Gas capture device

Abstract

The application provides a gas capturing device, comprising a first bottle, a connecting pipeline and a gas diluter, the first bottle has a first container, a first gas inlet and a first gas outlet, one end of the connecting pipeline is communicated with the first gas outlet, and the gas diluter is arranged in the first gas inlet. The gas diluter comprises a sample gas conveying pipeline and a protective gas conveying pipeline, the end of the protective gas conveying pipeline is located in the first container, and the end of the sample gas conveying pipeline is located in the protective gas conveying pipeline, so that the sample gas conveyed by the sample gas conveying pipeline is covered and diluted by the protective gas conveyed by the protective gas conveying pipeline. The gas capturing device provided by the application is safe, efficient and accurate.

Description

Technical Field

[0001] This invention relates to a gas capture device, and more particularly to a safe, efficient and accurate gas capture device. Background Technology

[0002] Industrial gases, whether before or after a reaction, require compositional analysis, particularly to determine if they contain heavy metals or insoluble nanoparticles that could pollute the environment. Therefore, a sample of the gas is taken to capture these heavy metals or nanoparticles, and then the composition of the captured substances is determined using instruments such as inductively coupled plasma mass spectrometry (ICP-MS).

[0003] However, the sample gas may contain unknown components that could react violently with the trapping solution (e.g., hydrofluoric acid solution), making the assay unsafe. If, for safety reasons, the sample gas and trapping solution are mixed under reduced pressure, the mixing may be insufficient, allowing the trapped components to escape before reacting with the solution, leading to inaccurate analysis. Summary of the Invention

[0004] The purpose of this invention is to solve various problems of existing gas capture devices and to propose a safe, efficient and accurate gas capture device.

[0005] To achieve the above and other objectives, the present invention provides a gas capture device, comprising: a first bottle having a first chamber and a first inlet and a first outlet communicating with the first chamber; a connecting pipe having one end connected to the first outlet; and a gas diluter disposed at the first inlet, the gas diluter comprising a sample gas delivery pipe and a protective gas delivery pipe, the end of the protective gas delivery pipe being located in the first chamber, and the end of the sample gas delivery pipe being located in the protective gas delivery pipe, such that the sample gas delivered by the sample gas delivery pipe is coated and diluted by the protective gas delivered by the protective gas delivery pipe.

[0006] Optionally, the distance from the end of the protective gas delivery pipeline to the bottom of the first bottle is less than the distance from the end of the sample gas delivery pipeline to the bottom of the first bottle.

[0007] Optionally, it also includes a second bottle connected to the other end of the connecting pipe, wherein the volume of the first bottle is smaller than the volume of the second bottle.

[0008] Optionally, the diameter of the first air outlet is smaller than the diameter of the first air inlet.

[0009] Optionally, the sample gas delivery pipeline is fitted inside the protective gas delivery pipeline.

[0010] Optionally, it also includes a separation membrane component disposed in the first chamber. The separation membrane component includes a semi-permeable membrane layer and a nitric acid solution layer, with the nitric acid solution layer covering the semi-permeable membrane layer. The separation membrane component only allows gas to pass through.

[0011] Optionally, the isolation membrane component includes two semi-permeable membrane layers and a nitric acid solution layer, wherein the nitric acid solution layer is disposed between the two semi-permeable membrane layers.

[0012] Optionally, the isolation membrane component further includes at least one fixing part connected to the inner wall of the first bottle, the at least one fixing part having a perforation through which the protective gas delivery pipeline passes.

[0013] Optionally, it also includes a thermostatic component that surrounds the outside of the protective gas delivery pipeline and keeps the protective gas delivery pipeline at a constant temperature.

[0014] Optionally, the thermostatic component is a ring-shaped electric heating element.

[0015] Therefore, the gas capture device of the present invention utilizes a protective gas to first coat and dilute the sample gas before delivering it to the capture solution for reaction, thereby causing the heavy metals or insoluble nanoparticles to be captured to remain in the capture solution. The gas capture device of the present invention is safer than the prior art, and the bottle is airtight and under high pressure, ensuring both safety and efficiency and accuracy.

