Ion funnel with adjustable radio frequency phase of electrode structure and voltage loading method

Abstract

The present invention provides an ion funnel with adjustable radio frequency phase of an electrode structure and a voltage loading method, which relates to the technical field of radio frequency voltage loading. The ion funnel includes a first type of group of electrodes and a second type of group of electrodes stacked together. The first type of group of electrodes is formed by stacking multiple groups of annular electrodes with equal inner diameters. The second type of group of electrodes is formed by stacking multiple groups of annular electrodes with linearly decreasing inner diameters. The annular electrode is composed of four electrode pieces with the same inner diameter. Among the four electrode pieces forming a non-closed annular electrode, the same amplitude and different phase radio frequency voltages are loaded between adjacent electrode pieces. Through this electrode structure and adopting a cross-type radio frequency voltage loading method, this device can obtain better ion focusing and high transmission efficiency during the ion transmission process. At the same time, it can also improve the transmission of low mass-to-charge ratio ions and effectively improve the problem of low transmission efficiency of low mass-to-charge ratio ions in the ion funnel.

Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency voltage loading, and more particularly, to an ion funnel with adjustable radio frequency phase of electrode structure and a voltage loading method. Background Art

[0002] In a mass spectrometer, the ability to effectively focus and transmit ions generated in an atmospheric pressure ionization source basically determines the sensitivity that can be achieved by the mass spectrometer. Since the invention of electrospray ionization (ESI), mass spectrometry has played an increasingly important role in protein analysis in the field of life sciences. Although ESI has a high ionization efficiency under atmospheric pressure, only a small fraction of the generated ions can enter the mass spectrometer and be finally detected by the detector. One of the main reasons for this phenomenon is that a small-diameter heated capillary or orifice must be used as an interface in the first differential pumping region to maintain the vacuum pressure required for proper MS operation. Due to the supersonic free jet expansion at the exit of the heated capillary or orifice, most of the ions transmitted through the capillary or orifice will be lost and unable to enter the next stage of the mass spectrometer without using effective ion optics.

[0003] An ion funnel consists of a series of annular electrodes with linearly decreasing inner diameters, and radio frequency voltages with equal amplitudes and opposite phases and a DC gradient voltage are applied to adjacent electrodes, so that ions can be effectively restricted, focused and transmitted through the ion funnel, achieving very high ion transmission efficiency and ion focusing effect. However, this also results in a strong potential barrier effect on the ions at the exit end of the ion funnel, making the ion funnel have a low transmission efficiency for low mass-to-charge ratio ions. Summary of the Invention

[0004] The problem solved by the present invention is how to solve the problem of low transmission efficiency of the ion funnel for low mass-to-charge ratio ions.

[0005] To solve the above problem, the present invention provides an ion funnel with adjustable radio frequency phase of electrode structure, which includes a first type of group of electrodes and a second type of group of electrodes stacked together. The first type of group of electrodes is stacked by multiple groups of annular electrodes with equal inner diameters, and the second type of group of electrodes is stacked by multiple groups of annular electrodes with linearly decreasing inner diameters. The annular electrode is composed of four electrode pieces with the same inner diameter;

[0006] Among the four electrode pieces forming a non-closed annular electrode, radio frequency voltages with the same amplitude and different phases are loaded between adjacent electrode pieces; radio frequency voltages with the same amplitude and different phases are loaded between adjacent annular electrodes, and a DC gradient voltage is loaded to drive ions to move towards the ion funnel outlet direction;

[0007] Ions with different mass-to-charge ratios are transmitted in the ion funnel by adjusting the frequency, amplitude of the radio frequency voltage, and the DC gradient voltage.

[0008] Furthermore, through this electrode structure, the device adopts a cross-type radio frequency voltage loading method to obtain better ion focusing and high transmission efficiency during the ion transmission process. At the same time, it can also improve the transmission of low mass-to-charge ratio ions and effectively solve the problem of low transmission efficiency of low mass-to-charge ratio ions in the ion funnel.

[0009] Furthermore, the annular electrode is an arc electrode, which is composed of four arc electrode sheets with the same inner diameter.

[0010] Furthermore, the annular electrode is a semi-cylindrical electrode, which is composed of four semi-cylindrical electrode sheets with the same inner diameter placed opposite to each other at the same radial position. The distance from the radius of each semi-cylindrical electrode sheet to the center point of the semi-cylindrical electrode is equal.

[0011] Furthermore, the annular electrode is a hyperbolic electrode, which is composed of four hyperbolic electrode sheets placed opposite to each other at the same radial position. The distance from the hyperbolic electrode sheet to the center point of the hyperbolic electrode is equal to the distance from the vertex of the hyperbolic electrode sheet to the edge line.

[0012] A voltage loading method for an ion funnel with adjustable radio frequency phase of an electrode structure includes the steps:

[0013] S1: Divide the annular electrode of the ion funnel into four segments, and apply radio frequency voltages on the segmented ion funnel electrode structure according to the first preset loading process, the second preset loading process, the third preset loading process, and the fourth preset loading process respectively; among them, the radio frequency amplitude and frequency are the same;

[0014] S2: Apply radio frequency voltages with opposite phases to adjacent electrodes in the same axial direction and radio frequency voltages with the same phase to adjacent electrodes in the same radial direction through the first preset loading process;

[0015] S3: Apply radio frequency voltages with opposite phases to adjacent electrodes in the same axial direction and also apply radio frequency voltages with opposite phases to adjacent electrodes in the same radial direction through the second preset loading process;

[0016] S4: Apply radio frequency voltages with opposite phases to adjacent electrodes in the same axial direction through the third preset loading process, and the phase difference of the radio frequency voltages between adjacent electrodes in the same radial direction is

[0017] S5: The phase difference of the radio frequency voltages between adjacent electrodes in the same axial direction through the fourth preset loading process is The phase difference of the radio frequency voltages between adjacent electrodes in the same radial direction is

[0018] S6: Apply the same DC voltage to the electrodes at the same axial position, and apply a linearly decreasing DC voltage through a resistor in the radial direction where the inner diameter of the electrode decreases, to form the DC gradient voltage of the ion funnel.

