A hydraulically conductive elastic fabric pressure microsensor

Abstract

The present invention discloses a hydraulic-conduction elastic fabric pressure microsensor, the structure of which includes a packaging shell, a cavity wall, a pressure introduction part, an upper sealing ring, a lower sealing ring, a pressure export part, a pressure sensing part and a conduction circuit. The inner surfaces of the cavity wall, the pressure introduction part, the pressure export part and the sealing ring jointly define a sealed fluid cavity filled with liquid. The pressure to be measured undergoes a hydraulic conduction process successively through the pressure introduction part, the liquid and the pressure export part, and after being scaled by a certain multiple, it is conducted to the pressure sensing part for detection. Since there is no acting force between the sealing ring and the connection structure, the pressure loss in the hydraulic conduction process is small, and the signal scaling function based on the mechanical structure can be realized. The present invention also proposes a flexible pressure sensing device, which includes a flexible substrate with surface-divided regions, hydraulic-conduction micro pressure sensors in each region, and a printed circuit on the surface of the flexible substrate, so as to realize a flexible pressure sensor, the detection accuracy of which does not depend on the flatness of the flexible substrate.

Description

Technical Field

[0001] The present invention relates to the technical fields of micro pressure sensors and flexible pressure sensors, and also relates to the specific test of the pressure performance of elastic fabrics, specifically to an elastic fabric pressure micro sensor with hydraulic conduction and an array-type flexible sensing device of the micro sensor, which are applicable to the pressure performance test of elastic fabrics such as elastic fabrics and elastic webbing. Background Art

[0002] With the improvement of living standards, elastic fabrics with excellent elasticity and resilience are widely used in functional products such as elastic webbing, tight clothes, elastic stockings and medical bandages. People's requirements for the comfort, functionality and safety of elastic fabrics are increasing day by day. Improper pressure distribution will affect the use experience and even endanger health. Therefore, in the design process of elastic fabric products, the pressure performance test and evaluation are particularly important.

[0003] A pressure sensor is an electronic device that converts the pressure felt from the outside world into electrical signals and other signals. In order to realize the real-time monitoring of human physiological signals and other signals, the pressure sensor needs to meet high-performance indicators such as high flexibility, high sensitivity, high stability and low detection limit. Traditional large-volume mechatronics are difficult to meet the requirements. In recent years, with the development of intelligent wearable electronics, flexible electronic devices have shown great application prospects in the fields of medicine, military and other fields. How to develop high-performance flexible pressure sensors has become one of the important frontier topics in the field of flexible electronics.

[0004] The sensitive layer in a pressure sensor generally consists of metal thin films, metal nanowires, nano-carbon materials, conductive polymer materials. Nano-carbon materials have been widely used due to their excellent properties such as good flexibility, chemical stability and high conductivity. In order to obtain a highly sensitive pressure sensor device, researchers usually use techniques such as photolithography to obtain a silicon template with microstructures, obtain a substrate with microstructures through the imprint of a flexible polymer, and cover a conductive active substance on the substrate to obtain a flexible pressure sensor. For example:

[0005] 1) Researchers in South Korea obtained pyramid-shaped microstructures through the imprint of a polydimethylsiloxane silicon template, covered a conductive polymer and assembled it into a pressure sensor, with a sensitivity of 4.88 kPa -1 (0.27 - 5.9 kPa), and the lowest detection limit was 23 Pa (Adv. Mater. 2014, 26, 3451 - 3458);

[0006] 2) Researchers at Monash University in Australia deposited a gold foil with a nano-thickness on a substrate with microstructures and used it as a pressure sensor, but it was not used for the detection of human-related physiological signals (Small 2015, 11, 1886 - 1891);

[0007] 3) Zhang Ting's research group at the Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, used carbon nanotube film as the sensitive layer of the sensor and obtained a sensitivity of 1.8kPa. -1 (<0.3kPa), high-stability flexible pressure sensor.

[0008] Although the microstructure gives the sensor relatively high sensitivity, it has the following defects: 1) The template preparation process is complex, expensive and time-consuming; 2) The minimum detection pressure needs to be further optimized; 3) Most importantly, because the microstructure is relatively fragile, the pressure detection range of the corresponding pressure sensor is very narrow.

