Design methods, devices and electronic equipment for antireflective membranes

Abstract

This application provides a design method, apparatus, and electronic device for an antireflective coating, belonging to the technical field of superlenses. The design method includes step S1, inputting structural parameters and film optimization parameters. The structural parameters include superlens parameters, film refractive index constraints, and film thickness constraints. The film optimization parameters include film structure type, number of film layers, and random starting point. Step S2, calculating the transmittance and phase information of the superlens based on the structural parameters and the film optimization parameters. Step S3, optimizing the structural parameters based on the transmittance and phase information. Step S4, returning the optimized structural parameters from step S3 to step S1, and repeating steps S1 to S4 until the structural parameters and / or the film optimization parameters meet the stopping condition of the optimization algorithm. This design method improves the transmittance of the superlens.

Description

Technical Field

[0001] This application relates to the technical field of optical superlenses, and more specifically, to methods, apparatus, and electronic devices for designing antireflective coatings. Background Technology

[0002] A superlens is a metasurface, which is a subwavelength artificial nanostructure film. The amplitude, phase, and polarization of incident light can be modulated by nanostructure units placed on it. A nanostructure can be understood as a subwavelength structure containing either a dielectric or an electrodielectric material that can cause a phase abrupt change. The nanostructure unit is the structural unit centered around each nanostructure, obtained by dividing the superlens. Superlenses solve the problems of large size and heavy weight associated with traditional lenses, but they suffer from low transmittance.

[0003] To improve the transmittance of superlenses, a technical solution of coating antireflective films on superlenses has been proposed. Antireflective films, also known as anti-reflection coatings, reduce reflected light and increase transmitted light through the principle of interference. Unlike the flat surface of traditional lenses, superlenses have an array of nanostructures on their surface. The unique surface structure of superlenses makes traditional antireflective film design methods unsuitable for them.

[0004] Therefore, improving the transmittance of the superlens has become an urgent problem to be solved. Summary of the Invention

[0005] To address the technical problem of improving the transmittance of superlenses in the prior art, this application provides a design method, apparatus, and electronic device for an antireflective coating.

[0006] In a first aspect, this application provides a method for designing an antireflective membrane, the method comprising:

[0007] Step S1: Input structural parameters and membrane optimization parameters. The structural parameters include superlens parameters, membrane refractive index constraints, and membrane thickness constraints. The membrane optimization parameters include membrane structure type, number of membrane layers, and random starting point.

[0008] Step S2: Calculate the transmittance and phase of the superlens based on the structural parameters and the film optimization parameters;

[0009] Step S3: Optimize the structural parameters based on the transmittance and the phase;

[0010] Step S4: Return the optimized structural parameters from step S3 to step S1, and repeat steps S1 to S4 until the structural parameters and / or the membrane optimization parameters meet the stopping conditions of the optimization algorithm.

[0011] Optionally, step S2 includes calculating the transmittance and the phase based on the finite element analysis method.

[0012] Optionally, step S3 includes obtaining the local optimum and / or global optimum of the structural parameters based on a nonlinear programming function optimization algorithm.

[0013] Optionally, step S3 includes:

[0014] Step S201: Calculate the transmittance and phase of the non-film structure of the superlens based on the structural parameters;

[0015] Step S202: Calculate the transmittance and phase of the coating structure of the superlens based on the structural parameters and the film optimization parameters.

[0016] Optionally, the superlens parameters include any one or more combinations of the period of the nanostructure, the operating wavelength of the superlens, the height of the nanostructure, the radius range of the nanostructure, the refractive index of the nanostructure material, and the refractive index of the substrate.

[0017] Optionally, the membrane structure type includes:

[0018] The antireflective coating covers the substrate of the superlens; or

[0019] The antireflective film is located at any end of the nanostructure of the superlens; or

[0020] The antireflective film is located at one end of the nanostructure near the substrate and the other end away from the substrate; or

[0021] The antireflective film covers one end of the nanostructure away from the substrate and the portion of the substrate surface excluding the nanostructure; or

[0022] The antireflective film covers the entire surface of the substrate on the side closest to the nanostructure and the end of the nanostructure away from the substrate.

[0023] Optionally, the stopping conditions of the optimization algorithm include:

[0024] The membrane optimization parameters meet the design requirements; and / or

[0025] The transmittance of the superlens calculated based on the structural parameters and the film optimization parameters meets the design requirements.

[0026] Optionally, the membrane optimization parameters satisfying the design requirements include having a membrane layer number greater than or equal to 1.

[0027] Optionally, the transmittance of the superlens calculated based on the structural parameters and the film optimization parameters meets the design requirements, including a transmittance greater than or equal to 90%.

[0028] Optionally, the transmittance information includes at least one of the transmittance of the superlens or the average transmittance; the phase information includes at least one of the phase, normalized phase, or phase coverage.

[0029] Secondly, this application also provides a design apparatus for an antireflective membrane, applicable to the design method of an antireflective membrane as provided in any of the above embodiments, the design apparatus comprising:

[0030] The input module is used to input structural parameters and membrane optimization parameters;

[0031] The simulation module is used to calculate the transmittance and phase of the superlens.

[0032] An optimization module is used to optimize the structural parameters.

[0033] Optionally, the design device further includes:

[0034] The exchange module is used to store the calculation results of the simulation module and the optimization module, and to realize data exchange between the simulation module and the optimization module.

[0035] Thirdly, this application also provides an electronic device, including a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor. The transceiver, the memory, and the processor are connected via the bus. When the computer program is executed by the processor, it implements the steps in the antireflection film design method provided in any of the above embodiments.

[0036] Fourthly, this application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps in the antireflection membrane design method provided in any of the above embodiments.

[0037] The antireflective coating design method provided in this application calculates the transmittance and phase of a superlens based on structural parameters and membrane optimization parameters, then optimizes the structural parameters based on the transmittance and phase, and obtains structural parameters and / or membrane optimization parameters that satisfy the stopping conditions of the optimization algorithm by iterating the above steps, thereby obtaining an antireflective coating suitable for a superlens and improving the transmittance of the superlens. Attached Figure Description

[0038] The accompanying drawings are provided to further understand this application and are incorporated in and form a part of this specification. The drawings illustrate embodiments of this application and, together with the following description, serve to explain the principles of this application.

[0039] Figure 1A flowchart illustrating an optional design method for an antireflective membrane provided in an embodiment of this application is shown.

