A galvanometer mirror structure for a Fourier spectrometer and a Fourier spectrometer

By employing a rotating mirror structure with a fixed connection between the inner ring of the bearing and the rotating shaft in the Fourier spectrometer, the problem of central shaft drift of the cross spring bearing was solved, improving the driving accuracy and structural simplicity of the spectrometer and reducing costs.

CN115962849BActive Publication Date: 2026-06-26PHOTONICS INTEGRATION (WENZHOU) INNOVATION RES INST

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
PHOTONICS INTEGRATION (WENZHOU) INNOVATION RES INST
Filing Date
2022-12-30
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

In existing Fourier spectrometers, the central axis of the cross spring bearing is prone to drift during rotation, affecting the driving accuracy of the pendulum structure and the overall accuracy of the spectrometer.

Method used

The mirror structure adopts a rotating shaft to fix the inner ring of the bearing and is fixed to the base by the outer ring of the bearing. Symmetrical springs are set on both sides of the corner mirror connecting arm to achieve the self-resetting function. It is driven by rolling or sliding bearings and voice coil motor to avoid the drift of the central shaft.

Benefits of technology

This invention achieves the goal of preventing the bearing center axis from drifting when the pendulum mirror structure swings around the rotation axis, meeting the concentricity requirements of the Fourier spectrometer, improving the driving accuracy and the overall accuracy of the spectrometer, while also being simple in structure and low in cost.

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Abstract

The application discloses a swing mirror structure for a Fourier spectrometer, which comprises two bearings, a base, a rotating shaft, a motor and a swing mirror unit; the two bearings are oppositely arranged, and the outer rings of the bearings are fixed to the base; the rotating shaft passes through the inner rings of the bearings and is fixedly connected with the inner rings, and the middle of the rotating shaft is fixedly connected with the swing mirror unit; the motor is connected with the rotating shaft and used for driving the swing mirror unit to swing. The rotating shaft is fixedly connected with the inner rings of the bearings, so that the central shaft of the bearing does not drift when the swing mirror structure swings around the rotating shaft, the structure is simple, and the requirement of the Fourier spectrometer on the concentricity is met; the central drift when the bearing rotates is avoided, the driving precision of the swing mirror is influenced, and then the precision of the spectrometer is influenced; the application has the characteristics of accurate control, simple structure and low cost.
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Description

Technical Field

[0001] This invention discloses a mirror structure for a Fourier spectrometer and a Fourier spectrometer, belonging to the field of optical equipment technology. Background Technology

[0002] When a Fourier spectrometer is working, the collimated infrared beam to be measured is incident into the interferometer. By controlling the movement of the moving mirror in the interferometer, interferograms under different optical path differences are obtained. The obtained interferograms are then subjected to Fourier transform to obtain the infrared spectrum of the beam.

[0003] The interferometer is the core component of a Fourier transform infrared spectrometer. The movement of the interferometer's moving mirror changes the optical path difference between the two beams that form the interference pattern, and the magnitude of this optical path difference directly determines the spectrometer's resolution.

[0004] In existing Fourier spectrometers, the movement of the interferometer's moving mirror is usually achieved using a cross spring bearing. The cross spring bearing consists of two mutually perpendicular spring plates, which is equivalent to the perpendicular intersection of cantilever beams. When the cross spring bearing is rotated, the springs provide a restoring force. However, the central axis will drift when the cross spring rotates. This drift affects the driving accuracy of the mirror structure, and consequently, the accuracy of the Fourier spectrometer. Summary of the Invention

[0005] The purpose of this application is to solve the technical problem of drift in the central axis of the cross-spring bearing used in existing Fourier spectrometers. To achieve the above objective, this invention proposes a tilting mirror structure for a Fourier spectrometer, the specific solution of which is as follows:

[0006] A tilting mirror structure for a Fourier spectrometer includes two bearings, a base, a rotating shaft, a motor, and a tilting mirror unit;

[0007] The two bearings are arranged opposite each other, and the outer ring of each bearing is fixed to the machine base;

[0008] Both ends of the rotating shaft pass through the inner ring of the bearing and are fixedly connected to the inner ring, and the middle of the rotating shaft is fixedly connected to the tilting mirror unit;

[0009] The motor is connected to the rotating shaft and is used to drive the swing mirror unit to swing.