[0009] Furthermore, in the field of thin-film pressure sensor technology, since the sensor is constructed on a flexible thin-film substrate, the sensor itself is susceptible to twisting and bending. This bending creates surface undulations that interfere with surface pressure detection, and the internal stress of the bent material can also be detected by the sensor. In actual use, thin-film sensors with flexible substrates often require a rigid gasket placed underneath the thin-film sensor to overcome the adverse effects of the flexible substrate's bending and twisting, improving measurement stability and accuracy. The gasket is typically much thicker than the thin-film sensor itself.

[0010] In summary, the present invention aims to improve the defects of the above-mentioned prior art and proposes a hydraulic conduction micro pressure sensor and a flexible array sensing device to achieve a high-flexibility, high-sensitivity, low-detection-limit, and high-stability pressure sensor through a method with a simple structure and large-area preparation. The pressure sensor can be used for pressure performance testing of elastic fabrics such as elastic fabrics and elastic webbings, as well as for pressure performance testing of wearable devices, smart clothing, medical bandages, elastic surfaces covering human body models, etc., and for pressure distribution monitoring of elastic surfaces such as car seats. Summary of the Invention

[0011] In view of the problems existing in the above-mentioned prior art, the present invention provides a hydraulically conductive elastic fabric pressure microsensor to solve the above-mentioned technical problems.

[0012] To achieve the above objectives, the present invention adopts a technical solution: a hydraulically conductive elastic fabric pressure microsensor, comprising a housing, a cavity wall with a through hole on each of the upper and lower walls, an I-shaped pressure inlet portion, an upper sealing ring, a lower sealing ring, an I-shaped pressure outlet portion, a pressure sensing portion, and a conductive circuit; the through hole on the upper wall has an opening area S1 and a stopper structure protruding relative to the hole wall; the opening area on the lower wall is S2, and the cavity wall is fixed within the housing;

[0013] The I-shaped pressure introduction part includes an upper pressure guide plate located above the outer wall of the cavity, a lower pressure guide plate located below the limiting structure, and a short push rod connecting the upper and lower pressure guide plates;

[0014] The I-shaped pressure derivation part includes an upper bearing plate, a lower bearing plate, and a short push rod connecting the two bearing plates; a pressure sensing part is arranged below the I-shaped pressure derivation part;

[0015] The pressure sensing part includes a thin film pressure sensing layer and a gasket layer; the upper surface of the thin film pressure sensing layer is fixedly attached to the lower surface of the lower bearing plate, the lower surface of the thin film pressure sensing layer is fixedly attached to the upper surface of the gasket layer, and the lower surface of the gasket layer is fixedly attached to the inner bottom surface of the packaging shell;

[0016] The outer edges of the upper sealing ring and the lower sealing ring are each inwardly successively a ring-shaped outer edge part, an intermediate part of flexible material, and a ring-shaped inner edge part; the inner edge part of the upper sealing ring is fixedly attached to the surface of the lower guide plate, the outer edge part is fixedly attached to the upper wall surface of the cavity wall, and the intermediate part is not fixedly connected to other objects; for the lower sealing ring, its inner edge part is fixedly attached to the surface of the upper bearing plate, the outer edge part is fixedly attached to the lower wall surface of the cavity wall, and the intermediate part is not fixedly connected to other objects;

[0017] Based on the above flexible pressure sensing device of a hydraulic conduction elastic fabric pressure microsensor, the structure includes a flexible substrate, a microsensor fixed to the flexible substrate, and a printed circuit printed on the flexible substrate; the flexible substrate is made of one or several materials of plastics, fabrics, non-woven fabrics, rubbers, and silicones, which are existing known materials.

[0018] Further, the lower guide plate is a body with a constant cross-section of cross-sectional area S3, and its cross-section is geometrically similar to the through-hole in the upper wall surface. S3 satisfies 0.95S1 < S3 < 0.99S1; the upper bearing plate is a body with a constant cross-section of cross-sectional area S4, and its cross-section is geometrically similar to the through-hole in the lower wall surface. S4 satisfies 0.95S2 < S4 < 0.99S2; S3 < S4. A hydraulic conduction micro pressure sensor has a pressure signal amplification function, that is, the measured pressure applied to the surface of the upper guide plate is conducted through the liquid in the sealed fluid cavity to the measured pressure on the upper bearing plate and is amplified by N times, where N = S4 / S3; the "cross-section" refers to the cross-section in the horizontal direction.

