A split-type magnetic field detection device and its detection method

Abstract

The present invention discloses a split-type magnetic field detection device and a detection method thereof. The magnetic field detection device includes a workpiece relative position tooling, an X / Y-direction positioning tooling, and a Z-direction positioning tooling. The upper end surface of the workpiece relative position tooling is provided with a positioning groove matching with a scanning focusing coil and a stopper for fixing a scanning focusing coil assembly. The distance between the two stoppers is the same as the width of the fixed scanning focusing coil assembly. A first hole matrix for a probe to pass through is provided at the center of the workpiece relative position tooling; the X / Y-direction positioning tooling is detachably fixed at the center position of the upper end surface of the workpiece relative position tooling. A second hole matrix for positioning the probe is provided on the X / Y-direction positioning tooling, and the holes of the second hole matrix are arranged in one-to-one correspondence with the holes of the first hole matrix; the Z-direction positioning tooling is detachably fixed on the upper end surface of the X / Y-direction positioning tooling. The lower end surface of the Z-direction positioning tooling is a Z-direction positioning plane to fix the Z-direction position of the probe. The present invention simplifies the detection method and improves the detection accuracy.

Description

Technical Field

[0001] The present invention relates to the technical field of coil magnetic field measurement, and particularly to a split-type magnetic field detection device and a detection method thereof. Background Art

[0002] An electron gun uses the method of directly bombarding a material for heating and evaporation. The gun body consists of six major parts: a cathode filament, a grid, an anode, a focusing coil, X / Y deflection coils, and a crucible. The cathode filament is made of high-temperature metals such as tungsten and tantalum. When it is connected to a power supply and heated to white heat, thermoelectrons are emitted from the surface of the filament metal. These electrons first pass through a grid at the same potential as the cathode and are aggregated into an electron beam. At the same time, they are accelerated towards the anode with a grounded potential. When passing through the central hole of the anode, the fully accelerated and gradually divergent electron beam is then aggregated and led out of the electron gun body under the action of the magnetic field of the focusing coil, and finally directly bombards the surface of the material to be plated contained in the crucible. As for the XY deflection coils, they use the magnetic field formed in the XY directions to cause the electron beam to make small displacements in the XY directions, achieving the purpose of scanning the focusing point on the surface of the material to be plated.

[0003] After the electron beam is emitted by the electron gun, it usually needs to be transmitted over a long distance. The electrons in the electron beam carry negative charges, and the repulsive force between them will cause the electron beam to diverge quickly during the transmission process, and then be intercepted by metal components, resulting in a thermal environment, causing certain harm to the system. In order to obtain a high-quality electron beam, it is necessary to constrain the electron beam during the transmission process. The focusing magnetic field coil is an important way to achieve the stable transmission of a high-quality electron beam, and its performance determines the focusing property and energy stability of the electron gun. The working principle of the scanning coil is to use the deflection effect of the magnetic field on electrons, so that the electron beam deflects a certain angle under the dual action of the electric field and the magnetic field and reaches the surface of the material to be plated. Its performance determines the uniformity of the coating. Therefore, the test and analysis of the magnetic field characteristics of the scanning and focusing coils in the electron gun evaporation system are helpful for adjusting the electron gun energy system and providing a basis and suggestions for subsequent coating production.

[0004] At present, the magnetic field detection means of the scanning and focusing coils mainly uses a gaussmeter made by the Hall effect for testing. The scanning and focusing coil assembly belongs to a hollow structure, and the distance from the position of the magnetic field to be detected to the positioning end face is relatively large. The existing methods cannot accurately position the test directions of the three gaussmeters (3×3 columnar probes) in the X\Y\Z directions. Therefore, the problem of magnetic field detection of the scanning and focusing coils remains to be solved. Summary of the Invention

[0005] The purpose of the present invention is to provide a split-type magnetic field detection device for the problem of inconvenient detection of the magnetic field of coils existing in the prior art.

[0006] Another object of the present invention is to provide a detection method for the split-type magnetic field detection device.

[0007] The technical solution adopted to achieve the object of the present invention is as follows:

[0008] A split-type magnetic field detection device includes a workpiece relative position fixture, an X / Y direction positioning fixture, and a Z direction positioning fixture, wherein:

[0009] The upper end surface of the workpiece relative position fixture is provided with a positioning groove matching the scanning focusing coil and a stop block for fixing the scanning focusing coil assembly. The distance between the two stop blocks is the same as the width of the fixed scanning focusing coil assembly. A first hole matrix for the probe to pass through is provided at the center of the workpiece relative position fixture.

