cart 153b by the hand holding part 44. As Figure 20 shown in (C) therein, the autonomous mobile cart 30 moves to the position after removing the component supply cart 153b. In addition, the robot arm 40 conveys the articles used in the component mounting device 15 to the inside of the component mounting device 15 through the opening created by removing the component supply cart 153b from the component mounting device 15.

[0124] As Figure 21 shown, the robot arm 40 is configured to collect the waste E1 accumulated in the waste box 63. The waste E1 is a defective product of the component E or a component E that has failed to be installed, etc. The waste E1 is discarded by the mounting head 154a into the waste box 63. A slope 63a and a stopper 63b are provided in the waste box 63. In addition, a collection container 63c is provided in the waste box 63.

[0125] The waste E1 discarded by the mounting head 154a is stored in the waste box 63. The robot arm 40 makes the collection container 63c abut against the stopper 63b, and collects the waste E1 from the waste box 63 into the collection container 63c through the slope 63a. In addition, the robot arm 40 collects the waste E1 in the collection container 63c into the waste placement part 53 of the autonomous mobile cart 30. At this time, the lower end of the slope 63a is covered by the stopper 63b, suppressing the outflow of the waste E1.

[0126] As Figure 22As shown, the robotic arm 40 conveys the calibration jig 64 used for the calibration of the component mounting device 15 into the interior of the component mounting device 15. The calibration jig 64 has a jig element 64a and a pedestal 64b. In addition, the calibration jig 64 adsorbs the jig element 64a by the mounting head 154a of the component mounting device 15 and places it on the pedestal 64b. Then, the substrate recognition imaging unit 154b images the position of the jig element 64a placed on the pedestal 64b, and corrects (adjusts) the movement of the mounting head 154a based on the imaging result. An air passage 64c for supplying negative pressure is provided in the pedestal 64b. The air passage 64c is configured to supply negative pressure via the plate portion 61b that supports the mounting support pin 61a. Thereby, the jig element 64a can be adsorbed and fixed to the pedestal 64b by negative pressure, so that the situation where the jig element 64a placed on the pedestal 64b is displaced in position can be suppressed. In addition, when the calibration jig 64 is conveyed by the robotic arm 40, the situation where the jig element 64a falls from the pedestal 64b is suppressed by covering the upper part of the jig element 64a with the claw of the hand 45.

[0127] As Figure 23 and Figure 24 shown, the server 20 is configured to control the supply of the tool 60 to the component mounting device 15 by the autonomous mobile cart 30. That is, the server 20 is configured to receive information on required items from the component mounting device 15 and send an instruction to convey the items to the component mounting device 15 to the corresponding autonomous mobile cart 30.

[0128] In Figure 23 step S1, a request for the tool 60 is sent from the component mounting device 15 to the server 20. In step S2, the server 20 receives the request for the tool 60. In step S3, the server 20 determines whether the autonomous mobile cart 30 (AGV) that holds the requested tool 60 can be dispatched. If the autonomous mobile cart 30 that holds the requested tool 60 cannot be dispatched because it has been dispatched to other devices, etc., in step S4, the server 20 notifies the component mounting device 15 of an error.

[0129] If the autonomous mobile cart 30 that holds the requested tool 60 can be dispatched, then in step S5, the server 20 notifies the corresponding autonomous mobile cart 30 of the movement destination information (information on the component mounting device 15) and the information on the tool 60. In step S6, the autonomous mobile cart 30 receives the movement destination information and the tool information and starts moving to the designated component mounting device 15.

[0130] In step S7, when the autonomous mobile cart 30 reaches in front of the specified component mounting device 15, it requests approval from the server 20 to transfer the tool 60 to the component mounting device 15. In step S8, the server 20 notifies the component mounting device 15 of the approval request received from the autonomous mobile cart 30.

[0131] In step S9, the component mounting device 15 determines whether to approve. If approval is not possible because the transfer opening 15b cannot be opened, etc., in step S10, the component mounting device 15 notifies the autonomous mobile cart 30 of an error via the server 20. If approval is possible, in step S11, the component mounting device 15 performs an operation to retract the mounting head 154a. In step S12, the component mounting device 15 opens the transfer opening 15b. Then, the component mounting device 15 notifies the server 20 of the situation where the transfer opening 15b has been opened.

