Pressurization adsorption table and pressurization device provided with the same

Abstract

The present application provides a pressurization adsorption table and a pressurization device provided with the pressurization adsorption table. The pressurization adsorption table (1) comprises: a porous body (2) having an adsorption surface (20) capable of carrying an object (O); an elastic member (3) directly arranged on the porous body (2); and a frame (5) supporting the porous body (2) through the elastic member (3). An attraction space (4) is formed between the porous body (2) and the frame (5). The pressurization adsorption table (1) is provided with a suction device (6) capable of adsorbing the object (O) to the adsorption surface (20) by attracting the attraction space (4). The porous body (2) has an opposite surface (21) located on the opposite side of the adsorption surface (20). The frame (5) has a receiving surface (51) capable of receiving the opposite surface (21) when the elastic member (3) is elastically deformed due to pressurization of the object (O) carried on the adsorption surface (20) towards the adsorption surface (20). The pressurization adsorption table (1) is configured to uniformly generate a reaction force from the porous body (2) towards the pressurized object (O) when the opposite surface (21) is received by the receiving surface (51).

Description

Technical Field

[0001] The present invention relates to a pressurizing adsorption stage and a pressurizing apparatus having the pressurizing adsorption stage. Background Technology

[0002] The adsorption stage has an adsorption surface that supports objects such as thin films. By attracting objects from this adsorption surface, the objects are adsorbed onto the adsorption surface. The objects adsorbed onto the adsorption surface are held flat on the adsorption surface. Then, if the attraction is stopped, the holding of the objects is released, and the objects are placed solely on the adsorption surface, i.e., suitable for moving the objects to other locations.

[0003] As an improvement to such an adsorption stage, Japanese Patent Application Publication No. 2005-205507 (hereinafter referred to as Patent Document 1) proposes a structure that reliably holds the object to be held in a flat position. Furthermore, Japanese Patent Application Publication No. Hei 5-344284 (hereinafter referred to as Patent Document 2) proposes a structure suitable for photographing objects held on the adsorption stage.

[0004] However, in the structure described in Patent Document 1, as in Patent Document 1... Figure 4 and Figure 5 As shown, a protrusion 18a exists below the object (semiconductor wafer W) across the support portion 11. Therefore, if pressure is applied to the object from above, uneven pressure will occur due to the pressure applied. Specifically, the portion of the object above the protrusion 18a experiences higher pressure due to the pressure applied compared to other portions. This uneven pressure causes a decrease in processing accuracy due to the pressure applied to the object. Therefore, the structure described in Patent Document 1 is not suitable for applying pressure.

[0005] Furthermore, in the structure described in Patent Document 2, such as that described in Patent Document 2... Figure 3 As shown, the porous plate 41 carrying the object (mask) is disposed on a flat glass plate 42, thus suppressing the pressure unevenness caused by the aforementioned pressurization. However, in the structure described in Patent Document 2, suction is performed from a nozzle 44 mounted on the side of the porous plate 41. Therefore, near this side, i.e., at the outer periphery of the porous plate 41, the suction force generated is higher than in other areas, resulting in uneven suction. In this case, the object cannot be properly held on the porous plate 41. Therefore, the structure described in Patent Document 2 is also unsuitable for pressurization. Summary of the Invention

[0006] Therefore, the object of the present invention is to provide a pressurizing adsorption stage and a pressurizing device having the pressurizing adsorption stage, which can keep the object in a suitable pressurized state.

[0007] To address the aforementioned issues, the first invention provides a pressurizing adsorption platform comprising: a porous body having an adsorption surface capable of supporting an object; an elastic member disposed directly or indirectly in the porous body; a frame supporting the porous body via the elastic member; an attraction space formed between the porous body and the frame; and an attractor capable of adsorbing an object onto the adsorption surface by attracting it through the attraction space. The porous body has an opposite surface located on the opposite side of the adsorption surface, and the frame has a receiving surface. When the elastic member elastically deforms due to pressure applied to the object supported on the adsorption surface, the receiving surface receives the opposite surface. The pressurizing adsorption platform is configured such that when the opposite surface is received by the receiving surface, a uniform reaction force is generated from the porous body toward the pressurized object.

[0008] Furthermore, in the second invention, based on the first invention, the opposite surface of the porous body and the receiving surface of the frame that receives the opposite surface are both flat. The frame has a suction port that communicates with the suction space. The suction port is formed at a position other than the receiving surface, and the suction device is connected to the suction port.

[0009] Furthermore, the pressure adsorption stage of the third invention, based on the pressure adsorption stage of the first or second invention, has a porous body with a side surface, the side surface and the opposite surface of the porous body facing the adsorption space.

[0010] Furthermore, in the fourth invention, the pressure adsorption stage is based on the pressure adsorption stage of the first or second invention, and the elastic member is an integral component of the frame and installed in the porous body.

[0011] Furthermore, the pressure adsorption stage of the fifth invention, based on the pressure adsorption stage of the first or second invention, has a frame having a support member mounted on the porous body, and the elastic member is a spring and / or rubber that connects the support member to the bearing surface of the frame.

[0012] Furthermore, the pressure adsorption stage of the sixth invention, based on the pressure adsorption stage of the first or second invention, contains carbon in its porous body.

[0013] In addition, the pressurizing device of the seventh invention includes: a pressurizing adsorption stage of the first or second invention; and a pressurizer that pressurizes an object supported on the adsorption surface of the pressurizing adsorption stage toward the adsorption surface.

[0014] The pressurized adsorption stage can be used to maintain the object in a state suitable for pressurization. Attached Figure Description

[0015] Figure 1 This is a perspective view of the pressurized adsorption stage of Embodiment 1 of the present invention, cut crosswise in the center.

[0016] Figure 2 It is a cross-sectional perspective view showing the state of pressurizing an object supported on the same pressurizing adsorption stage.

[0017] Figure 3 It is a cross-sectional view of a pressurizing device having the same pressurizing adsorption stage.

[0018] Figure 4 It is a cross-sectional view showing the state of an object being pressurized using the same pressurizing device.

[0019] Figure 5 This is a cross-sectional perspective view of the pressurized adsorption stage of Embodiment 2 of the present invention, cut horizontally in the center.

[0020] Figure 6 It is a cross-sectional perspective view showing the state of pressurizing an object supported on the same pressurizing adsorption stage.

[0021] Figure 7 This is a top view showing the configuration of the springs in the same pressurized suction table.

[0022] Figure 8 This is a top view showing other configurations of the springs in the same pressurized suction table.

[0023] Figure 9 This is a cross-sectional view of a pressurized adsorption stage according to another embodiment of the present invention. Detailed Implementation

[0024] The following description, based on the accompanying drawings, describes the pressurizing adsorption stage and the pressurizing device equipped with the pressurizing adsorption stage according to Embodiments 1 and 2 of the present invention. Both the pressurizing adsorption stages of Embodiments 1 and 2 of the present invention maintain the pressurized object by adsorption based on negative pressure (attraction).

[0025] [Implementation Method 1]

[0026] like Figure 1 As shown, the pressurized adsorption stage 1 of this embodiment 1 includes: a porous body 2 having an adsorption surface 20 capable of supporting an object O; an elastic member 3 directly disposed on the porous body 2; and a frame 5 supporting the porous body 2 via the elastic member 3. An attraction space 4 is formed between the porous body 2 and the frame 5. Furthermore, the pressurized adsorption stage 1 includes an attractor 6, which can adsorb the object O onto the adsorption surface 20 by attracting the object O into the attraction space 4. The porous body 2 has an opposite surface 21 located on the opposite side of the adsorption surface 20. Figure 2As shown, the frame 5 has a receiving surface 51. When the object O supported on the adsorption surface 20 is pressed towards the adsorption surface 20, causing the elastic member 3 to elastically deform, the receiving surface 51 receives the opposite surface 21. The pressurizing adsorption stage 1 is configured such that when the opposite surface 21 is received by the receiving surface 51, a uniform reaction force is generated from the porous body 2 towards the pressurized object O.

[0027] like Figure 1 As shown, the porous body 2 is not particularly limited as long as it is a porous body that has the adsorption surface 20 and the opposing surface 21, forms an attraction space 4 between itself and the frame 5, and, if received by the receiving surface 51 of the frame 5, imparts a uniform reaction force to the object O. Furthermore, the porous body 2 is made of a material with a large number of pores (such as ceramics). In Embodiment 1 of the present invention (and similarly in Embodiment 2 described later), as a preferred embodiment, an example is shown where the porous body 2 is a cuboid with the adsorption surface 20 and the opposing surface 21 respectively as the upper and lower surfaces, and has a side surface 23. This cuboid porous body 2 is formed such that a portion of its side surface 23 is mounted to the elastic member 3, and the portion of its side surface 23 without the elastic member 3 faces the attraction space 4. Furthermore, the porous body 2 is formed such that the opposing surface 21 is flat and faces the attraction space 4. In addition, the porous body 2 is configured such that the adsorption surface 20 is flush with the elastic member 3 and the frame 5. In addition, the flat opposite surface 21 preferably has a surface roughness of 12.5 or less (Ra≤12.5).

[0028] When the target material O is a powder material, the preferred porous body 2 has a pore size of 50 μm or less (φ ≤ 50 μm) or a surface roughness of adsorption surface 20 of 12.5 or less (Ra ≤ 12.5). With such a pore size or surface roughness, even if the powder material (target material O) slides and expands due to the applied pressure, the surface of the powder material in contact with the adsorption surface 20 will not become rough. Of course, it is more preferable to satisfy both the pore size and surface roughness. Furthermore, the porous body 2 preferably contains carbon, and more preferably is composed of carbon. Thus, the porous body 2 functions as a container for electrostatically forming a film from the powder material. The target material O is not limited to a single powder material; it can also be powder material adsorbed on a metal foil or the like. In this case, the surface roughness of the adsorption surface 20 is transferred to the powder material through the metal foil due to the applied pressure, so it is also preferable that the surface roughness is 12.5 or less (Ra ≤ 12.5).

[0029] The elastic member 3 is not particularly limited as long as it is an elastic member that is directly disposed on the porous body 2 and elastically deforms due to the pressure until the opposite surface 21 is received by the receiving surface 51. In Embodiment 1 of the present invention, as a preferred embodiment, an example is shown where the elastic member 3 is integrally formed with the frame 5 and mounted on the porous body 2. Here, the elastic coefficient E of the elastic member 3 is determined by the force F generated by the pressure (see...). Figure 2 Divide by the gap d between the opposite surface 21 and the receiving surface 51 (see...) Figure 1 The obtained value is below (E≤F / d). If the elastic coefficient E is such that the elastic member 3 elastically deforms due to the pressure until the opposite surface 21 is supported by the bearing surface 51.

[0030] like Figure 1 As shown, the frame 5 is not particularly limited as long as it is a frame that forms an attraction space 4 with the porous body 2 and has a receiving surface 51 that receives the opposite surface 21. In Embodiment 1 of the present invention (and also in Embodiment 2 described later), as a preferred embodiment, an example is shown where the frame 5 has a base plate 52 with a flat receiving surface 51 on its upper surface, and side plates 53 that stand upright from the outer edge of the base plate 52. The elastic member 3 is mounted on the upper part of these side plates 53. The attraction space 4 is a space surrounded by the inner surfaces of these side plates 53, the upper surface (receiving surface 51) of the base plate 52, and the porous body 2. One of these side plates 53 forms an attraction port 54 that communicates with the attraction space 4. The suction device 6 is connected to the attraction port 54 via a tube 7 or a flexible tube. In addition, the surface roughness of the flat receiving surface 51 is preferably 12.5 or less (Ra≤12.5).

[0031] The suction device 6 is not particularly limited to any suction device that can adsorb the object O onto the adsorption surface 20 by attracting the object into the suction space 4, such as an exhaust pump. This exhaust pump has the capability to appropriately adsorb the object O onto the adsorption surface 20 to a certain extent when pressurized.

[0032] Next, based on Figure 3 and Figure 4 The pressurizing device 100 equipped with the pressurizing adsorption stage 1 will be described.

[0033] like Figure 3 and Figure 4 As shown, the pressurizing device 100 includes the pressurizing adsorption platform 1 and the pressurizing machine 10. The pressurizing machine 10 pressurizes the object O, which is supported on the adsorption surface 20 of the pressurizing adsorption platform 1, toward the adsorption surface 20.

[0034] The pressurizer 10 includes, for example, a fixed main body 15 and a pressurizing pin 12 that moves in and out relative to the main body 15. In the pressurizing pin 12, the surface that pressurizes the object O is parallel to the adsorption surface 20, and the direction of movement is orthogonal to the adsorption surface 20.

[0035] The following describes the manufacturing method of the pressurizing adsorption stage 1 and the pressurizing device 100 equipped with the pressurizing adsorption stage 1.

[0036] In the manufacture of the pressurized adsorption stage 1, such as Figure 3 As shown, the porous body 2, the elastic member 3, and the frame 5 are connected so that the adsorption surface 20 of the porous body 2, the upper surface of the elastic member 3, and the upper end surface of the side plate 53 of the frame 5 are flush. On the other hand, the suction device 6 is connected to the suction port 54 formed on the side plate 53 of the frame 5 via a tube 7 or the like. Thus, the pressurized adsorption stage 1 is manufactured.

[0037] In the manufacture of the pressurizing device 100, such as Figure 4 As shown, the pressurizing pin 12, protruding from the main body 15 of the pressurizing machine 10, is positioned such that the object O supported on the porous body 2 is pressurized, and the pressurizing adsorption stage 1 is arranged relative to the pressurizing pressurizing device 100. Thus, the pressurizing device 100 is manufactured.

[0038] The following describes the usage of the pressurizing adsorption stage 1 and the pressurizing device 100 equipped with the pressurizing adsorption stage 1.

[0039] like Figure 3 As shown, the user places the object O on the adsorption surface 20 of the pressurized adsorption stage 1, while the suction device 6 draws in the suction space 4. Thus, the porous body 2 is drawn in a wide area from the side 23 and the opposite side 21 facing the suction space 4, and is therefore uniformly drawn from each pore of the adsorption surface 20. As a result, the object O is uniformly adsorbed by the adsorption surface 20. Furthermore, the porous body 2 is drawn in a wide area from the side 23 and the opposite side 21, allowing sufficient drawing from each pore of the adsorption surface 20, thus ensuring sufficient adsorption of the object O by the adsorption surface 20. Here, the porous body 2 contains carbon, and therefore functions as a container for electrostatically forming powder materials. Therefore, by using electrostatic film formation, the powder material (object O) is uniformly formed (carried) on the metal foil (not shown) supported on the adsorption surface 20 of the porous body 2, thus eliminating the need to move the powder material after film formation to the adsorption surface 20, preventing the powder material from collapsing due to such movement.

[0040] Moreover, such as Figure 4As shown, the user pressurizes the object O toward the adsorption surface 20 by protruding the pressure pin 12 from the main body 15 of the pressurizer 10. This pressure causes the elastic member 3 to deform elastically, and the opposite surface 21 of the porous body 2 is received by the receiving surface 51 of the frame 5. At this time, a reaction force is generated from the receiving surface 51 toward the object O via the porous body 2. Since both the opposite surface 21 and the receiving surface 51 of the porous body 2 are flat (preferably with a surface roughness of 12.5 or less), the reaction force generated from the receiving surface 51 toward the object O via the porous body 2 is also uniform. Furthermore, by keeping the pore size below 50 μm and / or the surface roughness of the adsorption surface 20 below 12.5, even when the object O is a powder material, the surface of the powder material in contact with the adsorption surface 20 does not become rough due to the pressure as it slides and expands on the adsorption surface 20, thus maintaining high precision.

[0041] Thus, according to the pressurizing adsorption stage 1 and the pressurizing device 100 equipped with the pressurizing adsorption stage 1, the object O is uniformly attracted by the adsorption surface 20, and a reaction force is uniformly generated from the porous body 2 toward the pressurized object O, so that the object O can be kept in a suitable pressurized state.

[0042] Furthermore, by making both the opposing surface 21 and the receiving surface 51 flat (preferably with a surface roughness of 12.5 or less), the reaction force is maintained more evenly, thus enabling the object O to be kept in a more suitable state for pressurization.

[0043] Furthermore, by integrating the elastic member 3 with the frame 5, no suction leakage occurs between the elastic member 3 and the frame 5. As a result, the object O is more evenly adsorbed by the adsorption surface 20, thus enabling the object O to be kept in a more suitable state for pressurization.

[0044] Furthermore, by making the pore size less than 50 μm and / or the surface roughness of the adsorption surface 20 less than 12.5, the surface of the powder material in contact with the adsorption surface 20 will not become rough when the object O is a powder material, thus improving the accuracy of the object O formed by the pressure.

[0045] Furthermore, by including carbon in the porous body 2, the porous body 2 functions as a container for electrostatically forming powder material onto a metal foil. Therefore, it is not necessary to move the powder material (object O) after film formation to the adsorption surface 20 separately. As a result, it is possible to prevent the powder material from collapsing due to such movement, and the accuracy of the powder material (object O) formed by pressurization can be improved.

[0046] [Implementation Method 2]

[0047] The following is based on Figures 5-8 The pressurizing adsorption stage 1 of Embodiment 2 of the present invention will be described. In this Embodiment 2, the description focuses on the structure different from that of Embodiment 1, namely the elastic member 3 and its vicinity, and the same reference numerals are used for the same structures as in Embodiment 1, and their descriptions are omitted. In addition, regarding the pressurizing device 100, the only difference between Embodiment 1 and this Embodiment 2 is that the pressurizing adsorption stage 1 of the pressurizing device 100 is different. Therefore, the description of the pressurizing device 100 is omitted below.

[0048] like Figure 5 and Figure 6 As shown, the frame 5 of the pressurization adsorption stage 1 in this embodiment 2 has a support member 8 mounted on the porous body 2. Figure 5 As shown, the support member 8 is configured to be flush with the adsorption surface 20 of the porous body 2. The elastic member 3 of the pressurized adsorption stage 1 is a spring 30 and / or rubber that connects the support member 8 to the bearing surface 51 of the frame 5. That is, the elastic member 3 (spring 30 and / or rubber) of the pressurized adsorption stage 1 of this embodiment 2 is indirectly (through the support member 8) provided on the porous body 2. In addition, in Figures 5-8 In the following description, for ease of explanation, the elastic member 3 will be described as a spring 30.

[0049] In Embodiment 1, the component (elastic component 3) installed on the porous body 2 flexes due to pressure, but in Embodiment 2, as... Figure 6 As shown, the component (support member 8) installed on the porous body 2 will not bend due to pressure, but will move along with the porous body 2. Therefore, it is preferable to provide a sealing member 9 such as an O-ring to suppress suction leakage between the side plate 53 of the frame 5 and the support member 8.

[0050] The preferred configuration of the spring 30 in a top view is such that the reaction force generated towards the object O is uniform until the opposite surface 21 is received by the receiving surface 51. Figure 7 and Figure 8 An example of this preferred configuration is shown below. As an example, such as... Figure 7 As shown, springs 30 are preferably arranged at the four corners of the support member 8 when viewed from above. Other examples include... Figure 8 As shown, when viewed from above, adjacent springs 30 are preferably arranged at equal intervals s.

[0051] Thus, according to the pressurizing adsorption stage 1 of this embodiment 2 and the pressurizing device 100 equipped with the pressurizing adsorption stage 1, the component (support member 8) installed on the porous body 2 will not bend due to pressurization, but will move with the porous body 2, so that the object O can be kept in a state more suitable for pressurization.

[0052] Furthermore, with the preferred configuration of the aforementioned spring 30 (and / or rubber), the reaction force from the porous body 2 toward the pressurized object O is uniform until the opposite surface 21 is received by the receiving surface 51, thus enabling the object O to be kept in a more suitable state for pressurization.

