A multi-gas emission integrated module and a wafer drying system that can be used in a wafer drying system

Abstract

The present invention relates to a multi-gas emission integrated module that can be used in a wafer drying system. Its structure includes a tank exhaust port, a main body exhaust port, and a bubbler exhaust port. The tank exhaust port, the main body exhaust port, and the bubbler exhaust port are respectively arranged on the outer shell. A cylinder is arranged inside the outer shell, and the cylinder is connected to the exhaust on-off baffle. One end of the front connecting pipe is connected to the outer shell, and the other end is connected to the middle gas regulating pipe. A main circuit pressure regulating baffle is arranged in the front connecting pipe. The intake end of the middle gas regulating pipe is connected to the front connecting pipe, and the outlet end is connected to the discharge pipe. A rotary cylinder module is arranged thereon, and the rotary cylinder module is connected to the total circuit on-off baffle arranged in the middle gas regulating pipe. The outlet end of the discharge pipe extends outside the wafer drying system. The integrated module of the present invention improves the exhaust problem in the drying process based on the Marangoni drying technology through an integrated exhaust control method.

Description

Technical Field

[0001] The present invention relates to semiconductor equipment, and particularly to a multi-gas emission integrated module and a wafer drying system that can be used in a wafer drying system. Background Art

[0002] During the wafer drying process using semiconductor processing equipment, isopropyl alcohol (IPA) needs to be used. Specifically, the IPA replacement drying technology and the Marangoni drying technology are used as the main methods. During the relevant wafer drying, a large amount or a sufficient amount of vaporized IPA gas and nitrogen are required. After the gas is used, it is exhausted through an exhaust system. However, the exhausted gas will affect environmental safety and also affect the drying efficiency and quality.

[0003] Therefore, an integrated exhaust control method and system that can combine and integrate multiple drying processes are needed to improve the IPA replacement process with the actual operating drying module, so as to solve the exhaust problem in the wafer drying process based on the Marangoni drying technology. Summary of the Invention

[0004] The purpose of the present invention is to overcome the deficiencies of the above-mentioned prior art, and provide a multi-gas emission integrated module used in a wafer drying system. The integrated module of the present invention adopts an integrated exhaust control method to solve the exhaust problem in the wafer drying process.

[0005] In order to achieve the above-mentioned invention purpose, the technical solution provided by the present invention patent is as follows:

[0006] A multi-gas emission integrated module that can be used in a wafer drying system. In the wafer drying system, there are a main body, a drying tank body, and an isopropyl alcohol bubbler. The multi-gas emission integrated module is arranged in the wafer drying system, and its structure includes:

[0007] A tank exhaust port, connected to the drying tank body through a pipeline, and a ventilation on-off baffle is provided therein;

[0008] A main body exhaust port, which is open in the main body, and a main body pressure regulating baffle is provided therein;

[0009] A bubbler exhaust port, connected to the isopropyl alcohol bubbler through a pipeline;

[0010] A housing, the tank exhaust port, the main body exhaust port, and the bubbler exhaust port are respectively arranged on the housing. A cylinder is arranged inside the housing, and the cylinder is connected to the ventilation on-off baffle;

[0011] A front connecting pipeline, one end of which is connected to the air outlet of the housing, and the other end is connected to a middle air regulating pipeline. A main circuit pressure regulating baffle is arranged in the front connecting pipeline;

[0012] The middle air-regulating pipeline has an air inlet end connected to the front connecting pipeline and an air outlet end connected to the discharge pipeline. A rotary cylinder module is provided thereon, and the rotary cylinder module is connected to a main circuit on-off baffle arranged in the middle air-regulating pipeline.

[0013] The discharge pipeline has an air outlet end extending outside the wafer drying system and is connected to the exhaust conveying pipeline at the factory end.

[0014] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, at least one annular gasket is provided between the discharge pipeline and the middle air-regulating pipeline, and the annular gasket is made of fluorocarbon rubber.

