Molecular pump auxiliary testing device

Abstract

This invention relates to the field of molecular pump testing technology, specifically to a molecular pump auxiliary testing device, comprising: a molecular pump installed in a frame; a second quick-change plate disposed on the side of the frame; a lifting mechanism driving a fourth connecting plate to rise and fall; a fourth power structure disposed on the fourth connecting plate and driving the second connecting plate to move; a third power structure disposed on the second connecting plate and driving a support plate to rotate; and a third quick-change plate disposed on the support plate and connected and disconnected from the second quick-change plate. This application uses a lifting mechanism to drive the fourth connecting plate to rise and fall, aligning the second quick-change plate with the third quick-change plate; the fourth power structure connects the second quick-change plate close to the third quick-change plate; after the lifting mechanism drives the frame housing the molecular pump to rise, the third power structure drives the frame housing the molecular pump to rotate, facilitating angle adjustment of the molecular pump, saving manpower, reducing labor intensity, automating the testing process, and improving the efficiency of temperature rise and fall testing.

Description

Technical Field

[0001] This invention relates to the field of molecular pump testing technology, and more specifically to a molecular pump auxiliary testing device. Background Technology

[0002] The six-angle temperature rise and fall test process for magnetic levitation molecular pumps is a crucial step in ensuring product qualification and a key process for safe operation. Magnetic levitation molecular pumps, as vacuum generation devices, are widely used in film coating and semiconductor fields. Because the equipment used to install magnetic levitation molecular pumps varies in the field, the pumps must be able to withstand installation at any angle and maintain normal levitation under these conditions. The six-angle temperature rise and fall test simulates the magnetic levitation molecular pump under harsh operating conditions at six different angles to confirm its ability to operate normally.

[0003] The six-angle heating and cooling test of the magnetic levitation molecular pump requires four testers to rotate and adjust the pump to obtain different test angles. The entire testing process takes three working days. During the testing process, the magnetic levitation molecular pump needs to be mounted on a test bench; the total weight of the test bench and the pump is approximately 100 kg, which places a significant burden on the testers. Rotating and adjusting the pump is extremely laborious and severely impacts the efficiency of the testing. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of low testing efficiency caused by the large number of testers and the laborious angle adjustment during the six-angle heating and cooling test of magnetic levitation molecular pumps. Based on the above, it is necessary to develop a molecular pump auxiliary testing device that makes adjusting the angle of the magnetic levitation molecular pump less laborious and improves the efficiency of the six-angle heating and cooling test of the magnetic levitation molecular pump.

[0005] To achieve the above objectives, the present invention provides a molecular pump-assisted testing device, comprising:

[0006] The frame is internally designed to accommodate molecular pumps.

[0007] The second fast-change disc is located on the side of the rack;

[0008] The lifting mechanism is provided with a fourth connecting plate, and the lifting mechanism is adapted to drive the fourth connecting plate to move up and down.

[0009] A fourth power structure is provided on a fourth connecting plate, and a second connecting plate is provided on the fourth power structure. The fourth power structure is adapted to drive the second connecting plate to move linearly back and forth in the horizontal plane.

[0010] The third power structure is disposed on the second connecting plate, and a bearing plate is provided on the third power structure. The third power structure is adapted to drive the bearing plate to rotate in a vertical plane.

[0011] The third quick-change disc is mounted on the support plate and is adapted to be quickly connected and disconnected from the second quick-change disc.

[0012] Optionally, the lifting mechanism includes:

[0013] Four linear guide rails are set vertically and parallel;

[0014] The fifth connecting plate is located at the top of the four linear guide rails;

[0015] The second power structure is disposed on the fifth connecting plate;

[0016] Two drive sprockets are located on both sides of the second power structure, and the two drive sprockets are respectively connected to the power outputs at both ends of the second power structure;

[0017] Two driven sprockets are connected to the two driving sprockets respectively via two chains, and the two chains are vertically arranged. The two ends of the fourth connecting plate are connected to the two chains respectively.

