Low temperature magnetic field probe station cooling structure, probe station and temperature control method

Abstract

The present invention provides a cooling structure of a low-temperature magnetic field probe station and a low-temperature magnetic field probe station. By connecting a sample stage assembly and an electromagnet assembly to different cold heads for cooling, the temperature conduction between the sample stage assembly and the electromagnet assembly is reduced, and the synchronous temperature change of the two is avoided, so that the temperature of the sample stage assembly and the electromagnet assembly can be adjusted separately, which is convenient for temperature adjustment and control of the sample stage assembly and the electromagnet assembly. The present invention also provides a temperature control method of the low-temperature magnetic field probe station, which realizes rapid and high-precision control of the temperature of the sample to be tested.

Description

Technical Field

[0001] This utility model belongs to the field of physical and semiconductor testing technology, and relates to a probe station. Specifically, it relates to a low-temperature magnetic field probe station cooling structure, a low-temperature magnetic field probe station temperature control method, and a low-temperature magnetic field probe station. Background Technology

[0002] Probe station testing equipment is a widely used non-destructive testing method applicable to physics and semiconductor fields. Specifically, it can be used to test the electrical, optoelectronic, and high-frequency properties of materials or devices, finding a wide range of applications in these fields. Building upon this foundation, magnetic field probe station testing systems further provide a magnetic field environment, enabling the equipment to study the performance and characteristics of the tested materials or devices under magnetic fields. Typical applications include magnetism, spintronics, semiconductor physics and devices, and quantum devices.

[0003] In cryogenic engineering, cryogenic temperatures are currently divided into four temperature zones: refrigeration: room temperature - 120K; low temperature: 120K - 4.2K; ultra-low temperature: 4.2K - 0.1K; and extremely low temperature: 0.1K - 0K. In practical applications, since some tested materials or devices are used in cryogenic environments, it is necessary to test their performance at low temperatures. Therefore, a magnetic field probe station is needed to provide a solution that allows samples to operate in a cryogenic environment. More specifically, a cooling structure and a corresponding magnetic field probe station are required to provide a solution that allows samples to operate in a cryogenic environment. Summary of the Invention

[0004] This invention provides a low-temperature magnetic field probe station that enables samples to be tested in a low-temperature environment. The low temperature referred to in this invention refers to the three temperature zones of low temperature, ultra-low temperature, and cryogenic temperature in cryogenic engineering, approximately the temperature range of 120K-4K.

[0005] To achieve the above objectives, the technical solution provided by the present invention is as follows:

[0006] The present invention first provides a low-temperature magnetic field probe stage cooling structure, including an electromagnet assembly, a sample stage assembly, a cold cavity, and a cold head. The electromagnet assembly and the sample stage assembly are disposed inside the cavity of the cold cavity. Two cold heads are provided, one of which is thermally connected to the sample stage assembly, and the other of which is thermally connected to the electromagnet assembly.

[0007] Preferably, the cold-conducting connection is a cold-conducting chain connection.

[0008] Optionally, one of the cold heads is located inside the cavity of the cold chamber, while the other is located outside the cavity of the cold chamber.

[0009] Preferably, the cold head includes a first cold head and a second cold head, and the cold cavity includes a first cold cavity and a second cold cavity. The first cold head is housed in the first cold cavity, and the second cold head is housed in the second cold cavity. The electromagnet assembly and the sample stage assembly are located inside the first cold cavity. The second cold cavity and the first cold cavity are connected by a cold cavity connecting pipe. The first cold head is thermally connected to the electromagnet assembly through a first thermal conductive chain, and the second cold head is thermally connected to the sample stage assembly through a second thermal conductive chain. The second thermal conductive chain passes through the cold cavity connecting pipe.

[0010] Optionally, a fixed-shape cooling rod is connected to the second cold head, and a second cooling chain is connected to the cooling rod, so that the second cooling chain is connected to the sample stage assembly. Alternatively, a fixed-shape cooling rod is connected to the second cold head, and a second cooling rod is connected to the end of the cooling rod, the second cooling rod extending towards the first cold cavity, and the second cooling chain is connected to the end of the second cooling rod.

[0011] Preferably, the interior of the first cold cavity is a vacuum.

[0012] More preferably, the interior of the second cold cavity is a vacuum.

[0013] Preferably, the cooling structure further includes an outer cavity, which is disposed inside the cavity of the outer cavity.

