A reflective cold mirror protection device and method for ultraviolet lamp

Abstract

The present invention discloses a reflective cold mirror protection device and method for ultraviolet lamps. The device includes a protective cover disposed above the plane of the reflective cold mirror below the ultraviolet lamp, and the protective cover is sized to cover the entire reflective cold mirror. The protective cover is used to protect the reflective cold mirror from falling damage when the ultraviolet lamp is removed. The present invention has a simple structure and is easy to operate. When replacing a light source component, the reflective cold mirror below the ultraviolet lamp is protected from falling damage, thereby ensuring the reliable operation of the ultraviolet light source.

Description

Technical Field

[0001] The present invention belongs to the technical field of photolithography equipment, and in particular relates to a reflective cold mirror protection device and method for an ultraviolet lamp. Background Art

[0002] The ultraviolet light source, one of the core components in the lithography machine, usually adopts an ultraviolet lamp, which is fixed in the lamp room by a fixing device, and a reflective cold mirror is provided under the ultraviolet lamp.

[0003] If the UV light source fails, the UV lamp in the lamp chamber needs to be replaced. Currently, the lamp chamber door is opened first, then the fixture is opened, and the UV lamp is removed. However, during the replacement process, there is a possibility that the UV lamp may fall due to negligence. In this case, the falling UV lamp may damage or destroy the reflective cold mirror below, resulting in the inability to transmit light correctly and reliably. Summary of the Invention

[0004] Therefore, in order to solve the problem that the existing replacement of the ultraviolet lamp may cause damage to the reflective cold mirror below the ultraviolet lamp, the present invention provides a reflective cold mirror protection device and method for the ultraviolet lamp.

[0005] The present invention is achieved through the following technical solutions:

[0006] A reflective cold mirror protection device and method for an ultraviolet lamp, comprising: a protective cover;

[0007] The protective cover is arranged above the plane where the reflective cold mirror is located below the ultraviolet lamp, and the size of the protective cover can cover the entire reflective cold mirror, so as to protect the reflective cold mirror from being damaged or broken by the ultraviolet lamp when the ultraviolet lamp is removed.

[0008] Preferably, one end of the protective cover of the present invention is fixedly connected to the lamp chamber door of the ultraviolet lamp chamber through a fixing structure; the other end of the protective cover is connected to an inner wall of the lamp chamber through an elastic structure;

[0009] The inner side wall is a side wall opposite to the lamp chamber door.

[0010] Preferably, the protective cover of the present invention is composed of a hollow area and a shielding area;

[0011] The sizes of the hollow area and the shielding area can respectively cover the entire reflective cold mirror.

[0012] Preferably, the protective cover of the present invention is fixedly connected to the lamp chamber door at one end close to the hollow area, and the protective cover is connected to an inner wall of the lamp chamber through an elastic structure at one end close to the shielding area; the hollow area is located directly above the reflective cold mirror, that is, it does not shield the reflective cold mirror.

[0013] Preferably, the elastic structure of the present invention adopts a spring.

[0014] Preferably, the protective cover of the present invention is made of stainless steel.

[0015] On the other hand, the present invention also proposes a method based on the above protection device, comprising:

[0016] Installing the protective cover in the lamp room;

[0017] When the ultraviolet lamp is working normally, the protective cover is moved to a position away from the reflective cold mirror so that the protective cover does not block and protect the reflective cold mirror;

[0018] Before replacing the ultraviolet lamp, the protective cover is moved to just above the reflective cold mirror so as to cover the entire reflective cold mirror to protect the reflective cold mirror.

[0019] Preferably, the protective cover is installed in the lamp chamber in the following manner:

[0020] One end of the protective cover is fixedly connected to the lamp chamber door of the lamp chamber by a fixing device;

[0021] The other end of the protective cover is connected to an inner wall of the lamp chamber through an elastic structure, and the protective cover is located above the plane where the reflective cold mirror is located;

[0022] The inner side wall is a side wall opposite to the lamp chamber door.

[0023] Preferably, the method of moving the protective cover to a position away from the reflective cold mirror is as follows:

[0024] When the lamp chamber door is closed, the protective cover is driven by the elastic structure to move to a position away from the reflective cold mirror.