[0132] In step S13, the server 20 notifies the autonomous mobile cart 30 of the permission to transfer the tool 60 and the information of the tool 60. In step S14, the autonomous mobile cart 30 receives the permission to transfer and the tool information. In step S15, the autonomous mobile cart 30 identifies the position of the transfer opening 15b.

[0133] In step S16, the autonomous mobile cart 30 determines whether it has identified the position of the transfer opening 15b. If it fails to identify the position of the transfer opening 15b, in step S17, the autonomous mobile cart 30 notifies the server 20 of an error.

[0134] If it can identify the position of the transfer opening 15b, in Figure 24 step S18, the autonomous mobile cart 30 starts to transfer the tool 60 using the robotic arm 40. In step S19, the autonomous mobile cart 30 moves the robotic arm 40 to a specified position. In step S20, the autonomous mobile cart 30 notifies the server 20 that the transfer of the tool 60 by the robotic arm 40 has been completed.

[0135] In step S21, the server 20 notifies the component mounting device 15 of the completion of the transfer received from the autonomous mobile cart 30 and the information of the transferred tool 60. In step S22, the component mounting device 15 receives the notification from the server 20 and identifies the position of the tool 60 based on the imaging result of the substrate identification imaging unit 154b.

[0136] In step S23, the component mounting device 15 determines whether the position of the tool 60 is recognized. In the case where the position of the tool 60 is not recognized, in step S24, the component mounting device 15 notifies the server 20 of an error. In the case where the position of the tool 60 can be recognized, in step S25, the component mounting device 15 receives and replaces the tool 60 carried in by the robotic arm 40 using the mounting head 154a. In step S26, the component mounting device 15 notifies the server 20 of the completion of the replacement of the tool 60.

[0137] In step S27, the server 20 receives the notification of the completion of the replacement from the component mounting device 15 and notifies the autonomous mobile cart 30 of the completion of the replacement. In step S28, the server 20 determines whether there is still a tool 60 to be supplied. In the case where there is a tool 60 to be supplied, the server 20 notifies the autonomous mobile cart 30 and returns to step S18. In the case where there is no tool 60 to be supplied, the server 20 notifies the autonomous mobile cart 30 that the supply of the tool 60 has ended.

[0138] In step S29, the autonomous mobile cart 30 receives the end notification from the server and retracts the robotic arm 40 from the component mounting device 15. In step S30, the autonomous mobile cart 30 notifies the server 20 of the completion of the retraction of the robotic arm 40.

[0139] In step S31, the server 20 receives the retraction end notification from the autonomous mobile cart 30 and notifies the component mounting device 15 of the retraction end notification. In step S32, the component mounting device 15 closes the loading port 15b. In step S33, the component mounting device 15 transmits the closing of the loading port 15b to the server 20. In step S34, the server 20 receives the closing of the loading port 15b and ends the supply process of the tool 60 to the component mounting device 15 by the autonomous mobile cart 30.

[0140] (Effect of this embodiment)

[0141] In this embodiment, the following effects can be obtained.

[0142] In the present embodiment, as described above, the control unit 32 is configured to control the driving of the robot arm 40 so as to carry in and out the articles used in the component mounting device 15 within the movable range of the mounting head 154a in a plan view of the component mounting device 15. Thereby, it is possible to carry in and out the articles used in the component mounting device 15 by the robot arm 40, so that the operator does not need to carry in and out the articles with respect to the component mounting device 15. As a result, it is possible to reduce the working burden of the operator when carrying in and out the articles used in the component mounting device 15 with respect to the component mounting device 15. In addition, different from the case where the operator carries in and out the articles into and from the component mounting device 15, it is not necessary to completely stop the operation of the component mounting device 15. Thereby, it is possible to suppress a decrease in the efficiency (productivity) of substrate manufacturing performed by the component mounting device 15. In addition, in the component mounting device 15, if necessary, it is possible to carry in and out the articles by the robot arm 40. Therefore, if necessary, the articles used in the component mounting device 15 are prepared, and there is no need to provide a storage space for storing the articles in the component mounting device 15. Thereby, it is possible to miniaturize the component mounting device 15.

