Needle grinding machine with high precision micro-adjustment

Abstract

The present invention relates to a needle grinding machine with high-precision micro-adjustment, comprising a mounting platform and a needle grinding system mounted on the mounting platform, the needle grinding system comprising a lifting mechanism, a reciprocating mechanism and a needle grinding bracket, the lifting mechanism comprising a translation part, a lifting part, a vertical guide part and a driving part, the translation part is a first wedge-shaped body that gradually decreases from one end to the other end, the translation part has a guide sliding slope, the slope of the guide sliding slope is less than 1, the lifting part can be slidably mounted on the guide sliding slope of the translation part and can be vertically lifted and lowered under the guidance of the vertical guide part, and the driving part drives the translation part to move to provide the lifting height of the lifting part. The present invention can precisely adjust the height of the lifting mechanism, realize the lifting height accurately to ±1um, thereby improving the precise control of the grinding of the probe by the reciprocating mechanism, intuitively understanding the grinding condition of the needle tip, and reducing the loss. At the same time, the needle grinding bracket facilitates the adjustment of probe cards of different sizes.

Description

Technical Field

[0001] The invention relates to the technical field of probe cards, and in particular to a needle grinding machine with high-precision micro-adjustment. Background Art

[0002] With the vigorous development of the domestic IC industry, the demand for peripheral consumable parts has also increased. The test probe card is an extremely important tool in the field of IC testing. In the chip manufacturing process, the final test stage will conduct different electrical function tests (wafer sorting) to ensure the functionality of the product. The probe card is an important interface that directly contacts the chip during chip testing.

[0003] During the production and processing of probe cards, the probe tips are sharp after initial processing, which can easily lead to problems such as false connection or poor contact when they are installed in contact with the semiconductor chip. Therefore, the probe end faces need to be ground to make the tips round or nearly round in order to increase the contact area between the tips and the semiconductor chip.

[0004] The commonly used probe grinding device in the prior art is a probe grinder. For example, patent number is 2021207900213, and the patent name is a patent for a probe card probe grinding device. The patent directly controls the lifting distance of the lifting mechanism through the motor, thereby controlling the rising distance of the grinding table. The lifting distance provided by this motor direct control of the lifting mechanism is usually a few microns. The conventional lifting accuracy is difficult to reach the 1 micron level. As a result, there will be problems such as insufficient grinding or excessive grinding, resulting in the final probe card product quality being unqualified. Summary of the invention

[0005] In view of this, it is necessary to provide a needle grinding machine with high-precision micro-adjustment, which improves the structure of the needle grinding machine itself and improves the adjustment accuracy, and the adjustment accuracy or resolution reaches ±1um.

[0006] A needle grinding machine with high-precision fine adjustment includes a mounting platform and a needle grinding system mounted on the mounting platform, the needle grinding system includes a lifting mechanism, a reciprocating mechanism and a needle grinding bracket, the needle grinding bracket is used to install a probe card and make the probe card position correspond to the reciprocating mechanism, the reciprocating mechanism is arranged on the lifting mechanism, the lifting mechanism includes a translation part, a lifting part, a vertical guide part and a driving part, the translation part is a first wedge-shaped body gradually lowered from one end to the other end, the translation part has a guide sliding slope, the slope of the guide sliding slope is less than 1, the lifting part can be slidably mounted on the guide sliding slope of the translation part and can be vertically lifted and lowered under the guidance of the vertical guide part, and the driving part drives the translation part to move to provide the lifting height of the lifting part.

[0007] Furthermore, the translation part includes two lifting and fixing blocks, the two lifting and fixing blocks are wedge-shaped blocks and are relatively parallelly arranged, the guide sliding slope is located on the slope of the wedge-shaped blocks, and the slope of the guide sliding slope is equal to or less than 1 / 4.

[0008] Furthermore, the driving part includes a first driving motor and a screw rod, the first driving motor is connected to the screw rod, the first driving motor drives the screw rod and drives the lifting and fixing block to move horizontally, so that the lifting height of the lifting part is accurate to ±1um.

