Conveying device

Abstract

The present disclosure relates to the technical field of semiconductor, and provides a transfer device, which comprises a base, a mechanical arm arranged on the base and formed with a clamping space for grabbing a workpiece, and a fixing assembly arranged on the mechanical arm and comprising a telescopic piece telescopically arranged relative to the mechanical arm and formed with a circumferential closed space for wrapping the workpiece to fix the workpiece. The workpiece is clamped by the clamping space of the mechanical arm and secondarily fixed by the telescopic piece of the fixing assembly, so that the workpiece can be efficiently carried and the carrying stability of the workpiece can be ensured.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and more particularly to a transfer device. Background Technology

[0002] In the field of semiconductor technology, the handling of numerous workpieces is involved, such as quartz tubes and graphite boats. In related technologies, the handling of these workpieces is mostly done manually, which is not only inefficient but also poses safety hazards such as workpiece breakage and personnel injury. Summary of the Invention

[0003] This disclosure provides a transfer device to improve the handling efficiency of workpieces.

[0004] This disclosure provides a transfer device, including:

[0005] Base;

[0006] A robotic arm is mounted on a base and has a clamping space for gripping workpieces.

[0007] A fixing component is disposed on a robotic arm. The fixing component includes a telescopic member that is telescopically disposed relative to the robotic arm and forms a circumferentially enclosed space for wrapping the workpiece to fix the workpiece.

[0008] In one embodiment of this disclosure, the telescopic member includes a flexible member or an elastic member.

[0009] In one embodiment of this disclosure, the telescopic member is connected to the robotic arm, and the telescopic member has a first position retracted inside the robotic arm and a second position extending outside the robotic arm;

[0010] When the telescopic component is in the second position, it is used to fix the workpiece.

[0011] In one embodiment of this disclosure, the telescopic member includes a first free end and a second free end, which are detachably connected to each other to open or close a circumferentially enclosed space.

[0012] In one embodiment of this disclosure, the fixing component further includes:

[0013] The fixing component is located on the telescopic component and is detachably connected to the robotic arm;

[0014] When the telescopic component is in the second position, the fixed component is connected to the robotic arm.

[0015] In one embodiment of this disclosure, there are multiple fasteners, which are spaced apart from each other on the telescopic member.

[0016] In one embodiment of this disclosure, the fixing component further includes:

[0017] An adsorption element is installed on the telescopic component and is used to adsorb onto the workpiece.

[0018] In one embodiment of this disclosure, there are multiple adsorption elements, which are spaced apart on the telescopic member.

[0019] In one embodiment of this disclosure, a plurality of contact portions are provided inside the clamping space, and the contact portions are used to contact the workpiece;

[0020] The telescopic component is telescopically mounted on a contact part.

[0021] In one embodiment of this disclosure, a plurality of contact portions are spaced apart along the circumferential direction of the workpiece;

[0022] The contact portion includes at least one of a buffer structure and an anti-slip structure.

[0023] In one embodiment of this disclosure, the transfer device further includes:

[0024] A pressure sensor is provided on at least one of a plurality of contacts.

[0025] In one embodiment of this disclosure, the robotic arm includes a gripping arm assembly, the gripping arm assembly comprising:

[0026] Connecting arm, connecting arm is connected to base;

[0027] The first clamping arm is disposed at one end of the connecting support arm;

[0028] The second support arm is located at the other end of the connecting arm, and the first clamping arm is arranged opposite to the second support arm to form a clamping space;

[0029] The first clamping arm and the second support arm are movably arranged relative to each other.

[0030] In one embodiment of this disclosure, there are multiple gripping arm assemblies, and the robotic arm further includes:

[0031] The adapter arm is connected to the base, and the connecting arms of multiple clamping arm assemblies are connected to the adapter arm at intervals.

[0032] The adapter arm extends along the length of the workpiece.

[0033] In one embodiment of this disclosure, the spacing between two adjacent clamping arm assemblies is adjustable.

[0034] In one embodiment of this disclosure, the robotic arm further includes:

[0035] The main arm is connected to the base, and the clamping arm assembly is connected to the main arm;

[0036] The length of the main arm is adjustable to adjust the distance between the clamping arm assembly and the base, and / or the clamping arm assembly is rotatably arranged relative to the main arm.

