Silicon carbide multi-wire cutting cooling system, cutting device and method

Abstract

The present invention relates to the field of semiconductor processing, and in particular to a silicon carbide multi-wire cutting cooling system, a cutting device and a method, wherein the cooling system includes a mortar barrel for storing mortar, and the mortar barrel is provided with an ultrasonic transmitter for releasing ultrasonic waves to the mortar; a conveying system, including a mortar pump and a conveying pipeline for pumping mortar inside the mortar barrel, and a nozzle assembly connected to the conveying pipeline for spraying the silicon carbide cutting surface; a cutting chamber, which is provided with a cutting cavity for cutting silicon carbide, and the cutting chamber is connected to the mortar barrel, so that the mortar can be recovered. The present invention provides an ultrasonic transmitter on the mortar barrel, so that the solid abrasive in the mortar liquid can be evenly dispersed in the mortar liquid, preventing it from being deposited at the bottom of the mortar barrel and causing pipeline blockage, while improving the cooling effect during the cutting process.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing, and in particular to a silicon carbide multi-wire cutting cooling system, a cutting device and a method. Background Art

[0002] The existing multi-wire cutting method specifically used for solid materials, such as silicon, silicon carbide, aluminum oxide, diamond and other hard and brittle crystalline materials, generally comprises the following steps: the cutting wires are arranged into a certain wire mesh through a groove wheel, the cutting wires are moved at high speed to perform cutting motion, so that the solid material to be cut contacts with the cutting wire mesh on the cutting side, and the cutting of the solid material to be cut is achieved through the cutting force of the cutting wire itself or the cutting action of the abrasive slurry carried by the cutting wire. The cutting process is cooled by water or coolant.

[0003] In the cooling system of the prior art multi-wire cutting device, during operation, the solid abrasive in the mortar liquid is easily deposited at the bottom of the mortar barrel due to its high density, resulting in a reduction in the cutting efficiency of solid materials due to the low content of solid abrasive after the clear liquid on the upper layer of the mortar liquid is extracted and sprayed on the cutting surface. At the same time, when the lower layer of the mortar liquid is extracted, the high content of solid abrasive easily blocks the pipeline, reducing the flow rate of the sprayed mortar liquid during the cooling process, thereby reducing the cooling speed of the cutting surface. Summary of the invention

[0004] The present invention aims to overcome the defects in the prior art that the cooling system of the multi-wire cutting device is prone to solid abrasive deposition, resulting in reduced cutting efficiency and clogging of pipelines, and provides a silicon carbide multi-wire cutting cooling system, cutting device and method.

[0005] To achieve the above-mentioned purpose, the present invention is implemented by the following technical solutions:

[0006] In a first aspect, the present invention first provides a silicon carbide multi-wire cutting cooling system.

[0007] A mortar bucket is included, which is used to store mortar, and an ultrasonic transmitter is provided on the mortar bucket for releasing ultrasonic waves to the mortar;

[0008] A conveying system, comprising a mortar pump and a conveying pipeline for pumping mortar in a mortar barrel, and also comprising a nozzle assembly connected to the conveying pipeline for spraying the cut surface of silicon carbide;

[0009] A cutting chamber is provided inside which is used for cutting silicon carbide. The cutting chamber is connected with a mortar barrel so that the mortar can be recovered.

[0010] The silicon carbide multi-wire cutting cooling system of the present invention is mainly provided with an ultrasonic transmitter on the mortar barrel, and the ultrasound can directly act on the mortar liquid, thereby forming a vibrating environment inside the mortar barrel, so that the solid abrasive in the mortar liquid can be evenly dispersed in the mortar liquid, preventing it from being deposited at the bottom of the mortar barrel, so that the solid abrasive in the mortar liquid can smoothly enter the cutting surface during the extraction of the mortar liquid, thereby playing an auxiliary role in the cutting of silicon carbide. At the same time, the evenly dispersed mortar liquid is not easy to be deposited in the pipeline, reducing the problem of pipeline blockage and improving the cooling effect on the cutting surface.

[0011] Preferably, the bottom of the mortar bucket is provided with supporting feet, and the ultrasonic transmitter is arranged at the bottom center of the mortar bucket.

[0012] Preferably, the delivery pipeline includes an output pipe connected to the mortar pump for outputting the mortar; and

[0013] Input pipe for connecting the cutting chamber to the mortar bucket.

