Evaporator device for electron beam evaporation melting

Abstract

The present invention discloses an evaporator device for electron beam evaporation melting, comprising a support assembly, a water-cooled baffle assembly, a pole shoe assembly, an aperture assembly, a heat shield assembly and a crucible assembly; the water-cooled baffle assembly is arranged above the support assembly, the crucible assembly is arranged in the middle of the water-cooled baffle assembly; the aperture assembly is arranged at the top edge of the water-cooled baffle assembly; the heat shield assembly is arranged around the crucible assembly; the pole shoe assembly is arranged in a water-cooled box of the water-cooled baffle assembly. The present invention centrally integrates the functions of the device, adopts a modular design, takes the entire device as a vacuum-sealed boundary, integrates equipment such as a crucible, an electromagnetic deflection device, and a water cooling system, and significantly improves the scope of application, operability, and maturity of the device while ensuring functionality.

Description

Technical Field

[0001] The invention belongs to the field of electron beam melting and electron beam evaporation, and in particular relates to a special evaporator device for electron beam evaporation melting. Background Art

[0002] Electron beam melting refers to the use of electron flow emitted from the surface of the heated cathode under vacuum to generate high-speed motion under the action of a high-voltage electric field, and through focusing and deflection, the high-speed electron flow is accurately directed to the crucible, and the kinetic energy of the high-speed electrons is converted into heat energy to be absorbed by the material in the crucible, so that the material metal is melted. The equipment involved in the electron beam melting process mainly includes electron guns, vacuum systems, water-cooled crucibles, water cooling systems, electromagnetic deflection devices, etc. The electron gun, as a heat source, provides energy for the melting and evaporation of the material. The vacuum system provides the required environment for the operation of the equipment. As the direct carrier of the material, the crucible needs to ensure sufficient strength and accurately position and cooperate with the electron gun in the vacuum chamber so that the electron beam bombards the appropriate position of the material to heat and evaporate it. The water cooling system can take away the excess heat accumulated in the environment during the melting process to ensure the long-term stable operation of the device. The electromagnetic deflection device provides a uniform magnetic field on the path of the electron beam trajectory, so that the electron beam deflects according to the pre-set trajectory and runs stably into the crucible molten pool. Therefore, there are many equipment involved in the electron beam melting process, which require close cooperation with each other.

[0003] The electron gun, crucible, electromagnetic deflection device, and water cooling system of the currently used special smelting devices are mostly dispersed, the device interface matching dimensions are complex, and the required equipment space is also large. Most of the devices are rigidly fixed, and the equipment repair and maintenance are difficult. The equipment cannot meet the use of materials with special properties, such as radioactivity, highly toxicity, etc., and related post-processing operations cannot be performed manually. Summary of the invention

[0004] The object of the present invention is to provide a special evaporator device for electron beam evaporation melting to solve one or more of the above-mentioned technical problems.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] An evaporator device for electron beam evaporation melting includes a support assembly, a water-cooled baffle assembly arranged above the support assembly, a crucible assembly arranged in the middle of the water-cooled baffle assembly; an aperture assembly arranged at the top edge of the water-cooled baffle assembly; a heat shield assembly arranged around the crucible assembly; and a pole shoe assembly forming a uniform magnetic field in the crucible assembly area.

[0007] In the above technical solution, the support assembly includes a bottom flange, a plurality of support tubes and a plurality of height adjustment columns are arranged on the top surface of the bottom flange, and the support tubes are arranged on the periphery of the height adjustment columns; a plurality of support bases are arranged on the bottom surface of the bottom flange; and a cross-shaped positioning groove is formed on the bottom surface of the bottom flange.

[0008] In the above technical solution, the water-cooling baffle assembly includes a water-cooling baffle, a flange pipe and a water channel connecting pipe; the water-cooling baffle includes a table plate with a crucible assembly mounting hole formed in the middle, two water-cooling boxes are arranged on the top of the table plate, and water tanks No. Ⅰ and No. Ⅱ are arranged on the bottom; the flange pipe is arranged at the bottom of the table plate and is coaxial with the crucible assembly mounting hole, and the water channel connecting pipe is arranged at the bottom of the water-cooling baffle to realize one-way connection between the two water-cooling boxes, water tank No. Ⅰ and water tank No. Ⅱ.