[0019] Further, the maximum detectable pressure F of the thin film pressure sensing layer max; The lower pressure guide plate is a body with a constant cross-section area of S3, and it has a cross-section geometrically similar to the through-hole on the upper wall surface. S3 satisfies 0.95S1 < S3 < 0.99S1; The upper pressure bearing plate is a body with a constant cross-section area of S4, and it has a cross-section geometrically similar to the through-hole on the lower wall surface. S4 satisfies 0.95S2 < S4 < 0.99S2; S3 > S4. The hydraulic conduction micro pressure sensor has the function of reducing the pressure signal, that is, the measured pressure applied to the surface of the lower pressure guide plate is conducted through the liquid in the sealed fluid cavity to the measured pressure on the upper pressure bearing plate and is reduced by N times. N = S3 / S4. Then the maximum detectable pressure of the hydraulic conduction micro pressure sensor is N×F max ; The "cross-section" refers to the horizontal cross-section.

[0020] Furthermore, for the hydraulic conduction micro pressure sensor, its overall thickness ranges from 5 to 15 mm; the thickness ranges of the I-shaped pressure introduction part, the I-shaped pressure export part, and the pressure sensing part are all 1 to 3 mm; the thickness range of the bottom surface of the encapsulation shell is 1 to 2 mm, and the thickness range of the liquid between the lower pressure guide plate and the upper pressure bearing plate is 1 to 4 mm; for the outer surface of the bottom surface of the encapsulation shell, the equivalent diameter of its perimeter ranges from 4 to 15 mm; the thickness is defined as the height difference between the highest point and the lowest point of an object placed on a horizontal ground.

[0021] Furthermore, the middle parts of the upper sealing ring and the lower sealing ring are made of flexible materials and are not fixedly connected to other objects; the flexible materials are made of one or several of elastic plastics, waterproof fabrics, non-woven fabrics, rubbers, and silicones; the middle parts have bending and / or wrinkled structures to generate stretchability; the stretchability means that within a certain stretching range, it has no supporting force and tensile force on the connected objects, reducing the pressure conduction loss of the measured pressure from the lower pressure guide plate to the liquid and then to the upper pressure bearing plate.

[0022] Furthermore, the flexible materials are made of one or more thermoplastic polymers; the thermoplastic polymers are one of polyvinyl alcohol (PVA), polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyarylate, polyimide (PI), polyethylene naphthalate glycol ester (PEN), polyethylene, polypropylene, polypropylene copolymer, polybutene, nylon 6, nylon 11, nylon 12, nylon 46, nylon 66, ethylene / acrylic acid copolymer, ethylene / maleic acid copolymer, ethylene / methacrylic acid copolymer, ethylene / vinyl acetate copolymer, polyvinyl acetate, polyoxymethylene, styrene copolymer, polyacrylate, polymethacrylate, polyetherimide, polysulfone and / or their combinations.

[0023] Furthermore, the thin film pressure sensing layer is one type of capacitive, resistive, piezoelectric, or triboelectric thin film pressure sensor.

[0024] Further, the micro-sensors are mounted and fixed on the surface of the flexible substrate in an array form of A rows and B columns. Through the printed circuit, each of the micro-sensors exchanges data with the data processor, and S = A × B. A flexible pressure sensing device implements the following working method. The surface of the flexible substrate is divided into S regions of A rows and B columns, and there is exactly one micro-sensor in each region. Define the element f ij of the matrix F with A rows and B columns ij to represent the measurement value of the micro-sensor in the intersection region of the i-th row and the j-th column among the S regions divided on the surface of the flexible substrate. Then the matrix F describes the two-dimensional pressure distribution on the surface of the flexible substrate. The i is an integer satisfying 1 ≤ i ≤ A, and the j is an integer satisfying 1 ≤ j ≤ B.