[0014] More preferably, the outer cavity includes a first outer cavity and a second outer cavity, the first cold cavity is disposed inside the cavity of the first outer cavity, and the second cold cavity is disposed inside the cavity of the second outer cavity; the first outer cavity and the second outer cavity are connected by an outer cavity connecting pipe, and the cold cavity connecting pipe is disposed inside the outer cavity connecting pipe.

[0015] Preferably, the interior of the outer cavity is a vacuum.

[0016] Preferably, an external cold head is disposed between the cold cavity and the outer cavity. More preferably, a first external cold head is disposed between the first cold cavity and the first outer cavity; and a second external cold head is disposed between the second cold cavity and the second outer cavity.

[0017] Furthermore, one end of the first cold head is connected to the electromagnet assembly for heat conduction, and the other end is connected to the first external cold head. The first external cold head is connected to the first cold source, and the first cold source provides cooling energy to the first external cold head and the first cold head. One end of the second cold head is connected to the sample stage assembly for heat conduction, and the other end is connected to the second external cold head. The second external cold head is connected to the second cold source, and the second cold source provides cooling energy to the second external cold head and the second cold head.

[0018] Furthermore, the first cold cavity is fitted outside the first cold head and is connected to the first external cold head in a heat-conducting and sealing connection; the first external cavity is fitted outside the first cold cavity and is connected to at least one of the first external cold head and the first cold source in a heat-conducting and sealing connection; the second cold cavity is fitted outside the second cold head and is connected to the second external cold head in a heat-conducting and sealing connection; the second external cavity is fitted outside the second cold cavity and is connected to at least one of the second external cold head and the second cold source in a heat-conducting and sealing connection.

[0019] Preferably, the electromagnet assembly includes an electromagnetic coil, a radiation shield, and a cooling base, wherein the radiation shield and the cooling base form an annular cavity, and the electromagnetic coil is disposed within the annular cavity; the cooling base is connected to the cold head for heat conduction.

[0020] Optionally, the first cold cavity is provided with an intermediate cold screen, which divides the first cold cavity into an upper cold cavity and a lower cold cavity. The electromagnet assembly and the sample stage assembly are disposed in the upper cold cavity. The first cold head is disposed in the lower cold cavity. The intermediate cold screen is provided with a through hole, and the first cold chain passes through the through hole.

[0021] Optionally, the electromagnet assembly is fixed to the intermediate cold screen via an electromagnet bracket; the sample stage assembly includes a sample stage and a sample stage bracket, and the sample stage is fixed to the intermediate cold screen via the sample stage bracket.

[0022] A heat-insulating cold shield is provided between the electromagnet assembly and the sample stage assembly.

[0023] The present invention also provides a method for controlling the temperature of a low-temperature magnetic field probe stage, wherein a first cold head connects to the electromagnetic coil to a first preset temperature via a cooling connection; a second cold head connects to the sample stage to a second preset temperature via a cooling connection; and the sample stage is heated to a third preset temperature.

[0024] Preferably, the sample stage is connected to a heating device, which heats the sample stage. More preferably, the heating device is located inside the sample stage.

[0025] Preferably, the sample stage is located inside the electromagnetic coil.

[0026] Preferably, a heat-insulating cold screen is directly provided between the sample stage and the electromagnetic coil.

[0027] The present invention also provides a low-temperature magnetic field probe station, comprising a low-temperature component, a probe component, an electromagnet component, and a sample stage component. The low-temperature component includes a cold head and a cold cavity, the cold head being at least partially housed in the cold cavity. Two sets of low-temperature components are provided, including a first low-temperature component and a second low-temperature component, the cold cavities of the first and second low-temperature components being interconnected. The electromagnet component and the sample stage component are disposed within the cold cavity of the first low-temperature component, the electromagnet component being thermally connected to the cold head of the first low-temperature component, and the sample stage component being thermally connected to the cold head of the second low-temperature component. The probe component includes a probe and a probe holder, the probe holder being sealed to the cold cavity of the first low-temperature component, and the probe extending into the cold cavity and close to the sample stage component.

[0028] Preferably, the probe is connected to the first cold cavity via a first probe cold chain, and the probe is connected to the electromagnet assembly via a second probe cold chain.

[0029] The cryogenic component also includes an outer cavity, and the cold cavity is disposed inside the cavity of the outer cavity.