[0009] In the above technical solution, water cooling box mounting holes are formed on both sides of the crucible assembly mounting hole, and multiple through electrode mounting holes are formed on the outside of one water cooling box mounting hole; a sealing frame mounting groove is formed on the top edge of the table.

[0010] In the above technical solution, the water cooling box is a hollow sandwich structure composed of two waterway plate assemblies that are relatively buckled together. The waterway plate assembly includes a waterway plate and a waterway cover plate. A serpentine waterway groove is formed on one side of the waterway plate. The waterway cover plate is welded and fixed to the side of the waterway plate where the waterway groove is provided. Two water holes are provided at the bottom of the waterway plate.

[0011] In the above technical scheme, the pole shoe assembly includes a magnetic field mechanism and a fixing mechanism. The magnetic field mechanism includes an iron core rod, a magnetic field coil sleeved on the outside of the iron core rod, a left iron plate and a right iron plate. One end of the left iron plate and the right iron plate are sleeved on the two ends of the iron core rod, and the other end is set in the water cooling box; the fixing mechanism includes a left bracket, a right bracket and a left fixing frame and a right fixing frame. One end of the left bracket and the right bracket is fixed to the corresponding iron plate, and the other end is fixed to the bottom of the table plate; the left and right ends of the iron core rod are respectively inserted into the left fixing frame and the right fixing frame, and the left fixing frame and the right fixing frame are fixed to the bottom of the table plate.

[0012] In the above technical solution, the heat shielding assembly is a multi-layer shielding structure formed by a plurality of curved molybdenum plates arranged in parallel and at intervals, and the plurality of curved molybdenum plates are fixed by a plurality of connectors evenly distributed along the edges; a through hole is formed in the middle of the curved molybdenum plate, and a mounting ring is arranged at the bottom of the bottommost curved molybdenum plate, and the mounting ring is fixed to the plurality of curved molybdenum plates by bolts.

[0013] In the above technical solution, the connecting member includes a screw and a plurality of spacer molybdenum rings arranged thereon, the number of the spacer molybdenum rings is the same as the number of the curved molybdenum plates, and a spacer molybdenum ring is arranged at the bottom of each curved molybdenum plate.

[0014] In the above technical solution, the crucible assembly is arranged in the crucible assembly installation hole in the middle of the table; the crucible assembly includes a metal crucible forming a material pool in the top center and a fixed flange ring arranged at the bottom of the metal crucible; a crucible sealing ring is formed at the lower end of the metal crucible, and the crucible sealing ring is supported by the fixed flange ring so that it is pressed against the knife-edge sealing surface of the flange pipe; the fixed flange ring and the flange pipe are fixedly connected by screws; the water inlet and return pipes of the metal crucible are arranged under the table.

[0015] The above technical scheme also includes multiple through-electrode flanges, bellows and water-electricity quick-plug assemblies; the through-electrode flanges are installed in the through-electrode installation holes of the table top, and the water-electricity quick-plug assemblies are fixed to the bottom of the table top; the water channel connecting the water pipes and the water inlet and outlet of the crucible assembly are connected to the water-electricity quick-plug assembly through the bellows, and the evaporator device circuit is connected to the water-electricity quick-plug assembly through the joint of the through-electrode flange, so as to realize the connection and disconnection of the device water channel and circuit with the outside world as a whole.

[0016] The beneficial effects of the present invention are:

[0017] The present invention provides a special evaporator device for electron beam evaporation and melting. After the evaporator device is assembled, it is a modular whole. According to specific needs, the overall transfer, positioning and installation of the device can be realized. The functionality of the device is highly concentrated. The equipment has main functions such as electron beam trajectory detection, magnetic field deflection, melting crucible, water cooling components, etc., and can cooperate with external automation equipment to realize the lifting, transportation, docking and other operations of the evaporator device. The layout form is suitable for the melting of some special materials, which are not easy for people to operate at close range. The device has concentrated functions and can be transferred to a specific workstation for operation by an external manipulator or through a glove box. The relative positions of the crucible and the pole shoe components can be changed according to the actual use scenarios to achieve different melting requirements. The structural layout is reasonable, the device itself serves as a vacuum sealed boundary, and the water channel layout is all facing the atmosphere side, thereby ensuring the safety of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A three-dimensional diagram of an evaporator device for electron beam evaporation melting according to the present invention;