[0025] The present invention proposes a hydraulic-conducting elastic fabric pressure micro-sensor, which implements a pressure detection method based on the principle of hydrostatic pressure transmission. Specifically, it is a pressure detection method that hydraulically conducts the pressure to be measured and linearly scales the pressure value in a determined ratio, and then performs detection. The main beneficial effects of the hydraulic-conducting micro-pressure sensor include: 1) The sealed fluid chamber is filled with liquid. The middle parts of the upper sealing ring and the lower sealing ring are made of flexible or elastic materials and are not connected to other objects. Only the upper and lower surfaces of the pressure introduction part are subjected to the pressure to be measured and the liquid pressure, and only the liquid pressure and the reaction force of the pressure sensing part act on the upper and lower surfaces of the pressure export part. Therefore, the pressure to be measured is efficiently conducted from the surface of the micro-sensor (the upper pressure guide plate) to the thin film pressure sensing layer, with extremely small pressure loss and high fidelity of signal characteristics. 2) Since the pressure to be measured is hydraulically conducted, the pressure value can be scaled by a determined ratio of N times. When N > 1, a signal amplification function based on the mechanical structure can be achieved. When N < 1, the upper limit of pressure detection can be expanded by N times. Description of the Drawings

[0026] Figure 1 It is a schematic structural diagram of a hydraulic-conducting elastic fabric pressure micro-sensor according to Embodiment 1 of the present invention.

[0027] Figure 2 is Figure 1 a cross-sectional view of the device shown in Embodiment 1.

[0028] Figure 3 It is a schematic structural diagram of the sealing ring described in the present invention.

[0029] Figure 4 It is a schematic structural diagram of a flexible array-type sensing device according to Embodiment 2 of the present invention.

[0030] Figure 1In the figure: 11 is the encapsulation housing, 12 is the cavity wall, 13 is the I-shaped pressure introduction part, 131 is the upper pressure guide plate, 132 is the short push rod, 133 is the lower pressure guide plate, 14 is the upper sealing ring, 15 is the lower sealing ring, 16 is the I-shaped pressure export part, 161 is the upper bearing plate, 162 is the short push rod, 163 is the lower bearing plate, 17 is the pressure sensing part, 171 is the gasket layer, 172 is the thin film pressure sensing layer, 18 is the sealed fluid cavity, 31 is the outer edge part of the sealing ring, 32 is the inner edge part of the sealing ring, 33 is the middle part of the sealing ring; 41 is the flexible substrate, 42 is the micro sensor, 43 is the printed circuit, 44 is the external connection port. Detailed implementation mode

[0031] To make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood, however, that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the scope of the present invention.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this invention belongs. The terms used in the description of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the scope of the present invention.

[0033] The present invention provides a hydraulic-conduction elastic fabric pressure micro-sensor. In terms of method, it implements a pressure detection method based on the principle of hydrostatic pressure transmission. Specifically, it is a pressure detection method in which the pressure to be measured is transmitted through hydraulic conduction and scaled by a certain multiple before detection.

[0034] Figure 1 This is a schematic structural diagram of a hydraulic-conduction micro pressure sensor according to Embodiment 1 of the present invention. The structure of Embodiment 1 includes but is not limited to: an encapsulation housing 11, a cavity wall 12 with a through hole on each of the upper and lower wall surfaces, an I-shaped pressure introduction part 13, an upper sealing ring 14, a lower sealing ring 15, an I-shaped pressure export part 16, a pressure sensing part 17, and a conduction circuit, which is not shown in Figure 1 the figure; for the cavity wall, the opening area of the through hole on its upper wall surface is S1 and a limiting structure 121 is provided on the hole wall, and the opening area of the lower wall surface is S2; for the pressure introduction part, there are an upper pressure guide plate 131, a lower pressure guide plate 133, and a short push rod 132; for the pressure export part, it includes an upper bearing plate 161, a lower bearing plate 163, and a short push rod 162; the cavity wall, the upper sealing ring, the lower sealing ring, the lower pressure guide plate, and the upper bearing plate together enclose a sealed fluid cavity 18; the pressure sensing part includes a thin film pressure sensing layer 172 and a gasket layer 171; for the thin film pressure sensing layer, its upper surface is attached to the lower surface of the lower bearing plate, its lower surface is fixedly attached to the gasket layer, and the lower surface of the gasket layer is fixedly attached to the inner bottom surface of the encapsulation housing.

