Six-inch silicon wafer pneumatic boat inverter

Abstract

The present invention discloses a six-inch silicon wafer pneumatic boat flipper, comprising a frame, a front casing, a rear casing, a clamping mechanism, a lifting mechanism, a film rewinder seat, an operating table, and a control button, wherein the front casing and the rear casing are both wrapped around the outer periphery of the frame and fixedly connected thereto, the operating table comprises an operating table seat and an operating table top, the operating table seat is a rectangular flat plate and its top surface is fixedly connected to the operating table top, one end of the operating table top is slidably connected to the film rewinder seat, the clamping mechanism comprises cylinder one, cylinder two, a group of toothed film supports, a group of toothed film supports, a film rewinder clamp, a cylinder frame, and a sliding rod group, the lifting mechanism comprises a lifting cylinder, an arm group, a guide rod, a guide sleeve, a connecting plate, and a film rewinder with film teeth, the arm group, the guide rod, the guide sleeve, the connecting plate, and the film rewinder with film teeth are all located in the front casing, and the lifting cylinder is located in the rear casing. The present invention can automatically switch silicon wafers between a wafer basket and a quartz wafer boat, thereby reducing the labor intensity of operating employees and improving production efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device chip manufacturing, in particular to a six-inch silicon wafer pneumatic boat inverter. Background Art

[0002] In the diffusion process of the semiconductor component production industry, Taiflon material wafer cassettes are used for daily storage of silicon wafers, and quartz wafer boats are used during the diffusion process. Therefore, repeated inversion of silicon wafers into the boat is a necessary task for daily operators. Silicon wafers will be repeatedly inverted between the boat and the cassette twice before and after the diffusion process. A large amount of manual operation will greatly affect production efficiency, and bending down to invert the boat for a long time will also cause certain harm to the operator's body.

[0003] Therefore, there is an urgent need for a device that can replace the manual operation of existing equipment operators, simulate the manual operation of operators, reduce the labor intensity of operators, better ensure the consistency of operation, reduce the impact of human factors on product quality, and avoid long-term mechanical work fatigue of operators, thereby protecting the physical and mental health of operators. Summary of the Invention

[0004] In order to overcome the deficiencies of the above-mentioned prior art, the present invention provides a six-inch silicon wafer pneumatic boat invertor that eliminates the operator's manual wafer inverting action. Each time a whole box of silicon wafers is placed on the boat invertor, the silicon wafers can be automatically poured from the wafer box to the quartz wafer boat, reducing the labor intensity of the operating staff, improving production efficiency, and ensuring the health of the operators.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is:

[0006] A six-inch silicon wafer pneumatic boat reversing device includes a frame, a front housing, a rear housing, a clamping mechanism, a lifting mechanism, a rewinder seat, an operating table, and a control button. The front housing and the rear housing are both wrapped around the outer periphery of the frame and fixedly connected thereto, and the height of the rear housing is higher than that of the front housing. The top surface of the front housing is fixedly connected to the operating table. The operating table includes an operating table seat and an operating table top. The operating table seat is a rectangular flat plate and its top surface is fixedly connected to the operating table top. One end of the operating table top is slidably connected to the rewinder seat. The clamping mechanism includes a cylinder 1, a cylinder 2, a group of toothed sheet supports, a group of toothed sheet supports, and a rewinder clamp. , cylinder frame, slide rod group, said cylinder 1, cylinder 2, cylinder frame, slide rod group are all located in the rear casing, said slide rod group includes two parallel slide rods fixedly connected to the frame, each of the two ends of the slide rod passes through and is slidably connected to a cylinder frame, every two cylinder frames of the same height form a group, said cylinder 1 and cylinder 2 are respectively fixedly connected to a group of cylinder frames at the head and tail ends, said toothed plate support group includes two toothed plate supports 1, each side of said toothed plate support 1 is fixedly connected to the inner side of its corresponding rewinder fixture, the end of said rewinder fixture is fixedly connected to the corresponding cylinder frame, said toothed plate support 2 The group includes two toothed sheet supports 2, and the side surfaces of each toothed sheet support 2 are fixedly connected to the inner side of the corresponding film rewinder clamp. The toothed sheet support 1 is located directly above the toothed sheet support 2. The upper part of the front panel of the rear housing is provided with parallel square holes. The film rewinder clamps extend from the square holes in groups of two, and expose the toothed sheet support 1 and the toothed sheet support 2 outside the front panel. The lifting mechanism includes a lifting cylinder, an arm group, a guide rod, a guide sleeve, a connecting plate, and a film rewinder with sheet teeth. The arm group, the guide rod, the guide sleeve, the connecting plate, and the film rewinder with sheet teeth are all located in the front housing, the lifting cylinder is located in the rear housing, and the arm group The invention comprises two supporting arms, the bottom ends of the two supporting arms are respectively fixedly connected to the two sides of the connecting plate, the top end of each supporting arm passes through the operating platform and the operating table in sequence, and is fixedly connected to a film rewinder in the form of film teeth, the guide rod is vertically located at the lower part of the frame and both ends thereof are fixedly connected to the frame, the lifting cylinder is vertically fixedly connected to the frame, and its piston rod end is fixedly connected to the connecting plate, the guide sleeve is fixedly connected to the connecting plate and is located on one side of the piston rod end of the lifting cylinder, the guide rod passes through the guide sleeve and is slidably connected to the same, and the control buttons comprise a start button, a status knob, a pause button, and a function button installed on the front casing.

[0007] Preferably, the toothed plate support 1 and the toothed plate support 2 have the same outer dimensions, the toothed plate support 1 is provided with twenty-five teeth, and the toothed plate support 2 is provided with fifty teeth, and the tooth grooves on the toothed plate support 1 and the toothed plate support 2 corresponding to each other in the vertical direction are staggered.

[0008] Preferably, a groove is provided on the top of the film rewinder seat, and two oblong recesses are provided at the diagonal corners of the bottom of the groove. A pressure block is embedded in the oblong recess, and the pressure block is fixedly connected to a vertical pressure rod. The pressure rod passes through the bottom of the film rewinder seat and protrudes a certain distance. A long strip protrusion is provided at each end of the bottom of the film rewinder seat, and two slide grooves are provided on the operating table. The long strip protrusion is immersed in the slide groove and is slidably connected to it.

[0009] Preferably, two slide grooves 2 are provided on the inner side of the slide groove 1 on the operating table, and the lower part of the pressure rod is immersed in the slide groove 2 and is slidably connected thereto. A circular hole is provided at the end of each of the two slide grooves 2, and the spacing between the two circular holes is the same as the spacing between the two pressure rods. When the film rewinder seat slides to this position, the pressure rod is just immersed in the circular hole, which is used to position the film rewinder seat.

[0010] Preferably, the position and number of the tooth grooves of the toothed film support are the same as the position and number of the tooth grooves of the film rewinder.

[0011] Preferably, the spacing between the two film rewinder teeth is exactly the same as the spacing on the inner side of the bottom of the six-inch film basket, and the number and size of the tooth grooves of the film rewinder teeth are the same as those in the six-inch film basket.

[0012] The beneficial effects of the present invention are:

[0013] The six-inch silicon wafer pneumatic boat inverter of the present invention is easy and reliable to operate, greatly reducing the impact of human factors on product quality, while also avoiding the operator's fatigue from long-term mechanical work, thereby ensuring the operator's physical and mental health. The present invention has accurate positioning, achieves high silicon wafer clamping accuracy, and will not damage the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural schematic diagram of the present invention;

[0015] Figure 2 Schematic diagram of the internal structure of the present invention;

[0016] Figure 3 A top view of the present invention;

[0017] Figure 4 It is a structural diagram of the film rewinder seat;

[0018] Figure 5 Schematic diagram of an embodiment;

