Mask assembly and mask plate

Abstract

The present invention provides a mask assembly and a mask plate. The mask assembly includes a body and a gasket. The body includes a first through hole and a groove formed around the outside of the first through hole. The gasket is detachably mounted in the groove. The gasket has a second through hole. When the gasket is mounted in the groove, at least a part of the projection of the second through hole on the body is located within the projection of the first through hole on the body. The present invention can simplify the evaporation process, make it easy to operate, and reduce costs.

Description

Technical Field

[0001] The present invention relates to the technical field of mask evaporation coating, and particularly relates to a mask assembly and a mask plate. Background Art

[0002] In related technologies, a mask plate is usually used to evaporate a coating. To improve the position accuracy of the coating, monitoring openings are usually provided on the mask plate to form corresponding monitoring sites when evaporating the coating, so as to monitor the position of the evaporated coating. However, when evaporating different coatings, the monitoring sites corresponding to these coatings are different. Therefore, multiple mask plates are usually required for evaporation coating, which will lead to a complex evaporation coating process and increase costs. Summary of the Invention

[0003] The present invention provides a mask assembly and a mask plate to at least solve the technical problems in the prior art that different mask plates are required when evaporating different coatings, and the resulting complex evaporation coating process and high costs.

[0004] On the one hand, the present invention provides a mask assembly, including a body and a gasket. The body includes a first through hole and a groove surrounding the outside of the first through hole. The gasket is detachably installed in the groove. The gasket has a second through hole. When the gasket is installed in the groove, at least a part of the projection of the second through hole on the body is located within the projection of the first through hole on the body.

[0005] According to an embodiment of the present invention, the opening size of the first through hole is larger than the opening size of the second through hole.

[0006] According to an embodiment of the present invention, the first through hole is a rectangular hole; and / or, the second through hole is a circular hole.

[0007] According to an embodiment of the present invention, the number of the gaskets is multiple. The multiple gaskets are respectively installed in the groove. At least one of the position, shape, and opening size of the overlapping part of the second through hole of each gasket and the first through hole is different from that of any other gasket.

[0008] According to an embodiment of the present invention, the groove includes a notch and a bottom surface, and the notch is flush with the surface of the body.

[0009] According to an embodiment of the present invention, the bottom surface of the groove has a first magnetic region, and the gasket has a second magnetic region. The first magnetic region and the second magnetic region have matching magnetism to adsorb the gasket in the groove.

[0010] According to an embodiment of the present invention, the body has magnetism so that the bottom surfaces of the grooves are all the first magnetic regions.

[0011] According to an embodiment of the present invention, a magnetic sheet is provided in the second magnetic region.

[0012] According to an embodiment of the present invention, the number of the second magnetic regions is multiple; preferably, the multiple second magnetic regions are evenly distributed on the gasket.

[0013] According to an embodiment of the present invention, the gasket is square, the number of the second magnetic regions is 4, and the 4 second magnetic regions are respectively located at the 4 corner positions of the gasket.

[0014] According to an embodiment of the present invention, the body includes at least one evaporation area and a monitoring area, each evaporation area corresponds to at least one monitoring area, and the first through hole and the groove are provided in the monitoring area.

[0015] On the other hand, the present invention provides a mask plate including the above-mentioned mask assembly.

[0016] In the present invention, the body cooperates with the gasket. The gasket is used to be placed in the groove of the body, and the projection of the second through hole of the gasket on the body is located in the first through hole, so that the overlapping part of the first through hole and the second through hole forms an evaporation opening for the monitoring site. In this way, during evaporation, it is only necessary to match the position of the second through hole of the gasket with the evaporation opening of the monitoring site when evaporating different film layers, without replacing the body, so as to realize sharing one mask plate when evaporating multiple film layers, instead of using multiple different mask plates, making the evaporation process simple, easy to operate, and reducing costs. Description of the Drawings

[0017] Figure 1 It is a schematic structural diagram of a monitoring area of the body according to an embodiment of the present invention;

[0018] Figure 2 It is a schematic cross-sectional diagram of a monitoring area of the body according to an embodiment of the present invention;

[0019] Figure 3 It is a schematic structural diagram of the gasket according to an embodiment of the present invention;

[0020] Figure 4 It is a schematic structural diagram of the mask assembly with the gasket placed in the groove of the monitoring area of the body according to an embodiment of the present invention;

[0021] Figure 5 It is a schematic structural diagram of the body according to an embodiment of the present invention;

[0022] Figure 6 It is a schematic structural diagram of the mask plate according to an embodiment of the present invention.