[0035] The liquid medium for hydraulic conduction is completed by the prior art of microporous liquid injection, which is as follows: Liquid is injected into the sealed fluid cavity through the liquid injection hole. When the upper surface of the lower pressure guide plate is in contact with the lower surface of the limit structure, it means that the sealed fluid cavity is filled with liquid, and the liquid injection is ended and the liquid injection hole is sealed. Further, the microporous liquid injection is specifically pressurized microporous liquid injection, and the end condition is that the detected pressure of the thin film pressure sensing layer 172 reaches the preset threshold F0 and maintains for a certain time threshold T0 before ending the liquid injection; the existence of the threshold F0 means that the hydrostatic pressure of the liquid for microporous liquid injection is greater than the standard atmospheric pressure, which is beneficial to fitting the lower pressure guide plate and the limit structure more tightly; A hydraulic conduction micro pressure sensor, preferably the use steps, including pre-measurement before measurement, applying the detected value of the pressure to be measured, which is the difference between the detected values of the thin film pressure sensing layer before and after applying the pressure to be measured.

[0036] The hydraulic conduction elastic fabric pressure microsensor of Example 1 has a pressure signal amplification function. The lower pressure guide plate is a cylindrical thin sheet with a cross-sectional area S3, and S3 = 0.96S1; the upper pressure bearing plate is a cylindrical thin sheet with a cross-sectional area S4, and S4 satisfies S4 = 0.96S2; the pressure to be measured applied to the surface of the upper pressure guide plate is conducted through the liquid in the sealed fluid cavity, and the hydraulic pressure borne by the upper pressure bearing plate is N times the pressure to be measured, where N = S4 / S3; in Example 1, N = 25, that is, the pressure to be measured is amplified 25 times.

[0037] Based on the existing manufacturing technology level, a set of dimensional parameter examples of the hydraulic conduction elastic fabric pressure microsensor of Example 1 are as follows: The overall thickness range of the hydraulic conduction micro pressure sensor is 10.0 mm; the thickness ranges of the pressure introduction part, the pressure export part, and the pressure sensing part are all 2.0 mm; the thickness range of the bottom surface of the packaging shell is 1.5 mm, and the thickness range of the liquid between the lower pressure guide plate and the upper pressure bearing plate is 2.5 mm; the equivalent diameter range of the perimeter of the outer surface of the bottom surface of the packaging shell is 15 mm; the thickness is defined as the height difference between the highest point and the lowest point of an object placed on the horizontal ground.

[0038] The preferred type of the thin film pressure sensing layer of the hydraulic conduction elastic fabric pressure microsensor: It is a thin film pressure sensor, which is a combination of one or several of the four types of capacitive, resistive, triboelectric, and piezoelectric types.

[0039] Figure 2 For Figure 1 The cross-sectional view of the device of Example 1 shown. Figure 2 In it: 21 is the pressure export part, 22 is the upper sealing ring, 23 is the cavity wall, 24 is the packaging shell, 25 is the lower sealing ring, 26 is the pressure export part, 27 is the pressure sensing part, and 28 is the liquid medium of the closed fluid cavity.

[0040] Figure 2 Further show the process of the hydraulic conduction of the pressure to be measured in the device of Embodiment 1: The pressure to be measured F1 is applied to the upper surface of the upper pressure plate of the pressure introduction part; the liquid pressure F2 is the hydraulic pressure on the lower surface of the lower pressure plate of the pressure introduction part; the liquid pressure F3 is applied to the upper surface of the upper bearing plate of the pressure export part; ignoring the supporting force of the middle part of the sealing ring made of flexible material, since N = 25, it can be known that F1 = F2 and F3 = 25F2.