[0030] Preferably, the outer cavity of the first low-temperature component is in communication with the outer cavity of the second low-temperature component; the cold cavity of the first low-temperature component is in communication with the cold cavity of the second low-temperature component.

[0031] The cryogenic assembly also includes an external cooling head, which is disposed between the outer cavity and the cold cavity.

[0032] The low-temperature magnetic field probe stage also includes a microscope assembly. The outer cavity of the first low-temperature assembly is provided with an outer cavity observation mirror, and the cold cavity of the first low-temperature assembly is provided with a cold cavity observation mirror. The outer cavity observation mirror, the cold cavity observation mirror, and the sample stage assembly are arranged along the imaging optical path of the microscope assembly.

[0033] Preferably, the low-temperature magnetic field probe station further includes a support assembly, which includes a support frame, an air flotation plate, and an air flotation pad. The air flotation plate is supported on the support frame by the air flotation pad, and the first low-temperature component, the second low-temperature component, and the probe assembly are respectively fixedly connected to the air flotation plate.

[0034] A connecting ring is fixedly installed on the outer side of the outer cavity, and the connecting ring is fixedly connected to the air flotation plate.

[0035] Optionally, the cryogenic magnetic field probe station also includes a vibration damping component.

[0036] Preferably, the shock absorption assembly includes a shock absorption bracket, a shock absorption fixing plate, and a counterweight, wherein the shock absorption fixing plate is fixed to the shock absorption bracket, and the counterweight is connected to the shock absorption bracket.

[0037] Preferably, the outer cavity is provided with a shock-absorbing connecting ring, which is fixedly connected to the shock-absorbing fixing plate.

[0038] The present invention has at least the following beneficial effects: The cooling structure and low-temperature magnetic field probe provided by the present invention reduce the temperature conduction between the sample stage assembly and the electromagnet assembly by connecting the sample stage assembly and the electromagnet assembly to different cold heads, and avoid synchronous temperature changes between the two under the action of the same cold source. This allows the temperature of the sample stage assembly and the electromagnet assembly to be adjusted separately, which facilitates the temperature adjustment and control of the sample stage assembly and the electromagnet assembly, and makes the application scenarios more diverse.

[0039] The temperature control method provided by this invention provides redundant cooling energy by cooling the sample stage and then heating it to the target temperature, thereby improving the temperature adjustment speed. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the overall structure of a low-temperature magnetic field probe station.

[0041] Figure 2 This is a side view of the overall structure of a low-temperature magnetic field probe station.

[0042] Figure 3 This is a schematic diagram of the overall structure of a low-temperature magnetic field probe station and a cooling structure.

[0043] Figure 4 for Figure 3 Enlarged view of part A. Detailed Implementation

[0044] To make the objectives and features of the present invention more apparent and understandable, the specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to conveniently and clearly assist in illustrating the objectives of the embodiments of the present invention.

[0045] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0046] Please see Figure 3 , Figure 4 A low-temperature magnetic field probe station cooling structure includes an electromagnet assembly 600, a sample stage assembly 700, a cold cavity, and a cold head. The electromagnet assembly 600 and the sample stage assembly 700 are disposed inside the cavity of the cold cavity. Two cold heads are provided, one of which is thermally connected to the sample stage assembly 700, and the other of which is thermally connected to the electromagnet assembly 600.

[0047] By using different cooling paths for the electromagnet assembly 600 and the sample stage assembly 700, their temperatures can be controlled separately. For example, the electromagnet assembly 600 can be cooled to or below the superconducting transition temperature, while the sample stage assembly 700 can be kept at any temperature; or the electromagnet assembly 600 can be cooled to the superconducting temperature, while the sample stage assembly 700 can be kept at a low temperature, approximately in the range of 120K-4K.

[0048] More specifically, one of the cold heads is connected to the sample stage assembly 700 via a second cooling chain 262, and the other cold head is connected to the electromagnet assembly 600 via a first cooling chain 160. Furthermore, other cooling methods can be selected according to actual needs, such as direct contact between the cold head and the component being cooled.

[0049] One of the cold heads is located inside the cold cavity, while the other is located outside the cold cavity. The cold head located outside the cold cavity can be housed in a corresponding cavity as needed, and this cavity is connected to the cold cavity via a connecting structure, allowing the cooling conduction structure between the cold head and the corresponding cooled device to pass through this connecting structure.