[0025] Preferably, the method of moving the protective cover to directly above the reflective cold mirror is as follows:

[0026] When the lamp chamber door is opened, the protective cover is moved by the lamp chamber door to the position directly above the reflective cold mirror, and the protective cover is able to cover the entire reflective cold mirror.

[0027] The present invention has the following advantages and beneficial effects:

[0028] The present invention provides a protective cover in the lamp chamber. When the lamp chamber door is not opened, the protective cover does not work, thereby ensuring the normal operation of the ultraviolet light source. When the lamp chamber door is opened (i.e., the light source device needs to be replaced, etc.), the protective cover is moved above the reflective cold mirror, thereby protecting the reflective cold mirror.

[0029] The present invention has a simple structure and is easy to operate. It can protect the reflective cold mirror below the light source device when replacing the light source device, so as to prevent the light source device above from falling and causing damage to the mirror, thereby ensuring the reliable performance of the ultraviolet light source. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the drawings:

[0031] Figure 1 It is a schematic diagram of the structure of the ultraviolet light source lamp chamber.

[0032] Figure 2 FIG. 1 is a schematic diagram of a first embodiment of a protective device structure according to the present invention.

[0033] Figure 3 The figure is a schematic structural diagram of an ultraviolet light source lamp chamber using the protection device of the present invention.

[0034] Figure 4 This is a schematic diagram of the second embodiment of the protection device structure of the present invention. Figure 4 (a) is the state where the lamp room door is not opened; Figure 4 (b) is the state where the lamp chamber door is open.

[0035] Markings and corresponding parts names in the accompanying drawings:

[0036] 1-lamp chamber, 11-door lock, 12-lamp chamber door, 13-lamp chamber wall, 2-light source device, 21-heating area, 3-installation structure, 4-connection structure, 5-reflective cold mirror, 6-protective device, 7-protective cover, 71-hollow area, 72-shielding area, 8-elastic structure, 9-fixed structure, 10-light beam. DETAILED DESCRIPTION

[0037] Hereinafter, the terms "include" or "may include" used in various embodiments of the present invention indicate the presence of the invented function, operation or element, and do not limit the addition of one or more functions, operations or elements. In addition, as used in various embodiments of the present invention, the terms "include", "have" and their cognates are intended only to indicate specific features, numbers, steps, operations, elements, components or combinations of the foregoing, and should not be understood as excluding the presence of one or more other features, numbers, steps, operations, elements, components or combinations of the foregoing or the possibility of adding one or more features, numbers, steps, operations, elements, components or combinations of the foregoing.

[0038] In various embodiments of the present invention, the expression "or" or "at least one of A or / and B" includes any or all combinations of the words listed simultaneously. For example, the expression "A or B" or "at least one of A or / and B" may include A, may include B, or may include both A and B.

[0039] The expressions (such as "first", "second", etc.) used in the various embodiments of the present invention may modify the various constituent elements in the various embodiments, but may not limit the corresponding constituent elements. For example, the above expressions do not limit the order and / or importance of the elements. The above expressions are only used to distinguish one element from other elements. For example, a first user device and a second user device indicate different user devices, although both are user devices. For example, without departing from the scope of the various embodiments of the present invention, a first element may be referred to as a second element, and similarly, a second element may also be referred to as a first element.

[0040] It should be noted that when a component is described as being “connected” to another component, the first component may be directly connected to the second component, and a third component may be “connected” between the first and second components. Conversely, when a component is described as being “directly connected” to another component, it can be understood that there is no third component between the first and second components.

[0041] The terms used in various embodiments of the present invention are only used to describe the purpose of specific embodiments and are not intended to limit the various embodiments of the present invention. As used herein, the singular form is intended to also include the plural form, unless the context clearly indicates otherwise. Unless otherwise limited, all terms used here (including technical terms and scientific terms) have the same meaning as those of ordinary skill in the art generally understood by the various embodiments of the present invention. The terms (such as those defined in generally used dictionaries) will be interpreted as having the same meaning as the contextual meaning in the relevant technical field and will not be interpreted as having idealized meaning or too formal meaning, unless clearly defined in various embodiments of the present invention.