[0040] Figure 2 An optional membrane structure type provided by an embodiment of this application is shown;

[0041] Figure 3 (a) shows yet another optional membrane structure type provided in the embodiments of this application;

[0042] Figure 3 (b) shows yet another optional membrane structure type provided in the embodiments of this application;

[0043] Figure 4 This illustrates yet another optional membrane structure type provided by an embodiment of this application;

[0044] Figure 5 (a) shows yet another optional membrane structure type provided in the embodiments of this application;

[0045] Figure 5 (b) shows yet another optional membrane structure type provided in the embodiments of this application;

[0046] Figure 6 A flowchart illustrating an optional design method for an antireflective membrane provided in an embodiment of this application is shown.

[0047] Figure 7 The relationship between transmittance and phase and radius variation range of an optional nanostructure is shown;

[0048] Figure 8 This demonstrates the relationship between the transmittance and phase of another alternative nanostructure and the range of radius variations;

[0049] Figure 9 The relationship between transmittance and phase and radius variation range of an optional nanostructure is shown;

[0050] Figure 10 This demonstrates the relationship between the transmittance and phase of another alternative nanostructure and the range of radius variations;

[0051] Figure 11 The relationship between transmittance and phase and radius variation range of an optional nanostructure is shown;

[0052] Figure 12 This demonstrates the relationship between the transmittance and phase of another alternative nanostructure and the range of radius variations;

[0053] Figure 13 The relationship between transmittance and phase and radius variation range of an optional nanostructure is shown;

[0054] Figure 14 This demonstrates the relationship between the transmittance and phase of another alternative nanostructure and the range of radius variations;

[0055] Figure 15 This demonstrates the relationship between the transmittance and phase of another alternative nanostructure and the range of radius variations;

[0056] Figure 16 This illustration shows an optional structural schematic diagram of the antireflective membrane design apparatus provided in an embodiment of this application;

[0057] Figure 17 This paper shows another optional structural schematic diagram of the antireflective membrane design device provided in the embodiments of this application;

[0058] Figure 18 This illustration shows a schematic diagram of an electronic device for performing an antireflection coating design method according to an embodiment of this application;

[0059] Figure 19 This illustration shows an optional structural diagram of the superlens provided in an embodiment of this application;

[0060] Figure 20 A schematic diagram of an optional nanostructure arrangement of the superlens provided in an embodiment of this application is shown;

[0061] Figure 21 A schematic diagram of an optional nanostructure of the superlens provided in an embodiment of this application is shown;

[0062] Figure 22 A schematic diagram of yet another optional nanostructure of the superlens provided in this application embodiment is shown.

[0063] The reference numerals in the figure represent:

[0064] 1-Nanostructure; 2-Antireflective coating; 3-Substrate; 10-Input module; 20-Simulation module; 30-Optimization module; 40-Switching module; 1110-Bus; 1120-Processor; 1130-Transceiver; 1140-Bus interface; 1150-Memory; 1160-User interface; 1151-Operating system; 1152-Application program. Detailed Implementation

[0065] In the description of the embodiments of this application, those skilled in the art should understand that the embodiments of this application can be implemented as methods, apparatus, electronic devices, and computer-readable storage media. Therefore, the embodiments of this application can be specifically implemented in the following forms: entirely hardware, entirely software (including firmware, resident software, microcode, etc.), or a combination of hardware and software. Furthermore, in some embodiments, the embodiments of this application can also be implemented as a computer program product in one or more computer-readable storage media, wherein the computer-readable storage media contains computer program code.

[0066] The aforementioned computer-readable storage medium may be any combination of one or more computer-readable storage media. Computer-readable storage media include: electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatuses, or devices, or any combination thereof. More specific examples of computer-readable storage media include: portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM), flash memory, optical fiber, optical disc read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any combination thereof. In embodiments of this application, the computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, apparatus, or device.

[0067] The computer program code contained in the aforementioned computer-readable storage medium may be transmitted using any suitable medium, including wireless, wire, optical fiber, radio frequency (RF), or any suitable combination thereof.

[0068] Computer program code for performing the operations of the embodiments of this application can be written in assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, status setting data, integrated circuit configuration data, or in one or more programming languages ​​or combinations thereof. The programming languages ​​include object-oriented programming languages ​​such as Java, Smalltalk, and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The computer program code can be executed entirely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving remote computers, the remote computer can be connected to the user's computer or an external computer via any type of network, including a local area network (LAN) or a wide area network (WAN).

[0069] The embodiments of this application describe the provided methods, apparatus, and electronic devices through flowcharts and / or block diagrams.

[0070] It should be understood that each block of a flowchart and / or block diagram, as well as combinations of blocks in a flowchart and / or block diagram, can be implemented by computer-readable program instructions. These computer-readable program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing apparatus to produce a machine that, when executed by a computer or other programmable data processing apparatus, creates means for implementing the functions / operations specified in the blocks of the flowchart and / or block diagram.

[0071] These computer-readable program instructions may also be stored in a computer-readable storage medium that enables a computer or other programmable data processing device to function in a particular manner. In this way, the instructions stored in the computer-readable storage medium produce an instruction apparatus product that includes the functions / operations specified in the blocks of a flowchart and / or block diagram.

[0072] Computer-readable program instructions may also be loaded onto a computer, other programmable data processing apparatus or other device to cause a series of operational steps to be performed on the computer, other programmable data processing apparatus or other device to produce a computer-implemented process, such that the instructions that execute on the computer or other programmable data processing apparatus provide a process for implementing the functions / operations specified in the blocks of the flowchart and / or block diagram.

[0073] The inventors of this application have discovered that when an antireflection film designed using the traditional lens design method is applied to a superlens, the deposition of the antireflection film between the nanostructures of the superlens will disrupt the original phase of the superlens, thereby causing the optical performance of the superlens to deviate from expectations.

[0074] To address this, the inventors of this application proposed using any nanostructure of the superlens, the substrate centered on that nanostructure, and the filling material surrounding the nanostructure as nanostructural units. They then calculated the equivalent refractive index and extinction coefficient of these nanostructural units, imported the calculation results into a film system design module, and jointly optimized the film system parameters using the film system design module and the finite element analysis module to improve the superlens's transmittance without altering its phase. However, the inventors subsequently discovered that while this method improves the superlens's transmittance without changing its phase, the calculation process is complex and requires filling the gaps between the nanostructures first.