[0050] Specifically, please refer to Figure 3 , Figure 4 The cold head includes a first cold head 150 and a second cold head 250, and the cold cavity includes a first cold cavity 140 and a second cold cavity 240. The first cold head 150 is housed in the first cold cavity 140, and the second cold head 250 is housed in the second cold cavity 240. The electromagnet assembly 600 and the sample stage assembly 700 are located inside the first cold cavity 140. The second cold cavity 240 and the first cold cavity 140 are connected by a cold cavity connecting pipe 241. The first cold head 150 is thermally connected to the electromagnet assembly 600 through a first thermal conductive chain 160, and the second cold head 250 is thermally connected to the sample stage assembly 700 through a second thermal conductive chain 262. The second thermal conductive chain 262 passes through the cold cavity connecting pipe 241.

[0051] Furthermore, multiple intermediate components can be added for cooling. For example, a fixed-shaped cooling rod 261 can be connected to the second cold head 250, and a second cooling chain 262 can be connected to the cooling rod 261. The second cooling chain 262 can then be connected to the sample stage assembly 700, which also achieves cooling. Alternatively, a second cooling rod can be connected to the end of the cooling rod 261, extending towards the first cold cavity 140, and the second cooling chain 262 can be connected to the end of the second cooling rod. Those skilled in the art can adjust the specific cooling components according to actual needs.

[0052] The interiors of the first cold cavity 140 and the second cold cavity 240 can be constructed as a vacuum environment as needed. Since the first cold cavity 140 and the second cold cavity 240 are interconnected, they are in the same vacuum environment, and their vacuum environments can be constructed simultaneously.

[0053] In addition, an outer cavity can be provided outside the cold cavity as needed. Specifically, the cooling structure also includes an outer cavity, which is located inside the outer cavity. For more details, please refer to [link to relevant documentation]. Figures 1 to 4 The outer cavity includes a first outer cavity 120 and a second outer cavity 220. A first cold cavity 140 is disposed inside the cavity of the first outer cavity 120, and a second cold cavity 240 is disposed inside the cavity of the second outer cavity 220. The first outer cavity 120 and the second outer cavity 220 are connected by an outer cavity connecting pipe 221, and the cold cavity connecting pipe 241 is disposed inside the outer cavity connecting pipe 221. By setting up a double-layer cavity, the loss of cold energy caused by the outward thermal radiation from the first cold cavity 140 and the second cold cavity 240 can be reduced.

[0054] As an optional implementation, both the cold cavity and the outer cavity are under vacuum. This means that the inner and outer sides of the first cold cavity 140 and the second cold cavity 240 are in a vacuum environment. In this case, the first cold cavity 140 and the second cold cavity 240 are not affected by ambient air pressure, reducing the external forces acting on them and preventing damage at low temperatures. The double-layered cavity also allows for a vacuum testing environment even if one layer leaks. For example, even if the first cold cavity 140 or the second cold cavity 240 leaks, the first outer cavity 120 and the second outer cavity 220 remain in a vacuum environment, thus maintaining a vacuum within the first cold cavity 140 and the second cold cavity 240. Alternatively, even if the first outer cavity 120 or the second outer cavity 220 leaks, the first cold cavity 140 and the second cold cavity 240 can still maintain a vacuum. This further enhances the stability of the vacuum environment and improves the overall lifespan of the equipment.

[0055] Furthermore, an external cold block can be installed between the cold cavity and the outer cavity. Please refer to [link / reference]. Figure 3 A first external cold head 130 is provided between the first cold cavity 140 and the first external cavity 120; a second external cold head 230 is provided between the second cold cavity 240 and the second external cavity 220.

[0056] For more details, please refer to Figures 3 to 4One end of the first cold head 150 is connected to the electromagnet assembly 600 for heat conduction, and the other end is connected to the first external cold head 130. The first external cold head 130 is connected to the first cold source 110, which provides cooling energy to the first external cold head 130 and the first cold head 150. One end of the second cold head 250 is connected to the sample stage assembly 700 for heat conduction, and the other end is connected to the second external cold head 230. The second external cold head 230 is connected to the second cold source 210, which provides cooling energy to the second external cold head 230 and the second cold head 250.

[0057] Please see Figures 3 to 4 The first cold cavity 140 is fitted outside the first cold head 150 and is connected to the first outer cold head 130 in a heat-conducting and sealing manner. The first outer cavity 120 is fitted outside the first cold cavity 140 and is connected to at least one of the first outer cold head 130 and the first cold source 110 in a heat-conducting and sealing manner. The second cold cavity 240 is fitted outside the second cold head 250 and is connected to the second outer cold head 230 in a heat-conducting and sealing manner. The second outer cavity 220 is fitted outside the second cold cavity 240 and is connected to at least one of the second outer cold head 230 and the second cold source 210 in a heat-conducting and sealing manner. The fixing method between the cold cavity, the outer cavity, the cold head, the outer cold head, and the cold source can be adjusted as needed. More specifically, the first cold head 150, the first outer cold head 130, and the first cold source 110 form a stepped column; the second cold head 250, the second outer cold head 230, and the second cold source 210 form a stepped column.

[0058] Please see Figure 4 The electromagnet assembly 600 includes an electromagnetic coil 610, a radiation shield 620, and a cooling base 630. The radiation shield 620 and the cooling base 630 form an annular cavity, and the electromagnetic coil 610 is disposed within the cavity. The cooling base 630 is connected to the cold head for heat conduction. Specifically, in this embodiment, the cooling base 630 and the first cold head 150 are connected for heat conduction via a first heat conduction chain 160. The sample stage assembly 700 is disposed within a circular through-hole formed by the annular cavity, and the sample stage assembly 700 is connected to the second cold head 250 for heat conduction via a second heat conduction chain 262.

[0059] The radiation shield 620 can reflect thermal radiation and reduce the temperature transfer caused by thermal radiation, thereby reducing the heat exchange between the cavity and the external environment, preventing the loss of cold energy, and thus keeping the temperature inside the cavity at a low temperature.

[0060] Optionally, the first cold cavity 140 is provided with an intermediate cold screen 143, which divides the first cold cavity 140 into an upper cold cavity 142 and a lower cold cavity 141. The electromagnet assembly 600 and the sample stage assembly 700 are disposed in the upper cold cavity 142. The first cold head 150 is disposed in the lower cold cavity 141. The intermediate cold screen 143 is provided with a through hole 147, through which the first cold chain 160 passes. Optionally, the electromagnet assembly 600 is fixed to the intermediate cold screen 143 by an electromagnet bracket 640. The sample stage assembly 700 includes a sample stage 710 and a sample stage bracket 740, with the sample stage 710 fixed to the intermediate cold screen 143 by the sample stage bracket 740.

[0061] To fix the relative position of the cold cavity and the outer cavity, such as Figure 4 As shown, a fixed support leg 146 is provided between the first cold cavity 140 and the first outer cavity 120. More specifically, the two ends of the fixed support leg 146 are fixedly connected to the first cold cavity 140 and the first outer cavity 120, respectively.

[0062] Please see Figure 4 As needed, a heat insulation shield 730 can be installed between the electromagnet assembly 600 and the sample stage assembly 700 to reduce heat radiation between them, thereby reducing mutual temperature influence.

[0063] The present invention also provides a method for controlling the temperature of a low-temperature magnetic field probe stage, comprising: a first cold head 150 connecting the electromagnetic coil 610 to a first preset temperature via a heat-conducting connection; a second cold head 250 connecting the sample stage 710 to a second preset temperature via a heat-conducting connection; and heating the sample stage 710 to a third preset temperature.

[0064] The sample stage 710 is connected to a heating device 720, which heats the sample stage. Optionally, as... Figure 4 As shown, the heating device 720 is located inside the sample stage 710.

[0065] The sample stage 710 and the electromagnetic coil 610 are connected to different cold heads for heat conduction, thereby controlling the cooling degree of the sample stage and the electromagnetic coil 610 respectively, that is, controlling the first preset temperature and the second preset temperature respectively, so as to avoid mutual interference between the two.

[0066] The sample stage is positioned in a preset location, for example, the sample stage 710 is located inside the electromagnetic coil 610. The temperature of the first cold head 150 is lowered by the first cold source 110, and then connected to the cold-conducting base 630 via the first cold-conducting chain 160, thereby lowering the temperature of the radiation shield 620 and the cold-conducting base 630, and further lowering the temperature of the internal electromagnetic coil 610, thus bringing the electromagnetic coil 610 to a first preset temperature. Specifically, the first preset temperature is the temperature at which the electromagnetic coil 610 operates normally; for example, when the electromagnetic coil 610 is a superconducting coil, the first preset temperature is the superconducting transition temperature or below. The temperature of the second cold head 250 is lowered by the second cold source 210, and then connected to the sample stage 710 via the second cold-conducting chain 262, thereby lowering the temperature of the sample stage 710, thus bringing the temperature of the sample stage 710 to the second preset temperature. The second preset temperature can be adjusted as needed. For example, it can be the lowest temperature that the sample stage 710 can reach under the action of a cold source, or it can be slightly higher than the lowest temperature but lower than the third preset temperature. When the sample to be tested is placed on the sample stage 710, the heating device 720 heats the sample stage 710, causing its temperature to gradually rise until it reaches the third preset temperature. This third preset temperature is the temperature required for testing the sample. The heating device 720 is controlled to raise the temperature of the sample stage 710 until it reaches equilibrium. At this point, since the cooling energy provided by the second cooling chain 262 is sufficient to bring the sample stage 710 to a second preset temperature lower than the third preset temperature, the second cooling chain 262 essentially provides redundant cooling energy. When adjusting the temperature of the sample stage 710, for example, to raise the temperature of the sample stage 710, the heating device 720 can be used to quickly heat the sample stage 710; to lower the temperature of the sample stage 710, only the heating power of the heating device 720 needs to be reduced. The redundant cooling energy allows the sample stage 710 to cool down quickly, resulting in higher time sensitivity for temperature regulation. Furthermore, due to the high time sensitivity, the time difference between the temperature control operation and the actual temperature change is greatly reduced, allowing for faster feedback in the temperature control operation. This facilitates timely adjustment of the temperature control method and content, enabling precise control of the temperature of the sample stage 710.

[0067] Please note that you should refer to [link / reference]. Figure 4 In some cases, a heat insulation shield 730 is provided between the electromagnetic coil 610 and the sample stage 710 to reduce heat conduction between the electromagnetic coil 610 and the sample stage 710, especially at high temperatures (such as when close to room temperature) to prevent the sample stage 710 from transferring heat to the electromagnetic coil 610, which would cause the electromagnetic coil to malfunction.

[0068] The present invention also provides a low-temperature magnetic field probe station, including a low-temperature component, a probe component 300, an electromagnet component 600, and a sample stage component 700. The low-temperature component includes a cold head and a cold cavity, with the cold head at least partially housed in the cold cavity. Two sets of low-temperature components are provided, including a first low-temperature component 100 and a second low-temperature component 200, with the first cold cavities 140 and 240 of the first low-temperature component 100 and the second low-temperature component 200 interconnected. The electromagnet component 600 and the sample stage component 700 are disposed within the first cold cavity 140 of the first low-temperature component 100. The electromagnet component 600 is thermally connected to the cold head of the first low-temperature component 100, and the sample stage component 700 is thermally connected to the cold head of the second low-temperature component 200. The probe component 300 includes a probe 310 and a probe holder 320, with the probe holder 320 sealed to the first cold cavity 140 of the first low-temperature component 100. The probe 310 extends into the first cold cavity 140 and is close to the sample stage component 700.

[0069] For temperature control of probe 310, please refer to [link / reference]. Figure 4 The probe 310 is connected to the first cold cavity 140 by a first probe cooling chain 340, and the probe 310 is connected to the electromagnet assembly 600 by a second probe cooling chain 350.

[0070] The first low-temperature component 100 and the second low-temperature component 200 also include an outer cavity, with the cold cavity disposed inside the cavity of the outer cavity.

[0071] Please see Figures 1 to 3 The first outer cavity 120 of the first low-temperature component 100 is connected to the second outer cavity 220 of the second low-temperature component 200; the first cold cavity 140 of the first low-temperature component 100 is connected to the second cold cavity 240 of the second low-temperature component 200.

[0072] The first low-temperature component 100 and the second low-temperature component 200 also include a first external cold head 130 and a second external cold head 230, which are disposed between the first external cavity 120, the second external cavity 220 and the first cold cavity 140 and the second cold cavity 240.

[0073] The probe holder 320 is connected to the first outer cavity 120 through the probe tube 330, and the probe 310 extends into the first outer cavity 120 through the probe tube 330. A through hole is provided at a corresponding position in the first cold cavity 140, and the probe 310 extends into the first cold cavity 140 through the through hole, thereby allowing the probe 310 to extend to the vicinity of the sample stage 710, which facilitates contact with the sample to be tested.

