Guide mechanism and movable platform

Abstract

The present application relates to the field of semiconductor equipment, and in particular to a guide mechanism and a movable platform. The guide mechanism is arranged at the top or bottom of a workpiece table, and is used to move the workpiece table out of a predetermined space or move the workpiece table into a predetermined space. The guide mechanism includes a plurality of slides and a first slide rail and a second slide rail connected to each other. The first slide rail and the second slide rail are arranged crosswise. Each slide can connect the workpiece table and the first slide rail or the second slide rail. When the workpiece table moves out of the predetermined space, at least some of the slides in the plurality of slides can slide from the first slide rail to the second slide rail. When the workpiece table moves into the predetermined space, at least some of the slides in the plurality of slides can slide from the second slide rail to the first slide rail. According to the guide mechanism and movable platform of the present application, the existing scheme for moving the workpiece table in and out is solved, which is not only complex in structure and difficult in design, but also has high equipment cost.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment, and in particular to a guiding mechanism and a movable platform. Background Art

[0002] In highly integrated semiconductor devices, the worktable is located in a small space during operation. To maintain and repair the worktable, it is necessary to move it to an open space for further maintenance operations. After the maintenance is completed, the worktable needs to be moved back to the working position in the small space.

[0003] However, the existing solutions for moving the worktable in and out are not only complicated, but also difficult to design. Specifically, the existing solutions generally use a motor or a rocking cylinder and a connecting rod to move the worktable in or out. However, to achieve the above purpose, many precision mechanisms are required. For example, a high-precision rotating motor or rocking cylinder is required, and the angular accuracy of the precision mechanism and the rotation accuracy of the connecting rod are very high. Therefore, the existing solutions are not only complex in structure and difficult to design, but also have high equipment costs. Summary of the Invention

[0004] The purpose of this application is to provide a guiding mechanism and a movable platform, thereby solving the problem that the existing solution for moving the workpiece table in and out is not only complex in structure and difficult in design, but also has high equipment costs.

[0005] According to the first aspect of the present application, a guiding mechanism is provided, which is arranged at the top or bottom of a workpiece table and is used to move the workpiece table out of a predetermined space or move the workpiece table into a predetermined space. The guiding mechanism includes a plurality of sliding members and a first slide rail and a second slide rail connected to each other. The first slide rail and the second slide rail are arranged crosswise. Each of the sliding members can connect the workpiece table and the first slide rail or the second slide rail. When the workpiece table moves out of the predetermined space, at least some of the plurality of sliding members can slide from the first slide rail to the second slide rail. When the workpiece table moves into the predetermined space, at least some of the plurality of sliding members can slide from the second slide rail to the first slide rail.

[0006] In any of the above technical solutions, further, the angle between the first slide rail and the second slide rail is an obtuse angle.

[0007] In any of the above technical solutions, further, the first slide rail and the second slide rail are connected end to end, and the multiple sliding members include a first slide member, a second slide member and a third slide member. One side of the workpiece table is connected to the first slide member, and the side adjacent to the one side of the workpiece table is sequentially connected to the second slide member and the third slide member. When the workpiece table is in the moved-in state, the first slide member and the second slide member are both connected to the first slide rail, and the third slide member is in a disengaged state. During the process of the workpiece table moving out of the predetermined space, when the second slide member slides to the tail end of the first slide rail, the third slide member enters from the second slide rail, and when the third slide slides to the tail end of the second slide rail, the first slide member disengages from the first slide rail.

[0008] In any of the above technical solutions, further, the guide mechanism also includes a first sub-rail and a second sub-rail, the first sub-rail is connected to the middle of the first slide rail and is parallel to the second slide rail, and when the workpiece platform moves out of the predetermined space, the first sliding member is separated from the first slide rail by the first sub-rail, and the second sub-rail is connected to the middle of the second slide rail and is parallel to the first slide rail, and when the workpiece platform moves out of the predetermined space, the third sliding member enters the second slide rail from the second sub-rail.