[0143] In addition, in the present embodiment, as described above, the control unit 32 is configured to control the driving of the robot arm 40 so as to transfer the articles used in the component mounting device 15 to and from the mounting head 154a within the component mounting device 15. Thereby, it is possible to transfer the articles from the robot arm 40 using the mounting head 154a that operates on the substrate S, so that there is no need to provide a dedicated member for transferring the articles from the robot arm 40. Thereby, it is possible to suppress an increase in the number of components of the component mounting device 15 and to suppress a complication of the device structure.

[0144] In addition, in the present embodiment, as described above, the component mounting device 15 is configured to identify the articles carried into the movable range of the mounting head 154a and receive the articles from the robot arm 40 using the mounting head 154a based on the identification result. Thereby, it is possible to accurately identify the position of the carried-in articles, and thereby it is possible to reliably receive the articles carried in by the mounting head 154a.

[0145] In addition, in the present embodiment, as described above, the component mounting device 15 is configured to identify the types of the articles carried into the movable range of the mounting head 154a. Thereby, it is possible to receive the articles by a method more suitable for the mounting head 154a according to the types of the carried-in articles.

[0146] In addition, in the present embodiment, as described above, the component mounting device 15 is configured to photograph an article that has been moved into the movable range of the mounting head 154a using the substrate identification photographing unit 154b, and identify the article based on the photographing result. Thus, it is possible to photograph and identify the loaded article using the substrate identification photographing unit 154b for identifying the substrate S, so there is no need to provide a dedicated member for identifying the loaded article. As a result, it is possible to suppress an increase in the number of components of the component mounting device 15 and to suppress complication of the device structure.

[0147] In addition, in the present embodiment, as described above, the control unit 32 is configured to control the driving of the robotic arm 40 to transfer an article used in the component mounting device 15 to and from the mounting head 154a of the component mounting device 15. Thus, since it is possible to transfer the article used in the component mounting device 15 to and from the mounting head 154a of the component mounting device 15 using the robotic arm 40, it is possible to reduce the work load of the operator when loading and unloading the article used in the component mounting device 15 with respect to the component mounting device 15.

[0148] In addition, in the present embodiment, as described above, the server 20 is configured to receive information on required articles from the component mounting device 15 and send an instruction to convey the articles to the component mounting device 15 to the corresponding autonomous mobile cart 30. Thus, it is possible to manage the articles to be conveyed to the plurality of component mounting devices 15 using the server 20, so it is possible to efficiently convey the articles to the plurality of component mounting devices 15.

[0149] In addition, in the present embodiment, as described above, the control unit 32 is configured to identify the position of the opening for inserting the robotic arm 40 into the component mounting device 15 and move the autonomous mobile cart to the position of the opening. Thus, it is possible to easily insert the robotic arm 40 into the opening of the component mounting device 15, and thus it is possible to easily load and unload articles with respect to the component mounting device 15 using the robotic arm 40.

[0150] In addition, in the present embodiment, as described above, the control unit 32 is configured to control the driving of the robotic arm 40 to convey the article used in the component mounting device 15 to a position indicated by the component mounting device 15 or a preset position of the component mounting device 15. Thus, it is possible to convey the article used in the component mounting device 15 to a specified position using the robotic arm 40, so it is possible to easily transfer the conveyed article by a specified action of the component mounting device 15.

[0151] In addition, in the present embodiment, as described above, the component mounting device 15 is configured such that when the robotic arm 40 is inserted, the mounting head 154a retracts so as not to interfere with the robotic arm 40. Thus, during the process of transporting an article using the robotic arm 40, it is possible to suppress the occurrence of interference between the robotic arm 40 and the mounting head 154a of the component mounting device 15, and therefore it is possible to suppress the situation where the article falls from the robotic arm 40.

[0152] In addition, in the present embodiment, as described above, the articles used in the component mounting device 15 include the support pins 61a for supporting the support substrate S, the suction nozzles 62a for sucking the components E, the waste boxes 63 for discarding the components E, and the calibration jigs 64 used for the calibration of the component mounting device 15. Thus, it is possible to reduce the workload of the operator when transporting the support pins 61a, the suction nozzles 62a, the waste boxes 63, and the calibration jigs 64 to the component mounting device 15.