[0075] To improve the aforementioned technical problems, the inventors have proposed a design method for an antireflective membrane. The embodiments of this application are described below with reference to the accompanying drawings. Figure 1As shown, the design method of the antireflective membrane includes at least steps S1 to S4 as shown below.

[0076] Step S1: Input structural parameters and membrane optimization parameters. The structural parameters include superlens parameters, membrane refractive index constraints, and membrane thickness constraints. The membrane optimization parameters include membrane structure type, number of membrane layers, and number of random starting points. The membrane refractive index constraints and membrane thickness constraints are selectable ranges for the refractive index and thickness of the membrane system.

[0077] According to embodiments of this application, the aforementioned superlens parameters include any one or more combinations of the period (also referred to as lattice constant) of the nanostructure 1, the operating wavelength of the superlens, the height of the nanostructure 1, the radius range of the nanostructure 1, the refractive index of the material of the nanostructure 1, and the refractive index of the substrate 3. According to embodiments of this application, the aforementioned film optimization parameters include the film structure type, the number of film layers, and the number of random starting points. It should be understood that the refractive index of the nanostructure 1 is affected by factors such as the wavelength of the incident radiation and the fabrication process. The superlens involved in the embodiments of this application will be described in detail later.

[0078] For the membrane structure type of this application, please refer to [link / reference]. Figures 2 to 5 In one embodiment of this application, the antireflective coating 2 covers the substrate 3 of the superlens. Exemplarily, as... Figure 2 As shown, the antireflective coating 2 covers one side of the substrate 3 of the superlens, and the nanostructure 1 is provided on this side of the substrate 3. In another embodiment of this application, the antireflective coating 2 is located at any end of the nanostructure 1 of the superlens. Exemplarily, as... Figure 3 As shown in (a), the antireflective film 2 is located at one end of the nanostructure 1 of the superlens near the substrate 3. Exemplarily, as... Figure 3 As shown in (b), the antireflective coating 2 is located at the end of the nanostructure 1 of the superlens that is furthest from the substrate 3. Optionally, as... Figure 4 As shown, the antireflective film 2 provided in this embodiment is located at one end of the nanostructure 1 of the superlens near the substrate 3 and the other end away from the substrate 3. Figure 5 As shown in (a), the antireflective film 2 provided in this application covers the end of the nanostructure 1 away from the substrate 3 and the portion of the surface of the substrate 3 excluding the nanostructure 1. Figure 5 As shown in (b); the antireflective film 2 covers the entire surface of the substrate 3 on the side near the nanostructure 1 and the end of the nanostructure 1 away from the substrate 3.

[0079] Step S2: Calculate the transmittance and phase information of the superlens based on the aforementioned structural parameters and film optimization parameters. Optionally, this application uses the finite-difference time-domain (FDTD) method to calculate the transmittance or phase information of the superlens's uncoated and coated structures.

[0080] Specifically, such as Figure 6 As shown, the calculation of the transmittance and phase information of the superlens based on structural parameters and film optimization parameters in this application includes:

[0081] Step S201: Calculate the transmittance and phase information of the membrane-free structure of the superlens based on the structural parameters;

[0082] Step S202: Calculate the transmittance and phase information of the superlens coating structure based on structural parameters and film optimization parameters.

[0083] Step S3 involves optimizing the structural parameters based on the transmittance and phase information obtained in step S2. Optionally, step S3 includes obtaining the local and / or global optima of the structural parameters using a nonlinear programming function optimization algorithm. It is important to note that the more membrane layers there are, the more membrane parameters are involved in the calculation, and the more complex the calculation process becomes. It should also be understood that setting a larger number of random starting points increases the probability of finding the global optimum. Theoretically, in addition to the aforementioned nonlinear normative function optimization algorithm, other optimization methods in this field can also obtain the local and / or global optima of the structural parameters.

[0084] Step S4: Return the optimized structural parameters obtained in step S3 to step S1, and repeat steps S1 to S3 until the structural parameters and / or the membrane optimization parameters meet the stopping conditions of the optimization algorithm. According to an embodiment of this application, the stopping conditions of the aforementioned optimization algorithm include:

[0085] The membrane optimization parameters meet the design requirements; and / or

[0086] The transmittance and phase information of the superlens calculated based on structural parameters and membrane optimization parameters meet the design requirements.

[0087] It should be understood that the transmittance information of the aforementioned superlens includes at least one of transmittance and average transmittance; the phase information of the aforementioned superlens includes at least one of phase, normalized phase, and phase coverage. Optionally, film optimization to meet design requirements includes meeting design requirements for the number of film layers and the film structure. For example, the number of film layers is greater than or equal to 1. Another example is that the number of film layers is less than or equal to 8. Yet another example is that the film structure must ensure that the antireflection film 2 only covers the end of the nanostructure 1 furthest from the substrate. Yet another example is that the transmittance of the optimized superlens coating structure is greater than or equal to 90%. It should be understood that meeting the transmittance design requirements is premised on the phase of the superlens meeting the design requirements. For example, if the design requirements specify the focal length range of the superlens, then the phase of the superlens needs to be optimized so that the focal length of the superlens falls within the specified range in the design requirements. It should also be understood that any of the above optimization algorithms can be implemented using computer programming languages. For example, MATLAB, C, C++, and Python, etc. Next, this paper will use MATLAB as an example to illustrate the design method of the antireflection film provided in the embodiments of this application.

[0088] First, input the structural parameters and membrane optimization parameters in MATLAB. The structural parameters include the superlens parameters, membrane refractive index constraints, and membrane thickness constraints. The membrane optimization parameters include the membrane structure type, number of membrane layers, and number of random starting points; the membrane refractive index constraints and membrane thickness constraints are the allowable ranges of refractive index and thickness for the membrane system according to the design requirements.

[0089] Secondly, the FDTD function is called using a MATLAB subfunction, with MATLAB inputting structural parameters into the FDTD. Next, the transmittance and phase of the uncoated superlens structure are calculated using the FDTD, and the transmittance and phase are returned to MATLAB from the FDTD and stored in the MATLAB workspace. Optionally, the transmittance and phase of the uncoated superlens structure can also be calculated using the FDTD alone. However, directly using MATLAB to perform calculations for both coated and uncoated structures takes less time.

