Aluminum nitride ceramic substrate drying device

Abstract

The invention provides an aluminum nitride ceramic substrate drying device, which relates to the field of drying equipment and comprises: a mounting component, on which a conveying component is mounted, a middle groove is arranged at the middle position of a mounting plate of the mounting component, a conveying belt of the conveying component has convex strips to reduce the contact between the substrate and the conveying belt, and the end of the conveying belt is in close contact with a flipping component, so that the flipping component carries the substrate and then rotates, and because the conveying component is arranged as two groups symmetrical about the center of a circle, the flipping component flips the substrate to the conveying component on the other side, so that the flipping component flips the substrate, and the filtering component and the drying component installed at the conveying component achieve a stable drying effect on the substrate, which is beneficial to the existing drying equipment, which can only dry a single side of the aluminum nitride ceramic substrate and cannot dry both sides at the same time, resulting in the problem that the equipment needs to be flipped manually, and the substrate is easily damaged or adhered with dust.

Description

Technical Field

[0001] The invention relates to the technical field of drying equipment, and in particular to a drying device for an aluminum nitride ceramic substrate. Background Art

[0002] As people's living conditions improve, the use of some electronic products is gradually increasing, and thus the demand for circuit boards used in electronic equipment is also increasing. In recent years, an electronic circuit substrate made of aluminum nitride ceramics has emerged. The substrates made of aluminum nitride ceramics have high thermal conductivity and good mechanical properties, and are ideal materials for circuit substrates.

[0003] After the production of aluminum nitride ceramic substrates, the products of the aluminum nitride ceramic substrates need to be cleaned. The cleaned aluminum nitride ceramic substrates need to be dried and packaged for subsequent processing. Generally, aluminum nitride ceramic substrates are in sheet form and are laid on a conveyor belt for transportation. During the existing general drying during transportation, only one side can be dried, and the upper and lower end surfaces cannot be dried at the same time. Manual secondary flipping is required, resulting in unnecessary work costs. Summary of the invention

[0004] In view of this, the present invention provides an aluminum nitride ceramic substrate drying device to solve the problem that the existing drying equipment can only dry one side of the aluminum nitride ceramic substrate and cannot dry both sides at the same time, resulting in the need for manual flipping of the equipment, which is prone to damage or dust on the substrate.

[0005] The present invention provides an aluminum nitride ceramic substrate drying device, which specifically comprises: a mounting component, a conveying component is mounted on the mounting component, a middle groove is arranged at the middle position of a mounting plate of the mounting component, an adjusting component is mounted near the middle groove of the conveying component, a flipping component is rotatably mounted at the upper end of the middle groove, a limiting component is mounted on the flipping component, a mounting side frame is arranged at the outer end of the mounting plate, the mounting side frame is arranged as a frame structure, a drying component is clamped and mounted at the mounting side frame, and a filtering component is additionally mounted on the drying component near the conveying component.

[0006] The cam is an L-shaped structure, and the upper end of the cam is provided with an outwardly inclined extension rod, and the shaft body installed on the extension rod of the cam is supported on the conveying part. The inclined extension rod is provided on the cam, so that the shaft body on the extension rod can stably adjust the position of the conveying part, so that the conveying part can be better close to the flipping part, which is convenient for the conveying part to convey the substrate. The cam is slidably installed on the outer wall of the mounting plate near the upper end, and an adjusting rod is screwed on the cam, and the adjusting rod is axially installed on the outer wall of the mounting plate where the cam is installed. The adjusting rod is arranged to be screwed on the cam, and the adjusting rod is axially fixed on the mounting plate, so as to realize the function of rotating the adjusting rod to adjust the position of the cam, and the cam and the adjusting rod are arranged as two groups symmetrical front and back, and the two groups of adjusting rods are synchronously transmitted through a synchronous shaft, and the adjusting rods of the symmetrical structure are transmitted through the synchronous shaft, so as to realize the stable and synchronous transmission of the two groups of adjusting rods.

[0007] Furthermore, the conveyor belt of the conveying component is installed at the upper end position of the installation component, the end of the conveyor belt is installed at the adjusting component, and the outer wall of the conveyor belt is provided with convex strips. The convex strips are provided on the outer wall of the conveyor belt, so that when the conveyor belt transports the substrate, the contact area between the substrate and the conveyor belt is reduced, so that a part of the hot air of the drying component can pass through the bottom of the substrate, thereby increasing the drying efficiency of the substrate.