[0041] Figure 3 Schematic diagram of the seal ring structure of the present invention. Figure 3 The shown seal ring is the upper seal ring or the lower seal ring, Figure 3 Describe an exemplary structure thereof. Figure 3 In it: 31 is the outer edge part of the seal ring, 32 is the inner edge part of the seal ring, and 33 is the middle part of the seal ring. Figure 3 The shown seal ring is the upper seal ring or the lower seal ring described above. From the outer edge to the inside, it is successively the outer edge part, the middle part, and the inner edge part; the middle part is made of flexible material and is not fixedly connected to other objects; the flexible material is a known material in the art and is made of one or several materials of elastic plastics, waterproof fabrics, non-woven fabrics, rubbers, and silicones.

[0042] The middle part has a bent and / or wrinkled structure to generate stretchability; the stretchability means that within a certain stretching range, it has no supporting force and tensile force on the connected object, reducing the loss in the conduction process of the pressure to be measured from the lower pressure plate to the liquid and then to the upper bearing plate.

[0043] Preferably, the flexible material is made of one or more thermoplastic polymers known in the art; the polymers include, but are not limited to: polyvinyl alcohol (PVA), polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyarylate, polyimide (PI), polyethylene naphthalate glycol (PEN), polyethylene, polypropylene, polypropylene copolymer, polybutene, nylon 6, nylon 11, nylon 12, nylon 46, nylon 66, polyethylene terephthalate, ethylene / acrylic acid copolymer, ethylene / maleic acid copolymer, ethylene / methacrylic acid copolymer, ethylene / vinyl acetate copolymer, polyvinyl acetate, polyoxymethylene, styrene copolymer, polyacrylate, polymethacrylate, polyetherimide, polysulfone, and / or their combinations.

[0044] The present invention also proposes a flexible pressure sensing device on a flexible substrate, and its structure includes a flexible substrate 41, an array of microsensors 42 fixed to the flexible substrate 41, and a printed circuit 43 printed on the flexible substrate 41.

[0045] A flexible pressure sensing device has a total of S micro sensors, where S = A × B, and is installed and fixed on the surface of a flexible substrate in the form of an array of A rows and B columns. Each of the micro sensors is electrically connected to a data processor through a printed circuit. The flexible pressure sensing device implements the following working method. The surface of the flexible substrate is divided into S regions of A rows and B columns, and there is exactly one micro sensor in each region. Define the element f ij of the matrix F with A rows and B columns, and f ij represents the measurement value of the micro sensor in the region where the i-th row and the j-th column intersect among the S regions divided on the surface of the flexible substrate. Then the matrix F describes the two-dimensional pressure distribution on the surface of the flexible substrate. The i is an integer satisfying 1 ≤ i ≤ A, and the j is an integer satisfying 1 ≤ j ≤ B.

[0046] Figure 4 FIG. is a schematic structural diagram of a flexible array sensing device according to Embodiment 2 of the present invention and is an embodiment of the flexible pressure sensing device. Figure 4 In FIG., 41 is a flexible substrate, 42 is a micro sensor, 43 is a printed circuit, and 44 is an external port. The flexible tape substrate is made of one or several existing known elastic materials such as plastic, fabric, non-woven fabric, rubber, and silicone. The micro sensor is the hydraulic conduction micro pressure sensor of Embodiment 1.

[0047] Figure 4 As shown, the flexible substrate is divided into 20 regions of 5 rows and 4 columns, and there is only one micro sensor in each region. Define the element f ij of the matrix F with 5 rows and 4 columns, and f ij represents the measurement value of the micro sensor in the region where the i-th row and the j-th column intersect among the 20 regions of the flexible tape substrate. Then the matrix F describes the two-dimensional pressure distribution on the surface of the flexible substrate in Embodiment 2. The i is an integer satisfying 1 ≤ i ≤ 5, and the j is an integer satisfying 1 ≤ j ≤ 4.

[0048] Figure 4 In Embodiment 2 of the present invention shown, the micro pressure sensor array is distributed on the surface of the flexible substrate, realizing a flexible array sensing device, which can be applied to the research on the pressure performance test of elastic fabrics, and can also be used for the pressure test of elastic materials such as wearable devices, smart clothing, human body surface pressure monitoring, and covering the surface of a human body model. In the flexible pressure sensing device of Embodiment 2 of the present invention, the micro sensor is inside the packaging shell, and its measurement accuracy and reliability do not depend on the flatness of the flexible substrate. Different from the existing flexible sensors, the flexible sensor of Embodiment 2 does not need to cooperate with a gasket.