[0015] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, the rotary cylinder module includes a rotary cylinder, a baffle connecting rod, and a rotary cylinder housing. The output end of the rotary cylinder is connected to the baffle connecting rod, and the baffle connecting rod extends into the middle air-regulating pipeline to connect the main circuit on-off baffle, and the rotary cylinder housing covers the outside of the rotary cylinder.

[0016] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, the main circuit pressure-regulating baffle in the front connecting pipeline is connected to a rotary baffle connecting rod, and one end of the rotary baffle connecting rod extends outside the front connecting pipeline and is connected to a rotary baffle switch valve.

[0017] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, at least one annular gasket is provided between the front connecting pipeline and the air outlet of the housing, and the annular gasket is made of fluorocarbon rubber.

[0018] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, a micro-cylinder module for blocking gas is provided inside the housing. The micro-cylinder module includes a main body housing, a cylinder, a blocking sheet, a mounting plate, a module housing, and a circular support plate. The main body housing is fixed on the inner wall of the housing through the mounting plate. The cylinder is provided inside the main body housing. The cylinder is a thin cylinder, and the main body housing and the module housing form a complete housing to enclose the thin cylinder. The output end of the thin cylinder extends outside the module housing and is connected to the circular support plate. The circular support plate is closely connected to the blocking sheet, and the circular support plate and the blocking sheet form an exhaust on-off baffle for opening and closing the air outlet of the groove body.

[0019] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, a main body pressure regulating baffle is provided in the main body air outlet, the main body pressure regulating baffle is connected with a rotating baffle connecting rod, and one end of the rotating baffle connecting rod extends out of the outer side of the front connecting pipe and is connected with a rotating baffle switch valve.

[0020] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, an openable upper shell is provided on the upper part of the outer shell, a bubbler air outlet and a main body air outlet are provided on the upper shell, and a tank body air outlet is provided on the side wall of the outer shell.

[0021] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, a support plate member is provided at the bottom of the outer shell, and the outer shell is fixed on the main body through the support plate member.

[0022] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, as a further design, an interface for installing an exhaust on-off sensor is further provided on the tank body air outlet, and an interface for installing a factory exhaust pressure sensor is further provided on the exhaust pipe.

[0023] In a multi-gas emission integrated module that can be used in a wafer drying system according to the present invention, its working states include a standby state, a tank body working state, a main body positive pressure state, and a shutdown state, wherein:

[0024] In the standby state, the main body air outlet serves as a normally open ventilation port, the bubbler air outlet is semi-open to realize the exhaust of the isopropyl alcohol bubbler, the tank body air outlet is closed, and the continuous exhaust of the isopropyl alcohol bubbler and the main body is realized;

[0025] In the tank body working state, the main body air outlet serves as a normally open ventilation port, the bubbler air outlet is semi-open to realize the exhaust of the isopropyl alcohol bubbler, the tank body air outlet is opened, the main circuit pressure regulating baffle is semi-open, and the total circuit on-off baffle is opened, so as to realize the operation of the exhaust of the tank body, the isopropyl alcohol bubbler, and the main body;

[0026] In the main body positive pressure state, the main body air outlet serves as a normally open ventilation port, the bubbler air outlet is closed, the tank body air outlet is opened, the main circuit pressure regulating baffle is semi-open, and the total circuit on-off baffle is opened, so as to realize the exhaust of the tank body and the main body;

[0027] In the shutdown state, the main body air outlet is blocked, the bubbler air outlet is closed, the tank body air outlet is closed, the main circuit pressure regulating baffle is closed, and the total circuit on-off baffle is closed, and the exhaust of the tank body, the isopropyl alcohol bubbler, and the main body all stops, and gas entry is prevented.

[0028] The present invention also relates to a wafer drying system, in which a multi-gas emission integrated module with the above structure is provided.

[0029] Based on the above technical solutions, the multi-gas emission integrated module of the present invention is applied in a wafer drying system, and the following technical effects have been achieved through practical applications:

[0030] 1. The multi-gas emission integrated module of the present invention is connected to three gas supply sources discharged from the wafer drying system, and switches the process gas in the drying tank body, such as the mixed gas of IPA isopropyl alcohol and nitrogen N2, the purified and finely atomized process gas of the IPA atomization system (IPA isopropyl alcohol and nitrogen N2 mixed gas (high temperature)), and the used nitrogen, and discharges the ambient air gas of the overall drying module.