[0009] In any of the above technical solutions, further, there are two first slide rails, the two first slide rails are arranged in parallel, the tail end of the first of the two first slide rails is connected to the head end of the second slide rail, and the tail end of the second of the two first slide rails is connected to the middle of the second slide rail. The multiple sliding members include a first sliding member and a second sliding member. One side of the workpiece table is connected to the first sliding member and the second sliding member in sequence. When the workpiece table is in the moving-in state, the first sliding member is connected to the first one, and the second sliding member is connected to the second one. When the workpiece table moves out of the predetermined space, the first sliding member slides to the tail end of the first one and slides to the middle of the second slide rail. The second sliding member slides to the tail end of the second one and slides to the tail end of the second slide rail.

[0010] In any of the above technical solutions, further, the second slide rail includes a notch, the guide mechanism also includes a commutator, the commutator includes a first blocking part and a second blocking part, when the workpiece platform is moved in, the first blocking part closes the notch, the second blocking part blocks the second slide rail, and is parallel to the second one, when the workpiece platform moves out of the predetermined space, the first sliding member can touch the second blocking part so that the second blocking part blocks the tail end of the second one, and when the workpiece platform moves into the predetermined space, the first sliding member can touch the first blocking part so that the first blocking part closes the notch.

[0011] In any of the above technical solutions, further, the sliding member is a cam guide, the bearing portion of the cam guide is slidably connected to the first slide rail or the second slide rail, and the threaded portion of the cam guide is connected to the workpiece table.

[0012] According to a second aspect of the present application, a movable platform is provided, comprising the guide mechanism as described above.

[0013] In any of the above technical solutions, further, the movable platform also includes a workpiece table, the first slide rail and the second slide rail are on the same plane, and the workpiece table is parallel to the second slide rail.

[0014] In any of the above technical solutions, further, the movable platform also includes a roller assembly, and the roller assembly and the guide mechanism are both arranged at the bottom of the workpiece table.

[0015] According to the guiding mechanism of the present application, the guiding mechanism is arranged at the top or bottom of the workpiece table, and is used to move the workpiece table out of a predetermined space or move the workpiece table into a predetermined space (the predetermined space can be, for example, a narrow space where the workpiece table is located when working), wherein the guiding mechanism includes a plurality of sliding members and a first slide rail and a second slide rail connected to each other, the first slide rail and the second slide rail are arranged crosswise, and each sliding member can connect the workpiece table and the first slide rail or the second slide rail. When the workpiece table moves out of the predetermined space, at least some of the multiple sliding members can slide from the first slide rail to the second slide rail (the movement of the workpiece table is driven by the sliding of the sliding members), and when the workpiece table moves into the predetermined space, at least some of the multiple sliding members can slide from the second slide rail to the first slide rail (the movement of the workpiece table is driven by the sliding of the sliding members).

[0016] The guiding mechanism of the present application can guide the workpiece table to a predetermined position (the predetermined position is the narrow space where the workpiece table is located when working or the maintenance space outside the narrow space) only through the cooperation of the slide rail and multiple sliding parts. During the specific operation, it is only necessary to apply manual force to push the workpiece table, and the sliding of the sliding part can drive the workpiece table to the predetermined position. During the sliding process, the sliding part can automatically complete the turning at the corner (turning point) between the first slide rail and the second slide rail. Compared with the existing technical solutions, the equipment has a simple structure, is easy to operate, has high efficiency, and has low cost, and the moving process is safe and reliable.

[0017] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 A schematic diagram showing a workpiece stage in a first example of the present application in a moved-in state;

[0020] Figure 2 A schematic diagram showing the workpiece stage in the first example of the present application in a position intermediate between the moved-in state and the moved-out state;

[0021] Figure 3 A schematic diagram showing the workpiece stage in the first example of the present application in a moved-out state;

[0022] Figure 4 A schematic diagram showing a workpiece stage in a second example of the present application in a moved-in state;

[0023] Figure 5 A schematic diagram showing a workpiece stage in a second example of the present application in a position intermediate between a moved-in state and a moved-out state;

[0024] Figure 6 A schematic diagram showing a workpiece stage in a second example of the present application in a position intermediate between a moved-in state and a moved-out state;

[0025] Figure 7 Show Figure 6 A partial enlarged schematic diagram;

[0026] Figure 8 A schematic diagram showing a workpiece stage in a second example of the present application in a moved-out state;

[0027] Figure 9 Show Figure 8 A partial enlarged schematic diagram.

