A quantitative feeding device

Abstract

The embodiment of the present invention provides a quantitative feeding device, which relates to the field of film coating and electroplating. The device comprises: a quantitative measuring device (10) and a feeding mechanism (20); the quantitative measuring device (10) comprises a measuring mechanism (120); the measuring mechanism (120) comprises a plurality of vertical rods (122), a dust removal head arranged at the lower end of each vertical rod (122), a pressure sensor (121) arranged at the lower end of the dust removal head, and a driving mechanism (123) for driving the vertical rods (122); the lower end of each vertical rod (122) has a plurality of holes; the feeding mechanism (20) has a feeding pipeline (230) connected to a feeding machine (220). According to the detection result, a corresponding amount of material is added to a corresponding container, so that the feeding amount in the container can be obtained in batches, and the amount can be directly added to the container according to the feeding amount, thereby improving the feeding efficiency and saving time and effort.

Description

Technical Field

[0001] The invention relates to the field of film plating and electroplating, and in particular to a quantitative feeding device. Background Art

[0002] Vacuum coating is the process of heating the evaporation material in a vacuum environment to make it evaporate, so that it is deposited on the surface of the coating object to form a thin film. Currently, the commonly used vacuum coating methods mainly include vacuum evaporation, molecular beam deposition and ion plating.

[0003] The existing evaporation source mainly places multiple small evaporation crucibles in the evaporation tank. The evaporation efficiency of multiple crucibles is inconsistent, resulting in some crucibles having residual plating materials after some crucibles are completely evaporated, resulting in inconsistent amounts of material added to each crucible when adding materials. When adding materials, it is impossible to quantify how much to add, and the only way is to check whether the crucible is full by human eyes. The feeding efficiency is low and it is time-consuming and labor-intensive. Summary of the invention

[0004] The embodiment of the present invention provides a quantitative feeding device, which can solve the problems in the prior art.

[0005] To achieve the above-mentioned purpose, an embodiment of the present invention provides a quantitative feeding device, comprising: a quantitative measuring device and a feeding mechanism; the feeding mechanism is connected to the quantitative measuring device;

[0006] The quantitative measuring device comprises: a measuring cavity with an opening facing downward and a measuring mechanism that can be raised and lowered, wherein the measuring mechanism is installed inside the measuring cavity; the measuring cavity has sliding parts on two opposite side walls at the opening side;

[0007] The measuring mechanism includes a plurality of vertical rods, a dust removal head disposed at the lower end of each of the vertical rods, a pressure sensor disposed at the lower end of the dust removal head, and a driving mechanism for driving the vertical rods to rise and fall; the driving mechanism is connected to the vertical rods;

[0008] The quantitative feeding device further comprises a calculation module, which is used to calculate the feeding amount of the container according to the downward pushing amount of each pressure sensor after the driving mechanism drives the vertical rod to drive the pressure sensor to move downward in the container;

[0009] The feeding mechanism comprises a feeding machine and a feeding pipeline connected to the feeding machine; the feeding machine is arranged at the top of the measuring cavity; and the feeding mechanism feeds the corresponding container according to the feeding amount of the container.

[0010] Preferably, the feeding mechanism further comprises a material storage body, a material storage cavity and a pull-out plate, the material storage body has a plurality of material storage holes; the feeding port of the feeding pipeline is movably aligned with the material storage holes;

[0011] The material storage body is movably connected to the side wall of the measuring cavity adjacent to the material storage body;

[0012] The pull-out plate is horizontally slidably engaged in the cavity wall of the material storage cavity, and the pull-out plate penetrates to the outside of one side cavity wall of the material storage cavity, the cavity wall of the material storage cavity penetrated is in the sliding direction of the sliding part, and is movably connected to the side wall of the measuring cavity away from the material storage body;

[0013] The material storage body is arranged in the material storage cavity and is contactingly arranged on the pull-out plate.

[0014] Preferably, the material storage hole is an inclined hole that is larger at the top and smaller at the bottom.