[0019] In the above method, the first preset loading process adopts a method of applying RF voltage with axial crossing and radial sameness. Under this method, the annular electrodes in the ion funnel can be divided into four segments. By adjusting the various electrical parameters of the ion funnel, the ion funnel can be made to have the ability to selectively transmit ions. The second preset loading process adopts a method of applying RF voltage with both axial and radial crossing. By this voltage application method, by adjusting the various electrical parameters of the ion funnel, the transmission efficiency of low mass-to-charge ratio ions can be improved without changing the transmission range of the mass-to-charge ratio of the ions transmitted by the ion funnel. The third preset loading process adopts a method of applying RF voltage with axial crossing and adjustable radial phase. By adjusting the phase of the RF wave applied to the radial electrodes, focusing of the ion beam can be achieved, and this RF voltage application method can improve the transmission efficiency of the ion funnel for low mass-to-charge ratio ions. The fourth preset loading process adopts a method of applying RF voltage with both axial and radial phase adjustable. By adjusting the phase of the RF wave, the potential barrier at the end of the ion funnel is reduced, and when transmitting low mass-to-charge ratio ions, higher ion transmission efficiency and better focusing effect can be obtained.

[0020] Further, the electrode structure of the ion funnel includes arc electrodes, semi-cylindrical electrodes and hyperbolic electrodes.

[0021] Further, the first preset loading process is as follows:

[0022] In the arc electrode structure, apply RF voltages with the same phase to the first arc electrode piece and the third arc electrode piece, and apply RF voltages with the opposite phase to the second arc electrode piece and the fourth arc electrode piece compared with the first arc electrode piece and the third arc electrode piece;

[0023] In the radial direction, apply RF voltages with the same phase to the adjacent electrodes in the same radial direction as the first arc electrode piece and the third arc electrode piece, and also apply RF voltages with the same phase to the adjacent electrodes in the same radial direction as the second arc electrode piece and the fourth arc electrode piece, and at the same time apply the same DC voltage to the arc electrodes at the same axial position, and apply a linearly decreasing DC voltage through a resistor in the radial direction where the inner diameter of the electrode decreases, to form the DC gradient voltage of the ion funnel;

[0024] In the semi-cylindrical electrode structure, apply RF voltages with the same phase to the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece, and apply RF voltages with the opposite phase to the second semi-cylindrical electrode piece and the fourth semi-cylindrical electrode piece compared with the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece;

[0025] In the radial direction, the same-phase RF voltage is applied to the adjacent electrodes in the same radial direction as the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and the same-phase RF voltage is also applied to the adjacent electrodes in the same radial direction as the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet. At the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0026] In the hyperbolic electrode structure, the same-phase RF voltage is applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and the RF voltage with the opposite phase to that of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet is applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet.

[0027] In the radial direction, the same-phase RF voltage is applied to the adjacent electrodes in the same radial direction as the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and the same-phase RF voltage is also applied to the adjacent electrodes in the same radial direction as the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet. At the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0028] Furthermore, the second preset loading process is as follows:

[0029] In the arc electrode structure, the same-phase RF voltage is applied to the first arc electrode sheet and the third arc electrode sheet, and the RF voltage with the opposite phase to that of the first arc electrode sheet and the third arc electrode sheet is applied to the second arc electrode sheet and the fourth arc electrode sheet.

[0030] In the radial direction, the opposite-phase RF voltage is applied to the adjacent electrodes in the same radial direction as the first arc electrode sheet and the third arc electrode sheet, and the opposite-phase RF voltage is also applied to the adjacent electrodes in the same radial direction as the second arc electrode sheet and the fourth arc electrode sheet. At the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0031] In the semi-cylindrical electrode structure, the same-phase RF voltage is applied to the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and the RF voltage with the opposite phase to that of the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet is applied to the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet.

[0032] In the radial direction, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet. At the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0033] In the hyperbolic electrode structure, RF voltages with the same phase are applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and RF voltages with phases opposite to those of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet are applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet.

[0034] In the radial direction, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet. At the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0035] Further, the third preset loading process is as follows:

[0036] In the arc electrode structure, RF voltages with the same phase are applied to the first arc electrode sheet and the third arc electrode sheet, and RF voltages with phases opposite to those of the first arc electrode sheet and the third arc electrode sheet are applied to the second arc electrode sheet and the fourth arc electrode sheet.

[0037] In the radial direction, the phase difference of the RF voltages of every two adjacent arc electrodes is At the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0038] In the semi-cylindrical electrode structure, RF voltages with the same phase are applied to the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and RF voltages with phases opposite to those of the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet are applied to the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet.

[0039] In the radial direction, the phase difference of the RF voltages of every two adjacent semi-cylindrical electrodes is At the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0040] In the hyperbolic electrode structure, the same-phase radio frequency voltages are applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and the radio frequency voltages with phases opposite to those of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet are applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet;

[0041] In the radial direction, the phases of the radio frequency voltages of every two adjacent hyperbolic electrodes differ by And at the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0042] Furthermore, the fourth preset loading process is as follows:

[0043] In the arc electrode structure, the radio frequency voltages with phases differing by are applied to the four arc electrode sheets. In the radial direction, the phases of the radio frequency voltages of every two adjacent arc electrodes also differ by And at the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel;

[0044] In the semi-cylindrical electrode structure, the radio frequency voltages with phases differing by are applied to the four semi-cylindrical electrode sheets. In the radial direction, the phases of the radio frequency voltages of every two adjacent semi-cylindrical electrodes also differ by And at the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel;

[0045] In the hyperbolic electrode structure, the radio frequency voltages with phases differing by are applied to the four hyperbolic electrode sheets. In the radial direction, the phases of the radio frequency voltages of every two adjacent hyperbolic electrodes also differ by And at the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0046] The present invention adopting the above technical solutions has the following beneficial effects:

[0047] The present invention obtains better ion focusing and high transmission efficiency during the process of transmitting ions through a novel electrode structure and by adopting a cross-type radio frequency voltage loading method. At the same time, it can also improve the transmission of low mass-to-charge ratio ions, effectively improving the problem of low transmission efficiency of low mass-to-charge ratio ions in the ion funnel. Based on the problem of low transmission efficiency of low mass-to-charge ratio ions in the ion funnel, the annular electrode of the traditional ion funnel is divided into four segments, and voltages are applied to the changed ion funnel electrode structure according to the first preset loading process, the second preset loading process, the third preset loading process, and the fourth preset loading process to form a DC gradient voltage of the ion funnel, improving the transmission efficiency of the ion funnel for low mass-to-charge ratio ions. By dividing one circular ring electrode of the traditional ion funnel into four electrodes in the same radial direction and applying radio frequency voltage and DC voltage under each electrode, better ion transmission and focusing effects can be achieved. Description of the Drawings

[0048] Figure 1 It is a flowchart of the voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention;

[0049] Figure 2 It is a segmented schematic diagram of the electrode structure of the ion funnel in the voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention when the electrode structure of the ion funnel is an arc electrode;

[0050] Figure 3 It is a segmented schematic diagram of the electrode structure of the ion funnel in the voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention when the electrode structure of the ion funnel is a semi-cylindrical electrode;

[0051] Figure 4 It is a segmented schematic diagram of the electrode structure of the ion funnel in the voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention when the electrode structure of the ion funnel is a hyperbolic electrode;

[0052] Figure 5 It is a schematic diagram in the radial direction at the first preset loading process stage in the voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention;

[0053] Figure 6 It is a schematic diagram in the radial direction at the second preset loading process stage in the voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention;

[0054] Figure 7 It is a schematic diagram in the radial direction at the third preset loading process and the fourth preset loading process stages in the voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention;

[0055] Figure 8Schematic diagram of applying DC voltage in the radial direction in the voltage loading method of the ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention;

[0056] Figure 9 Schematic diagram of phase delay during phase modulation of radio frequency waves on the ion funnel electrodes in the voltage loading method of the ion funnel with adjustable radio frequency phase of the electrode structure provided in the first embodiment of the present invention;

[0057] Figure 10 Cross-sectional schematic diagram of the electrode of the ion funnel with adjustable radio frequency phase of the electrode structure provided in the second embodiment of the present invention being an arc electrode structure;

[0058] Figure 11 Cross-sectional schematic diagram of the electrode of the ion funnel with adjustable radio frequency phase of the electrode structure provided in the second embodiment of the present invention being a semi-cylindrical electrode structure;

[0059] Figure 12 Cross-sectional schematic diagram of the electrode of the ion funnel with adjustable radio frequency phase of the electrode structure provided in the second embodiment of the present invention being a hyperboloid electrode structure;

[0060] Figure 13 Schematic diagram of the structure of the ion funnel with adjustable radio frequency phase of the electrode structure provided in the second embodiment of the present invention. Detailed implementation manners

[0061] To make the above objects, features, and advantages of the present invention more obvious and understandable, the following detailed description of the specific embodiments of the present invention is provided in conjunction with the accompanying drawings.

[0062] The following are specific embodiments of the present invention and in conjunction with the accompanying drawings, the technical solutions of the present invention are further described, but the present invention is not limited to these embodiments.

[0063] Embodiment 1

[0064] This embodiment provides a voltage loading method for an ion funnel with adjustable radio frequency phase of the electrode structure. As Figures 1 to 8 shown, this method includes the steps:

[0065] S1: Divide the annular electrodes of the ion funnel into four segments, and apply radio frequency voltages to the segmented ion funnel electrode structures respectively according to the first preset loading process, the second preset loading process, the third preset loading process, and the fourth preset loading process; wherein, the radio frequency amplitude and frequency are the same;

[0066] S2: Apply radio frequency voltages with opposite phases to adjacent electrodes in the same axial direction and radio frequency voltages with the same phase to adjacent electrodes in the same radial direction through the first preset loading process;

[0067] S3: Apply RF voltages with opposite phases to adjacent electrodes in the same axial direction through a second preset loading process, and also apply RF voltages with opposite phases to adjacent electrodes in the same radial direction.

[0068] S4: Apply RF voltages with opposite phases to adjacent electrodes in the same axial direction through a third preset loading process, and the phase difference of the RF voltages between adjacent electrodes in the same radial direction is

[0069] S5: The phase difference of the RF voltages between adjacent electrodes in the same axial direction through a fourth preset loading process is The phase difference of the RF voltages between adjacent electrodes in the same radial direction is

[0070] S6: Apply the same DC voltage to the electrodes at the same axial position, and apply a linearly decreasing DC voltage through a resistor in the radial direction where the inner diameter of the electrode decreases to form the DC gradient voltage of the ion funnel.

[0071] Specifically, the first preset loading process adopts a method of applying RF voltages with axial crossing and radial sameness. In this method, the annular electrodes in the ion funnel can be divided into four sections. By adjusting the electrical parameters of the ion funnel, the ion funnel can have the ability to selectively transmit ions.

[0072] Specifically, the second preset loading process adopts a method of applying RF voltages with both axial and radial crossing. Through this voltage application method, by adjusting the electrical parameters of the ion funnel, the transmission efficiency of low mass-to-charge ratio ions can be improved without changing the transmission range of the mass-to-charge ratio of the ions transmitted by the ion funnel.

[0073] Specifically, the third preset loading process adopts a method of applying RF voltages with axial crossing and radially adjustable phases. By adjusting the phase of the RF wave applied to the radial electrodes, the focusing of the ion beam can be achieved, and this RF voltage application method can improve the transmission efficiency of the ion funnel for low mass-to-charge ratio ions.

[0074] Specifically, the fourth preset loading process adopts a method of applying RF voltages with both axial and radial phases adjustable. By adjusting the phase of the RF wave, the potential barrier at the end of the ion funnel is reduced, and higher ion transmission efficiency and better focusing effect can be obtained when transmitting low mass-to-charge ratio ions.

[0075] Among them, the electrode structure of the ion funnel includes arc electrodes, semi-cylindrical electrodes and hyperbolic electrodes.