[0016] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the invention. However, these descriptions and drawings are only for illustrating the present invention and are not intended to limit the scope of the invention in any way. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a gas capture device according to an embodiment of the present invention;

[0018] Figure 2A This is a three-dimensional schematic diagram of the isolation membrane component according to an embodiment of the present invention;

[0019] Figure 2B This is a schematic diagram of the assembly of the isolation membrane component according to an embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of a gas diluent according to another embodiment of the present invention.

[0021] [Attached image labels]

[0022] 100 Gas Capture Device

[0023] 1. First bottle body

[0024] 11 First Refrigeration Chamber

[0025] 12 First air intake

[0026] 13 First air outlet

[0027] 2. Second bottle body

[0028] 21 Second Container

[0029] 22 Second air intake

[0030] 23 Second air outlet

[0031] 3. Connecting pipes

[0032] 4. Gas diluter

[0033] 41 Protective gas delivery pipeline

[0034] 411 Protect the end of the gas delivery pipeline

[0035] 411a Protective gas delivery pipeline end

[0036] 41a Protective gas delivery pipeline

[0037] 42 Sample gas delivery pipeline

[0038] 421 End of sample gas delivery pipeline

[0039] 421a Gas equalization chamber

[0040] 42a Sample gas delivery pipeline

[0041] 4a Gas diluter

[0042] 5. Separation membrane components

[0043] 51 Semi-permeable membrane layer

[0044] 52 Nitric acid solution layer

[0045] 53 Semi-permeable membrane layer

[0046] 54 Fixing part

[0047] 541 Perforation

[0048] 61 outer tube

[0049] 62. Thermostatic components

[0050] 63 Insulation Pipe

[0051] 7 Sampling components

[0052] 71 Control Unit

[0053] 72 Control valve

[0054] 721 Upstream control valve

[0055] 722 Downstream control valve

[0056] 73 U-shaped tube

[0057] 74 weighing units

[0058] 75 Temperature Control Unit

[0059] 76 Liquid Level Detection Units

[0060] 8. Gas-equalizing components

[0061] a distance

[0062] b Distance Detailed Implementation

[0063] To fully understand the present invention, the following specific embodiments, in conjunction with the accompanying drawings, will provide a detailed description. Those skilled in the art can understand the purpose, features, and effects of the present invention from the content disclosed in this specification. It should be noted that the present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the inventive point of the present invention. Furthermore, the accompanying drawings are for simple illustrative purposes only and are not depictions based on actual dimensions. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the claims of the present invention. The following explanation is provided:

[0064] like Figure 1 As shown, the gas capture device 100 of this embodiment includes: a first bottle 1, a connecting pipe 3, and a gas diluter 4.

[0065] The first bottle body 1 has a first chamber 11 and a first air inlet 12 and a first air outlet 13 communicating with the first chamber 11. The first bottle body 1 is preferably an airtight bottle, such as the combination of a self-pressure sealing cap and a bottle body as described in patent number TWI586588. Such an airtight bottle can prevent unintended gas leakage and has a lightweight structure that is easy to assemble.

[0066] The gas trapping device 100 may also optionally include a second bottle 2. Similarly, the second bottle 2 has a second chamber 21 and a second inlet 22 and a second outlet 23 communicating with the second chamber 21. The second bottle 2 is also preferably an airtight bottle, such as the combination of a self-pressure sealing cap and a bottle body as described in patent number TWI586588. Such an airtight bottle can prevent unintended gas leakage and is lightweight and easy to assemble. In this embodiment, the second bottle 2 is used to contain gas from the first bottle 1; therefore, in other embodiments, the second bottle 2 is not necessary, and the second outlet 23 is also not necessary. In other embodiments, the second bottle 2 may not have a second outlet 23, but only a second inlet 22.

[0067] One end of the connecting pipe 3 is connected to the first air outlet 13, and the other end is connected to the second air inlet 22 of the second bottle body 2, so that gas enters the second chamber 21 from the first air outlet 13.

[0068] A gas diluter 4 is disposed at the first gas inlet 12. The gas diluter 4 includes a sample gas delivery pipeline 42 and a protective gas delivery pipeline 41. The end 411 of the protective gas delivery pipeline 41 is located in the first chamber 11, and the end 421 of the sample gas delivery pipeline 42 is located in the protective gas delivery pipeline 41, so that the sample gas delivered by the sample gas delivery pipeline 42 is covered and diluted by the protective gas delivered by the protective gas delivery pipeline 41.