[0015] Preferably, the measuring mechanism further comprises a horizontal plate, and the horizontal plate is placed horizontally;

[0016] One end of the driving mechanism is connected to the inside of the measuring cavity, and the other end of the driving mechanism is connected to the upper plate surface of the horizontal plate;

[0017] The vertical rod passes through the horizontal plate, and the lower end of the vertical rod is located below the lower plate surface of the horizontal plate.

[0018] Preferably, the measuring mechanism further comprises the same number of first limit plates as the vertical rods, the same number of second limit plates as the vertical rods, and a spring matched with each of the vertical rods;

[0019] The first limiting plate and the second limiting plate are both sleeved and fixed on the vertical rod;

[0020] The first limiting plate is arranged on the upper plate surface of the transverse plate, and the second limiting plate is arranged below the lower plate surface of the transverse plate;

[0021] Each of the springs is sleeved on the outer ring of the corresponding vertical rod, and the spring is located between the horizontal plate and the second limiting plate.

[0022] Preferably, the lower end of each dust removal head has a plurality of holes.

[0023] Preferably, it also includes a control module: the control module is electrically connected to the driving mechanism, and is used to control the forward rotation and / or reverse rotation of the fan of the driving mechanism; when the fan rotates forward, air is blown into the hole of the dust removal head at the lower end of each vertical rod through the air pipe of the fan; when the fan reverses, air is sucked from the hole of the dust removal head at the lower end of each vertical rod through the air pipe of the fan.

[0024] Preferably, it also includes a timing module and a display, wherein:

[0025] The control module is also electrically connected to the pressure sensor. After detecting the pressure signal generated by the pressure sensor touching the material in the container, the control module is used to transmit the pressure signal back and transmit the contact time of the pressure sensor generating the pressure signal to the timing module;

[0026] The timing module is electrically connected to the control module, and is used to record the start time when the driving mechanism drives the vertical rod to drive the pressure sensor to measure from the upper edge of the container where the material is located, and to record the touch time when each pressure sensor detects the pressure signal, and calculate the difference between the touch time and the start time for each pressure sensor;

[0027] The calculation module is electrically connected to the timing module and is used to calculate the downward thrust amount of each pressure sensor by using the difference between the corresponding detection time and the driving speed of the driving mechanism; and

[0028] Determine the material mass corresponding to the downward thrust amount of each pressure sensor according to a function of the inner height of the container and the weight of the material contained in the container, the material mass corresponding to the downward thrust amount of the pressure sensor being the container loading amount;

[0029] The control module is also used to output the amount of material added to each container and the container number;

[0030] The display is used to display the amount of material added to each container.

[0031] Preferably, the transverse plate has a through hole penetrating the vertical rod, the through hole is shaped like a cross-sectional profile of the vertical rod, and the vertical rod and the through hole are interference fit.

[0032] Preferably, the contour of the pressure sensor is contoured to the inner contour of the container where the material is located.

[0033] Preferably, the quantitative feeding device further comprises a locking mechanism, which is arranged on the outside of the measuring cavity and has a locking head extending downward from the opening of the measuring cavity.

[0034] The above technical solution has the following beneficial effects:

[0035] The sliding part is placed on the side wall of the electrode mounting seat, and the sliding part can slide on the opposite side walls of the measuring cavity. When the sliding part slides to the specified position, each vertical rod corresponds to a container, and the driving mechanism drives all vertical rods downward until the pressure sensor touches the material in the container (i.e., the plating material). In this process, the pressure sensor detects the material addition amount in each corresponding container, so that the material addition amount in the container can be obtained in batches at the same time.

[0036] After the measuring mechanism completes the detection of the feeding amount of the containers in the first area of ​​the inner end of the evaporation source, the containers in the current feeding amount detection area are exactly the containers in the next feeding area. After the feeding amount detection in the current area is completed, the quantitative measuring device is moved to another area through the sliding part to continue to detect the feeding amount of multiple containers in the area. At the same time, the feeding mechanism is used to add materials to multiple containers in the area where the feeding amount detection is completed.