[0076] Among them, the first preset loading process is:

[0077] In the arc electrode structure, the same-phase RF voltage is applied to the first arc electrode piece and the third arc electrode piece, and the RF voltage with the opposite phase to that of the first arc electrode piece and the third arc electrode piece is applied to the second arc electrode piece and the fourth arc electrode piece;

[0078] In the radial direction, the same-phase RF voltage is applied to the adjacent electrodes in the same radial direction as the first arc electrode piece and the third arc electrode piece, and the same-phase RF voltage is also applied to the adjacent electrodes in the same radial direction as the second arc electrode piece and the fourth arc electrode piece. At the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel;

[0079] Refer to Figure 2 、 Figure 5 and Figure 8 , in the ion funnel voltage application method, Figure 2 the same-phase RF voltage is applied to the 1st and 3rd arc electrodes in Figure 2 and Figure 5 . As shown in Figure 8 , in the radial direction, the same-phase RF voltage is applied to the adjacent electrodes in the same radial direction as the 1st and 3rd arc electrodes, and the same-phase RF voltage is also applied to the adjacent electrodes in the same radial direction as the 2nd and 4th arc electrodes. As shown in Figure 8 , at the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 60V, the frequency to 0.8MHz, and the DC gradient voltage to 15V / cm, the functions of ion funnel transmission and ion focusing are realized.

[0080] In the semi-cylindrical electrode structure, the same-phase RF voltage is applied to the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece, and the RF voltage with the opposite phase to that of the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece is applied to the second semi-cylindrical electrode piece and the fourth semi-cylindrical electrode piece;

[0081] In the radial direction, the same-phase RF voltage is applied to the adjacent electrodes in the same radial direction as the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece, and the same-phase RF voltage is also applied to the adjacent electrodes in the same radial direction as the second semi-cylindrical electrode piece and the fourth semi-cylindrical electrode piece. At the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel;

[0082] Refer to Figure 3 、Figure 5 and Figure 8 in the method of applying voltage to the ion funnel, Figure 3 the 1st and 3rd semi-cylindrical electrodes in Figure 3 and Figure 5 are applied with radio frequency voltages of the same phase, and the 2nd and 4th semi-cylindrical electrodes are applied with radio frequency voltages of the opposite phase to those of the 1st and 3rd. In the radial direction, as shown in Figure 8 , the adjacent electrodes in the same radial direction as the 1st and 3rd semi-cylindrical electrodes are applied with radio frequency voltages of the same phase, and the adjacent electrodes in the same radial direction as the 2nd and 4th semi-cylindrical electrodes are also applied with radio frequency voltages of the same phase. As shown in Figure 8 , the semi-cylindrical electrodes at the same axial position are simultaneously applied with the same DC voltage, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel. By the above ion funnel voltage loading method and adjusting the radio frequency voltage amplitude to 60V, the frequency to 0.8MHz, and the DC gradient voltage to 15V / cm, the functions of ion funnel transmission and ion focusing are achieved.

[0083] In the hyperbolic electrode structure, the first hyperbolic electrode sheet and the third hyperbolic electrode sheet are applied with radio frequency voltages of the same phase, and the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet are applied with radio frequency voltages of the opposite phase to those of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet;

[0084] In the radial direction, the adjacent electrodes in the same radial direction as the first hyperbolic electrode sheet and the third hyperbolic electrode sheet are applied with radio frequency voltages of the same phase, and the adjacent electrodes in the same radial direction as the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet are also applied with radio frequency voltages of the same phase, and the hyperbolic electrodes at the same axial position are simultaneously applied with the same DC voltage, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along which the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0085] Referring to Figure 4 、 Figure 5 and Figure 8 in the method of applying voltage to the ion funnel, Figure 4 the 1st and 3rd hyperbolic electrodes in Figure 2 and Figure 5 are applied with radio frequency voltages of the same phase, and the 2nd and 4th hyperbolic electrodes are applied with radio frequency voltages of the opposite phase to those of the 1st and 3rd. In the radial direction, as shown in Figure 2 and Figure 5 , the adjacent electrodes in the same radial direction as the 1st and 3rd hyperbolic electrodes are applied with radio frequency voltages of the same phase, and the adjacent electrodes in the same radial direction as the 2nd and 4th hyperbolic electrodes are also applied with radio frequency voltages of the same phase. Figure 8As shown, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction as the inner diameter of the electrode decreases, forming a DC gradient voltage for the ion funnel. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 60 V, the frequency to 0.8 MHz, and the DC gradient voltage to 15 V / cm, the functions of ion funnel transmission and ion focusing are achieved.

[0086] Among them, the second preset loading process is as follows:

[0087] In the arc electrode structure, RF voltages with the same phase are applied to the first arc electrode piece and the third arc electrode piece, and RF voltages with the opposite phase to those of the first arc electrode piece and the third arc electrode piece are applied to the second arc electrode piece and the fourth arc electrode piece;

[0088] In the radial direction, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the first arc electrode piece and the third arc electrode piece, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the second arc electrode piece and the fourth arc electrode piece. At the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along the decreasing inner diameter of the electrode, forming a DC gradient voltage for the ion funnel;

[0089] Refer to Figure 2 and Figure 6 , in the ion funnel voltage application method, Figure 2 RF voltages with the same phase are applied to the 1st and 3rd arc electrodes in Figure 2 and Figure 6 RF voltages with the opposite phase to those of the 1st and 3rd arc electrodes are applied to the 2nd and 4th arc electrodes. In the radial direction, as shown in Figure 2 and Figure 6 , RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the 1st and 3rd arc electrodes, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the 2nd and 4th arc electrodes, adopting the same DC voltage loading method as above. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 100 V, the frequency to 0.8 MHz, and the DC gradient voltage to 15 V / cm, the functions of ion funnel transmission and ion focusing are achieved.

[0090] In the semi-cylindrical electrode structure, RF voltages with the same phase are applied to the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece, and RF voltages with the opposite phase to those of the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece are applied to the second semi-cylindrical electrode piece and the fourth semi-cylindrical electrode piece;

[0091] In the radial direction, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet. At the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0092] See Figure 3 and Figure 6 , in the method of applying voltage to the ion funnel, Figure 3 RF voltages with the same phase are applied to the 1st and 3rd semi-cylindrical electrodes, and RF voltages with the opposite phase to the 1st and 3rd are applied to the 2nd and 4th semi-cylindrical electrodes. In the radial direction, as Figure 3 and Figure 6 shown, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the 1st and 3rd semi-cylindrical electrodes, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the 2nd and 4th semi-cylindrical electrodes, adopting the same DC voltage loading method as above. By the above ion funnel voltage loading method and adjusting the amplitude of the RF voltage to 100V, the frequency to 0.8MHz, and the DC gradient voltage to 15V / cm, the functions of ion funnel transmission and ion focusing are achieved.