[0019] Figure 2 A partial cross-sectional view of an evaporator device for electron beam evaporation melting according to the present invention;

[0020] Figure 3 It is a structural schematic diagram of the support assembly in the present invention;

[0021] Figure 4 It is a structural schematic diagram of the bottom flange of the present invention;

[0022] Figure 5 It is a structural schematic diagram of the support base in the present invention;

[0023] Figure 6 It is a schematic diagram of the structure of the height adjustment column in the present invention;

[0024] Figure 7 It is a structural schematic diagram of the water-cooling baffle assembly in the present invention (front view);

[0025] Figure 8 It is a structural schematic diagram of the water-cooling baffle assembly in the present invention (looking from above);

[0026] Fig. 9 It is a structural schematic diagram of the table plate in the present invention (main viewing angle);

[0027] Fig.10 It is a structural schematic diagram of the tabletop in the present invention (looking from above);

[0028] Fig.11 It is a structural schematic diagram of the waterway plate assembly in the present invention;

[0029] Fig.12 It is a schematic diagram of the structure of the waterway plate in the present invention;

[0030] Fig.13 It is a structural schematic diagram of the waterway cover plate in the present invention;

[0031] Fig.14 This is the structural intention of the flange pipe in the present invention;

[0032] Fig.15 It is a schematic diagram of the partial structure of the water channel connected to the water pipe in the present invention;

[0033] Fig.16 This is a schematic diagram of the water circulation of the water-cooling baffle assembly in the present invention;

[0034] Fig.17 It is a schematic diagram of the structure of the pole shoe assembly in the present invention;

[0035] Fig.18 is a schematic structural diagram of the aperture assembly in the present invention;

[0036] Fig.19 It is a schematic diagram of the structure of the heat shielding assembly in the present invention;

[0037] Fig. 20 It is a schematic structural diagram of the crucible assembly in the present invention;

[0038] Fig.21 It is a schematic diagram of the structure of the water channel inside the metal crucible of the present invention;

[0039] Fig. 22 It is a schematic diagram of the connection structure of the evaporator assembly in the present invention.

[0040] in:

[0041] 1 Support assembly 2 Water cooling baffle assembly

[0042] 3 Pole shoe assembly 4 Aperture assembly

[0043] 5 Heat shield assembly 6 Crucible assembly

[0044] 7 Bottom flange 8 Support pipe

[0045] 9 Support base 10 Height adjustment column

[0046] 11 Positioning slot 12 Bottom flange mounting pin hole

[0047] 13 Support base positioning pin 14 Adjustment seat

[0048] 15 Locking nut 16 Adjusting screw

[0049] 17 Left-hand nut 18 Adjusting nut

[0050] 19 Water cooling baffle 20 Flange pipe

[0051] 21 Water channel connection pipe 22 Table

[0052] 23 Water cooling box 24 No. Ⅰ water tank

[0053] 25 No. Ⅱ water tank 26 Water cooling box installation hole

[0054] 27 Crucible assembly mounting hole 28 Through electrode mounting hole

[0055] 32 Sealing frame installation slot

[0056] 33 water channel plate 34 water channel cover

[0057] 35 Water hole 36 Water pipe

[0058] 37 Knife edge flange 38 Left iron plate

[0059] 39 right iron plate 40 left bracket

[0060] 41 Right bracket 42 Left fixing bracket

[0061] 43 right fixing bracket 44 iron core rod

[0062] 45 Magnetic field coil 46 Aperture bracket

[0063] 47 Aperture box 48 Upper aperture plate

[0064] 49 Left aperture plate 50 Right aperture plate

[0065] 51 Lower aperture plate 52 Ceramic fixing strip

[0066] 53 screw 54 curved molybdenum plate

[0067] 55 Mounting ring 56 Spacer molybdenum ring

[0068] 57 Metal crucible 58 Sealing flange

[0069] 59 Fixed flange ring 60 Crucible sealing ring

[0070] 61 Water barrier 62 Through electrode flange

[0071] 63 Bellows 64 Water and electricity quick plug assembly

[0072] 65 Water channel.