[0037] In one embodiment of this disclosure, the main arm is a telescopic arm, and a rotating mechanism is provided on the main arm, which is connected to the clamping arm assembly;

[0038] The transfer equipment also includes a first limit sensor, which is located on the main arm to control the rotation angle of the rotating mechanism driving the clamping arm assembly.

[0039] In one embodiment of this disclosure, the base includes:

[0040] A base, on which a movable part is provided;

[0041] The column is mounted on the base, and the robotic arm is mounted on the column;

[0042] The robotic arm is movably mounted along the extension direction of the column. The transfer device also includes a second limit sensor and a third limit sensor, which are spaced apart on the column to limit the range of motion of the robotic arm.

[0043] In one embodiment of this disclosure, the base further includes:

[0044] The counterweight is located on the base and on the side of the column away from the robotic arm.

[0045] The control panel is mounted on the base.

[0046] Push-pull handles are installed on the base, column, counterweight, or operating table.

[0047] The transfer device of this embodiment includes a base, a robotic arm, and a fixing component. The workpiece is clamped by the clamping space of the robotic arm, and the workpiece is fixed in a secondary manner by the telescopic component of the fixing component. While ensuring efficient handling of the workpiece, the stability of the workpiece handling can also be guaranteed. Attached Figure Description

[0048] The various objectives, features, and advantages of this disclosure will become more apparent from the following detailed description of preferred embodiments of the disclosure taken in conjunction with the accompanying drawings. The drawings are merely illustrative illustrations of the present disclosure and are not necessarily drawn to scale. In the drawings, the same reference numerals always denote the same or similar parts. Wherein:

[0049] Figure 1This is a structural schematic diagram of a transfer device in one state according to an exemplary embodiment;

[0050] Figure 2 This is a structural schematic diagram of another state of a transfer device according to an exemplary embodiment;

[0051] Figure 3 This is a schematic diagram of a portion of a transfer device according to an exemplary embodiment;

[0052] Figure 4 This is a schematic diagram of another part of a transfer device according to an exemplary embodiment;

[0053] Figure 5 This is a schematic diagram of the state structure of a clamping arm assembly of a transfer device according to an exemplary embodiment;

[0054] Figure 6 This is a schematic diagram of another state structure of a clamping arm assembly of a transfer device according to an exemplary embodiment.

[0055] The annotations in the attached figures are explained as follows:

[0056] 1. Workpiece; 2. Trolley;

[0057] 10. Base; 11. Base; 12. Moving part; 13. Column; 14. Counterweight; 15. Operating table; 16. Push-pull handle; 20. Robotic arm; 21. Clamping space; 211. Contact part; 22. Connecting arm; 23. First clamping arm; 24. Second support arm; 25. Adapter arm; 26. Main arm; 27. Rotation mechanism; 28. Locking mechanism; 30. Fixing component; 31. Telescopic component; 311. Circumferentially enclosed space; 312. First free end; 313. Second free end; 32. Adsorption component; 33. Fixing component; 40. Pressure sensor; 50. First limit sensor; 51. Second limit sensor; 52. Third limit sensor. Detailed Implementation

[0058] Typical embodiments embodying the features and advantages of this disclosure will be described in detail in the following description. It should be understood that this disclosure can have various variations in different embodiments without departing from the scope of this disclosure, and the descriptions and drawings therein are illustrative in nature and not intended to limit this disclosure.

[0059] In the following description of various exemplary embodiments of this disclosure, reference is made to the accompanying drawings, which form part of this disclosure, and which illustrate by way of example different exemplary structures, systems, and steps that may implement various aspects of this disclosure. It should be understood that other specific embodiments of the components, structures, exemplary devices, systems, and steps may be used, and structural and functional modifications may be made without departing from the scope of this disclosure. Furthermore, while the terms “above,” “between,” “within,” etc., may be used in this specification to describe different exemplary features and elements of this disclosure, these terms are used herein only for convenience, such as according to the orientation of the examples in the accompanying drawings. Nothing in this specification should be construed as requiring a specific three-dimensional orientation of the structure to fall within the scope of this disclosure.

