An OHT rail crane rail docking maintenance vehicle

Abstract

The present invention discloses an OHT rail gantry crane rail docking maintenance vehicle, which includes a vehicle body, and further includes a limiting part, a docking part and an alignment part. A maintenance vehicle rail for docking and maintaining the rails in the maintenance area is provided on the vehicle body. The limiting part is arranged on both sides of the vehicle body and above the maintenance vehicle rail. The docking part is fixedly arranged at the front end of the maintenance vehicle rail. The alignment part is arranged on both sides of the front lower end of the vehicle body. There are two maintenance vehicle rails, which are fixedly installed in the middle upper part of the vehicle body and symmetrically distributed. Through the alignment part, the specified position is reached to complete the first alignment. At the same time, through the rail docking part, the OHT lifting rail is docked with the maintenance vehicle rail to ensure that both sides of the two rails are in the same plane and there is no deformation at the docking part when the gantry crane is running, so as to complete the second alignment. Finally, through the gantry crane limiting part, it is ensured that the gantry crane conducts maintenance work in the middle of the maintenance vehicle without sliding out accidents.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor automation, and specifically to an OHT rail gantry rail docking maintenance vehicle. Background Art

[0002] In the field of semiconductor automation, an overhead hoist transport (OHT) is a wafer cassette transfer device widely used in large-scale automated wafer fabs. The travel of the rail gantry is an important part among them. During use, when the rail gantry needs to be repaired or regularly maintained due to a fault, the gantry needs to be transferred to below through the OHT lifting system, and at the same time, it is docked with a maintenance vehicle through a docking structure to transfer the gantry to the maintenance vehicle for maintenance. The deficiencies of the prior art are as follows: 1. Traditional OHTs do not have rail docking maintenance vehicles; 2. The rail docking structure is prone to sensor breakage and abnormal alarms. Summary of the Invention

[0003] The purpose of the present invention is to provide an OHT rail gantry rail docking maintenance vehicle to solve the problems raised in the above background art.

[0004] To achieve the above purpose, the present invention provides the following technical solutions:

[0005] An OHT rail gantry rail docking maintenance vehicle includes a vehicle body, and also includes a limiting part, a docking part, and an alignment part. The vehicle body is provided with maintenance vehicle rails for docking with the rails in the maintenance area. The limiting part is arranged on both sides of the vehicle body and above the maintenance vehicle rails. The docking part is fixedly arranged at the front end of the maintenance vehicle rails. The alignment part is arranged on both sides of the front lower end of the vehicle body.

[0006] As a further solution of the present invention: There are two maintenance vehicle rails, which are fixedly installed in the middle upper part of the vehicle body and symmetrically distributed.

[0007] As a further solution of the present invention: The rail docking part includes a positioning pin and a first fixing block. The positioning pin is fixedly installed at the front end of the maintenance vehicle rails through the first fixing block. When the maintenance vehicle rails are docked with the rails in the maintenance area, the positioning pin is inserted into the sleeve of the sleeve part in the maintenance area.

[0008] As a further solution of the present invention: The limiting part includes a limiting block, a fixing handle, and a slide rail. The slide rails are respectively fixedly installed on the vehicle body. The limiting block is slidably installed on the slide rail in the left-right direction. The end of the fixing handle passes through the long hole on the limiting block and is threadedly fixed to the slide rail.

[0009] As a further solution of the present invention: The vehicle body is composed of an aluminum profile frame.

[0010] As a further solution of the present invention: casters and height adjustment blocks are installed at the bottom of the vehicle body.

[0011] As a further solution of the present invention: a sensor for judging the correctness of the docking position is provided at the front end of the vehicle body.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] This patent proposes an OHT maintenance track docking type maintenance vehicle, which contains a double-layer alignment system. It is used to dock with the OHT lifting track, so that the overhead crane can drive onto the maintenance vehicle for maintenance work. The maintenance vehicle mainly consists of a vehicle body, an overhead crane limit part, a track docking part, and an alignment part. First, the maintenance vehicle is moved to the front of the OHT lifting system, and through the alignment part, it reaches the designated position to complete the first layer of alignment. At the same time, through the track docking part, the OHT lifting track is docked with the maintenance vehicle track to ensure that both sides of the two tracks are on the same plane and there is no deformation at the docking part when the overhead crane is driving. The second alignment is completed. Finally, through the overhead crane limit part, it is ensured that the overhead crane conducts maintenance work in the middle of the maintenance vehicle without sliding out accidents. The double-layer docking scheme improves the docking efficiency, is more convenient to use. The track docking part consists of a positioning pin and a positioning sleeve, and there will be no situation where the components are damaged, reducing the probability of component damage and lowering the use cost. Description of the Drawings