[0019] Figure 6 This is a pneumatic control principle diagram of the present invention;

[0020] The reference numerals shown in the figure are: 1-frame, 2-front housing, 3-rear housing, 4-rewinder seat, 5-operating platform seat, 6-operating platform, 7-cylinder 1, 8-cylinder 2, 9-rewinder clamp, 10-cylinder frame, 11-sliding rod, 12-toothed sheet support 1, 13-toothed sheet support 2, 14-front panel, 15-square hole, 16-lifting cylinder, 17-support arm, 18-guide rod , 19-guide sleeve, 20-connecting plate, 21-film rewinder with film teeth, 22-start button, 23-status knob, 24-pause button, 25-function button, 26-groove, 27-long circular depression, 28-pressing block, 29-pressing rod, 30-long strip protrusion, 31-slide 1, 32-slide 2, 33-round hole, 34-six-inch quartz boat, 35-six-inch film basket, 36-silicon wafer DETAILED DESCRIPTION

[0021] The following is a detailed description of this design scheme with reference to the accompanying drawings.

[0022] like Figures 1-6As shown, a six-inch silicon wafer pneumatic boat reversing device includes a frame 1, a front casing 2, a rear casing 3, a clamping mechanism, a lifting mechanism, a film reversing device seat 4, an operating table, and control buttons, wherein the front casing 2 and the rear casing 3 are both wrapped around the periphery of the frame 1 and fixedly connected thereto, and the height of the rear casing 3 is higher than that of the front casing 2, the top surface of the front casing 2 is fixedly connected to the operating table, the operating table includes an operating table seat 5 and an operating table surface 6, the operating table seat 5 is a rectangular flat plate and the top surface of which is fixedly connected to the operating table surface 6, one end of the operating table surface 6 is slidably connected to the film reversing device seat 4, the clamping mechanism includes a cylinder 1 7, a cylinder 2 8, a group of toothed sheet supports, a group of toothed sheet supports, a film reversing device clamp 9, a cylinder frame 10, a slide rod group, a cylinder 1 7, Cylinder 2 8, cylinder frame 10, and slide rod group are all located in the rear casing 3. The slide rod group includes two parallel slide rods 11 fixedly connected to the frame 1. Each end of each slide rod 11 passes through and is slidably connected to a cylinder frame 10. Every two cylinder frames 10 of the same height form a group. The head and tail ends of cylinder 1 7 and cylinder 2 8 are respectively fixedly connected to a group of cylinder frames 10. One group of toothed sheet supports includes two toothed sheet supports 1 12. The side surfaces of each toothed sheet support 1 12 are fixedly connected to the inner side of the corresponding film rewinder fixture 9. The end of the film rewinder fixture 9 is fixedly connected to the corresponding cylinder frame 10. The second group of toothed sheet supports includes two toothed sheet supports 2 13. The side surfaces of each toothed sheet support 2 13 are fixedly connected to the inner side of the corresponding film rewinder fixture 9. On the inner side of the corresponding film rewinder fixture 9, the toothed sheet support 12 is located directly above the toothed sheet support 2 13. The upper part of the front panel 14 of the rear housing 3 is provided with parallel square holes 15. The film rewinder fixtures 9 extend from the square holes 15 in groups of two, and the toothed sheet support 1 12 and the toothed sheet support 2 13 are exposed outside the front panel 14. The lifting mechanism includes a lifting cylinder 16, an arm group, a guide rod 18, a guide sleeve 19, a connecting plate 20, and a film rewinder sheet tooth 21. The arm group, the guide rod 18, the guide sleeve 19, the connecting plate 20, and the film rewinder sheet tooth 21 are all located in the front housing 2. The lifting cylinder 16 is located in the rear housing 3. The arm group includes two arms 17. The bottom ends of the two arms 17 are fixedly connected to the connecting plate 20. On both sides, the top of each support arm 17 passes through the operating table 5 and the operating table 6 in sequence, and is fixedly connected to a film rewinder in the form of a tooth 21. The guide rod 18 is vertically located at the lower part of the frame 1 and both ends are fixedly connected to the frame 1. The lifting cylinder 16 is vertically fixedly connected to the frame 1, and its piston rod end is fixedly connected to the connecting plate 20. The guide sleeve 19 is fixedly connected to the connecting plate 20 and is located on one side of the piston rod end of the lifting cylinder 16. The guide rod 18 passes through the guide sleeve 19 and is slidably connected to it. The control buttons include a start button 22, a status knob 23, a pause button 24, and a function button 25 installed on the front casing 2. The function button 25 is used to control the action switching of the lifting cylinder 16, cylinder 1 7, and cylinder 2 8.