[0073] For ordinary technicians in this field, other relevant drawings can be obtained based on the above drawings without any creative work. DETAILED DESCRIPTION

[0074] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0075] like Figure 1 , 2 As shown, an evaporator device for electron beam evaporation melting includes a support assembly 1, a water-cooled baffle assembly 2, a pole shoe assembly 3, an aperture assembly 4, a heat shield assembly 5 and a crucible assembly 6;

[0076] The water-cooled baffle assembly 2 is arranged above the support assembly 1, and the crucible assembly 6 is arranged in the middle of the water-cooled baffle assembly 2; the aperture assembly 4 is arranged at the top edge of the water-cooled baffle assembly 2; the heat shielding assembly 5 is arranged around the crucible assembly 6; the left iron plate 38 and the right iron plate 39 of the pole shoe assembly 3 are arranged in the water cooling box of the water-cooled baffle assembly 2.

[0077] like Figure 3 As shown, the support assembly 1 includes a bottom flange 7 , a plurality of support tubes 8 and a plurality of height adjustment columns 10 are arranged on the top surface of the bottom flange 7 , and a plurality of support bases 9 are arranged on the bottom surface of the bottom flange 7 .

[0078] The support tubes 8 are used to bear the bottom flange 7 and the upper structure. In this embodiment, four support tubes 8 are provided and are arranged at the four corners of the top surface of the bottom flange 7 . The tops of the support tubes 8 are fixed to the table 22 .

[0079] like Figure 4As shown, the bottom flange 7 is a plate-like structure, which plays a role of fixed connection. The bottom flange 7 is formed with screw holes for connecting the corresponding support tube 8 and the height adjustment column 10, as well as a bottom flange mounting pin hole 12 for connecting with the support base 9.

[0080] In this embodiment, in order to facilitate the transportation and movement of the entire evaporation device, external automated equipment can be used for insertion and removal, a cross-shaped positioning groove 11 is formed on the bottom surface of the bottom flange 7, and the positioning groove 11 is a through groove.

[0081] like Figure 5 As shown, the support base 9 is a cylindrical structure, with a fixed flange formed at the bottom and a support base positioning pin 13 formed at the top. The support base positioning pin 13 cooperates with the bottom flange mounting pin hole 12 on the bottom flange 7 to achieve positioning.

[0082] In this embodiment, four support bases 9 are provided and are arranged at four corners of the bottom surface of the bottom flange 7 .

[0083] like Figure 6 As shown, the height adjustment column 10 includes an adjustment screw 16, one end of which is connected to the adjustment seat 14, and the other end is connected to the adjustment nut 18. The adjustment screw 16 and the adjustment seat 14 are fastened by a locking nut 15, and the adjustment screw 16 and the adjustment nut 18 are fastened by a left-handed nut 17. The height adjustment can be achieved by the adjustment screw 16 and the adjustment nut 18, and the fastening at the required height is achieved by the locking nut 15 and the left-handed nut 17. A boss for connecting with the bottom flange 7 is formed at the bottom of the adjustment seat 14. The height adjustment column 10 is used to provide auxiliary support force, and its top contacts the bottom surface of the table 22 to achieve auxiliary support for the upper structure.

[0084] In this embodiment, four height adjustment columns 10 are provided and are arranged in the middle of the bottom flange 7 and are evenly distributed in a quadrilateral shape.

[0085] like Figure 7 , 8 As shown, the water-cooling baffle assembly 2 includes a water-cooling baffle 19, a flange pipe 20 and a water channel connecting pipe 21; the flange pipe 20 is arranged in the middle of the water-cooling baffle 19 and is welded and fixed to the water-cooling baffle 19, and the water channel connecting pipe 21 is arranged at the bottom of the water-cooling baffle 19 to realize the circulation connection between the two water-cooling boxes 23, the No. Ⅰ water tank 24 and the No. Ⅱ water tank 25.