[0018] Optionally, the lifting mechanism further includes:

[0019] The first main shaft, serving as the power output at both ends of the second power structure, is connected to two drive sprockets near both ends, and both ends of the first main shaft are mounted on the fifth connecting plate via the first bearing seat.

[0020] The driven shaft is connected to two driven sprockets near both ends, and the two ends of the driven shaft are respectively mounted on two linear guides via a third bearing seat.

[0021] Optionally, the fourth power structure is slidably connected to the linear guide rail via a slider.

[0022] Optionally, it also includes:

[0023] Two second support plates are disposed on the fourth connecting plate and are respectively located on both sides of the fourth power structure;

[0024] Two guide rods are respectively mounted on two second support plates via second bearing seats. The ends of both guide rods are connected to the second connecting plate. The two guide rods are suitable for linear reciprocating movement, and the direction of movement of the two guide rods is the same as the direction of linear reciprocating movement of the second connecting plate.

[0025] Optionally, it also includes:

[0026] A rotating assembly, wherein the frame is placed on the rotating assembly, and the rotating assembly is adapted to drive the frame to rotate in a horizontal plane.

[0027] Optionally, it also includes:

[0028] The first quick-change plate is located on the top surface of the frame. The frame is rotated 90° by the third power structure through the third quick-change plate and the second quick-change plate. After the frame is rotated 90° by the rotating component, the first quick-change plate is suitable for quick connection and disassembly with the third quick-change plate.

[0029] Optionally, the rotating component includes:

[0030] A support member, adapted to hold the frame;

[0031] The second gear has its tooth surface connected to the carrier component;

[0032] The first gear meshes with the second gear;

[0033] A first power structure is connected to the first gear, and the first power structure is adapted to drive the first gear to rotate.

[0034] Optionally, the second power structure is a first motor and a first reducer connected together; the third power structure is a second motor and a second reducer connected together; a second main shaft is provided at the output end of the second reducer, and the second main shaft is connected to the bearing plate.

[0035] Optionally, the fourth power structure is a cylinder.

[0036] The technical solution of the present invention has the following advantages compared with the prior art:

[0037] 1. The molecular pump auxiliary testing device provided by the present invention includes: a frame, internally adapted to install a molecular pump; a second quick-change plate, disposed on the side of the frame; a lifting mechanism, having a fourth connecting plate, the lifting mechanism being adapted to drive the fourth connecting plate to move up and down; a fourth power structure, disposed on the fourth connecting plate, and having a second connecting plate on the fourth power structure, the fourth power structure being adapted to drive the second connecting plate to move linearly back and forth in a horizontal plane; a third power structure, disposed on the second connecting plate, and having a bearing plate on the third power structure, the third power structure being adapted to drive the bearing plate to rotate in a vertical plane; and a third quick-change plate. A quick-change plate, mounted on a support plate, is used to quickly connect and disconnect the third quick-change plate from the second quick-change plate. This application employs the above technical solution, where a lifting mechanism moves a fourth connecting plate up and down, aligning the second quick-change plate with the third. A fourth power structure connects the second quick-change plate to the third quick-change plate via the second connecting plate. After the lifting mechanism raises the frame housing the molecular pump, the third power structure rotates or flips the frame via the support plate, facilitating angle adjustment of the molecular pump, saving manpower, reducing labor intensity, automating the testing process, and improving the efficiency of temperature rise and fall testing.

[0038] 2. The lifting mechanism of the present invention includes: four linear guide rails arranged vertically and parallel to each other; a fifth connecting plate disposed at the top of the four linear guide rails; a second power structure disposed on the fifth connecting plate; two driving sprockets respectively located on both sides of the second power structure, and the two driving sprockets are respectively connected to the power outputs at both ends of the second power structure; two driven sprockets respectively connected to the two driving sprockets through two chains, and the two chains are arranged vertically; the two ends of the fourth connecting plate are respectively connected to the two chains; the present application adopts the above technical solution, specifically defining the structure of the lifting mechanism, and through the vertically arranged chain transmission, driving the fourth connecting plate to move up and down, facilitating the alignment of the second quick-change disc and the third quick-change disc, and facilitating the up and down movement of the frame on which the molecular pump is installed.

