Integrated suction and wiping head device

Abstract

The present invention provides an integrated suction and wiping head device, comprising a suction cup body and a suction cup core, wherein the upper surface of the suction cup body is provided with a first annular groove for accommodating abrasive liquid, the bottom of the first annular groove is provided with a first abrasive liquid discharge hole, and the center of the mounting table is provided with a first air vent; the suction cup core is mounted on the lower surface of the suction cup body; the suction cup core has a second air vent coaxially connected to the first air vent; the lower end of the suction cup core is provided with an air distributor, and a plurality of first radial exhaust holes are evenly provided along the circumference of the air distributor, and the first radial exhaust holes are connected to the second air vent; the device also includes an air duct, a grinding liquid duct, a purge air duct, and a flushing liquid duct. The present invention can realize contactless loading and unloading of ceramic discs, and can complete the grinding, flushing, and purging of ceramic discs, greatly avoiding the problems of scratching, damage, scrapping, and secondary pollution of ceramic discs, improving work efficiency, and ensuring the grinding effect and cleanliness of ceramic discs.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor processing, and in particular relates to an integrated suction and wiping head device. Background Art

[0002] Certain semiconductor processes require the use of perforated ceramic discs. During their preparation and processing, grinding and cleaning are essential steps. Laser drilling machines are used to create numerous small holes on the surface of these discs, either circular or irregular in shape, depending on the processing requirements. The number and placement of these holes are uncertain. The high temperatures generated during this process can cause melt to form at the edges of the holes, hindering subsequent processing. Therefore, the melt must be ground away, and high surface cleanliness is required.

[0003] The surface of ceramic discs has irregular small holes. Ceramic discs are thin, highly precise and fragile, so appropriate loading and unloading methods and devices should be selected. In addition, with the development of ceramic disc manufacturing technology, the size of ceramic discs is also increasing, which puts higher requirements on the stability and loading and unloading capacity of the loading and unloading methods and devices.

[0004] Currently, in the post-processing process of ceramic discs, the ceramic discs are generally polished manually using a polishing cloth and alumina grinding fluid, then rinsed with deionized water and finally dried. This method is inefficient and workers can easily scratch or damage the ceramic discs, causing them to be scrapped. It may also cause secondary contamination of the ceramic discs, affecting the production quality and pass rate of the ceramic discs. In addition, the operator's strength, the number of grinding times, and the thickness of the ceramic discs during the grinding process have a significant impact on the grinding effect. It may be necessary to repeat the above process multiple times for the ceramic discs to meet the grinding requirements, which greatly reduces production efficiency. Summary of the Invention

[0005] The embodiment of the present invention provides an integrated suction and wiping head device, which aims to solve the problem that the existing method of processing ceramic wafers easily causes scratches, damage, scrapping and secondary pollution of ceramic wafers, affecting the production quality, qualification rate and production efficiency of ceramic wafers.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is to provide an integrated suction and wiping head device, comprising:

[0007] A suction cup body, wherein a mounting truncated platform is provided in the middle of the upper surface of the suction cup body, a first annular groove for accommodating abrasive liquid is provided around the mounting truncated platform, a first abrasive liquid discharge hole is provided at the bottom of the first annular groove, and a first vent hole is provided at the center of the mounting truncated platform; a mounting hole and a negative pressure chamber are provided in the middle of the lower surface of the suction cup body;

[0008] A suction cup core is mounted at the mounting hole and hidden in the negative pressure chamber; the suction cup core has a second vent hole coaxially connected to the first vent hole, and the second vent hole is a blind hole and does not pass through the suction cup core; a gas distributor is provided at the lower end of the suction cup core exposed at the mounting hole, and a plurality of first radial exhaust holes are evenly arranged along the circumference of the gas distributor, and the first radial exhaust holes are connected to the second vent hole;

[0009] It also includes a bracket, a driving motor arranged at the lower end of the bracket, a ventilation pipe connected to the hollow shaft of the driving motor, and a grinding liquid pipe, a purge air pipe, and a flushing liquid pipe fixed on the bracket; wherein, the first ventilation hole on the mounting table is connected to the hollow shaft, the grinding liquid pipe is located directly above the first annular groove, and the lower ends of the purge air pipe and the flushing liquid pipe are located on the outside of the suction cup body.

