Method of manufacturing a spinning wheel, spinning wheel and projection device

Abstract

The present application provides a manufacturing method of a rotating wheel, a rotating wheel and a projection device. The manufacturing method of the rotating wheel comprises the following steps. Firstly, a substrate is provided. Then, a heat-conducting film layer is formed on at least one surface of the substrate, wherein the heat-conducting film layer is formed by contacting a plurality of heat-conducting particles with the substrate by cold spraying or supersonic laser deposition, the plurality of heat-conducting particles in the heat-conducting film layer accounts for >95% of the volume of the heat-conducting film layer, and the heat-conducting film layer has a porosity of <1%. Subsequently, an optical layer is formed on the substrate or the heat-conducting film layer. The rotating wheel, the manufacturing method thereof and the projection device comprising the rotating wheel provided by the present application have good heat-conducting effect.

Description

Technical Field

[0001] This invention relates to an optical projection device and its manufacturing method, and particularly to a method for manufacturing a rotating wheel, a rotating wheel, and a projection device. Background Technology

[0002] Existing heat sinks (such as phosphor wheels) mostly use aluminum alloy substrates as heat dissipation substrates because they are lighter and less expensive due to their lower density compared to other metal substrates (such as copper, silver, or gold substrates). However, aluminum alloy substrates have poorer thermal conductivity than other metal substrates. To overcome this problem, existing technologies improve the heat dissipation of the heat sink by forming a thermally conductive layer on at least one surface of the aluminum alloy substrate. However, the thermally conductive layer formed using existing technologies is prone to forming cavities within the thermally conductive layer, and an adhesive layer is required between the thermally conductive layer and the aluminum alloy substrate for bonding. Both of these factors limit the improvement in heat dissipation achieved by using a thermally conductive layer.

[0003] The "Background Art" paragraph is only used to help understand the content of this invention. Therefore, the content disclosed in the "Background Art" paragraph may include some prior art that is not known to those skilled in the art. The content disclosed in the "Background Art" paragraph does not mean that the content or the problem to be solved by one or more embodiments of this invention was known or recognized by those skilled in the art before this application was filed. Summary of the Invention

[0004] The present invention provides a rotating wheel and a method for manufacturing the same, as well as a projection device including the rotating wheel, wherein the rotating wheel provided by the present invention has good heat conduction effect.

[0005] Other objects and advantages of the present invention can be further understood from the technical features disclosed herein.

[0006] To achieve one, some, or all of the above-mentioned objectives, or other objectives, one embodiment of the present invention provides a method for manufacturing a rotor, comprising the following steps: First, a substrate is provided. Next, a thermally conductive film layer is formed on at least one surface of the substrate, wherein the thermally conductive film layer is formed by contacting a plurality of thermally conductive particles with the substrate using a cold spray method or a supersonic laser deposition method, wherein the plurality of thermally conductive particles in the thermally conductive film layer occupy >95% of the volume of the thermally conductive film layer, and the thermally conductive film layer has a porosity of <1%. Subsequently, an optical layer is formed on the substrate or the thermally conductive film layer.

[0007] To achieve one, some, or all of the above-mentioned objectives, or other objectives, one embodiment of the present invention provides a rotating wheel comprising a substrate, a thermally conductive film layer, and an optical layer. The thermally conductive film layer is disposed on at least one surface of the substrate and in contact with the substrate, wherein the thermally conductive film layer comprises a plurality of thermally conductive particles, and the plurality of thermally conductive particles occupy >95% of the volume of the thermally conductive film layer, wherein the thermally conductive film layer has a porosity of <1%. The optical layer is disposed on the substrate or the thermally conductive film layer.

[0008] To achieve one, some, or all of the above objectives, or other objectives, an embodiment of the present invention provides a projection device, comprising a light source module, a rotating wheel, a light valve, and a projection lens. The light source module provides an excitation beam. The rotating wheel is disposed in the transmission path of the excitation beam and includes a substrate, a thermally conductive film layer, and an optical layer. The thermally conductive film layer is disposed on at least one surface of the substrate and in contact with the substrate, wherein the thermally conductive film layer includes a plurality of thermally conductive particles, and the plurality of thermally conductive particles occupy >95% of the volume of the thermally conductive film layer, wherein the thermally conductive film layer has a porosity of <1%. The optical layer is disposed on the substrate or the thermally conductive film layer, wherein the excitation beam incident on the optical layer is converted into a converted beam. The light valve is disposed in the transmission path of the excitation beam and the converted beam, for converting the excitation beam and the converted beam into an image beam. The projection lens is disposed in the transmission path of the image beam and for projecting the image beam outside the projection device.

[0009] Based on the above, the embodiments of the present invention have at least one of the following advantages or effects. Compared with the prior art, the manufacturing method of the rotor provided in one embodiment of the present invention utilizes cold spraying or supersonic laser deposition to form a thermally conductive film layer. The thermally conductive film layer formed by the above process can be firmly attached to the substrate without an adhesive layer, and the formed thermally conductive film layer has a porosity of <1%, which makes it unaffected by the material properties (such as heat resistance, curing temperature, etc.) of the adhesive layer compared with the prior art thermally conductive layer with an adhesive layer, and it almost does not contain cavities formed by air. The rotors of the embodiments of the present invention have better thermal conductivity. In addition, since the drive element (such as a motor) of the rotor of the embodiments of the present invention does not need to bear the weight of the adhesive layer, the burden on the drive element can be reduced, and the life of the drive element can be improved. Furthermore, the thermally conductive film layer formed in the embodiments of the present invention includes multiple thermally conductive particles occupying >95% of the volume of the thermally conductive film layer. Therefore, the thermally conductive film layer has better thermal conductivity because it is almost free of impurities.