[0031] 2. The multi-gas emission integrated module of the present invention can achieve the discharge of different source gases through switching. In the composite exhaust module box, it can effectively switch the process gas in the drying tank body, such as the mixed gas of IPA isopropyl alcohol and nitrogen N2, the purified and finely atomized process gas of the IPA atomization system (IPA isopropyl alcohol and nitrogen N2 mixed gas (high temperature)), and the used nitrogen, and can effectively achieve the control of gas discharge in different stages of the drying process, and integrate the complex exhaust process on a single module for execution.

[0032] 3. The multi-gas emission integrated module of the present invention is specifically designed with a gas blocking device to effectively perform temporary blocking, avoiding the phenomenon of backflow and particle contamination caused by the pressure drop of the air pressure when different input gas sources enter the composite exhaust module at the same time, and effectively maintaining the difficulties that need to be solved in the exhaust of a single integrated composite exhaust system using multiple complex pipelines.

[0033] 4. The multi-gas emission integrated module of the present invention is not externally connected to a pipeline at the port of the ambient air gas of the overall drying system, but forms a stable negative pressure through the manual valve body above at a certain opening degree, guides the intake air of the FFU to form a flow field to provide an effective balancing effect. Among them, the flow control and rate of the discharged gas can be driven by the opening angle of the rotating cylinder to realize the controllability of the discharged flow and rate. By means of the integrated composite exhaust system, the exhaust process is effectively switched to ensure that the execution process of the drying process can be adjusted by the exhaust of the gases used in different stages of the source, and it can also effectively strengthen the control of the gas switching between the tank body and the IPA atomization system required for the drying process, effectively improving the problems such as water marks or particle residues, which are common drying defects in the drying process. Description of the Drawings

[0034] Figure 1It is a schematic diagram of the installation position of an integrated multi-gas emission module that can be used in a wafer drying system according to the present invention.

[0035] Figure 2 It is a partial three-dimensional sectional view of an integrated multi-gas emission module that can be used in a wafer drying system according to the present invention.

[0036] Figure 3 It is a schematic diagram of the exploded structure composition of an integrated multi-gas emission module that can be used in a wafer drying system according to the present invention.

[0037] Figure 4 It is a schematic diagram of the system principle of an integrated multi-gas emission module that can be used in a wafer drying system according to the present invention.

[0038] Figure 5 It is a schematic diagram of the exhaust of an integrated multi-gas emission module that can be used in a wafer drying system in the standby state according to the present invention.

[0039] Figure 6 It is a schematic diagram of the exhaust of an integrated multi-gas emission module that can be used in a wafer drying system in the working state of the tank body according to the present invention.

[0040] Figure 7 It is a schematic diagram of the exhaust of an integrated multi-gas emission module that can be used in a wafer drying system in the positive pressure state of the main body according to the present invention.

[0041] Figure 8 It is a schematic diagram of the exhaust of an integrated multi-gas emission module that can be used in a wafer drying system in the shutdown state according to the present invention.

[0042] Among them,

[0043] A - Main body; B - Isopropyl alcohol bubbler; C - Drying tank body; D - Hose; E - Exhaust port of the tank body; F - Exhaust port of the bubbler; G - Exhaust port of the main body; 1 - Discharge pipe; 2 - Annular gasket; 3 - Central gas regulating pipe; 4 - Rotating cylinder support column; 5 - Baffle connecting rod; 6 - Total circuit on-off baffle; 7 - Front connecting pipe; 8 - Rotating baffle connecting rod; 9 - Switch valve; 10 - Main circuit pressure regulating baffle; 11 - Rotating cylinder housing; 12 - Rotating cylinder; 13 - Main body housing; 14 - Thin cylinder; 15 - Barrier sheet; 16 - Mounting plate; 17 - Module housing; 18 - Circular support plate; 19 - Housing; 20 - Upper shell; 21 - Rotating connecting rod; 22 - Rotating baffle; 23 - Support plate member Detailed implementation manners

[0044] Next, we will further elaborate on an integrated multi-gas emission module that can be used in a wafer drying system according to the present invention in combination with the accompanying drawings and specific embodiments, in order to more clearly understand its structural composition and working mode, but the protection scope of the present invention cannot be limited thereby.