[0008] Furthermore, the mounting shaft of the flip component is rotatably mounted between two groups of conveying components that are symmetrical in center of a circle, a mounting frame is provided at the outer end of the mounting shaft at the middle groove position, and eight groups of extension plates are provided on the outer wall of the mounting frame, and the eight groups of extension plates are arranged radially, and the extension plates on the mounting frame are arranged to be arranged radially, so that after the flip component carries the substrate, the substrate can be stably turned over by rotating the mounting shaft, so that the substrate can be dried on both sides, and transmission rods are rotatably mounted at the left and right sides of the extension plates, and a flip conveyor belt is installed on the transmission rod, and an inner mounting frame is provided at the inner wall of the transmission rod on which the mounting frame is installed, and a transmission wheel is rotatably mounted at the outer end of the inner mounting frame close to the transmission rod, and the transmission wheel is contacted with the shaft body of the adjusting component, first the shaft body of the adjusting component contacts with the conveyor belt, and the transmission wheel is arranged to contact with the shaft body of the adjusting component, so that the transmission wheel can transmit the power of the conveying component, and at this time the transmission wheel contacts with the transmission rod again, so that the transmission rod can drive the flip conveyor belt at the external position to rotate, so that the flip conveyor belt of the flip component and the conveyor belt of the conveying component can stably convey the substrate to the right position.

[0009] Furthermore, the mounting strip of the limiting component is clamped at the root between each group of extension plates on the mounting frame, and protective strips are arranged at the positions on both sides of the mounting strip, and a rubber strip is arranged on the outer wall of the protective strip. Since the flipping component is arranged to rotate to flip the substrate, when the substrate is flipped at this time, it will basically lean against the position of the mounting frame, and the mounting strip and the protective strip are installed at the mounting frame, so that the protective strip and the mounting strip can protect the substrate, and the protective strip with the rubber strip further increases the protection of the substrate by the protective strip. There are spacing grooves between adjacent protective strips, and the spacing grooves of the protective strips are installed on the limiting strips. The limiting strips are in the shape of long rods, and a clamping head is arranged at the end of the limiting strip. The limiting strip is arranged close to the extension plate once, and the clamping head is clamped on the end surface of the extension plate. First, the flip conveyor belt at the flipping component is used to carry the substrate. At this time, in order to prevent the substrate from slipping from the flipping component, the limiting strip is installed at the spacing groove position of the protective strip, so that the limiting strip can limit the position of the substrate, and the clamping head is clamped on the end surface of the extension plate, which further increases the stability of the limiting strip.

[0010] Furthermore, the bottom of the drying box of the drying component is fixed on the mounting side frame, and the drying box is arranged to be fixed on the mounting side frame of the mounting component, so that the drying box can be easily maintained in the later stage. Two groups of external fans are installed on the outer wall of the drying box, and three groups of internal partitions are arranged on the inner wall of the drying box. The three groups of internal partitions arranged inside the drying box have the effect of assisting in guiding the airflow of the external fan. The opening at the top of the drying box is close to the conveying component, and the opening of the drying box is arranged to be close to the conveying component, so that the air in the drying box can be stably conveyed to the conveying component, so that the drying component dries the substrate on the conveying component.

[0011] Furthermore, the air collecting frame of the filter component is in a "U"-shaped structure, and the air collecting frame is slidably installed at the top of the drying box near the conveying component. The air collecting frame is installed at the position of the drying box close to the conveying component, so that the air collecting frame can slide down, allowing the drying component to be better close to the conveying component when blowing air, thereby increasing the drying of the substrate on the conveying component by the drying component. An installation frame is slidably installed at the position of the drying box where the air collecting frame is installed. The installation frame installed on the drying box is in a frame shape, so that the installation frame can not only install a filter, but also add a heating component, thereby further increasing the heat dissipation to the substrate.

[0012] Beneficial Effects

[0013] 1. The present invention directly installs the conveying component and the adjusting component on the installation component. The adjusting component realizes the tension adjustment of the conveying component. The conveying belt of the conveying component has convex strips to reduce the contact between the substrate and the conveying belt. The end of the conveying belt is in close contact with the flipping component, so that the flipping component carries the substrate and then rotates. Since the conveying component is arranged as two groups symmetrical about the center of a circle, the flipping component will flip the substrate to the conveying component on the other side, so as to realize the flipping of the substrate by the flipping component, and the filtering component and the drying component installed at the conveying component can achieve a stable drying effect on the substrate.

[0014] 2. The present invention arranges an inclined extension rod at the sliding frame, so that the shaft on the extension rod can stably adjust the position of the conveying component, so that the conveying component can be closer to the flipping component, which is convenient for the conveying component to convey the substrate. The adjustment rod is arranged to be screwed on the sliding frame, and the adjustment rod is axially fixed on the mounting plate, so that the position of the sliding frame can be adjusted by rotating the adjustment rod. The symmetrically structured adjustment rods are transmitted through the synchronization shaft, and the rotation of the synchronization shaft can realize the stable and synchronous transmission of the two groups of adjustment rods.

[0015] 3. The present invention arranges convex strips on the outer wall of the conveyor belt, so that the contact area between the substrate and the conveyor belt is reduced when the conveyor belt is conveying the substrate, allowing a portion of the hot air from the drying components to pass through the bottom of the substrate, thereby increasing the drying efficiency of the substrate.

[0016] Fourth, the present invention arranges the extension plates on the mounting frame to be arranged radially, so that after the flip component carries the substrate, the substrate can be stably turned over by rotating the mounting shaft, so that the substrate can be dried on both sides. First, the shaft of the adjusting component is in contact with the conveyor belt, and the transmission wheel is arranged to be in contact with the shaft of the adjusting component, so that the transmission wheel can transmit the power of the conveying component. At this time, the transmission wheel is in contact with the transmission rod, so that the transmission rod can drive the flip conveyor belt at the external position to rotate, so that the flip conveyor belt of the flip component and the conveyor belt of the conveying component can stably convey the substrate to the right place.

[0017] 5. In the present invention, since the flipping component is configured to rotate to flip the substrate, when the substrate is flipped, the substrate will lean against the position of the mounting frame, and the mounting bar and the protective strip are installed at the mounting frame to protect the substrate, and the protective strip with rubber strip further increases the protection of the substrate by the protective strip. First, the flipping conveyor belt at the flipping component is used to carry the substrate. At this time, in order to prevent the substrate from slipping from the flipping component, a limit strip is installed at the spacing groove position of the protective strip to limit the position of the substrate, and the clamping head is clamped on the end surface of the extension plate to further increase the stability of the limit strip.

[0018] 6. The present invention arranges the drying box to be fixed on the mounting side frame of the mounting component, so that the drying box can be easily maintained in the later stage. The three groups of internal partitions arranged inside the drying box have the effect of assisting in guiding the airflow of the external fan. The opening of the drying box is arranged close to the conveying component, so that the air in the drying box can be stably transported to the conveying component, so that the drying component dries the substrate on the conveying component. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the embodiment of the present invention, the drawings of the embodiment are briefly introduced below.

[0020] The drawings described below are only related to some embodiments of the present invention, but are not intended to limit the present invention.

[0021] In the attached picture:

[0022] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention.

[0023] Figure 2 It is a schematic diagram of the installation structure of a drying box according to an embodiment of the present invention.

[0024] Figure 3 It is a schematic diagram of the structure of the installation components of an embodiment of the present invention.

[0025] Figure 4 It is a schematic diagram of the internal structure of a drying box according to an embodiment of the present invention.

[0026] Figure 5 It is a schematic diagram of the structure of the flip component of an embodiment of the present invention.

[0027] Figure 6 It is a schematic diagram of the structure of the regulating component of an embodiment of the present invention.

[0028] Figure 7 It is a schematic diagram of the structure of the limiting component of an embodiment of the present invention.

[0029] Figure 8 The embodiment of the present invention Figure 5 Schematic diagram of the local enlarged structure at point A in the middle.

[0030] Reference numerals list

[0031] 1. Installation components; 101. Installation plate; 102. Installation side frame; 103. Middle slot; 2. Adjustment components; 201. Sliding frame; 202. Adjustment rod; 203. Synchronous shaft; 3. Conveying components; 301. Conveyor belt; 4. Flipping components; 401. Installation shaft; 402. Installation frame; 403. Extension plate; 404. Transmission rod; 405. Installation inner frame; 406. Transmission wheel; 5. Limiting components; 501. Installation strip; 502. Protection strip; 503. Limiting strip; 504. Clamping head; 6. Drying components; 601. Drying box; 602. External fan; 603. Internal partition; 7. Filter components; 701. Wind collecting frame; 702. Installation frame. DETAILED DESCRIPTION

[0032] In order to make the purpose, scheme and advantages of the technical solution of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of specific embodiments of the present invention.

[0033] Example: Please refer to Figures 1 to 8 As shown:

[0034] The present invention provides an aluminum nitride ceramic substrate drying device, comprising a mounting component 1, a conveying component 3 is mounted on the mounting component 1, a middle groove 103 is arranged at the middle position of a mounting plate 101 of the mounting component 1, an adjusting component 2 is arranged near the middle groove 103 of the conveying component 3, a flip component 4 is rotatably mounted on the upper end of the middle groove 103, a limiting component 5 is arranged on the flip component 4, a mounting side frame 102 is arranged at the outer end of the mounting plate 101, the mounting side frame 102 is arranged as a frame structure, a drying component 6 is clamped and mounted at the mounting side frame 102, and a filtering component 7 is additionally arranged near the conveying component 3 on the drying component 6.

[0035] Among them, the sliding frame 201 of the adjustment component 2 is in an "L"-shaped structure, and an outwardly inclined extension rod is provided at the upper end of the sliding frame 201. The shaft body installed on the extension rod of the sliding frame 201 is supported on the conveying component 3. The inclined extension rod is provided at the sliding frame 201, so that the shaft body on the extension rod can stably adjust the position of the conveying component 3, so that the conveying component 3 can be better close to the flip component 4, which is convenient for the conveying component 3 to convey the substrate. The sliding frame 201 is slidably installed on the outer wall of the mounting plate 101 near the upper end, and an adjusting rod 202 is screwed on the sliding frame 201. The adjusting rod 202 is axially installed on The sliding frame 201 is installed on the outer wall of the mounting plate 101, and the adjusting rod 202 is set to be screwed on the sliding frame 201, and the adjusting rod 202 is axially fixed on the mounting plate 101, so that the position of the sliding frame 201 can be adjusted by rotating the adjusting rod 202. The sliding frame 201 and the adjusting rod 202 are set as two groups symmetrical in front and back, and the two groups of adjusting rods 202 are synchronously transmitted through the synchronization shaft 203. The symmetrically structured adjusting rods 202 are transmitted through the synchronization shaft 203, and the synchronization shaft 203 is rotated to realize the transmission effect of stable and synchronous two groups of adjusting rods 202.

[0036] Among them, the conveyor belt 301 of the conveying component 3 is installed at the upper end position of the installation component 1, the end of the conveyor belt 301 is installed at the adjusting component 2, and the outer wall of the conveyor belt 301 is provided with convex strips. The convex strips are provided on the outer wall of the conveyor belt 301, so that when the conveyor belt 301 transports the substrate, the contact area between the substrate and the conveyor belt 301 is reduced, so that a part of the hot air of the drying component 6 can pass through the bottom of the substrate, thereby increasing the drying efficiency of the substrate.

[0037] Among them, the mounting shaft 401 of the flip component 4 is rotatably mounted between two groups of conveying components 3 with symmetric center, and a mounting frame 402 is arranged at the outer end of the mounting shaft 401 at the position of the middle groove 103, and eight groups of extension plates 403 are arranged on the outer wall of the mounting frame 402, and the eight groups of extension plates 403 are arranged radially. The extension plates 403 on the mounting frame 402 are arranged to be arranged radially, so that after the flip component 4 carries the substrate, the substrate can be stably turned over by rotating the mounting shaft 401, so that the substrate can be dried on both sides, and the transmission rods 404 are rotatably mounted at the left and right sides of the extension plates 403, and the flip conveyor belt is installed on the transmission rods 404 , an inner frame 405 is provided on the inner wall of the transmission rod 404 installed on the mounting frame 402, and a transmission wheel 406 is rotatably installed on the outer end of the inner frame 405 close to the transmission rod 404, and the transmission wheel 406 contacts the shaft of the adjusting component 2. First, the shaft of the adjusting component 2 contacts the conveyor belt 301, and the transmission wheel 406 is set to contact the shaft of the adjusting component 2, so that the transmission wheel 406 can transmit the power of the conveying component 3. At this time, the transmission wheel 406 contacts the transmission rod 404 again, so that the transmission rod 404 can drive the flip conveyor belt at the external position to rotate, so that the flip conveyor belt of the flip component 4 and the conveyor belt of the conveying component 3 can stably convey the substrate to the right place.