[0086] The water cooling baffle 19 includes a table 22, a water cooling box 23, a water tank No. I 24 and a water tank No. II 25. The water cooling box 23 is arranged on the top of the table 22. Both the water tank No. I 24 and the water tank No. II 25 are concave structures and are welded and fixed to the bottom of the table 22. While increasing the heat dissipation area, it also plays a role in water cooling cycle transition.

[0087] like Fig. 9, 10 As shown, the table 22 is a key component of the whole device, which is the boundary of the vacuum. The top of the table 22 is the vacuum side, and the bottom is the atmosphere side. At the same time, the table 22 is also the transition for the installation and connection of various components. The table 22 is a plate-like structure, with a crucible assembly mounting hole 27 formed in the middle, and water cooling box mounting holes 26 formed on both sides of the crucible assembly mounting hole 27. A plurality of through electrode mounting holes 28 are formed on the outside of one of the water cooling box mounting holes 26; the bottom of the table 22 is respectively formed with a support tube mounting screw hole, a pole shoe assembly mounting screw hole, and a water and electricity quick plug plate mounting positioning hole. The crucible assembly mounting hole 27 is a stepped through hole, with the upper part being the small diameter end and the lower part being the large diameter end.

[0088] In this embodiment, in order to ensure the vacuum degree of the vacuum area and facilitate the installation of the sealing frame, a sealing frame installation groove 32 is formed on the top edge of the table 22 .

[0089] like Figures 11 to 13 As shown, the water cooling box 23 is a hollow sandwich structure composed of two water channel plate assemblies that are relatively buckled together, and the hollow part is the installation gap of the pole shoe assembly 3.

[0090] The waterway plate assembly includes a waterway plate 33 and a waterway cover plate 34. A serpentine waterway groove 65 is formed on one side of the waterway plate 33. The waterway cover plate 34 is welded and fixed to one side of the waterway plate 33 where the waterway groove 65 is provided. A water hole 35 is provided at the bottom of the waterway plate 33. There are two water holes 35, one for water inlet and one for water outlet. The two water holes 35 are connected end to end with the waterway groove 65.

[0091] like Fig.13 As shown, the flange tube 20 is welded and fixed in the crucible assembly mounting hole 27 in the middle of the table 22. The end face of the flange tube 20 is provided with a knife-edge sealing surface, and screw mounting holes are evenly distributed along the circumference for sealing and positioning the crucible assembly 6.

[0092] like Fig.14As shown, the water channel connecting water pipe 21 includes a water pipe 36 and a knife-edge flange 37 arranged at the free end of the water pipe 36, the knife-edge flange 37 is connected to the bellows, and the water pipe 36 is composed of multiple sections to achieve the connection between the two water cooling boxes 23, the No. Ⅰ water tank 24 and the No. Ⅱ water tank 25, so as to achieve a complete water circulation. The water pipe 36 has different structural sizes, and its function is to achieve water circulation, and any arrangement that can achieve circulation is acceptable. In this embodiment, the water pipe 36 is composed of seven sections: the first section of the water pipe is a water inlet pipe, one end of which is provided with a knife-edge flange 37, which is connected to the bellows, and the other end is connected to the water inlet hole of the first water channel plate of the first water cooling box; the second section of the water pipe is connected between the water outlet hole of the first water channel plate of the first water cooling box and the water inlet of the second water channel plate of the first water cooling box; the third section of the water pipe is connected between the water outlet of the second water channel plate of the first water cooling box and the water inlet of the No. Ⅱ water tank 25; the fourth section of the water pipe The water pipe is connected between the outlet of the water tank 25 No. Ⅱ and the water inlet of the first waterway plate of the second water cooling box; the fifth section of the water pipe is connected between the outlet of the first waterway plate of the second water cooling box and the water inlet of the second waterway plate of the second water cooling box; the sixth section of the water pipe is connected between the outlet of the second waterway plate of the second water cooling box and the water inlet of the water tank Ⅰ 24; one end of the seventh section of the water pipe is connected to the outlet of the water tank Ⅰ 24, and the other end is provided with a knife-edge flange 37 and connected to the bellows. Thus, the following is formed: Fig.16 The circulating water circuit of the water-cooled baffle assembly shown enters from the water inlet pipe, passes through the water channel connecting pipe, the first water cooling box, the No. 2 water tank, the second water cooling box, the No. 1 water tank, and the water channel connecting pipe in sequence, forming a circulating pipeline as a whole. The transition between the various parts is achieved by the special-shaped jump pipe water pipe.