[0090] The program iterates through different membrane structures defined by the membrane optimization parameters in MATLAB, calling an optimization sub-function sequentially. The optimization sub-function exchanges data with the FDTD (Fixed-Time Demand Table), and the MATLAB sub-function passes structural parameters and membrane optimization parameters to the FDTD. The FDTD returns parameters such as transmittance and phase. MATLAB's built-in optimization algorithm analyzes and searches for optimizations, iterating until the algorithm's stopping or termination condition is met. Finally, the optimized membrane parameters are saved. The order of the different membrane structures in the aforementioned parameter optimization is not strictly limited. For example, in the sequential optimization of different membrane structures defined by the membrane optimization parameters, the order of the membrane structures can be arranged according to the feasibility of the actual production process or according to the cost of the process.

[0091] Optionally, the data transmitted by the FDTD also includes average transmittance and phase coverage. It should be understood that the calculation of parameters such as phase, transmittance, normalized phase, average transmittance, and phase coverage is not limited to FDTD calculation; for example, MATLAB can also perform the calculation of these parameters.

[0092] Example 1

[0093] The input structural parameters include: operating wavelength of the superlens 1550 nm, nanopillar height 1000 nm, lattice constant (or nanostructure arrangement period) 750 nm, nanostructure shape is a solid cylinder, nanostructure material is silicon (refractive index 3.7), substrate material is silicon dioxide (refractive index 1.44), and nanopillar radius varies from 80 to 200 nm. The average transmittance is calculated for nanostructures with a phase coverage close to 2π. The relationship between the transmittance and normalized phase of the nanostructure and the variation in nanostructure radius without a film is as follows: Figure 7 As shown. According to Figure 7 It can be seen that the average transmittance of the nanostructure of this superlens is 0.94.

[0094] Referring to the antireflection film design method described above, input the nanostructure parameters to be optimized, as well as the refractive index and thickness constraints of the film system, into MATLAB. The thickness of each film layer ranges from 10 to 1000 nm, and the refractive index ranges from 1.3 to 3. Select [the appropriate method / app]. Figure 2 The membrane structure shown was optimized. A maximum of eight layers were used, and at least five random starting points were selected for optimization. The optimization results are as follows: with only one layer, the membrane thickness is 100-300 nm, and the refractive index is 1.8-2.2. The relationship between the transmittance and normalized phase of the nanostructure corresponding to the optimized superlens coating structure and the change in nanostructure radius is shown in the figure. Figure 8 As shown, the average transmittance of the optimized nanostructure is 0.97.

[0095] Example 2

[0096] The input structural parameters include: operating wavelength of the superlens 1550 nm, nanopillar height 1000 nm, lattice constant (or nanostructure arrangement period) 750 nm, nanostructure shape is a solid cylinder, nanostructure material is silicon (refractive index 3.7), substrate material is silicon dioxide (refractive index 1.44), and nanopillar radius varies from 30 to 220 nm. The average transmittance is calculated for nanostructures with a phase coverage close to 2π. The relationship between the transmittance and normalized phase of the nanostructure and the variation in nanostructure radius without a film is as follows: Figure 7 As shown. According to Figure 7 It can be seen that the average transmittance of the nanostructure of this superlens is 0.94.

[0097] Referring to the antireflection film design method described above, input the nanostructure parameters to be optimized, as well as the refractive index and thickness constraints of the film system, into MATLAB. The thickness of each film layer ranges from 10 to 1000 nm, and the refractive index ranges from 1.3 to 3. Select [the appropriate method / app]. Figure 5 The membrane structure shown was optimized. A maximum of eight layers were used, and at least five random starting points were selected for optimization. The optimization results showed that with only one layer, the membrane thickness was 100-300 nm, and the refractive index was 1.8-2.2. The relationship between the transmittance and normalized phase of the nanostructure corresponding to this coating structure and the change in nanostructure radius is as follows: Figure 9 As shown, the average transmittance of the nanostructures on the optimized superlens coating structure is 0.97.

[0098] Example 3

[0099] The input structural parameters include: operating wavelength of the superlens 1550 nm, nanopillar height 1000 nm, lattice constant (or nanostructure arrangement period) 750 nm, nanostructure shape is a solid cylinder, nanostructure material is silicon (refractive index 3.7), substrate material is silicon dioxide (refractive index 1.44), and nanopillar radius varies from 30 to 220 nm. The average transmittance is calculated for nanostructures with a phase coverage close to 2π. The relationship between the transmittance and normalized phase of the nanostructure and the variation in nanostructure radius without a film is as follows: Figure 7 As shown. According to Figure 7 It can be seen that the average transmittance of the nanostructure of this superlens is 0.94.

[0100] Referring to the antireflection membrane design method described above, input the structural parameters, refractive index, and thickness constraints of the membrane system into MATLAB. The thickness of each layer ranges from 10 to 1000 nm, and the refractive index ranges from 1.3 to 3. Select [the appropriate method / app]. Figure 5The membrane structure shown was optimized. A maximum of eight layers were used, and at least five random starting points were selected for optimization. The optimization results are as follows: In the case of two-layer coating, the first and second layers are stacked sequentially from the direction closest to the substrate to the direction furthest from the substrate. The thickness of the first layer is 660-680 nm, and its refractive index is 1.3-1.5; the thickness of the second layer is 900-1000 nm, and its refractive index is 1.4-1.6. The relationship between the transmittance and normalized phase of the nanostructure corresponding to this coating structure and the change in nanostructure radius is as follows. Figure 10 As shown, the average transmittance of the nanostructures on the optimized superlens coating structure is 0.97.

[0101] Example 4

[0102] The input structural parameters include: operating wavelength of the superlens 1550 nm, nanopillar height 1000 nm, lattice constant (or nanostructure arrangement period) 750 nm, nanostructure shape is a solid cylinder, nanostructure material is silicon (refractive index 3.7), substrate material is silicon dioxide (refractive index 1.44), and nanopillar radius varies from 30 to 220 nm. The average transmittance is calculated for nanostructures with a phase coverage close to 2π. The relationship between the transmittance and normalized phase of the nanostructure and the variation in nanostructure radius without a film is as follows: Figure 7 As shown. According to Figure 7 It can be seen that the average transmittance of the nanostructure of this superlens is 0.94.