[0009] Furthermore, a motor base plate is provided on both sides of the first driving motor, a motor bracket plate is movably passed through the screw rod, the motor bracket plate is integrally installed with the lifting and fixing block, the lifting and fixing block is arranged on the motor base plate, a sensor bracket is provided on one side of the motor base plate, a sensor scanning plate is provided on the sensor bracket, and the sensor scanning plate is used to sense the movement of the lifting and fixing block.

[0010] Furthermore, the lifting part includes a lifting body and a traction spring, the lifting body is a second wedge-shaped body, the lifting body includes two lifting blocks, the lifting blocks are wedge-shaped blocks, the bottom surface of the lifting blocks is an inclined surface and is provided with a lifting bottom plate, and the inclined surface of the lifting block is connected to the guide sliding inclined surface of the translation part through the lifting bottom plate.

[0011] Furthermore, the vertical guide portion includes a baffle and a roller bearing, the baffle is arranged on a side close to the lifting body, the roller bearing is clamped between the lifting body and the baffle, the baffle has a fixing pin, and the traction spring is arranged between the lifting block and the fixing pin.

[0012] Furthermore, the reciprocating mechanism includes a second drive motor, a slide base plate, a slide upper plate and an upper grinding disc. The slide base plate is fixedly mounted on the upper surface of the lifting body. The slide upper plate is provided with a crank slider mechanism. The crank of the crank slider mechanism is a cam. The cam is connected to the second drive motor. The adjustable range of the cam is ±5~±12.5mm.

[0013] Furthermore, a cross roller guide is provided on the slide bottom plate, a groove matching the cross roller guide is provided on the lower surface of the slide upper plate, the cross roller guide is installed in cooperation with the groove, the upper grinding disc is fixed on the upper surface of the slide upper plate, and the second drive motor drives the slide upper plate to drive the upper grinding disc to move along the cross roller guide.

[0014] Furthermore, the needle grinding system includes an operating table, which is provided with a working window at a position corresponding to the reciprocating mechanism, and a plurality of magnetic stripe grooves are provided around the working window, each of the magnetic stripe grooves is provided with a magnetic strip, and a plurality of needle grinding brackets are provided, each of which is provided with a magnet, and each needle grinding bracket corresponds to one of the magnetic stripe grooves.

[0015] Furthermore, a function control area is provided on one side of the needle grinding system, a display screen is provided on the other side of the needle grinding system, and a CCD camera group is provided on one side of the operating table. The CCD camera group is used to capture the grinding condition of the needle tip by the reciprocating mechanism and display it through the display screen.

[0016] In the above-mentioned needle grinding machine with high-precision micro-adjustment, the needle grinding system includes a lifting mechanism, a reciprocating mechanism and a needle grinding bracket, and the lifting mechanism includes a translation part, a lifting part, a vertical guide part and a driving part. By setting the translation part as a first wedge-shaped body, the rotation output of the driving part is converted into vertical lifting through the first wedge-shaped body to provide the lifting height required by the lifting part, and the lifting height is accurate to ±1um. At the same time, a magnet is attached to the needle grinding bracket, and the magnet and the external magnetic strip are magnetically attracted to each other, which is convenient and quick to install. The overall structure of the present invention is simple and compact, easy to implement, and easy to promote. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of a needle grinding machine with high-precision fine adjustment according to an embodiment of the present invention.

[0018] Figure 2 yes Figure 1 A partial enlarged view of .

[0019] Figure 3 It is a partial structural schematic diagram of the needle grinding system of the needle grinding machine with high-precision fine adjustment according to an embodiment of the present invention.

[0020] Figure 4 This is another perspective of the schematic diagram of the structure of the needle grinding system of the needle grinding machine with high-precision fine adjustment according to an embodiment of the present invention. DETAILED DESCRIPTION

[0021] The present invention will be described in detail below with reference to specific embodiments and accompanying drawings.