[0038] Among them, the mounting strip 501 of the limiting component 5 is clamped at the root between each group of extension plates 403 on the mounting frame 402, and protective strips 502 are arranged at the positions on both sides of the mounting strip 501. Rubber strips are arranged on the outer walls of the protective strips 502. Since the flipping component 4 is arranged to rotate to flip the substrate, when the substrate is flipped, the substrate will lean against the position of the mounting frame 402, and the mounting strip 501 and the protective strip 502 are installed at the mounting frame 402, so that the protective strip 502 and the mounting strip 501 can protect the substrate, and the protective strip 502 with the rubber strip further increases the protection of the protective strip 502 on the substrate, and spacers are arranged between adjacent protective strips 502. The limiting strip 503 is installed at the spacing slot of the protective strip 502. The limiting strip 503 is in the shape of a long rod. A clamping head 504 is arranged at the end of the limiting strip 503. The limiting strip 503 is arranged close to the extension plate 403. The clamping head 504 is clamped on the end surface of the extension plate 403. First, the flip conveyor belt at the flip component 4 is used to carry the substrate. At this time, in order to prevent the substrate from slipping from the flip component 4, the limiting strip 503 is installed at the spacing slot position of the protective strip 502, so that the limiting strip 503 can limit the position of the substrate, and the clamping head 504 is clamped on the end surface of the extension plate 403, which further increases the stability of the limiting strip 503.

[0039] Among them, the bottom of the drying box 601 of the drying component 6 is fixed on the mounting side frame 102, and the drying box 601 is set to be fixed on the mounting side frame 102 of the mounting component 1, so that the drying box 601 can be easy to maintain in the later stage, and two groups of external fans 602 are installed on the outer wall of the drying box 601, and three groups of internal partitions 603 are arranged on the inner wall of the drying box 601. The three groups of internal partitions 603 arranged inside the drying box 601 have the effect of assisting in guiding the airflow of the external fan 602. The top opening of the drying box 601 is close to the conveying component 3, and the opening of the drying box 601 is set to be close to the conveying component 3, so that the air in the drying box 601 can be stably transported to the conveying component 3, so that the drying component 6 can dry the substrate on the conveying component 3.

[0040] Among them, the air collecting frame 701 of the filter component 7 is in a "U" shape structure, and the air collecting frame 701 is slidably installed on the top of the drying box 601 near the conveying component 3. The air collecting frame 701 is installed at the position of the drying box 601 close to the conveying component 3, so that the air collecting frame 701 can slide down, allowing the drying component 6 to be better close to the conveying component 3 when blowing air, thereby increasing the drying of the substrate on the conveying component 3 by the drying component 6. An installation frame 702 is slidably installed at the position of the drying box 601 where the air collecting frame 701 is installed. The installation frame 702 installed on the drying box 601 is in a frame shape, so that the installation frame 702 can not only install a filter, but also add a heating component, thereby further increasing the heat dissipation to the substrate.