[0103] Referring to the antireflection membrane design method described above, input the structural parameters, refractive index, and thickness constraints of the membrane system into MATLAB. The thickness of each layer ranges from 10 to 1000 nm, and the refractive index ranges from 1.3 to 3. Select [the appropriate method / app]. Figure 5 The membrane structure shown was optimized. A maximum of eight layers were used, and at least five random starting points were selected for optimization. The optimization results are as follows: In the case of a four-layer membrane, the first to fourth layers are stacked sequentially from the closest to the substrate to the furthest from the substrate. The thicknesses of the first to fourth layers are 10-40 nm, 900-1000 nm, 180-200 nm, and 10-20 nm, respectively, and the refractive indices are 1.6-1.8, 1.4-1.6, 1.3-1.4, and 1.3-1.5, respectively. The relationship between the transmittance and normalized phase of the nanostructure corresponding to this coating structure and the change in nanostructure radius is as follows. Figure 11 As shown, the average transmittance of the nanostructures on the optimized superlens coating structure is 0.97.

[0104] Example 5

[0105] The input structural parameters include: operating wavelength of the superlens 1550 nm, nanopillar height 1000 nm, lattice constant (or nanostructure arrangement period) 750 nm, nanostructure shape is a solid cylinder, nanostructure material is silicon (refractive index 3.7), substrate material is silicon dioxide (refractive index 1.44), and nanopillar radius varies from 90 to 200 nm. The average transmittance is calculated for nanostructures with a phase coverage close to 2π. The relationship between the transmittance and normalized phase of the nanostructure and the variation in nanostructure radius without a film is as follows: Figure 7 As shown. According to Figure 7 It can be seen that the average transmittance of the nanostructure of this superlens is 0.94.

[0106] Referring to the antireflection membrane design method described above, input the structural parameters, refractive index, and thickness constraints of the membrane system into MATLAB. The thickness of each layer ranges from 10 to 1000 nm, and the refractive index ranges from 1.3 to 3. Select [the appropriate method / app]. Figure 3 The film structure shown in (b) was optimized. A maximum of eight layers were used, and at least five random starting points were selected for optimization. The optimization results are as follows: with one layer, the film thickness is 40-60 nm, and the refractive index is 1.9-2.1. The relationship between the transmittance and normalized phase of the nanostructure corresponding to this coating structure and the change in nanostructure radius is shown in the figure. Figure 12 As shown, the average transmittance of the nanostructures on the optimized superlens coating structure is 0.97.

[0107] Example 6

[0108] The input structural parameters include: operating wavelength of the superlens 1550 nm, nanopillar height 1000 nm, lattice constant (or nanostructure arrangement period) 750 nm, nanostructure shape is a solid cylinder, nanostructure material is silicon (refractive index 3.7), substrate material is silicon dioxide (refractive index 1.44), and nanopillar radius varies from 90 to 200 nm. The average transmittance is calculated for nanostructures with a phase coverage close to 2π. The relationship between the transmittance and normalized phase of the nanostructure and the variation in nanostructure radius without a film is as follows: Figure 7 As shown. According to Figure 7 It can be seen that the average transmittance of the nanostructure of this superlens is 0.94.

[0109] Referring to the antireflection membrane design method described above, input the structural parameters, refractive index, and thickness constraints of the membrane system into MATLAB. The thickness of each layer ranges from 10 to 1000 nm, and the refractive index ranges from 1.3 to 3. Select [the appropriate method / app]. Figure 4The membrane structure shown was optimized. A maximum of eight layers were used, and at least five random starting points were selected for optimization. The optimization results are as follows: with only one layer of film deposited at each end of the nanostructure, the film thickness at the top of the nanostructure is 10-20 nm, and the film thickness at the bottom of the nanostructure is 260-280 nm. The refractive index at the top of the nanostructure is 1.9-2.1. The relationship between the transmittance and normalized phase of the nanostructure and the change in the nanostructure radius is shown in the figure. Figure 13 As shown, the average transmittance of the nanostructures on the optimized superlens coating structure is 0.98.

[0110] Example 7

[0111] The input structural parameters include: operating wavelength of the superlens 1550 nm, nanopillar height 1000 nm, lattice constant (or nanostructure arrangement period) 750 nm, nanostructure shape is a solid cylinder, nanostructure material is silicon (refractive index 3.47), substrate material is silicon dioxide (refractive index 1.44), and nanopillar radius varies from 90 to 250 nm. The average transmittance is calculated for nanostructures with a phase coverage close to 2π. The relationship between the transmittance and normalized phase of the nanostructure and the variation in nanostructure radius without a film is as follows: Figure 14 As shown. According to Figure 14 It can be seen that the average transmittance of the nanostructure of this superlens is 0.96.

[0112] Referring to the antireflection membrane design method described above, input the structural parameters, refractive index, and thickness constraints of the membrane system into MATLAB. The thickness of each layer ranges from 10 to 1000 nm, and the refractive index ranges from 1.3 to 3. Select [the appropriate method / app]. Figure 4 The membrane structure shown was optimized. A maximum of eight layers were used, and at least five random starting points were selected for optimization. The optimization results are as follows: with only one layer of film deposited at each end of the nanostructure, the film thickness at the top of the nanostructure is 300-330 nm, and the film thickness at the bottom of the nanostructure is 600-700 nm. The refractive index at the top of the nanostructure is 1.9-2.1. The relationship between the transmittance and normalized phase of the nanostructure and the change in the nanostructure radius is as follows. Figure 15 As shown, the average transmittance of the nanostructures on the optimized superlens coating structure is 0.98.

[0113] Therefore, the antireflective coating design method of this application calculates the transmittance and phase of the superlens based on structural parameters and film optimization parameters, then optimizes the structural parameters based on the transmittance and phase, and obtains structural parameters and / or film optimization parameters that satisfy the stopping condition of the optimization algorithm by iterating the above steps, thereby obtaining an antireflective coating suitable for the superlens and improving the transmittance of the superlens. Furthermore, the antireflective coating design method provided by this application saves computation time compared to methods for calculating equivalent refractive index and equivalent extinction coefficient, and can optimize more film structure types during the design process.

[0114] The above text combined Figures 1 to 15 The present application describes in detail the design method of the antireflective membrane provided in the embodiments. This method can also be implemented by a corresponding device. The following will be combined with Figures 16 to 18 This application describes in detail the design apparatus for the antireflective membrane provided in the embodiments.