[0010] In a possible implementation, the surface of the negative pressure chamber is an arc-shaped curved surface.

[0011] In a possible implementation, the mounting hole is a threaded hole, an outer surface of an upper end of the suction cup core is provided with an external thread, and the suction cup core is threadedly connected to the suction cup body.

[0012] In one possible implementation, an air dividing cone is further provided at the center of the lower end of the suction cup core, an annular ventilation groove is formed between the air dividing cone and the air dividing disk, and a second radial exhaust hole connected to the second ventilation hole is provided on the air dividing cone, and the second radial exhaust hole corresponds to the first radial exhaust hole in the radial direction.

[0013] In a possible implementation, a second annular groove is further provided on the upper end surface of the suction cup core. The second annular groove is arranged around the outer periphery of the second vent hole, and a sealing ring is provided in the second annular groove.

[0014] In a possible implementation, the method further includes:

[0015] a suction cup bottom plate fixedly mounted on the lower surface of the suction cup body; a second polishing liquid discharge hole communicating with the first polishing liquid discharge hole is provided on the suction cup bottom plate, and a third vent hole concentric with the opening of the negative pressure chamber is provided at the center of the suction cup bottom plate; and

[0016] The polishing felt is fixed on the lower surface of the suction cup base plate. The polishing felt is provided with a third polishing liquid discharge hole connected to the second polishing liquid discharge hole. The center of the polishing felt is provided with a fourth vent hole concentric with the third vent hole.

[0017] In one possible implementation, the fixing structure of the suction cup base plate and the suction cup body includes: a plurality of fixing columns are evenly arranged on the top of the suction cup base plate, a plurality of fixing holes adapted for the fixing columns are provided on the lower surface of the suction cup body, and the outer periphery of the suction cup body is also provided with locking holes radially connected to the fixing holes, the fixing columns are inserted into the fixing holes, and the suction cup base plate and the suction cup body are fixed together by a first locking screw radially screwed into the locking hole.

[0018] In a possible implementation, a suction cup cover is further included, wherein a center hole is provided on the suction cup cover, and the center hole is coaxial with the first vent hole; the suction cup cover is fixed on the mounting circular platform, and an elastic buffer is provided between the suction cup cover and the mounting circular platform.

[0019] In a possible implementation, the suction cup cover is connected to the mounting table via bolts, wherein the elastic buffer is sleeved on the bolts.

[0020] In a possible implementation, a sensor is further included that is mounted on the bracket.

[0021] The integrated suction and wiping head device provided by the present invention has the following advantages compared with the prior art: the suction cup main body, grinding liquid pipeline, flushing liquid pipeline and purge air pipeline are integrated on the bracket, and the grinding liquid is discharged through the grinding liquid pipeline and the first grinding liquid discharge hole on the suction cup main body; the gas adsorbed on the ceramic disc is discharged into the negative pressure chamber through the ventilation pipeline, the hollow shaft of the driving motor, the first ventilation hole and the second ventilation hole; after the suction cup main body rotates and polishes the ceramic disc, the flushing liquid pipeline is opened to flush the ceramic disc, and then the purge air pipeline is switched to open to purge the surface of the ceramic disc. The whole process can realize contactless loading and unloading of the ceramic disc, and no manual operation is required. The grinding, flushing and purging of the ceramic disc can be completed, which greatly avoids the problems of scratches, damage, scrapping and secondary pollution of the ceramic disc, improves work efficiency, ensures the grinding effect and cleanliness of the ceramic disc, and ensures that the quality and pass rate of the ceramic disc are not affected during the grinding process. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of the structure of the integrated suction and wiping head device provided in an embodiment of the present invention Figure 1 ;

[0023] Figure 2 Schematic diagram of the structure of the integrated suction and wiping head device provided in an embodiment of the present invention Figure 2 ;

[0024] Figure 3 A schematic diagram of the main structure of the integrated suction and wiping head device provided in an embodiment of the present invention;

[0025] Figure 4 A schematic diagram of the exploded structure of the suction cup portion provided by an embodiment of the present invention;

[0026] Figure 5 The main structure diagram of the suction cup part provided by the embodiment of the present invention Figure 1 ;

[0027] Figure 6 For the Figure 5 Cross-sectional structural diagram along line AA;

[0028] Figure 7 The main structure diagram of the suction cup part provided by the embodiment of the present invention Figure 2 ;