[0010] To make the above features and advantages of the present invention more apparent and understandable, specific embodiments are described below, and detailed descriptions are provided in conjunction with the accompanying drawings. Attached Figure Description

[0011] Figure 1 This is a flowchart illustrating a method for manufacturing a rotor according to an embodiment of the present invention.

[0012] Figures 2 to 37 A partial cross-sectional schematic diagram of the rotor according to various embodiments of the present invention is shown.

[0013] Figure 38 This is a schematic diagram of a projection device according to an embodiment of the present invention. Detailed Implementation

[0014] Reference will be made in detail to exemplary embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numerals are used in the drawings and description to denote the same or similar parts. The invention may be embodied in various different forms and should not be limited to the embodiments described herein. The thickness of layers and regions in the drawings is enlarged for clarity. The same or similar reference numerals denote the same or similar elements, which will not be repeated in the following paragraphs. Furthermore, directional terms mentioned in the embodiments (e.g., up, down, left, right, front, or back, etc.) refer only to the orientation of the drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the invention.

[0015] Please refer to Figure 1 , Figure 1 This is a flowchart of a method for manufacturing a rotor according to an embodiment of the present invention. In step S10, a substrate is provided. The substrate is made of a material with good thermal conductivity and heat resistance, such as an aluminum alloy.

[0016] In step S20, a thermally conductive film layer is formed on at least one surface of the substrate. In this embodiment, the thermally conductive film layer is formed by contacting multiple thermally conductive particles with the substrate using cold spray or supersonic laser deposition (SLD). The principle of cold spray is to use helium as a carrier gas to supersonically propel thermally conductive particles onto the surface of the substrate at room temperature or near room temperature, allowing the thermally conductive particles to adhere to the substrate and form a thermally conductive film layer. Since step S20 is performed at room temperature or near room temperature, the thermally conductive particles do not melt, and the shape of the desired thermally conductive film layer can be easily controlled. Furthermore, the pressure of the carrier gas used is approximately 0.5 to 1.0 MPa. Due to the impact force provided by the supersonic airflow, there are almost no pores between the thermally conductive particles, resulting in a dense thermally conductive film layer with no space between the particles to accommodate any impurities. Furthermore, supersonic laser deposition (SLAM) is a composite technology process that includes the aforementioned cold spraying method. In SLAM, during the cold spraying process, laser heating is used to spray thermally conductive particles, effectively softening both the particles and the substrate. This enhances the deformability of the particles and substrate, significantly reducing the required deposition rate. Therefore, compared to cold spraying, SLAM can reduce the carrier gas velocity, allowing for greater flexibility in the type of carrier gas used and the operational process. For example, nitrogen or air, excluding helium, can be used as the carrier gas in SLAM. Based on this, those skilled in the art can choose either cold spraying or SLAM to form the thermally conductive film layer depending on the process requirements. In this embodiment, due to the formation of the thermally conductive film layer using the aforementioned cold spraying or supersonic laser deposition method, the multiple thermally conductive particles in the thermally conductive film layer occupy >95% of the volume of the thermally conductive film layer, the purity of the multiple thermally conductive particles included in the thermally conductive film layer is >99.5%, and the thermally conductive film layer has a porosity of <1% and a thermal conductivity of 300–5000 W / m·K. Furthermore, during the cold spraying or supersonic laser deposition process, bonds are formed between the thermally conductive particles or between the thermally conductive particles and the substrate, causing the thermally conductive particles to firmly adhere to the substrate. In some embodiments, the bond strength between the multiple thermally conductive particles or between the thermally conductive particles and the substrate is 10–50 MPa, so that the roller has sufficient adhesion when rotating at high speed.

[0017] In some embodiments, two or more thermally conductive film layers can be formed on a substrate using cold spraying or supersonic laser deposition, wherein the multiple thermally conductive film layers have different types of thermally conductive particles. For example, a first thermally conductive film layer and a second thermally conductive film layer can be sequentially formed on the substrate, wherein the first thermally conductive film layer is closer to the substrate than the second thermally conductive film layer. The thermal conductivity of the formed first and second thermally conductive film layers is also between 300 and 5000 W / m·K. Furthermore, to optimize the thermal conductivity, the thermal conductivity of the first thermally conductive film layer should be lower than that of the second thermally conductive film layer.

[0018] In step S30, an optical layer is formed on the substrate or thermally conductive film layer. In some embodiments, the optical layer may include a reflective layer, a wavelength conversion layer, or a combination thereof, and the present invention is not limited thereto. In some embodiments, the reflective layer is formed by, for example, mixing an adhesive with diffuse reflective particles and coating it onto a forming surface, followed by heating and curing. Additionally, in some embodiments, the wavelength conversion layer is formed on the substrate by, for example, high-temperature sintering of a glass-mixed inorganic fluorescent material, low-temperature sintering of an alcohol-soluble inorganic adhesive mixed with an inorganic fluorescent material, or low-temperature sintering of an aqueous inorganic adhesive mixed with an inorganic fluorescent material. It is intended to be noted that the above-mentioned methods for forming the reflective layer and the wavelength conversion layer are merely examples, and the present invention is not limited thereto.