[0115] Figure 16 A schematic diagram of a design apparatus for an antireflective membrane provided in an embodiment of this application is shown. Figure 16 As shown, the design device for the antireflective membrane includes:

[0116] Input module 10 is used to input structural parameters and membrane optimization parameters;

[0117] Simulation module 20 is used to calculate the transmittance and phase of the superlens;

[0118] Optimization module 30 is used to optimize structural parameters.

[0119] Optionally, such as Figure 17 As shown, the design device for the antireflective membrane also includes an exchange module 40, which stores the calculation results of the simulation module 20 and the optimization module 30, and realizes data exchange between the simulation module 20 and the optimization module 30.

[0120] Therefore, the antireflective coating design apparatus of this application embodiment calculates the transmittance and phase of the superlens through a simulation module based on the structural parameters and membrane optimization parameters input by the input device. Then, it optimizes the structural parameters based on the transmittance and phase using an optimization module. The above steps are then repeated to obtain structural parameters and / or membrane optimization parameters that satisfy the stopping condition of the optimization algorithm, thereby obtaining an antireflective coating suitable for the superlens and improving its transmittance. Furthermore, the antireflective coating design method provided by this application embodiment saves computation time compared to methods for calculating equivalent refractive index and equivalent extinction coefficient, and allows for the optimization of more membrane structure types during the design process.

[0121] It should be noted that the antireflective membrane design apparatus provided in the above embodiments is only illustrated by the division of the above functional modules when implementing the corresponding functions. In practical applications, the above functions can be assigned to one functional module (e.g., a processor) as needed. Alternatively, the above functions can be assigned to different functional modules as needed, that is, the internal structure of the device can be divided into different functional modules to complete all or part of the functions described above. In addition, the antireflective membrane design apparatus and the antireflective membrane design method embodiments provided in the above embodiments belong to the same concept, and their specific implementation process can be found in the method embodiments, which will not be repeated here.

[0122] In addition, this application also provides an electronic device, including a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor. The transceiver, the memory, and the processor are connected via the bus. When the computer program is executed by the processor, it implements the various processes of the above-described antireflective film design method embodiments and achieves the same technical effect. To avoid repetition, it will not be described again here.

[0123] For details, see Figure 18 As shown in the figure, this application embodiment also provides an electronic device, which includes a bus 1110, a processor 1120, a transceiver 1130, a bus interface 1140, a memory 1150 and a user interface 1160.

[0124] In this embodiment of the application, the electronic device further includes: a computer program stored in the memory 1150 and executable on the processor 1120, wherein the computer program, when executed by the processor 1120, performs the following steps:

[0125] Step S1: Input structural parameters and membrane optimization parameters. Structural parameters include superlens parameters, membrane refractive index constraints, and membrane thickness constraints. Membrane optimization parameters include membrane structure type, number of membrane layers, and random starting point.

[0126] Step S2: Calculate the transmittance and phase of the superlens based on the structural parameters and film optimization parameters;

[0127] Step S3: Optimize the structural parameters based on transmittance and phase;

[0128] Step S4: Return the optimized structural parameters from step S3 to step S1, and repeat steps S1 to S4 until the structural parameters and / or membrane optimization parameters meet the stopping conditions of the optimization algorithm.

[0129] Optionally, when the computer program is executed by the processor 1120, it may also perform the following steps:

[0130] Step S201: Calculate the transmittance and phase of the membrane-free structure of the superlens based on the structural parameters;

[0131] Step S202: Calculate the transmittance and phase of the superlens coating structure based on structural parameters and film optimization parameters.

[0132] Optionally, when the computer program is executed by the processor 1120 in step S2, the processor specifically implements the following steps:

[0133] Step S201: Calculate the transmittance and phase of the membrane-free structure of the superlens based on the structural parameters;

[0134] Step S202: Calculate the transmittance and phase of the superlens coating structure based on structural parameters and film optimization parameters.

[0135] Transceiver 1130 is used to receive and send data under the control of processor 1120.

[0136] In this embodiment of the application, the bus architecture (represented by bus 1110) may include any number of interconnected buses and bridges, and bus 1110 connects various circuits including one or more processors represented by processor 1120 and memory represented by memory 1150.

[0137] Bus 1110 represents one or more of several types of bus architectures, including memory buses and memory controllers, peripheral buses, Accelerated Graphics Port (AGP), processors, or local buses using any bus architecture from various bus architectures. As an example and not a limitation, such architectures include: Industry Standard Architecture (ISA) buses, Micro Channel Architecture (MCA) buses, Enhanced ISA (EISA) buses, Video Electronics Standards Association (VESA) buses, and Peripheral Component Interconnect (PCI) buses.

[0138] The processor 1120 can be an integrated circuit chip with signal processing capabilities. In implementation, the steps of the above method embodiments can be completed by integrated logic circuits in the processor hardware or by instructions in software form. The processors mentioned above include: general-purpose processors, central processing units (CPUs), network processors (NPs), digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), complex programmable logic devices (CPLDs), programmable logic arrays (PLAs), microcontroller units (MCUs) or other programmable logic devices, discrete gates, transistor logic devices, and discrete hardware components. They can implement or execute the methods, steps, and logic block diagrams disclosed in the embodiments of this application. For example, the processor can be a single-core processor or a multi-core processor, and the processor can be integrated on a single chip or located on multiple different chips.

[0139] Processor 1120 can be a microprocessor or any conventional processor. The method steps disclosed in the embodiments of this application can be directly executed by a hardware decoding processor, or executed by a combination of hardware and software modules in the decoding processor. The software modules can reside in readable storage media known in the art, such as Random Access Memory (RAM), Flash Memory, Read-Only Memory (ROM), Programmable Read-Only Memory (PROM), Erasable Programmable Read-Only Memory (EPROM), registers, etc. The readable storage medium is located in memory, and the processor reads information from the memory and, in conjunction with its hardware, completes the steps of the above method.

[0140] Bus 1110 can also connect various other circuits, such as peripheral devices, voltage regulators, or power management circuits. Bus interface 1140 provides an interface between bus 1110 and transceiver 1130, all of which are well known in the art. Therefore, the embodiments of this application will not be described further.