[0041] Specific usage and function of this embodiment: In the present invention, convex strips are arranged on the outer wall of the conveyor belt 301, so that when the conveyor belt 301 is conveying the substrate, the contact area between the substrate and the conveyor belt 301 is reduced, so that the hot air of a part of the drying component 6 can pass through the bottom of the substrate, so that the drying efficiency of the substrate is increased, and the extension plates 403 on the mounting frame 402 are arranged to be radially arranged, so that after the flip component 4 carries the substrate, the substrate can be stably turned over by rotating the mounting shaft 401, so that the substrate can be dried on both sides, first the shaft body of the adjusting component 2 is in contact with the conveyor belt 301, and the transmission wheel 406 is arranged to be in contact with the shaft body of the adjusting component 2, so that the transmission wheel 406 can transmit the power of the conveying component 3, and at this time the transmission wheel 406 is in contact with the transmission rod 404, so that the transmission rod 404 can drive the conveyor belt 301 at the external position to rotate, so that the conveyor belt 301 of the flip component 4 and the conveyor belt 301 of the conveying component 3 stably convey the substrate to the position, because the flip component 4 is arranged to rotate The substrate is flipped over automatically. When the substrate is flipped over, the substrate will lean against the position of the mounting frame 402. The mounting frame 402 is installed with a mounting bar 501 and a protective bar 502, so that the protective bar 502 and the mounting bar 501 can protect the substrate. The protective bar 502 with a rubber strip further increases the protection of the protective bar 502 on the substrate. First, the conveyor belt 301 at the flipping component 4 is used to carry the substrate. At this time, in order to prevent the substrate from slipping off the flipping component 4, a limit bar 50 is installed at the spacing groove of the protective bar 502. 3, the limit strip 503 is used to limit the position of the substrate, and the clamping head 504 is clamped on the end surface of the extension plate 403, which further increases the stability of the limit strip 503. The three groups of inner partition plates 603 arranged inside the drying box 601 have the effect of assisting in guiding the airflow of the external fan 602. The opening of the drying box 601 is arranged close to the conveying component 3, so that the air in the drying box 601 can be stably conveyed to the conveying component 3, so that the drying component 6 can dry the substrate on the conveying component 3.

Claims

1. A drying device for aluminum nitride ceramic substrate, characterized in that: include: An installation component (1), wherein a conveying component (3) is installed on the installation component (1), a middle groove (103) is provided at the middle position of the installation plate (101) of the installation component (1), an adjustment component (2) is installed on the conveying component (3) near the middle groove (103), the sliding frame (201) of the adjustment component (2) is in an "L"-shaped structure, an outwardly inclined extension rod is provided at the upper end of the sliding frame (201), and an axis body installed on the extension rod at the sliding frame (201) is supported on the conveying component (3), and the inclined extension rod is provided at the sliding frame (201) so that the axis body on the extension rod can stably adjust the position of the conveying component (3), so that the conveying component (3) can be better close to the flipping component (4), and it is convenient for the conveying component (3) to convey the substrate. The sliding frame (201) is slidably mounted on the outer wall of the mounting plate (101) near the upper end, and an adjusting rod (202) is screwed on the sliding frame (201). The adjusting rod (202) is axially mounted on the outer wall of the mounting plate (101) where the sliding frame (201) is mounted. The adjusting rod (202) is arranged to be screwed on the sliding frame (201), and the adjusting rod (202) is axially fixed on the mounting plate (101), so that the position of the sliding frame (201) can be adjusted by rotating the adjusting rod (202). The sliding frame (201) and the adjusting rod (202) are arranged as two groups symmetrical in front and back, and the two groups of adjusting rods (202) are synchronously driven by a synchronous shaft (203), and the adjusting rods (202) of the symmetrical structure are arranged to be screwed on the sliding frame (201). The rotating synchronous shaft (203) is realized by rotating the rotating synchronous shaft (203), the upper end of the middle groove (103) is rotatably mounted with a turnover component (4), the mounting shaft (401) of the turnover component (4) is rotatably mounted between two groups of conveying components (3) with symmetric center, the outer end of the mounting shaft (401) located at the middle groove (103) is provided with a mounting frame (402), eight groups of extension plates (403) are provided on the outer wall of the mounting frame (402), the eight groups of extension plates (403) are arranged radially, the extension plates (403) on the mounting frame (402) are arranged radially, the left and right sides of the extension plates (403) are both rotatably mounted with transmission rods (404), the transmission rods (404) are installed with a turnover conveyor belt, the transmission rods (404) installed on the mounting frame (402) 04) is provided with an inner frame (405) on the inner wall thereof, and a transmission wheel (406) is rotatably installed on the outer end of the inner frame (405) close to the transmission rod (404), and the transmission wheel (406) contacts the shaft of the adjusting component (2). First, the shaft of the adjusting component (2) contacts the conveyor belt (301), and the transmission wheel (406) is arranged to contact the shaft of the adjusting component (2), so that the transmission wheel (406) can transmit the power of the conveyor component (3). At this time, the transmission wheel (406) contacts the transmission rod (404), so that the transmission rod (404) can drive the flip conveyor belt at the external position to rotate, so that the flip conveyor belt of the flip component (4) and the conveyor belt (301) of the conveyor component (3) can stably convey the substrate to the right position.The mounting strip (501) of the limiting component (5) is clamped at the root between each group of extension plates (403) on the mounting frame (402), and protective strips (502) are arranged at both sides of the mounting strip (501). Rubber strips are arranged on the outer wall of the protective strip (502). Since the flipping component (4) is arranged to rotate to flip the substrate, when the substrate is flipped, the substrate will lean towards the position of the mounting frame (402). The limiting component (5) is installed on the flipping component (4), and spacing grooves are arranged between the protective strips (502) of the mounting strip (501). The spacing grooves of the protective strip (502) are installed on the limiting strip (503). The limiting strip (503) is in the shape of a long rod, and a clamping head (504) is arranged at the end of the limiting strip (503). The limiting strip (503) is arranged to be close to the extension plate (402). The plate (403) is provided with a clamping head (504) clamped on the end surface of the extension plate (403). First, the flip conveyor belt at the flip component (4) is used to carry the substrate. At this time, in order to prevent the substrate from sliding off the flip component (4), a limit strip (503) is installed at the spacing groove position of the protection strip (502), so that the limit strip (503) can limit the position of the substrate, and the clamping head (504) is clamped on the end surface of the extension plate (403), further increasing the stability of the limit strip (503). A mounting side frame (102) is provided at the outer end of the mounting plate (101), and the mounting side frame (102) is set as a frame structure. A drying component (6) is clamped and installed at the mounting side frame (102), and a filter component (7) is installed on the drying component (6) near the conveying component (3).