[0019] Based on the above, since the manufacturing method of the rotor in this embodiment utilizes cold spraying or supersonic laser deposition to form a thermally conductive film layer, the thermally conductive film layer formed by the above process can be firmly attached to the substrate without the need for an adhesive layer, and the formed thermally conductive film layer has a porosity of <1%, resulting in better thermal conductivity compared to the thermally conductive layers of the prior art, as it almost completely eliminates cavities formed by air. Furthermore, the thermally conductive film layer formed in this embodiment includes multiple thermally conductive particles occupying >95% of the volume of the thermally conductive film layer, therefore, the thermally conductive film layer has better thermal conductivity because it almost completely eliminates impurities.

[0020] Figures 2 to 37 Partial cross-sectional schematic diagrams of the impellers according to various embodiments of the present invention are shown. The features of the impellers of the present invention will be described in detail below.

[0021] Please refer to Figure 2 In this embodiment, the rotating wheel 10 includes a substrate 100, a thermally conductive film layer 200a, and an optical layer 110. The rotating wheel 10 may be, for example, a fluorescent wheel or a wavelength conversion element, and the present invention is not limited thereto.

[0022] The substrate 100 is made of a material with good thermal conductivity and heat resistance, for example. In this embodiment, the substrate 100 is made of aluminum alloy. In other embodiments, the substrate 100 has multiple pores and specific porosity and roughness, which will be described in other embodiments below.

[0023] A thermally conductive film layer 200a is disposed on at least one surface of a substrate 100 and in contact with the substrate 100. In this embodiment, the thermally conductive film layer 200a is disposed on the upper surface 100U of the substrate 100 and in contact with the substrate 100. The thermally conductive film layer 200a includes a plurality of thermally conductive particles, which may include, for example, metal particles, inorganic particles, or combinations thereof. In some embodiments, the metal particles include copper particles, silver particles, gold particles, or combinations thereof, and the inorganic particles include graphene particles, diamond particles, or combinations thereof. In this embodiment, the thermally conductive film layer 200a includes a plurality of copper particles with good thermal conductivity, but the present invention is not limited thereto. In addition, the particle size of the plurality of thermally conductive particles may be, for example, 0.005 to 0.05 mm. Furthermore, as described in the foregoing embodiments, the plurality of thermally conductive particles in the thermally conductive film layer 200a occupy, for example, >95% of the volume of the thermally conductive film layer 200a, and the purity of the plurality of thermally conductive particles included in the thermally conductive film layer 200a is >99.5%. Furthermore, the thermally conductive film layer 200a has a porosity of <1% and a thermal conductivity of 300–5000 W / m·K, and the bonding strength between the multiple thermally conductive particles is 10–50 MPa. Since the thermally conductive film layer 200a of this embodiment has a porosity of <1%, there are almost no air cavities, thereby avoiding a decrease in the thermal conductivity of the thermally conductive film layer 200a. In some embodiments, since the thermally conductive film layer 200a can be firmly attached to the substrate 100 without containing an adhesive layer, it is not necessary to form a thinner thermally conductive layer as in the prior art to avoid the problem of poor thermal conductivity caused by the adhesive layer in the thermally conductive layer. The thickness of the thermally conductive film layer 200a of this embodiment ranges from 0.05 to 0.50 mm, and the thermally conductive film layer 200a of this embodiment has good process flexibility. Additionally, in some embodiments, the thermally conductive film layer 200a may have a certain degree of surface roughness to further improve the surface thermal conductivity of the thermally conductive film layer 200a. In this embodiment, the thermally conductive film layer 200a has a maximum height roughness >30μm and an arithmetic mean roughness >5μm.

[0024] An optical layer 110 is disposed, for example, on a substrate 100 or a thermally conductive film layer 200a. In this embodiment, the optical layer 110 is disposed on and in contact with the thermally conductive film layer 200a. In this embodiment, the optical layer 110 includes a reflective layer 112 and a wavelength conversion layer 114, wherein the reflective layer 112 is disposed between the substrate 100 and the wavelength conversion layer 114. In some embodiments, the reflective layer 112 may be a specular reflective layer, and the material of the reflective layer 112 may include silver. In other embodiments, the reflective layer 112 may be a diffuse reflective layer, and the material of the reflective layer 112 may include diffuse reflective particles such as titanium dioxide, zirconium dioxide, or combinations thereof. The reflective layer 112 can be used to reflect light beams passing through the wavelength conversion layer 114 back to the wavelength conversion layer 114, thereby improving the light conversion efficiency of the wavelength conversion layer 114. The wavelength conversion layer 114 may include, for example, a wavelength conversion material and an adhesive, wherein the wavelength conversion material may be an inorganic fluorescent material. In addition, in some embodiments, the wavelength conversion layer 114 may include a first wavelength conversion layer and a second wavelength conversion layer. The first wavelength conversion layer and the second wavelength conversion layer can convert the wavelength of the excitation beam to generate converted beams with different wavelengths. For example, the first wavelength conversion layer can convert a blue light beam emitted by a laser source into a green light beam, and the second wavelength conversion layer can convert a blue light beam emitted by a laser source into a yellow light beam. This invention is not limited thereto.