[0093] In the hyperbolic electrode structure, RF voltages with the same phase are applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and RF voltages with the opposite phase to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet are applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet;

[0094] In the radial direction, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet. At the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel.

[0095] See Figure 4 and Figure 6 , in the method of applying voltage to the ion funnel, Figure 4 RF voltages with the same phase are applied to the 1st and 3rd hyperbolic electrodes, and RF voltages with the opposite phase to the 1st and 3rd are applied to the 2nd and 4th hyperbolic electrodes. In the radial direction, as Figure 4 and Figure 6As shown, opposite-phase RF voltages are applied to adjacent electrodes in the same radial direction as the 1 and 3 hyperboloid electrodes, and opposite-phase RF voltages are also applied to the electrodes in the same radial direction as the 2 and 4 hyperboloid electrodes. The same DC voltage loading method as described above is used. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 100 V, the frequency to 0.8 MHz, and the DC gradient voltage to 15 V / cm, the functions of ion funnel transmission and ion focusing are achieved.

[0096] Among them, the third preset loading process is as follows:

[0097] In the arc electrode structure, the same-phase RF voltages are applied to the first arc electrode piece and the third arc electrode piece, and the RF voltages opposite to those of the first arc electrode piece and the third arc electrode piece are applied to the second arc electrode piece and the fourth arc electrode piece;

[0098] In the radial direction, the RF voltage phases of every two adjacent arc electrodes differ by And at the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along the decreasing inner diameter of the electrode to form the DC gradient voltage of the ion funnel;

[0099] Refer to Figure 2 and Figure 7 , in the ion funnel voltage application method, Figure 2 the same-phase RF voltages are applied to the 1 and 3 arc electrodes in Figure 2 and Figure 7 , and the RF voltages opposite to those of the 1 and 3 arc electrodes are applied to the 2 and 4 arc electrodes. In the radial direction, as shown in

[0100] , the RF voltage phases of every two adjacent arc electrodes differ by

[0101] The same DC voltage loading method as described above is used. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 80 V, the frequency to 0.8 MHz, and the DC gradient voltage to 15 V / cm, the functions of ion funnel transmission and ion focusing are achieved. In the semi-cylindrical electrode structure, the same-phase RF voltages are applied to the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece, and the RF voltages opposite to those of the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece are applied to the second semi-cylindrical electrode piece and the fourth semi-cylindrical electrode piece;

[0102] Refer toFigure 3 and Figure 7 , in the ion funnel voltage application method, Figure 3 the same-phase RF voltage is applied to the 1st and 3rd semi-cylindrical electrodes in Figure 3 and Figure 7 ; the RF voltage with a phase opposite to that of the 1st and 3rd semi-cylindrical electrodes is applied to the 2nd and 4th semi-cylindrical electrodes. In the radial direction, as shown in and

[0103] the phase difference between the RF voltages of every two adjacent semi-cylindrical electrodes is

[0104] The same DC voltage loading method as described above is adopted. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 80V, the frequency to 0.8MHz, and the DC gradient voltage to 15V / cm, the functions of ion funnel transmission and ion focusing are achieved. In the hyperbolic electrode structure, the same-phase RF voltage is applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and the RF voltage with a phase opposite to that of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet is applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet;

[0105] Refer to Figure 4 and Figure 7 , in the ion funnel voltage application method, Figure 4 the same-phase RF voltage is applied to the 1st and 3rd hyperbolic electrodes in Figure 4 and Figure 7 ; the RF voltage with a phase opposite to that of the 1st and 3rd hyperbolic electrodes is applied to the 2nd and 4th hyperbolic electrodes. In the radial direction, as shown in

[0106] The phase difference between the RF voltages of every two adjacent hyperbolic electrodes is Π / 2, and the same DC voltage loading method as in Embodiment 9 is adopted. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 80V, the frequency to 0.8MHz, and the DC gradient voltage to 15V / cm, the functions of ion funnel transmission and ion focusing are achieved.

[0107] In the arc electrode structure, the RF voltages with a phase difference of are applied to the four arc electrode sheets. In the radial direction, the phase difference between the RF voltages of every two adjacent arc electrodes is also The same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along the decreasing inner diameter of the electrode to form the DC gradient voltage of the ion funnel;

[0108] Refer to Figure 2 and Figure 7 , in the method of applying voltage to the ion funnel, Figure 2 apply RF voltages with a phase difference of to the four arc electrode plates in Figure 2 and Figure 7 as shown in The RF voltage phases of every adjacent arc electrode also differ by

[0109] Adopt the same DC voltage loading method as above. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 80V, the frequency to 0.8MHz, and the DC gradient voltage to 15V / cm, the functions of ion funnel transmission and ion focusing are achieved. In the semi-cylindrical electrode structure, apply RF voltages with a phase difference of

[0110] to the four semi-cylindrical electrode plates, and in the radial direction, the RF voltage phases of every adjacent semi-cylindrical electrode also differ by Figure 3 Refer to Figure 7 and, in the method of applying voltage to the ion funnel, Figure 3 apply RF voltages with a phase difference of to the four semi-cylindrical electrode plates in Figure 3 and Figure 7 as shown in The RF voltage phases of every adjacent hyperbolic electrode also differ by

[0111] Adopt the same DC voltage loading method as above. By the above ion funnel voltage loading method and adjusting the RF voltage amplitude to 80V, the frequency to 0.8MHz, and the DC gradient voltage to 15V / cm, the functions of ion funnel transmission and ion focusing are achieved. In the hyperbolic electrode structure, apply RF voltages with a phase difference of

[0112] to the four hyperbolic electrode plates, and in the radial direction, the RF voltage phases of every adjacent hyperbolic electrode also differ by Figure 4 Refer to Figure 7 and, in the method of applying voltage to the ion funnel, Figure 4 apply RF voltages with a phase difference of The RF voltage, in the radial direction, such as Figure 2 and Figure 7 shown, the RF voltage phases of each adjacent hyperbolic electrode also differ by And the same DC voltage loading method as in Embodiment 9 is adopted. Through the above ion funnel voltage loading method and by adjusting the RF voltage amplitude to 80 V, the frequency to 0.8 MHz, and the DC gradient voltage to 15 V / cm, the functions of ion funnel transmission and ion focusing are achieved.

