High-precision motion platform based on negative pressure motor hybrid

Abstract

The present invention provides a high-precision motion platform based on a negative pressure motor hybrid, comprising a power mechanism, a passive cavity sleeve, a passive cavity piston, a passive cavity support, an active cavity sleeve, an active cavity piston, and an active cavity drive screw. One end of the active cavity piston is slidably arranged inside the active cavity sleeve and forms a first enclosed space between the active cavity sleeve, and one end of the passive cavity piston is slidably arranged inside the passive cavity sleeve and forms a second enclosed space between the passive cavity sleeve. The interiors of the first enclosed space and the second enclosed space are both filled with fluid and connected through a fluid conduit. The inner diameter of the passive cavity sleeve is larger than the inner diameter of the active cavity sleeve. The diameter of the passive cavity sleeve of the present invention is larger than the diameter of the active cavity sleeve, so that the ratio of the passive cavity displacement to the active cavity displacement is inversely proportional to the cross-sectional area of ​​the sleeve. Using a screw module with lower precision can also obtain a higher precision output and a greater output force.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical equipment, and in particular to a high-precision motion platform based on negative pressure motor hybrid. Background Art

[0002] With technological advancements, automated production equipment is becoming increasingly popular. Motion platforms, for example, are often used to implement various functions in many automated production equipment. Linear motion platforms, for example, are driven by motors or pneumatic cylinders to achieve linear motion. When driven by a motor, the motor typically drives a lead screw to convert rotary motion into linear motion. For example, in laser cutting and laser marking equipment, a linear motion platform transports the workpiece to a predetermined location, where it is then processed.

[0003] However, it is often difficult for traditional motion platforms to achieve high-precision driving. Either the accuracy is insufficient and the workpiece processing accuracy cannot be guaranteed, or the structure is complex, with defects such as high cost, low precision, susceptibility to vibration interference, and inconvenience in use. Summary of the Invention

[0004] In view of the defects in the prior art, the purpose of the present invention is to provide a high-precision motion platform based on negative pressure motor hybrid.

[0005] According to the present invention, a high-precision motion platform based on a negative pressure motor hybrid is provided, comprising a power mechanism, a passive cavity sleeve, a passive cavity piston, a passive cavity support, an active cavity sleeve, an active cavity piston, and an active cavity drive screw;

[0006] One end of the active chamber piston is slidably arranged inside the active chamber sleeve and forms a first enclosed space between the active chamber sleeve, and one end of the passive chamber piston is slidably arranged inside the passive chamber sleeve and forms a second enclosed space between the passive chamber sleeve, the first enclosed space and the second enclosed space are both filled with fluid and communicated through a fluid conduit, wherein the passive chamber support and the active chamber sleeve are both fixed, and a kinematic pair is provided between the passive chamber sleeve and the passive chamber support so that the passive chamber sleeve can move relative to the passive chamber support under the driving of an external force;

[0007] When the power mechanism is running, it can drive the active chamber driving screw to rotate and then drive the active chamber piston to move left or right, so that the fluid in the first confined space flows into the second confined space or the fluid in the second confined space flows into the first confined space and then drives the passive chamber sleeve away from or close to the passive chamber piston, wherein the inner diameter of the passive chamber sleeve is larger than the inner diameter of the active chamber sleeve.

[0008] Preferably, the other end of the passive chamber piston is connected to the passive chamber support through a passive chamber connecting screw, and the passive chamber piston and the passive chamber connecting screw are both hollow structures. The first enclosed space is connected to the second enclosed space through the fluid conduit, the passive chamber connecting screw, and the passive chamber piston in sequence.

[0009] Preferably, a passive cavity end cover is mounted on the passive cavity connecting screw and can slide relative to the passive cavity connecting screw. The passive cavity end cover is firmly connected to the end of the passive cavity sleeve, and an elastomer is arranged between the passive cavity end cover and the passive cavity piston.

[0010] Preferably, the elastic body is a mechanical spring or a magnetic spring.

[0011] Preferably, a guide structure is provided between the passive chamber piston and the passive chamber sleeve, and between the active chamber piston and the active chamber sleeve.

[0012] Preferably, the guide structure can prevent the passive chamber piston and / or the active chamber piston from rotating.

[0013] Preferably, the active chamber driving screw and the active chamber piston are threadedly driven, wherein the threaded hole inside the active chamber piston is a blind hole.

[0014] Preferably, the fluid conduit is a flexible structure or a rigid structure.

[0015] Preferably, the kinematic pair is a contact kinematic pair or a non-contact magnetic kinematic pair.

[0016] Preferably, a sealing structure is provided between the passive chamber piston and the passive chamber sleeve, and between the active chamber piston and the active chamber sleeve.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. The diameter of the passive cavity sleeve of the present invention is larger than that of the active cavity sleeve, so that the ratio of the passive cavity displacement to the active cavity displacement is inversely proportional to the cross-sectional area of ​​the sleeve. Even using a screw module with lower precision can obtain higher precision output and greater output force.

[0019] 2. During the driving process, the present invention makes the gap between the screw rod modules relatively stable due to the negative pressure and the spring force, thereby improving the driving accuracy.

[0020] 3. The present invention uses liquid as the transmission medium, which has low noise, reduces internal vibration and improves accuracy.

[0021] 4. The present invention has a guide groove on the piston to prevent the piston from rotating. The bottom uses a self-compensating magnetic support. The overall structure does not require a guide rail, which reduces the generation of tiny particles and improves environmental cleanliness.

[0022] 5. The present invention uses a flexible fluid conduit to transfer fluid, so that the passive cavity and the active cavity can be arranged at different positions in space, and has good versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Other features, objects and advantages of the present invention will become more apparent upon reading the detailed description of non-limiting embodiments with reference to the following drawings:

[0024] Figure 1 It is a structural schematic diagram of the present invention;

[0025] Figure 2 Schematic diagram of the internal structure of the passive cavity sleeve;

[0026] Figure 3 Schematic diagram of the internal structure of the active cavity sleeve;

[0027] Figure 4 It is a schematic cross-sectional view of a passive cavity guide pin or an active cavity guide pin in a dovetail guide groove.

[0028] The figure shows:

[0029] 1-passive cavity sleeve, 2-passive cavity end cover, 3-passive cavity piston, 4-passive cavity sealing ring, 5-passive cavity guide pin, 6-passive cavity connecting screw, 7-spring, 8-passive cavity magnetic support, 9-passive cavity support magnetic support, 10-passive cavity support, 11-fluid conduit, 12-active cavity sleeve, 13-active cavity piston, 14-active cavity sealing ring, 15-active cavity guide pin, 16-active cavity drive screw, 17-screw support, 18-bearing, 19-coupling, 20-servo motor, 31-first confined space, 32-second confined space. DETAILED DESCRIPTION

[0030] The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those skilled in the art, several changes and improvements can be made without departing from the scope of the present invention. These all fall within the scope of protection of the present invention.

[0031] The present invention provides a high-precision motion platform based on negative pressure motor hybrid, such as Figure 1 、 Figure 2 、 Figure 3As shown, it includes a power mechanism, a passive cavity sleeve 1, a passive cavity piston 3, a passive cavity support 10, an active cavity sleeve 12, an active cavity piston 13 and an active cavity drive screw 16. One end of the active cavity piston 13 is slidably arranged inside the active cavity sleeve 12 and forms a first closed space 31 between the active cavity sleeve 12. One end of the passive cavity piston 3 is slidably arranged inside the passive cavity sleeve 1 and forms a second closed space 32 between the passive cavity sleeve 1. The first closed space 31 and the second closed space 32 are both filled with fluid and connected through a fluid conduit 11. Among them, the passive cavity support 10 and the active cavity sleeve 12 are both fixed. A kinematic pair is provided between the passive cavity sleeve 1 and the passive cavity support 10 so that the passive cavity sleeve 1 can move relative to the passive cavity support 10 under the drive of an external force. The active cavity drive screw 16 extends into the interior of the active cavity piston 13 and is threadedly engaged with the active cavity piston 13. The threaded hole in the active cavity piston 13 is a blind hole, which can prevent the first closed space 31 from being sealed tightly. When the power mechanism is in operation, it can drive the active chamber drive screw 16 to rotate, and thus, driven by the thread force, it can drive the active chamber piston 13 to move left or right, that is, along the axial direction of the active chamber drive screw 16. In other words, it can drive the active chamber piston 13 to move relative to the active chamber sleeve 12. When the active chamber piston 13 moves toward the interior of the active chamber sleeve 12, the internal volume of the first enclosed space 31 decreases, causing the fluid in the first enclosed space 31 to flow into the second enclosed space 32. The volume of the second enclosed space 32 increases, thereby pushing the passive chamber sleeve 1 in a direction away from the passive chamber piston 3. When the active chamber piston 13 moves toward the exterior of the active chamber sleeve 12, the volume of the first enclosed space 31 increases and the pressure decreases. At this time, the fluid in the second enclosed space 32 flows into the first enclosed space 31, causing the pressure in the second enclosed space 32 to decrease. Under the action of the external atmospheric pressure, the passive chamber sleeve 1 moves in a direction toward the passive chamber piston 3.

[0032] It should be noted that the inner diameter of the passive chamber sleeve 1 is larger than the inner diameter of the active chamber sleeve 12. Therefore, the ratio of the displacement of the passive chamber sleeve 1 to the displacement of the passive chamber piston 3 is inversely proportional to the cross-sectional area of ​​the sleeve. Therefore, the displacement generated when the power mechanism drives the active chamber piston 13 to move is minimized, making the driving displacement more accurate.

[0033] like Figure 2As shown, the other end of the passive cavity piston 3 is connected to the passive cavity support 10 via the passive cavity connecting screw 6. The kinematic pair is preferably a non-contact magnetic kinematic pair, including a passive cavity support magnetic support 9 disposed on the passive cavity support 10 and a passive cavity magnetic support 8 arranged on the passive cavity sleeve 1. Due to the magnetic repulsion between the passive cavity support magnetic support 9 and the passive cavity magnetic support 8, the gap between the passive cavity sleeve 1 is stabilized above the passive cavity support 10 where the passive cavity support magnetic support 9 is arranged. When the piston is extended, the distance between the two magnetic supports decreases, and the supporting force increases.

[0034] In practical applications, the kinematic pair may also be a contact-type kinematic pair, such as a structure in which a slide groove is matched with a slide rail, which can also achieve the effects of the present invention.

[0035] like Figure 1 、 Figure 2 As shown, the passive chamber piston 3 and the passive chamber connecting screw 6 are both hollow structures and are preferably coaxially arranged. The first enclosed space 31 is connected to the second enclosed space 32 via the fluid conduit 11, the passive chamber connecting screw 6, and the passive chamber piston 3 in sequence, enabling fluid circulation. The connection between the passive chamber piston 3 and the passive chamber connecting screw 6 is preferably threaded. To enhance the airtightness of the system, sealing considerations are necessary. For example, sealant or other sealing materials can be applied to the threads to ensure a sealed seal for the entire system.

[0036] It should be noted that the fluid conduit 11 is preferably a flexible structure. Therefore, the relative spatial arrangement of the passive cavity sleeve 1 and the active cavity sleeve 12 can be flexibly selected according to different application scenarios, allowing for a wider range of design options for matching the internal structure and external appearance of the product, thereby increasing versatility. In actual applications, the fluid conduit 11 can also adopt a rigid structure, such as a metal tube, to achieve the effects of the present invention.

[0037] A passive cavity connecting screw 6 is mounted with a passive cavity end cover 2. The clearance between the passive cavity connecting screw 6 and the passive cavity end cover 2 enables the passive cavity end cover 2 to slide freely on the passive cavity connecting screw 6. An elastomer is arranged between the passive cavity end cover 2 and the passive cavity piston 3. The passive cavity end cover 2 is tightly connected to the end of the passive cavity sleeve 1. The setting of the passive cavity end cover 2 is conducive to limiting the movement stroke of the passive cavity sleeve 1. At the same time, the passive cavity sleeve 1 and the passive cavity end cover 2 adopt a detachable assembly method, which is conducive to the assembly of various components.

[0038] Furthermore, when the passive cavity sleeve 1 moves, it drives the passive cavity end cover 2 to move synchronously, and the elastomer is compressed and shortened to store elastic potential energy. Therefore, the storage of elastic potential energy is increased on the basis of the negative pressure energy storage inside the second enclosed space 32, so that the energy storage density of the entire device is higher. The elastomer is preferably a mechanical spring 7, and the spring 7 can be designed to be always compressed, so that during the driving process, the piston movement is more stable with the cooperation of elastic potential energy, and the movement instability caused by the gap of the screw movement is reduced; in addition, the elastomer can also adopt a magnetic spring, such as arranging magnets with opposite magnetic poles on the opposite walls of the passive cavity end cover 2 and the passive cavity piston 3, which can also optimize the energy storage effect.

[0039] There are guide structures and sealing structures between the passive chamber piston 3 and the passive chamber sleeve 1, and between the active chamber piston 13 and the active chamber sleeve 12. The guide structure adopts a structure in which guide grooves and guide pins cooperate, and the sealing structure adopts a sealing ring.

[0040] Furthermore, if Figure 2 As shown, part or all of the passive chamber piston 3 is located inside the passive chamber sleeve 1, a passive chamber sealing ring 4 is installed in the end sealing groove, and a dovetail guide groove is opened on the side to cooperate with the passive chamber guide pin 5 connected to the passive chamber sleeve 1, as shown in FIG. Figure 4 As shown, it can play a guiding role and prevent the passive chamber piston 3 from rotating. Figure 3 As shown, part or all of the active chamber piston 13 is located inside the active chamber sleeve 12, and an active chamber sealing ring 14 is installed in the sealing groove at the end of the active chamber piston 13. A dovetail guide groove is opened on the side of the active chamber piston 13, which cooperates with the passive chamber guide pin 15 connected to the active chamber sleeve 12, which can not only play a guiding role, but also prevent the active chamber piston 13 from rotating.

[0041] Furthermore, the power mechanism includes a screw support 17, a bearing 18, a coupling 19 and a servo motor 20. The tail center of the active chamber piston 13 is threadedly connected to the active chamber drive screw 16. The active chamber drive screw 16 is connected to the coupling 19 through a through hole in the center of the screw support 17 equipped with a bearing 18. The servo motor 20 is connected to the other end of the coupling 19. When the servo motor 20 is running, it can drive the active chamber drive screw 16 to rotate. In actual application, the maximum movement stroke of the passive chamber sleeve 1 when it moves away from the passive chamber piston 3 can be limited by the passive chamber piston 3 due to the dovetail guide groove and the matching guide pin, which can effectively prevent the passive chamber sleeve 1 from being disengaged from the passive chamber piston 3.

[0042] like Figure 1 、 Figure 2 、 Figure 3 As shown, the working principle of the present invention is as follows:

[0043] Forward drive process:

[0044] When the servo motor 20 rotates forward, it drives the active chamber drive screw 16 to rotate. Under the restriction of the active chamber guide pin 15, the active chamber piston 13 can only move to the left along the inner wall of the active chamber sleeve 12, so that the fluid passes from the active chamber sleeve 12 through the fluid conduit 11, the passive chamber connecting screw 6, and the passive chamber piston 3 into the passive chamber sleeve 1. Under the restriction of the passive chamber guide pin 5, the passive chamber sleeve 1 moves to the left, and at the same time, the spring 7 is compressed to store energy.

[0045] Back drive process:

[0046] When the servo motor 20 reverses, it drives the active chamber driving screw 16 to rotate. Under the restriction of the active chamber guide pin 15, the active chamber piston 13 can only move to the right along the inner wall of the active chamber sleeve 12, so that the fluid enters the active chamber sleeve 12 from the passive chamber sleeve 1 through the passive chamber piston 3, the passive chamber connecting screw 6, and the fluid conduit 11. Under the action of negative pressure, the elastic force of the spring 7, and the restriction of the passive chamber guide pin 5, the passive chamber sleeve 1 moves to the right.

[0047] In the description of this application, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0048] The above describes specific embodiments of the present invention. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. The embodiments of this application and the features in the embodiments may be combined with each other in any manner unless there is a conflict.

Claims

1. A high-precision motion platform based on negative pressure motor hybrid, characterized in that: It comprises a power mechanism, a passive cavity sleeve (1), a passive cavity piston (3), a passive cavity support (10), an active cavity sleeve (12), an active cavity piston (13), and an active cavity driving screw (16); One end of the active chamber piston (13) is slidably arranged inside the active chamber sleeve (12) and forms a first closed space (31) between the active chamber sleeve (12); one end of the passive chamber piston (3) is slidably arranged inside the passive chamber sleeve (1) and forms a second closed space (32) between the passive chamber sleeve (1); the first closed space (31) and the second closed space (32) are both filled with fluid and communicated through a fluid conduit (11); wherein the passive chamber support (10) and the active chamber sleeve (12) are both fixed; a kinematic pair is provided between the passive chamber sleeve (1) and the passive chamber support (10) so that the passive chamber sleeve (1) can move relative to the passive chamber support (10) under the drive of an external force; When the power mechanism is in operation, it can drive the active chamber drive screw (16) to rotate and thereby drive the active chamber piston (13) to move leftward or rightward, thereby causing the fluid in the first enclosed space (31) to flow into the second enclosed space (32) or the fluid in the second enclosed space (32) to flow into the first enclosed space (31), thereby driving the passive chamber sleeve (1) to move away from or closer to the passive chamber piston (3), wherein the inner diameter of the passive chamber sleeve (1) is larger than the inner diameter of the active chamber sleeve (12).

2. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The other end of the passive chamber piston (3) is connected to the passive chamber support (10) via a passive chamber connecting screw (6); the passive chamber piston (3) and the passive chamber connecting screw (6) are both hollow structures; the first enclosed space (31) is connected to the second enclosed space (32) via a fluid conduit (11), the passive chamber connecting screw (6), and the passive chamber piston (3) in sequence.

3. The high-precision motion platform based on negative pressure motor hybrid according to claim 2 is characterized in that: A passive cavity end cover (2) is mounted on the passive cavity connecting screw (6), and the passive cavity end cover (2) is capable of sliding relative to the passive cavity connecting screw (6). The passive cavity end cover (2) is tightly connected to the end of the passive cavity sleeve (1), and an elastic body is arranged between the passive cavity end cover (2) and the passive cavity piston (3).

4. The high-precision motion platform based on negative pressure motor hybrid according to claim 3 is characterized in that: The elastic body is a mechanical spring (7) or a magnetic spring.

5. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: There are guide structures between the passive chamber piston (3) and the passive chamber sleeve (1), and between the active chamber piston (13) and the active chamber sleeve (12).

6. The high-precision motion platform based on negative pressure motor hybrid according to claim 5 is characterized in that: The guide structure can prevent the passive chamber piston (3) and / or the active chamber piston (13) from rotating.

7. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The active chamber driving screw (16) and the active chamber piston (13) are threadedly driven, wherein the threaded hole inside the active chamber piston (13) is a blind hole.

8. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The fluid conduit (11) is a flexible structure or a rigid structure.

9. The high-precision motion platform based on negative pressure motor hybrid according to claim 1 is characterized in that: The kinematic pair is a contact kinematic pair or a non-contact magnetic kinematic pair.

10. The high-precision motion platform based on negative pressure motor hybrid according to claim 1, characterized in that: There is a sealing structure between the passive chamber piston (3) and the passive chamber sleeve (1), and between the active chamber piston (13) and the active chamber sleeve (12).

Images