[0025] In the configuration of the rotor 10 in this embodiment, the thermally conductive film layer 200a and the optical layer 110 are formed on the same surface of the substrate 100 (the upper surface 100U of the substrate 100), and the thermally conductive film layer 200a is disposed between the substrate 100 and the optical layer 110. Therefore, the thermally conductive film layer 200a can accelerate the conduction of heat generated during the operation of the rotor 10, thereby improving the heat dissipation effect of the rotor 10.

[0026] Please refer to Figure 3 , Figure 3 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10a of this embodiment is... Figure 2The difference in the illustrated rotating wheel 10 is that the thermally conductive film layer 200a includes a first thermally conductive film layer 210a and a second thermally conductive film layer 220a, each disposed on the same surface (upper surface 100U of the substrate 100), wherein the first thermally conductive film layer 210a and the second thermally conductive film layer 220a are disposed on the substrate 100 in an order of increasing thermal conductivity. Specifically, the thermally conductive film layer 200a of this embodiment includes two types of thermally conductive particles, wherein the first thermally conductive film layer 210a and the second thermally conductive film layer 220a each include different types of thermally conductive particles. In this embodiment, for the purpose of optimizing the thermal conductivity, the thermal conductivity of the first thermally conductive film layer 210a is less than that of the second thermally conductive film layer 220a. For example, the first thermally conductive film layer 210a may include copper particles, and the second thermally conductive particles may include silver particles. In some embodiments, the volume ratio of the first thermally conductive particles in the first thermally conductive film layer 210a to the second thermally conductive particles in the second thermally conductive film layer 220a is 1:9 to 9:1, preferably 1:9 to 5:5. The multilayer thermally conductive film layer design of this embodiment, in addition to having good thermal conductivity, also improves the adhesion between the substrate 100 and the optical layer 110.

[0027] Please refer to Figure 4 , Figure 4 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10b of this embodiment is... Figure 2 The difference in the illustrated rotor 10 is that the thermally conductive film layer 200b and the optical layer 110 are each disposed on opposite surfaces of the substrate 100. In this embodiment, the thermally conductive film layer 200b is disposed on the lower surface 100D of the substrate 100, and the optical layer 110 is disposed on the upper surface 100U of the substrate 100. Furthermore, in this embodiment, the thermally conductive film layer 200b is distributed across the entire lower surface 100D of the substrate 100. In this embodiment, disposing the thermally conductive film layer 200b on the lower surface 100D of the substrate 100 can improve the convective heat dissipation effect of the rotor 10b. Those skilled in the art can select the desired form of the thermally conductive film layer as appropriate.

[0028] Please refer to Figure 5 , Figure 5 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10c of this embodiment is... Figure 4 The difference in the shown wheel 10b is that the thermal conductive film layer 200b includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on the substrate 100 in such a manner that the thermal conductivity is from low to high.

[0029] Please refer to Figure 6 , Figure 6 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10d of this embodiment is... Figure 2 The difference in the illustrated rotor 10 is that the thermally conductive film layer includes a thermally conductive film layer 200a and a thermally conductive film layer 200b, each disposed on opposite surfaces of the substrate 100, wherein the thermally conductive film layer 200a is located between the substrate 100 and the optical layer 110. In this embodiment, the thermally conductive film layer 200a is disposed on the upper surface 100U of the substrate 100, and the thermally conductive film layer 200b is disposed on the lower surface 100D of the substrate 100. Furthermore, in this embodiment, the thermally conductive film layer 200b is distributed across the entire lower surface 100D of the substrate 100.

[0030] Please refer to Figure 7 , Figure 7 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10e of this embodiment is... Figure 6 The difference in the shown wheel 10d is that the thermal conductive film layer 200b includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on the substrate 100 in such a manner that the thermal conductivity is from low to high.

[0031] Please refer to Figure 8 , Figure 8 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10f of this embodiment is... Figure 2 The difference in the shown wheel 10 is that the thermally conductive film layer 200a in this embodiment is distributed on the upper surface 100U of the entire substrate 100.

[0032] Please refer to Figure 9 , Figure 9 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel of this embodiment weighs 10g and... Figure 3 The difference between the shown wheel 10a is that the first thermally conductive film layer 210a of this embodiment is distributed on the upper surface 100U of the entire substrate 100, and the second thermally conductive film layer 220a is distributed on the surface of the entire first thermally conductive film layer 210a.

[0033] Please refer to Figure 10 , Figure 10 A partial cross-sectional schematic diagram of a rotor according to an embodiment of the present invention is shown. The rotor 10h in this embodiment is... Figure 6 The difference in the shown wheel 10d is that the thermally conductive film layer 200a in this embodiment is distributed on the upper surface 100U of the entire substrate 100.

[0034] Please refer to Figure 11 , Figure 11 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10i of this embodiment is... Figure 10 The difference in the shown wheel 10h is that the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of the substrate 100), wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high.

[0035] Please refer to Figure 12 , Figure 12 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10j of this embodiment is... Figure 10 The difference in the shown wheel 10h is that the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high.

[0036] Please refer to Figure 13 , Figure 13 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10k of this embodiment is... Figure 8 The difference in the shown wheel 10f is that the reflective layer 112 in this embodiment is distributed on the entire surface of the thermally conductive film layer 200a.