[0093] like Fig.17 As shown, the pole shoe assembly 3 includes a magnetic field mechanism and a fixing mechanism, and the magnetic field mechanism includes an iron core rod 44, a magnetic field coil 45 sleeved on the outside of the iron core rod 44, a left iron plate 38 and a right iron plate 39, and one end of the left iron plate 38 and the right iron plate 39 is sleeved on both ends of the iron core rod 44, and one end is set in the water cooling box 23. By energizing the magnetic field coil 45, a uniform magnetic field is formed between the left iron plate 38 / the right iron plate 39 through the strengthening effect of the iron core rod 44 to achieve the deflection of the electron beam direction, and the shape of the iron plate can be adjusted according to the needs to change the angle of the electron beam deflection.

[0094] The fixing mechanism includes a left bracket 40, a right bracket 41, a left fixing frame 42, and a right fixing frame 43. One end of the left bracket 40 and the right bracket 41 are fixed to the corresponding iron plate, and the other end is fixed to the bottom of the table 22. The left and right ends of the iron core rod 44 are respectively inserted into the left fixing frame 42 and the right fixing frame 43, and the left fixing frame 42 and the right fixing frame 43 are fixed to the bottom of the table 22. The fixing mechanism is used to realize the installation and positioning of the pole shoe assembly to ensure the relative position relationship between the pole shoe assembly and the crucible assembly.

[0095] like Fig.18 As shown, the aperture assembly 4 includes an aperture bracket 46, an aperture box 47, an aperture plate, and a ceramic fixing strip 52. The aperture plates include an upper aperture plate 48, a lower aperture plate 51, a left aperture plate 49, and a right aperture plate 50. The deflection of the electron beam is monitored on the electron beam trajectory. The upper, lower, left, and right aperture plates form a square channel. The spatial plane of the channel is perpendicular to the electron beam trajectory. If the electron beam deflects in a certain direction, the value of the electrical signal received by the aperture plate in that direction will increase, so as to qualitatively judge the degree of deflection of the electron beam. The electrical signals of each aperture plate are connected to the outside through the through electrode. The specific structure of the aperture assembly 4 is the same as that of Patent 202011464100.1.

[0096] like Fig.19 As shown, the heat shielding assembly 5 includes a plurality of curved molybdenum plates 54, which are arranged in parallel and spaced apart to form a multi-layer shielding structure, and the plurality of curved molybdenum plates 54 are fixed by a plurality of connectors evenly distributed along the edges; the connectors include a screw 53 and a plurality of spacer molybdenum rings 56 arranged thereon, and the number of the spacer molybdenum rings 56 is the same as the number of the curved molybdenum plates 54, and a spacer molybdenum ring 56 is arranged at the bottom of each curved molybdenum plate 54, so that the plurality of curved molybdenum plates 54 are arranged in parallel and spaced apart.

[0097] A through hole is formed in the middle of the curved molybdenum plate 54, and a mounting ring 55 is arranged at the bottom of the bottommost curved molybdenum plate 54. The mounting ring 55 is coaxial with the through hole, and the mounting ring 55 is fixed to the multiple curved molybdenum plates 54 by bolts; the inner diameter of the mounting ring 55 is matched with the outer diameter of the crucible assembly 6 for installation and fixation, and can be used to fix the heat shielding assembly while increasing the contact area with the crucible, which is beneficial to heat dissipation.

[0098] like Fig. 20 , 21 As shown, the crucible assembly 6 is arranged in the crucible assembly installation hole 27 in the middle of the table 22; the crucible assembly 6 includes a metal crucible 57 with a material pool formed in the top center and a fixed flange ring 59 arranged at the bottom of the metal crucible 57; a crucible sealing ring 60 is formed at the lower end of the metal crucible 57, and the crucible sealing ring 60 is supported by the fixed flange ring 59 so that it is pressed against the knife edge sealing surface of the flange tube 20 to achieve vacuum sealing. The fixed flange ring 59 is fixedly connected to the flange tube 20 by screws. The material pool end of the metal crucible 57 is arranged on the vacuum side of the table 22, and it does not use welding, only the shape is machined, and the rest retains the original forged copper entity.