[0039] 3. The lifting mechanism of the present invention further includes: a first main shaft, which serves as the power output at both ends of the second power structure, and is connected to two driving sprockets at positions near both ends, and the two ends of the first main shaft are mounted on a fifth connecting plate via a first bearing seat; a driven shaft, which is connected to two driven sprockets at positions near both ends, and the two ends of the driven shaft are mounted on two linear guide rails via a third bearing seat; the present application adopts the above technical solution, which drives the two driving sprockets to rotate synchronously through the first main shaft and drives the two driven sprockets to rotate synchronously through the driven shaft, thereby ensuring the smoothness of the chain drive and thus ensuring the smoothness of the vertical movement of the frame on which the molecular pump is installed.

[0040] 4. The fourth power structure of the present invention is slidably connected to the linear guide rail via a slider; the present application adopts the above technical solution, and through the sliding connection, further ensures the stability of the frame for installing the molecular pump moving up and down.

[0041] 5. The molecular pump auxiliary testing device provided by the present invention further includes: two second support plates disposed on the fourth connecting plate and respectively located on both sides of the fourth power structure; two guide rods respectively mounted on the two second support plates through second bearing seats, the ends of the two guide rods being connected to the second connecting plate, the two guide rods being adapted for linear reciprocating movement, and the movement direction of the two guide rods being the same as the linear reciprocating movement direction of the second connecting plate; the present application adopts the above technical solution, and improves the guidance and stability of the second connecting plate driving the third power structure and the third quick-change disc in linear reciprocating movement by guiding with two guide rods.

[0042] 6. The molecular pump auxiliary testing device provided by the present invention further includes: a rotating component, wherein the frame is placed on the rotating component, and the rotating component is adapted to drive the frame to rotate in a horizontal plane; the present application adopts the above technical solution to facilitate the rotation of the frame on which the molecular pump is installed in a horizontal plane.

[0043] 7. The molecular pump auxiliary testing device provided by the present invention further includes: a first quick-change plate disposed on the top surface of the frame, and after the third power structure rotates the frame by 90° through the third quick-change plate and the second quick-change plate, and the rotating component drives the frame to rotate by 90°, the first quick-change plate is suitable for quick connection and disassembly with the third quick-change plate; the present application adopts the above technical solution, after the rotating component drives the frame to rotate by 90°, it is convenient for the first quick-change plate and the third quick-change plate to be quickly connected, and then after the lifting mechanism drives the frame on which the molecular pump is installed to rise, the third power structure drives the frame on which the molecular pump is installed to rotate or flip through the bearing plate, so as to facilitate other angle adjustments of the molecular pump, save manpower, reduce labor intensity, realize the automation of the testing process, and improve the efficiency of heating and cooling tests.

[0044] 8. The rotating assembly of the present invention includes: a support member adapted to place the frame; a second gear with its tooth surface connected to the support member; a first gear meshing with the second gear; and a first power structure connected to the first gear, wherein the first power structure is adapted to drive the first gear to rotate. The present application adopts the above technical solution to specifically define the structure of the rotating assembly. The first power structure drives the first gear to rotate, which in turn drives the support member to rotate through the second gear, so that the frame on which the molecular pump is installed also rotates accordingly.

[0045] 9. The second power structure of the present invention is a first motor and a first reducer connected together; the third power structure is a second motor and a second reducer connected together; a second main shaft is provided at the output end of the second reducer, and the second main shaft is connected to the bearing plate; the present application adopts the above technical solution, specifically defining the second power structure to facilitate the control and determination of the lifting position of the frame on which the molecular pump is installed; specifically defining the third power structure to facilitate the control and determination of the rotation angle or flipping of the frame on which the molecular pump is installed.