[0045] As a multi-gas emission integrated module that can be used in a wafer drying system, the present invention is mainly to achieve the integrated emission of multiple gases in the wafer drying system, effectively controlling the gas discharge at different stages of the drying process and integrating the complex exhaust process on a single module. Therefore, as an integrated exhaust control method that can compound and integrate multiple drying processes, it cooperates with the actual operating drying module to solve the exhaust problem during wafer drying.

[0046] As Figure 1 shown, as a conventional technology, in the existing wafer drying system, there are a main body A as a framework, an isopropyl alcohol bubbler B, and a drying tank body C. The multi-gas emission integrated module of the present invention is arranged in the wafer drying system. As Figure 2 and Figure 3 shown, the structural composition of the multi-gas emission integrated module includes:

[0047] A slot exhaust port E, connected to the drying tank body C through a pipeline, in which there is an exhaust on-off baffle, and the exhaust on-off baffle is specifically a circular support plate 18. The pipeline usually selects a hose D;

[0048] A main body exhaust port G, which is open in the main body A and has a main body pressure regulating baffle 22 therein;

[0049] A bubbler exhaust port F, connected to the isopropyl alcohol bubbler B through a pipeline, and the pipeline usually selects a hose D;

[0050] A housing 19, on which the slot exhaust port E, the main body exhaust port G, and the bubbler exhaust port F are respectively arranged. There is a cylinder 14 in the housing 19, and the cylinder 14 is connected to the circular support plate 18 serving as the exhaust on-off baffle to control the on-off of the slot exhaust port E by using the circular support plate 18;

[0051] A front connecting pipeline 7, one end of which is connected to the air outlet of the housing 19, and the other end is connected to a middle air regulating pipeline 3. There is a main circuit pressure regulating baffle 10 arranged in the front connecting pipeline 7;

[0052] A middle air regulating pipeline 3, the intake end of which is connected to the front connecting pipeline 7, and the outlet end of which is connected to an exhaust pipeline 1. There is a rotary cylinder module arranged on the middle air regulating pipeline 3, and the rotary cylinder module is connected to a total circuit on-off baffle 6 arranged in the middle air regulating pipeline 3;

[0053] An exhaust pipeline 1, the intake end of which is connected to the outlet end of the middle air regulating pipeline 3, and the outlet end of which extends outside the wafer drying system and is connected to the exhaust conveying pipeline of the factory service end.

[0054] Furthermore, an upper shell 20 that can be opened, closed, disassembled and assembled is provided on the upper part of the outer shell 19. The bubble generator air outlet F and the main body air outlet G are provided on the upper shell 20, and a tank air outlet E is provided on the side wall of the outer shell 19. A support plate member 23 is provided at the bottom of the outer shell 19, and the outer shell 19 is fixed to the main body A through the support plate member 23. The support plate member 23 serves as a support plate member for the multi-gas emission integration module, ensuring a rigid support function. In the embodiment, two support plate members 23 need to be configured and installed at the mounting hole positions at the bottom of the metal outer shell 19 of the exhaust integration module. In terms of the material selection of the support plate member 23, due to requirements such as rigidity, strength, and tolerance, specifically, stainless steel SS304 is the preferred configuration material.

[0055] A micro cylinder module for blocking gas is provided inside the outer shell 19. The micro cylinder module includes a main body outer shell 13, a cylinder, a blocking piece 15, a mounting plate 16, a module outer shell 17, and a circular support plate 18. The main body outer shell 13 is fixed to the inner wall of the outer shell 19 through the mounting plate 16. The cylinder is provided inside the main body outer shell 13. The cylinder is a thin cylinder 14. A complete protective shell is formed by the main body outer shell 13 and the module outer shell 17 to enclose the thin cylinder 14. The output end of the thin cylinder 14 extends outside the main body outer shell 13 and is connected to the circular support plate 18. The circular support plate 18 is closely connected to the blocking piece 15. The circular support plate 18 and the blocking piece 15 form an air exhaust on-off baffle for opening and closing the tank air outlet.