[0023] Description of the reference numerals:

[0024] 1 - Body;

[0025] 11 - Monitoring area;

[0026] 12 - Evaporation area;

[0027] 110 - First through - hole;

[0028] 111 - Groove;

[0029] 2 - Gasket;

[0030] 20 - Second through - hole;

[0031] 21 - Second magnetic region;

[0032] 101 - Side wall;

[0033] 102 - Bottom wall;

[0034] 1111 - Notch;

[0035] 1112 - Bottom surface;

[0036] 1113 - Side surface;

[0037] H1 - Thickness of the body;

[0038] H2 - Depth of the groove. Detailed implementation manners

[0039] To enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below. The specific implementation manners listed below only describe the principles and features of the present invention. The examples given are only used to explain the present invention and do not limit the scope of the present invention. Based on the embodiments of the present invention, all other implementation manners obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0040] When evaporating OLED pixels, it is necessary to set up a Pixel Position Accuracy (PPA) monitoring element group (Test Element Group, abbreviated as: TEG) to monitor the positions of the pixels to ensure the accuracy of the positions of each pixel. However, the monitoring sites corresponding to different pixels are different when evaporating, and a mask plate with different monitoring openings needs to be used, which will lead to complex processes and increased costs.

[0041] For example, an organic light-emitting diode (OLED) is a device that emits light through current driving. When evaporating OLED pixels, it is necessary to set up a PPA TEG to monitor the positions of the pixels to ensure the accuracy of the positions of each pixel. However, when evaporating different pixels, the corresponding monitoring sites are different, and it is necessary to use mask plates with different monitoring openings (i.e., evaporation openings for forming monitoring sites), resulting in a complex process and increased costs.

[0042] In view of the above problems, an embodiment of the present invention provides a mask assembly. As Figures 1 to 6 shown, the mask assembly includes a body 1 and a gasket 2. The body 1 includes a first through-hole 110 and a groove 111 surrounding the outside of the first through-hole 110. The gasket 2 is detachably installed in the groove 111. The gasket 2 has a second through-hole 20. When the gasket 2 is installed in the groove 111, at least a part of the projection of the second through-hole 20 on the body 1 is located within the projection of the first through-hole 110 on the body 1.

[0043] In this way, the body 1 and the gasket 2 cooperate. The gasket 2 is used to be placed in the groove 111 of the body 1, and at least a part of the projection of the second through-hole 20 of the gasket 2 on the body 1 is located within the projection of the first through-hole 110 on the body 1, that is, the first through-hole 110 and the second through-hole 20 at least partially overlap. Thus, the overlapping part of the first through-hole 110 and the second through-hole 20 (i.e., their overlapping part) forms an evaporation opening for the monitoring site (i.e., the monitoring opening). In this way, when evaporating the OLED film layer, only the position, shape, or size and other characteristics of the second through-hole 20 of the gasket 2 need to be matched with the evaporation openings of the monitoring sites when evaporating different film layers (such as when evaporating different pixels), without replacing the body 1, so as to realize sharing one mask plate when evaporating multiple film layers, instead of using multiple different mask plates, making the evaporation process simple, easy to operate, and reducing costs.

[0044] Specifically, the body 1 can be an integral mesh mask sheet (D-mask), which has at least one (i.e., one or more) evaporation areas 12 and monitoring areas 11. Each evaporation area 12 corresponds to at least one monitoring area 11, that is, one evaporation area 12 can correspond to one monitoring area 11 or multiple monitoring areas 11. When one evaporation area 12 corresponds to multiple monitoring areas 11, the multiple monitoring areas 11 can specifically be located on the same side of the evaporation area 12, and the multiple monitoring areas 11 can be distributed along the width direction of the evaporation area 12, but not limited thereto.

[0045] Exemplarily, as Figure 5 and Figure 6As shown, each evaporation zone 12 corresponds to three monitoring zones 11. The three monitoring zones 11 are located on the same side of the corresponding evaporation zone 12 and are distributed along the width direction of the evaporation zone 12. Two of the monitoring zones 11 are respectively located at the corner positions of the evaporation zone 12, and the other monitoring zone 11 is located between the two monitoring zones 11.