[0028] Icons: 10 - first sliding member; 20 - second sliding member; 30 - third sliding member; 40 - first slide rail; 41 - first sub-rail; 50 - second slide rail; 51 - second sub-rail; 60 - workpiece table; 70 - commutator; 71 - first blocking part; 72 - second blocking part. DETAILED DESCRIPTION

[0029] The following detailed description is provided to help the reader gain a comprehensive understanding of the methods, devices, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, devices, and / or systems described herein will be apparent upon understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein. Rather, except for operations that must occur in a particular order, changes may be made that will be apparent upon understanding the disclosure of this application. Furthermore, descriptions of features known in the art may be omitted for clarity and brevity.

[0030] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many possible ways to implement the methods, devices, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0031] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being “on,” “connected to,” “coupled to,” “over,” or “overlaying” another element, it may be directly “on,” “connected to,” “coupled to,” “over,” or “overlaying” another element, or one or more other elements may be present between them. In contrast, when an element is described as being “directly on,” “directly connected to,” “directly coupled to,” “directly over,” or “directly covering” another element, there may be no other elements intervening therebetween.

[0032] As used herein, the term "and / or" includes any one of the associated listed items and any combination of any two or more items.

[0033] Although terms such as "first," "second," and "third" may be used herein to describe various members, components, regions, layers, or portions, these members, components, regions, layers, or portions are not limited by these terms. Rather, these terms are used only to distinguish one member, component, region, layer, or portion from another member, component, region, layer, or portion. Thus, a first member, component, region, layer, or portion in the examples described herein may also be referred to as a second member, component, region, layer, or portion without departing from the teachings of the examples.

[0034] For ease of description, spatial relational terms such as "above," "upper," "below," and "lower" may be used herein to describe the relationship of one element to another element as shown in the accompanying drawings. Such spatial relational terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, an element described as being "above" or "upper" relative to another element would subsequently be "below" or "lower" relative to the other element. Thus, the term "above" includes both the orientations "above" and "below," depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relational terms used herein will be interpreted accordingly.

[0035] The terms used herein are intended only to describe various examples and are not intended to limit the present disclosure. Unless the context clearly indicates otherwise, the singular is intended to include the plural. The terms "comprise," "include," and "have" list the presence of stated features, quantities, operations, components, elements, and / or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0036] Due to manufacturing techniques and / or tolerances, variations in the shapes shown in the drawings may occur. Therefore, the examples described herein are not limited to the specific shapes shown in the drawings but include changes in shapes that occur during manufacturing.

[0037] The features of the examples described herein can be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have various configurations, other configurations are possible as will be apparent after understanding the disclosure of the present application.

[0038] The first aspect of the present application provides a guiding mechanism, thereby solving the problem that the existing solution for moving the workpiece table in and out is not only complex in structure and difficult in design, but also has high equipment cost.

[0039] In highly integrated semiconductor devices, the worktable is located in a small space during operation. To maintain and repair the worktable, it is necessary to move it to an open space for further maintenance operations. After the maintenance is completed, the worktable needs to be moved back to the working position in the small space.

[0040] However, the existing solutions for moving the worktable in and out are not only complicated, but also difficult to design. Specifically, the existing solutions generally use a motor or a rocking cylinder and a connecting rod to move the worktable in or out. However, to achieve the above purpose, many precision mechanisms are required. For example, a high-precision rotating motor or rocking cylinder is required, and the angular accuracy of the precision mechanism and the rotation accuracy of the connecting rod are very high. Therefore, the existing solutions are not only complex in structure and difficult to design, but also have high equipment costs.