[0053] However, in Embodiment 1 and Embodiment 2, it is described that the frame 5 and the porous body 2 are rectangular when viewed from above, but they are not limited to this and can also be other shapes such as circles.

[0054] Furthermore, in Embodiments 1 and 2, it was described that both the opposing surface 21 and the receiving surface 51 are flat, and an suction opening 54 is formed in the side plate 53 of the frame 5, but this is not the only limitation. For example... Figure 9 As shown, a protrusion 57 may also be formed on the receiving surface 51 of the frame 5, and the opposite surface 21 may have a concave-convex shape consistent with the receiving surface 51 (including the protrusion 57). In this case, it can be configured such that the portion 27 (the thinner portion) received by the protrusion 57 in the porous body 2 has high rigidity, and the portion 28 (the thicker portion) received by the receiving surface 51 other than the protrusion 57 has low rigidity. As a result, when the opposite surface 21 of the porous body 2 is received by the receiving surface 51, a reaction force is uniformly generated from the porous body 2 (27, 28) toward the object O being pressed. Even if the rigidity of the portion 27 (the thinner portion) supported by the protrusion 57 is low, and the rigidity of the portion 28 (the thicker portion) supported by the supporting surface 51 other than the protrusion 57 is high, as long as the result is that when the opposite side 21 of the porous body 2 is supported by the supporting surface 51, a reaction force is uniformly generated from the porous body 2 (27, 28) toward the object O being pressed. Furthermore, as long as the structure generates a uniform reaction force from the porous body 2 toward the object O being pressed, then... Figure 9 As shown, the suction port 54 may also be formed in the protrusion 57, etc.

[0055] Furthermore, both Embodiment 1 and Embodiment 2 are illustrative in all respects and not restrictive. The scope of the invention is defined not by the foregoing description but by the claims, and is intended to include the equivalents of the claims and all modifications within the scope of the claims. The structures described in the embodiments and examples, except for those described as the first invention in the "Summary of the Invention," can be any structures and can be appropriately deleted and modified.

Claims

1. A pressurized adsorption stage, characterized in that, include: Porous bodies have adsorption surfaces that can support the objects they are designed to absorb. Elastic members are disposed directly or indirectly in the porous body; The frame supports the porous body via the elastic member; An attraction space is formed between the porous body and the frame; as well as An attractor is capable of adsorbing an object onto an adsorption surface by attracting it into the attraction space. The porous body has opposite faces located on opposite sides of the adsorption surface. The frame has a receiving surface that receives the opposite surface when the elastic member elastically deforms due to pressure applied to the object supported on the adsorption surface. When an object on the adsorption surface is pressed towards the adsorption surface, the elastic member undergoes elastic deformation until the opposite surface comes into direct contact with the receiving surface. The pressurizing adsorption stage is configured to generate a uniform reaction force from the porous body toward the pressurized object when the opposite surface has come into contact with the receiving surface.

2. The pressurized adsorption stage according to claim 1, characterized in that, The opposite surface of the porous body and the receiving surface of the frame that receives the opposite surface are both flat. The frame has a suction port communicating with the suction space, and the suction port is formed at a location other than the receiving surface. The suction device is connected to the suction port.

3. The pressurized adsorption stage according to claim 1 or 2, characterized in that, The porous body has sides. The side and opposite sides of the porous body face the attraction space.

4. The pressurized adsorption stage according to claim 1 or 2, characterized in that, The elastic member is an integral component of the frame and is installed in the porous body.

5. The pressurized adsorption stage according to claim 1 or 2, characterized in that, The frame has a support member mounted on the porous body. The elastic member is a spring and / or rubber that connects the support member to the bearing surface of the frame.

6. The pressurized adsorption stage according to claim 1 or 2, characterized in that, The porous body contains carbon.

7. A pressurizing device, characterized in that, include: The pressurized adsorption stage as described in claim 1 or 2; as well as A pressurizing machine applies pressure to the object supported on the adsorption surface of the pressurizing adsorption stage, directing it toward the adsorption surface.

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