[0010] The X / Y direction positioning fixture is detachably fixed at the center position of the upper end surface of the workpiece relative position fixture. A second hole matrix for positioning the probe is provided on the X / Y direction positioning fixture, and the holes of the second hole matrix are arranged in one-to-one correspondence with the holes of the first hole matrix.

[0011] The Z direction positioning fixture is detachably fixed on the upper end surface of the X / Y direction positioning fixture. The lower end surface of the Z direction positioning fixture is a Z direction positioning plane to fix the Z direction position of the probe.

[0012] In the above technical solution, the materials of the workpiece relative position fixture, the X / Y direction positioning fixture, and the Z direction positioning fixture are all hard aluminum.

[0013] In the above technical solution, the positioning groove is a circular groove coaxially arranged on the workpiece relative position fixture. There are two stop blocks, and the shape is rectangular. The two stop blocks are symmetrically arranged on both sides of the circular groove.

[0014] In the above technical solution, the inner side surface of each stop block is a precision positioning surface, and the precision positioning surfaces of the two rectangular stop blocks are in contact and cooperation with the scanning focusing coil assembly.

[0015] In the above technical solution, the workpiece relative position fixture is a disc-shaped structure. A cylindrical protrusion is provided at the center of the disc-shaped structure. The through holes of the first hole matrix penetrate through the cylindrical protrusion. A first positioning screw hole is provided on the cylindrical protrusion for fixing the X / Y direction positioning fixture. The X / Y direction positioning fixture is fixed on the workpiece relative position fixture by screws.

[0016] In the above technical solution, the through holes of the first hole matrix are round holes.

[0017] In the above technical solution, the holes of the second hole matrix are square holes, and the size of the square holes is the same as the size of the probe.

[0018] In the above technical solution, the X / Y-direction positioning tooling is of a cylindrical structure. The X / Y-direction positioning tooling is provided with second positioning screw holes, which are arranged in one-to-one correspondence with the first positioning screw holes to fix the X / Y-direction positioning tooling. The X / Y-direction positioning tooling is further provided with first fastening screw holes, and the Z-direction positioning tooling is fastened in the first fastening screw holes by screws.

[0019] In the above technical solution, the cylindrical protrusion is further provided with a pin hole for inserting a positioning pin. The positioning pin can be inserted into the bottom of the first fastening screw hole to achieve the preliminary positioning of the X / Y-direction positioning tooling on the workpiece relative position tooling.

[0020] In the above technical solution, the Z-direction positioning tooling is of a disc-shaped structure. The disc-shaped structure is provided with second fastening screw holes to fix the disc-shaped structure on the upper end surface of the X / Y-direction positioning tooling by screws. The upper end surface of the X / Y-direction positioning tooling is a positioning surface, which is attached to the positioning plane of the Z-direction positioning tooling to fix the Z-axis position of the probe.

[0021] On the other hand of the present invention, the detection method of the split magnetic field detection device includes the following steps:

[0022] Step 1, assemble the workpiece relative position tooling, the X / Y-direction positioning tooling, and the Z-direction positioning tooling into an integral structure;

[0023] Step 2, snap the scanning focusing coil assembly between the two stoppers, and snap the scanning focusing coil on the positioning groove;

[0024] Step 3, the probe passes through the through holes of the first hole matrix and enters the through holes of the second hole matrix. The through holes of the second hole matrix fix the X / Y directions of the probe. After the probe passes through the through holes of the second hole matrix, the end contacts the positioning plane of the Z-direction positioning tooling, and the positioning plane fixes the Z-direction position of the probe, thereby completing the positioning in the X\Y\Z directions;

[0025] Step 4, perform a magnetic field scan on the determined position formed in the step;

[0026] Step 5, insert the probe into other through holes corresponding to the first hole matrix and the second hole matrix, and repeat steps 3-4 to scan other position points.

[0027] Compared with the prior art, the beneficial effects of the present invention are:

[0028] 1. The present invention adopts a split structure. Only the X / Y-direction positioning tooling needs wire cutting, which shortens the Z-direction distance of wire cutting, avoids the disadvantage of low precision in the process of wire cutting hard aluminum, and only uses wire cutting to machine the square hole matrix of the X / Y-direction positioning tooling, reducing the wire cutting thickness, improving the precision of the wire-cut square holes, avoiding the problem of wire skew caused by a large cutting thickness when wire cutting hard aluminum, and thus ensuring the measurement precision.