[0056] Furthermore, the micro cylinder module for blocking gas composed of the main body outer shell 13, the thin cylinder 14, the blocking piece 15, the mounting plate 16, the module outer shell 17, and the circular support plate 18 can block gas to achieve switching and keep the overall system particles. The main body outer shell 13 is installed on the mounting plate 16 to provide accommodation and installation for the overall blocking module. When selecting materials, based on requirements such as rigidity, strength, tolerance, and light weight, an aluminum outer shell AL6061 is the preferred configuration material. As a blocking module, the thin cylinder 14 in the micro cylinder module provides power to block gas to achieve switching and keep the overall system particles. Specifically, the main function of the thin cylinder 14 is to provide a moving path that can move back and forth, so as to form a blocking circular assembly composed of the blocking piece 15 and the circular support plate 18, thereby temporarily blocking the gas entering through the tank air outlet E.

[0057] The above-mentioned barrier sheet 15 is composed of a circular blocking sheet made of polyurethane rubber, meeting requirements such as maintaining complete airtightness and chemical resistance to organic gases. During the blocking operation, good airtightness and blocking performance are maintained at the connection, and it is necessary to have properties such as resistance to volatile gases of organic solvents. It is arranged at the joint of the connecting pipe to achieve the effect of blocking gas, and is locked with bolts and the circular support plate 18. The micro-cylinder module serves as the blocking module, in which the thin cylinder 14 is fixed on one side of the mounting plate 16, and the mounting plate 16 is mounted on one side of the outer shell 19, and the thin cylinder 14 is located inside the outer shell 19. And a square hole for accommodating the installation and removal of the thin cylinder 14 is provided on one side of the outer shell 19. It is required that the outer shell 19 and the mounting plate 16 are installed tightly and sealed. When selecting materials, based on requirements such as rigidity, strength, and tolerance, stainless steel SS304 is the preferred configuration material. A gasket ring is arranged at the joint of the mounting plate 16 and the outer shell 19 to ensure airtightness. The outer shell 19 and the main body outer shell 13 form a complete outer shell group to accommodate the installation of the micro-cylinder 14 therein. When selecting materials for the outer shell 19 and the main body outer shell 13, due to requirements such as rigidity, strength, and tolerance, stainless steel SS304 is the preferred configuration material. The circular support plate 18 is connected to the micro-cylinder 14 to form a circular plate-shaped support member. When selecting the material of the circular support plate 18, due to requirements such as rigidity, strength, and tolerance, stainless steel SS304 is the preferred configuration material.

[0058] A bent pipe is arranged at the front end of the outer shell 19 as the tank exhaust port E, which provides the input of process gases such as the mixed gas of IPA isopropyl alcohol and nitrogen N2 from the drying tank, and the hollow tank of the outer shell 19 can accommodate the micro-cylinder module for blocking gas composed of the main body outer shell 13, the thin cylinder 14, the barrier sheet 15, the mounting plate 16, the module outer shell 17, and the circular support plate 18.

[0059] An upper shell 20 is provided on the upper part of the outer shell 19. There are mainly two pipelines at the upper shell 20: one is for the input of the atmosphere gas of the drying module, connected to the main body exhaust port G, and the other is for the input of the purified micro-particle process gas (high temperature) of the IPA atomization system, which is the mixed gas of IPA isopropyl alcohol and nitrogen N2, and the nitrogen used, connected to the main body exhaust port G. The gas is input into the outer shell 19 through the connecting pipe.