[0046] 10. The fourth power structure described in this invention is a cylinder; this application adopts the above technical solution to specifically define the fourth power structure, which facilitates the linear movement of the third quick-change disc, allowing it to move closer to or further away from the components that cooperate with the third quick-change disc, so as to enable quick connection and disassembly. Attached Figure Description

[0047] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0048] Figure 1 This is a partial cross-sectional view of the rotating component provided in an embodiment of the present invention.

[0049] Figure 2 This is a three-dimensional structural diagram of the molecular pump auxiliary testing device provided in an embodiment of the present invention.

[0050] Explanation of reference numerals in the attached figures:

[0051] 1. Rotating assembly; 2. Test frame; 3. Lifting and tilting mechanism; 4. Base; 5. First support plate; 6. First power structure; 7. First gear; 8. Second gear; 9. Bearing component; 10. First quick-change disc; 11. First connecting plate; 12. Test cover plate; 13. Frame; 14. Second quick-change disc; 15. Molecular pump; 16. First spindle; 17. First bearing seat; 18. Drive sprocket; 19. Second power structure; 20. Second spindle; 21. Third power structure; 22. Second connecting plate; 23. Fourth power structure; 24. Linear guide rail; 25. Slider; 26. Third connecting plate; 27. Guide rod; 28. Second bearing seat; 29. ​​Second support plate; 30. Driven sprocket; 31. Third bearing seat; 32. Fourth connecting plate; 33. Third quick-change disc; 34. Bearing plate; 35. Fifth connecting plate; 36. Driven shaft; 37. Sixth connecting plate. Detailed Implementation

[0052] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0053] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0054] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0055] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0056] like Figures 1 to 2 The molecular pump auxiliary testing device shown is adapted to adjust the angle of the molecular pump 15 for heating and cooling tests. The molecular pump auxiliary testing device includes: a rotating component 1 located at the bottom, a test frame 2 placed above the rotating component 1, and a lifting and flipping mechanism 3 for lifting and flipping the test frame 2. The molecular pump 15 is mounted on the test frame 2. Specifically, the molecular pump 15 is a magnetically levitated molecular pump.

[0057] like Figure 1As shown, the rotating assembly 1 is adapted to drive the test frame 2 to rotate in a horizontal plane. Specifically, the rotating assembly 1 includes: a support member 9 for placing the test frame 2, a second gear 8 connected to the support member 9, a first gear 7 meshing with the second gear 8, a first power structure 6 connected to the first gear 7, and a base 4 for mounting the second gear 8 and the first power structure 6. The upper tooth surface of the second gear 8 is connected to the support member 9, and the second gear 8 is rotatably connected to the base 4; the first power structure 6 drives the first gear 7 to rotate, and the first power structure 6 is mounted on the base 4 via a first support plate 5. Specifically, the first power structure 6 is a motor, more specifically, the motor is a servo motor. Furthermore, the second gear 8, the first gear 7, and the first power structure 6 are enclosed inside by a housing to prevent moving parts from colliding with the test personnel.

[0058] like Figure 2 As shown, the test rack 2 includes: a frame 13, a second quick-change disc 14 disposed on the side of the frame 13, and a first quick-change disc 10 disposed on the top surface of the frame 13. A test cover plate 12 is provided inside the frame 13, and the molecular pump 15 is mounted on the test cover plate 12 by screws; the first quick-change disc 10 is connected to the frame 13 via a first connecting plate 11; the second quick-change disc 14 is connected to the frame 13 via a sixth connecting plate 37.