[0014] Preferably, a collecting portion for collecting mortar is provided at the bottom of the cutting chamber, and the collecting portion is communicated with the input pipe.

[0015] Preferably, a gas circulation cooling device is provided on the side of the cutting chamber, which includes a circulation pipeline for circulating the gas inside the cutting chamber, a fan for driving the gas flow inside the circulation pipeline is provided inside the circulation pipeline, and a heat exchanger is also provided inside the circulation pipeline;

[0016] A plurality of metal heat sinks are arranged in the middle of the cutting chamber.

[0017] The present invention is provided with a gas circulation cooling device on the side of the cutting chamber, which can circulate and cool the air inside the cutting chamber under the action of the fan and the heat exchanger, thereby cooling the sprayed mortar.

[0018] Preferably, the mortar barrel comprises a main barrel and a secondary barrel connected thereto;

[0019] The input pipe is connected to the auxiliary cylinder;

[0020] The mortar pump is connected to the main cylinder.

[0021] Preferably, the nozzle assembly comprises a connecting pipe for being connected in series with the output pipe, a tee is provided at the end of the connecting pipe, two spray pipes are connected to the tee, and a spray head is provided at the end of the spray pipe.

[0022] In a second aspect, the present invention further provides a silicon carbide multi-wire cutting device, which comprises the silicon carbide multi-wire cutting cooling system as described above.

[0023] Preferably, it comprises a workbench, which is arranged on the top of the cutting chamber and can adjust the height up and down, and the end of the workbench is fixedly connected to the silicon carbide crystal to be cut;

[0024] A cutting roller assembly is arranged inside the cutting chamber;

[0025] It also includes a cutting wire group, which includes a wire supply wheel, a wire take-up wheel and a cutting wire matched with the wire supply wheel and the wire take-up wheel. The cutting wire passes through the cutting chamber and is wound around the outside of the cutting roller group to form multiple cutting surfaces, thereby cutting the silicon carbide crystal.

[0026] Preferably, the workbench includes a base and a lifting mechanism disposed on the base, and a fixing device for fixing the silicon carbide crystal to be cut is disposed at the end of the lifting mechanism;

[0027] The cutting line assembly also includes a plurality of tensioning wheels arranged outside the cutting chamber for adjusting the direction and tension of the cutting line.

[0028] In a third aspect, the present invention further provides a silicon carbide multi-wire cutting method, which is based on the above-mentioned device and comprises the following steps:

[0029] (S.1) Fix the workpiece to be cut on the workbench;

[0030] (S.2) injecting mortar liquid into the mortar bucket and starting the ultrasonic transmitter;

[0031] (S.3) starting the cutting wire assembly so that the wire supply wheel and the wire take-up wheel drive the cutting wire to move;

[0032] (S.4) The worktable is gradually moved downward so that the silicon carbide crystal contacts the cutting line, thereby cutting the workpiece to be cut, and mortar liquid is sprayed on the cutting surface through the nozzle assembly.

[0033] (S.5) Cutting completed.

[0034] Therefore, the present invention has the following beneficial effects:

[0035] (1) The present invention provides an ultrasonic transmitter on the mortar barrel so that the solid abrasive in the mortar liquid can be evenly dispersed in the mortar liquid, thereby preventing the solid abrasive from being deposited at the bottom of the mortar barrel and causing pipeline blockage;

[0036] (2) Improved cooling effect during cutting. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic structural diagram of a silicon carbide multi-wire cutting cooling system provided by the present invention.

[0038] Figure 2 A schematic structural diagram of a silicon carbide multi-wire cutting device provided by the present invention.

[0039] Among them: mortar barrel 100, main cylinder 101, auxiliary cylinder 102, ultrasonic transmitter 110, support leg 120, conveying system 200, mortar pump 210, conveying pipeline 220, output pipe 221, input pipe 222, nozzle assembly 230, connecting pipe 231, three-way pipe 232, spray pipe 233, spray head 234, cutting chamber 300, cutting chamber 310, gas circulation cooling device 320, circulation pipeline 330, air intake section 331, Air outlet section 332, fan 340, heat exchanger 350, metal heat sink 360, cutting assembly 400, workbench 410, pedestal 411, lifting mechanism 412, fixing device 413, silicon carbide crystal 420, cutting roller group 430, upper roller 431, lower roller 432, cutting wire group 500, wire supply wheel 510, wire take-up wheel 520, cutting wire 530, tensioning wheel 540, wire guide wheel 550, linear guide rail 560, driving assembly 570. DETAILED DESCRIPTION

[0040] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments of the specification. Those of ordinary skill in the art will be able to implement the present invention based on these descriptions. In addition, the embodiments of the present invention involved in the following description are generally only embodiments of a part of the present invention, rather than all embodiments. Therefore, based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work should fall within the scope of protection of the present invention.