[0022] See also Figure 1 , Figure 2 , Figure 3 and Figure 4, shows a needle grinding machine with high-precision fine adjustment provided by an embodiment of the present invention, which is used for grinding a probe, including a mounting platform 200 and a needle grinding system 100 mounted on the mounting platform 200, the needle grinding system 100 includes a lifting mechanism 10, a reciprocating mechanism 20 and a needle grinding bracket 30, the needle grinding bracket 30 is used to install a probe card and make the position of the probe card correspond to the reciprocating mechanism 20, the reciprocating mechanism 20 is arranged on the lifting mechanism 10, and the lifting mechanism 10 includes a translation part 11, a lifting part 12, a vertical guide part 13 and a driving part 14, the translation part 11 is a first wedge-shaped body that gradually decreases from one end to the other end, the translation part 11 has a guide sliding slope 111, the slope of the guide sliding slope 111 is less than 1, the lifting part 12 can be slidably mounted on the guide sliding slope 111 of the translation part 11 and can be vertically lifted and lowered under the guidance of the vertical guide part 13, and the driving part 14 drives the translation part 11 to move to provide the lifting height of the lifting part 12.

[0023] Specifically, the translation part 11 includes two lifting and fixing blocks 112, the two lifting and fixing blocks 112 are wedge-shaped blocks and are relatively parallel. The upper surface of the lifting and fixing block 112 is an inclined surface and the guide sliding inclined surface 111 is arranged on the inclined surface. The slope of the guide sliding inclined surface 111 is equal to or less than 1 / 4. The driving part 14 is arranged between the two lifting and fixing blocks 112. The driving part 14 includes a first driving motor 141 and a screw rod 142. The first driving motor 141 is directly connected to the screw rod 142 to reduce the coupling. The device is connected to improve the adjustment accuracy. Motor base plates 15 are provided on both sides of the driving part 14. The lifting and fixing block 112 is movably connected to the motor base plate 15 through a movable part. The screw rod 142 is movably penetrated by a motor bracket plate 16. The two sides of the motor bracket plate 16 are respectively installed integrally with the lifting and fixing block 112. A sensor bracket 17 is provided on one side of the motor base plate 15. A sensor scanning piece 18 is installed on the sensor bracket 17. The sensor scanning piece 18 can sense the movement of the lifting and fixing block 112.

[0024] Specifically, the lifting part 12 includes a lifting body and a traction spring 121. The lifting body is a second wedge-shaped body. The lifting body includes two lifting blocks 122. The two lifting blocks 122 are connected as one. The use of two lifting blocks 122 can improve stability and can more horizontally and stably support the reciprocating mechanism 20. The lifting block 122 is a wedge-shaped block. The bottom surface of the lifting block 122 is an inclined surface and is provided with a lifting bottom plate 123. The two lifting blocks 122 are respectively installed on the guide sliding inclined surface 111 through the lifting bottom plate 123.

[0025] Specifically, the vertical guide portion 13 includes a baffle 131 and a roller bearing 132. The baffle 131 is vertically arranged and located on one side of the lifting portion 12. The roller bearing 132 is clamped between the lifting body and the baffle 131. The roller bearing 132 is used to assist the lifting block 122 in vertical lifting. When the lifting block 122 is lifted or lowered, the roller bearing 132 is vertically lifted or lowered along the baffle 131. Of course, in other embodiments, the roller bearing 132 can also be fixed in place and roll, and roll in contact with the baffle 131 and the lifting block 122. The baffle 131 has a fixing pin 133. The traction spring 121 is arranged between the lifting block 122 and the fixing pin 133. The traction spring 121 is used to increase the load fixed in the vertical direction. Specifically, one end of the traction spring 121 is connected to the fixing pin 133, and the other end is connected to the lifting block 122.

[0026] During operation, the first driving motor 141 drives the screw rod 142 to rotate and drives the lifting and fixing block 112 to move along the motor base plate 15. At the same time, the lifting and fixing block 112 drives the lifting block 122 to vertically lift and lower along the baffle 131 by relying on the roller bearing 132. The rotation output of the screw rod 142 is converted into vertical lifting according to a predetermined ratio through the lifting and fixing block 112. The lifting height of the lifting block 122 can be precisely adjusted to ±1um, thereby improving the precision of fine-tuning.