[0153] (Modification example)

[0154] In addition, it should be considered that the embodiments disclosed this time are illustrative in all aspects and not restrictive. The scope of the present invention is not shown by the description of the above embodiments, but is shown by the scope of claims, and includes all changes (modification examples) within the meaning and scope equivalent to the scope of claims.

[0155] For example, in the above embodiment, an example of a structure is shown in which the articles used in the component mounting device as a substrate processing device include the support pins for supporting the substrate, the suction nozzles for sucking the components, the waste boxes for discarding the components, and the calibration jigs used for the calibration of the substrate processing device, but the present invention is not limited thereto. In the present invention, the articles used in the substrate processing device only need to include at least one of the support pins for supporting the substrate, the suction nozzles for sucking the components, the waste boxes for discarding the components, and the calibration jigs used for the calibration of the substrate processing device.

[0156] In addition, in the above embodiment, an example of a structure is shown in which the control unit for controlling the driving of the robotic arm is provided in the autonomous mobile cart body, but the present invention is not limited thereto. In the present invention, the control unit for controlling the driving of the robotic arm may also be provided in the robotic arm.

[0157] In addition, in the above embodiment, an example of a structure is shown in which the camera as the detection unit for detecting the position of the opening of the substrate processing device is provided in the autonomous mobile cart body, but the present invention is not limited thereto. In the present invention, the detection unit for detecting the position of the opening of the substrate processing device may also be provided in the robotic arm.

[0158] In addition, in the above-described embodiment, an example of a structure in which a plurality of mounting lines are provided in the substrate manufacturing system is shown, but the present invention is not limited thereto. In the present invention, only one mounting line may be provided in the substrate manufacturing system.

[0159] In addition, in the above-described embodiment, an example of a structure in which the hand holding portion fixes the hand using a plurality of claws is shown, but the present invention is not limited thereto. In the present invention, the hand holding portion may also fix the hand using a mechanism that moves a ball.

[0160] In addition, in the above-described embodiment, an example of a structure in which the autonomous mobile cart conveys an article to the component mounting device as a substrate processing device through communication via the server is shown, but the present invention is not limited thereto. In the present invention, it may also be a structure in which the autonomous mobile cart conveys an article to the substrate processing device through direct communication between the substrate processing device and the autonomous mobile cart.

[0161] In addition, in the above-described embodiment, for the sake of convenience of explanation, the control process is described using a process-driven process that sequentially performs processes according to the processing flow, but the present invention is not limited thereto. In the present invention, the control process may also be performed by an event-driven type of processing that executes processes in units of events. In this case, it may be performed in a completely event-driven manner, or may be performed by combining event-driven and process-driven.

[0162] Reference Numerals

[0163] 10 Mounting Line

[0164] 11 Loader (Substrate Processing Device)

[0165] 12 Printer (Substrate Processing Device)

[0166] 13 Printing Inspection Machine (Substrate Processing Device)

[0167] 14 Dispenser Device (Substrate Processing Device)

[0168] 15 Component Mounting Device (Substrate Processing Device)

[0169] 16 Appearance Inspection Device (Substrate Processing Device)

[0170] 17 Reflow Soldering Device (Substrate Processing Device)

[0171] 18 Appearance Inspection Device (Substrate Processing Device)

[0172] 19 Unloader (Substrate Processing Device)

[0173] 20 Server

[0174] 30 Autonomous Mobile Cart

[0175] 31 Autonomous Mobile Cart Body (Autonomous Mobile Cart)

[0176] 32 Control Unit

[0177] 40 Robot Arm

[0178] 41 Vertical Movement Unit

[0179] 42 Horizontal Movement Unit

[0180] 43 Horizontal Rotation Unit

[0181] 44 Hand Holding Unit

[0182] 45 Hand

[0183] 50 Mounting Unit

[0184] 61a Support Pin

[0185] 62a Suction Nozzle

[0186] 63 Waste Bin

[0187] 64 Calibration Fixture

[0188] 70 Connection Unit

[0189] 100 Substrate Manufacturing System

[0190] 153b Component Supply Cart

[0191] 154a Mounting Head (Operation Unit)