[0041] Example 1

[0042] like Figure 1~2 As shown, this embodiment provides a silicon carbide multi-wire cutting device, which mainly includes a cutting component 400, a cutting wire group 500 used to cooperate with the cutting component 400 to cut the silicon carbide crystal 420, and a silicon carbide multi-wire cutting cooling system for cooling the cutting surface during the cutting process.

[0043] Wherein: the silicon carbide multi-wire cutting cooling system includes a mortar barrel 100 for storing mortar, which includes a main cylinder 101 and a secondary cylinder 102 connected thereto, and a plurality of legs 120 surrounding the main cylinder 101 and supporting it are arranged at the bottom of the main cylinder 101, and an ultrasonic transmitter 110 that can release ultrasonic waves to the mortar inside the mortar barrel 100 is also arranged at the bottom center of the mortar barrel 100, and the ultrasonic waves generated by the ultrasonic transmitter 110 can directly act on the mortar, thereby forming a vibrating environment inside the mortar barrel 100, so that the solid abrasive in the mortar can be evenly dispersed in the mortar, and prevented from being deposited at the bottom of the mortar barrel 100, so that the solid abrasive in the mortar can smoothly enter the cutting surface during the extraction of the mortar, thereby playing an auxiliary role in the cutting of silicon carbide. At the same time, the evenly dispersed mortar liquid is not easy to be deposited in the pipeline, which reduces the problem of pipeline blockage and improves the cooling effect on the cutting surface.

[0044] The silicon carbide multi-wire cutting cooling system also includes a conveying system 200 for conveying and collecting the mortar inside the mortar barrel 100, which includes a mortar pump 210 for pumping the mortar inside the mortar barrel 100 to the cutting surface, which is connected to the main cylinder 101 of the mortar barrel 100. It also includes a conveying pipeline 220 for conveying mortar, which is connected to the mortar pump 210 and an output pipe 221 for outputting mortar.

[0045] A nozzle assembly 230 for spraying the silicon carbide cutting surface is provided at the end of the output pipe 221. The nozzle assembly 230 includes a connecting pipe 231 for being connected in series with the output pipe 221. A tee pipe 232 for diverting the mortar is provided at the end of the connecting pipe 231. Two spray pipes 233 are also connected to the tee pipe 232. A spray head 234 is provided at the end of the spray pipe 233 for spraying and cooling the cutting surface.

[0046] In order to recover the mortar sprayed from the spray head 234, the cooling system in this embodiment also includes a cutting chamber 300, which is provided with a cutting cavity 310 for cutting silicon carbide. The bottom of the cutting chamber 300 is provided with a collecting portion 130 for collecting the mortar. The bottom of the collecting portion 130 is connected to an input pipe 222, which is connected to the auxiliary cylinder 102 of the mortar barrel 100, so that the mortar can circulate in the cooling system.

[0047] In addition, during the process of circulating cooling of the cutting surface by the mortar, its own temperature will slowly increase, resulting in a decrease in the cooling effect on the cutting surface. In order to prevent the temperature of the mortar itself from rising, a gas circulation cooling device 320 is deliberately provided on the side of the cutting chamber 300 in this embodiment, which specifically includes a circulation pipeline 330 for circulating the gas inside the cutting chamber 300, and the circulation pipeline 330 includes an air inlet section 331 located above the cutting chamber 300 and an air outlet section 332 located below the cutting chamber 300, wherein the air inlet section 331 is provided with a fan 340 for introducing the air above the cutting chamber 300 into the circulation pipeline 330 and driving the air to flow out from the air outlet section 332, and a heat exchanger 350 is provided between the air inlet section 331 and the air outlet section 332 for exchanging heat with the external environment to reduce the air flow temperature inside the air outlet section 332.