[0037] Please refer to Figure 14 , Figure 14 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 101 of this embodiment and... Figure 13 The difference in the shown wheel 10k is that the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of the substrate 100), wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high.

[0038] Please refer to Figure 15 , Figure 15 A partial cross-sectional schematic diagram of a rotor according to an embodiment of the present invention is shown. The rotor 10m in this embodiment is... Figure 13 The difference shown in the rotating wheel 10k is that the thermally conductive film layer 200b in this embodiment is disposed on the lower surface 100D of the substrate 100.

[0039] Please refer to Figure 16 , Figure 16 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10n of this embodiment is... Figure 15 The difference in the shown wheel 10m is that the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high.

[0040] Please refer to Figure 17 , Figure 17 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10o of this embodiment is... Figure 10 The difference between the rotating wheel 10h shown is that the reflective layer 112 in this embodiment is distributed on the entire surface of the thermally conductive film layer 200a.

[0041] Please refer to Figure 18 , Figure 18 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10p of this embodiment is... Figure 17 The difference in the shown wheel 10o is that the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of the substrate 100), wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high.

[0042] Please refer to Figure 19 , Figure 19 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10q of this embodiment is... Figure 17 The difference in the shown wheel 10o is that the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on the substrate 100 in such a way that their thermal conductivity ranges from low to high.

[0043] Please refer to Figure 20 , Figure 20 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10r of this embodiment is... Figure 2The difference in the illustrated rotating wheel 10 is that the surface of the substrate 100 has a plurality of pores 100H. In this embodiment, a plurality of pores 100H are formed on the upper surface 100U of the substrate 100. The substrate 100 may have, for example, a porosity of 30 to 50%, and the depth of the plurality of pores 100H is, for example, 20 to 60 μm. In addition, a thermally conductive film layer 200a disposed on and in contact with the substrate 100 can fill the pores 100H of the substrate 100. Based on this, since the thermally conductive film layer 200a can fill the pores 100H of the substrate 100 and penetrate into the interior of the substrate 100, the design of having a plurality of pores 100H on the surface of the substrate 100 in this embodiment can further improve the thermal conductivity.

[0044] Please refer to Figure 21 , Figure 21 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10s of this embodiment is... Figure 20 The difference in the shown wheel 10r is that: the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of the substrate 100), wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high, and the first thermal conductive film layer 210a fills the pores 100H of the substrate 100.

[0045] Please refer to Figure 22 , Figure 22 A partial cross-sectional schematic diagram of a rotor according to an embodiment of the present invention is shown. The rotor 10t of this embodiment and... Figure 20 The difference between the shown rotating wheel 10r and the one shown is that a plurality of pores 100H are formed on the lower surface 100D of the substrate 100, while no pores are formed on the upper surface 100U of the substrate 100. In addition, in this embodiment, a thermally conductive film layer 200b is disposed on the lower surface 100D of the substrate 100 and fills the pores 100H of the substrate 100, wherein the thermally conductive film layer 200b is distributed on the entire lower surface 100D of the substrate 100.

[0046] Please refer to Figure 23 , Figure 23 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10u of this embodiment is... Figure 22 The difference in the shown wheel 10t is that: the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of substrate 100) of substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on substrate 100 in such a way that the thermal conductivity is from low to high, and the first thermal conductive film layer 210b fills the pores 100H of substrate 100.

[0047] Please refer to Figure 24 , Figure 24 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. In this embodiment, the rotating wheel 10v and... Figure 20 The difference between the illustrated roller 10r and the roller 10v is that: in this embodiment, a plurality of pores 100H are also formed on the lower surface 100D of the substrate 100, and the roller 10v also includes a thermally conductive film layer 200b disposed on the lower surface 100D of the substrate 100. In this embodiment, the thermally conductive film layer 200b can fill the pores 100H of the substrate 100, and the thermally conductive film layer 200b is distributed on the entire lower surface 100D of the substrate 100.

[0048] Please refer to Figure 25 , Figure 25 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. In this embodiment, the rotating wheel 10w and... Figure 24 The difference in the shown wheel 10v is that the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of substrate 100) of substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on substrate 100 in such a way that their thermal conductivity is from low to high, and the first thermal conductive film layer 210b fills the pores 100H of substrate 100.

[0049] Please refer to Figure 26 , Figure 26 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10x of this embodiment is... Figure 20 The difference shown in the rotating wheel 10r is that the thermally conductive film layer 200a in this embodiment is distributed on the upper surface 100U of the entire substrate 100.

[0050] Please refer to Figure 27 , Figure 27 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. In this embodiment, the rotating wheel 10y and... Figure 26 The difference in the shown wheel 10x is that the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high, and the first thermal conductive film layer 210a fills the pores 100H of the substrate 100.

[0051] Please refer to Figure 28 , Figure 28A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10z of this embodiment is... Figure 26 The difference between the illustrated rotating wheel 10x and the traditional rotating wheel 10v is that the substrate 100 in this embodiment also has a plurality of pores 100H formed on its lower surface 100D, and the rotating wheel 10v also includes a thermally conductive film layer 200b disposed on the lower surface 100D of the substrate 100. The thermally conductive film layer 200b in this embodiment can fill the pores 100H of the substrate 100, and the thermally conductive film layer 200b is distributed on the entire lower surface 100D of the substrate 100.

[0052] Please refer to Figure 29 , Figure 29 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10za of this embodiment is... Figure 28 The difference in the shown wheel 10z is that the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high, and the first thermal conductive film layer 210a fills the pores 100H of the substrate 100.

[0053] Please refer to Figure 30 , Figure 30 A partial cross-sectional schematic diagram of a rotor according to an embodiment of the present invention is shown. The rotor 10zb of this embodiment is... Figure 28 The difference in the shown wheel 10z is that the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of substrate 100) of substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on substrate 100 in such a way that their thermal conductivity is from low to high, and the first thermal conductive film layer 210b fills the pores 100H of substrate 100.

[0054] Please refer to Figure 31 , Figure 31 A partial cross-sectional schematic diagram of a rotor according to an embodiment of the present invention is shown. The rotor 10zc of this embodiment is... Figure 20 The difference between the shown wheel 10r is that the thermally conductive film layer 200a in this embodiment is distributed on the upper surface 100U of the entire substrate 100, and the reflective layer 112 is distributed on the entire thermally conductive film layer 200a.

[0055] Please refer to Figure 32 , Figure 32 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10zd of this embodiment is... Figure 31The difference in the shown wheel 10zc is that the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of substrate 100) of substrate 100, wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on substrate 100 in such a way that their thermal conductivity is from low to high, and the first thermal conductive film layer 210a fills the pores 100H of substrate 100.

[0056] Please refer to Figure 33 , Figure 33 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10ze of this embodiment is... Figure 31 The difference in the illustrated rotating wheel 10zc is that a plurality of pores 100H are formed on the lower surface 100D of the substrate 100, while no pores are formed on the upper surface 100U of the substrate 100. Furthermore, in this embodiment, a thermally conductive film layer 200b is disposed on the lower surface 100D of the substrate 100 and fills the pores 100H of the substrate 100, wherein the thermally conductive film layer 200b is distributed across the entire lower surface 100D of the substrate 100.

[0057] Please refer to Figure 34 , Figure 34 A partial cross-sectional schematic diagram of a rotor according to an embodiment of the present invention is shown. The rotor 10zf of this embodiment is... Figure 33 The difference in the shown wheel 10ze is that the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of substrate 100) of substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on substrate 100 in such a way that their thermal conductivity is from low to high, and the first thermal conductive film layer 210b fills the pores 100H of substrate 100.

[0058] Please refer to Figure 35 , Figure 35 A partial cross-sectional schematic diagram of a rotor according to an embodiment of the present invention is shown. The rotor 10zg of this embodiment is... Figure 31 The difference between the shown rotating wheel 10zc and the one shown is that: in this embodiment, a plurality of pores 100H are also formed on the lower surface 100D of the substrate 100, and the rotating wheel 10v also includes a thermally conductive film layer 200b disposed on the lower surface 100D of the substrate 100. In this embodiment, the thermally conductive film layer 200b can fill the pores 100H of the substrate 100, and the thermally conductive film layer 200b is distributed on the entire lower surface 100D of the substrate 100.

[0059] Please refer to Figure 36 , Figure 36A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10zh of this embodiment is... Figure 35 The difference in the shown wheel 10zg is that the thermal conductive film layer 200a in this embodiment includes a first thermal conductive film layer 210a and a second thermal conductive film layer 220a respectively disposed on the same surface (upper surface 100U of the substrate 100) of the substrate 100, wherein the first thermal conductive film layer 210a and the second thermal conductive film layer 220a are disposed on the substrate 100 in such a way that the thermal conductivity is from low to high, and the first thermal conductive film layer 210a fills the pores 100H of the substrate 100.

[0060] Please refer to Figure 37 , Figure 37 A partial cross-sectional schematic diagram of a rotating wheel according to an embodiment of the present invention is shown. The rotating wheel 10zi of this embodiment is... Figure 35 The difference in the shown wheel 10zg is that the thermal conductive film layer 200b in this embodiment includes a first thermal conductive film layer 210b and a second thermal conductive film layer 220b respectively disposed on the same surface (lower surface 100D of substrate 100) of substrate 100, wherein the first thermal conductive film layer 210b and the second thermal conductive film layer 220b are disposed on substrate 100 in such a way that their thermal conductivity is from low to high, and the first thermal conductive film layer 210b fills the pores 100H of substrate 100.

[0061] Figure 38 This is a schematic diagram of a projection device according to an embodiment of the present invention.

[0062] Please refer to Figure 38 The projection device 1 in this embodiment includes a light source module 12, a rotating wheel 10, a light valve 14, and a projection lens 16.

[0063] The light source module 12 is used to provide the excitation beam L1. In this embodiment, the light source module 12 includes a laser light source, such as a laser diode (LD), a light-emitting diode (LED), or other suitable light sources or combinations thereof. The excitation beam L1 may include ultraviolet light, blue light, or a combination thereof, but the invention is not limited thereto.

[0064] In some embodiments, the rotating wheel 10 may be a phosphor wheel. The rotating wheel 10 is disposed on the transmission path of the excitation beam L1, and the rotating wheel 10 enters the transmission path of the excitation beam L1 sequentially. In one sequence, the excitation beam L1 is incident on the wavelength conversion layer 114 of the rotating wheel 10 (shown in…). Figures 2-37The excitation beam L1 is converted into a conversion beam F. In another sequence, the rotating wheel 10 guides the excitation beam L1 to the light valve 14. In other words, the conversion beam F and the excitation beam L1 form an illumination beam L1' which is sequentially transmitted from the rotating wheel 10 to the light valve 14. The relative positions and functions of the components included in the rotating wheel 10 can be referred to in the above embodiments, and will not be repeated here. In addition, the rotating wheel 10 may also be the rotating wheels 10a to 10zi described in other embodiments, and the present invention is not limited thereto.