[0041] In view of this, according to the first aspect of the present application, a guide mechanism is provided, which is arranged at the top or bottom of the workpiece table 60, and is used to move the workpiece table 60 out of a predetermined space or move the workpiece table 60 into a predetermined space (the predetermined space can be, for example, a narrow space where the workpiece table 60 is located when working), wherein the guide mechanism includes a plurality of sliding members and a first slide rail and a second slide rail connected to each other, the first slide rail and the second slide rail 50 are arranged crosswise, and each sliding member can connect the workpiece table 60 and the first slide rail or the second slide rail 50. When the workpiece table 60 moves out of the predetermined space, at least some of the multiple sliding members can slide from the first slide rail to the second slide rail 50 (driving the movement of the workpiece table 60 by the sliding of the sliding members), and when the workpiece table 60 moves into the predetermined space, at least some of the multiple sliding members can slide from the second slide rail 50 to the first slide rail (driving the movement of the workpiece table 60 by the sliding of the sliding members).

[0042] The guide mechanism of the present application can guide the workpiece table 60 to a predetermined position (the predetermined position is the narrow space where the workpiece table 60 is located when working or the maintenance space outside the narrow space) only through the cooperation of the slide rail and multiple sliding parts. During the specific operation, it is only necessary to manually apply force to push the workpiece table 60, and the sliding of the sliding part can drive the workpiece table 60 to the predetermined position. During the sliding process, the sliding part can automatically complete the turning at the corner (turning point) of the first slide rail and the second slide rail 50. Compared with the existing technical solutions, the equipment has a simple structure, is easy to operate, has high efficiency, and has low cost, and the moving process is safe and reliable. The specific structure of the slide rail and multiple sliding parts will be described in detail below.

[0043] In one example, if Figures 1 to 3 As shown, the first slide rail 40 and the second slide rail 50 are connected end to end, and the angle between the first slide rail 40 and the second slide rail 50 is an obtuse angle.

[0044] The plurality of sliding members include a first sliding member 10, a second sliding member 20 and a third sliding member 30. One side of the workpiece platform 60 is connected to the first sliding member 10, and the side adjacent to the side of the workpiece platform 60 is sequentially connected to the second sliding member 20 and the third sliding member 30. When the workpiece platform 60 is moved in, as shown in FIG. Figure 1 As shown, the first sliding member 10 and the second sliding member 20 are both connected to the first slide rail 40, and the third sliding member 30 is in a disengaged state. During the process of the workpiece table 60 moving out of the predetermined space, when the second sliding member 20 slides to the tail end of the first slide rail 40, the third sliding member 30 enters from the second slide rail 50. When the third sliding member 30 slides to the tail end of the second slide rail 50, the first sliding member 10 disengages from the first slide rail 40.

[0045] Furthermore, in order to ensure that the workpiece table 60 has the smallest possible moving range and stability during movement, when the workpiece table 60 is moved in, the first sliding member 10 is connected to the head end of the first slide rail 40, the second sliding member 20 is connected to the middle of the first slide rail 40, and the third sliding member 30 is in a disengaged state. In the process of the workpiece table 60 moving out of the predetermined space, the first sliding member 10 slides to the middle of the first slide rail 40 and disengages from the first slide rail 40, the second sliding member 20 slides to the tail end of the first slide rail 40 and slides to the middle of the second slide rail 50, and the third sliding member 30 enters from the middle of the second slide rail 50 and slides to the tail end of the second slide rail 50.

[0046] Specifically, when the workpiece platform 60 moves out, the locking mechanism of the workpiece platform 60 opens, and the air bearing at the bottom of the workpiece platform 60 lifts the workpiece platform 60 and disengages the locking mechanism. The first slide 10 and the second slide 20 guide the workpiece platform 60 to move only along the diagonal line. Then the third slide 30 enters the slide rail. The oblique sliding process ends, the vertical movement process begins, and the first slide 10 begins to disengage from the guide rail. The second slide 20 and the third slide 30 guide the workpiece platform 60 to move vertically. Thereby, the workpiece platform 60 is moved out of the narrow space (moving in state) to the open space (moving out state). When the workpiece platform 60 moves in, it is pushed to the vertical position. The workpiece platform 60 is guided by the second slide 20 and the third slide 30 to move vertically. After reaching the end point of the vertical movement guide rail, the first slide 10 enters the slide rail and continues to push the workpiece platform 60 to the moving-in position. The workpiece platform 60 is guided by the first slide 10 and the second slide 20 to move obliquely, and at the same time, the third slide 30 disengages from the guide rail.