[0074] Specifically, the probe tube 330 is a flexible corrugated tube.

[0075] The low-temperature magnetic field probe stage also includes a microscope assembly 500. An external cavity observation mirror 121 is disposed in the first external cavity 120 of the first low-temperature assembly 100, and a cold cavity observation mirror 145 is disposed in the first cold cavity 140 of the first low-temperature assembly 100. The external cavity observation mirror 121, the cold cavity observation mirror 145, and the sample stage assembly 700 are arranged along the imaging optical path of the microscope assembly 500. For details, please refer to... Figure 2 The microscope assembly 500 includes a microscope support 510 and a microscope module 520. The microscope module 520 is fixed to the air flotation plate 420 via the microscope support 510.

[0076] Accordingly, for ease of manufacturing and processing, a cold cavity cover 144 is provided on the top of the first cold cavity 140, and a cold cavity observation mirror 145 is fixedly mounted on the cold cavity cover 144, facilitating the disassembly, assembly, and maintenance of the cold cavity observation mirror 145. An outer cavity cover 122 is provided on the top of the first outer cavity 120, and an outer cavity observation mirror 121 is fixed to the outer cavity cover 122. The outer cavity cover 122 can be disassembled and assembled as needed, thereby facilitating the disassembly and assembly of the outer cavity observation mirror 121, the cold cavity cover 144, and the cold cavity observation mirror 145. Furthermore, by providing easily disassembled and assembled outer cavity covers 122 and cold cavity covers 144, it is convenient to inspect and maintain the electromagnet assembly 600, the sample stage assembly 700, the probe 310, and the corresponding cooling and support structures within the first cold cavity 140, thus facilitating its use.

[0077] The cryogenic magnetic field probe station also includes a support assembly 400, which comprises a support frame 410, an air flotation plate 420, and an air flotation pad 430. The air flotation plate 420 is supported on the support frame 410 by the air flotation pad 430. The first cryogenic component 100, the second cryogenic component 200, and the probe assembly 300 are fixedly connected to the air flotation plate 420. If necessary, shock-absorbing feet 440 are provided at the bottom of the support frame 410 to further enhance the overall shock absorption effect of the support assembly 400. Specifically, the shock-absorbing feet 440 are elastic shock-absorbing feet.

[0078] Specifically, please refer to Figure 2 The first low-temperature component 100 has a first connecting flange on the outside of the first outer cavity 120, which is connected to the air flotation plate 420; the second low-temperature component 200 has a second connecting flange 222 on the outside of the second outer cavity 220, which is fixedly connected to the air flotation plate 420.

[0079] In addition, the cryogenic magnetic field probe stage also includes vibration damping components 800 and 900. Please refer to [link / reference]. Figures 1 to 3The vibration damping components 800 and 900 include vibration damping brackets 810 and 910, vibration damping fixing plates 820 and 920, and counterweights 830 and 930. The vibration damping fixing plates 820 and 920 are fixed to the vibration damping brackets 810 and 910, and the counterweights 830 and 930 are connected to the vibration damping brackets 810 and 910. Two vibration damping components 800 and 900 are provided, namely a first vibration damping component 800 and a second vibration damping component 900. A first low-temperature component 100 is fixedly connected to the first vibration damping component 800, and a second low-temperature component 200 is fixedly connected to the second vibration damping component 900. Furthermore, vibration damping feet 840 and 940 can be provided at the bottom of the vibration damping brackets 810 and 910 as needed to increase stability.

[0080] The first outer cavity 120 of the first low-temperature component 100 is connected to the damping fixing plate 820 of the first damping component 800 via a damping connecting flange 123; the second outer cavity 220 of the second low-temperature component 200 is fixedly connected to the damping fixing plate 920 of the second damping component 900 via a damping connecting flange 223.