[0060] One embodiment of this disclosure provides a transfer device; please refer to... Figures 1 to 6 The transfer device includes: a base 10; a robotic arm 20, which is disposed on the base 10 and forms a clamping space 21 for gripping the workpiece 1; and a fixing component 30, which is disposed on the robotic arm 20 and includes a telescopic member 31, which is telescopically disposed relative to the robotic arm 20 and forms a circumferentially enclosed space 311 for wrapping the workpiece 1 to fix the workpiece 1.

[0061] One embodiment of the transfer device disclosed herein includes a base 10, a robotic arm 20, and a fixing component 30. The workpiece 1 is clamped by the clamping space 21 of the robotic arm 20, and the workpiece 1 is further fixed by the telescopic component 31 of the fixing component 30. While ensuring efficient handling of the workpiece 1, the stability of the handling of the workpiece 1 can be guaranteed.

[0062] It should be noted that the robotic arm 20 can grasp the workpiece 1 and fix it initially. A secondary fixation is achieved through the telescopic member 31 extending from the robotic arm 20, specifically, ensuring that the workpiece 1 is located within the circumferentially enclosed space 311 of the telescopic member 31. The telescopic member 31 is telescopically adjustable relative to the robotic arm 20, ensuring convenient storage without affecting the subsequent fixation of the workpiece 1, thus improving the applicability of the transfer equipment. The workpiece 1 can be a quartz tube, such as a single-layer or double-layer quartz tube, or a graphite boat or other structures commonly used in the semiconductor field; no limitation is made here.

[0063] In one embodiment, the telescopic member 31 includes a flexible element, which not only facilitates storage but also prevents damage to the workpiece 1, thus protecting it. The flexible element can be a rope, such as a nylon rope. In some embodiments, the flexible element can be a combination of metal and non-metal, such as a combination of fiber and copper wire, which, while facilitating telescopic movement, also prevents damage to the workpiece 1.

[0064] In one embodiment, the telescopic member 31 includes an elastic element, which, while facilitating storage, can enhance the fixation effect of the workpiece 1 on the telescopic member 31. The elastic element can be a structure such as a belt, a rope made of elastic materials like rubber, or the like.

[0065] In one embodiment, the telescopic member 31 is connected to the robotic arm 20. The telescopic member 31 has a first position that is housed inside the robotic arm 20 and a second position that extends outside the robotic arm 20. When the telescopic member 31 is in the second position, it is used to fix the workpiece 1, thereby ensuring that the workpiece 1 can be stably clamped inside the robotic arm 20.

[0066] A portion of the telescopic component 31 can be directly fixed to the robotic arm 20 to prevent it from detaching. For example, the telescopic component 31 can be fixed to the robotic arm 20 using bolts or similar structures. Before use, the telescopic component 31 can be stored inside the robotic arm 20, and during use, a portion of it can be pulled out to secure the workpiece 1. Alternatively, the telescopic component 31 can be positioned on the robotic arm 20. For instance, the robotic arm 20 can have a through hole, allowing the telescopic component 31 to move within it. After the telescopic component 31 is extended to a certain position, the limiting portion on it can engage with the robotic arm 20, thus preventing it from detaching.

[0067] In one embodiment, such as Figure 1 and Figure 2 As shown, the telescopic member 31 includes a first free end 312 and a second free end 313. The first free end 312 and the second free end 313 are detachably connected to open or close the circumferential enclosed space 311. This not only facilitates the fixing of the workpiece 1, but also facilitates the release of the workpiece 1 by the telescopic member 31, thereby improving the efficiency of workpiece handling.

[0068] The first free end 312 and the second free end 313 of the telescopic member 31 can be snap-fitted. The first free end 312 and the second free end 313 can be directly snap-fitted, for example, by snap-fitting a protrusion and a groove, or by snap-fitting a protrusion and a protrusion. The first free end 312 and the second free end 313 can also be indirectly snap-fitted, for example, by installing a snap-fit ​​structure on at least one of the first free end 312 and the second free end 313, thereby achieving indirect snap-fitting of the first free end 312 and the second free end 313.

[0069] The first free end 312 and the second free end 313 of the telescopic member 31 can also be connected by fasteners. This is not limited here, as long as the first free end 312 and the second free end 313 can be reliably connected and can be easily disassembled later.