[0065] In some embodiments, the projection device 1 may further include a beam splitting unit (not shown) disposed between the light source module 12 and the rotating wheel 10. In other words, the beam splitting unit is, for example, configured in the transmission path of the excitation beam L1. The beam splitting unit includes elements that can separate the beam. For example, the beam splitting unit can allow a blue light beam to pass through while providing a reflection effect on beams of other colors. In this embodiment, the beam splitting unit allows the blue excitation beam L1 to pass through, so that the excitation beam L1 can pass through the beam splitting unit and be incident on the rotating wheel 10. The illumination beam L1' exiting the rotating wheel 10 includes the excitation beam L1 generated in a time sequence and the conversion beam F.

[0066] A light valve 14 is disposed in the transmission path of the illumination beam L1' and is used to convert the illumination beam L1' into an image beam L2. In some embodiments, the light valve 14 is, for example, a reflective light modulator such as a liquid crystal on silicon panel (LCoS panel) or a digital micro-mirror device (DMD). In other embodiments, the light valve 14 is, for example, a transmissive light modulator such as a transparent liquid crystal panel, an electro-optic modulator, a magneto-optic modulator, or an acousto-optic modulator (AOM), and the present invention is not limited thereto.

[0067] The projection lens 16 is disposed in the transmission path of the image beam L2 and is used to project the image beam L2 out of the projection device 1. In some embodiments, the projection lens 16 includes, for example, a combination of one or more optical lenses with refractive power, such as various combinations of non-planar lenses such as biconcave lenses, biconvex lenses, concave-convex lenses, convex-concave lenses, plano-convex lenses, and plano-concave lenses. In other embodiments, the projection lens 16 may also include planar optical lenses, and the present invention is not limited thereto. Based on this, the projection lens 16 can convert the image beam L2 from the light valve 14 into a projection beam L3 and project it out of the projection device 1 in a reflective or penetrating manner.

[0068] In summary, the embodiments of the present invention have at least one of the following advantages or effects. Since the manufacturing method of the rotor in the embodiments of the present invention utilizes cold spraying or supersonic laser deposition to form a thermally conductive film layer, the thermally conductive film layer formed by the above process can be firmly attached to the substrate without an adhesive layer. Furthermore, the porosity of the formed thermally conductive film layer is <1%, making it less affected by the material properties (such as heat resistance, curing temperature, etc.) of the adhesive layer compared to existing thermally conductive layers with adhesive layers, and it almost completely eliminates cavities formed by air. Therefore, the rotors in the embodiments of the present invention have better thermal conductivity. In addition, since the drive element of the rotor in the embodiments of the present invention does not need to bear the weight of the adhesive layer, the burden on the drive element can be reduced, and the lifespan of the drive element can be increased. Moreover, the thermally conductive film layer formed in the embodiments of the present invention comprises multiple thermally conductive particles occupying >95% of the volume of the thermally conductive film layer, therefore the thermally conductive film layer is almost free of impurities and thus has better thermal conductivity.

[0069] The above description is merely a preferred embodiment of the present invention and should not be construed as limiting the scope of the invention. Any simple equivalent changes and modifications made in accordance with the claims and specification of the present invention still fall within the scope of this patent. Furthermore, any embodiment or claim of the present invention does not need to achieve all the objectives, advantages, or features disclosed in the present invention. In addition, the abstract and title of the invention are used only to assist in patent document retrieval and are not intended to limit the scope of the invention. Moreover, the terms "first," "second," etc., mentioned in this specification or claims are only used to name elements or distinguish different embodiments or scopes, and are not used to limit the upper or lower limit of the number of elements.

[0070] List of reference numerals

[0071] 1: Projection device

[0072] 10, 10a, 10b, 10c, 10d, 10e, 10f, 10g, 10h, 10i, 10j, 10k, 10l, 10m, 10n, 10o, 10p, 10q, 10r, 10s, 10t, 10u, 10v, 10w, 10x, 10y, 10z, 10za, 10zb, 10zc, 10zd, 10ze, 10zf, 10zg, 10zh, 10zi: Rotary Wheel

[0073] 12: Light source module

[0074] 14: Light valve

[0075] 16: Projection lens

[0076] 100:Substrate

[0077] 100D: Lower surface of the substrate

[0078] 100H: Porosity

[0079] 100U: Top surface of the substrate

[0080] 110: Optical layer

[0081] 112: Reflective layer

[0082] 114: Wavelength conversion layer

[0083] 200a, 200b: Thermal conductive film layer

[0084] 210a, 210b: First thermally conductive film layer

[0085] 220a, 220b: Second thermally conductive film layer

[0086] L1: Excitation beam

[0087] L1': illumination beam

[0088] L2: Image Beam

[0089] L3: Projection beam

[0090] F: Conversion beam

[0091] S10, S20, S30: Steps.