[0046] Exemplarily, as Figure 5 and Figure 6 shown, the body includes a plurality of evaporation zones 12, and these evaporation zones 12 can be arranged in an array, specifically in a multi-row and multi-column arrangement. The multiple rows are distributed along the second direction, and the multiple columns are distributed along the first direction. The first direction is perpendicular to the second direction. Each row includes a plurality of evaporation zones 12 arranged in sequence along the first direction, and each column includes a plurality of evaporation zones 12 arranged in sequence along the second direction.

[0047] Specifically, the width direction of the evaporation zone 12 can be parallel to the first direction, and the length direction of the evaporation zone 12 can be parallel to the second direction.

[0048] Among them, in the evaporation zones 12 of each row, the monitoring zones 11 corresponding to all the evaporation zones 12 can all be located on the same side of this row (such as Figure 5 and Figure 6 the upper side in).

[0049] As Figure 5 and Figure 6 shown, the area of the monitoring zone 11 is smaller than the area of the evaporation zone 12, that is, the area of any monitoring zone 11 is smaller than the area of any evaporation zone 12. When the body includes a plurality of evaporation zones 12, the parameters such as the area and shape of these evaporation zones 12 can be the same or different. When the body includes a plurality of monitoring zones 11, the parameters such as the area and shape of these monitoring zones 11 can be the same or different.

[0050] One evaporation zone 12 is used to evaporate and form an OLED device, that is, the functional film layer of the OLED device is evaporated through this evaporation zone 12, such as evaporating the pixels of the OLED device. When the body includes a plurality of evaporation zones 12, a plurality of OLED devices can be correspondingly evaporated and formed.

[0051] In specific implementation, the number of evaporation zones 12 in the body can be set according to the number requirement of OLED devices, and these parameters of the evaporation zones 12 can be correspondingly set according to the parameters such as the size and shape of each OLED device.

[0052] When evaporating the functional film layer of the OLED device, through a certain evaporation zone 12 (such as Figure 5Taking the functional film layer of the vapor-deposited OLED device (as shown) as an example, the material of the functional film layer is deposited on the preset area of the OLED device through the vapor deposition area 12, thereby forming the functional film layer. At the same time, the film layer (i.e., the monitoring site) identical to the functional film layer is correspondingly formed in the monitoring area 11 corresponding to the vapor deposition area 12 by the material of the functional film layer for film layer monitoring (such as position monitoring of pixels). For example Figure 5 As shown, the number of monitoring areas 11 corresponding to the vapor deposition area 12 is 3, and three monitoring sites are correspondingly formed.

[0053] In the embodiment of the present invention, the first through hole 110 and the groove 111 of the body 1 are both arranged in the monitoring area 11. Each monitoring area 11 in the body includes the first through hole 110 and the groove 111. In this way, during the vapor deposition process, the gasket 2 is placed in the groove 111, and the overlapping part of the first through hole 110 and the second through hole 20 of the gasket 2 serves as the vapor deposition opening, so that the material of the functional film layer is deposited through the vapor deposition opening to form a film layer for film layer monitoring.

[0054] Specifically, after the gasket 2 is installed in the groove 111, the projection of the second through hole 20 of the gasket 2 on the body 1 can be entirely located within the projection of the first through hole 110 on the body 1 (at this time, the second through hole 20 is equivalent to the overlapping part of the first through hole 110 and the second through hole 20); or, the projection of the second through hole 20 of the gasket 2 on the body 1 is partially located within the projection of the first through hole 110 on the body 1 (at this time, the second through hole 20 and the first through hole 110 partially overlap).

[0055] Generally, as Figure 4 shown, the opening size of the first through hole 110 is larger than the opening size of the second through hole 20. After the gasket 2 is placed in the groove 111 of the body 1, the projection of the second through hole 20 on the body 1 can be entirely located within the projection of the first through hole 110 on the body 1. The remaining area of the gasket 2 except the second through hole 20 will cover the non-essential part of the first through hole 110, and the second through hole 20 serves as the vapor deposition opening for monitoring a certain pixel / film layer effectively (that is, the second through hole 20 is the vapor deposition opening formed by the overlapping part of the first through hole 110 and the second through hole 20).

[0056] Specifically, the opening size of the first through hole 110 refers to the size of the cross-section of the first through hole 110 perpendicular to the axial direction of the first through hole 110, which is also the size of the projection of the first through hole 110 on the body 1. The opening size of the second through hole 20 refers to the size of the cross-section of the second through hole 20 perpendicular to the axial direction of the second through hole 20, which is also the size of the projection of the second through hole 20 on the body 1 after the gasket 2 is installed in the groove 111 of the body 1.