[0113] Refer to Figure 9 , which is a schematic diagram of phase delay during RF wave phase modulation on the ion funnel electrodes, and the waveform is not limited.

[0114] To improve the transmission efficiency of the ion funnel for low mass-to-charge ratio ions, the key lies in reducing the influence of the potential barrier at the end of the ion funnel outlet. Preferably, the transmission efficiency for low mass-to-charge ratio ions can be improved by increasing the inner diameter of the electrode at the end of the ion funnel outlet, adjusting the electrode thickness, the electrode spacing, and reducing the RF voltage amplitude.

[0115] Based on the problem that the ion funnel has low transmission efficiency for low mass-to-charge ratio ions, this method divides the annular electrodes of the traditional ion funnel into four sections, and applies voltages on the changed ion funnel electrode structure according to the first preset loading process, the second preset loading process, the third preset loading process, and the fourth preset loading process to form the DC gradient voltage of the ion funnel, thereby improving the transmission efficiency of the ion funnel for low mass-to-charge ratio ions.

[0116] Embodiment 2

[0117] This embodiment provides an ion funnel with adjustable RF phase of the electrode structure, such as Figure 10 , Figure 11 , Figure 12 and Figure 13 shown, which includes a first type of group electrode and a second type of group electrode stacked together. The first type of group electrode is stacked by multiple groups of annular electrodes with equal inner diameters, and the second type of group electrode is stacked by multiple groups of annular electrodes with linearly decreasing inner diameters. The annular electrode is composed of four electrode pieces with the same inner diameter;

[0118] Among the four electrode pieces forming a non-closed annular electrode, the adjacent electrode pieces are loaded with RF voltages of the same amplitude and different phases; the adjacent annular electrodes are loaded with RF voltages of the same amplitude and different phases, and a DC gradient voltage is loaded to drive the ions to move towards the ion funnel outlet direction;

[0119] By adjusting the frequency, amplitude of the RF voltage, and the DC gradient voltage, ions with different mass-to-charge ratios are transmitted in the ion funnel.

[0120] Among them, the annular electrode is an arc electrode, which is composed of four arc electrode pieces with the same inner diameter.

[0121] Specifically, a non-closed annular electrode is formed by four arc electrode pieces with equal inner diameters, as Figure 10 and Figure 13 shown. There are a total of multiple groups of annular electrodes, which are divided into the first type of group electrodes and the second type of group electrodes. Among them, the first type of group electrodes are annular electrodes with an inner diameter of 25.4 mm, and the second type of group electrodes have a linearly decreasing inner diameter of the electrodes. The inner diameter of the last group of annular electrodes of the first type of group electrodes is 2 mm. The entire ion funnel device is under a low vacuum system.

[0122] Specifically, the ion funnel is located in the first-stage vacuum pumping area of the mass spectrometer. Ions are generated in an ion source under atmospheric pressure, and then the ions enter the ion funnel in the first-stage vacuum system from atmospheric pressure through a heated capillary or an orifice. A group of annular electrodes of the ion funnel consists of four arc electrode pieces with equal inner diameters. There are a total of 100 groups of annular electrodes. The thickness of the arc electrode pieces is 0.5 mm, and the distance between each group of annular electrodes is 0.5 mm. Among them, the first 55 groups are annular electrodes with an inner diameter of 25.4 mm, and the inner diameter of the last 45 groups of annular electrodes decreases linearly from 25.4 mm to 2 mm. In all electrodes, the required RF voltage is applied to each electrode, and a linearly decreasing DC voltage is applied to the electrodes in the direction of decreasing inner diameter of the electrodes, so as to form a DC gradient voltage inside the ion funnel to achieve the transmission and focusing of ions.

[0123] Among them, the annular electrode is a semi-cylindrical electrode, which is composed of four semi-cylindrical electrode pieces with the same inner diameter placed opposite to each other at the same radial position. The distance from the radius of each semi-cylindrical electrode piece to the center point of the semi-cylindrical electrode is equal.

[0124] Specifically, four semi-cylindrical electrode pieces with equal inner diameters are placed opposite to each other at the same radial position, and the distance from the radius of the semi-cylindrical electrode piece to the center point is equal, as Figure 11 and Figure 13 shown. There are a total of multiple groups of electrodes, which are divided into the first type of group electrodes and the second type of group electrodes. The radius of the semi-cylindrical electrodes of the first type of group electrodes is 25.4 mm, and the radial relative distance between each electrode is 25.4 mm. The radius of the second type of group electrodes and the radial relative distance between each electrode decrease linearly from 25.4 mm to 2 mm. The entire ion funnel is under a low vacuum system.

[0125] Specifically, the ion funnel is located in the first-stage vacuum pumping area of the mass spectrometer. Ions are generated in an ion source under atmospheric pressure, and then the ions enter the first-stage vacuum ion funnel from atmospheric pressure through a heated capillary or orifice. A set of electrodes of the ion funnel is composed of four semi-cylindrical electrode pieces with equal inner diameters placed opposite to each other at the same radial position. There are a total of 100 sets of electrodes. The radius of the semi-cylindrical electrode pieces and the radial relative distance between each semi-cylindrical electrode of the first 55 sets of electrode groups are 25.4 mm, the axial relative distance is 0.5 mm, and the thickness of the semi-cylindrical electrode pieces is 0.5 mm. The inner diameter and radial relative distance of the last 45 sets of semi-cylindrical electrodes linearly decrease from 25.4 mm to 2 mm. In all electrodes, the required RF voltage is applied to each electrode, and a linearly decreasing DC voltage is applied to the electrodes in the direction of decreasing electrode inner diameter, so as to form a DC gradient voltage inside the ion funnel to achieve the transmission and focusing of ions.

[0126] Among them, the annular electrode is a hyperbolic electrode, which is composed of four hyperbolic electrode pieces placed opposite to each other at the same radial position. The distance from the hyperbolic electrode piece to the center point of the hyperbolic electrode is equal to the distance from the vertex of the hyperbolic electrode piece to the side line.