Claims

1. A method for manufacturing a rotary wheel, characterized in that, The manufacturing method includes: Provide substrate; and A thermally conductive film layer is formed on at least one surface of the substrate, wherein the thermally conductive film layer is formed by contacting the substrate with a plurality of thermally conductive particles using a cold spraying method or a supersonic laser deposition method, wherein the plurality of thermally conductive particles occupy >95% of the volume of the thermally conductive film layer, and the thermally conductive film layer has a porosity of <1%, the thermally conductive film layer includes first thermally conductive particles and second thermally conductive particles, and the volume ratio of the first thermally conductive particles to the second thermally conductive particles is 1:9 to 9:1; and An optical layer is formed on the substrate or the thermally conductive film layer.

2. The method for manufacturing the impeller according to claim 1, characterized in that, The thermally conductive film layer and the optical layer are formed on the same surface of the substrate, and the thermally conductive film layer is disposed between the substrate and the optical layer.

3. The method for manufacturing the impeller according to claim 1, characterized in that, The thermally conductive film layer and the optical layer are each formed on opposite surfaces of the substrate.

4. The method for manufacturing the impeller according to claim 1, characterized in that, The thermally conductive film layer includes a first thermally conductive film layer and a second thermally conductive film layer each formed on opposite surfaces of the substrate, and the first thermally conductive film layer is disposed between the substrate and the optical layer.

5. The method for manufacturing the impeller according to claim 1, characterized in that, Multiple thermally conductive film layers are formed on at least one surface of the substrate, and each of the multiple thermally conductive film layers is formed on the substrate in such a manner that the thermal conductivity ranges from low to high.

6. A rotary wheel, characterized in that, The rotating wheel includes a substrate, a thermally conductive film layer, and an optical layer, wherein: The thermally conductive film layer is disposed on at least one surface of the substrate and in contact with the substrate. The thermally conductive film layer comprises a plurality of thermally conductive particles, and the plurality of thermally conductive particles occupy >95% of the volume of the thermally conductive film layer. The thermally conductive film layer has a porosity of <1%. The thermally conductive film layer includes first thermally conductive particles and second thermally conductive particles, and the volume ratio of the first thermally conductive particles to the second thermally conductive particles is 1:9 to 9:

1. The optical layer is disposed on the substrate or the thermally conductive film layer.

7. The impeller according to claim 6, characterized in that, The thermally conductive film layer and the optical layer are disposed on the same surface of the substrate, and the thermally conductive film layer is located between the substrate and the optical layer.

8. The impeller according to claim 6, characterized in that, The thermally conductive film layer and the optical layer are each disposed on opposite surfaces of the substrate.

9. The impeller according to claim 6, characterized in that, The thermally conductive film layer includes a first thermally conductive film layer and a second thermally conductive film layer respectively disposed on opposite surfaces of the substrate, and the first thermally conductive film layer is located between the substrate and the optical layer.

10. The impeller according to claim 6, characterized in that, The multiple thermally conductive film layers are disposed on at least one surface of the substrate, and each layer of the multiple thermally conductive film layers is disposed on the substrate in such a manner that the thermal conductivity ranges from low to high.

11. The impeller according to claim 6, characterized in that, The plurality of thermally conductive particles in the thermally conductive film layer include metal particles, inorganic particles, or combinations thereof.

12. The impeller according to claim 11, characterized in that, The metal particles include copper particles, silver particles, gold particles, or combinations thereof, and the inorganic particles include graphene particles, diamond particles, or combinations thereof.

13. The impeller according to claim 6, characterized in that, The purity of the plurality of thermally conductive particles included in the thermally conductive film layer is >99.5%.

14. The impeller according to claim 6, characterized in that, The thermal conductivity of the thermally conductive film is 300~5000 W / m·K.

15. The impeller according to claim 6, characterized in that, The bonding strength between the plurality of thermally conductive particles is 10~50 MPa.

16. The impeller according to claim 6, characterized in that, The substrate has multiple pores on its surface, the depth of which is 20-60 μm, and the substrate has a porosity of 30-50%, and the thermally conductive film fills the multiple pores.

17. The impeller according to claim 6, characterized in that, The particle size of the plurality of thermally conductive particles is 0.005~0.05mm.

18. The impeller according to claim 6, characterized in that, The thermally conductive film layer has a maximum height roughness >30μm and an arithmetic mean roughness >5μm.

19. A projection device, characterized in that, The projection device includes a light source module, a rotating wheel, a light valve, and a projection lens, wherein: The light source module is used to provide an excitation beam; The rotating wheel is disposed on the transmission path of the excitation beam, wherein the rotating wheel includes a substrate, a thermally conductive film layer, and an optical layer, wherein: The thermally conductive film layer is disposed on at least one surface of the substrate and in contact with the substrate. The thermally conductive film layer comprises a plurality of thermally conductive particles, and the plurality of thermally conductive particles occupy >95% of the volume of the thermally conductive film layer. The thermally conductive film layer has a porosity of <1%. The thermally conductive film layer includes first thermally conductive particles and second thermally conductive particles, and the volume ratio of the first thermally conductive particles to the second thermally conductive particles is 1:9 to 9:

1. The optical layer is disposed on the substrate or the thermally conductive film layer, wherein the excitation beam incident on the optical layer is converted into a converted beam. The optical valve is disposed on the transmission path of the excitation beam and the conversion beam, and the optical valve is used to convert the excitation beam and the conversion beam into an image beam; and The projection lens is positioned on the transmission path of the image beam, and the projection lens is used to project the image beam outside the projection device.

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