A dust-proof structure for a laser cross-flow fan bearing and a laser

Abstract

The present invention provides a dustproof structure for a laser crossflow blower bearing and a laser. The dustproof structure for the laser crossflow blower bearing includes a discharge chamber body and a crossflow blower; the shaft bodies at both ends of the crossflow blower are rotatably arranged on the chamber body through bearings; a threaded structure, a toothed structure, or a blade structure is arranged on the outer circle of the shaft body near the outer end face of the bearing. When the motor drives the shaft body and the crossflow blower to rotate, the threaded structure, the toothed structure, or the blade structure forces the gas outside the bearing to move in a direction away from the bearing, thereby preventing dust in the cavity from approaching and entering the bearing. The present invention has a simple structure. By arranging a threaded, toothed, or bladed structure on the shaft body near the bearing, the gas is forced to move in a direction away from the bearing, thereby preventing the gas from carrying particulate matter into the bearing gap, contaminating the bearing, and affecting its normal operation, thereby increasing the service life of the bearing and ensuring the normal operation and operation of the crossflow blower.

Description

Technical Field

[0001] The present invention relates to the technical field of lasers, and in particular to a dust-proof structure of a laser crossflow fan bearing. Background Art

[0002] The discharge process of the excimer laser discharge cavity is accompanied by electrode loss, which continuously generates dust. This dust circulates with the airflow and is dispersed to various locations in the cavity. It causes the greatest damage to the light-emitting window of the lens laser and the bearings of the cross-flow fan. Special protective devices need to be designed to protect and extend the normal operation and service life of the light-emitting window of the lens and the bearings.

[0003] Figure 1 and Figure 2 The gas flow diagram of the working gas in the laser discharge cavity 10 in the prior art contaminating the crossflow fan bearing, wherein Figure 2 for Figure 1 Partial discharge diagram in .

[0004] from Figure 2 As can be seen in the figure, because there is a certain gap between the shaft disc of the crossflow blower 30 and the inner wall of the discharge chamber 10 , the gas in the discharge chamber 10 will pass through the gap into the gap between the discharge chamber 10 and the shaft 32 and flow towards the bearing 13 to contaminate the bearing 13 . Summary of the Invention

[0005] The object of the present invention is to provide a dust-proof structure for a laser crossflow blower bearing to solve at least one of the above-mentioned technical problems existing in the prior art.

[0006] In order to solve the above technical problems, the present invention provides a dust-proof structure for a laser cross-flow blower bearing, comprising: a discharge chamber body and a cross-flow blower;

[0007] The shafts at both ends of the cross-flow fan (specifically, the impeller) are rotatably arranged on the cavity through bearings; a threaded structure, a toothed structure or a blade structure is provided on the outer circle of the shaft near the outer end face of the bearing. When the motor drives the shaft and the cross-flow fan to rotate, the threaded structure, the toothed structure or the blade structure forces the gas outside the bearing to move in a direction away from the bearing, thereby preventing dust in the cavity from approaching and entering the bearing.

[0008] Furthermore, it also includes a gas purifier and a gas circuit;

[0009] The gas purifier is used to purify the working gas in the discharge chamber;

[0010] Both ends of the cross-flow fan are provided with shaft discs;

[0011] The air inlet end of the gas circuit is connected to the gas purifier, and the air outlet end of the gas circuit is arranged facing the shaft disk. The shaft disk is provided with a through hole (or notch) connecting the inside and outside of the middle cavity of the cross-flow fan (impeller). The working gas discharged from the gas circuit enters the middle cavity of the cross-flow fan through the through hole and then flows back into the cavity.

[0012] Furthermore, a mounting hole is provided on the cavity, and the threaded structure, tooth structure or blade structure on the shaft is inserted into the mounting hole; when the cross-flow blower rotates, a dynamic sealing structure is formed between the threaded structure, tooth structure or blade structure and the mounting hole.

[0013] The gap between the inner wall of the mounting hole and the thread structure, tooth structure or blade structure is small, for example, not more than 0.5 mm. When the cross-flow blower rotates at high speed, the thread structure, tooth structure or blade structure rotates to generate a cyclonic vortex, forcing the gas to flow toward the outside of the mounting hole and the cavity. As a result, the mounting hole and the thread structure, tooth structure or blade structure are combined with each other to form a good dynamic sealing structure, preventing dust from entering the bearing.