[0049] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, or improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A hydraulic conduction elastic fabric pressure microsensor, characterized in that, It includes an encapsulation housing (11), a cavity wall (12) with a through hole on each of the upper and lower wall surfaces, an I-shaped pressure introduction part (13), an upper sealing ring (14), a lower sealing ring (15), an I-shaped pressure export part (16), a pressure sensing part (17), and a conduction circuit; the opening area of the through hole on the upper wall surface is S1, and there is a limiting structure (121) protruding relative to the hole wall surface on the hole wall; the opening area of the through hole on the lower wall surface is S2, and the cavity wall (12) is fixed inside the encapsulation housing (11); The I-shaped pressure introduction part (13) includes an upper guide pressing plate (131) located above the outside of the cavity wall (12), a lower guide pressing plate (133) located below the limiting structure, and a short push rod (132) connecting the two upper and lower guide pressing plates; the lower guide pressing plate (133) is a body with a constant cross-section area of S3, and its cross-section is geometrically similar to the through hole on the upper wall surface; The I-shaped pressure export part (16) includes an upper bearing pressing plate (161), a lower bearing pressing plate (163), and a short push rod (162) connecting the two bearing pressing plates; the I-shaped pressure export part (16) is arranged at the through hole on the lower wall surface; the upper bearing pressing plate (161) is a body with a constant cross-section area of S4, and its cross-section is geometrically similar to the through hole on the lower wall surface; a pressure sensing part (17) is arranged below the I-shaped pressure export part (16); The pressure sensing part (17) includes a thin film pressure sensing layer (172) and a gasket layer (171); The cavity wall, the upper sealing ring, the lower sealing ring, the lower guide pressing plate, and the upper bearing pressing plate jointly enclose a sealed fluid cavity (18); The pressure to be measured applied to the surface of the upper guide pressing plate is conducted through the liquid in the sealed fluid cavity and scaled by a certain multiple, and then the pressure sensing part detects the pressure, and the scaling multiple is S4 / S3 or S3 / S4; The upper surface of the thin film pressure sensing layer (172) is fixedly attached to the lower surface of the lower bearing pressing plate (163), the lower surface of the thin film pressure sensing layer (172) is fixedly attached to the upper surface of the gasket layer (171), and the lower surface of the gasket layer (171) is fixedly attached to the inner bottom surface of the encapsulation housing (11); The outer edges of the upper sealing ring (14) and the lower sealing ring (15) are successively an annular outer edge part (31), an intermediate part (33) of flexible material, and an annular inner edge part (32) inward; the inner edge part of the upper sealing ring (14) is fixedly attached to the surface of the lower guide pressing plate (133), the outer edge part is fixedly attached to the upper wall surface of the cavity wall (12), and the intermediate part is not fixedly connected to other objects; for the lower sealing ring (15), its inner edge part is fixedly attached to the surface of the upper bearing pressing plate (161), the outer edge part is fixedly attached to the lower wall surface of the cavity wall (12), and the intermediate part is not fixedly connected to other objects; A flexible pressure sensing device based on the above-mentioned elastic fabric pressure microsensor with hydraulic conduction, the structure of which includes a flexible substrate (41), a microsensor (42) fixed on the flexible substrate (41), a printed circuit (43) printed on the flexible substrate (41), and an external port (44); the flexible substrate (41) is made of one or several materials known in the art, and is made of one or several of plastic, fabric, non-woven fabric, rubber, and silicone.

2. The elastic fabric pressure microsensor with hydraulic conduction according to claim 1, characterized in that S3 satisfies 0.95S1 < S3 < 0.99S1; S4 satisfies 0.95S2 < S4 < 0.99S2; and S3 < S4. This pressure microsensor has a pressure signal amplification function, that is, the pressure to be measured applied to the surface of the upper pressure guide plate (131) is amplified by N times after being conducted through the liquid in the sealed fluid chamber (18) to the pressure to be measured on the upper bearing plate (161), where N = S4 / S3; the "cross-section" refers to the cross-section in the horizontal direction.