[0081] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Therefore, the above descriptions are merely embodiments of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the present invention. Various equivalent changes and modifications are included without departing from the spirit and scope of the present invention, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A low temperature magnetic field probe station cooling structure, characterized in that: It includes an electromagnet assembly, a sample stage assembly, a cold chamber, and a cold head. The electromagnet assembly and the sample stage assembly are arranged inside the cavity of the cold chamber. Two cold heads are arranged, one of which is connected to the sample stage assembly by cold conduction, and the other of which is connected to the electromagnet assembly by cold conduction; The cooling structure further comprises an outer cavity, wherein the cold cavity is arranged inside the cavity of the outer cavity; the outer cavity is in a vacuum state; the cold cavity is in a vacuum state; Among them, the cold head includes a first cold head and a second cold head, the cold cavity includes a first cold cavity and a second cold cavity, the first cold head is accommodated in the first cold cavity, the second cold head is accommodated in the second cold cavity, the electromagnet assembly and the sample stage assembly are located inside the first cold cavity, and the second cold cavity is connected to the first cold cavity through a cold cavity connecting pipe; the outer cavity includes a first outer cavity and a second outer cavity, the first cold cavity is arranged inside the cavity body of the first outer cavity, and the second cold cavity is arranged inside the cavity body of the second outer cavity; the first outer cavity is connected to the second outer cavity through an outer cavity connecting pipe, and the cold cavity connecting pipe is arranged in the outer cavity connecting pipe.

2. A low temperature magnetic field probe station cooling structure as claimed in claim 1, characterized in that: The first cold head is cold-conductingly connected to the electromagnet assembly through a first cold-conducting chain, and the second cold head is cold-conductingly connected to the sample stage assembly through a second cold-conducting chain, and the second cold-conducting chain passes through the cold chamber connecting pipe.

3. A low temperature magnetic field probe station cooling structure as claimed in claim 2, characterized in that: The first cold chamber is provided with an intermediate cold screen, which divides the first cold chamber into an upper cold chamber and a lower cold chamber, and the electromagnet assembly and the sample stage assembly are arranged in the upper cold chamber; the first cold head is arranged in the lower cold chamber, and the intermediate cold screen is provided with a through hole, and the first cold chain passes through the through hole.

4. A low temperature magnetic field probe station cooling structure as claimed in claim 1, characterized in that: An external cold head is arranged between the cold cavity and the external cavity.

5. A low temperature magnetic field probe station cooling structure as claimed in claim 1, characterized in that: The electromagnet assembly includes an electromagnetic coil, an anti-radiation screen, and a cooling base. The anti-radiation screen and the cooling base form an annular cavity, and the electromagnetic coil is arranged in the annular cavity; the cooling base is connected to the cold head in a cooling manner.

6. A method for controlling temperature of a low temperature magnetic field probe station, characterized in that: Applicable to the cooling structure as described in any one of claims 1 to 5; the method comprises: a first cold head is connected through a cooling conduction so that the electromagnetic coil in the electromagnet assembly reaches a first preset temperature; a second cold head is connected through a cooling conduction so that the sample stage reaches a second preset temperature; and the sample stage is heated so that the sample stage reaches a third preset temperature.

7. A low temperature magnetic field probe station, characterized in that: It includes a cryogenic assembly, a probe assembly, an electromagnet assembly, and a sample stage assembly, wherein the cryogenic assembly includes a cold head and a cold cavity, and the cold head is at least partially accommodated in the cold cavity; The cryogenic assembly is provided with two groups, and the cryogenic assembly includes a first cryogenic assembly and a second cryogenic assembly, and the cold chambers of the first cryogenic assembly and the second cryogenic assembly are interconnected; the electromagnet assembly and the sample stage assembly are arranged in the cold chamber of the first cryogenic assembly, the electromagnet assembly is cold-connected to the cold head of the first cryogenic assembly, and the sample stage assembly is cold-connected to the cold head of the second cryogenic assembly; the probe assembly includes a probe and a probe seat, and the probe seat is sealed and connected to the cold chamber of the first cryogenic assembly, and the probe extends into the cold chamber and is close to the sample stage assembly; Wherein, the low-temperature component also includes an external cavity, and the cold cavity is arranged inside the cavity of the external cavity; the external cavity of the first low-temperature component is connected with the external cavity of the second low-temperature component; the interior of the external cavity is vacuum; the interior of the cold cavity is vacuum.

8. A low temperature magnetic field probe station as claimed in claim 7, characterized in that: The low temperature component also includes an external cold head, which is arranged between the external cavity and the cold cavity.

9. A low temperature magnetic field probe station as claimed in claim 7, characterized in that: The low-temperature magnetic field probe station also includes a microscope assembly. The outer cavity of the first low-temperature assembly is provided with an external cavity observation mirror, and the cold cavity of the first low-temperature assembly is provided with a cold cavity observation mirror. The external cavity observation mirror, the cold cavity observation mirror, and the sample stage assembly are arranged along the imaging optical path of the microscope assembly.

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