[0027] Furthermore, the reciprocating mechanism 20 includes a second drive motor 21, a slide base plate 22, a slide upper plate 23 and an upper grinding disc 24. The slide base plate 22 is fixedly arranged on the upper surface of the lifting body. The slide base plate 22 has an axial hole. The slide upper plate 23 is provided with a crank slider mechanism. The crank of the crank slider mechanism is a cam 231. The cam 231 passes through the axial hole and is connected to the second drive motor 21. The adjustable range of the cam 231 is ±5~±12.5mm. Two cross roller guides 25 are provided on the slide base plate 22. The lower surface of the slide upper plate 23 is provided with a groove matching the cross roller guide 25. The two cross roller guides 25 are installed in cooperation with the groove. Of course, in other implementation cases, the cross roller guides 25 may be provided with multiple and different setting methods, such as an upper and lower cross setting. The upper grinding disc 24 is fixed on the upper surface of the slide plate 23, and the second drive motor 21 drives the slide plate 23 and drives the upper grinding disc 24 to move along the cross roller guide 25. The cross roller guide 25 can ensure the running stability is less than 3um, reduce the unevenness of the needle tip surface, and the reciprocating mechanism 20 follows the lifting body to rise and fall vertically.

[0028] Furthermore, the grinding needle system 100 includes an operating table 40, and the operating table 40 has a working window 41 at a position corresponding to the upper grinding disk 24, and the working window 41 is larger than the upper surface of the upper grinding disk 24. The operating table 40 is provided with a plurality of magnetic stripe slots 42 around the working window 41, and each of the magnetic stripe slots 42 can be used to place a magnetic strip. There are a plurality of grinding needle brackets 30, and the number of the grinding needle brackets 30 can be selected according to actual needs. Each grinding needle bracket 30 is attached with a magnet, and each of the grinding needle brackets 30 corresponds to a magnetic stripe slot 42. The grinding needle bracket 30 is used to install the probe card on the working window 41 and make the probe end face face the upper grinding disk 24. The magnet and the magnetic strip attract each other, which facilitates the installation and adjustment of the grinding needle bracket 30 and is suitable for probe cards of different sizes.

[0029] Furthermore, a function control area 50 is provided on one side of the needle grinding system 100, and a plurality of different function keys are provided in the function control area 50, through which the lifting and lowering speed and the grinding disc speed of the reciprocating mechanism 20 can be automatically adjusted. A display screen 60 is provided on the other side of the needle grinding system 100, and a CCD camera group 70 is provided on one side of the operating table 40. The CCD camera group 70 is used to capture the grinding condition of the needle tip by the reciprocating mechanism 20 and transmit it to the display screen 60 for display through the function control area 50. Universal wheels are provided at the four corners of the bottom surface of the mounting platform 200 to facilitate the movement of the needle grinder. The needle grinding system 100 is mounted on the mounting platform 200 through fixings.

[0030] In the above-mentioned needle grinding machine with high-precision fine adjustment, the lifting mechanism 10 is set as a wedge-shaped translation part 11 and a wedge-shaped lifting part 12. The first driving motor 141 drives the screw rod 142 to rotate and is converted into vertical lifting of the lifting part 12 through the translation part 11. The translation part 11 is converted according to the wedge ratio to provide the lifting height of the lifting part 12 with more precision, and the lifting height is accurate to ±1um, which improves the control of the needle tip surface and reduces the loss. At the same time, the needle grinding bracket 30 adopts a magnetic suction installation method, which is convenient for installation and adjustment. The structure of the present invention is simple and precise, easy to implement, low cost, and easy to promote.

[0031] It should be noted that the present invention is not limited to the above-mentioned embodiments. Based on the creative spirit of the present invention, those skilled in the art may also make other changes. These changes made based on the creative spirit of the present invention should be included in the scope of protection required by the present invention.