[0059] The lifting and tilting mechanism 3 includes: a lifting mechanism, a fourth power structure 23 connected to the lifting mechanism, a third power structure 21 connected to the fourth power structure 23, and a third quick-change plate 33 connected to the third power structure 21. The lifting mechanism is provided with a fourth connecting plate 32, which drives the fourth connecting plate 32 to move up and down. The fourth power structure 23 is provided on the fourth connecting plate 32, and a second connecting plate 22 is provided on the fourth power structure 23. The fourth power structure 23 drives the second connecting plate 22 to move linearly back and forth in the horizontal plane. The third power structure 21 is provided on the second connecting plate 22, and a bearing plate 34 is provided on the third power structure 21. The third power structure 21 drives the bearing plate 34 to rotate in the vertical plane. The third quick-change plate 33 is provided on the bearing plate 34 and is adapted to be quickly connected and disassembled with the second quick-change plate 14. Specifically, the third power structure 21 is a second motor and a second reducer connected together, and the second motor is a servo motor. A second main shaft 20 is provided at the output end of the second reducer, and the second main shaft 20 is connected to the bearing plate 34. The fourth power structure 23 is a cylinder.

[0060] The lifting mechanism includes: four vertically parallel linear guide rails 24, a fifth connecting plate 35 disposed at the top of the four linear guide rails 24, a second power structure 19 disposed on the fifth connecting plate 35, two drive sprockets 18 respectively located on both sides of the second power structure 19, two driven sprockets 30 respectively connected to the two drive sprockets 18 by two chains, a first main shaft 16 connected to the two drive sprockets 18, and a driven shaft 36 connected to the two driven sprockets 30. Two drive sprockets 18 are respectively connected to the power outputs at both ends of the second power structure 19; the two chains are vertically arranged, and the two ends of the fourth connecting plate 32 are respectively connected to the two chains; the first main shaft 16 serves as the power output at both ends of the second power structure 19, and is connected to the two drive sprockets 18 near both ends, and the two ends of the first main shaft 16 are mounted on the fifth connecting plate 35 through the first bearing seat 17; the driven shaft 36 is connected to the two driven sprockets 30 near both ends, and the two ends of the driven shaft 36 are respectively mounted on the two linear guide rails 24 through the third bearing seat 31. Furthermore, the tail end of the fourth power structure 23 is provided with a third connecting plate 26, the two ends of which are slidably connected to two other linear guide rails 24 via sliders 25. Two second support plates 29 are provided on the fourth connecting plate 32, and the two second support plates 29 are located on opposite sides of the fourth power structure 23. Two guide rods 27 are respectively mounted on the two second support plates 29 via second bearing seats 28. The ends of the two guide rods 27 are connected to the second connecting plate 22. The two guide rods 27 are adapted for linear reciprocating movement, and the direction of movement of the two guide rods 27 is the same as the direction of linear reciprocating movement of the second connecting plate 22. Specifically, the second power structure 19 is a first motor and a first reducer connected together. The first motor is a servo motor.

[0061] The working process of the molecular pump auxiliary testing device described in this application is briefly described as follows:

[0062] S1. The tester first installs all the molecular pumps 15 to be tested on different test racks 2; then takes one of the test racks 2 with the molecular pump 15 installed and places it on the support 9; at this time, the default is the initial vertical state, and the molecular pump 15 begins the first angle of temperature rise and fall test.

[0063] S2. After the temperature rise and fall test at the first angle is completed, start the first motor. The first motor drives the first main shaft 16 to rotate, which in turn drives the drive sprocket 18 to rotate. The drive sprocket 18 drives the driven sprocket 30 to rotate through the chain, which in turn drives the fourth connecting plate 32 to move to the designated position, so that the third quick-change plate 33 is aligned with the second quick-change plate 14. Stop the first motor, start the cylinder, push the bearing plate 34, so that the third quick-change plate 33 is close to the second quick-change plate 14 and quickly connects. Stop the cylinder. The first motor is restarted, causing the fourth connecting plate 32 to rise, which in turn raises the frame 13 housing the molecular pump 15. Once it reaches a safe height away from the support member 9, the first motor is stopped, and the second motor is started, causing the second main shaft 20 to rotate, which in turn rotates the third quick-change plate 33 180°, thus flipping the frame 13 housing the molecular pump 15. The second motor is stopped, and the first motor is started, causing the frame 13 housing the molecular pump 15 to fall onto the support member 9. The first motor is stopped, and the third quick-change plate 33 is quickly disassembled from the second quick-change plate 14. The cylinder 38 is activated, moving the third quick-change plate 33 away from the second quick-change plate 14. The cylinder is then stopped. At this point, the molecular pump 15 is in an inverted state, and the second angle temperature rise and fall test of the molecular pump 15 begins.