[0037] The feeding mechanism includes a feeding machine and a feeding pipeline connected to the feeding machine; the feeding machine is arranged at the top of the measuring chamber. After the detection of the feeding amount of the container is completed through the cooperation of all the vertical rods and the corresponding pressure sensors, the corresponding amount of material is added to the corresponding container through the feeding pipeline according to the detection result. The amount can be directly added to the container according to the feeding amount, and there is no need to manually check whether the plating material in the crucible is full with the naked eye, which improves the feeding efficiency and saves time and effort. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0039] Figure 1 is a front view of a quantitative feeding device according to an embodiment of the present invention;

[0040] Figure 2 yes Figure 1 Right view (through the measuring cavity, showing the relevant parts of the measuring mechanism);

[0041] Figure 3 yes Figure 1 Right view of;

[0042] Figure 4 yes Figure 1 The relevant modules of the control module of the quantitative feeding device are displayed.

[0043] The reference numerals are:

[0044] 10. quantitative measuring device; 20. feeding mechanism; 30. control module; 40. display; 110. measuring cavity; 120. measuring mechanism; 130. horizontal plate; 140. first limit plate; 150. second limit plate; 160. spring; 210. material storage body; 220. feeding machine; 230. feeding pipeline; 240. material storage cavity; 250. pull-out plate;

[0045] 111, sliding part; 121, pressure sensor; 122, vertical rod; 123, driving mechanism; 211, material storage hole; 231, material feeding port;

[0046] 50. Connecting part; 51. Connecting plate; 113. Strip-shaped slot; 114. Second roller; 610. Container; 620. Heating electrode; 630. Bottom plate of electrode mounting seat; 640. Side wall of electrode mounting seat. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] like Figure 1 , Figure 2 and Figure 3 As shown, in combination with an embodiment of the present invention, a quantitative feeding device is provided. Quantitative feeding refers to quantitatively feeding the container according to the required feeding amount in the container obtained in batches. The quantitative feeding device includes: a quantitative measuring device 10 and a feeding mechanism 20; the feeding mechanism 20 is connected to the quantitative measuring device 10; the evaporation source includes an electrode mounting seat bottom plate 630, and two electrode mounting seat side walls 640 are on both sides of the base, in which a heating electrode 620 is accommodated, and the heating electrode is grooved, and the groove accommodates multiple containers 610, i.e., crucibles. After the quantitative measuring device 10 measures the feeding amount of the container 610, the material is added to each container 610 through the feeding mechanism 20.

[0049] The quantitative measuring device 10 comprises: a measuring cavity 110 with an opening facing downward and a measuring mechanism 120 that can be raised and lowered. The measuring mechanism 120 is installed inside the measuring cavity 110. The measuring cavity 110 is composed of a top plate at the top and four side walls connected to the top plate. The measuring cavity 110 has sliding parts 111 on the opposite side walls of the opening side. The sliding parts 111 are placed on the side walls 640 of the electrode mounting seat, and the sliding parts 111 can slide on the opposite side walls of the measuring cavity 110.

[0050] The measuring mechanism 120 includes a plurality of vertical rods 122, a dust removal head disposed at the lower end of each vertical rod 122, a pressure sensor 121 disposed at the lower end of the dust removal head, and a driving mechanism 123 for driving the vertical rods 122 to rise and fall; the driving mechanism 123 is connected to the vertical rods 122; when the sliding portion 111 slides to a specified position, each vertical rod 122 corresponds to a container 610, and the driving mechanism 123 drives all the vertical rods 122 downward until the pressure sensor 121 touches the material (i.e., plating material) in the container 610.

[0051] The quantitative feeding device also includes a calculation module, which is used to calculate the feeding amount of the container according to the downward displacement of each pressure sensor 121 after the driving mechanism 123 drives the vertical rod 122 to drive the pressure sensor 121 to move downward in the container 610, so as to obtain the feeding amount in the container in batches at the same time. After the measuring mechanism 120 completes the feeding amount detection of the container in the first area of ​​the inner end of the evaporation source, the container in the current feeding amount detection area is exactly the container in the next feeding area.