Claims

1. A needle grinding machine with high-precision micro-adjustment, comprising a mounting platform and a needle grinding system mounted on the mounting platform, characterized in that: The grinding needle system includes a lifting mechanism, a reciprocating mechanism and a grinding needle bracket, the grinding needle bracket is used to install the probe card and make the probe card position correspond to the reciprocating mechanism, the reciprocating mechanism is arranged on the lifting mechanism, the lifting mechanism includes a translation part, a lifting part, a vertical guide part and a driving part, the translation part is a first wedge-shaped body that gradually decreases from one end to the other end, the translation part has a guide sliding slope, the slope of the guide sliding slope is less than 1, the lifting part can be slidably mounted on the guide sliding slope of the translation part and can be vertically lifted and lowered under the guidance of the vertical guide part, and the driving part drives the translation part to move to lift The lifting height of the lifting part is provided, and the lifting part includes a lifting body and a traction spring. The lifting body is a second wedge-shaped body, and the lifting body includes two lifting blocks. The lifting blocks are wedge-shaped blocks. The bottom surface of the lifting block is an inclined surface and is provided with a lifting bottom plate. The inclined surface of the lifting block is connected with the guide sliding inclined surface of the translation part through the lifting bottom plate. The vertical guide part includes a baffle and a roller bearing. The baffle is arranged on a side close to the lifting body, and the roller bearing is clamped between the lifting body and the baffle. The baffle has a fixing pin, and the traction spring is arranged between the lifting block and the fixing pin.

2. The needle grinding machine with high precision micro-adjustment as claimed in claim 1, characterized in that: The translation part comprises two lifting and fixing blocks, which are wedge-shaped blocks and are arranged relatively parallel. The guide sliding inclined surface is located on the inclined surface of the wedge-shaped blocks, and the slope of the guide sliding inclined surface is equal to or less than 1 / 4.

3. The high-precision fine-adjustment needle grinding machine according to claim 2, characterized in that: The driving part includes a first driving motor and a screw rod, wherein the first driving motor is connected to the screw rod, and the first driving motor drives the screw rod and drives the lifting and fixing block to move horizontally, so that the lifting height of the lifting part is accurate to ±1um.

4. The needle grinding machine with high precision micro-adjustment as claimed in claim 3, characterized in that: A motor base plate is provided on both sides of the first driving motor, a motor bracket plate is movably passed through the screw rod, the motor bracket plate is integrally installed with the lifting and fixing block, the lifting and fixing block is arranged on the motor base plate, a sensor bracket is provided on one side of the motor base plate, a sensor scanning plate is provided on the sensor bracket, and the sensor scanning plate is used to sense the movement of the lifting and fixing block.

5. The needle grinding machine with high precision micro-adjustment as claimed in claim 1, characterized in that: The reciprocating mechanism includes a second drive motor, a slide base plate, a slide upper plate and an upper grinding disc. The slide base plate is fixedly mounted to the upper surface of the lifting body. The slide upper plate is provided with a crank slider mechanism. The crank of the crank slider mechanism is a cam. The cam is connected to the second drive motor. The adjustable range of the cam is ±5~±12.5mm.

6. The needle grinding machine with high precision micro-adjustment as claimed in claim 5, characterized in that: A cross roller guide is provided on the slide bottom plate, and a groove matching the cross roller guide is provided on the lower surface of the slide upper plate. The cross roller guide is installed in cooperation with the groove, and the upper grinding disc is fixed on the upper surface of the slide upper plate. The second driving motor drives the slide upper plate to drive the upper grinding disc to move along the cross roller guide.

7. The needle grinding machine with high precision micro-adjustment as claimed in claim 1, characterized in that: The grinding needle system includes an operating table, which is provided with a working window at a position corresponding to the reciprocating mechanism, and a plurality of magnetic stripe slots are provided around the working window, each of which is provided with a magnetic stripe, and a plurality of grinding needle brackets are provided, each of which is provided with a magnet, and each grinding needle bracket corresponds to one of the magnetic stripe slots.

8. The needle grinding machine with high precision micro-adjustment as claimed in claim 7, characterized in that: A function control area is provided on one side of the needle grinding system, a display screen is provided on the other side of the needle grinding system, and a CCD camera group is provided on one side of the operating table. The CCD camera group is used to capture the grinding condition of the needle tip surface by the reciprocating mechanism and display it through the display screen.

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