[0023] Among them, the toothed plate support 1 12 and the toothed plate support 2 13 have the same external dimensions. The toothed plate support 1 12 is provided with twenty-five teeth, and the toothed plate support 2 13 is provided with fifty teeth. The tooth grooves on the toothed plate support 1 12 and the toothed plate support 2 13 corresponding to each other in the vertical direction are staggered.

[0024] Among them, a groove 26 is provided on the top of the rewinder seat 4, and two oblong recesses 27 are provided at the diagonal angles of the bottom of the groove 26. A pressure block 28 is embedded in the oblong recess 27, and the pressure block 28 is fixedly connected to a vertical pressure rod 29. The pressure rod 29 passes through the bottom of the rewinder seat 4 and protrudes a certain distance. A long strip protrusion 30 is provided at each end of the bottom of the rewinder seat 4, and two slide grooves 31 are provided on the operating table 6. The long strip protrusion 30 is immersed in the slide groove 31 and is slidably connected thereto.

[0025] Among them, two chute twos 32 are provided on the operating table 6 on the inner side of the chute one 31, and the lower part of the pressure rod 29 is immersed in the chute two 32 and is slidably connected thereto. A circular hole 33 is provided at the end of each of the two chute twos 32, and the spacing between the two circular holes 33 is the same as the spacing between the two pressure rods 29. When the rewinder seat 4 slides to this position, the pressure rod 29 is just immersed in the circular hole 33, which is used to position the rewinder seat 4.

[0026] The position and number of the tooth grooves of the toothed film support 12 are the same as the position and number of the tooth grooves of the film teeth 21 of the film rewinder.

[0027] The spacing between the two film rewinder teeth 21 is exactly the same as the spacing inside the bottom of the six-inch film basket 35 , and the number and size of the tooth grooves of the film rewinder teeth 21 are the same as those in the six-inch film basket 35 .

[0028] Among them, this equipment uses compressed air as the power source with a pressure of 0.5MPa. The main air circuit includes the lifting cylinder 16, cylinder 1 7, and cylinder 2 8. When in use, the overall action is completed according to the order of opening the air exhaust.

[0029] The pneumatic boat inverter for six-inch silicon wafers can complete two functions: inverting wafers from the six-inch quartz boat 34 to the six-inch wafer basket 35 and inverting wafers from the six-inch wafer basket 35 to the six-inch quartz boat 34 .

[0030] Example 1

[0031] When rewinding the wafers from the six-inch basket 35 to the six-inch quartz boat 34, first place the six-inch basket 35 filled with silicon wafers 36 on the rewinder operating table 6 at the position of the rewinder teeth 21, push the function button 25 upwards to select the wafer frame to the wafer boat, press the start button 22, and the pair of rewinder teeth 21 will rise and lift the silicon wafers 36 in the six-inch basket 35 and rise together. When the rewinder teeth 21 reach the position, the upper pair of rewinder clamps 9 drive the toothed plate support 12 to close to the middle, holding the basket of twenty-five silicon wafers 36 on the rewinder teeth 21, and the rewinder teeth 21 drop back to the original position. At this time, a new basket of silicon wafers is placed again on the rewinder operating table 6 at the position of the rewinder teeth 21, and the start button 22 is pressed again. The rewinder teeth 21 will rise and lift the silicon wafers 36 in the six-inch basket 35 and rise together. The toothed sheet support 21 is opened to both sides, and the rewinder is lowered back to its original position, and the six-inch sheet basket 35 is taken away. The six-inch quartz boat 34 is placed on the rewinder seat 4 and slides to the right along the slide groove 1 31 to the position of the circular hole 33 on the rewinder operating table 6. After positioning and fixing it with the pressure rod 29, the start button 22 is pressed, and a pair of rewinder teeth 21 will rise and lift the rewinder seat 4 to rise. When it rises to the designated position, it lifts fifty silicon wafers, and the toothed sheet support 2 13 is separated to both sides. The rewinder is lowered back to its original position by the toothed sheet 21, and the rewinder seat 4 and the fifty silicon wafers 36 are lowered to their original positions, completing this rewinding operation.