[0042] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with examples and drawings. The exemplary embodiments of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0043] Example 1

[0044] This embodiment 1 provides a reflective cold mirror protection device and method for an ultraviolet lamp. The protection device 6 of this embodiment includes a protection cover 7 , which can completely cover the reflective cold mirror 5 .

[0045] This protection device is used for Figure 1 In the ultraviolet light system of the lithography machine shown, the ultraviolet light system of the lithography machine includes a lamp room 1, a light source device 2 installed in the lamp room 1, and a reflective cold mirror 5 (blue cold mirror) located below the light source device 2; one end of the light source device 2 is fixed in the lamp room 1 through a mounting structure 3, and the other end of the light source device 2 is fixedly connected to the lamp room wall through a connecting structure 4. In this embodiment, the light source device 2 can be replaced by disassembling the mounting structure 3, and the connecting structure 4 of this embodiment can use a rope device to protect the light source device 2.

[0046] like Figure 2 As shown, the protective cover 6 is installed in the lamp chamber 1 of the ultraviolet light system. Before removing the light source device 2 (ultraviolet lamp) of the ultraviolet light system, the protective cover 7 is moved to just above the reflective cold mirror 5 below the light source device 2 to completely cover and shield it, so that when the light source device 2 is removed, the reflective cold mirror will not be damaged or lost due to the falling of the light source device 2.

[0047] Example 2

[0048] This embodiment further optimizes the design of the protective cover 7 of the above embodiment 1. Figure 3 As shown, the protective cover 7 of this embodiment adopts a solid plate structure, and its size can completely cover the reflective cold mirror 5.

[0049] One end of the protective cover 7 is fixedly connected to the lamp chamber door of the lamp chamber 1 through a fixing structure 9; the other end opposite to it is connected to the wall of the lamp chamber 1 opposite to the lamp chamber door through an elastic structure 8, so that the protective cover 7 is located above the plane where the reflecting cold mirror 5 is located.

[0050] The elastic structure 8 of this embodiment may be a spring device but is not limited to it.

[0051] The working principle of the protection device of this embodiment is:

[0052] When the light source device 2 does not need to be replaced, that is, the lamp chamber door of the lamp chamber 1 is in a closed state, the protective cover 7 is not located directly above the reflective cold mirror 5, that is, the protective cover 7 does not block the reflective cold mirror 5 and does not affect the normal operation of the reflective cold mirror 5;

[0053] When the light source device 2 needs to be replaced, the lamp chamber door of the lamp chamber 1 is opened. When the lamp chamber door is opened, the protective cover 7 is driven to move to the top of the reflective cold mirror 5, thereby shielding the reflective cold mirror 5. When the light source device 2 is disassembled, the light source device 2 falls onto the protective cover 7 due to negligence or error, but does not cause impact on the reflective cold mirror 5, thereby damaging or losing the reflective cold mirror 5 and affecting its working performance.

[0054] Example 3

[0055] This embodiment further optimizes the design of the protective cover 7 of the above embodiment 1. Figure 4 As shown in the top view, the protective cover 7 of this embodiment can also hollow out the solid plate structure to form a hollow area 71 and a shielding area 72 (solid), and ensure that the hollow area 71 and the shielding area 72 can distinguish and cover the entire reflective cold mirror 5; wherein, the end of the protective cover 7 close to the shielding area 72 is connected to the inner wall 13 of the lamp chamber 1 (a wall opposite to the lamp chamber door) through the elastic structure 8, and the end of the protective cover 7 close to the hollow area 71 is fixed on the lamp chamber door 12, so that the hollow area 71 is located directly above the emitting cold mirror 5.

[0056] The elastic structure 8 of this embodiment can be, but is not limited to, a spring.

[0057] The working principle of the protective cover 7 of this embodiment is:

[0058] When the light source device 2 does not need to be replaced, that is, the lamp chamber door 12 of the lamp chamber 1 is in a closed state (that is, the door lock 11 is closed), at this time, the hollow area 71 of the protective cover 7 is located directly above the reflective cold mirror 5, that is, it does not block the reflective cold mirror 5 and does not affect the normal operation of the reflective cold mirror 5; Figure 4 As shown in (a).