[0014] Furthermore, the through hole is arranged to be spirally inclined so as to force the gas outside the shaft disc to flow into the cavity of the cross-flow blower through the through hole when the motor drives the shaft disc to rotate.

[0015] Preferably, the impeller of the cross-flow fan is connected to the intermediate shaft through a connecting rib plate, and the through hole or slot is formed between two adjacent connecting rib plates, wherein the connecting rib plates are spirally or inclined like blades, thereby forcing the gas to flow from the outside to the inside into the cavity during rotation; and then utilizing negative pressure to force the working gas in the gas circuit to flow out.

[0016] The gas circuit may be a gas flow channel arranged inside the side wall or bottom plate of the discharge chamber, or may be a tube arranged outside the discharge chamber.

[0017] Furthermore, a plurality of blades are provided on the outer end surface of the shaft disc of the cross-flow blower and on the circumference of the shaft body. When the motor drives the bearing and the shaft disc to rotate, the blades tend to force the gas near the bearing and the shaft body to flow in a direction away from the bearing and the shaft body (i.e., a low-pressure area is formed near the bearing and the shaft body).

[0018] Furthermore, a through hole is provided on the outer end surface of the shaft disc between the shaft body and the blades; and a plurality of through holes are spaced apart in the circumferential direction of the shaft body.

[0019] Furthermore, an annular radially protruding baffle is provided on the outer end surface of the shaft disc between the through hole and the blades.

[0020] The baffle is as close to the side of the cavity as possible, thereby forming a relatively closed annular cavity, which has a drainage effect on the working gas discharged from the gas circuit.

[0021] More preferably, an annular groove is provided on the side of the cavity, the baffle is rotatably inserted into the annular groove, and a dynamic sealing structure is arranged between the baffle and the annular groove, that is, an annular sealing structure is formed outside the through hole, thereby helping the working gas to completely flow back into the cavity and avoid leakage.

[0022] Among them, the cross-flow fan is an existing technology, which includes an impeller formed by a ring-shaped blade grid, an intermediate cavity is provided inside the impeller; and a shaft disk and a shaft body are provided at both ends of the impeller.

[0023] The present invention also provides a laser including the dust-proof structure of the crossflow blower bearing as described above.

[0024] By adopting the above technical solution, the present invention has the following beneficial effects:

[0025] The dust-proof structure of a laser cross-flow blower bearing provided by the present invention has a simple structure. By arranging a thread, tooth or blade structure on the shaft near the bearing, the gas is forced to move in a direction away from the bearing, thereby preventing the gas from carrying particulate matter into the bearing gap, contaminating the bearing and affecting its normal operation, thereby increasing the service life of the bearing and ensuring the normal operation and operation of the blower.

[0026] In addition, the purified working gas is transported to the shaft disc of the cross-flow fan, enters the cross-flow fan through the through-holes on the shaft disc, and is then input into the cavity by the cross-flow fan. The purified working gas forms a better dust-proof environment around the bearing structures at both ends of the shaft disc, which can effectively reduce the entry of particulate matter into the bearing structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 Schematic diagram of gas flow in the laser discharge chamber that contaminates the throughflow blower bearing in the prior art;

[0029] Figure 2 for Figure 1 A partial enlarged schematic diagram;

[0030] Figure 3 A schematic structural diagram of the dust-proof structure of a laser crossflow blower bearing provided in Example 1 of the present invention;

[0031] Figure 4 This is a schematic diagram of the partial structure of the bearing and shaft in Example 1;

[0032] Figure 5 This is a schematic structural diagram of the shaft body and shaft disc in Example 1;

[0033] Figure 6 Schematic diagram of the partial structure of the light-emitting window, the middle cavity and the slit in Example 1;

[0034] Figure 7 This is a schematic diagram of the working gas flowing back to the cavity through the cross-flow fan;

[0035] Figure 8 It is a three-dimensional cross-sectional view of the gas circuit;

[0036] Figure 9 Schematic diagram of the structure of the gas circuit and the intermediate cavity in Example 1;

[0037] Figure 10 This is a partially enlarged schematic diagram of the mounting hole in Example 1;

[0038] Figure 11 This is a diagram of the gas flow in the discharge chamber in Example 1.

[0039] Figure 12 Schematic diagram of the laser of Example 2.

[0040] Reference numerals:

[0041] 1-working gas; 10-cavity; 10a-upper cavity; 10b-lower cavity; 11-gas circuit; 11a-gas outlet; 12-middle cavity; 13-bearing; 14-mounting hole; 20-gas purifier; 30-crossflow fan; 31-impeller; 32-shaft; 33-shaft disc; 34-threaded structure; 35-blade; 36-through hole; 37-baffle; 40-motor; 50-light-emitting window; 60-slit; 70-discharge electrode. DETAILED DESCRIPTION

[0042] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0043] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0044] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0045] The present invention will be further explained below with reference to specific embodiments.

[0046] Example 1

[0047] like Figure 3-7 As shown, the dust-proof structure of a laser cross-flow blower bearing provided in this embodiment includes: a discharge chamber body 10, a gas purifier 20, a gas circuit 11 and a cross-flow blower 30; the gas purifier 20 is used to purify the working gas 1 in the discharge chamber body 10; a light-emitting window 50 and a slit 60 are provided on the discharge chamber body 10 and on the laser output side.

[0048] The impeller 31 of the crossflow blower 30 is provided with shaft discs 33 at both ends. The outlet end 11a of the gas circuit 11 is disposed facing one side of the shaft disc 33. This side shaft disc 33 is provided with a through hole 36 (or notch) that connects the inside and outside of the central cavity of the impeller 31 of the crossflow blower 30. The working gas 1 discharged from the gas circuit 11 enters the central cavity of the impeller 31 of the crossflow blower 30 through the through hole 36. After passing through the crossflow blower 30, the working gas 1 in the gas circuit 11 flows back into the cavity 10.

[0049] Preferably, the through hole 36 is arranged in a spiral manner so that when the motor 40 drives the shaft disc 33 to rotate, the gas outside the shaft disc 33 tends to flow into the cavity of the impeller 31 of the cross-flow blower 30 through the through hole 36.

[0050] Preferably, the impeller 31 is connected to the intermediate shaft 32 through a connecting rib plate, and the through hole 36 or slot is formed between two adjacent connecting rib plates, wherein the connecting rib plates are spirally or inclined like blades, thereby forcing the gas to flow from the outside to the inside into the cavity during rotation; and then utilizing negative pressure to force the working gas 1 in the gas circuit 11 to flow out.

[0051] The gas circuit 11 may be a gas flow channel arranged inside the side wall or bottom plate of the discharge chamber, or may be a tube arranged outside the discharge chamber.

[0052] The cross-flow blower 30 rotates to form a certain negative pressure near the outlet end 11a of the gas circuit 11, thereby forming a suction force, which promotes the flow and outflow of the working gas 1 in the gas circuit 11, and finally enters the air flow channel in the cross-flow blower 30 and is blown into the cavity 10.

[0053] Reference Figure 4-5 As shown, the shafts 32 at both ends of the cross-flow fan 30 are rotatably arranged on the cavity 10 through bearings 13; a threaded structure 34 (or a tooth structure or a blade structure) is provided on the outer circle of the shaft 32 near the outer end surface of the bearing 13. When the motor 40 drives the shaft 32 and the cross-flow fan 30 to rotate, the threaded structure 34 forces the gas outside the bearing 13 to move in a direction away from the bearing 13 (generally toward the inside of the cross-flow fan 30 and the inside of the cavity 10), thereby preventing the dust in the cavity 10 from approaching and entering the bearing 13.