[0029] 2. In the present invention, the circular through-hole matrix structure of the workpiece relative position tooling avoids the difficulty of machining 3×3 square holes by wire cutting, and uses the rectangular block to position the X / Y direction of the scanning and focusing coil assembly. Only high-precision machining of the rectangular block is required, reducing the finish machining area and the machining difficulty.

[0030] 3. The present invention patent uses hard aluminum material, which can reduce the wear of the probe of the detection tooling, and only the X / Y-direction positioning tooling contacts the probe, further reducing the wear of the probe and improving the service life of the probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 The following shows the structural schematic diagram of the present invention.

[0032] Figure 2 It is the structural schematic diagram of the workpiece relative position tooling, where (a) is the front view without the positioning pin, (a) is the front view including the positioning pin, and (c) is the rear view.

[0033] Figure 3 It is the structural schematic diagram of the X / Y-direction positioning tooling.

[0034] Figure 4 It is the structural schematic diagram of the Z-direction positioning tooling, (a) is the front view, and (b) is the rear view.

[0035] In the figure: 1 - workpiece relative position tooling, 2 - X / Y-direction positioning tooling, 3 - Z-direction positioning tooling, 4 - stop block, 5 - first hole matrix, 6 - second hole matrix, 7 - precision positioning surface, 8 - cylindrical protrusion, 9 - first positioning screw hole, 10 - second positioning screw hole, 11 - positioning plane, 12 - positioning surface, 13 - positioning groove, 14 - pin hole, 15 - first fastening screw hole, 16 - second fastening screw hole, 17 - positioning pin. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0036] The following further describes the present invention in detail with reference to the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0037] Embodiment 1

[0038] A split-type magnetic field detection device includes a workpiece relative position tooling 1, an X / Y-direction positioning tooling 2, and a Z-direction positioning tooling 3, where:

[0039] A positioning groove 13 matching the scanning focusing coil and a stop block 4 for fixing the scanning focusing coil assembly are provided on the upper end surface of the workpiece relative position tooling 1. The distance between the two stop blocks 4 is the same as the width of the fixed scanning focusing coil assembly. A first hole matrix 5 for the probe to pass through is provided at the center of the workpiece relative position tooling 1;

[0040] The X / Y-direction positioning tooling 2 is detachably fixed at the central position of the upper end surface of the workpiece relative position tooling 1. A second hole matrix 6 for positioning the probe is provided on the X / Y-direction positioning tooling 2. The holes of the second hole matrix 6 are arranged in one-to-one correspondence with the holes of the first hole matrix 5;

[0041] The Z-direction positioning tooling 3 is detachably fixed on the upper end surface of the X / Y-direction positioning tooling 2. The lower end surface of the Z-direction positioning tooling 3 is a Z-direction positioning plane 11 to fix the Z-direction position of the probe.

[0042] The workpiece relative position tooling 1, the X / Y-direction positioning tooling 2, and the Z-direction positioning tooling 3 are all made of hard aluminum and will not wear the probe. When the scanning focusing coil works, it is fixed to the electron gun through the scanning focusing coil assembly. The magnetic field detection device in this embodiment can detect the scanning focusing coil on the electron gun. The detection method of the split-type magnetic field detection device includes the following steps:

[0043] Step 1, assemble the workpiece relative position tooling 1, the X / Y-direction positioning tooling 2, and the Z-direction positioning tooling 3 into an integrated structure;

[0044] Step 2, snap the scanning focusing coil assembly between the two stop blocks 4, and snap the scanning focusing coil on the positioning groove 13;

[0045] Step 3, the probe passes through the through holes of the first hole matrix 5 and enters the through holes of the second hole matrix 6. The through holes of the second hole matrix 6 fix the X / Y direction of the probe. After the probe passes through the through holes of the second hole matrix 6, the end contacts the positioning plane 11 of the Z-direction positioning tooling 3, and the positioning plane 11 fixes the Z-direction position of the probe, thereby completing the positioning in the X\Y\Z directions;

[0046] Step 4, perform magnetic field scanning on the determined position formed in Step 3;

[0047] Step 5, insert the probe into other corresponding through holes of the first hole matrix 5 and the second hole matrix 6, and repeat Steps 3-4 to scan other position points.

[0048] Embodiment 2

[0049] This embodiment further elaborates on the structure of the workpiece relative position tooling 1 in detail.

[0050] The positioning groove 13 is a circular groove coaxially arranged on the workpiece relative position tooling 1. There are two stoppers 4, which are rectangular in shape. The two rectangular stoppers 4 are symmetrically arranged on both sides of the circular groove. The two rectangular stoppers 4 and the center of the circular groove are centrosymmetrically arranged. The inner side surface of each stopper 4 is a precision positioning surface 7, which is processed with high precision. The precision positioning surfaces 7 of the two rectangular stoppers 4 are in contact and cooperation with the scanning focusing coil assembly, positioning the X / Y directions of the scanning focusing coil assembly to be measured and preventing the rotation of the scanning focusing coil assembly around the Z axis.