[0060] As a further design, a main body pressure regulating baffle 22 is provided in the main body air outlet G. The main body pressure regulating baffle 22 is connected to a rotating baffle connecting rod 21. One end of the rotating baffle connecting rod 21 extends out of the outer side of the front main body air outlet G and is connected to a switching valve 9 for rotating the baffle angle. On the main body exhaust port G, there is a rotating connecting rod 21 for switching the atmospheric environment gas of the drying module. When switching the atmospheric environment gas of the drying module, it is necessary to open and close through the rotating baffle 22, and open and close through the rotating connecting rod 21 and the manual switching valve 9. When the through-port of the atmospheric environment gas of the rotating baffle 22 in the drying module is not externally connected to a pipeline, a stable negative pressure is formed by controlling the above switching valve 9 at a certain opening degree, and the manual control of the rotating baffle 22 is achieved to meet the required use. In terms of material selection, due to requirements such as rigidity, strength, and tolerance, stainless steel SS304 is the preferred configuration material.

[0061] As a further design, an interface for installing an exhaust on-off sensor is also provided on the trough air outlet E, and an interface for installing a plant exhaust pressure sensor is also provided on the discharge pipe 1. The use of the exhaust on-off sensor is to detect the pressure inside the trough air outlet E, and the plant exhaust pressure sensor is used to detect the wind pressure inside the discharge pipe 1, so as to achieve precise control.

[0062] The main circuit pressure regulating baffle 10 in the above-mentioned front connecting pipe 7 is connected to a rotating baffle connecting rod 8. One end of the rotating baffle connecting rod 8 extends out of the outer side of the front connecting pipe 7 and is connected to a rotating baffle switching valve 9. By manually rotating the rotating baffle switching valve 9, the main circuit pressure regulating baffle 10 is driven to rotate, so as to achieve unobstructed or closed in the front connecting pipe 7. When the main circuit pressure regulating baffle 10 is constructed according to the pipe shape, it is necessary to maintain the airtightness and low dust generation characteristics during the rotation process. There is a special air hole on the main circuit pressure regulating baffle 10 to keep the air flowing during the rotation process to prevent the gas from leaking outwards. In terms of material selection, due to requirements such as rigidity, strength, and tolerance, stainless steel SS304 is the preferred configuration material. The switching valve 9 is used as a manual switch, and manual operation is used to ensure the opening and closing degree of the main circuit pressure regulating baffle 10. A space that just allows rotation and opening and closing in the front connecting pipe 7 is formed by using the main circuit pressure regulating baffle 10. The rotation of the main circuit pressure regulating baffle 10 is driven by the opening and closing of the switching valve 9 to achieve the control of the exhaust flow rate and rate. In terms of material selection, due to requirements such as rigidity, strength, and tolerance, stainless steel SS304 is the preferred configuration material. At least one annular gasket 2 is provided between the front connecting pipe 7 and the air outlet of the outer shell 19. The annular gasket 2 is also made of fluorocarbon rubber, aiming to achieve full sealing and avoid air leakage.

[0063] The above-mentioned middle air-conditioning pipeline 3 is also designed in the configuration of an annular exhaust pipeline, and in terms of shape construction, it can be connected to the exhaust conveying pipeline at the discharge end of the discharge pipeline 1. At the same time, it is configured with the front replacement connection pipeline 7 to connect the annular gasket 2. Here, the annular gasket 2 is also a fluorocarbon rubber gasket, and corresponding bolts are locked on the connecting pipeline. In terms of material selection, stainless steel SS304 is the preferred configuration material due to requirements such as rigidity, strength, and tolerance.

[0064] In the above-mentioned multi-gas emission integrated module that can be used in a wafer drying system, at least one annular gasket 2 is provided between the discharge pipeline 1 and the middle air-conditioning pipeline 3. The annular gasket 2 is made of fluorocarbon rubber, aiming to achieve full sealing and avoid air leakage. The discharge pipeline 1 is configured as an annular cylindrical exhaust pipeline, and when constructing the shape, it needs to be connected to the exhaust conveying pipeline at the factory end. The fluorocarbon rubber gasket configured as the annular gasket 2 is connected to the middle air-conditioning pipeline 3, and the corresponding bolts on the connecting pipeline are locked. When selecting materials, certain rigidity, strength, and tolerance are required, and stainless steel SS304 is the preferred configuration material. The annular gasket 2 is a fluorocarbon rubber gasket, which maintains good airtightness and barrier properties in the connection of the pipeline, and needs to have properties such as resistance to volatile gases of organic solvents, etc., and is configured at the joint of the connecting pipeline to achieve the effect of blocking gas. Fluororubber FKM is a fully synthetic high molecular elastomer material, in which the carbon atoms in the main chain or side chain are bonded to fluorine atoms. Compared with other rubber materials, fluorinated rubber has higher tensile strength and structural strength in physical properties, is heat-resistant, and can work for a long time in an environment of 230 °C under static sealing, and the instantaneous high temperature can reach 250 °C. In terms of chemical resistance, fluorinated rubber has excellent corrosion resistance, and its corrosion resistance to organic solvents, inorganic acids, strong oxidants, and oils is better than other types of rubber.