[0047] In this example, if Figures 1 to 3As shown, the guide mechanism also includes a first sub-rail 41 and a second sub-rail 51, wherein the first sub-rail 41 is connected to the middle of the first slide rail 40 and is parallel to the second slide rail 50. During the process of the workpiece platform 60 moving out of the predetermined space, the first sliding member 10 is separated from the first slide rail 40 by the first sub-rail 41, and the second sub-rail 51 is connected to the middle of the second slide rail 50 and is parallel to the first slide rail 40. During the process of the workpiece platform 60 moving out of the predetermined space, the third sliding member 30 enters the second slide rail 50 from the second sub-rail 51.

[0048] In another example, Figures 4 to 9 As shown, there are two first slide rails 40, and the two first slide rails 40 are arranged in parallel. The tail end of the first of the two first slide rails 40 is connected to the head end of the second slide rail 50, and the tail end of the second of the two first slide rails 40 is connected to the middle of the second slide rail 50, wherein the angle between each first slide rail 40 and the second slide rail 50 is an obtuse angle.

[0049] The plurality of sliding members include a first sliding member 10 and a second sliding member 20. One side of the workpiece table 60 is sequentially connected to the first sliding member 10 and the second sliding member 20. When the workpiece table 60 is moved in, the first sliding member 10 is connected to the head end of the first sliding member (the first sliding member is the first sliding member). Figure 4 The first slide rail 40 in the middle and upper part), the second slide member 20 is connected to the head end of the second one (the second one is Figure 4 The first slide rail 40 in the middle and lower part), when the workpiece table 60 moves out of the predetermined space, the first sliding member 10 slides to the tail end of the first one and slides to the middle of the second slide rail 50, and the second sliding member 20 slides to the tail end of the second one and slides to the tail end of the second slide rail 50.

[0050] In this example, if Figures 4 to 9 As shown, the second slide rail 50 includes a gap, and the guide mechanism also includes a commutator 70. The commutator 70 includes a first blocking portion 71 and a second blocking portion 72 connected to each other, and a shaft, wherein the angle between the first blocking portion 71 and the second blocking portion 72 is an obtuse angle. When the workpiece table 60 is moved in, the first blocking portion 71 closes the gap (here, the gap is a gap in a wall of the second slide rail 50), and the second blocking portion 72 blocks the second slide rail 50 and is in the same straight line with a wall of the second one to form a track for the sliding member to slide. When the workpiece table 60 moves out of the predetermined space, as shown in FIG. Figure 7 and Figure 9 As shown, the first sliding member 10 can touch the second blocking portion 72, and the commutator 70 rotates around the axis so that the second blocking portion 72 blocks the tail end of the second member. During the process of the workpiece table 60 moving into the predetermined space, the first sliding member 10 can touch the first blocking portion 71 so that the first blocking portion 71 closes the gap. It is worth mentioning here that Figure 9As shown, when the workpiece table 60 moves into the predetermined space, the second blocking portion 72 of the commutator 70 blocks the second one, so the first sliding member 10 will not accidentally enter the second one. Figure 7 As shown, when the workpiece table 60 continues to move into the predetermined space, since the second blocking portion 72 of the diverter 70 blocks the second slide rail 50 at this time, the second sliding member 20 can only enter the second one, thereby ensuring the normal operation of the guide mechanism. Therefore, when the operator pushes the workpiece table 60, the workpiece table 60 can be smoothly made to reach the predetermined position even when the workpiece table 60 is not visible. In addition, in this example, by setting a reset component such as a torsion spring, the diverter can only have the above two situations, that is, there will be no scattered state to hinder the normal sliding of the sliding member.