[0141] Transceiver 1130 can be a single element or multiple elements, such as multiple receivers and transmitters, providing a unit for communicating with various other devices over a transmission medium. For example, transceiver 1130 receives external data from other devices, and transceiver 1130 is used to send data processed by processor 1120 to other devices. Depending on the nature of the computer system, a user interface 1160 may also be provided, such as a touchscreen, physical keyboard, monitor, mouse, speaker, microphone, trackball, joystick, or stylus.

[0142] It should be understood that, in this embodiment of the application, memory 1150 may further include memory remotely configured relative to processor 1120, and this remotely configured memory may be connected to a server via a network. One or more portions of the aforementioned network may be an ad hoc network, intranet, extranet, virtual private network (VPN), local area network (LAN), wireless local area network (WLAN), wide area network (WAN), wireless wide area network (WWAN), metropolitan area network (MAN), Internet, public switched telephone network (PSTN), ordinary old-style telephone service (POTS), cellular telephone network, wireless network, Wi-Fi network, and combinations of two or more of the aforementioned networks. For example, cellular telephone networks and wireless networks can be Global System for Mobile Communications (GSM), Code Division Multiple Access (CDMA), WiMAX, General Packet Radio Service (GPRS), Wideband Code Division Multiple Access (WCDMA), Long Term Evolution (LTE), LTE Frequency Division Duplex (FDD), LTE Time Division Duplex (TDD), Advanced Long Term Evolution (LTE-A), Universal Mobile Telecommunications System (UMTS), Enhanced Mobile Broadband (eMBB), Massive Machine Type Communication (mMTC), Ultra Reliable Low Latency Communications (uRLLC), etc.

[0143] It should be understood that the memory 1150 in the embodiments of this application may be volatile memory or non-volatile memory, or may include both volatile memory and non-volatile memory. Non-volatile memory includes: read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory.

[0144] Volatile memory includes random access memory (RAM), which serves as an external cache. By way of example, but not limitation, many forms of RAM are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDRSDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous linked dynamic random access memory (Synchlink DRAM, SLDRAM), and direct memory bus RAM (DRRAM). The memory 1150 of the electronic device described in this application embodiment includes, but is not limited to, the above and any other suitable types of memory.

[0145] In this embodiment, memory 1150 stores the following elements of operating system 1151 and application 1152: executable modules, data structures, or subsets thereof, or extended sets thereof.

[0146] Specifically, the operating system 1151 includes various system programs, such as a framework layer, a core library layer, and a driver layer, used to implement various basic business functions and handle hardware-based tasks. The application program 1152 includes various applications, such as a media player and a browser, used to implement various application functions. Programs implementing the methods of the embodiments of this application may be included in the application program 1152. The application program 1152 includes applets, objects, components, logic, data structures, and other computer system executable instructions that perform specific tasks or implement specific abstract data types.

[0147] In addition, this application also provides a computer-readable storage medium storing a computer program thereon. When the computer program is executed by a processor, it implements the various processes of the above-described antireflective membrane design method embodiments and can achieve the same technical effect. To avoid repetition, it will not be described again here.

[0148] Computer-readable storage media include: permanent and non-permanent, removable and non-removable media, which are tangible devices capable of retaining and storing instructions for use by an instruction execution device. Computer-readable storage media include: electronic storage devices, magnetic storage devices, optical storage devices, electromagnetic storage devices, semiconductor storage devices, and any suitable combination thereof. Computer-readable storage media include: phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), non-volatile random access memory (NVRAM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, optical disc read-only memory (CD-ROM), digital versatile optical disc (DVD) or other optical storage, magnetic tape storage, magnetic disk storage or other magnetic storage devices, memory sticks, mechanical encoding devices (e.g., punched cards or raised structures in grooves on which instructions are recorded), or any other non-transfer medium that can be used to store information accessible by a computing device. As defined in the embodiments of this application, computer-readable storage media do not include temporary signals themselves, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating through waveguides or other transmission media (e.g., light pulses passing through fiber optic cables), or electrical signals transmitted through wires.

[0149] In the several embodiments provided in this application, it should be understood that the disclosed apparatus, electronic devices, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative. For instance, the division of modules or units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. In addition, the mutual coupling or direct coupling or communication connection shown or discussed may be indirect coupling or communication connection through some interfaces, devices, or units, or it may be an electrical, mechanical, or other form of connection.

[0150] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; they may be located in one place or distributed across multiple network units. Some or all of these units can be selected to solve the problems addressed by the embodiments of this application, depending on actual needs.

[0151] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0152] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solutions of the embodiments of this application, in essence, or the parts that contribute to the prior art, or all or part of the technical solutions, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (including: a personal computer, a server, a data center, or other network device) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media listed above that can store program code.

[0153] Next, combine Figures 19 to 22 The superlens provided in the embodiments of this application will be described in detail.

[0154] A superlens is a type of metasurface, such as Figure 19 As shown, the metasurface is a subwavelength artificial nanostructure film. The amplitude, phase, and polarization of incident light can be modulated by nanostructure units disposed on it. It should be noted that nanostructure 1 can be understood as a subwavelength structure containing either a dielectric or an electrodielectric material, capable of causing a phase abrupt change. The nanostructure unit is a structural unit centered on each nanostructure 1, obtained by dividing the superlens. In the superlens, nanostructures are periodically arranged on the substrate 3, with each period comprising a superstructure unit. The superstructure unit is a close-packed pattern, such as a regular square, a regular hexagon, etc. Each period contains a set of nanostructures 1, and the vertices and / or centers of the superstructure units may, for example, contain nanostructures. When the superstructure unit is a regular hexagon, at least one nanostructure is disposed at each vertex and center position of the hexagon. Alternatively, when it is a square, at least one nanostructure 1 is disposed at each vertex and center position of the square. Ideally, the superstructure unit should be a nanostructure with hexagonal vertices and a central arrangement, or a nanostructure with square vertices and a central arrangement.1 It should be understood that in actual products, due to the limitations of the superlens shape, there may be missing nanostructures at the edges of the superlens, preventing it from satisfying the complete hexagonal / square shape requirement. Specifically, for example... Figure 20 As shown, the superstructure unit is composed of nanostructure 1 arranged in a regular pattern, and several superstructure units are arranged in an array to form a metasurface structure.

[0155] like Figure 20 The left part shows an embodiment in which the superstructure unit includes a central nanostructure 1 and six peripheral nanostructures 1 that are equidistant from it. The peripheral nanostructures are evenly distributed along the circumference to form a regular hexagon, or can be understood as multiple nanostructures 1 forming an equilateral triangle that is combined with each other.