[0069] In this embodiment, the protective gas transported by the protective gas transport pipeline 41 is argon. However, the present invention is not limited to this. The protective gas can be other inert gases or gases with low chemical reactivity such as nitrogen, or a combination of the above gases.

[0070] The following describes how the gas capture device 100 of the present invention performs gas capture.

[0071] The first chamber 11 of the first bottle 1 contains a capture solution, which in this embodiment is a hydrofluoric acid solution. In reality, the composition of the capture solution can be changed depending on the capture requirements.

[0072] The sample gas to be captured (mainly silane samples, which are special gases used in the semiconductor industry containing heavy metals, but not limited to these) is transported by the sample gas delivery line 42, while the protective gas delivery line 41 also delivers protective gas.

[0073] like Figure 1As shown, the end 421 of the sample gas delivery pipeline 42 is located in the protective gas delivery pipeline 41. The end 411 of the protective gas delivery pipeline 41 is located in the first chamber 11 and below the level of the capturing solution. Therefore, after the sample gas leaves the end 421 of the sample gas delivery pipeline 42, it is first covered and diluted by the protective gas before entering the hydrofluoric acid solution and reacting to form a reaction mixture. Only the components in the sample gas that cannot react with the hydrofluoric acid solution leave the liquid surface, are discharged from the first outlet 13, and enter the second chamber 21 of the second bottle 2.

[0074] The resulting reaction mixture is a high-matrix solution, which can be further evaporated under reduced pressure under controlled temperature and pressure conditions until it is nearly dry. The remaining substance can be analyzed for its composition using ICP-MS.

[0075] In summary, the gas capture device 100 of the present invention utilizes a protective gas to first coat and dilute the sample gas before delivering it to the capture solution for reaction, thereby retaining the heavy metals or insoluble nanoparticles to be captured in the capture solution. The gas capture device 100 of the present invention is safer than existing technologies, and the internal structure of the device is airtight and under high pressure, ensuring both safety and efficiency and accuracy.

[0076] Furthermore, in embodiments of the present invention, such as Figure 1 As shown, the sample gas delivery line 42 is fitted inside the protective gas delivery line 41. The distance from the end 411 of the protective gas delivery line 41 to the bottom of the first bottle 1 is 'a', and the distance from the end 421 of the sample gas delivery line 42 to the bottom of the first bottle 1 is 'b', where 'a' is greater than zero and 'b' is greater than 'a'. This ensures that the sample gas is enveloped by the protective gas when leaving the sample gas delivery line 42, and the sample gas is always enveloped and diluted by the protective gas before contacting the capture solution. In this embodiment of the invention, 'a' is 1.5 cm and 'b' is 4 cm; however, the invention is not limited to these values ​​and can be adjusted accordingly based on the size and configuration of the components.

[0077] Furthermore, in this embodiment of the invention, the connecting pipe 3, the sample gas delivery pipe 42 and the protective gas delivery pipe 41 are preferably rigid pipes made of Teflon. Each pipe is a double-layered pipe, which has the characteristics of low chemical resistance and high mechanical strength, and can prevent gas leakage.

[0078] Furthermore, in this embodiment of the invention, the volume of the first bottle 1 is smaller than the volume of the second bottle 2, preferably the volume of the second bottle 2 is more than twice that of the first bottle 1, so that when the pressure of the first bottle 1 increases, the second bottle 2 can still maintain a normal pressure, allowing the gas to flow naturally from the first bottle 1 to the second bottle 2.

[0079] Furthermore, in this embodiment of the invention, the diameter of the first outlet 13 is smaller than the diameter of the first inlet 12. This is to increase the pressure in the first chamber 11, making it easier for gas to enter but relatively difficult for it to leave. Multiple collisions between the gas and liquid are required for the gas to escape from the first outlet 13, thereby improving the reaction efficiency between the sample gas and the capturing solution. The tube inserted into the first inlet 12 ( Figure 1 If the diameter of the gas diluter 4) is, for example, 1 / 8", then the diameter of the pipe inserted into the first outlet 13 is, for example, 1 / 16".