[0099] The metal crucible 57 is a single-way waterway with double-layer serpentine circulation in the inner and outer circles. The waterway spacing is achieved by two types of water-blocking columns. The inner and outer waterways of the crucible copper body are CNC-machined, and the water-blocking column installation holes are reserved. The water-blocking column 61 and the installation hole are gap-matched. The rotation of the water-blocking column 61 in the installation hole does not affect the flow rate, and can increase the heat exchange area. The inlet and return pipe interface of the metal crucible 57 and the sealing flange 58 of the circulating waterway are both on the atmospheric side of the platen 22. The internal waterway structure of the metal crucible 57 is similar to Patent 201710692689.2.

[0100] like Fig. 22 As shown, the special evaporator device for electron beam evaporation melting also includes a plurality of through-electrode flanges 62, bellows 63 and water-electric quick-plug components 64; the through-electrode flanges 62 are installed in the through-electrode installation holes 28 of the table 22, and the water-electric quick-plug components 64 are fixed to the bottom of the table 22; the water channel connecting the water pipe 21 and the water inlet and outlet of the crucible assembly 6 are connected to the water-electric quick-plug components 64 through the bellows 63, that is, the water channel of the evaporator assembly is connected to the water-electric quick-plug components 64 through the bellows 63, and the circuit of the evaporator assembly is connected to the water-electric quick-plug components through the joint of the through-electrode flange 62, so as to realize the connection and disconnection of the water channel and circuit of the device with the outside world as a whole.

[0101] The evaporator device of the present invention has highly concentrated structural functionality. After assembly, it can be moved and installed according to experimental needs. It solves the smelting problems of some special materials, such as radioactivity or toxicity, which cannot be operated by people at close range during actual post-processing. The modular design of the device of the present invention has concentrated functions, which is convenient for peripheral equipment to lift and move the device, and use specific means to post-process the materials. The device itself serves as a vacuum boundary, and its internal circulating water channels all rush to the atmosphere side, ensuring the safety of the device, and water leakage will not affect the interior of the vacuum chamber. The device can be used in conjunction with an electron gun to achieve smelting and purification of materials. The device can be expanded according to needs, and the sizes of the crucible assembly, pole shoe assembly, and water cooling assembly can be changed. The core does not change the similar spatial layout.

[0102] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention shall fall within the protection scope and disclosure scope of the present invention.

Claims

1. An evaporator device for electron beam evaporation melting, characterized in that: It comprises a support assembly (1), a water-cooled baffle assembly (2) arranged above the support assembly (1), a crucible assembly (6) arranged in the middle of the water-cooled baffle assembly (2); an aperture assembly (4) arranged at the top edge of the water-cooled baffle assembly (2); a heat shield assembly (5) arranged around the crucible assembly (6); and a pole shoe assembly (3) forming a uniform magnetic field in the crucible assembly (6) region. The support assembly (1) comprises a bottom flange (7), a plurality of support tubes (8) and a plurality of height adjustment columns (10) are arranged on the top surface of the bottom flange (7), and the support tubes (8) are arranged on the periphery of the height adjustment columns (10); a plurality of support bases (9) are arranged on the bottom surface of the bottom flange (7); and a cross-shaped positioning groove (11) is formed on the bottom surface of the bottom flange (7); The water-cooling baffle assembly (2) comprises a water-cooling baffle (19), a flange pipe (20) and a water channel connecting pipe (21); the water-cooling baffle (19) comprises a table (22) with a crucible assembly mounting hole (27) formed in the middle, two water-cooling boxes (23) are arranged on the top of the table (22), and a No. I water tank (24) and a No. II water tank (25) are arranged on the bottom; the flange pipe (20) is arranged at the bottom of the table (22) and is coaxial with the crucible assembly mounting hole (27), and the water channel connecting pipe (21) is arranged at the bottom of the water-cooling baffle (19) to achieve one-way communication between the two water-cooling boxes (23), the No. I water tank (24) and the No. II water tank (25); Water cooling box mounting holes (26) are formed on both sides of the crucible assembly mounting hole (27), and a plurality of through electrode mounting holes (28) are formed on the outside of one of the water cooling box mounting holes (26); a sealing frame mounting groove (32) is formed on the top edge of the table plate (22); The water cooling box (23) is a hollow sandwich structure formed by two water channel plate assemblies buckled relative to each other, the water channel plate assembly comprising a water channel plate (33) and a water channel cover plate (34), a water channel groove (65) in a serpentine layout is formed on one side of the water channel plate (33), the water channel cover plate (34) is welded and fixed to the side of the water channel plate (33) provided with the water channel groove (65), and two water holes (35) are provided at the bottom of the water channel plate (33); The device also includes a plurality of through-electrode flanges (62), bellows (63) and water and electricity quick plug assemblies (64); the through-electrode flanges (62) are installed in the through-electrode installation holes (28) of the table (22), and the water and electricity quick plug assemblies (64) are fixed to the bottom of the table (22); the water channel connecting the water pipe (21) and the water inlet and outlet of the crucible assembly (6) are connected to the water and electricity quick plug assemblies (64) through the bellows (63); the circuit of the evaporator device is connected to the water and electricity quick plug assemblies through the joint of the through-electrode flange (62), so that the water channel and circuit of the device are connected and disconnected with the outside world as a whole.