[0054] Reference Figure 10 As shown, a mounting hole 14 is provided on the side wall of cavity 10, and a threaded structure 34 on shaft 32 is inserted into mounting hole 14. When crossflow blower 30 rotates, a dynamic seal is formed between threaded structure 34 and mounting hole 14. There is a small gap between the inner wall of mounting hole 14 and threaded structure 34. When crossflow blower 30 rotates at high speed, threaded structure 34 rotates and generates a cyclonic vortex, forcing the air to flow out of mounting hole 14 and toward cavity 10. As a result, mounting hole 14 and threaded structure 34 combine to form a good dynamic seal, preventing dust from entering bearing 13.

[0055] Reference Figure 5 As shown, more preferably, a plurality of blades 35 are circumferentially arranged on the outer end face of the shaft disc 33 of the cross-flow blower 30. When the motor 40 drives the bearing 13, the shaft disc 33 and the blades 35 to rotate, the blades 35 tend to force the gas near the bearing 13 and the shaft body 32 to flow in a direction away from the bearing 13 and the shaft body 32 (i.e., a low-pressure area is formed near the bearing 13 and the shaft body 32).

[0056] Furthermore, a through hole 36 is provided on the outer end surface of the shaft disc 33 between the shaft body 32 and the blades 35; multiple through holes 36 are spaced apart circumferentially around the shaft body 32. An annular, radially raised baffle 37 is positioned on the outer end surface of the shaft disc 33 between the through holes 36 and the blades 35. More preferably, an annular groove is provided on the side of the chamber 10, into which the baffle 37 is rotatably inserted, with a dynamic seal disposed between the baffle 37 and the groove. This creates an annular seal outside the through holes 36, thereby ensuring that all working gas flows back into the chamber 10 and preventing leakage.

[0057] Reference Figure 6-9 As shown, an intermediate cavity 12 is provided between the light-emitting window 50 and the slit 60; the air inlet end of the gas circuit 11 is connected to the gas purifier 20, passing through the intermediate cavity 12 in the middle, and the air outlet end 11a of the gas circuit 11 is connected to the cross-flow blower 30, and the working gas 1 purified by the gas purifier 20 flows through the intermediate cavity 12 through the gas circuit 11, that is, the intermediate cavity 12 is arranged in the middle of the gas circuit 11, and is used to form a dust-proof air curtain on the inner side of the light-emitting window 50, thereby preventing the working gas 1 from entering the intermediate cavity 12 from the cavity 10 through the window on the slit 60 and approaching and contaminating the light-emitting window 50.

[0058] Reference Figure 8 and 9 As shown, the chamber 10 includes an upper chamber 10a and a lower chamber 10b, the cross-flow blower 30 and its motor 40 are arranged on the lower chamber 10b, and the gas purifier 20 is fixedly arranged on the upper chamber 10a.

[0059] Preferably, the pressure in the intermediate cavity 12 is less than or equal to the pressure in the discharge chamber body 10. During operation, the suction force of a fan such as the crossflow fan 30 is utilized to maintain a set pressure in the intermediate cavity 12 through the gas circuit 11. This set pressure is less than or equal to the pressure inside the discharge chamber 10. Even if a small amount of particulate matter enters the intermediate cavity 12, it will be carried away by the gas in the gas circuit 11 and will not contaminate the light output window 50. The pressure difference across the slit 60 is greatly reduced, greatly reducing the impact on beam quality caused by the large pressure gradient in the prior art.

[0060] Reference Figure 11 As shown, the shaft disc 33 may also be free of the through hole 36. In this embodiment, a threaded structure 34 is provided on the outer circle of the shaft body 32 near the outer end surface of the bearing 13. When the motor 40 drives the shaft body 32 and the cross-flow blower 30 to rotate, the threaded structure 34 forces the gas outside the bearing 13 to move in a direction away from the bearing 13 (generally toward the inside of the cross-flow blower 30 and the inside of the cavity 10), so that the gas in the discharge chamber 10 flows in the direction shown in the figure, thereby preventing the dust in the cavity 10 from approaching and entering the bearing 13.

[0061] Example 2

[0062] The present invention also discloses a laser, such as Figure 12 As shown in the schematic diagram, it includes a discharge chamber 10, a cross-flow fan 30, a light-emitting window 50, two oppositely arranged discharge electrodes 70, and the dust-proof structure of the cross-flow fan bearing in the above-mentioned embodiment 1 (not shown in the figure).