[0070] It should be noted that the telescopic component 31 can be a structure in which a wheel and a rope are connected, that is, the rope is wound around the wheel. In use, both ends of the rope can be pulled out to fix the workpiece 1. Alternatively, only one end of the rope can be pulled out, as long as it is subsequently fixed; this is not limited here. The wheel can be equipped with a power mechanism, which automatically pulls the rope out.

[0071] In one embodiment, such as Figure 1 and Figure 2 As shown, the fixing component 30 also includes a fixing member 33, which is disposed on the telescopic member 31 and is detachably connected to the robotic arm 20. When the telescopic member 31 is in the second position, the fixing member 33 is connected to the robotic arm 20, thereby further improving the connection stability between the telescopic member 31 and the robotic arm 20, thus ensuring that the telescopic member 31 can reliably fix the workpiece 1.

[0072] It should be noted that when the workpiece 1 is wrapped in the circumferential closed space 311 of the telescopic member 31, the telescopic member 31 is connected to the robotic arm 20. Although this can ensure a certain degree of stability, the stability effect is relatively poor. In this embodiment, the telescopic member 31 is further fixed to the robotic arm 20 by the fixing member 33, which can enhance the connection stability between the telescopic member 31 and the robotic arm 20, thereby preventing the workpiece 1 from causing the telescopic member 31 to change position.

[0073] When the telescopic member 31 is in the first position, the fixing member 33 is separated from the robotic arm 20, thereby ensuring that the telescopic member 31 is housed within the robotic arm 20. The fixing member 33 can be a snap-fit ​​structure that connects to the adapter on the robotic arm 20. The fixing member 33 can also be fixed to the robotic arm 20 by fasteners, which is not limited here.

[0074] In one embodiment, there are multiple fixing members 33, which are spaced apart from each other on the telescopic member 31, thereby ensuring that the telescopic member 31 stably fixes the workpiece 1 within the clamping space 21 of the robotic arm 20. The positions on the robotic arm 20 that connect with the fixing members 33 can be distributed on the clamping sidewalls of the clamping space 21.

[0075] In one embodiment, such as Figure 1 and Figure 2As shown, the fixing assembly 30 further includes an adsorption member 32, which is disposed on the telescopic member 31. The adsorption member 32 is used to adsorb onto the workpiece 1, so that the telescopic member 31 is reliably attached to the workpiece 1 through the adsorption member 32, thereby ensuring the stability of the connection. The adsorption member 32 can be a suction cup or a flexible component with adhesive properties, thereby ensuring the reliable attachment of the adsorption member 32 to the workpiece 1.

[0076] In one embodiment, there are multiple adsorption elements 32, which are spaced apart from the telescopic element 31 to ensure that the telescopic element 31 is reliably connected to the workpiece 1 via the adsorption elements 32. The adsorption elements 32 can be spaced apart along the circumferential direction of the workpiece 1 to ensure that the telescopic element 31 is reliably connected to the workpiece 1. For example, when the workpiece 1 is a quartz tube, the multiple adsorption elements 32 can be spaced apart along the circumferential surface of the quartz tube.

[0077] It should be noted that after the telescopic component 31 is stored inside the robotic arm 20, the adsorption component 32 can also be stored inside the robotic arm 20.

[0078] In one embodiment, such as Figure 4 As shown, the clamping space 21 has multiple contact portions 211 on its inner side, which are used to contact the workpiece 1. A telescopic member 31 is telescopically mounted on one of the contact portions 211, facilitating both the storage and extension of the telescopic member 31. The telescopic member 31 can easily fix the workpiece 1. The multiple contact portions 211 contacting the workpiece 1 ensure the clamping of the workpiece 1 by the robotic arm 20. Combined with the fixation of the workpiece 1 by the telescopic member 31, this enhances the fixation performance of the workpiece 1.

[0079] In one embodiment, a plurality of contact portions 211 are spaced apart along the circumferential direction of the workpiece 1; wherein the contact portion 211 includes at least one of a buffer structure and an anti-slip structure, which can not only reliably fix the workpiece 1, but also avoid damage to the workpiece 1.

[0080] The buffer structure can be a rubber structure or a combination of an elastomer and other structures. For example, the buffer structure can be a combination of a spring and rubber, where the rubber is in contact with the workpiece 1, and the spring can provide a reliable buffering effect to avoid damage to the workpiece 1.