[0029] Figure 8 For the Figure 7 Cross-sectional structural diagram along line BB;

[0030] Figure 9 A schematic diagram of the three-dimensional structure of a suction cup core provided in an embodiment of the present invention;

[0031] Figure 10 A schematic diagram of the main structure of the suction cup core provided in an embodiment of the present invention;

[0032] Figure 11 For the Figure 10 Cross-sectional structural diagram along the CC line;

[0033] Figure 12 Schematic diagram of the three-dimensional structure of the suction cup body provided in an embodiment of the present invention Figure 1 ;

[0034] Figure 13 Schematic diagram of the three-dimensional structure of the suction cup body provided in an embodiment of the present invention Figure 2 ;

[0035] Figure 14 The main structure diagram of the suction cup body provided by the embodiment of the present invention is as follows Figure 1 ;

[0036] Figure 15 For the Figure 14 Cross-sectional structural diagram of the middle DD line;

[0037] Figure 16 Schematic diagram of the three-dimensional structure of the suction cup body provided in an embodiment of the present invention Figure 2 ;

[0038] Figure 17 For the Figure 16 Cross-sectional structural diagram along line EE;

[0039] Figure 18 A schematic diagram of the three-dimensional structure of a suction cup cover provided in an embodiment of the present invention;

[0040] Figure 19 A schematic diagram of the main structure of a suction cup cover provided in an embodiment of the present invention;

[0041] Figure 20 For the Figure 19 Cross-sectional structural diagram along the FF line;

[0042] Description of reference numerals:

[0043] 1. Bracket; 101. Upper support plate; 102. Vertical plate; 103. Lower support plate; 2. Ventilation pipe; 3. Drive motor; 4. Suction cup cover; 401. Center hole; 5. Suction cup body; 501. First vent hole; 502. Mounting table; 503. First annular groove; 504. Negative pressure chamber; 505. First grinding liquid discharge hole; 506. Mounting hole; 507. Fixing hole; 508. Locking hole; 6. Grinding liquid pipeline; 7. Gas-liquid common pipe; 8. Y-type three-way quick connector; 9. First check valve; 10. Second check valve; 11. Flushing liquid pipeline ; 12. Purge air pipeline; 13. First locking screw; 14. Right sensor; 15. Left sensor; 16. Suction cup core; 161. Gas distributor; 162. Gas distributor cone; 163. First radial exhaust hole; 164. Second radial exhaust hole; 165. Second ventilation hole; 166. Second annular groove; 17. Suction cup base; 171. Fixed column; 172. Third ventilation hole; 173. Second grinding liquid discharge hole; 18. Polishing felt; 181. Fourth ventilation hole; 182. Third grinding liquid discharge hole; 19. Elastic buffer; 20. Second locking screw. DETAILED DESCRIPTION

[0044] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0045] Please also refer to Figures 1 to 20 The integrated suction and wiping head device provided by the present invention will now be described. The integrated suction and wiping head device comprises a suction cup body 5 and a suction cup core 16. A mounting platform 502 is provided in the center of the upper surface of the suction cup body 5. A first annular groove 503 for accommodating abrasive liquid is provided around the mounting platform 502. A first abrasive liquid discharge hole 505 is provided at the bottom of the first annular groove 503. A first vent hole 501 is provided in the center of the mounting platform 502. A mounting hole 506 and a negative pressure chamber 504 are provided in the center of the lower surface of the suction cup body 5. In this embodiment, four first abrasive liquid discharge holes 505 are evenly distributed, but three, five, or six holes can also be evenly distributed, regardless of the number.

[0046] The suction cup core 16 is mounted at the mounting hole 506 and concealed within the negative pressure chamber 504. The suction cup core 16 has a second vent hole 165 coaxially connected to the first vent hole 501. The second vent hole 165 is a blind hole and does not penetrate the suction cup core 16. The lower end of the suction cup core 16, exposed outside the mounting hole 506, is equipped with a gas distributor 161. A plurality of first radial exhaust holes 163 are evenly distributed along the circumference of the gas distributor 161. The first radial exhaust holes 163 are connected to the second vent holes 165. Nitrogen entering through the ventilation line 2 is discharged through the plurality of first radial exhaust holes 163 of the suction cup core 16 and sprayed toward the inner wall of the negative pressure chamber 504, buffering the airflow pressure, reducing the pressure on the upper surface of the ceramic disc, and preventing damage to the ceramic disc caused by excessive airflow impact.