3. The elastic fabric pressure microsensor with hydraulic conduction according to claim 1, characterized in that, The maximum detection pressure F of the thin film pressure sensing layer (172) max ; S3 satisfies 0.95S1 < S3 < 0.99S1; S4 satisfies 0.95S2 < S4 < 0.99S2; S3 > S4. This pressure microsensor has the function of reducing the pressure signal, that is, the pressure to be measured applied to the surface of the upper pressure guide plate is reduced by N times after being conducted through the liquid in the sealed fluid chamber (18) to the pressure to be measured of the upper bearing plate. N = S3 / S4, then the maximum detectable pressure of this pressure microsensor is N×F max ; The "cross-section" refers to the cross-section in the horizontal direction.

4. The elastic fabric pressure microsensor with hydraulic conduction according to claim 1, wherein The overall thickness range of the hydraulic conduction micro pressure sensor is 5 - 15 mm; the thickness ranges of the I-shaped pressure introduction part (13), the I-shaped pressure export part (16), and the pressure sensing part (17) are all 1 - 3 mm respectively; the thickness range of the bottom surface of the packaging shell (11) is 1 - 2 mm, and the thickness range of the liquid between the lower pressure guide plate (133) and the upper bearing plate (161) is 1 - 4 mm; the equivalent diameter range of the perimeter of the outer surface of the bottom surface of the packaging shell (11) is 4 - 15 mm; the thickness is defined as the height difference between the highest point and the lowest point of an object placed on a horizontal ground.

5. The elastic fabric pressure microsensor with hydraulic conduction according to claim 1, characterized in that, The middle parts of the upper sealing ring (14) and the lower sealing ring (15) are made of flexible materials and are not fixedly connected to other objects; the flexible materials are made of one or several of elastic plastics, waterproof fabrics, non-woven fabrics, rubber, and silicone; the middle parts have bending and / or wrinkling structures to generate stretchability; the stretchability means that within a certain stretching range, there is no supporting force and tensile force on the connected object, reducing the pressure conduction loss of the pressure to be measured from the lower pressure guide plate to the liquid and then to the upper bearing plate.

6. The elastic fabric pressure microsensor with hydraulic conduction according to claim 5, characterized in that, The flexible material is made of one or more thermoplastic polymers; the thermoplastic polymers are one of polyvinyl alcohol (PVA), polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyarylate, polyimide (PI), polyethylene naphthalate glycol ester (PEN), polyethylene, polypropylene, polypropylene copolymer, polybutene, nylon 6, nylon 11, nylon 12, nylon 46, nylon 66, ethylene / acrylic acid copolymer, ethylene / maleic acid copolymer, ethylene / methacrylic acid copolymer, ethylene / vinyl acetate copolymer, polyvinyl acetate, polyoxymethylene, styrene copolymer, polyacrylate, polymethacrylate, polyetherimide, polysulfone, and / or their combinations.

7. The elastic fabric pressure microsensor with hydraulic conduction according to claim 1, characterized in that, The thin film pressure sensing layer (172) is a thin film pressure sensor of one type among capacitive, resistive, piezoelectric, and triboelectric types.

8. A hydraulic-conductive elastic fabric pressure microsensor according to claim 1, characterized in that, The micro sensors (42) are mounted and fixed on the surface of the flexible substrate (41) in an array form of A rows and B columns. Through the printed circuit (43), each micro sensor (42) exchanges data with the data processor, and S = A × B. A flexible pressure sensing device implements the following working method. The surface of the flexible substrate (41) is divided into S regions of A rows and B columns, and there is and only one micro sensor (42) in each region. Define the element f ij , f ij representing the measurement value of the micro sensor (42) in the intersection region of the i-th row and the j-th column among the S regions divided on the surface of the flexible substrate (41). Then the matrix F describes the two-dimensional pressure distribution on the surface of the flexible substrate (41). The i is an integer satisfying 1 ≤ i ≤ A, and the j is an integer satisfying 1 ≤ j ≤ B.

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