[0057] Exemplarily, the dimension is, for example, an area, that is, after the gasket 2 is installed in the groove 111, the area of the projection of the first through hole 110 on the body 1 is larger than the area of the projection of the second through hole 20 of the gasket 2 on the body 1.

[0058] Generally, the number of the above-mentioned gaskets 2 is multiple. When the multiple gaskets 2 are respectively installed in the groove 111, at least one of the position, shape, and opening size of the overlapping part of the second through hole 20 and the first through hole 110 of each gasket 2 is different from that of the overlapping part of the second through hole 20 and the first through hole 110 of any other gasket 2. That is, after these gaskets 2 are respectively placed in the groove 111 of the body 1, the projection of the second through hole 20 of each gasket 2 on the body 1 is different from the projection of the second through hole 20 of any other gasket 2 on the body 1. Specifically, their projection positions, shapes, and sizes (such as area, diameter, etc.) can be different.

[0059] For example, it can be that the position of the overlapping part of the second through hole 20 and the first through hole 110 of each gasket 2 is different from the position of the overlapping part of the second through hole 20 and the first through hole 110 of any other gasket 2 (that is, the positions of the projections of these two overlapping parts on the body 1 are different), or it can be that the shape of the overlapping part of the second through hole 20 and the first through hole 110 of each gasket 2 is different from the shape of the overlapping part of the second through hole and the first through hole 110 of any other gasket 2 (that is, the shapes of the projections of these two overlapping parts on the body 1 are different), or it can be that the opening size of the overlapping part of the second through hole 20 and the first through hole 110 of each gasket 2 is different from the opening size of the overlapping part of the second through hole and the first through hole 110 of any other gasket 2 (that is, the sizes (such as area, diameter, etc.) of the projections of these two overlapping parts on the body 1 are different).

[0060] Thus, the evaporation openings formed after any two gaskets 2 are installed in the groove 111 for evaporation coating to form monitoring sites are different (specifically, at least one of the position, shape, and opening size can be different). The second through hole 20 of one gasket 2 corresponds to a monitoring site of an OLED pixel or other film layers. When evaporating different film layers, the corresponding gasket 2 can be replaced without replacing the entire body, making the evaporation coating process simple, easy to operate, and reducing costs.

[0061] Generally, an OLED device usually has red sub-pixels (R), green sub-pixels (G), and blue sub-pixels (B). When evaporating an OLED device, at least a red sub-pixel layer, a green sub-pixel layer, and a blue sub-pixel layer need to be evaporated. Generally, a green sub-pixel compensation layer and a red sub-pixel compensation layer also need to be evaporated, etc. When evaporating these film layers, the pixel monitoring sites are different, and the evaporation openings corresponding to the monitoring sites of these film layers on the mask plate interfere with each other, and it is impossible to fabricate all the evaporation openings corresponding to the monitoring sites of these film layers on the same mask plate. Therefore, different mask plates are usually required to evaporate these film layers. That is, during the evaporation process, when evaporating different film layers, different mask plates need to be replaced, making the process complex and costly.

[0062] In the embodiment of the present application, there is no need to replace the mask plate, and only the gasket 2 needs to be replaced. For example, when evaporating the film layer B (such as the red sub-pixel layer), the gasket 2 corresponding to the monitoring site of this film layer B is used. That is, after placing this gasket 2 in the groove 111 of the body 1, the evaporation opening formed by the overlapping part of the second through-hole 20 of this gasket 2 and the first through-hole 110 of the body 1 corresponds to the monitoring site of this film layer B. After placing this gasket 2 in the groove 111 of the body 1, the film layer B is evaporated; after the evaporation of the film layer B is completed, when evaporating the next film layer C (such as the green sub-pixel layer), the gasket 2 in the groove 111 is taken out and replaced with the gasket 2 corresponding to the monitoring site of the film layer C. After placing the gasket 2 corresponding to the monitoring site of the film layer C in the groove 111, the film layer C is evaporated.

[0063] Specifically, as Figure 2 shown, the first through-hole 110 penetrates the body 1 along the thickness direction of the body 1, and it can be formed by full etching of the body 1 through an etching process.

[0064] The first through-hole 110 can be polygonal, specifically it can be square (quadrilateral), for example, it can be a square or a rectangle (rectangle), but it is not limited thereto. The first through-hole 110 can also be other regular or irregular shapes. Relatively speaking, the first through-hole 110 is a rectangular hole (as Figure 1 and Figure 4 shown), which is more convenient for the body 1 to be adapted to the gasket 2 and is also convenient for the formation of the first through-hole 110.