[0047] The integrated suction and wiping head device also includes a bracket 1, a driving motor 3 arranged at the lower end of the bracket 1, a ventilation pipe 2 connected to the hollow shaft of the driving motor 3, and a grinding liquid pipe 6, a purge air pipe 12, and a flushing liquid pipe 11 fixed to the bracket 1; wherein, the first ventilation hole 501 on the mounting table 502 is connected to the hollow shaft, the grinding liquid pipe 6 is located directly above the first annular groove 503, and the lower ends of the purge air pipe 12 and the flushing liquid pipe 11 are located on the outside of the suction cup body 5.

[0048] The driving motor 3 drives the suction cup body 5 to rotate, and the suction cup body 5 is connected to the lower end of the hollow shaft; the grinding liquid flows out from the grinding liquid pipeline 6 and is directly accumulated on the first annular groove 503. As the suction cup body 5 rotates, the grinding liquid is evenly distributed on the ceramic wafer.

[0049] The integrated suction and wiping head device provided by the present invention has a suction cup body 5, a grinding liquid pipeline 6, a flushing liquid pipeline 11 and a purge air pipeline 12 integrated on the bracket 1, and the grinding liquid is discharged through the grinding liquid pipeline 6 and the first grinding liquid discharge hole 505 on the suction cup body 5; the gas adsorbed by the ceramic disc is discharged to the negative pressure chamber 504 through the ventilation pipeline 2, the hollow shaft of the drive motor 3, the first ventilation hole 501 and the second ventilation hole 165; after the suction cup body 5 rotates and polishes the ceramic disc, the flushing liquid pipeline 11 is opened to flush the ceramic disc, and then the purge air pipeline 12 is switched to open to purge the surface of the ceramic disc. The whole process can realize contactless loading and unloading of the ceramic disc, and no manual operation is required. The grinding, flushing and purging of the ceramic disc can be completed, which greatly avoids the problems of scratches, damage, scrapping and secondary pollution of the ceramic disc, improves work efficiency, ensures the grinding effect and cleanliness of the ceramic disc, and ensures that the quality and pass rate of the ceramic disc are not affected during the grinding process.

[0050] The bracket 1 is installed on the three-dimensional module, which can realize the movement of the entire wiping head device in the XYZ three-dimensional directions.

[0051] Optionally, the purge gas pipeline 12 and the flushing liquid pipeline 11 are combined into one at the lower end. Specifically, the purge gas pipeline 12 and the flushing liquid pipeline 11 are respectively provided with a first check valve 9 and a second check valve 10. A Y-type three-way quick connector 8 is further provided at the lower end of the two pipelines. The double-interface side of the Y-type three-way quick connector 8 is connected to the first check valve 9 and the second check valve 10 through a PE tube to prevent the medium from flowing back. After the two are combined into one, a gas-liquid common pipe 7 is provided below. The gas-liquid common pipe 7 is connected to the lower end interface of the Y-type three-way quick connector 8 through a straight-through quick connector box PE pipe. The gas-liquid common pipe 7 is on the outside of the suction cup body 5, directly above the ceramic disc. A joint is provided at the upper end of the gas-liquid common pipe 7, which can be directly fixed on the lower support plate 103. The purge gas is also nitrogen.

[0052] In some embodiments, as Figure 6 and Figure 8 As shown, the surface of the negative pressure cavity 504 is an arc-shaped curved surface, which is beneficial for buffering the pressure of the gas and weakening the pressure of the gas acting on the ceramic wafer.

[0053] In some embodiments, as Figure 6 and Figure 8 As shown, the mounting hole 506 is a threaded hole, and the outer surface of the upper end of the suction cup core 16 is provided with an external thread, and the suction cup core 16 is threadedly connected to the suction cup body 5. The suction cup body 5 is threadedly connected to the suction cup core 16, and assembly and disassembly are simple and convenient.