[0127] Specifically, four hyperbolic electrode pieces are placed opposite to each other at the same radial position, and the distance from the hyperbola to the center point is equal to the distance from the hyperbola vertex to the side line, as Figure 12 and Figure 13 shown. There are multiple sets of electrodes in total, which are divided into the first type of electrode group and the second type of electrode group. The distance from the hyperbolic electrode piece of the first type of electrode group to the center point is 25.4 mm, and the radial relative distance between each hyperbolic electrode is 25.4 mm. The distance from the electrode piece of the first type of electrode group to the center point and the radial relative distance between each hyperbolic electrode linearly decrease from 25.4 mm to 2 mm. The entire ion funnel is under a low-vacuum system.

[0128] Specifically, the ion funnel is located in the first-stage vacuum pumping area of the mass spectrometer. Ions are generated in an ion source under atmospheric pressure, and then the ions enter the first-stage vacuum ion funnel from atmospheric pressure through a heated capillary or orifice. A set of electrodes of the ion funnel is composed of four equal hyperbolic electrode pieces placed opposite to each other at the same radial position. There are a total of 100 sets of electrodes. The radial relative distance between each hyperbolic electrode of the first 55 sets of electrodes is 25.4 mm, the axial relative distance is 0.5 mm, and the thickness of the hyperbolic electrode is 0.5 mm. The radial relative distance of the last 45 sets of hyperbolic electrodes linearly decreases from 25.4 mm to 2 mm. In all electrodes, the required RF voltage is applied to each electrode, and a linearly decreasing DC voltage is applied to the electrodes in the direction of decreasing electrode inner diameter, so as to form a DC gradient voltage inside the ion funnel to achieve the transmission and focusing of ions.

[0129] Specifically, the ion funnel includes three novel structures. One of the structures is that a non-closed annular electrode is formed by four arc-shaped electrode pieces in the same radial direction, and there are a total of 100 groups of non-closed annular electrodes; the other two structures are that a four-piece electrode device is formed by four semi-cylindrical electrode structures or hyperbolic electrode structures in the same radial direction, and there are a total of 100 groups of electrodes. Through this novel electrode structure and by adopting a cross-type radio frequency voltage loading method, better ion focusing and high transmission efficiency can be obtained during the ion transmission process. At the same time, it can also improve the transmission of low mass-to-charge ratio ions and effectively improve the problem of low transmission efficiency of low mass-to-charge ratio ions in the ion funnel. By dividing a circular ring electrode of a traditional ion funnel into four sections of electrodes in the same radial direction and applying radio frequency voltage and DC voltage under each electrode, good ion transmission and focusing effects can also be achieved.

[0130] Through the above electrode structure and by adopting a cross-type radio frequency voltage loading method, better ion focusing and high transmission efficiency can be obtained during the ion transmission process. At the same time, it can also improve the transmission of low mass-to-charge ratio ions and effectively improve the problem of low transmission efficiency of low mass-to-charge ratio ions in the ion funnel.

[0131] Although the present disclosure is disclosed as above, the protection scope of the present disclosure is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure, and these changes and modifications will all fall within the protection scope of the present invention.