[0059] When the light source device 2 needs to be replaced, the lamp chamber door of the lamp chamber 1 is opened (i.e., the door lock 11 is opened). When the lamp chamber door is opened, the shielding area 72 of the protective cover 7 is moved to the top of the reflective cold mirror 5, so that the shielding area 72 can shield the reflective cold mirror 5. When the light source device 2 is disassembled, the light source device 2 falls onto the shielding area 72 of the protective cover 7 due to negligence or error, without causing impact on the reflective cold mirror 5, thereby damaging or losing the reflective cold mirror 5 and affecting its working performance. Figure 4 (b) shown.

[0060] Example 4

[0061] This embodiment further optimizes the design of the protective cover 7 of the above embodiment. Considering that the light source device 2 in the lamp chamber generates heat during operation, the protective cover 7 of this embodiment can be made of, but not limited to, heat-resistant stainless steel.

[0062] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for using a reflective cold mirror protection device for an ultraviolet lamp, characterized in that: The reflective cold mirror protection device for the ultraviolet lamp comprises: a protection cover (7); The protective cover (7) is arranged above the plane where the reflective cold mirror (5) is located below the ultraviolet lamp (2), and the size of the protective cover (7) can cover the entire reflective cold mirror (5), so as to protect the reflective cold mirror (5) from being damaged or broken by the ultraviolet lamp falling when the ultraviolet lamp is disassembled; The method of use includes: Installing the protective cover (7) in the lamp chamber (1); When the ultraviolet lamp (2) is working normally, the protective cover (7) is moved to a position away from the reflective cold mirror (5) so that it does not block and protect the reflective cold mirror (5); Before replacing the ultraviolet lamp (2), the protective cover (7) is moved to the top of the reflective cold mirror (5) so as to cover the entire reflective cold mirror (5) to protect the reflective cold mirror (5); The protective cover (7) is installed in the lamp chamber (1) specifically as follows: One end of the protective cover (7) is fixedly connected to the lamp chamber door (12) of the lamp chamber (1) by a fixing device; The other end of the protective cover (7) is connected to an inner wall (13) of the lamp chamber (1) via an elastic structure (8), and the protective cover (7) is located above the plane where the reflective cold mirror (5) is located; The inner side wall (13) is a side wall opposite to the lamp chamber door (12); The protective cover (7) is moved to a position away from the reflective cold mirror (5) by: When the lamp chamber door (12) is closed, the protective cover (7) is driven by the elastic structure (8) to move to a position away from the reflective cold mirror (5).

2. The method for using the reflective cold mirror protection device for ultraviolet lamp according to claim 1, characterized in that: One end of the protective cover (7) is fixedly connected to the lamp chamber door (12) of the ultraviolet lamp chamber (1) via a fixing structure (9); the other end of the protective cover (7) is connected to an inner side wall (13) of the lamp chamber (1) via an elastic structure (8); The inner side wall (13) is a side wall opposite to the lamp chamber door (12).

3. The method for using the reflective cold mirror protection device for ultraviolet lamp according to claim 1, characterized in that: The protective cover (7) is composed of a hollow area (71) and a shielding area (72); The sizes of the hollow area (71) and the shielding area (72) are respectively capable of covering the entire reflective cold mirror (5).

4. The method for using the reflective cold mirror protection device for ultraviolet lamp according to claim 3, characterized in that: One end of the protective cover (7) close to the hollow area (71) is fixedly connected to the lamp chamber door (12), and one end of the protective cover (7) close to the shielding area (72) is connected to an inner wall of the lamp chamber via an elastic structure (8); the hollow area (71) is located directly above the reflective cold mirror (5), i.e., it does not shield the reflective cold mirror.

5. The method for using the reflective cold mirror protection device for ultraviolet lamp according to claim 2 or 4, characterized in that: The elastic structure (8) adopts a spring.

6. The method for using the reflective cold mirror protection device for ultraviolet lamp according to claim 1, characterized in that: The protective cover (7) is made of stainless steel.

7. The method for using the reflective cold mirror protection device for ultraviolet lamp according to claim 1, characterized in that: The protective cover (7) is moved to the top of the reflective cold mirror (5) as follows: When the lamp chamber door (12) is opened, the protective cover (7) is moved to the position directly above the reflective cold mirror (5) under the drive of the lamp chamber door (12), and the protective cover (7) is able to cover the entire reflective cold mirror (5).

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