[0192] 154b Substrate Identification Imaging Unit (Camera)

[0193] E Component

[0194] S Substrate

Claims

1. A substrate manufacturing system, comprising: An installation line including a plurality of substrate working devices, and the substrate working device includes a component mounting device for mounting components on a substrate; An autonomous mobile cart for transporting articles used in the substrate working devices on the installation line; A robotic arm provided on the autonomous mobile cart for transporting an article used in the substrate working device relative to the substrate working device; and A control unit provided on the autonomous mobile cart or the robotic arm for controlling the driving of the robotic arm, The substrate working device includes a working unit for working on a substrate, The control unit is configured to control the driving of the robotic arm to carry in and out an article used in the substrate working device within the movable range seen from above of the working unit in the substrate working device, The control unit is configured to control the driving of the robotic arm to transfer an article used in the substrate working device between the robotic arm and the working unit within the substrate working device.

2. The substrate manufacturing system according to claim 1, wherein The substrate working device is configured to identify an article carried into the movable range of the working unit and receive the article from the robotic arm by the working unit based on the identification result.

3. The substrate manufacturing system according to claim 2, wherein The substrate working device is configured to identify the type of an article carried into the movable range of the working unit.

4. The substrate manufacturing system according to claim 2 or 3, wherein The substrate working device includes a camera for identifying a substrate as a work object and is configured to photograph an article carried into the movable range of the working unit by the camera and identify the article based on the photographing result.

5. The substrate manufacturing system according to any one of claims 1 to 3, wherein The control unit is configured to control the driving of the robotic arm to transfer an article used in the component mounting device between the robotic arm and the mounting head as the working unit of the component mounting device.

6. The substrate manufacturing system according to any one of claims 1 to 3, wherein The substrate manufacturing system further includes a server capable of communicating with the autonomous mobile cart and the plurality of substrate working devices, The server is configured to receive information on required articles from the substrate working device and send an instruction to transport an article to the substrate working device to the corresponding autonomous mobile cart.

7. The substrate manufacturing system according to any one of claims 1 to 3, wherein The control unit is configured to identify the position of an opening into which the robotic arm is inserted into the substrate working device and move the autonomous mobile cart to the position of the opening.

8. The substrate manufacturing system according to any one of claims 1 to 3, wherein The control unit is configured to control the driving of the robotic arm to transport an article used in the substrate working device to a position indicated by the substrate working device or a preset position of the substrate working device.

9. The substrate manufacturing system according to any one of claims 1 to 3, wherein The substrate working device is configured to retract the working unit when the robotic arm is inserted so as not to interfere with the robotic arm.

10. The substrate manufacturing system according to any one of claims 1 to 3, wherein articles used in the substrate working device include at least one of a support pin for supporting a substrate, a nozzle for sucking an element, a waste box for discarding an element, and a calibration jig used for calibration of the substrate working device.

11. An autonomous mobile cart, comprising: an autonomous mobile cart main body that conveys articles used in the substrate working devices on an installation line including a plurality of substrate working devices, the substrate working devices including an element mounting device for mounting an element on a substrate; a robotic arm provided on the autonomous mobile cart main body that conveys articles used in the substrate working device relative to the substrate working device; and a control unit provided on the autonomous mobile cart main body or the robotic arm that controls driving of the robotic arm, the control unit is configured to control driving of the robotic arm to carry in and out articles used in the substrate working device within a movable range when viewed from above of a working unit that works on a substrate within the substrate working device, the control unit is configured to control driving of the robotic arm to transfer articles used in the substrate working device between the robotic arm and the working unit within the substrate working device.

12. A substrate manufacturing method, which is a substrate manufacturing method in an installation line including a plurality of substrate processing devices, the substrate processing devices including a component mounting device for mounting components on a substrate, wherein, The substrate manufacturing method includes the following steps: using an autonomous mobile cart to convey articles used in the substrate working devices on the installation line; driving the robotic arm to carry in and out articles used in the substrate working device within a movable range when viewed from above of a working unit that works on a substrate within the substrate working device; and and driving the robotic arm to transfer articles used in the substrate working device between the robotic arm and the working unit within the substrate working device.

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