[0054] In some embodiments, as Figures 9 to 11 As shown, a gas distribution cone 162 is also provided at the center of the lower end of the suction cup core 16. An annular ventilation groove is formed between gas distribution cone 162 and gas distribution plate 161. Second radial exhaust holes 164 are provided on gas distribution cone 162, communicating with second vent holes 165. Second radial exhaust holes 164 correspond radially one-to-one with first radial exhaust holes 163. Through the two-stage even distribution of radial exhaust holes, nitrogen entering from the ventilation line 2 is dispersed through the radial exhaust holes, increasing its pressure before impacting the walls of the negative pressure chamber 504. This also reduces the nitrogen pressure and prevents damage to the ceramic disc.

[0055] In some embodiments, as Figure 11 As shown, the upper end surface of the suction cup core 16 is further provided with a second annular groove 166. This second annular groove 166 surrounds the outer periphery of the second vent hole 165, and a sealing ring is disposed within the second annular groove 166. The provision of a sealing ring at the connection between the suction cup core 16 and the suction cup body 5 prevents nitrogen leakage from that location and the resulting impact on the suction force.

[0056] The suction and wiping integrated wiping head device provided by the present invention also includes: Figures 1 to 8As shown, the suction cup base plate 17 and the polishing felt 18, the suction cup base plate 17 is fixed on the lower surface of the suction cup body 5; the suction cup base plate 17 is provided with a second grinding liquid discharge hole 173 connected to the first grinding liquid discharge hole 505, and the center of the suction cup base plate 17 is provided with a third air vent 172 concentric with the opening of the negative pressure chamber 504; the polishing felt 18 is fixed on the lower surface of the suction cup base plate 17, and the polishing felt 18 is provided with a third grinding liquid discharge hole 182 connected to the second grinding liquid discharge hole 173, and the center of the polishing felt 18 is provided with a fourth air vent 181 concentric with the third air vent 172.

[0057] The third vent hole 172 on the suction cup base plate 17 is used to allow nitrogen to flow out, and the polishing liquid flows out through the first polishing liquid outlet hole 505, the second polishing liquid outlet hole 173, and the third polishing liquid outlet hole 182. The sizes of the third vent hole 172 and the fourth vent hole 181 are consistent with the opening size of the negative pressure chamber 504.

[0058] Under the action of the grinding liquid and the polishing felt 18, the ceramic disc can be ground; the polishing felt 18 can also play a buffering and anti-slip role, and is not easy to cause damage to the ceramic disc. It is easy to install and can be easily replaced after wear and failure.

[0059] In some embodiments, as Figures 1 to 8 As shown, the fixing structure between the suction cup base plate 17 and the suction cup body 5 includes: a plurality of fixing posts 171 are evenly distributed on the upper surface of the suction cup base plate 17; a plurality of fixing holes 507 are provided on the lower surface of the suction cup body 5 to accommodate the fixing posts 171; and locking holes 508 are provided on the outer periphery of the suction cup body 5, which are radially connected to the fixing holes 507. The fixing posts 171 are inserted into the fixing holes 507, and the suction cup base plate 17 and the suction cup body 5 are fixed together by first locking screws 13 that are radially screwed into the locking holes 508. Specifically, a Ø2 locking screw can be used to fix the fixing posts 171 and the suction cup body 5 together, thereby fixing the suction cup base plate 17 to the lower surface of the suction cup body 5.

[0060] The integrated suction and wiping head device provided by the present invention further comprises a suction cup cover 4, such as Figures 18 to 20 As shown, the suction cup cover 4 is provided with a central hole 401, which is coaxial with the first vent hole 501. The suction cup cover 4 is fixed to the mounting platform 502, with an elastic buffer 19 disposed between the suction cup cover 4 and the mounting platform 502. The elastic buffer 19 provides cushioning and axial displacement compensation. Furthermore, the presence of the elastic buffer 19 reduces assembly precision and manufacturing difficulty. The elastic buffer 19 is preferably a spring, but can also be a rubber pad or the like.

[0061] In some embodiments, as Figures 1 to 8As shown, the suction cup cover 4 is connected to the mounting platform 502 via bolts, wherein the elastic buffer member 19 is mounted on the bolts. In this embodiment, four bolts are provided. The suction cup cover 4 is fixed to the lower end of the hollow shaft of the drive motor 3 and is locked radially with a second locking screw 20.