[0052] After the feeding amount detection in the current area is completed, the quantitative measuring device 10 is moved to another area through the sliding part 111 to continue to detect the feeding amount of multiple containers 610 in the area. At the same time, the feeding mechanism 20 is used to add materials to the multiple containers 610 in the area where the feeding amount detection is completed.

[0053] The feeding mechanism 20 feeds the corresponding container 610 according to the feeding amount of the container; the feeding mechanism 20 includes a feeder 220 and a feeding pipeline 230 connected to the feeder 220; the feeder 220 is arranged at the top of the measuring chamber 110. After the detection of the feeding amount of the container is completed through the cooperation of all the vertical rods 122 and the corresponding pressure sensors 121, a plurality of movable feeding pipelines 230 are used to add a corresponding amount of material to the corresponding container according to the detection result, so as to realize the simultaneous batch acquisition of the feeding amount in the container, and directly add the amount to the container according to the feeding amount, without the need to manually check with the naked eye whether the plating material in the crucible is full, thereby improving the feeding efficiency and saving time and labor. When multiple feeding pipes 230 are used, their number is the same as the number of pressure sensors 121, that is, the same as the number of a row of containers 610. Multiple feeding pipes 230 are used to simultaneously feed a row of containers 610 to realize batch feeding pipes, and the feeding pipes 230 are movable to facilitate adjustment of the position of the feeding pipes 230 for alignment with the container 610 to be fed in the row of containers 610.

[0054] Preferably, if Figure 1 As shown, the feeding mechanism 20 further includes a material storage body 210 , a material storage cavity 240 and a pull-out plate 250 , and the material storage body 210 has a plurality of material storage holes 211 .

[0055] The material storage body 210 is movably connected to the side wall of the measuring cavity 110 adjacent to the material storage body 210. The side wall of the measuring cavity 110 refers to the side wall of the measuring cavity 110 in the sliding direction of the sliding part 111. After the feeding amount detection in the current area is completed, the quantitative measuring device 10 is moved to another area through the sliding part 111 to continue to detect the feeding amount of multiple containers 610 in the area. At the same time, the feeding mechanism 20 is used to feed the multiple containers 610 in the area where the feeding amount detection is completed.

[0056] The feeding port 231 of each feeding pipeline 230 can be movably aligned with the storage hole 211. The feeding port 231 of the feeding pipeline 230 is aligned with the corresponding storage hole 211, and the material is added into the storage hole 211 through the corresponding feeding pipeline 230 according to the feeding amount of each container 610 by controlling the feeder 220.

[0057] The pull-out plate 250 slides horizontally and is clamped in the cavity wall of the material storage cavity 240, and the pull-out plate 250 penetrates to the outside of one side cavity wall of the material storage cavity 240. The cavity wall of the material storage cavity 240 that is penetrated is in the sliding direction of the sliding part 111 and is away from the material storage body 210 and is movably connected to the side wall of the measuring cavity 110; the material storage body 210 is arranged in the material storage cavity 240 and is in contact with the pull-out plate 250.

[0058] After the material is added into the storage hole 211 through the corresponding feeding pipeline 230 by controlling the feeder 220 according to the feeding amount of each container 610, the storage body 210 does not move, and the pull-out plate 250 is pulled outward from the penetration point, and the material (such as plating material) in the storage hole 211 of the storage body 210 arranged on the pull-out plate 250 will fall into the corresponding container 610 below under the action of gravity.

[0059] Preferably, if Figure 1 As shown, the material storage hole 211 is an inclined hole that is larger at the top and smaller at the bottom, such as a hole with a trapezoidal cross-section. The speed at which the material falls is controlled by the inclination, and the material in the material storage hole 211 also facilitates the smooth falling of the material into the container 610.

[0060] Preferably, the measuring mechanism 120 further comprises a horizontal plate 130, which is placed horizontally; one end of the driving mechanism 123 is connected to the inside of the measuring cavity 110 to play a fixing role. The other end of the driving mechanism 123 is connected to the upper plate surface of the horizontal plate 130; the vertical rod 122 passes through the horizontal plate 130, and the lower end of the vertical rod 122 is located below the lower plate surface of the horizontal plate 130. The driving mechanism 123 drives the horizontal plate 130, and the horizontal plate 130 drives all the vertical rods 122 to move downward, and the pressure sensor 121 arranged at the lower end of the vertical rod 122 moves downward, which has a simple structure and simple operation.