[0065] Among them, the shape of the first through-hole 110 as described above specifically refers to the shape of the cross-section perpendicular to its axis of the first through-hole 110 (which is also the shape of the projection of the first through-hole 110 on the body 1). For example, the first through-hole 110 being polygonal means that the cross-section perpendicular to its axis of the first through-hole 110 is polygonal (which is also the projection of the first through-hole 110 on the body 1 being polygonal).

[0066] In addition, the second through-hole 20 penetrates the gasket 2 along the thickness direction of the gasket 2, asFigure 3 and Figure 4 As shown in Figure 4 , the second through-hole 20 may be circular, but is not limited thereto, and may also be designed into other regular or irregular shapes according to needs.

[0067] Among them, the shape of the second through-hole 20 specifically refers to the shape of the cross-section perpendicular to its axial direction of the second through-hole 20, and the axial direction of the second through-hole 20 is parallel to the thickness direction of the gasket 2.

[0068] Such as Figure 2 shown, the axial direction of the first through-hole 110, the thickness direction of the body 1, and the depth direction of the groove 111 are all parallel to the third direction. After the gasket 2 is placed in the groove 111, the thickness direction of the gasket 2 and the axial direction of the first through-hole 110 are also parallel to the third direction.

[0069] In addition, as Figure 2 shown, the groove 111 includes a notch 1111 and a bottom surface 1112, and the notch 1111 is flush with the surface of the body 1. The notch 1111 is the opening of the groove 111. In the depth direction of the groove 111, the notch 1111 and the bottom surface 1112 of the groove are located on opposite sides of the groove 111 respectively, and the groove 111 has a bottom surface 1112, that is, the groove 111 does not penetrate the body 1 along the thickness direction of the body 1.

[0070] The groove 111 also has a side surface 1113, and the side surface 1113 is connected to the bottom surface 1113 to enclose the groove 111. The side surface 1113 and the bottom surface 1112 of the groove 111 are both formed by the body 1. Specifically, the body 1 includes a bottom wall 102 and a side wall 101 that enclose the groove 111. The bottom wall 102 is the part of the body 1 located at the bottom surface 1112 of the groove 111 (that is, the part of the body 1 that constitutes the bottom surface 1112 of the groove 111), and the surface of the bottom wall 102 facing the groove 111 is the bottom surface 1112 of the groove 111. The side wall 101 is the part of the body 1 located at the side surface 1113 of the groove 111 (that is, the part of the body 1 that constitutes the side surface 1113 of the groove 111), and the surface of the side wall 101 facing the groove 111 is the side surface 1113 of the groove 111.

[0071] Specifically, in the thickness direction of the body 1, the body 1 has opposite first and second sides. The groove 111 extends from the first side of the body 1 to the second side of the body 1, but does not penetrate the body 1. The part of the body 1 not penetrated by the groove 111 is the above-mentioned bottom wall 102. The notch 1111 is flush with the surface of the first side of the body 1 (the surface of the first side of the side wall 101). The depth H2 of the groove 111 is equal to the distance between the notch 1111 and the bottom surface 1112 in the third direction. The groove 111 may specifically be formed by semi-etching the body 1 through an etching process, and the depth H2 of the groove 111 may be about 1 / 2 of the thickness H1 of the body 1.

[0072] Specifically, after the gasket 2 is placed in the groove 111, the gasket 2 can be engaged in the groove 111, that is, the circumferential side of the gasket 2 contacts the side surface 1113 (side wall 101) of the groove 111, and specifically, it can be in abutment. Or, the space in the groove 111 is larger than the space occupied by the gasket 2, that is, the projection of the groove 111 on the body 1 is larger than the projection of the gasket 2 on the body 1, so that there is a gap between the gasket 2 and at least one side surface 1113 of the groove 111. In this way, the position of the gasket 2 in the groove 111 can be adjusted, and thus the overlapping part of the second through hole 20 and the first through hole 110 can be adjusted according to the requirements when evaporating different pixels.

[0073] In some embodiments, the bottom surface 1112 of the groove 111 has a first magnetic region, and the gasket 2 has a second magnetic region 21 corresponding to the first magnetic region. The first magnetic region and the second magnetic region 21 have matching magnetism, so that the gasket 2 is adsorbed in the groove 111. In this way, it is convenient to place the gasket 2 in the groove 111 and improve the stability of the gasket 2 in the groove 111.