2. The aluminum nitride ceramic substrate drying device according to claim 1, characterized in that: The conveyor belt (301) of the conveying component (3) is mounted at the upper end of the mounting component (1), and the end of the conveyor belt (301) is mounted at the adjusting component (2). The outer wall of the conveyor belt (301) is provided with convex strips. The convex strips are provided on the outer wall of the conveyor belt (301), so that when the conveyor belt (301) is transporting the substrate, the contact area between the substrate and the conveyor belt (301) is reduced, so that a portion of the hot air of the drying component (6) can pass through the bottom of the substrate, thereby increasing the drying efficiency of the substrate.

3. The aluminum nitride ceramic substrate drying device according to claim 1, characterized in that: The bottom of the drying box (601) of the drying component (6) is fixed on the mounting side frame (102), and the drying box (601) is arranged to be fixed on the mounting side frame (102) of the mounting component (1), so that the drying box (601) can be easily repaired in the later stage. Two groups of external fans (602) are arranged on the outer wall of the drying box (601), and three groups of internal partition boards (603) are arranged on the inner wall of the drying box (601). The three groups of internal partition boards (603) arranged inside the drying box (601) have the effect of assisting in guiding the airflow of the external fans (602). The top opening of the drying box (601) is close to the conveying component (3), and the opening of the drying box (601) is arranged to be close to the conveying component (3), so that the air in the drying box (601) can be stably conveyed to the conveying component (3), so that the drying component (6) can dry the substrate on the conveying component (3).

4. The aluminum nitride ceramic substrate drying device according to claim 3, characterized in that: The air collecting frame (701) of the filter component (7) is in a "U"-shaped structure. The air collecting frame (701) is slidably installed at a position on the top of the drying box (601) close to the conveying component (3). The air collecting frame (701) is installed at a position of the drying box (601) close to the conveying component (3) so that the air collecting frame (701) can slide down, allowing the drying component (6) to be closer to the conveying component (3) when blowing air, thereby increasing the drying of the substrate on the conveying component (3) by the drying component (6). An installation frame (702) is slidably installed at the position of the air collecting frame (701) installed in the drying box (601). The installation frame (702) installed on the drying box (601) is in a frame shape, so that the installation frame (702) can be installed with a filter screen and a heating component can be added, thereby further increasing the heat dissipation to the substrate.

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