[0061] Preferably, if Figure 2As shown, the measuring mechanism 120 also includes the same number of first limit plates 140 as the vertical rods 122, the same number of second limit plates 150 as the vertical rods 122, and springs 160 matched with each vertical rod 122; the first limit plates 140 and the second limit plates 150 are both sleeved and fixed on the vertical rods 122; the first limit plates 140 are arranged on the upper plate surface of the horizontal plate 130, and the second limit plates 150 are arranged under the lower plate surface of the horizontal plate 130; each spring 160 is sleeved on the outer ring of the corresponding vertical rod 122, and the spring 160 is between the horizontal plate 130 and the second limit plates 150, and the spring 160 falls on the second limit plates 150 by its own gravity. Then, when the driving mechanism 123 drives the horizontal plate 130, the horizontal plate 130 drives all the vertical rods 122 to move downward, and the speed of driving each pressure sensor 121 is consistent. If there is no material in the container 610, the pressure sensor 121 will be pressed down to the bottom of the container 610, and the remaining amount of material is zero.

[0062] However, there is a situation where the remaining material in each container 610 is not equal, that is, the material in some containers 610 is used up, while the material in other containers 610 is not used up; for the container 610 with the material used up, the pressure sensor 121 can contact the bottom of the container 610, and the spring 160 may not be compressed.

[0063] For the container 610 in which the material has not been used up, the pressure sensor 121 first touches the material, so there is no need for the corresponding pressure sensor 121 to continue to move downward, thereby avoiding damage to the pressure sensor 121 and inaccurate measurement data. Then, as the horizontal plate 130 continues to move downward, the pressure sensor 121 that has touched the material stops moving downward under the reaction force of the material, and the vertical rod 122 separates from the horizontal plate 130, and the vertical rod 122 no longer moves downward with the horizontal plate 130. As the distance between the vertical rod 122 and the horizontal plate 130 becomes farther relative to the original position, the distance between the second limit plate 150 and the horizontal plate 130 becomes closer, and the compression spring 160 plays a buffering role to prevent the vertical rod 122 from completely separating from the horizontal plate 130 and falling off.

[0064] Preferably, the lower end of each dust removal head has a plurality of holes, so that the dust removal effect is better. Preferably, the bottom also has a plurality of holes.

[0065] Preferably, it also includes a control module 30: the control module 30 is electrically connected to the driving mechanism 123, and is used to control the forward and / or reverse rotation of the fan of the driving mechanism 123; when the fan rotates forward, the air pipe of the fan blows air into the hole of the dust removal head at the lower end of each vertical rod 122 to blow up the dust, so that the dust can be sucked out; when the fan is reversed, the air pipe of the fan sucks air from the hole of the dust removal head at the lower end of each vertical rod 122, so that the dust can be sucked in, so as to achieve the effect of dust removal for the container 610. That is, while detecting the amount of material added in the container 610, the corresponding container 610 can also be dusted. In addition, when the measuring mechanism 120 passes through the surface of the heating electrode 620, the air pipe of the fan is also used to blow air into the hole of each dust removal head to blow up the dust on the surface of the heating electrode 620, and then the air pipe of the fan sucks air from the hole of each dust removal head to suck away the dust, so as to achieve the purpose of dust removal.