[0048] In order to further enhance the cooling effect on the mortar, a plurality of metal heat sinks 360 are specially arranged in the middle of the cutting chamber 300 in the present embodiment. When the mortar sprayed from the nozzle assembly 230 falls onto the metal heat sink 360, it will spread out along the metal heat sink 360 and slowly fall. At this time, the cold air flowing out from the air outlet section 332 can cool down the mortar on the surface of the metal heat sink 360.

[0049] The cutting assembly 400 described in this embodiment specifically includes a workbench 410 disposed on the top of the cutting chamber 300 and capable of adjusting the height up and down, which includes a base 411 and a lifting mechanism 412 disposed on the base 411. The lifting mechanism 412 can be any one of a hydraulic lifting cylinder, a pneumatic lifting cylinder, and a lead screw, and can be flexibly selected according to actual usage. The end of the lifting mechanism 412 is provided with a fixing device 413 for fixing the silicon carbide crystal 420 to be cut, thereby preventing the silicon carbide crystal 420 to be cut from falling during the cutting process. When the lifting mechanism 412 is started, the silicon carbide crystal 420 to be cut can move downward, thereby gradually completing the cutting.

[0050] A cutting roller group 430 for winding a cutting line 530 is also provided inside the cutting chamber 300. The cutting roller group 430 is composed of two upper rollers 431 in the same horizontal position and a lower roller 432 located below the upper roller 431. An inverted triangle structure is formed between the two upper rollers 431 and the lower roller 432. When the cutting line 530 is wound around the surface of the cutting roller group 430, a cutting area for cutting the silicon carbide crystal 420 is formed between the two upper rollers 431.

[0051] The cutting wire group 500 includes a wire supply wheel 510, a wire take-up wheel 520 and a cutting wire 530 matched with the wire supply wheel 510 and the wire take-up wheel 520, which are arranged outside the cutting chamber 300. The cutting wire 530 passes through the cutting chamber 300 and is wound around the outer side of the cutting roller group 430 to form a plurality of cut surfaces, thereby cutting the silicon carbide crystal 420. The number of wafers formed after cutting the silicon carbide crystal 420 and the thickness of the wafer are determined by the number of turns of the cutting wire 530 wound around the cutting roller group 430 and the spacing between the cutting wires 530.

[0052] In order to better control the cutting effect of the cutting line 530 on the workpiece 130, in this embodiment, it is also necessary to add several tensioning wheels 540 outside the cutting chamber 300 for adjusting the direction and tension of the cutting line 530, so that the tightness of the cutting line can be controlled according to different cutting processes.

[0053] At the same time, in order to assist the supply wheel 510 and the take-up wheel 520 in supplying and releasing the wire, a wire wheel 550 is added to the cutting wire group 500 in the present embodiment. The wire wheel 550 can move horizontally during the supply and release process to prevent the cutting wire 530 from getting tangled. The horizontal movement can be achieved by a linear guide rail 560 and a drive assembly 570 adapted to the guide rail 560. The drive assembly 570 can be a motor or a belt connected to the wire wheel. There are many ways to achieve this function, which are not listed here one by one.

[0054] Example 2

[0055] A silicon carbide multi-wire cutting method, based on the device described in Example 1, comprises the following steps:

[0056] S.1 Fix the workpiece to be cut on the fixing device 413 of the workbench 400;

[0057] S.2 injecting mortar liquid into the mortar bucket 100 and starting the ultrasonic transmitter 110;

[0058] S.3: Start the cutting line assembly 500 so that the supply wheel 510 and the take-up wheel 520 drive the cutting line 530 to move, and adjust the tension of the cutting line 530 by adjusting the tension wheel 540;

[0059] S.4: gradually moving the workbench 410 downward so that the silicon carbide crystal 420 contacts the cutting line 530, thereby cutting the workpiece to be cut, and spraying mortar liquid on the cutting surface through the nozzle assembly 230;

[0060] S.5 cutting is completed.