[0080] like Figures 1 to 2B As shown, the present invention also proposes a separating membrane component 5 disposed in the first chamber 11. The separating membrane component 5 includes at least one semi-permeable membrane layer 51 and a nitric acid solution layer 52, the nitric acid solution layer 52 covering the semi-permeable membrane layer 51. The semi-permeable membrane layer 51 only allows gas to pass through, while metals and large aerosol particles do not escape. The nitric acid solution layer 52 can further capture volatile elements, such as mercury, lead, and boron. The semi-permeable membrane layer 51 is preferably a polyfluoroalkoxy (PFA) semi-permeable membrane, however, the present invention is not limited to this, and other types of semi-permeable membranes may also be used. The nitric acid solution layer 52 is a solution containing nitric acid, or other types of solutions may be added to form a nitric acid-based mixture, such as aqua regia.

[0081] The isolation membrane component 5 proposed in this invention is not limited to the gas capture device 100, but can also be applied to other devices that need to prevent gas escape. In other words, the isolation membrane component 5 can be used independently as a standalone unit.

[0082] Furthermore, in this embodiment of the invention, the isolation membrane component 5 may further include two semi-permeable membrane layers 51 and 53 and a nitric acid solution layer 52. The nitric acid solution layer 52 is disposed between the two semi-permeable membrane layers 51 and 53 and is covered by the semi-permeable membrane layers on both sides. The structure of the two semi-permeable membrane layers 51 and 53 and the nitric acid solution layer 52 can better prevent the escape of metal and large aerosol particles, making it more difficult for gas to pass through, thereby increasing the pressure in the first chamber 11 and promoting the rate of the capture reaction. The nitric acid solution layer 52 being sandwiched between the two semi-permeable membrane layers 51 and 53 can also improve operational safety.

[0083] Furthermore, in embodiments of the present invention, such as Figure 2A and Figure 2B As shown, the isolation membrane component 5 also includes at least one fixing part 54, which is connected to the inner wall of the first bottle 1. The number of fixing parts 54 can be at least one (surrounding the semi-permeable membrane layer 51) or two (disposed on both sides of the semi-permeable membrane layer 51), or more. The number and shape of the fixing parts 54 can be adjusted according to the first bottle 1.

[0084] The fixing part 54 also has a perforation 541, which protects the gas delivery pipeline 41 as it extends through the perforation 541 to the bottom of the liquid surface.

[0085] like Figure 3 As shown, the present invention also proposes another gas diluter 4a, whose shape differs from... Figure 1 The gas diluter 4 shown can be directly replaced. Figure 1 Gas diluter 4.

[0086] The gas diluter 4a includes a protective gas delivery line 41a, a sample gas delivery line 42a, and a gas equalization component 8.

[0087] One section of the sample gas delivery pipeline 42a is a gas equalization chamber 421a, and the downstream of the gas equalization chamber 421a is connected to a gas trapping bottle (i.e. Figure 1 The first air inlet 12 of the first bottle body 1). Sample gas delivery pipeline.

[0088] The protective gas delivery pipeline 41a is a pipeline that delivers protective gas in one direction (as shown by the arrow in the figure). The end 411a of the protective gas delivery pipeline 41a is connected to the gas equalization chamber 421a. That is to say, the sample gas delivered by the sample gas delivery pipeline 42a is mixed with the protective gas delivered by the protective gas delivery pipeline 41a in the gas equalization chamber 421a.

[0089] The gas equalization component 8 is disposed in the gas equalization chamber 421a. The gas equalization component 8 can be a fan with blades, which can be powered to actively rotate and accelerate the mixing of sample gas and protective gas, or it can be a non-powered type that uses the protective gas delivery pipeline 41a to stably deliver protective gas as power to rotate. However, the present invention is not limited to this, and the gas equalization component 8 can be other components suitable for helping to mix sample gas and protective gas.

[0090] The gas diluter 4a of this invention uses a fully mixed protective gas to first coat and dilute the sample gas before it is delivered to the capture solution for reaction, thus retaining the heavy metals or insoluble nanoparticles to be captured in the capture solution. Compared with the prior art, the gas diluter 4a of this invention is safer, ensuring both safety and efficiency and accuracy.

[0091] Furthermore, in this embodiment of the invention, the cross-sectional area of ​​the gas equalization chamber 421a is larger than that of other sections of the sample gas delivery pipeline 42a, so that the gas equalization chamber 421a has sufficient space and time to allow the sample gas and the protective gas to mix and dilute.