[0051] Specifically, when the workpiece platform 60 moves out, the locking mechanism of the workpiece platform 60 opens, and the air bearing at the bottom of the workpiece platform 60 lifts the workpiece platform 60 and disengages the locking mechanism. The first slide 10 and the second slide 20 guide the workpiece platform 60 to move only along the diagonal line. The oblique movement process ends and the vertical movement process begins. The first slide 10 and the second slide 20 guide the workpiece platform 60 to move vertically, thereby moving the workpiece platform 60 from a small space (moving in state) to an open space (moving out state). During the process, when moving out, the first slide 10 will cause the commutator 70 to reverse when passing through the commutator 70, thereby ensuring that when moving in again, the second slide 20 will not continue to move on the vertical track. When moving in, the workpiece table 60 is pushed forward, and the workpiece table 60 is guided to move vertically by the first sliding member 10 and the second sliding member 20. The first sliding member 10 pushes the commutator to reverse. After reaching the end point of the vertical moving guide rail, the first sliding member 10 can only move diagonally and continue to push the workpiece table 60 toward the moving-in position. The workpiece table 60 is guided to move diagonally into place by the first sliding member 10 and the second sliding member 20.

[0052] In the embodiments of the present application, Figures 1 to 9 As shown, the sliding member is a cam guide, the bearing portion of the cam guide is slidably connected to the first slide rail or the second slide rail, and the threaded portion of the cam guide is connected to the workpiece table.

[0053] A second aspect of the present application provides a movable platform, which includes the guide mechanism described above.

[0054] In addition, the movable platform also includes a workpiece table, the first slide rail and the second slide rail are on the same plane and are connected to the bottom of the worktable. Preferably, the workpiece table is parallel to the second slide rail.

[0055] In addition, the movable platform also includes a roller assembly, which is connected to the bottom of the workpiece table. For example, the roller assembly can be a universal roller, a thrust bearing or an air bearing, which can make it easier to manually push the workpiece table.

[0056] The purpose of this application is to provide a workpiece table moving in and out mechanism that can realize the position conversion of the workpiece table in a narrow space and an open space, thereby facilitating subsequent maintenance and repair. The mechanism has the characteristics of easy operation, high efficiency, and safe and reliable movement.

[0057] Specifically, the guide mechanism of the present application is arranged at the top or bottom of the workpiece table, and is used to move the workpiece table out of a predetermined space or move the workpiece table into a predetermined space (the predetermined space can be, for example, a narrow space where the workpiece table is located when working), wherein the guide mechanism includes a plurality of sliding members and a first slide rail and a second slide rail connected to each other, the first slide rail and the second slide rail are arranged crosswise, and each sliding member can connect the workpiece table and the first slide rail or the second slide rail. When the workpiece table moves out of the predetermined space, at least some of the multiple sliding members can slide from the first slide rail to the second slide rail (driving the movement of the workpiece table by the sliding of the sliding members), and when the workpiece table moves into the predetermined space, at least some of the multiple sliding members can slide from the second slide rail to the first slide rail (driving the movement of the workpiece table by the sliding of the sliding members).

[0058] The guiding mechanism of the present application can guide the workpiece table to a predetermined position (the predetermined position is the narrow space where the workpiece table is located when working or the maintenance space outside the narrow space) only through the cooperation of the slide rail and multiple sliding parts. During the specific operation, it is only necessary to apply manual force to push the workpiece table, and the sliding of the sliding part can drive the workpiece table to the predetermined position. During the sliding process, the sliding part can automatically complete the turning at the corner (turning point) between the first slide rail and the second slide rail. Compared with the existing technical solutions, the equipment has a simple structure, is easy to operate, has high efficiency, and has low cost, and the moving process is safe and reliable.