[0065] The rotary cylinder module includes a rotary cylinder 12, a baffle connecting rod 5, and a rotary cylinder housing 11. The output end of the rotary cylinder 12 is connected to the baffle connecting rod 5, and the baffle connecting rod 5 extends into the central air-conditioning pipeline 3 to connect the main circuit on-off baffle 6, so as to realize the smoothness or closing of the main circuit by rotating the main circuit on-off baffle 6. The rotary cylinder housing 11 covers the outside of the rotary cylinder 12 for the purpose of protecting the rotary cylinder 12. By providing four rotary cylinder support columns 4 on the central air-conditioning pipeline 3, the rotary cylinder support columns 4 are mainly used to install the rotary cylinder 12. There are four hole positions on the platform at the bottom of the rotary cylinder 12 for locking. The baffle connecting rod 5 is mainly used to connect the rotary cylinder 12 and the main circuit on-off baffle 6, and its purpose is to transmit the power of the rotary cylinder 12 so as to drive the main circuit on-off baffle 6 to rotate to realize the on-off and controllable opening and closing of the main circuit. During design, the tubular structure needs to maintain the airtightness and low dust generation characteristics during the rotation process. There is a special air hole on the main circuit on-off baffle 6 to keep the air flowing during the rotation process to prevent the gas from leaking outwards. In terms of material selection, due to requirements such as rigidity, strength, and tolerance, stainless steel SS304 is the preferred configuration material.

[0066] The above-mentioned rotary cylinder housing 11 provides the accommodation protection and installation of the rotary cylinder 12 installed on the overall central pipeline 3. In terms of material selection, due to requirements such as rigidity, strength, tolerance, and lightweight, the aluminum housing AL6061 is the preferred configuration material. The rotary cylinder 12 is installed on the central air-conditioning pipeline 3 and connects the baffle connecting rod 5 in the central air-conditioning pipeline 3 and the main circuit on-off baffle 6. The opening and closing angle control of the rotation process can be adjusted through the rotary cylinder 12, so as to achieve the flow control and rate control of the discharged gas during the exhaust process, and the opening gap of the opening and closing corresponds to the discharged flow rate and relative rate.

[0067] In the working state of the integrated module of the present invention, the process gas in the drying tank body, such as the mixed gas of IPA isopropyl alcohol and N2 nitrogen, will be controlled to be synchronously opened when IPA or N2 is sprayed in, and its gas stop and closing avoid the function of temporarily blocking and isolating by negative pressure suction of particles, and are realized by the cylinder pushing the circular support plate 18 as the sealing plate. The passage of the purified and finely atomized process gas, the mixed gas of IPA isopropyl alcohol and N2 nitrogen (high temperature) of the IPA atomization system is always open. Usually, only negative pressure is created in the IPA box to avoid accidental leakage. When the IPA spray pipeline is switched from the IPA&N2 mixed gas to N2, the pipeline of the mixed gas will be connected to the multi-gas discharge integrated module, so as to release the residual pressure in the quartz bubbler.

[0068] For the multi-gas discharge integrated module of the present invention, its working state cooperates with the working of the wafer drying system. The above-mentioned working state specifically includes a standby state, a tank body working state, a main body positive pressure state, and a shutdown state, where:

[0069] Figure 4 As the system schematic diagram, it shows the pipeline and valve body connections of the integrated module for multi-gas emissions. