Phase discrimination system and method based on homodyne interference, electronic device and storage medium
By using a zero-difference interferometry phase detection system and integrating a zero-difference coherent light source and optical components, the problem of large space occupation of traditional interferometer phase detection structures is solved, and the integrated design of the interferometer is realized.
Patent Information
- Application Number
- CN202211699542.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-12-28
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2042-12-28
AI Technical Summary
The phase detection structure of traditional interferometers occupies a large space, making it difficult to achieve integrated design of the interferometer.
The phase detection system employing zero-difference interferometry utilizes a zero-difference coherent light source, a lens assembly, an optical fiber device, and a signal analysis device. Through the transmission and phase analysis of N beams, the spatial proportion of the phase detection structure is reduced.
This significantly reduces the space occupied by the phase detection structure in the interferometer, simplifies the optical structure, reduces integration difficulty, and facilitates the integrated design of the interferometer.
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Figure CN116086629B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical measurement, and more particularly to a phase detection system, method, electronic device, and storage medium based on zero-difference interferometry. Background Technology
[0002] When measuring distances at the micrometer level or even smaller, precision measuring instruments such as interferometers are required. Currently, when using an interferometer to measure the zero-difference coherent light formed by the light and the reference light, the traditional phase detection structure splits the interference signal into four beams. This often requires a large space to set up multiple beam splitters, polarizing beam splitters, half-wave plates, and quarter-wave plates. In other words, such an architecture occupies a large space in the overall interferometer equipment.
[0003] To achieve integrated design of the interferometer, the integration of the phase detection structure is quite important. Therefore, it is necessary to propose a new phase detection structure to reduce the spatial proportion of the phase detection structure in the interferometer. Summary of the Invention
[0004] This application provides a phase detection system, method, electronic device, and storage medium based on zero-difference interference, which can reduce the space occupation of the phase detection structure.
[0005] To achieve the above objectives, this application adopts the following technical solution:
[0006] In a first aspect, a zero-difference interferometric phase detection system is provided, comprising: a zero-difference coherent light source for emitting polarized light with different polarization states and mutual interference, a fastener assembly for fixing, a lens assembly for splitting the beam, an optical fiber device for transmitting the beam, and a signal analysis device for performing phase analysis on the beam.
[0007] The zero-difference coherent light source is transmitted to the signal analysis device through the lens assembly and the optical fiber device in sequence. The lens assembly has a first surface and a second surface, with the lens assembly set on the first surface and one end of the optical fiber device set on the second surface. The other end of the optical fiber device is connected to the signal analysis device.
[0008] As can be seen from the system described in the first aspect, due to the zero-difference coherent light source incident lens combination device, the original zero-difference coherent light sources with different polarization states are split into N beams through the lens combination device. The N beams are transmitted to the signal analysis device through the optical fiber device. The signal analysis device converts the zero-difference coherent light intensity signal into analog signal and digital signal in sequence, and calculates the phase information of the zero-difference correlated beam of phase interference according to the N-channel phase detection algorithm. Through the above-mentioned integrated system, the spatial proportion of the phase detection structure in the interferometer can be greatly reduced.
[0009] One possible design scheme is that the polarized light emitted by the zero-difference coherent light source includes: a first beam and a second beam, the first beam and the second beam have different polarization states, and the first beam and the second beam are transmitted coaxially.
[0010] One possible design scheme is that the firmware assembly device includes: a fixed housing and several fixing devices, wherein the several fixing devices are detachably connected to the fixed housing;
[0011] The fixing device is used to fix or adjust the relative position of the lens assembly on the first surface of the fixing housing; and also to fix or adjust the relative position of the optical fiber assembly on the second surface of the fixing housing.
[0012] One possible design scheme is that the lens assembly includes: a lens fixing structure, a quarter-wave plate and a beam splitter. Both the quarter-wave plate and the beam splitter are connected to the lens fixing structure. The polarized light passes through the quarter-wave plate and the beam splitter in sequence to become N beams, where N is an integer greater than 1.
[0013] One possible design is that the beam splitter is any one of a grating, a diffractive optical device, a lens array, or a beam splitter assembly.
[0014] One possible design scheme is that the optical fiber device includes: a combined polarizer, a base lens, an integrated connector, N optical fibers, output connectors corresponding one-to-one with the N optical fibers, and an optical fiber fixing frame. The combined polarizer is located above the base lens. The base lens, the integrated connector, the N optical fibers, and the output connector are connected in sequence. The optical fiber fixing frame is connected to the fixing housing through several fixing devices. The combined polarizer is obtained by assembling multiple polarizers.
[0015] One possible design scheme includes a signal analysis device comprising a photodetector, a data acquisition unit, and a phase counter. N beams output from a beam splitter sequentially pass through a combined polarizer, a base lens, an integrated connector, one of the N optical fibers, and the corresponding output connector of that fiber, and are then transmitted to the photodetector. The photodetector is used to convert the zero-difference correlated light intensity signals corresponding to the received N beams into analog signals. The data acquisition unit is used to convert the analog signals into digital signals. The phase counter is used to calculate the phase data of the interference signal according to the N-channel phase detection method.
[0016] Secondly, embodiments of this application provide a zero-difference interferometric phase detection method, which is applied to the zero-difference interferometric phase detection system described in the first aspect. The method includes:
[0017] Polarized light emitted from a zero-difference coherent light source is sequentially incident into a lens assembly and an optical fiber assembly to obtain N zero-difference coherent beams, wherein each zero-difference coherent beam has a preset phase difference.
[0018] Phase delay calculation, original phase calculation, and phase unwinding operation are performed on the zero-difference coherent beam of each channel to obtain the complete zero-difference coherent signal phase corresponding to the zero-difference coherent light source during the motion process.
[0019] Thirdly, embodiments of this application provide an electronic device, including: one or more processors;
[0020] Memory;
[0021] One or more applications, wherein the one or more applications are stored in the memory and configured to be executed by one or more processors, the one or more applications being configured to perform the method as described in the second aspect.
[0022] Fourthly, embodiments of this application provide a computer-readable storage medium containing program code that can be invoked by a processor to execute the method described in the second aspect.
[0023] Fifthly, a computer program product is provided, comprising a computer program or instructions that, when run on a computer, cause the computer to perform the method described in the second aspect.
[0024] Compared with the prior art, the beneficial effects of the present invention are as follows: Polarized light emitted from a zero-difference coherent light source is transmitted to a lens assembly, and sequentially passes through a quarter-wave plate and a beam splitter in the lens assembly to form N beams. These N beams are then projected onto N polarizers and a base lens with different angles in an optical fiber assembly, and subsequently transmitted sequentially through an integrated structure, optical fiber, and output connector to a photodetector in a signal analysis device. This converts the light intensity signals corresponding to the N zero-difference correlated beams into analog signals. The analog signals are then converted into digital signals by a data acquisition unit, and the phase information of the interference signal is calculated using an N-channel phase detection algorithm within a phase counter. The structure in this embodiment avoids the use of multiple beam splitters, polarizing beam splitters, half-wave plates, and quarter-wave plates, resulting in a simple optical structure, less space occupation, and lower integration difficulty. This reduces the space ratio of the phase detection structure in the interferometer, facilitating the integrated design of the interferometer. Attached Figure Description
[0025] Figure 1 A schematic diagram of the overall structure of a phase detection system based on zero-difference interferometry provided in an embodiment of this application;
[0026] Figure 2 A schematic diagram of the optical path of a zero-difference coherent light source provided in an embodiment of this application;
[0027] Figure 3 This is a schematic diagram of the structure of a firmware assembly device provided in an embodiment of this application;
[0028] Figure 4 This is a schematic diagram of a lens assembly device provided in an embodiment of this application;
[0029] Figure 5 This is a schematic diagram of the structure of an optical fiber device provided in an embodiment of this application;
[0030] Figure 6 This is a schematic diagram of the structure of an optical fiber fixing frame provided in an embodiment of this application;
[0031] Figure 7 This is a schematic diagram of the structure of a signal analysis device provided in an embodiment of this application;
[0032] Figure 8 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application.
[0033] Reference numerals: 1-Zero-difference coherent light source, 11-First beam, 12-Second beam, 2-Firmware assembly, 21-Fixed housing, 22-Fixed device, 3-Lens assembly, 31-Lens fixing structure, 32-Quarter-wave plate, 33-Beam splitter, 4-Fiber optic device, 41-Combined polarizer, 42-Base lens, 43-Integrated connector, 44-Fiber optic cable, 45-Output connector, 46-Fiber optic fixing frame, 5-Signal analysis device, 51-Photodetector, 52-Data acquisition unit, 53-Phase counter. Detailed Implementation
[0034] The technical solution in this application will now be described with reference to the accompanying drawings.
[0035] Please see Figure 1 , Figure 1 This is a schematic diagram of a phase detection system based on zero-difference interferometry provided in an embodiment of this application. In this embodiment, a phase detection system based on zero-difference interferometry is provided, which reduces the space occupied by the phase detection structure within the interferometer by improving the structural design of the system.
[0036] Specifically, the zero-difference interferometric phase detection system includes: a zero-difference coherent light source 1 for emitting polarized light with different polarization states and mutual interference; a fastener assembly 2 for fixing; a lens assembly 3 for splitting the beam; an optical fiber 44 for transmitting the beam; and a signal analysis device 5 for performing phase analysis on the beam.
[0037] The zero-difference coherent light source 1 is transmitted to the signal analysis device 5 through the lens assembly device 3 and the optical fiber 44 device 4 in sequence. The lens assembly device 2 has a first surface and a second surface opposite to each other. The lens assembly device 3 is disposed on the first surface, one end of the optical fiber 44 device 4 is disposed on the second surface, and the other end of the optical fiber 44 device 4 is connected to the signal analysis device 5.
[0038] After the zero-difference coherent light source 1 is incident on the lens assembly 3, a beam of polarized light is split into N beams. The N beams are transmitted to the signal analysis device 5 through the optical fiber 44 device 4. The signal analysis device 5 converts the zero-difference coherent light intensity signal into analog and digital signals in sequence, and calculates the phase information of the zero-difference correlated beam of phase interference according to the N-channel phase detection algorithm. Through the above-mentioned integrated system, the spatial proportion of the phase detection structure in the interferometer can be greatly reduced.
[0039] Please see Figure 2 In this embodiment, the polarized light emitted by the zero-difference coherent light source 1 includes a first beam 11 and a second beam 12. The first beam 11 and the second beam 12 have different polarization states and are transmitted coaxially. It should be noted that, from the perspective of human vision, the polarized light emitted by the zero-difference coherent light source 1 is a single beam; this polarized light includes a first beam 11 with a first polarization direction and a second beam 12 with a second polarization direction, wherein the first polarization direction and the second polarization direction are different. When the polarized light is split into N beams by the lens assembly device 3, each of the N beams includes a first beam 11 with a first polarization direction and a second beam 12 with a second polarization direction.
[0040] Optionally, the light source can be light waves of various bands such as laser, infrared, visible light, ultraviolet light, X-ray and gamma rays. In the embodiments of this application, the zero-difference coherent light source 1 is a laser.
[0041] Please see Figure 3 As one possible implementation, the firmware assembly device 2 includes: a fixed housing 21 and a plurality of fixing devices 22, wherein the plurality of fixing devices 22 are detachably connected to the fixed housing 21;
[0042] The fixing device 22 is used to fix or adjust the relative position of the lens assembly 3 on the first surface of the fixing housing 21; and also to fix or adjust the relative position of the optical fiber 44 device 4 on the second surface of the fixing housing 21.
[0043] In this embodiment, the fixing housing 21 of the firmware assembly device 2 has a cavity space for installing some components or structures in the optical fiber 44 device 4. The firmware assembly device 2 includes several fixing devices 22, the specific number of which can be set according to specific application requirements. The fixing devices 22 can be installed on the surface of the solid housing, and the connection method with the fixing housing 21 can be either detachable or fixed. Optionally, in this embodiment, the connection method between the fixing devices 22 and the fixing housing 21 is a detachable connection, which is achieved by providing several connection holes on the fixing housing 21, so that the fixing devices 22 are connected to the fixing housing 21 through the connection holes. Optionally, the fixing devices 22 can be bolts.
[0044] Please see Figure 4 As one possible implementation, the lens assembly 3 includes: a lens fixing structure 31, a quarter-wave plate 32, and a beam splitter 33. Both the quarter-wave plate 32 and the beam splitter 33 are connected to the lens fixing structure 31. The polarized light passes through the quarter-wave plate 32 and the beam splitter 33 in sequence to become N beams, where N is an integer greater than 0.
[0045] It should be noted that the quarter-wave plate 32 is located in front of the beam splitter 33, so that the beam emitted from the zero-difference correlated light source undergoes a change in polarization before being split by the beam splitter 33, thus enabling the beam to obtain more accurate results in phase calculation.
[0046] The lens assembly 3 is mounted on the first surface of the fastener assembly 2. Specifically, the lens fixing device in the lens assembly 3 is connected to the fixing housing 21 in the fastener assembly 2 via several fixing devices 22; and the lens fixing device is provided with locking holes to fix the quarter-wave plate 32 and the beam splitter 33. Optionally, the several fixing devices 22 fix the lens fixing device, the quarter-wave plate 32 and the beam splitter 33 to the first surface of the fastener assembly 2 through the locking holes on the lens fixing device and the connecting holes on the fixing housing 21.
[0047] In this embodiment of the application, in order to reduce the space ratio of the lens assembly 3, the quarter-wave plate 32 and the beam splitter 33 in the lens assembly 3 are fixed to the first surface of the same fastener assembly 2 by the lens fixing device.
[0048] The fixed housing 21 in the firmware assembly device 2 is made of a light-transmitting material, so that the polarized light emitted from the zero-difference coherent light source 1 can enter the optical fiber 44 device 4 fixed on the second surface of the firmware assembly device 2 after passing through the quarter-wave plate 32 and the beam splitter 33 in sequence.
[0049] As one possible implementation, the beam splitter 33 can be any of a grating, a diffractive optical device, a lens array, or a beam splitter assembly.
[0050] Please see Figure 5 and Figure 6 In one possible implementation, the optical fiber 44 device 4 includes: a combined polarizer 41, a base lens 42, an integrated connector 43, N optical fibers 44, output connectors 45 corresponding to each of the N optical fibers 44, and an optical fiber 44 fixing frame. The combined polarizer 41 is located above the base lens 42. The base lens 42, the integrated connector 43, the N optical fibers 44, and the output connector 45 are connected in sequence. The optical fiber 44 fixing frame is connected to the fixing housing 21 through several fixing devices 22. The combined polarizer 41 is obtained by assembling multiple polarizers.
[0051] As one possible implementation, the integrated connector 43 can be either a multi-integrated ferrule or a coupler.
[0052] The combined polarizer 41 is composed of multiple polarizers assembled together, each polarizer corresponding to a different angle. As one possible implementation, a circular combined polarizer 41 can be formed by assembling three 120-degree sector-shaped polarizers; alternatively, a circular combined polarizer 41 can be formed by assembling six 60-degree sector-shaped polarizers. In this embodiment, the sector shape of the polarizer is merely illustrative and not a specific limitation; the number of polarizers, whether three or six, is also illustrative and not limited here.
[0053] The N beams emitted from the lens assembly 3 are all incident on the combined polarizer 41, so that the N beams emitted from the beam splitter 33 pass through multiple polarizers with different angles and the base lens 42 in the combined polarizer 41 to obtain N beams of zero-difference coherent light with specific phase differences. The N beams of zero-difference coherent light are emitted into the signal analysis device 5 through the integrated connector 43, the one-to-one corresponding optical fiber 44 and the one-to-one corresponding output connector 45 respectively.
[0054] The optical fiber 44 device 4 is connected to the second surface of the firmware assembly device 2 via the optical fiber 44 fixing frame. In this embodiment, the combined polarizer 41, base lens 42, and integrated connector 43 in the optical fiber 44 device 4 are installed within the cavity structure corresponding to the fixing housing 21 in the firmware assembly device 2, while the N optical fibers 44 and the output connector 45 are located outside the fixing housing 21. Optionally, a through hole is provided on the optical fiber 44 fixing frame to allow the N optical fibers 44 and the output connector 45 to extend outside the fixing housing 21. The output connector 45 can be, but is not limited to, an FC / PC connector.
[0055] Please see Figure 7In one possible implementation, the signal analysis device 5 includes a photodetector 51, a data acquisition unit 52, and a phase counter 53. The N beams output from the beam splitter 33 are sequentially passed through a combined polarizer 41, a base lens 42, an integrated connector 43, one of the N optical fibers 44, and an output connector 45 corresponding to the optical fiber 44, and then transmitted to the photodetector 51. The photodetector 51 is used to convert the zero-difference correlated light intensity signals corresponding to the received N beams into analog signals. The data acquisition unit 52 is used to convert the analog signals into digital signals. The phase counter 53 is used to calculate the phase data of the interference signal according to the N-channel phase detection method.
[0056] The polarized light emitted by the zero-difference coherent light source 1, which has different polarization states and interferes with each other, enters the lens assembly device 3. It passes through the quarter-wave plate 32 and the beam splitter 33 in the lens assembly device 3 in sequence to form N beams. At this time, the polarization states corresponding to each of the N beams include both left-handed and right-handed polarization states. The N beams are respectively projected onto multiple polarizers with different angles in the combined polarizer 41 of the optical fiber 44 device 4 and the base lens 42. Then, they are transmitted sequentially through the integrated structure, optical fiber 44 and output connector 45 to the photodetector 51 in the signal analysis device 5 to convert the light intensity signals corresponding to the N zero-difference coherent beams into analog signals. The analog signals are then converted into digital signals by the data acquisition unit 52, and the phase information of the interference signal is calculated by the N-channel phase detection algorithm in the phase counter 53.
[0057] The following section explains in detail how to use the N-channel phase detection method in a phase counter to obtain the phase of the phase interference source.
[0058] This application provides a phase detection method based on zero-difference interferometry, which is applied to the aforementioned phase detection system based on zero-difference interferometry. The method includes:
[0059] Polarized light emitted from a zero-difference coherent light source is sequentially incident into a lens assembly and an optical fiber assembly to obtain N zero-difference coherent beams, wherein each zero-difference coherent beam has a preset phase difference.
[0060] Phase delay calculation, original phase calculation, and phase unwinding operation are performed on the zero-difference coherent beam of each channel to obtain the complete zero-difference coherent signal phase corresponding to the zero-difference coherent light source during the motion process.
[0061] Specifically, firstly, the phase delay of each channel of the N-channel homodyne coherent beam is calculated. The phase of the N-channel homodyne coherent beam entering the phase counter can be expressed by a first expression, as follows:
[0062]
[0063] Where n = 1, 2, ..., N is the initial phase of the nth channel homodyne coherent signal, α is the angle of the quarter-wave plate, α1 and α2 are the line deviation angles of the first and second beams, and b n It is the angle at which the nth beam passes through the polarizer.
[0064] Next, the original phase of the signal is calculated. Using the angle formula in trigonometric functions, the phase delay obtained from the first expression yields a system of equations, which is expressed by the second expression, as follows:
[0065] In=sin(θ+φ n )=sin(θ)cos(φ n )+cos(θ)sin(φ n (2)
[0066] Among them, I n Let θ be the normalized optical power of the nth beam, and let θ be the original phase of the nth homodyne coherent signal. When N = 2, sin(θ) and cos(θ) have unique solutions; when N ≥ 3, this system of equations is overdetermined, and sin(θ) and cos(θ) can be solved using, but not limited to, the mean method or the least squares method. Finally, the original phase θ of the signal can be obtained using the arctangent formula, as shown in the third expression below:
[0067]
[0068] Finally, phase dewinding is performed. The phase of the complete zero-difference coherent signal during continuous motion can be obtained using the dewinding formula, which is shown in the fourth expression below:
[0069]
[0070] Where i = 0, 1, ..., T-1 represents the time node of the data acquisition unit, θ[i] represents the original phase of the homodyne coherent signal at the i-th time point, and θ out [i] represents the phase of the complete homodyne coherent signal at the i-th time point, which is the final result.
[0071] The phase of the zero-difference coherent light source was obtained using the above method.
[0072] Please see Figure 8This application also provides an electronic device 10. The electronic device 10 can be a personal computer (PC), tablet computer, smartphone, personal digital assistant (PDA), etc., or the electronic device 10 can be a network server, database server, cloud server, or a server integration consisting of multiple sub-servers, etc.
[0073] Furthermore, the electronic device 10 may include a memory 111, a communication interface 112, a communication bus 113, and a processor 114, wherein the processor 114, the communication interface 112, and the memory 111 are connected via the communication bus 113. The processor 114 is used to execute executable modules, such as computer programs, stored in the memory 111. Figure 8 The components and structure of the electronic device 10 shown are merely exemplary and not limiting. The electronic device 10 may also have other components and structures as needed.
[0074] The memory 111 may be a read-only memory (ROM) or other type of static storage device capable of storing static information and instructions, random access memory (RAM) or other type of dynamic storage device capable of storing information and instructions, or electrically erasable programmable read-only memory (EEPROM), compact disc read-only memory (CD-ROM) or other optical disc storage, optical disc storage (including compressed optical discs, laser discs, optical discs, digital universal optical discs, Blu-ray discs, etc.), magnetic disk storage media or other magnetic storage devices, or any other medium capable of carrying or storing desired program code in the form of instructions or data structures and accessible by a computer, but is not limited thereto. The memory 111 may be integrated with the processor 114 or may exist independently and be coupled to the processor 114 through the communication interface 112. This embodiment of the application does not specifically limit this.
[0075] It should also be understood that the memory in the embodiments of this application can be volatile memory or non-volatile memory, or may include both volatile and non-volatile memory. The non-volatile memory can be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. The volatile memory can be random access memory (RAM), which is used as an external cache. By way of example, but not limitation, many forms of random access memory (RAM) are available, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate synchronous DRAM (DDR SDRAM), enhanced synchronous DRAM (ESDRAM), synchronous linked DRAM (SLDRAM), and direct rambus RAM (DR RAM).
[0076] The communication bus 113 can be an ISA bus (Industry Standard Architecture), a PCI bus (Peripheral Component Interconnect), or an EISA bus (Extended Industry Standard Architecture), etc. Communication buses can be divided into address buses, data buses, control buses, etc. For ease of representation, Figure 8 The symbol is represented by a single double-headed arrow, but this does not mean that there is only one bus or one type of bus.
[0077] Processor 114 may be an integrated circuit chip with signal processing capabilities. In implementation, each step of the above method can be completed by the integrated logic circuitry in the hardware of processor 114 or by instructions in software form. The processor 114 may be a general-purpose processor, including a Central Processing Unit (CPU), a Network Processor (NP), etc.; it may also be a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components, capable of implementing or executing the methods, steps, and logic block diagrams disclosed in the embodiments of this invention. The general-purpose processor may be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of this invention can be directly manifested as execution by a hardware decoding processor, or as execution by a combination of hardware and software modules in the decoding processor. The software modules may reside in random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, or other mature storage media in the art.
[0078] The method executed by the device defined in this embodiment of the invention can be applied to or implemented by the processor 114. The processor 114 can cooperate with other modules or components in the electronic device 10 to execute a phase detection method based on zero-difference interferometry.
[0079] In summary, this application provides a phase detection system, method, electronic device, and storage medium based on zero-difference interferometry. The system includes: a zero-difference coherent light source for emitting polarized light with different polarization states that interfere with each other; a firmware assembly for fixing the light beam; a lens assembly for splitting the light beam; an optical fiber device for transmitting the light beam; and a signal analysis device for performing phase analysis on the light beam. The zero-difference coherent light source is transmitted to the signal analysis device sequentially through the lens assembly and the optical fiber device. The firmware assembly has a first surface and a second surface facing each other. The lens assembly is disposed on the first surface, one end of the optical fiber device is disposed on the second surface, and the other end of the optical fiber device is connected to the signal analysis device.
[0080] The above embodiments can be implemented, in whole or in part, by software, hardware (such as circuits), firmware, or any other combination thereof. When implemented using software, the above embodiments can be implemented, in whole or in part, in the form of a computer program product. The computer program product includes one or more computer instructions or computer programs. When the computer instructions or computer programs are loaded or executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that includes one or more sets of available media. The available medium can be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium. A semiconductor medium can be a solid-state drive.
[0081] It should be understood that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. A and B can be singular or plural. Additionally, the character " / " in this article generally indicates an "or" relationship between the preceding and following related objects, but it can also represent an "and / or" relationship. Please refer to the context for a more accurate understanding.
[0082] In this application, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refer to any combination of these items, including any combination of single or multiple items. For example, at least one of a, b, or c can mean: a, b, c, ab, ac, bc, or abc, where a, b, and c can be single or multiple.
[0083] It should be understood that in the various embodiments of this application, the order of the above-mentioned processes does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.
[0084] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.
[0085] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.
[0086] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between apparatuses or units may be electrical, mechanical, or other forms.
[0087] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0088] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.
[0089] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.
[0090] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A phase detection system based on zero-difference interferometry, characterized in that, The system includes: a zero-difference coherent light source for emitting polarized light with different polarization states and mutual interference, a fastener assembly for fixing, a lens assembly for splitting the beam, an optical fiber device for transmitting the beam, and a signal analysis device for performing phase analysis on the beam. The zero-difference coherent light source is transmitted to the signal analysis device through the lens assembly and the optical fiber device in sequence. The lens assembly has a first surface and a second surface opposite to each other. The lens assembly is disposed on the first surface, one end of the optical fiber device is disposed on the second surface, and the other end of the optical fiber device is connected to the signal analysis device. The lens assembly includes: a lens fixing structure, a quarter-wave plate, and a beam splitter. Both the quarter-wave plate and the beam splitter are connected to the lens fixing structure. The polarized light passes through the quarter-wave plate and the beam splitter in sequence to become N beams, where N is an integer greater than 1. The firmware assembly device includes: a fixed housing and a plurality of fixing devices, wherein the plurality of fixing devices are detachably connected to the fixed housing; The fixing device is used to fix or adjust the relative position of the lens assembly on the first surface of the fixing housing; and is also used to fix or adjust the relative position of the optical fiber device on the second surface of the fixing housing; The fixed housing is made of a light-transmitting material, so that the polarized light passes sequentially through the quarter-wave plate and the beam splitter before entering the optical fiber device fixed on the second surface of the firmware assembly.
2. The phase detection system based on zero-difference interferometry according to claim 1, characterized in that, The polarized light emitted by the zero-difference coherent light source includes: a first beam and a second beam, wherein the first beam and the second beam have different polarization states and are transmitted coaxially.
3. The phase detection system based on zero-difference interferometry according to claim 1, characterized in that, The beam splitter is any one of a grating, a diffractive optical device, a lens array, or a beam splitter assembly.
4. The phase detection system based on zero-difference interferometry according to claim 1, characterized in that, The optical fiber device includes: a combined polarizer, a base lens, an integrated connector, N optical fibers, output connectors corresponding one-to-one with the N optical fibers, and an optical fiber fixing frame. The combined polarizer is located above the base lens. The base lens, the integrated connector, the N optical fibers, and the output connector are connected in sequence. The optical fiber fixing frame is connected to the fixing housing through several fixing devices. The combined polarizer is obtained by assembling multiple polarizers.
5. The phase detection system based on zero-difference interferometry according to claim 4, characterized in that, The signal analysis device includes a photodetector, a data acquisition unit, and a phase counter. The N beams output from the beam splitter pass sequentially through the combined polarizer, the base lens, the integrated connector, one of the N optical fibers, and the corresponding output connector, and are then transmitted to the photodetector. The photodetector converts the zero-difference correlated light intensity signals corresponding to the received N beams into analog signals. The data acquisition unit converts the analog signals into digital signals. The phase counter calculates the phase data of the interference signal according to the N-channel phase detection method.
6. A phase detection method based on zero-difference interferometry, said method being applied to the phase detection system based on zero-difference interferometry as described in any one of claims 1-5, said method comprising: Polarized light emitted from a zero-difference coherent light source is sequentially incident into a lens assembly and an optical fiber assembly to obtain N zero-difference coherent beams, wherein each zero-difference coherent beam has a preset phase difference. Phase delay calculation, original phase calculation, and phase dewinding operation are performed on the zero-difference coherent beam of each channel to obtain the complete zero-difference coherent signal phase corresponding to the zero-difference coherent light source during the motion process.
7. An electronic device, characterized in that, include: One or more processors; Memory; One or more applications, wherein the one or more applications are stored in the memory and configured to be executed by the one or more processors, the one or more applications being configured to perform the method of claim 6.
8. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores program code that can be invoked by a processor to execute the method of claim 6.
Citation Information
Patent Citations
Homodyne laser interferometer signal phase discrimination method and device
CN115164715A