2. The evaporator device for electron beam evaporation melting according to claim 1, characterized in that: The pole shoe assembly (3) comprises a magnetic field mechanism and a fixing mechanism, wherein the magnetic field mechanism comprises an iron core rod (44), a magnetic field coil (45) sleeved on the outside of the iron core rod (44), a left iron plate (38) and a right iron plate (39), wherein one end of the left iron plate (38) and the right iron plate (39) are sleeved on the two ends of the iron core rod (44), and the other end is arranged in the water cooling box (23); the fixing mechanism comprises a left bracket (40), a right bracket (41) and a left fixing frame (42), and a right fixing frame (43), wherein one end of the left bracket (40) and the right bracket (41) are fixed to the corresponding iron plate, and the other end is fixed to the bottom of the table plate (22); the left and right ends of the iron core rod (44) are respectively inserted into the left fixing frame (42) and the right fixing frame (43), and the left fixing frame (42) and the right fixing frame (43) are fixed to the bottom of the table plate (22).

3. The evaporator device for electron beam evaporation melting according to claim 1, characterized in that: The heat shielding assembly (5) is a multi-layer shielding structure formed by a plurality of curved molybdenum plates (54) arranged in parallel and at intervals, and the plurality of curved molybdenum plates (54) are fixed by a plurality of connecting pieces evenly distributed along the edges; a through hole is formed in the middle of the curved molybdenum plate (54), and a mounting ring (55) is provided at the bottom of the bottommost curved molybdenum plate (54), and the mounting ring (55) is fixed to the plurality of curved molybdenum plates (54) by bolts.

4. The evaporator device for electron beam evaporation melting according to claim 3, characterized in that: The connecting member comprises a screw rod (53) and a plurality of spacer molybdenum rings (56) arranged thereon, the number of the spacer molybdenum rings (56) being the same as the number of the curved molybdenum plates (54), and a spacer molybdenum ring (56) is arranged at the bottom of each curved molybdenum plate (54).

5. The evaporator device for electron beam evaporation melting according to claim 1, characterized in that: The crucible assembly (6) is arranged in a crucible assembly mounting hole (27) in the middle of the table (22); the crucible assembly (6) comprises a metal crucible (57) forming a material pool at the center of the top, and a fixed flange ring (59) arranged at the bottom of the metal crucible (57); a crucible sealing ring (60) is formed at the lower end of the metal crucible (57), and the crucible sealing ring (60) is supported by the fixed flange ring (59) so as to be pressed against the knife-edge sealing surface of the flange pipe (20); the fixed flange ring (59) and the flange pipe (20) are fixedly connected by screws; and the water inlet and return pipes of the metal crucible (57) are arranged below the table (22).

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