[0010] Preferably, the tilting mirror unit includes a first corner mirror, a second corner mirror, and a corner mirror connecting arm;

[0011] The first corner mirror and the second corner mirror are symmetrically arranged at both ends of the corner mirror connecting arm;

[0012] The middle of the corner mirror connecting arm is fixedly connected to the rotating shaft.

[0013] Preferably, it also includes a first spring and a second spring;

[0014] One end of the first spring is connected to the corner mirror connecting arm on the side where the first corner mirror is located, and the other end is connected to the base.

[0015] One end of the second spring is connected to the corner mirror connecting arm on the side where the second corner mirror is located, and the other end is connected to the base;

[0016] The first spring and the second spring are arranged in a centrally symmetrical manner with the middle of the corner mirror connecting arm as the center.

[0017] Preferably, the first spring and the second spring have a preload.

[0018] Preferably, the first spring and the second spring are compression springs or tension springs.

[0019] Preferably, the bearing is a rolling bearing or a sliding bearing.

[0020] Preferably, the motor is a voice coil motor.

[0021] Preferably, it also includes a motor mount;

[0022] The motor mount is fixed on the base, and the motor is mounted on the motor mount.

[0023] A Fourier spectrometer includes the aforementioned tilting mirror structure for a Fourier spectrometer.

[0024] Beneficial effects: The present invention uses a rotating shaft to fix the inner ring of the bearing, so that the bearing center axis does not drift when the mirror structure swings around the rotating shaft. The structure is simple and meets the concentricity requirements of the Fourier spectrometer, avoiding center drift when the bearing rotates, which affects the driving accuracy of the mirror and thus the accuracy of the spectrometer. The present invention has the characteristics of precise control, simple structure and low cost. Attached Figure Description

[0025] Figure 1 This is a front view of the tilting mirror structure of the Fourier spectrometer of the present invention;

[0026] Figure 2 This is a right view of the tilting mirror structure of the Fourier spectrometer of the present invention.

[0027] In the diagram: 1. Base; 2. First corner mirror; 3. Second corner mirror; 4. Corner mirror connecting arm; 5. Bearing; 6. Shaft; 7. First spring; 8. Second spring; 9. Motor base; 10. Motor. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and do not limit the scope of protection of the invention.

[0029] like Figure 1 As shown in the figure, the tilting mirror structure used in this embodiment for a Fourier spectrometer includes a base 1, a first corner mirror 2, a second corner mirror 3, a corner mirror connecting arm 4, a bearing 5, a rotating shaft 6, a first spring 7, a second spring 8, a motor base 9, and a motor 10. Its features are as follows:

[0030] The first corner mirror 2 and the second corner mirror 3 are symmetrically arranged at both ends of the corner mirror connecting arm 4 to form a swing mirror unit. The swing mirror unit is fixedly connected as a rigid whole. The middle of the corner mirror connecting arm 4 is fixed on the rotating shaft 6. The two ends of the rotating shaft 6 pass through the inner rings of two bearings 5 ​​and are fixedly connected to the inner rings of the bearings 5. The motor 10 is connected to the rotating shaft 6 and is used to drive the swing mirror unit to swing.

[0031] When the motor 10 drives the rotating shaft 6 to swing, the mirror unit fixedly connected to the rotating shaft 6 swings, and the inner ring of the bearing 5 fixedly connected to the rotating shaft 6 rotates simultaneously. When the inner ring of the bearing 5 rotates, the central axis remains stationary, and the central axis of the bearing 5 will not drift. The structure is simple and meets the concentricity requirements of the Fourier spectrometer, avoiding center drift when the cross spring bearing rotates, which would affect the driving accuracy of the mirror and thus the accuracy of the spectrometer. This invention has the characteristics of precise control, simple structure, and low cost.

[0032] The outer ring of bearing 5 is fixed on the base 1 to ensure that the outer ring of bearing 5 does not rotate, and further ensure that the bearing center axis does not drift. One end of the first spring 7 is connected to the corner mirror connecting arm 4 on the side where the first corner mirror 2 is located, and the other end is connected to the base 1. One end of the second spring 8 is connected to the corner mirror connecting arm 4 on the side where the second corner mirror 3 is located, and the other end is connected to the base 1. The first spring 7 and the second spring 8 are symmetrically arranged on both sides of the corner mirror connecting arm 4 with the corner mirror connecting arm 4 as the center.