[0062] In some embodiments, as Figures 1 to 3 As shown, the bracket 1 also includes sensors. Specifically, they include a left sensor 15 and a right sensor 14. The left and right sensors 15 and 14 are connected to the lower support plate 103 via threads and adjusted to a suitable height. The left and right sensors operate to move the device as close to the center of the ceramic disc as possible.

[0063] The bracket 1 used in the present invention is as follows Figures 1 to 3 As shown, it includes an upper support plate 101, a vertical plate 102, a protective cover and a lower support plate 103. The vertical plate 102 and the protective cover are fastened by screws between the upper support plate 101 and the lower support plate 103. Since there will be splashing of liquid during the process, the protective cover can protect the device.

[0064] The principle behind the wiper's attraction to the ceramic disc is as follows: Nitrogen flows from the center of the disc's top surface toward its edge. The high gas velocity creates a negative pressure on the top surface, while the slower gas velocity on the bottom surface creates a pressure differential between the top and bottom sides. This pressure differential allows for contactless attraction of the perforated disc. This method provides gentler attraction and improved stability. The polishing felt 18 is used to grind the ceramic disc. One side of the polishing felt 18 is sticky and can be directly adhered to the lower surface of the suction cup base plate 17. In addition, the polishing felt 18 has a large area, which can play a buffering and anti-slip role when adsorbing the ceramic disc, and is not easy to cause damage to the ceramic disc. The polishing felt 18 is easy to install and can be easily replaced after wear and tear. The suction cup body 5, suction cup base plate 17 and polishing felt 18 of the wiping head part can be replaced according to the size of the actual processed ceramic disc, with a diameter of about 2 / 3 of the diameter of the ceramic disc. There are circular holes at the bottom of the suction cup base plate 17 and the polishing felt 18, which can provide greater suction force. The spring between the suction cup body 5 and the suction cup cover 4 is used to adjust the pressure, which can be achieved by adjusting the position of the Z axis of the three-dimensional module. In addition, when the ceramic disc is adsorbed, the spring can play a buffering and axial displacement compensation role, and due to the presence of the spring, the assembly accuracy and manufacturing difficulty can be reduced.

[0065] The specific working process of the device is as follows: an external film transmission mechanism is used to transport the ceramic disc to a fixed position, the three-dimensional module moves the device to the position of the ceramic disc, the left sensor 15 and the right sensor 14 work to move the device position to the center position of the ceramic disc as much as possible, the ventilation line 2 connected to the suction cup body 5 is connected, and the ceramic disc is sucked up under the action of the pressure difference, the three-dimensional module moves the device to the carrier position, the Z axis drops to a fixed position, the ventilation line 2 stops supplying air, and the ceramic disc is placed on the carrier; the grinding liquid pipeline 6 is connected, and the drive motor 3 works at the same time, the suction cup body 5 rotates, and the grinding liquid falls evenly on the ceramic disc through the first grinding liquid discharge hole 505 in the first annular groove 503 of the suction cup body 5. Upper surface; the Z axis continues to descend to a certain position to press the ceramic disc, and the grinding fluid continues to be introduced at this time. The suction cup body 5 continues to rotate and moves along the set trajectory to achieve the grinding effect; after the grinding is completed, the deionized water of the flushing liquid pipeline 11 is added to rinse the surface of the ceramic disc and wash away the residual grinding fluid; the nitrogen of the purge gas pipeline 12 for purging is connected, and the wiping head part moves according to the set trajectory to dry the surface of the ceramic disc; finally, the ventilation pipeline 2 connected to the wiping head part is connected, and the ceramic disc is sucked up under the action of the pressure difference. The three-dimensional module moves the device to the unloading position, the Z axis descends to a fixed position, the ventilation pipeline 2 stops supplying nitrogen, the ceramic disc is placed at the unloading position, and the conveying mechanism recycles the ceramic disc.