[0074] Among them, in the bottom surface 1112 of the groove 111, part of the region can be the first magnetic region, or all of it can be the first magnetic region.

[0075] In some specific embodiments, the body 1 can have magnetism. Thus, the part of the body 1 located at the bottom surface of the groove 111 (i.e., the bottom wall 102 mentioned above) also has magnetism, so that the entire bottom surface 1112 of the groove 111 is the first magnetic region.

[0076] In addition, magnetic sheets can be provided in the second magnetic region 21 so that the second magnetic region 21 and the first magnetic region have matching magnetism.

[0077] In addition, the number of the second magnetic regions 21 can be one or more. When the number of the second magnetic regions 21 is multiple, the multiple magnetic regions can be evenly distributed on the gasket 2. For example, when the gasket 2 is polygonal, the multiple magnetic regions are distributed at the corner positions of the gasket 2.

[0078] Exemplarily, as Figure 3 and Figure 4 shown, the gasket 2 is square, and the number of the second magnetic regions 21 is 4. The 4 second magnetic regions 21 are located at the 4 corner positions of the gasket 2 in a one-to-one correspondence.

[0079] As Figure 6As shown in the figure, the mask provided by the embodiment of the present invention includes the above-mentioned mask assembly and a frame 3. Among them, the body 1 is installed on the frame 3. As described above, the gasket 2 is detachably installed in the groove 111 of the body 1. When evaporating the OLED film layer, only by matching the evaporation openings of the monitoring sites when evaporating different film layers (such as evaporating different pixels) through the position, shape or size and other characteristics of the second through hole 20 of the gasket 2, it is not necessary to replace the entire mask, so that a single mask can be shared when evaporating multiple film layers, instead of using multiple different masks, making the evaporation process simple, easy to operate and reducing costs.

[0080] Specifically, the above-mentioned mask may include one or more bodies 1, that is, the number of bodies 1 installed on the frame 3 may be one or more, which can be set according to needs and is not particularly limited in this regard.

[0081] In the description of the present invention, unless otherwise clearly specified and defined, the terms "set", "installed", "connected", "connected together" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication connection (network connection); it can be a direct connection, or an indirect connection through an intermediate medium, or the internal communication of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0082] In addition, terms such as "first", "second" are only used for descriptive purposes, for example, to distinguish each component to more clearly illustrate / explain the technical solution, and cannot be understood as indicating or implying the quantity of the indicated technical features or the order with substantial significance, etc.

[0083] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A mask assembly, characterized in that, It includes a main body and a gasket. The main body includes a first through hole and a groove surrounding the outside of the first through hole. The gasket is detachably installed in the groove. The gasket has a second through hole. When the gasket is installed in the groove, the projection of the second through hole on the main body is at least partially located within the projection of the first through hole on the main body. The main body includes at least one evaporation area and a monitoring area. Each evaporation area corresponds to at least one monitoring area. The first through hole and the groove are provided in the monitoring area. The number of the gaskets is multiple. The multiple gaskets are respectively installed in the groove. For each gasket, at least one of the position, shape, and opening size of the overlapping part of the second through hole and the first through hole is different from that of any other gasket.

2. The mask assembly according to claim 1, characterized in that, The opening size of the first through hole is larger than that of the second through hole.

3. The mask assembly according to claim 1, characterized in that, The first through hole is a rectangular hole; and / or, the second through hole is a circular hole.

4. The mask assembly according to claim 1, wherein, The groove includes a notch and a bottom surface. The notch is flush with the surface of the main body.

5. The mask assembly according to claim 4, wherein The bottom surface of the groove has a first magnetic area. The gasket has a second magnetic area. The first magnetic area and the second magnetic area have compatible magnetism so that the gasket is adsorbed in the groove.

6. The mask assembly according to claim 5, wherein The main body has magnetism so that the bottom surface of the groove is the first magnetic area.

7. The mask assembly according to claim 6, wherein, Magnetic sheets are provided in the second magnetic area.

8. The mask assembly according to claim 6, wherein, The number of the second magnetic areas is multiple.

9. The mask assembly according to claim 8, wherein, The multiple second magnetic areas are evenly distributed on the gasket.

10. The mask assembly according to claim 9, wherein, The gasket is square. The number of the second magnetic areas is 4. The 4 second magnetic areas are respectively located at the 4 corner positions of the gasket.

11. A mask plate, characterized in that, It includes the mask assembly according to any one of claims 1-10.

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