[0092] Furthermore, in this embodiment of the invention, the cross-sectional area of ​​the protective gas delivery pipeline 41a is larger than the cross-sectional area of ​​the section of the sample gas delivery pipeline 42a before it enters the uniform gas chamber 421a. This allows the sample gas to enter the uniform gas chamber 421a at high pressure and in small quantities, ensuring that it is effectively mixed and coated by the protective gas. The smaller cross-sectional area also facilitates precise control of the total amount of sample gas entering the uniform gas chamber 421a.

[0093] Furthermore, in this embodiment of the invention, the gas diluter 4a further includes an outer tube 61 and a temperature-regulating component 62. The outer tube 61 covers the gas equalization chamber 421a, and the temperature-regulating component 62 is located between the outer tube 61 and the gas equalization chamber 421a. The temperature-regulating component 62 is used to heat the gas equalization chamber 421a to increase the movement rate of gas molecules and the diffusion efficiency. In this embodiment, as... Figure 3 As shown, the thermostatic component 62 is a ring-shaped electric heating element. However, the present invention is not limited to this. In other embodiments, the thermostatic component 62 is a hydrothermal layer filled between the outer tube 61 and the gas equalization chamber 421a. The hydrothermal layer (e.g., hot water) is heated and flows into the outer tube 61 to maintain a constant temperature in the gas equalization chamber 421a.

[0094] Furthermore, in this embodiment of the invention, the gas diluter 4a further includes an insulation tube 63, which covers the outer tube 61. The protective gas delivery line 41a and the sample gas delivery line 42a are preferably rigid tubes made of Teflon, each being a double-layered tube, possessing both low chemical resistance and high mechanical strength, and preventing gas leakage. The outer tube 61 is also a Teflon tube, while the insulation tube 63 is a polypropylene tube for thermal insulation. However, the invention is not limited to this; in other embodiments, the insulation tube 63 may be made of other insulating materials.

[0095] Furthermore, in this embodiment of the invention, the gas diluter 4a further includes a sampling component 7. The sampling component 7 includes a control unit 71, a pair of control valves 72, and a U-shaped tube 73 communicating with the sample gas delivery pipeline 42a.

[0096] The control valve 72 includes an upstream control valve 721 and a downstream control valve 722, which are respectively located at the upstream and downstream ends of the U-shaped tube 73. The upstream end of the U-shaped tube 73 is connected to the sample gas source, and the downstream end of the U-shaped tube 73 is connected to the sample gas delivery pipeline 42a. The upstream control valve 721 and the downstream control valve 722 are used to control the input of the sample gas.

[0097] The control unit 71 is connected to the upstream control valve 721 and the downstream control valve 722 via signals. The control unit 71 can control the opening and closing of the upstream control valve 721 and the downstream control valve 722, thereby determining whether to deliver sample gas to the gas homogenizing chamber 421a and how much to deliver. The control unit 71 is, for example, a control chip or a control circuit.

[0098] Furthermore, in this embodiment of the invention, the sampling component 7 further includes a liquid level detection unit 76 and a temperature control unit 75. The liquid level detection unit 76 and the temperature control unit 75 are respectively signal-connected to the control unit 71, and the bottom of the U-shaped tube 73 is disposed in the temperature control unit 75. The temperature control unit 75 provides a cold bath, using dry ice or other cold liquid to cool the bottom of the U-shaped tube 73. The control unit 71 controls the upstream control valve 721 to open, allowing the sample gas to be input into the U-shaped tube 73, where the sample gas is condensed into liquid at the bottom of the U-shaped tube 73. The liquid level detection unit 76 detects the height of the liquid sample gas in the U-shaped tube 73, and after reaching a default height, the control unit 71 controls the upstream control valve 721 to close, and then controls the downstream control valve 722 to open, and the temperature control unit 75 to heat up so that all the liquid sample gas evaporates back into a gaseous state and is delivered to the sample gas delivery pipeline 42a and the gas equalization chamber 421a. This allows for precise control of the total amount of sample gas entering the sample gas delivery pipeline 42a. The liquid level detection unit 76 can be, for example, a detection unit that uses optical principles to detect changes in optical refraction / reflection at the default height; or it can be a detection unit that uses buoyancy principles to trigger / be triggered when the liquid level rises to the default height. The present invention is not limited to these, and any liquid level detection unit 76 using general technical means can be applied to the gas diluter 4a of the present invention.

[0099] Furthermore, in another embodiment of the present invention, the sampling component 7 further includes a weighing unit 74. The weighing unit 74 is signal-connected to the control unit 71. The difference from the previous embodiment is that the total amount of sample gas is not calculated based on the liquid level height of the U-shaped tube 73, but rather the output amount of sample gas is accurately calculated based on the weight change.

[0100] In detail, the temperature control unit 75 provides a cold bath, using dry ice or other cold liquid to cool the bottom of the U-tube 73. The control unit 71 controls the upstream control valve 721 to open, allowing the sample gas to be input into the U-tube 73, where it is condensed at the bottom. Then, the control unit 71 controls the upstream control valve 721 to close and the downstream control valve 722 to open, causing the temperature control unit 75 to heat up and evaporate the sample gas, which then enters the sample gas delivery line 42a and the homogenizing chamber 421a.

[0101] The weighing unit 74 is preferably located at the bottom of the U-tube 73 and is used to measure the weight change of the U-tube 73. Therefore, the control unit 71 can accurately calculate how much sample gas enters the U-tube 73 and condenses, and how much sample gas leaves the U-tube 73 through the weighing unit 74, thereby accurately controlling the weight of the sample gas input to the gas equalization chamber 421a.

[0102] The present invention has been disclosed above with reference to preferred embodiments. However, those skilled in the art should understand that the embodiments are merely illustrative of the invention and should not be construed as limiting its scope. It should be noted that all variations and substitutions equivalent to the described embodiments should be included within the scope of the present invention. Therefore, the scope of protection of the present invention is determined by the claims.

Claims

1. A gas capture device, characterized in that, The gas capture device includes: The first bottle body has a first chamber and a first air inlet and a first air outlet communicating with the first chamber. The diameter of the first air outlet is smaller than the diameter of the first air inlet. The first bottle body is airtight and under high pressure. The capturing solution is contained in the first chamber of the first bottle. Connecting pipe, one end of which is connected to the first air outlet; and A gas diluter is disposed at the first gas inlet. The gas diluter includes a sample gas delivery pipeline and a protective gas delivery pipeline. The end of the protective gas delivery pipeline is located in the first chamber and below the level of the capture solution. The end of the sample gas delivery pipeline is located in the protective gas delivery pipeline, so that the sample gas delivered by the sample gas delivery pipeline is covered and diluted by the protective gas delivered by the protective gas delivery pipeline.

2. The gas capture device according to claim 1, characterized in that, The distance from the end of the protective gas delivery pipeline to the bottom of the first bottle is less than the distance from the end of the sample gas delivery pipeline to the bottom of the first bottle.

3. The gas capture device according to claim 1, characterized in that, It also includes a second bottle connected to the other end of the connecting pipe, wherein the volume of the first bottle is smaller than the volume of the second bottle.

4. The gas capture device according to claim 1, characterized in that, The sample gas delivery pipeline is fitted inside the protective gas delivery pipeline.

5. The gas capture device according to claim 1, characterized in that, It also includes a separation membrane component disposed in the first chamber. The separation membrane component includes a semi-permeable membrane layer and a nitric acid solution layer, with the nitric acid solution layer covering the semi-permeable membrane layer. The separation membrane component only allows gas to pass through.

6. The gas capture device according to claim 5, characterized in that, The isolation membrane component includes two semi-permeable membrane layers and a nitric acid solution layer, wherein the nitric acid solution layer is disposed between the two semi-permeable membrane layers.

7. The gas capture device according to claim 5, characterized in that, The isolation membrane component further includes at least one fixing part, which is connected to the inner wall of the first bottle body. The at least one fixing part has a perforation, and the protective gas delivery pipeline passes through the at least one perforation.

8. The gas capture device according to claim 1, characterized in that, It also includes a temperature-regulating component that surrounds the outside of the protective gas delivery pipeline and keeps the protective gas delivery pipeline at a constant temperature.

9. The gas capture device according to claim 8, characterized in that, The constant temperature component is a ring-shaped electric heating element.

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