[0059] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The scope of protection of the present application is not limited thereto. Although the present application has been described in detail with reference to the above-mentioned embodiments, those skilled in the art should understand that any person skilled in the art can modify or easily conceive of changes to the technical solutions described in the above-mentioned embodiments within the technical scope disclosed in the present application, or perform equivalent replacements for some of the technical features thereof. These modifications, changes, or replacements do not deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A guide mechanism, characterized in that: The guide mechanism is arranged on the top or bottom of the workpiece stage, and is used to move the workpiece stage out of a predetermined space or move the workpiece stage into a predetermined space. The guide mechanism includes a plurality of sliding members and a first slide rail and a second slide rail connected to each other, wherein the first slide rail and the second slide rail are arranged crosswise. Each of the sliding members can connect the workpiece table and the first slide rail or the second slide rail, When the workpiece platform moves out of the predetermined space, at least some of the plurality of sliding members can slide from the first slide rail to the second slide rail. When the workpiece platform moves into the predetermined space, at least some of the plurality of sliding members can slide from the second slide rail to the first slide rail; The included angle between the first slide rail and the second slide rail is an obtuse angle; In the first case, the first slide rail and the second slide rail are connected end to end, the plurality of sliding members include a first slide member, a second slide member, and a third slide member, one side of the workpiece table is connected to the first slide member, and the side adjacent to the one side of the workpiece table is sequentially connected to the second slide member and the third slide member, When the workpiece table is moved in, The first sliding member and the second sliding member are both connected to the first sliding rail, The third sliding member is in a disengaged state, When the workpiece platform moves out of the predetermined space, When the second sliding member slides to the tail end of the first sliding rail, the third sliding member enters from the second sliding rail. When the third sliding member slides to the tail end of the second sliding rail, the first sliding member disengages from the first sliding rail; In the second case, there are two first slide rails, the two first slide rails are arranged in parallel, the tail end of the first of the two first slide rails is connected to the head end of the second slide rail, and the tail end of the second of the two first slide rails is connected to the middle of the second slide rail. The plurality of sliding members include a first sliding member and a second sliding member, One side of the workpiece table is connected with the first sliding member and the second sliding member in sequence. When the workpiece table is moved in, The first sliding member is connected to the first one, The second sliding member is connected to the second one, When the workpiece platform moves out of the predetermined space, the first sliding member slides to the tail end of the first member and slides to the middle of the second slide rail. The second sliding member slides to the tail end of the second member and then slides to the tail end of the second slide rail.

2. The guide mechanism according to claim 1, wherein: In the first case, the guide mechanism further comprises a first sub-rail and a second sub-rail, The first sub-rail is connected to the middle of the first slide rail and is parallel to the second slide rail. When the workpiece platform moves out of the predetermined space, the first sliding member is separated from the first sliding rail by the first sub-rail. The second sub-rail is connected to the middle of the second slide rail and is parallel to the first slide rail. When the workpiece platform moves out of the predetermined space, the third sliding member enters the second sliding rail from the second sub-rail.

3. The guide mechanism according to claim 1, wherein: In the second case, the second slide rail includes a notch, the guide mechanism further includes a commutator, and the commutator includes a first blocking portion and a second blocking portion. When the workpiece platform is moved in, the first blocking portion closes the gap, and the second blocking portion blocks the second slide rail and is parallel to the second slide rail. When the workpiece platform moves out of the predetermined space, the first sliding member can touch the second blocking portion, so that the second blocking portion blocks the tail end of the second member. When the workpiece platform moves into the predetermined space, the first sliding member can touch the first blocking portion, so that the first blocking portion closes the gap.

4. The guide mechanism according to any one of claims 1 to 3, characterized in that: The sliding member is a cam guide, The bearing portion of the cam guide is slidably connected to the first slide rail or the second slide rail. The threaded portion of the cam guide is connected to the workpiece table.

5. A movable platform, characterized in that: The movable platform comprises a guide mechanism according to any one of claims 1-4.

6. The movable platform according to claim 5, characterized in that: The movable platform also includes a workpiece table, The first slide rail and the second slide rail are on the same plane, The workpiece platform is parallel to the second slide rail.

7. The movable platform according to claim 6, characterized in that The movable platform further comprises a roller assembly, The roller assembly and the guide mechanism are both arranged at the bottom of the workpiece platform.

Images