[0063] In the laser of this embodiment, the bearings of the crossflow blower 30 are not easily contaminated and have a long service life.

[0064] The present invention has a simple structure. The purified working gas is transported to the shaft disc of the cross-flow fan, enters the cross-flow fan through the through hole on the shaft disc, and is then input into the cavity by the cross-flow fan. The purified working gas forms a good dust-proof environment around the bearing structures at both ends of the shaft disc, which can effectively reduce the entry of particulate matter into the bearing structure.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dustproof structure for a laser crossflow fan bearing, characterized in that: include: A discharge chamber body (10) and a cross-flow fan (30); The shafts (32) at both ends of the cross-flow fan (30) are rotatably arranged on the cavity (10) via bearings (13); a thread structure (34), a tooth structure or a blade structure is provided on the outer circle of the shaft (32) near the outer end surface of the bearing (13); when the motor drives the shaft (32) and the impeller of the cross-flow fan (30) to rotate, the thread structure (34), the tooth structure or the blade structure forces the gas outside the bearing (13) to move in a direction away from the bearing (13), thereby preventing dust in the cavity (10) from approaching and entering the bearing (13); The crossflow fan (30) is provided with a shaft disc (33) at both ends; the shaft disc (33) is provided with a through hole (36) communicating with the inside and outside of the middle cavity of the crossflow fan (30); A plurality of blades (35) are provided on the outer end surface of the shaft disc (33) of the cross-flow fan (30) and in the circumferential direction of the shaft body (32), and a through hole (36) is provided between the shaft body (32) and the blades (35); An annular radially protruding baffle (37) is provided on the outer end surface of the shaft disc (33) between the through hole (36) and the blade (35).

2. The dust-proof structure of the laser crossflow blower bearing according to claim 1, characterized in that: Also includes a gas purifier (20) and a gas circuit (11); The gas purifier (20) is used to purify the working gas (1) in the discharge chamber (10); The gas inlet end of the gas circuit (11) is connected to the gas purifier (20), and the gas outlet end (11a) of the gas circuit (11) is arranged facing the shaft disc (33). The working gas (1) discharged from the gas circuit (11) enters the middle cavity of the impeller of the cross-flow fan (30) through the through hole (36) and then flows back into the cavity (10).

3. The dust-proof structure of the laser crossflow blower bearing according to claim 1, characterized in that: The cavity (10) is provided with a mounting hole (14), and the threaded structure (34), tooth structure or blade structure on the shaft (32) is inserted into the mounting hole (14); when the cross-flow blower (30) rotates, a dynamic sealing structure is formed between the threaded structure (34), tooth structure or blade structure and the mounting hole (14).

4. The dust-proof structure of the laser crossflow blower bearing according to claim 2, characterized in that: The through hole (36) is arranged in a spiral inclination so as to force the gas outside the shaft disc (33) to flow into the cavity of the cross-flow fan (30) through the through hole (36) when the motor drives the shaft disc (33) to rotate.

5. The dust-proof structure of the laser crossflow blower bearing according to claim 2, characterized in that: The gas circuit (11) is a gas flow channel arranged inside the side wall or bottom plate of the discharge chamber; or, the gas circuit (11) is a tube arranged outside the discharge chamber.

6. The dust-proof structure of the laser crossflow blower bearing according to claim 1, characterized in that: When the motor drives the bearing (13) and the shaft disc (33) to rotate, the blades (35) tend to force the gas near the bearing (13) and the shaft body (32) to flow in a direction away from the bearing (13) and the shaft body (32).

7. The dust-proof structure of the laser crossflow blower bearing according to claim 6, characterized in that: On the outer end surface of the shaft disc (33), a plurality of through holes (36) are spaced apart in the circumferential direction of the shaft body (32).

8. The dust-proof structure of the laser crossflow blower bearing according to claim 1, characterized in that: An annular groove is provided on the side of the cavity (10), and the baffle (37) is rotatably inserted into the annular groove. A dynamic sealing structure is arranged between the baffle (37) and the annular groove.

9. A laser, characterized in that: The dustproof structure comprises the dustproof structure according to any one of claims 1 to 8.

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