[0014] Figure 1 is a three-dimensional view of the OHT maintenance track docking type maintenance vehicle;

[0015] Figure 2 is a top view of the alignment of the OHT lifting maintenance area and the maintenance vehicle;

[0016] Figure 3 is a top view of the track docking of the OHT lifting maintenance area and the maintenance vehicle;

[0017] Figure 4 is a cross-sectional view of the track docking of the OHT lifting maintenance area and the maintenance vehicle;

[0018] Figure 5 is a front view of the maintenance vehicle carrying the overhead crane on the track;

[0019] Figure 6 is a three-dimensional view of the limit part of the maintenance vehicle.

[0020] In the figure: overhead crane on the track 100;

[0021] maintenance vehicle 200, vehicle body 10, caster 11, maintenance vehicle track 12, alignment sensor 13;

[0022] limit part 20, limit block 21, fixed handle 22, slide rail 23;

[0023] Track docking part 30, positioning pin 31, first fixing block 32;

[0024] Alignment part 40; pulley 50, sleeve part 60, sleeve 61, second fixing block 62, lifting and maintenance area track 70. Specific implementation mode

[0025] To describe in detail the technical content, structural features, achieved purposes and effects of the technical solution, the following is a detailed description in conjunction with specific embodiments and accompanied by drawings.

[0026] Please refer to Figures 1 to 6 , a kind of OHT track overhead crane track docking maintenance vehicle proposed in this embodiment. It is used to dock with the OHT lifting and maintenance area track, so that the track overhead crane 100 can safely drive onto the maintenance vehicle 200 for maintenance work. The maintenance vehicle 200 mainly consists of a vehicle body 10, an overhead crane limit part 20, a track docking part 30, and an alignment part 40.

[0027] Figure 1 It is a three-dimensional view of the OHT maintenance track docking type maintenance vehicle.

[0028] The vehicle body 10 is composed of an aluminum profile frame, and its bottom is provided with casters 11 and height adjustment blocks for the movement of the maintenance vehicle and the adjustment of the track height during docking. Whether the track overhead crane 100 is transported from the assembly to the OHT lifting system and goes to the aerial track for work; or due to faults, the track overhead crane 100 needs to be transported down for maintenance, it needs to be transported through this maintenance vehicle 200.

[0029] As shown in the figure, there are two maintenance vehicle tracks 12, which are fixedly installed in the middle upper part of the vehicle body 10 and are symmetrically distributed. An overhead crane limit part 20 is installed above it, and a track docking part 30 is installed at its front end. Alignment parts 40 are installed on both sides of the lower front end of the maintenance vehicle. In addition, there is a sensor 13 on the lower front aluminum profile for judging the correctness of the docking position.

[0030] When the track overhead crane is transported to the lower part through the OHT lifting and maintenance area track, the staff needs to move the maintenance vehicle to the correct position to dock with the maintenance area track.

[0031] Figure 2 It is a top view of the alignment between the OHT lifting and maintenance area and the maintenance vehicle;

[0032] As shown in the figure, first, the alignment part 40 of the maintenance vehicle is docked with the pulley 50 of the OHT lifting and maintenance area, so that the maintenance vehicle moves forward within the position limited by the pulley 50. At this time, the maintenance vehicle track 12 and the maintenance area track 70 are relatively on the same plane. If the tracks are not on the same plane, the height can be adjusted through the horizontal adjustment block at the lower part of the maintenance vehicle 200, and finally the initial track docking is completed.

[0033] Figure 3 , Figure 4 is a docking diagram of the OHT lifting and maintenance area and the maintenance vehicle track.

[0034] During the forward movement, the docking of the docking part 30 of the maintenance vehicle track and the sleeve part 60 of the maintenance area is completed. The track docking part 30 is composed of a positioning pin 31 and a first fixing block 32, and the sleeve part 60 of the maintenance area is composed of a sleeve 61 and a second fixing block 62. If the tracks are not adjusted to the same plane, the positioning pin 31 and the sleeve part 60 cannot be docked. Then, the height of the maintenance track 12 needs to be adjusted so that the two tracks are adjusted to the same height, and finally the secondary docking of the tracks is completed. At the same time, the situation of component damage will not occur, reducing the probability of component damage and lowering the use cost. It should be reminded that the positioning pin 31 in this embodiment can also be replaced by a cylinder.