[0051] The workpiece relative position tooling 1 is of a disc-shaped structure. A cylindrical protrusion 8 is provided at the center of the disc-shaped structure. The through holes of the first hole matrix 5 penetrate through the cylindrical protrusion 8. A first positioning screw hole 9 is provided on the cylindrical protrusion 8 for fixing the X / Y direction positioning tooling 2. The X / Y direction positioning tooling 2 is fixed on the workpiece relative position tooling 1 by using screws, which is convenient for disassembly and fastening. A pin hole 14 is also provided on the cylindrical protrusion 8 for inserting a positioning pin. The through holes of the first hole matrix 5 are round holes. Since the through holes of the first hole matrix 5 do not contact the probes, for the convenience of processing, milling is used for processing.

[0052] Embodiment 3

[0053] This embodiment further elaborates on the structure of the X / Y direction positioning tooling 2 in detail.

[0054] The X / Y direction positioning tooling 2 is of a cylindrical structure. The holes of the second hole matrix 6 are square holes. The size of the square holes is the same as the size of the probes. More preferably, the square holes are 3*3 square holes for positioning the square Gaussian probes. The square holes are formed by wire cutting. Due to the split design, the cutting thickness of the wire cutting is shortened, the precision of the wire cut square holes is improved, and the problem of the cutting wire skewing caused by a large cutting thickness when wire cutting hard aluminum is avoided.

[0055] The X / Y positioning tooling 2 is provided with second positioning screw holes 10 which are arranged in one-to-one correspondence with the first positioning screw holes 9 to fix the X / Y positioning tooling 2. There are two second positioning screw holes 10 which are symmetrically arranged with the center of the circle of the X / Y positioning tooling 2 as the symmetry center. The X / Y positioning tooling 2 is further provided with first fastening screw holes 15. The Z-axis positioning tooling 3 is fastened in the first fastening screw holes 15 by screws. There are two first fastening screw holes 15 which are symmetrically arranged with the center of the circle of the X / Y positioning tooling 2 as the symmetry center. The positioning pin 17 can be inserted into the bottom of the first fastening screw hole 15 in a matching manner to realize the preliminary positioning of the X / Y positioning tooling 2 on the workpiece relative position tooling 1.

[0056] During assembly, first place the X / Y positioning tooling 2 at the central position of the workpiece relative position tooling 1, insert the positioning pin into the bottom of the first fastening screw hole 15 for preliminary positioning, and then screw the screws into the second positioning screw holes 10 and the first positioning screw holes 9, so that the X / Y positioning tooling 2 can be fastened to the workpiece relative position tooling 1.

[0057] Embodiment 4

[0058] In this embodiment, the structure of the Z-axis positioning tooling 3 is further described in detail.

[0059] The Z-axis positioning tooling 3 has a disc-shaped structure. The disc-shaped structure is provided with second fastening screw holes 16 to fix the disc-shaped structure to the upper end surface of the X / Y positioning tooling 2 by screws. The upper end surface of the X / Y positioning tooling 2 is the positioning surface 12 which is fitted with the positioning plane 11 of the Z-axis positioning tooling 3 to fix the Z-axis position of the probe. When the probe is inserted into the second hole matrix 6 and touches the positioning plane 11, the insertion stops, and the Z-axis position of the probe is determined.

[0060] The second fastening screw holes match the first fastening screw holes. During assembly, fit the positioning plane 11 to the positioning surface 12, and then screw the screws into the second fastening screw holes 16 and the first fastening screw holes 15, so that the Z-axis positioning tooling 3 can be fastened to the X / Y positioning tooling 2.

[0061] For ease of explanation, spatial relative terms such as "upper", "lower", "left", "right", etc. are used in the embodiments to describe the relationship of one element or feature shown in the figure relative to another element or feature. It should be understood that, in addition to the orientation shown in the figure, the spatial terms are intended to include different orientations of the device during use or operation. For example, if the device in the figure is inverted, the element described as being "below" other elements or features will be positioned "above" the other elements or features. Thus, the exemplary term "below" can encompass both upper and lower orientations. The device may be positioned in other ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein can be interpreted accordingly.

[0062] Moreover, relative terms such as "first" and "second" are only used to distinguish one component with the same name from another, and do not necessarily require or imply any such actual relationship or order between these components.