Claims

1. A silicon carbide multi-wire cutting cooling system, characterized in that: It comprises a mortar bucket (100) for storing mortar, wherein the mortar bucket (100) is provided with an ultrasonic transmitter (110) for releasing ultrasonic waves into the mortar; The delivery system (200) comprises a mortar pump (210) for pumping mortar inside the mortar barrel (100) and a delivery pipeline (220), and also comprises a nozzle assembly (230) connected to the delivery pipeline (220) for spraying the silicon carbide cutting surface; A cutting chamber (300) having a cutting cavity (310) for cutting silicon carbide disposed therein, wherein the cutting chamber (300) is connected to a mortar barrel (100) so that the mortar can be recovered; A gas circulation cooling device (320) is provided on the side of the cutting chamber (300), which specifically comprises a circulation pipeline (330) for circulating the gas inside the cutting chamber (300), the circulation pipeline (330) comprising an air inlet section (331) located above the cutting chamber (300) and an air outlet section (332) located below the cutting chamber (300), wherein a fan (340) is provided inside the air inlet section (331) for introducing the air above the cutting chamber (300) into the circulation pipeline (330) and driving the air to flow out from the air outlet section (332), and a heat exchanger (350) is provided between the air inlet section (331) and the air outlet section (332) for exchanging heat with the external environment so as to reduce the air flow temperature inside the air outlet section (332); A plurality of metal heat sinks (360) are arranged in the middle of the cutting chamber (300), and the cold air flowing out of the air outlet section (332) can cool the mortar on the surface of the metal heat sinks (360).

2. A silicon carbide multi-wire cutting cooling system according to claim 1, characterized in that: A support foot (120) is provided at the bottom of the mortar bucket (100), and the ultrasonic transmitter (110) is arranged at the center of the bottom of the mortar bucket (100).

3. The silicon carbide multi-wire cutting cooling system according to claim 1, characterized in that: The delivery pipeline (220) comprises an output pipe (221) connected to the mortar pump (210) and used for outputting mortar; and An input pipe (222) is used to connect the cutting chamber (300) to the mortar bucket (100).

4. A silicon carbide multi-wire cutting cooling system according to claim 3, characterized in that: The nozzle assembly (230) comprises a connecting pipe (231) for being connected in series with the output pipe (221); a three-way pipe (232) is provided at the end of the connecting pipe (231); two spray pipes (233) are also connected to the three-way pipe (232); and a spray head (234) is provided at the end of the spray pipe (233).

5. The silicon carbide multi-wire cutting cooling system according to claim 4, characterized in that: A collecting portion (130) for collecting mortar is provided at the bottom of the cutting chamber (300), and the collecting portion (130) is communicated with the input pipe (222).

6. A silicon carbide multi-wire cutting device, characterized in that: It comprises the silicon carbide multi-wire cutting cooling system as described in any one of claims 1 to 5.

7. The silicon carbide multi-wire cutting device according to claim 6, characterized in that: include A cutting assembly (400), comprising a workbench (410) arranged on the top of a cutting chamber (300) and capable of adjusting the height up and down, the end of the workbench (410) being fixedly connected to a silicon carbide crystal (420) to be cut, and a cutting roller group (430) arranged inside the cutting chamber (300); A cutting wire assembly (500) comprises a wire supply wheel (510), a wire take-up wheel (520) arranged outside a cutting chamber (300), and a cutting wire (530) matched with the wire supply wheel (510) and the wire take-up wheel (520); the cutting wire (530) passes through the cutting chamber (300) and is wound around the outside of a cutting roller assembly (430) to form a plurality of cut surfaces, thereby cutting a silicon carbide crystal (420).

8. The silicon carbide multi-wire cutting device according to claim 7, characterized in that: The workbench (410) comprises a base (411) and a lifting mechanism (412) arranged on the base (411); a fixing device (413) for fixing the silicon carbide crystal (420) to be cut is arranged at the end of the lifting mechanism (412); The cutting line assembly (500) further comprises a plurality of tensioning wheels (540) arranged outside the cutting chamber (300) for adjusting the direction and tension of the cutting line (530).

9. A silicon carbide multi-wire cutting method, characterized in that: It is based on the device described in any one of claims 6 to 8, and comprises the following steps: (S.1) Fixing the silicon carbide crystal (420) to be cut on the workbench (410); (S.2) injecting mortar liquid into the mortar barrel (100) and activating the ultrasonic transmitter (110); (S.3) starting the cutting line assembly (500) so that the supply wheel (510) and the take-up wheel (520) drive the cutting line (530) to move; (S.4) gradually moving the workbench (410) downward so that the silicon carbide crystal (420) contacts the cutting line (530), thereby cutting the silicon carbide crystal (420) to be cut, and spraying mortar liquid on the cutting surface through the nozzle assembly (230). (S.5) Cutting completed.

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