[0035] After the secondary docking of the tracks is completed, the sensor 13 is used to judge whether the docking position of the maintenance vehicle 200 and the maintenance area track 70 is completed. Then, the maintenance vehicle 200 and the maintenance area track 70 are fixed by means of a pneumatic claw cylinder or the like, so that the track overhead crane 100 can safely travel on the track.

[0036] The track docking part 30 and the sleeve part 60 of the maintenance area are located on both sides of the track respectively, which can prevent the warping of the track docking part. By ensuring that the track connection part is always on the same plane when the track overhead crane passes through, there will be no situations such as jamming or bumping during driving.

[0037] Figure 5 It is the front view of the maintenance vehicle for carrying the track overhead crane;

[0038] Figure 6 It is the three-dimensional view of the maintenance vehicle limit part.

[0039] After the track overhead crane 100 safely travels to the middle of the maintenance vehicle 200, a pair of limit parts 20 need to be used to block and fix it. The two limit parts 20 are respectively arranged on both sides of the vehicle body 10 and symmetrically distributed. The limit part 20 is composed of a limit block 21, a fixed handle 22, and a slide rail 23. The slide rails 23 are respectively fixedly installed on the vehicle body 10. The limit block 21 is slidably installed on the slide rail 23 in the left-right direction. The end of the fixed handle 22 passes through the long hole on the limit block 21 and is threadedly fixed to the slide rail 23. When in use, the fixed handle 22 of the overhead crane limit part 20 is opened, so that the limit block 21 slides along the slide rail 23 to the middle position of the track overhead crane 100, and then the fixed handle 22 is tightened to press and fix the limit block 21. Since both the front and rear ends of the track overhead crane 100 are higher than the limit block 21, when the limit block 21 is inserted into the middle position of the track overhead crane 100, the forward or backward movement of the track overhead crane 100 is blocked by the limit block 21, so that it will not slide out on the maintenance vehicle 200, avoiding a falling accident.

[0040] It should be noted that in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article or terminal device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or elements inherent to such process, method, article or terminal device. Without further limitation, elements defined by the statement "comprising..." or "including..." do not preclude the existence of additional elements in the process, method, article or terminal device comprising the said elements. In addition, in this document, "greater than", "less than", "exceeding", etc. are understood not to include the present number; "above", "below", "within", etc. are understood to include the present number.

[0041] Although the above-described embodiments have been described, those skilled in the art can make additional changes and modifications once they learn the basic creative concept. Therefore, the above description is only the embodiment of the present invention and does not limit the patent protection scope of the present invention. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present invention.

Claims

1. An OHT rail crane rail docking maintenance vehicle, comprising a vehicle body, Characterized in that: It further includes a limiting part, a docking part and an alignment part. A maintenance vehicle rail for docking the rail in the maintenance area is provided on the vehicle body. The limiting part is arranged on both sides of the vehicle body and above the maintenance vehicle rail. The docking part is fixedly arranged at the front end of the maintenance vehicle rail. The alignment part is arranged on both sides of the front lower end of the vehicle body; There are two maintenance vehicle rails, which are fixedly installed in the middle upper part of the vehicle body and are symmetrically distributed; The docking part is composed of a positioning pin and a first fixing block. The positioning pin is fixedly installed at the front end of the maintenance vehicle rail through the first fixing block. When the maintenance vehicle rail is docked with the rail in the maintenance area, the positioning pin is inserted into the sleeve of the sleeve part in the maintenance area; The limiting part includes a limiting block, a fixed handle and a slide rail. The slide rails are respectively fixedly installed on the vehicle body. The limiting block is slidably installed on the slide rail in the left-right direction. The end of the fixed handle passes through the long hole on the limiting block and is threadedly fixed to the slide rail.

2. The OHT rail crane rail docking maintenance vehicle according to claim 1, Characterized in that: The vehicle body is composed of an aluminum profile frame.

3. The OHT rail crane rail docking maintenance vehicle according to claim 2, Characterized in that: Caster wheels and height adjustment blocks are installed at the bottom of the vehicle body.

4. The OHT rail crane rail docking maintenance vehicle according to claim 3, Characterized in that: A sensor for judging the correctness of the docking position is provided at the front end of the vehicle body.

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