[0063] The above description is only a preferred embodiment of the present invention. It should be noted that for those of ordinary skill in the art, several improvements can be made without departing from the principle of the present invention, and these improvements should also be regarded as the protection scope of the present invention.

Claims

1. A split-type magnetic field detection device, characterized in that, it includes a workpiece relative position tooling, an X / Y-direction positioning tooling, and a Z-direction positioning tooling, where: On the upper end surface of the workpiece relative position tooling, there are positioning grooves matching the scanning focusing coil and stoppers for fixing the scanning focusing coil assembly. The distance between the two stoppers is the same as the width of the fixed scanning focusing coil assembly. In the center of the workpiece relative position tooling, there is a first hole matrix for the probe to pass through; The X / Y-direction positioning tooling is detachably fixed at the central position of the upper end surface of the workpiece relative position tooling. On the X / Y-direction positioning tooling, there is a second hole matrix for positioning the probe. The holes of the second hole matrix are arranged in one-to-one correspondence with the holes of the first hole matrix; The Z-direction positioning tooling is detachably fixed on the upper end surface of the X / Y-direction positioning tooling. The lower end surface of the Z-direction positioning tooling is a Z-direction positioning plane to fix the Z-direction position of the probe; The workpiece relative position tooling is of a disc-shaped structure. In the center of the disc-shaped structure, there is a cylindrical protrusion. The through holes of the first hole matrix penetrate through the cylindrical protrusion. On the cylindrical protrusion, there is a first positioning screw hole for fixing the X / Y-direction positioning tooling. The X / Y-direction positioning tooling is fixed on the workpiece relative position tooling by screws; The X / Y-direction positioning tooling is of a cylindrical structure. On the X / Y-direction positioning tooling, there are second positioning screw holes, which are arranged in one-to-one correspondence with the first positioning screw holes to fix the X / Y-direction positioning tooling. On the X / Y-direction positioning tooling, there are also first fastening screw holes. The Z-direction positioning tooling is fastened in the first fastening screw holes by screws; The Z-direction positioning tooling is of a disc-shaped structure. On the disc-shaped structure, there are second fastening screw holes, which are matched with the first fastening screw holes. The upper end surface of the X / Y-direction positioning tooling is a positioning surface, which fits with the positioning plane of the Z-direction positioning tooling to fix the Z-axis position of the probe.

2. The split-type magnetic field detection device according to claim 1, characterized in that, the workpiece relative position tooling, the X / Y-direction positioning tooling, and the Z-direction positioning tooling are all made of duralumin.

3. The split-type magnetic field detection device according to claim 1, characterized in that, the positioning groove is a circular groove coaxially arranged on the workpiece relative position tooling. There are two stoppers, with a rectangular shape, and the two stoppers are symmetrically arranged on both sides of the circular groove.

4. The split-type magnetic field detection device according to claim 3, characterized in that, the inner side surface of each stopper is a precision positioning surface, and the precision positioning surfaces of the two rectangular stoppers are in contact and cooperation with the scanning focusing coil assembly.

5. The split-type magnetic field detection device according to claim 1, characterized in that, the through holes of the first hole matrix are round holes.

6. The split-type magnetic field detection device according to claim 1, characterized in that, the holes of the second hole matrix are square holes, and the size of the square holes is the same as the size of the probe.

7. The split-type magnetic field detection device according to claim 1, characterized in that, The cylindrical protrusion is also provided with a pin hole for inserting a positioning pin, and the positioning pin can be inserted into the bottom of the first fastening screw hole to achieve preliminary positioning of the X / Y direction positioning tooling on the workpiece relative position tooling.

8. The detection method of the split magnetic field detection device according to any one of claims 1-7, characterized in that it includes the following steps: Step 1, assemble the workpiece relative position tooling, the X / Y direction positioning tooling and the Z direction positioning tooling into an integral structure; Step 2, clamp the scanning focusing coil assembly between two stoppers, and clamp the scanning focusing coil on the positioning groove; Step 3, the probe passes through the through holes of the first hole matrix and enters the through holes of the second hole matrix. The through holes of the second hole matrix fix the X / Y direction of the probe. After the probe passes through the through holes of the second hole matrix, the end contacts the positioning plane of the Z direction positioning tooling, and the positioning plane fixes the Z direction position of the probe, thereby completing the positioning in the X\Y\Z directions; Step 4, perform a magnetic field scan on the determined position formed in Step 3; Step 5, insert the probe into other corresponding through holes of the first hole matrix and the second hole matrix, and repeat Steps 3-4 to scan other position points.

Images