[0066] Preferably, if Figure 4 As shown, the quantitative dosing device also includes a timing module and a display 40, wherein:

[0067] The control module 30 is also electrically connected to the pressure sensor 121. After detecting the pressure signal generated by the pressure sensor 121 touching the material in the container 610, the control module 30 is used to transmit the pressure signal back and transmit the contact time of the pressure sensor 121 generating the pressure signal to the timing module;

[0068] The timing module is electrically connected to the control module 30, and is used to record the start time when the driving mechanism 123 drives the vertical rod 122 to drive the pressure sensor 121 to measure from the upper edge of the container 610 where the material is located, and to record the contact time when each pressure sensor 121 detects the pressure signal, and calculate the difference between the contact time and the start time for each pressure sensor 121;

[0069] The calculation module is electrically connected to the timing module, and is used to calculate the downward thrust amount of each pressure sensor 121 by the difference between the corresponding detection time and the driving speed of the driving mechanism 123 for each pressure sensor 121; and

[0070] The material mass corresponding to the downward push amount of each pressure sensor 121 is determined according to the function of the inner height of the container 610 and the weight of the material contained in the container 610. The material mass corresponding to the downward push amount of the pressure sensor 121 is the container loading amount; or, the difference in detection time is multiplied by the driving speed (that is, the output shaft pushing speed of the driving mechanism 123) to obtain the downward push amount of the pressure sensor 121; and then the remaining height of the material in the container 610 can be obtained by subtracting the downward push amount of the pressure sensor 121 from the distance between the pressure sensor 121 and the bottom of the container 610 in the initial state. The remaining height and the material mass are in a functional relationship. Therefore, the remaining mass of the material can be calculated, and thus the mass of the material that needs to be added to fill the container 6100 with material can be obtained.

[0071] The control module 30 is also used to output the amount of material added to each container and the container number;

[0072] The display 40 is used to display the amount of material added to each container, so as to facilitate display to the staff.

[0073] Preferably, the horizontal plate 130 has a through hole that penetrates the vertical rod 122, and the through hole is shaped like the cross-sectional profile of the vertical rod 122, and the vertical rod 122 is interference-fitted with the through hole. Non-circular holes, such as rectangular holes, can also be used to match the cross-sectional shape of the vertical rod 122. When the driving mechanism 123 drives the horizontal plate 130, the horizontal plate 130 drives all the vertical rods 122 to move downward to prevent the vertical rods 122 from swinging horizontally.

[0074] Preferably, the contour of the pressure sensor 121 is contoured to the inner contour of the container where the material is located. When the pressure sensor 121 moves downward to detect whether there is material in the container 610, it can detect every corner in the container 610. Preferably, the number of vertical rods 122 is one row, which is the same as the number of containers 610 where the material is located in each row, so as to obtain the material addition amount of all containers 610 in batches at one time. Of course, the number of vertical rods 122 can also be multiple rows, and the number of vertical rods 122 in each row is the same as the number of containers 610 in each row.

[0075] Preferably, a locking mechanism is further included, which is arranged outside the measuring cavity 110 and has a locking head extending downward from the opening of the measuring cavity 110. After the sliding portion 111 slides to a specified position, the quantitative feeding device is locked to the side wall 640 of the electrode mounting seat by the locking head of the locking mechanism, and the quantitative feeding device is relatively stable during operation without shaking, and will not affect the movement of the vertical rod 122 and the second vertical rod.

[0076] Preferably, the quantitative feeding device also includes a connecting part 50, which includes a connecting plate 51 whose height can be adjusted up and down; one end of the connecting plate 51 is connected to one side of the measuring cavity 110; the other end of the connecting plate 51 is connected to the outside of the feeding mechanism 20 adjacent to the measuring cavity 110, that is, the outside of the adjacent material storage body 210.

[0077] After the measuring mechanism 120 detects the feeding amount of the container in the first area of ​​the inner end of the evaporation source, it moves downward to another feeding amount detection area, and then adjusts the height of the connecting plate 51 appropriately so that the feeding mechanism 20 is placed above the container 610 where the feeding amount has been detected, so as to add material to the container 610.

[0078] Preferably, if Figure 3 As shown, the sliding part 111 is a first roller, and the first roller is a U-shaped wheel; the U-shaped wheel is sleeved on the side wall 640 of the electrode mounting seat and can slide the quantitative feeding device to a specified position, so as to place the vertical rod 122 at the specified position.