Claims

1. A voltage loading method for an ion funnel with adjustable radio frequency phase of an electrode structure, characterized in that, The described ion funnel includes a first type of group electrodes and a second type of group electrodes stacked on top of each other. The first type of group electrodes is stacked by multiple groups of annular electrodes with equal inner diameters. The second type of group electrodes is stacked by multiple groups of annular electrodes with linearly decreasing inner diameters. The annular electrode is composed of four electrode pieces with the same inner diameter. Among the four electrode pieces forming a non-closed annular electrode, the same-amplitude and different-phase radio frequency voltages are applied between adjacent electrode pieces. The same-amplitude and different-phase radio frequency voltages are applied between adjacent annular electrodes, and a DC gradient voltage is applied to drive ions to move towards the ion funnel outlet direction. By adjusting the frequency, amplitude of the radio frequency voltage, and the DC gradient voltage, ions with different mass-to-charge ratios are transmitted in the ion funnel. The annular electrode is an arc electrode or a semi-cylindrical electrode or a hyperbolic electrode. The method includes the steps: S1: Divide the annular electrodes of the ion funnel into four segments, and apply radio frequency voltages to the segmented ion funnel electrode structure according to the first preset loading process, the second preset loading process, the third preset loading process, and the fourth preset loading process respectively. Among them, the radio frequency amplitude and frequency are the same; S2: Apply radio frequency voltages with opposite phases to adjacent electrodes in the same axial direction through the first preset loading process, and apply radio frequency voltages with the same phase to adjacent electrodes in the same radial direction; S3: Apply radio frequency voltages with opposite phases to adjacent electrodes in the same axial direction through the second preset loading process, and apply radio frequency voltages with opposite phases to adjacent electrodes in the same radial direction; S4: Apply RF voltages with opposite phases to adjacent electrodes in the same axial direction through a third preset loading process, and the phase difference of the RF voltages between adjacent electrodes in the same radial direction is S5: The radio frequency voltage phases of adjacent electrodes in the same axial direction differ by The radio frequency voltage phases between adjacent electrodes in the same radial direction differ by S6: Apply the same DC voltage to the electrodes at the same axial position, and apply a linearly decreasing DC voltage through a resistor in the radial direction where the inner diameter of the electrode decreases to form the DC gradient voltage of the ion funnel; Among them, the first preset loading process is: In the arc electrode structure, apply radio frequency voltages with the same phase to the first arc electrode piece and the third arc electrode piece, and apply radio frequency voltages with the opposite phase to the second arc electrode piece and the fourth arc electrode piece compared with the first arc electrode piece and the third arc electrode piece; In the radial direction, apply radio frequency voltages with the same phase to the adjacent electrodes in the same radial direction as the first arc electrode piece and the third arc electrode piece, and also apply radio frequency voltages with the same phase to the adjacent electrodes in the same radial direction as the second arc electrode piece and the fourth arc electrode piece. At the same time, apply the same DC voltage to the arc electrodes at the same axial position, and apply a linearly decreasing DC voltage through a resistor in the radial direction where the inner diameter of the electrode decreases to form the DC gradient voltage of the ion funnel; In the semi-cylindrical electrode structure, apply radio frequency voltages with the same phase to the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece, and apply radio frequency voltages with the opposite phase to the second semi-cylindrical electrode piece and the fourth semi-cylindrical electrode piece compared with the first semi-cylindrical electrode piece and the third semi-cylindrical electrode piece; In the radial direction, RF voltages with the same phase are applied to the adjacent electrodes in the same radial direction as the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and RF voltages with the same phase are also applied to the adjacent electrodes in the same radial direction as the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet. At the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along which the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel; In the hyperbolic electrode structure, RF voltages with the same phase are applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and RF voltages with a phase opposite to that of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet are applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet; In the radial direction, RF voltages with the same phase are applied to the adjacent electrodes in the same radial direction as the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and RF voltages with the same phase are also applied to the adjacent electrodes in the same radial direction as the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet. At the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along which the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel; Among them, the second preset loading process is as follows: In the arc electrode structure, RF voltages with the same phase are applied to the first arc electrode sheet and the third arc electrode sheet, and RF voltages with a phase opposite to that of the first arc electrode sheet and the third arc electrode sheet are applied to the second arc electrode sheet and the fourth arc electrode sheet; In the radial direction, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the first arc electrode sheet and the third arc electrode sheet, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the second arc electrode sheet and the fourth arc electrode sheet. At the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along which the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel; In the semi-cylindrical electrode structure, RF voltages with the same phase are applied to the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and RF voltages with a phase opposite to that of the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet are applied to the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet; In the radial direction, RF voltages with opposite phases are applied to the adjacent electrodes in the same radial direction as the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and RF voltages with opposite phases are also applied to the adjacent electrodes in the same radial direction as the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet. At the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along which the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel; In the hyperbolic electrode structure, the same-phase radio frequency voltage is applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and the radio frequency voltage with the opposite phase to that of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet is applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet; In the radial direction, the radio frequency voltage with the opposite phase is applied to the adjacent electrodes in the same radial direction as the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and the radio frequency voltage with the opposite phase is also applied to the adjacent electrodes in the same radial direction as the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet. At the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming the DC gradient voltage of the ion funnel; Wherein, the third preset loading process is as follows: In the arc electrode structure, the same-phase radio frequency voltage is applied to the first arc electrode sheet and the third arc electrode sheet, and the radio frequency voltage with the opposite phase to that of the first arc electrode sheet and the third arc electrode sheet is applied to the second arc electrode sheet and the fourth arc electrode sheet; In the radial direction, the radio frequency voltage phases of every two adjacent arc electrodes differ by and at the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming a DC gradient voltage of the ion funnel; In the semi-cylindrical electrode structure, the same-phase radio frequency voltage is applied to the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet, and the radio frequency voltage with the opposite phase to that of the first semi-cylindrical electrode sheet and the third semi-cylindrical electrode sheet is applied to the second semi-cylindrical electrode sheet and the fourth semi-cylindrical electrode sheet; In the radial direction, the RF voltage phases of every two adjacent semi-cylindrical electrodes differ by and at the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along the decreasing inner diameter of the electrodes to form the DC gradient voltage of the ion funnel; In the hyperbolic electrode structure, the same-phase radio frequency voltage is applied to the first hyperbolic electrode sheet and the third hyperbolic electrode sheet, and the radio frequency voltage with the opposite phase to that of the first hyperbolic electrode sheet and the third hyperbolic electrode sheet is applied to the second hyperbolic electrode sheet and the fourth hyperbolic electrode sheet; In the radial direction, the radio frequency voltage phases of every two adjacent hyperboloid electrodes differ by and at the same time, the same DC voltage is applied to the hyperboloid electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction along the decreasing inner diameter of the electrodes to form the DC gradient voltage of the ion funnel; Wherein, the fourth preset loading process is as follows: In the arc electrode structure, four arc electrode pieces apply radio frequency voltages with a phase difference of and in the radial direction, the radio frequency voltage phases of every two adjacent arc electrodes also differ by and at the same time, the same DC voltage is applied to the arc electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming a DC gradient voltage of the ion funnel; In the semi-cylindrical electrode structure, four semi-cylindrical electrode sheets are applied with radio frequency voltages having a phase difference of In the radial direction, the radio frequency voltage phases of every two adjacent semi-cylindrical electrodes also have a phase difference of And at the same time, the same DC voltage is applied to the semi-cylindrical electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming a DC gradient voltage of the ion funnel; In the hyperbolic electrode structure, four hyperbolic electrode sheets apply radio frequency voltages with a phase difference of . In the radial direction, the radio frequency voltage phases of every two adjacent hyperbolic electrodes also differ by . At the same time, the same DC voltage is applied to the hyperbolic electrodes at the same axial position, and a linearly decreasing DC voltage is applied through a resistor in the radial direction where the inner diameter of the electrode decreases, forming a DC gradient voltage of the ion funnel.

2. The voltage loading method of the ion funnel with adjustable radio frequency phase of the electrode structure according to claim 1, characterized in that, The annular electrode is an arc electrode and is composed of four arc electrode sheets with the same inner diameter.

3. The voltage loading method of the ion funnel with adjustable radio frequency phase of the electrode structure according to claim 1, wherein The annular electrode is a semi-cylindrical electrode and is composed of four semi-cylindrical electrode sheets with the same inner diameter placed opposite to each other at the same radial position. The distance from the radius of each semi-cylindrical electrode sheet to the center point of the semi-cylindrical electrode is equal.

4. The voltage loading method of the ion funnel with adjustable radio frequency phase of the electrode structure according to claim 1, characterized in that, The annular electrode is a hyperbolic electrode and is composed of four hyperbolic electrode sheets placed opposite to each other at the same radial position. The distance from the hyperbolic electrode sheet to the center point of the hyperbolic electrode is equal to the distance from the vertex of the hyperbolic electrode sheet to the side line.

5. The voltage loading method of the ion funnel with adjustable radio frequency phase of the electrode structure according to claim 1, characterized in that, The electrode structure of the ion funnel includes an arc electrode, a semi-cylindrical electrode, and a hyperbolic electrode.

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