[0064] S3. After the second angle temperature rise and fall test is completed, start the cylinder, connect the third quick-change plate 33 to the second quick-change plate 14, and stop the cylinder; start the first motor, and the frame 13 mounting the molecular pump 15 rises; stop the first motor, start the second motor, and rotate the frame 13 mounting the molecular pump 15 90°; stop the second motor, start the first motor, and lower the frame 13 mounting the molecular pump 15 onto the support 9; stop the first motor, disassemble the third quick-change plate 33 from the second quick-change plate 14, start the cylinder, and move the third quick-change plate 33 away from the second quick-change plate 14, then stop the cylinder. Start the first power structure 6, which drives the first gear 7 to rotate, the second gear 8 to rotate, and in turn drives the frame 13 mounting the molecular pump 15 on the support 9 to rotate 90° clockwise horizontally, so that the first quick-change plate 10 is aligned with the third quick-change plate 33, and stop the first power structure 6. At this time, the molecular pump 15 is in a horizontal 0° state, and the third angle temperature rise and fall test of the molecular pump 15 begins.

[0065] S4. After the third angle temperature rise and fall test is completed, start the cylinder, the third quick-change plate 33 moves closer to the first quick-change plate 10, and the third quick-change plate 33 connects with the first quick-change plate 10. Stop the cylinder. Start the first motor, and the frame 13 with the molecular pump 15 installed rises. Stop the first motor, start the second motor, and rotate the frame 13 with the molecular pump 15 installed 90° clockwise. Stop the second motor, start the first motor, and lower the frame 13 with the molecular pump 15 installed onto the support 9. Stop the first motor, disassemble the third quick-change plate 33 and the first quick-change plate 10, start the cylinder, and the third quick-change plate 33 moves away from the first quick-change plate 10. Stop the cylinder. At this time, the molecular pump 15 is in a horizontal 90° position, and the fourth angle temperature rise and fall test begins for the molecular pump 15.

[0066] S5. After the fourth angle temperature rise and fall test is completed, repeat step S4, except that the frame 13 on which the molecular pump 15 is installed is rotated 90° clockwise. Finally, the molecular pump 15 is in a horizontal 180° position, and the fifth angle temperature rise and fall test is carried out on the molecular pump 15.

[0067] S5. After the fifth angle temperature rise and fall test is completed, repeat step S4, except that the frame 13 on which the molecular pump 15 is installed is rotated 90° clockwise. Finally, the molecular pump 15 is in a horizontal 270° position, and the sixth angle temperature rise and fall test is carried out on the molecular pump 15.

[0068] S7. After the sixth angle temperature rise and fall test is completed, the tester replaces test rack 2 and conducts the next six-angle temperature rise and fall test of molecular pump 15.

[0069] As an alternative implementation, instead of installing all the molecular pumps 15 to be tested on different test racks 2, install one molecular pump 15 on the test rack 2, remove the molecular pump 15 after the test is completed, install another molecular pump 15 on the test rack 2, and test in sequence.

[0070] As an alternative implementation, the motor, the first motor, or the second motor can be replaced with a rotary motor.

[0071] As an alternative implementation, the cylinder is replaced with a reciprocating linear motor.

[0072] As an alternative implementation, the pneumatic cylinder is replaced with a hydraulic cylinder.