[0156] like Figure 20 In one embodiment shown in the middle section, the superstructure unit comprises a central nanostructure and four peripheral nanostructures 1 equidistant from it, forming a square.

[0157] Superstructure units and their densely packed / arrayed forms can also be arranged in a circumferentially in a sector shape, such as... Figure 20 The right side shows a sector with two curved sides, but it can also be a sector with only one curved side, such as... Figure 20 In the lower left corner of the right part, nanostructure 1 is set at the intersection of the sides of the fan and at the center.

[0158] Exemplarily, the nanostructure 1 provided in this application embodiment can be a polarization-independent structure, such a structure applying a propagation phase to the incident light. According to the embodiments of this application, the nanostructure 1 can be a positive structure or a negative structure. For example, the shape of the nanostructure 1 is cylindrical or prismatic. Exemplarily, the nanostructure 1 is solid or hollow. Figure 21 A schematic diagram of the nanostructure unit is shown when nanostructure 1 is a cylinder.

[0159] For example, nanostructure 1 can be a polarization-dependent structure, which imposes a geometric phase on the incident light. Nanostructure 1 can be a positive or negative structure. For example, nanostructure 1 can be an elliptical cylinder, nanofin, or similar structure. Figure 22 A schematic diagram of the nanostructure unit when nanostructure 1 is a nanofin is shown. According to an embodiment of this application, the characteristic size of the nanostructure is greater than or equal to 0.2λ. c And less than or equal to 0.8λ c ;λ c λ is the center wavelength of the incident radiation.

[0160] According to embodiments of this application, optionally, the arrangement period of the nanostructure 1 is greater than or equal to 0.3λ. c And less than or equal to 2λ c ; where λ c The wavelength is the center wavelength of the operating band. Optionally, according to an embodiment of this application, the height of the nanostructure 1 is greater than or equal to 0.3λ. c And less than or equal to 5λ c ; where λ cThe wavelength is the center wavelength of the operating band. According to an embodiment of this application, exemplarily, the feature size of nanostructure 1 is greater than or equal to 0.2λ. c And less than or equal to 0.8λ c ;λ c λ is the center wavelength of the incident radiation.

[0161] It should be noted that the superlens provided in this application embodiment can be processed by semiconductor technology, and has the advantages of light weight, thin thickness, simple structure and process, low cost and high mass production consistency.

[0162] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the embodiments of this application should be included within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A method for designing an antireflective membrane, characterized in that, The design method includes: Step S1: Input structural parameters and membrane optimization parameters. The structural parameters include superlens parameters, membrane refractive index constraints, and membrane thickness constraints. The membrane optimization parameters include membrane structure type, number of membrane layers, and number of random starting points. The membrane structure types include: The antireflective coating covers the substrate of the superlens; or The antireflective film is located at any end of the nanostructure of the superlens; or The antireflective film is located at one end of the nanostructure near the substrate and the other end away from the substrate; or The antireflective film covers one end of the nanostructure away from the substrate and the portion of the substrate surface excluding the nanostructure; or The antireflective film covers the entire surface of the substrate on the side closest to the nanostructure and the end of the nanostructure away from the substrate; Step S2: Calculate the transmittance and phase information of the superlens based on the structural parameters and the film optimization parameters; Step S3: Optimize the structural parameters based on the transmittance information and the phase information; Step S4: Return the optimized structural parameters obtained in step S3 to step S1, and repeat steps S1 to S3 until the structural parameters and / or the membrane optimization parameters meet the stopping conditions of the optimization algorithm.

2. The design method of the antireflective membrane according to claim 1, characterized in that, Step S2 includes calculating the transmittance information and the phase information based on the finite element analysis method.

3. The design method of the antireflective membrane according to claim 1, characterized in that, Step S3 includes obtaining the local and / or global optimum of the structural parameters based on a nonlinear programming function optimization algorithm.

4. The design method of the antireflective membrane according to claim 1 or 2, characterized in that, Step S2 includes: Step S201: Calculate the transmittance and phase information of the membrane-free structure of the superlens based on the structural parameters; Step S202: Calculate the transmittance and phase information of the coating structure of the superlens based on the structural parameters and the film optimization parameters.

5. The design method of the antireflective membrane according to claim 1 or 3, characterized in that, The superlens parameters include any one or more combinations of the period of the nanostructure, the operating wavelength of the superlens, the height of the nanostructure, the radius range of the nanostructure, the refractive index of the nanostructure material, and the refractive index of the substrate.

6. The method for designing an antireflective membrane according to claim 1, characterized in that, The stopping conditions of the optimization algorithm include: The membrane optimization parameters meet the design requirements; and / or The transmittance and phase information of the superlens calculated based on the structural parameters and the film optimization parameters meet the design requirements.

7. The method for designing an antireflective membrane according to claim 6, characterized in that, The membrane optimization parameters that meet the design requirements include a membrane layer number greater than or equal to 1.

8. The method for designing an antireflective membrane according to claim 6, characterized in that, The transmittance of the superlens calculated based on the structural parameters and the film optimization parameters meets the design requirements, including a transmittance greater than or equal to 90%.

9. The method for designing an antireflective membrane according to any one of claims 1, 2, or 6, characterized in that, The transmittance information includes at least one of the transmittance of the superlens or the average transmittance; the phase information includes at least one of the phase, normalized phase, or phase coverage.

10. A design device for an antireflective membrane, characterized in that, The design method applicable to the antireflective membrane as described in any one of claims 1 to 8, the design apparatus comprising: The input module is used to input structural parameters and membrane optimization parameters; The simulation module is used to calculate the transmittance and phase of the superlens. An optimization module is used to optimize the structural parameters.

11. The apparatus for designing an antireflective membrane according to claim 10, characterized in that, The design device further includes: The exchange module is used to store the calculation results of the simulation module and the optimization module, and to realize data exchange between the simulation module and the optimization module.

12. An electronic device comprising a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the transceiver, the memory, and the processor are connected via the bus, characterized in that, When the computer program is executed by the processor, it implements the steps in the design method of the antireflective membrane as described in any one of claims 1 to 9.

13. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the steps in the design method of the antireflective membrane as described in any one of claims 1 to 9.

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