[0079] The sliding portion 111 is a strip-shaped slot 113 ; the dust removal and feeding device further comprises a second roller 114 disposed below the strip-shaped slot 113 and cooperating with the strip-shaped slot 113 , and the strip-shaped slot 113 drives the quantitative feeding device to slide to a specified position.

[0080] The quantitative dosing device has the functions of batch acquisition of container addition amount and quantitative addition, and can achieve dust removal for the container while achieving batch acquisition of container addition amount.

[0081] By sequentially obtaining the amount of material added to the container in batches in the area within the evaporation source, dust removal is performed in the container at the same time, and then material is added to multiple containers 610, automatic quantitative measurement, dust removal and material addition are achieved. There is no need for manual measurement, manual cleaning and dust removal, and no need to manually add material to each container one by one, which improves the feeding efficiency, has high feeding accuracy, does not add material outside the container, and is suitable for evaporation sources with a long length.

[0082] It should be understood that in the above detailed description, various features are grouped together in a single embodiment to simplify the disclosure. This method of disclosure should not be interpreted as reflecting an intention that the embodiments of the claimed subject matter require more features than those clearly stated in each claim. On the contrary, as reflected in the attached claims, the invention is in a state of having less than all the features of the disclosed individual embodiments. Therefore, the attached claims are hereby expressly incorporated into the detailed description, with each claim standing on its own as a separate preferred embodiment of the invention.

[0083] The disclosed embodiments are described above to enable any person skilled in the art to implement or use the present invention. Various modifications of these embodiments are obvious to those skilled in the art, and the general principles defined herein may also be applied to other embodiments without departing from the spirit and scope of the present disclosure. Therefore, the present disclosure is not limited to the embodiments given herein, but is consistent with the broadest scope of the principles and novel features disclosed in this application.

[0084] The above description includes examples of one or more embodiments. Of course, it is impossible to describe all possible combinations of components or methods for the purpose of describing the above embodiments, but it should be recognized by those skilled in the art that the various embodiments may be further combined and arranged. Therefore, the embodiments described herein are intended to cover all such changes, modifications and variations that fall within the scope of protection of the appended claims. In addition, with respect to the term "comprising" used in the specification or claims, the word is covered in a manner similar to the term "including", just as "including," is explained as a transitional word in the claims. In addition, any term "or" used in the specification of the claims is intended to mean "non-exclusive or".

[0085] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A quantitative feeding device, characterized in that: include: A quantitative measuring device (10) and a feeding mechanism (20); The feeding mechanism (20) is connected to the quantitative measuring device (10); The quantitative measuring device (10) comprises: a measuring cavity (110) with an opening facing downward and a measuring mechanism (120) that can be raised and lowered, wherein the measuring mechanism (120) is installed inside the measuring cavity (110); the measuring cavity (110) has sliding parts (111) on two opposite side walls at the opening side respectively; The measuring mechanism (120) comprises a plurality of vertical rods (122), a dust removal head arranged at the lower end of each of the vertical rods (122), a pressure sensor (121) arranged at the lower end of the dust removal head, and a driving mechanism (123) for driving the vertical rods (122) to rise and fall; the driving mechanism (123) is connected to the vertical rods (122); The quantitative feeding device further comprises a calculation module, which is used to calculate the amount of material added to the container according to the downward thrust amount of each pressure sensor (121) after the driving mechanism (123) drives the vertical rod (122) to drive the pressure sensor (121) to move downward in the container (610); The feeding mechanism (20) comprises a feeding machine (220) and a feeding pipeline (230) connected to the feeding machine (220); the feeding machine (220) is arranged at the top of the measuring chamber (110), and the feeding mechanism (20) feeds the corresponding container (610) according to the feeding amount of the container; The measuring mechanism (120) further comprises a transverse plate (130), wherein the transverse plate (130) is placed horizontally; One end of the driving mechanism (123) is connected to the inside of the measuring cavity (110), and the other end of the driving mechanism (123) is connected to the upper plate surface of the horizontal plate (130); The vertical rod (122) passes through the horizontal plate (130), and the lower end of the vertical rod (122) is located below the lower plate surface of the horizontal plate (130); The measuring mechanism (120) further comprises a first limit plate (140) having the same number as the vertical rods (122), a second limit plate (150) having the same number as the vertical rods (122), and a spring (160) matched with each vertical rod (122); The first limiting plate (140) and the second limiting plate (150) are both sleeved and fixed on the vertical rod (122); The first limiting plate (140) is arranged on the upper plate surface of the transverse plate (130), and the second limiting plate (150) is arranged below the lower plate surface of the transverse plate (130); Each of the springs (160) is sleeved on the outer ring of the corresponding vertical rod (122), and the spring (160) is located between the horizontal plate (130) and the second limiting plate (150).