[0032] Example 2

[0033] After the wafers 36 are unloaded from the six-inch quartz boat 34 to the six-inch wafer basket 35, the six-inch quartz boat 34 filled with silicon wafers 36 is first placed on the wafer rewinder seat 4 and slid to the right along the slide 1 31 to the position of the circular hole 33 on the wafer rewinder operating table 6. After the pressure rod 29 is positioned and fixed, the function button 25 is bent downward to select the wafer boat to the wafer frame. The start button 22 is pressed and the pair of wafer rewinder teeth 21 will rise and support the wafer rewinder seat 4 and the fifty silicon wafers 36 together. When the wafer rewinder teeth 21 reach the position, the lower pair of wafer rewinder clamps 9 drive the toothed wafer support 2 13 to close in the middle, supporting the fifty silicon wafers 36 on the six-inch quartz boat 34. The wafer rewinder teeth 21 support the wafer rewinder seat 4 to descend to its original position. At this time, the empty six-inch wafer basket 35 is placed on the wafer rewinder operating table at the position of the wafer rewinder teeth 21. The start button 22 is pressed again. The upper pair of rewinder clamps 9 drives the toothed sheet support 1 13 to separate to both sides, and the upper pair of rewinder clamps 9 drives the toothed sheet support 1 12 to merge in the middle to hold the other 25 silicon wafers 36. The rewinder sheet teeth 21 lift the 25 silicon wafers 36 back to the initial position and enter the six-inch sheet basket 35. The full six-inch sheet basket 35 is taken out, and another empty six-inch sheet basket 35 is placed on the rewinder operating table at the position of the rewinder sheet teeth 21. The start button 22 is pressed again, and the rewinder sheet teeth 21 will rise to the designated position to hold up the other 25 silicon wafers 36. The upper pair of rewinder clamps 9 drives the toothed sheet support 1 12 to separate to both sides, and the rewinder sheet teeth 21 lifts the 25 silicon wafers 36 back to the initial position and enters the six-inch sheet basket 35. The full six-inch sheet basket 35 is taken out, and the rewinding operation is completed. During the whole process, the state knob 23 will rotate to display the current position each time.