[0073] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A molecular pump-assisted testing device, characterized in that, include: The frame (13) is internally adapted to install a molecular pump (15); The second fast change disc (14) is located on the side of the frame (13); The lifting mechanism is provided with a fourth connecting plate (32), and the lifting mechanism is adapted to drive the fourth connecting plate (32) to move up and down; The fourth power structure (23) is provided on the fourth connecting plate (32), and the fourth power structure (23) is provided with a second connecting plate (22). The fourth power structure (23) is adapted to drive the second connecting plate (22) to move linearly back and forth in the horizontal plane. The third power structure (21) is provided on the second connecting plate (22), and a bearing plate (34) is provided on the third power structure (21). The third power structure (21) is adapted to drive the bearing plate (34) to rotate in the vertical plane. The third quick-change disc (33) is disposed on the support plate (34), and the third quick-change disc (33) is adapted to be quickly connected and disassembled with the second quick-change disc (14); The third power structure (21) drives the frame (13) on which the molecular pump (15) is installed to rotate or flip through the support plate (34) so ​​as to adjust the angle of the molecular pump (15); Also includes: Rotating assembly (1), the frame (13) is placed on the rotating assembly (1), and the rotating assembly (1) is adapted to drive the frame (13) to rotate in the horizontal plane; Also includes: The first quick-change plate (10) is located on the top surface of the frame (13). The frame (13) is rotated 90° by the third power structure (21) through the third quick-change plate (33) and the second quick-change plate (14). After the frame (13) is rotated 90° by the rotating component (1), the first quick-change plate (10) is suitable for quick connection and disassembly with the third quick-change plate (33).

2. The molecular pump auxiliary testing device according to claim 1, characterized in that, The lifting mechanism includes: Four linear guide rails (24) are set vertically and parallel; The fifth connecting plate (35) is located at the top of the four linear guide rails (24); The second power structure (19) is disposed on the fifth connecting plate (35); Two drive sprockets (18) are located on both sides of the second power structure (19), and the two drive sprockets (18) are respectively connected to the power outputs at both ends of the second power structure (19); Two driven sprockets (30) are connected to the two driving sprockets (18) respectively through two chains, and the two chains are set vertically. The two ends of the fourth connecting plate (32) are connected to the two chains respectively.

3. The molecular pump auxiliary testing device according to claim 2, characterized in that, The lifting mechanism also includes: The first main shaft (16) serves as the power output at both ends of the second power structure (19). It is connected to two drive sprockets (18) near both ends, and the two ends of the first main shaft (16) are mounted on the fifth connecting plate (35) through the first bearing seat (17). The shaft (36) is connected to two driven sprockets (30) near both ends, and the two ends of the shaft (36) are respectively mounted on two linear guides (24) through the third bearing seat (31).

4. The molecular pump auxiliary testing device according to claim 2, characterized in that, The fourth power structure (23) is slidably connected to the linear guide rail (24) via a slider (25).

5. The molecular pump auxiliary testing device according to any one of claims 1-4, characterized in that, Also includes: Two second support plates (29) are disposed on the fourth connecting plate (32) and are located on both sides of the fourth power structure (23); Two guide rods (27) are respectively installed on two second support plates (29) through second bearing seats (28). The ends of the two guide rods (27) are connected to the second connecting plate (22). The two guide rods (27) are suitable for linear reciprocating movement, and the direction of movement of the two guide rods (27) is the same as the direction of linear reciprocating movement of the second connecting plate (22).

6. The molecular pump auxiliary testing device according to claim 1, characterized in that, The rotating component (1) includes: The support (9) is adapted to place the frame (13); The second gear (8) has its tooth surface connected to the bearing member (9); The first gear (7) meshes with the second gear (8); The first power structure (6) is connected to the first gear (7), and the first power structure (6) is adapted to drive the first gear (7) to rotate.

7. The molecular pump auxiliary testing device according to any one of claims 2-4, characterized in that, The second power structure (19) is a first motor and a first reducer connected together; the third power structure (21) is a second motor and a second reducer connected together; a second main shaft (20) is provided at the output end of the second reducer, and the second main shaft (20) is connected to the bearing plate (34).

8. The molecular pump auxiliary testing device according to any one of claims 1-4, characterized in that, The fourth power structure (23) is a cylinder.

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