[0033] The first spring 7 and the second spring 8 can be either compression springs or tension springs. In this embodiment, compression springs are selected. The two ends of the springs are respectively connected to the corner mirror connecting arm 4 and the base 1. When connected, the first spring 7 and the second spring 8 have preload at the same time, and the preload is symmetrical and equal.

[0034] When the motor 10 drives the rotating shaft 6 to swing, the corner mirror connecting arm 4, which is fixedly connected to the rotating shaft 6, swings. The swing of the corner mirror connecting arm 4 causes the first spring 7 and the second spring 8 connected to it to deform. When the motor 10 stops driving the rotating shaft 6, the first spring 7 and the second spring 8 return to their original state, driving the rotating shaft 6 and the inner ring of the bearing 5 fixedly connected to the rotating shaft 6 to reset.

[0035] The first spring 7 and the second spring 8 are connected to the corner mirror connecting arm 4. The structure is simple and low cost to realize the self-resetting function of the tilting mirror structure.

[0036] In this embodiment, the bearing 5 can be a rolling bearing or a sliding bearing, preferably a sliding bearing. The motor 10 is mounted on a motor base fixedly connected to the base 1, protecting it from external influences and ensuring safer operation. The motor 10 is a voice coil motor, which has advantages such as simple structure, small size, high response, high speed, and convenient control, and is widely used in precision high-speed motion equipment.

[0037] This invention employs a rotating shaft to fix the inner ring of the bearing, ensuring that the bearing's central axis remains stable during the oscillation of the tilting mirror structure around the shaft. This simple structure meets the concentricity requirements of a Fourier spectrometer, preventing center drift during the rotation of the cross-spring bearing, which would affect the driving accuracy of the tilting mirror and consequently the spectrometer's accuracy. Symmetrical springs are arranged on both sides of the corner mirror connecting arm, providing a simple and cost-effective self-resetting function for the tilting mirror structure. This invention features precise control, simple structure, and low cost.

[0038] The above embodiments merely illustrate one real-time method of the present invention, and while the description is relatively specific and detailed, it should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this patent should be determined by the appended claims.

Claims

1. A tilting mirror structure for a Fourier spectrometer, characterized in that, It includes two bearings, a base, a rotating shaft, a motor, and a tilting mirror unit; The two bearings are arranged opposite each other, and the outer ring of each bearing is fixed to the machine base; Both ends of the rotating shaft pass through the inner ring of the bearing and are fixedly connected to the inner ring. The bearing is a sliding bearing, and the middle of the rotating shaft is fixedly connected to the tilting mirror unit. The motor is connected to the rotating shaft and is used to drive the swing mirror unit to swing. The tilting mirror unit includes a first corner mirror, a second corner mirror, and a corner mirror connecting arm; It also includes a first spring and a second spring; One end of the first spring is connected to the corner mirror connecting arm on the side where the first corner mirror is located, and the other end is connected to the base. One end of the second spring is connected to the corner mirror connecting arm on the side where the second corner mirror is located, and the other end is connected to the base; The first spring and the second spring are arranged in a centrally symmetrical manner with the middle of the corner mirror connecting arm as the center; The first spring and the second spring have a preload; The first corner mirror and the second corner mirror are symmetrically arranged at both ends of the corner mirror connecting arm; The middle of the corner mirror connecting arm is fixedly connected to the rotating shaft.

2. The mirror structure of the Fourier spectrometer according to claim 1, characterized in that, The first spring and the second spring are compression springs or tension springs.

3. The mirror structure of the Fourier spectrometer according to claim 1, characterized in that, The motor is a voice coil motor.

4. The mirror structure of the Fourier spectrometer according to claim 1, characterized in that, It also includes the motor mount; The motor mount is fixed on the base, and the motor is mounted on the motor mount.

5. A Fourier spectrometer, characterized in that, Includes the mirror structure for a Fourier spectrometer as described in any one of claims 1-4.