Claims

1. Six-inch silicon wafer pneumatic boat inverter, characterized by: The machine comprises a frame, a front housing, a rear housing, a clamping mechanism, a lifting mechanism, a film rewinder seat, an operating table, and a control button. The front housing and the rear housing are both wrapped around the periphery of the frame and fixedly connected thereto, and the height of the rear housing is higher than that of the front housing. The top surface of the front housing is fixedly connected to the operating table. The operating table comprises an operating table seat and an operating table top. The operating table seat is a rectangular flat plate and its top surface is fixedly connected to the operating table top. One end of the operating table top is slidably connected to the film rewinder seat. The clamping mechanism comprises a first cylinder, a second cylinder, a group of toothed sheet supports, a second group of toothed sheet supports, a film rewinder clamp, a cylinder frame, and a slide rod group. , the cylinder one, cylinder two, cylinder frame, and slide rod group are all located in the rear casing, the slide rod group includes two parallel slide rods fixedly connected to the frame, each end of each slide rod passes through and is slidably connected to a cylinder frame, and every two cylinder frames of the same height form a group, the head and tail ends of cylinder one and cylinder two are respectively fixedly connected to a group of cylinder frames, the toothed plate support group includes two toothed plate supports one, the side surface of each toothed plate support one is fixedly connected to the inner side of the corresponding rewinder fixture, the end of the rewinder fixture is fixedly connected to the corresponding cylinder frame, the toothed plate support group two includes two toothed plate supports one The toothed piece holder 2, each side of the toothed piece holder 2 is fixedly connected to the inner side of the corresponding film rewinder fixture, the toothed piece holder 1 is located directly above the toothed piece holder 2, and the upper part of the front panel of the rear housing is provided with parallel square holes, and the film rewinder fixtures extend from the square holes in groups of two, and expose the toothed piece holder 1 and the toothed piece holder 2 outside the front panel, the lifting mechanism includes a lifting cylinder, an arm group, a guide rod, a guide sleeve, a connecting plate, and a film rewinder with teeth, the arm group, the guide rod, the guide sleeve, the connecting plate, and the film rewinder with teeth are all located in the front housing, the lifting cylinder is located in the rear housing, and the arm group includes two The bottom ends of the two arms are fixedly connected to the two sides of the connecting plate respectively. The top of each arm passes through the operating platform and the operating table in turn, and is fixedly connected to a film rewinder in the form of film teeth. The guide rod is vertically located at the lower part of the frame and both ends are fixedly connected to the frame. The lifting cylinder is vertically fixedly connected to the frame, and its piston rod end is fixedly connected to the connecting plate. The guide sleeve is fixedly connected to the connecting plate and is located on one side of the piston rod end of the lifting cylinder. The guide rod passes through the guide sleeve and is slidably connected to it. The control buttons include a start button, a status knob, a pause button, and a function button installed on the front casing.

2. The six-inch silicon wafer pneumatic boat inverting device according to claim 1, characterized in that: The toothed plate support 1 and the toothed plate support 2 have the same external dimensions. The toothed plate support 1 is provided with 25 teeth, and the toothed plate support 2 is provided with 50 teeth. The tooth grooves on the toothed plate support 1 and the toothed plate support 2 corresponding to each other in the vertical direction are staggered.

3. The six-inch silicon wafer pneumatic boat inverting device according to claim 1, characterized in that: A groove is provided on the top of the film rewinder seat, and two oblong depressions are provided at the diagonal corners of the bottom of the groove. A pressure block is embedded in the oblong depression, and a vertical pressure rod is fixedly connected to the pressure block. The pressure rod passes through the bottom of the film rewinder seat and protrudes a certain distance. A long strip protrusion is provided at each end of the bottom of the film rewinder seat, and two slide grooves are provided on the operating table. The long strip protrusion is immersed in the slide groove and is slidably connected to it.

4. The six-inch silicon wafer pneumatic boat inverting device according to claim 3, characterized in that: Two slide grooves 2 are provided on the inner side of the slide groove 1 on the operating table, and the lower part of the pressure rod is immersed in the slide groove 2 and is slidably connected thereto. A circular hole is provided at the end of each of the two slide grooves 2, and the spacing between the two circular holes is the same as the spacing between the two pressure rods. When the film rewinder seat slides to this position, the pressure rod is just immersed in the circular hole, which is used to position the film rewinder seat.

5. The six-inch silicon wafer pneumatic boat inverting device according to claim 1, characterized in that: The position and number of the tooth grooves of the toothed sheet support 1 are the same as the position and number of the tooth grooves of the sheet teeth of the film rewinder.

6. The six-inch silicon wafer pneumatic boat inverting device according to claim 1, characterized in that: The spacing between the two film rewinder teeth is exactly the same as the spacing on the inner side of the bottom of the six-inch film basket, and the number and size of the tooth grooves of the film rewinder teeth are the same as those in the six-inch film basket.

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