[0081] The anti-slip structure can be provided with anti-slip protrusions on the surface of the contact part 211 that contacts the workpiece 1, or the anti-slip structure can be achieved through the material properties of the anti-slip structure. For example, the anti-slip structure can be made of wood cellulose fiber or foamed plastic polymer.

[0082] It should be noted that the contact part 211 can also have a cushioning and anti-slip function, which is not limited here.

[0083] In one embodiment, such as Figure 1 and Figure 2 As shown, the transfer device also includes a pressure sensor 40. At least one of the plurality of contact portions 211 is provided with a pressure sensor 40. The pressure sensor 40 can provide feedback on the pressure applied to the workpiece 1 by the contact portion 211, so as to ensure reliable clamping of the workpiece 1 and avoid damage to the workpiece 1 due to excessive pressure.

[0084] It should be noted that each contact part 211 can be equipped with a pressure sensor 40. During the process of the robotic arm 20 clamping the workpiece 1, one pressure sensor 40 can be used to determine whether the robotic arm 20 has moved into position. After the robotic arm 20 has moved into position, the workpiece 1 can be clamped by controlling the size of the clamping space 21. At this time, the other pressure sensors 40 can be used to control the size of the clamping space 21, thereby ensuring reliable clamping of the workpiece 1 while avoiding damage to the workpiece 1 due to excessive pressure. The pressure sensors 40 on each contact part 211 can be identical or different, which is not limited here. For example, the pressure sensor 40 that determines whether the robotic arm 20 has moved into position can be a sensor similar to a contact switch. After the pressure sensor 40 comes into contact with the workpiece 1, it can control the robotic arm 20 to stop moving.

[0085] In one embodiment, such as Figure 1 and Figure 5 As shown, the robotic arm 20 includes a clamping arm assembly, which includes: a connecting arm 22 connected to the base 10; a first clamping arm 23 disposed at one end of the connecting arm 22; and a second support arm 24 disposed at the other end of the connecting arm 22. The first clamping arm 23 and the second support arm 24 are arranged opposite to each other to form a clamping space 21. The first clamping arm 23 and the second support arm 24 are movably arranged relative to each other to adjust the size of the clamping space 21, thereby ensuring that the workpiece 1 can be reliably clamped while facilitating clamping of the workpiece 1.

[0086] It should be noted that the connecting arm 22 of the clamping arm assembly can be directly mounted on the base 10, or it can be indirectly mounted on the base 10. At least one of the first clamping arm 23 and the second support arm 24 moves relative to the connecting arm 22 to adjust the size of the clamping space 21. The first clamping arm 23 and the second support arm 24 can move relative to the connecting arm 22 via a motor, hydraulic cylinder, or pneumatic cylinder. The connecting arm 22, the first clamping arm 23, and the second support arm 24 can all be provided with the aforementioned contact portion 211. A pressure sensor 40 can be provided on the contact portion 211, and the pressure sensor 40 on the connecting arm 22 can be used to determine whether the robotic arm 20 has moved into position. The telescopic member 31 can be provided on the contact portion 211 of the connecting arm 22, and each fixing member 33 can be easily connected to the first clamping arm 23 and the second support arm 24. There can be four fixing members 33, and two fixing members 33 can be easily connected to the first clamping arm 23 and the second support arm 24.

[0087] In one embodiment, there are multiple clamping arm assemblies, such as... Figure 5 As shown, the robotic arm 20 also includes: an adapter arm 25, which is connected to the base 10. The clamping arm assembly can be connected to the base 10 via the adapter arm 25. The connecting arms 22 of the multiple clamping arm assemblies are connected to the adapter arm 25 at intervals. The adapter arm 25 extends along the length direction of the workpiece 1, thereby enabling the multiple clamping arm assemblies to reliably clamp the workpiece 1 along the length direction of the workpiece 1.

[0088] In one embodiment, the spacing between two adjacent clamping arm assemblies is adjustable, thereby adjusting the position of the clamping arm assemblies according to the length of the workpiece 1, so as to ensure that the clamping arm assemblies can reliably clamp workpieces 1 of different lengths.