[0066] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0067] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A suction and wiping integrated wiping head device, characterized in that: include: A suction cup body (5), wherein a mounting truncated platform (502) is provided in the middle of the upper surface of the suction cup body (5), a first annular groove (503) for accommodating abrasive liquid is provided around the mounting truncated platform (502), a first abrasive liquid discharge hole (505) is provided at the bottom of the first annular groove (503), and a first vent hole (501) is provided at the center of the mounting truncated platform (502); a mounting hole (506) and a negative pressure cavity (504) are provided in the middle of the lower surface of the suction cup body (5); A suction cup core (16) is installed at the installation hole (506) and hidden in the negative pressure chamber (504); the suction cup core (16) has a second vent hole (165) coaxially connected to the first vent hole (501), and the second vent hole (165) is a blind hole and does not pass through the suction cup core (16); the lower end of the suction cup core (16) exposed from the installation hole (506) is provided with an air distribution plate (161), and a plurality of first radial exhaust holes (163) are uniformly provided along the circumference of the air distribution plate (161), and the first radial exhaust holes (163) are connected to the second vent hole (165); It also includes a bracket (1), a driving motor (3) arranged at the lower end of the bracket (1), a ventilation pipeline (2) connected to the hollow shaft of the driving motor (3), and a grinding liquid pipeline (6), a purge gas pipeline (12), and a flushing liquid pipeline (11) fixed to the bracket (1); wherein the first ventilation hole (501) on the mounting table (502) is connected to the hollow shaft, the grinding liquid pipeline (6) is located directly above the first annular groove (503), and the lower ends of the purge gas pipeline (12) and the flushing liquid pipeline (11) are located outside the suction cup body (5); It also includes: a suction cup bottom plate (17) fixedly mounted on the lower surface of the suction cup body (5); a second polishing liquid discharge hole (173) communicating with the first polishing liquid discharge hole (505) is provided on the suction cup bottom plate (17); a third vent hole (172) concentric with the opening of the negative pressure chamber (504) is provided at the center of the suction cup bottom plate (17); and A polishing felt (18) is fixed on the lower surface of the suction cup base plate (17), and a third polishing liquid discharge hole (182) connected to the second polishing liquid discharge hole (173) is provided on the polishing felt (18). A fourth ventilation hole (181) concentric with the third ventilation hole (172) is provided at the center of the polishing felt (18).

2. The integrated suction and wiping head device according to claim 1, characterized in that: The surface of the negative pressure chamber (504) is an arc-shaped curved surface.

3. The integrated suction and wiping head device according to claim 1, characterized in that: The mounting hole (506) is a threaded hole, the outer surface of the upper end of the suction cup core (16) is provided with an external thread, and the suction cup core (16) is threadedly connected to the suction cup body (5).

4. The integrated suction and wiping head device according to claim 1, characterized in that: A gas dividing cone (162) is further provided at the center of the lower end of the suction cup core (16), and an annular ventilation groove is formed between the gas dividing cone (162) and the gas dividing disc (161). A second radial exhaust hole (164) communicating with the second ventilation hole (165) is provided on the gas dividing cone (162), and the second radial exhaust hole (164) corresponds to the first radial exhaust hole (163) in a radial direction.

5. The integrated suction and wiping head device according to claim 1, characterized in that: The upper end surface of the suction cup core (16) is further provided with a second annular groove (166), the second annular groove (166) is arranged around the outer periphery of the second vent hole (165), and a sealing ring is provided in the second annular groove (166).

6. The integrated suction and wiping head device according to claim 1, wherein: The fixing structure of the suction cup base plate (17) and the suction cup body (5) comprises: a plurality of fixing columns (171) are evenly arranged on the upper surface of the suction cup base plate (17); a plurality of fixing holes (507) adapted to the fixing columns (171) are provided on the lower surface of the suction cup body (5); the outer periphery of the suction cup body (5) is further provided with locking holes (508) radially connected to the fixing holes (507); the fixing columns (171) are inserted into the fixing holes (507) and fixed together with the suction cup base plate (17) and the suction cup body (5) by a first locking screw (13) radially screwed into the locking hole (508).

7. The integrated suction and wiping head device according to claim 1, characterized in that: The invention also includes a suction cup cover (4), wherein a center hole (401) is provided on the suction cup cover (4), and the center hole (401) is coaxial with the first vent hole (501); the suction cup cover (4) is fixed on the mounting truncated platform (502), and an elastic buffer (19) is provided between the suction cup cover (4) and the mounting truncated platform (502).

8. The integrated suction and wiping head device according to claim 7, characterized in that: The suction cup cover (4) and the mounting truncated table (502) are connected via bolts, wherein the elastic buffer (19) is sleeved on the bolts; the elastic buffer (19) is a spring.

9. The integrated suction and wiping head device according to claim 1, characterized in that: It also includes a sensor installed on the bracket (1).

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