2. The quantitative feeding device according to claim 1, characterized in that: The feeding mechanism (20) further comprises a material storage body (210), a material storage cavity (240) and a pull-out plate (250); the material storage body (210) has a plurality of material storage holes (211); the feeding port (231) of the feeding pipeline (230) is movably aligned with the material storage hole (211); The material storage body (210) is movably connected to a side wall of the measuring cavity (110) adjacent to the material storage body (210); The pull-out plate (250) is horizontally slidably engaged in the cavity wall of the material storage cavity (240), and the pull-out plate (250) penetrates to the outside of one side cavity wall of the material storage cavity (240), and the cavity wall of the material storage cavity (240) penetrated is in the sliding direction of the sliding part (111), and is away from the material storage body (210) and movably connected to the side wall of the measuring cavity (110); The material storage body (210) is disposed in the material storage cavity (240) and is contactingly disposed on the pull-out plate (250).

3. The quantitative feeding device according to claim 2, characterized in that: The material storage hole (211) is an inclined hole that is larger at the top and smaller at the bottom.

4. The quantitative feeding device according to claim 1, characterized in that: The lower end of each dust removal head is provided with a plurality of holes.

5. The quantitative feeding device according to claim 4, characterized in that: It also includes a control module (30): the control module (30) is electrically connected to the driving mechanism (123) and is used to control the forward rotation and / or reverse rotation of the fan of the driving mechanism (123); when the fan rotates forward, air is blown into the hole of the dust removal head at the lower end of each vertical rod (122) through the air pipe of the fan; when the fan rotates reversely, air is sucked from the hole of the dust removal head at the lower end of each vertical rod (122) through the air pipe of the fan.

6. The quantitative feeding device according to claim 5, characterized in that: It also includes a timing module and a display (40), wherein: The control module (30) is also electrically connected to the pressure sensor (121). After detecting a pressure signal generated by the pressure sensor (121) touching the material in the container (610), the control module (30) is used to transmit the pressure signal back, and transmit the contact time of the pressure sensor (121) generating the pressure signal to the timing module; The timing module is electrically connected to the control module (30) and is used to record the start time when the driving mechanism (123) drives the vertical rod (122) to drive the pressure sensor (121) to measure from the upper edge of the container (610) where the material is located, and to record the contact time when each pressure sensor (121) detects the pressure signal, and calculate the difference between the contact time and the detection time of the start time for each pressure sensor (121); The calculation module is electrically connected to the timing module and is used to calculate, for each of the pressure sensors (121), the difference between the corresponding detection times and the driving speed of the driving mechanism (123), to obtain the downward thrust amount of each of the pressure sensors (121); and Determining the material mass corresponding to the downward thrust amount of each pressure sensor (121) according to a function of the inner height of the container (610) and the weight of the material contained in the container (610), the material mass corresponding to the downward thrust amount of the pressure sensor (121) being the container loading amount; The control module (30) is also used to output the amount of material added to each container and the container number; The display (40) is used to display the amount of material added to each container.

7. The quantitative feeding device according to claim 1, characterized in that: The horizontal plate (130) has a through hole penetrating the vertical rod (122); the through hole is shaped like the cross-sectional profile of the vertical rod (122), and the vertical rod (122) and the through hole are interference-fitted.

8. The quantitative feeding device according to claim 1, characterized in that: The contour of the pressure sensor (121) is shaped like the inner contour of the container in which the material is located.

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