[0089] The connecting arm 22 of the clamping arm assembly is movably disposed relative to the adapter arm 25, thereby allowing the spacing between adjacent clamping arm assemblies to be adjustable. The connecting arm 22 relative to the adapter arm 25 can be manually adjusted; for example, a slotted hole is provided on the adapter arm 25, and the installation position of the clamping arm assembly is adjusted by adjusting the mounting position of the connecting arm 22 on the slotted hole. The connecting arm 22 relative to the adapter arm 25 can also be automatically adjusted; for example, a motor, cylinder, or hydraulic cylinder is provided on the adapter arm 25 to drive the connecting arm 22 to move. The adapter arm 25 and the connecting arm 22 can be coupled via a guide rail and a slider, ensuring both connection stability and limiting the movement of the connecting arm 22.

[0090] It should be noted that after the connecting arm 22 has moved into position relative to the adapter arm 25, the connecting arm 22 can be fixed to the adapter arm 25 by the locking mechanism 28. The locking mechanism 28 can be a fastener assembly, such as a combination of bolts and washers. Alternatively, the locking mechanism 28 can be a pressure plate or similar structure; no limitation is made here. Figure 4 As shown, there can be two clamping arm assemblies, and the connecting arm 22 of the two clamping arm assemblies is fixed to the adapter arm 25 by the locking mechanism 28.

[0091] In one embodiment, such as Figures 1 to 3 As shown, the robotic arm 20 also includes: a main arm 26, which is connected to the base 10, and a gripping arm assembly connected to the main arm 26; wherein the length of the main arm 26 is adjustable to adjust the distance between the gripping arm assembly and the base 10, and / or the gripping arm assembly is rotatably arranged relative to the main arm 26.

[0092] The main arm 26 is configured to adjust the distance between the gripping arm assembly and the base 10, thereby allowing the gripping arm assembly to adapt to gripping workpieces 1 at different positions. The gripping arm assembly can be connected to the main arm 26 via an adapter arm 25. The length of the main arm 26 is adjustable, allowing the gripping arm assembly to clamp workpieces 1 at different positions without moving the base 10. The main arm 26 can be a telescopic arm, meaning its length is adjustable. For example, the main arm 26 may include two interlocking segments that are movably arranged to adjust the length of the main arm 26. Once the length requirement is met, it can be locked using fasteners. In some embodiments, the main arm 26 may include a power source, which includes a telescopic structure. The power source can be a hydraulic cylinder, pneumatic cylinder, or electric cylinder, thereby pushing the telescopic rod to extend and retract, thus adjusting the length of the main arm 26.

[0093] The gripping arm assembly is rotatably configured relative to the main arm 26, allowing the gripping arm assembly to move the workpiece 1 in different positions. When gripping the workpiece 1, the gripping arm assembly is in one position. After gripping or moving the workpiece 1 to any position, the position of the workpiece 1 can be adjusted according to actual needs, for example, by rotating the workpiece 1 90 degrees, thereby facilitating subsequent placement of the workpiece 1. Figures 5 to 6 The clamping arm assembly can be connected to the main body arm 26 via an adapter arm 25. The main body arm 26 can be provided with a drive unit, which is driven to the adapter arm 25, thereby driving the adapter arm 25 to rotate the clamping arm assembly. The drive unit can be a power component in related technologies such as a motor, a rotary hydraulic cylinder, or a rotary pneumatic cylinder, thereby driving the adapter arm 25 to rotate.

[0094] In one embodiment, such as Figures 1 to 3As shown, the main arm 26 is a telescopic arm, and a rotating mechanism 27 is provided on the main arm 26. The rotating mechanism 27 is connected to the clamping arm assembly. The transfer device also includes a first limit sensor 50, which is located on the main arm 26 to control the rotation angle of the clamping arm assembly driven by the rotating mechanism 27, preventing over-rotation of the clamping arm assembly. The rotating mechanism 27 can be a power component from related technologies such as a motor, a rotary hydraulic cylinder, or a rotary pneumatic cylinder. The first limit sensor 50 can be a contact sensor, meaning that after the clamping arm assembly rotates a certain angle, it can come into contact with the first limit sensor 50, thereby triggering the first limit sensor 50. Alternatively, the first limit sensor 50 can be a non-contact sensor, such as a laser sensor.

[0095] In one embodiment, such as Figure 1 and Figure 2 As shown, the base 10 includes: a base 11 with a movable part 12 mounted on it; a column 13 mounted on the base 11; and a robotic arm 20 mounted on the column 13. The robotic arm 20 is movably mounted along the extension direction of the column 13. The transfer device also includes a second limit sensor 51 and a third limit sensor 52, which are spaced apart on the column 13 to limit the range of motion of the robotic arm 20. The movability of the robotic arm 20 along the extension direction of the column 13 allows adjustment of the position of the workpiece 1 for easier handling. For example, the robotic arm 20 can be moved to its highest point, and the workpiece 1 can be rotated from a horizontal to a vertical position. Figures 5 to 6 The state.

[0096] The second limit sensor 51 and the third limit sensor 52 can be contact sensors or non-contact sensors; there is no limitation here, as long as they can trigger the corresponding signals to control the movement range of the robotic arm 20. The second limit sensor 51 and the third limit sensor 52 can be contact switches, laser sensors, etc.

[0097] The movable part 12 provided on the base 11 can be a wheel, thereby making the base 10 movable, and thus the entire transfer equipment movable. The movable part 12 can also be a track, etc.

[0098] In one embodiment, such as Figure 1 and Figure 2As shown, the base 10 also includes: a counterweight 14, which is disposed on the base 11 and located on the side of the column 13 opposite to the robotic arm 20; an operating table 15, which is disposed on the base 11; and a push-pull handle 16, which is disposed on the base 11, the column 13, the counterweight 14, or the operating table 15. The counterweight 14 can prevent the base 10 from becoming unbalanced when the workpiece 1 is too heavy. The operating table 15 may include a control system to control the overall operation of the transfer equipment, such as the various movements of the robotic arm 20.

[0099] In one embodiment, the transfer device can be a furnace tube quartz tube handling tool. The transfer device is movably configured, and the main arm 26 of the robotic arm 20 can be movably configured on the column 13 of the base 10, with the movement range controlled by a second limit sensor 51 and a third limit sensor 52. The distance between the clamping arm assemblies can be adjusted according to the length of the quartz tube, and the distance between the first clamping arm 23 and the second support arm 24 can be adjusted according to the diameter of the quartz tube. The main arm 26 extends and retracts to move the clamping arm assembly to a suitable position. A pressure sensor 40 on the connecting arm 22 can determine whether the clamping arm assembly has moved into place. For example, when the quartz tube contacts the pressure sensor 40, an indicator light illuminates, stopping the movement of the main arm 26 and pulling out the telescopic member 31. The suction member 32 on the telescopic member 31 is then fixed to the quartz tube, and multiple fixing members 33 are spaced apart and fixed to the robotic arm 20. By fine-tuning the positions of the first clamping arm 23 and the second support arm 24, clamping is determined based on the pressure sensors 40 on the first clamping arm 23 and the second support arm 24. The main arm 26 of the robotic arm 20 moves upward to a position where the quartz tube can rotate safely. For example, the height required for a 90° rotation is calculated based on the length of the quartz tube, and the quartz tube is rotated from a horizontal position to a vertical position. Figures 5 to 6 As shown, the quartz tube is pushed into the quartz cart, and then the quartz tube is placed on the quartz tube trolley 2 by the robotic arm 20. The corresponding device on the quartz tube body is removed, and the robotic arm 20 is safely withdrawn, thus completing the transportation of the quartz tube.

[0100] The transfer device of this embodiment can be driven entirely by electricity. A controller is used to control the movements of each mechanical structure (up / down movement, forward / backward movement, rotation, and robotic arm adjustment). The robotic arm grips the quartz tube, and the components in contact with the inside of the quartz tube need to be made of a soft, non-slip material with adsorption properties. A sensor can be used to provide feedback on the pressure currently exerted on the quartz tube. Based on the feedback signal, the opening and closing degree of the robotic arm is adjusted to prevent the quartz tube from breaking.

[0101] Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This disclosure is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and exemplary embodiments are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the appended claims.

[0102] It should be understood that this disclosure is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this disclosure is limited only by the appended claims.

Claims

1. A transfer device, characterized in that, include: Base; A robotic arm, which is disposed on the base and has a clamping space for gripping a workpiece; A fixing component is disposed on the robotic arm. The fixing component includes a telescopic member that is telescopically disposed relative to the robotic arm and forms a circumferentially enclosed space for wrapping the workpiece to fix the workpiece. The telescopic component includes a first free end and a second free end, which are detachably connected to each other to open or close the circumferential enclosed space. The clamping space has multiple contact portions on its inner side, which are used to contact the workpiece; the telescopic member is telescopically mounted on one of the contact portions. The transfer device also includes a pressure sensor, and at least one of the plurality of contact portions is provided with the pressure sensor; During the process of the robotic arm clamping the workpiece, one of the pressure sensors is used to determine whether the robotic arm has moved into position. After the robotic arm moves into position, the workpiece is clamped by controlling the size of the clamping space. The other pressure sensors are used to control the size of the clamping space. After the pressure sensors come into contact with the workpiece, the robotic arm is controlled to stop moving.

2. The transfer device according to claim 1, characterized in that, The telescopic component includes a flexible component or an elastic component.

3. The transfer device according to claim 1, characterized in that, The telescopic component is connected to the robotic arm, and the telescopic component has a first position that is housed inside the robotic arm and a second position that extends outside the robotic arm; When the telescopic member is in the second position, it is used to fix the workpiece.

4. The transfer device according to claim 3, characterized in that, The fixing component also includes: A fixing member is disposed on the telescopic member and is detachably connected to the robotic arm; When the telescopic member is in the second position, the fixing member is connected to the robotic arm.

5. The transfer device according to claim 4, characterized in that, There are multiple fasteners, which are spaced apart from each other on the telescopic member.

6. The transfer device according to any one of claims 1 to 5, characterized in that, The fixing component also includes: An adsorption element is disposed on the telescopic element and is used to adsorb onto the workpiece.

7. The transfer device according to claim 6, characterized in that, There are multiple adsorption elements, which are spaced apart on the telescopic member.

8. The transfer device according to claim 1, characterized in that, The plurality of contact portions are spaced apart along the circumferential direction of the workpiece; The contact portion includes at least one of a buffer structure and an anti-slip structure.

9. The transfer device according to claim 1, characterized in that, The robotic arm includes a gripping arm assembly, which includes: A connecting arm is provided, which is connected to the base. A first clamping arm is disposed at one end of the connecting support arm; The second support arm is disposed at the other end of the connecting arm, and the first clamping arm is disposed opposite to the second support arm to form the clamping space; The first clamping arm and the second support arm are movably arranged relative to each other.

10. The transfer device according to claim 9, characterized in that, The gripping arm assembly is multiple, and the robotic arm further includes: An adapter arm is connected to the base, and the connecting arms of the plurality of clamping arm assemblies are connected to the adapter arm at intervals. The adapter arm extends along the length of the workpiece.

11. The transfer device according to claim 10, characterized in that, The spacing between two adjacent clamping arm assemblies can be adjusted.

12. The transfer device according to any one of claims 9 to 11, characterized in that, The robotic arm also includes: The main arm is connected to the base, and the clamping arm assembly is connected to the main arm; The length of the main arm is adjustable to adjust the distance between the clamping arm assembly and the base, and / or the clamping arm assembly is rotatably arranged relative to the main arm.

13. The transfer device according to claim 12, characterized in that, The main arm is a telescopic arm, and a rotating mechanism is provided on the main arm. The rotating mechanism is connected to the clamping arm assembly. The transfer device further includes a first limit sensor, which is disposed on the main arm to control the rotation angle of the clamping arm assembly driven by the rotating mechanism.

14. The transfer device according to claim 1, characterized in that, The base includes: A base, on which a movable part is provided; A column is mounted on the base, and the robotic arm is mounted on the column; The robotic arm is movably arranged along the extension direction of the column, and the transfer device further includes a second limit sensor and a third limit sensor, which are spaced apart on the column to limit the range of movement of the robotic arm.

15. The transfer device according to claim 14, characterized in that, The base also includes: A counterweight is provided on the base and located on the side of the column opposite to the robotic arm. An operating table, which is disposed on the base; A push-pull handle is provided on the base, the column, the counterweight, or the operating table.

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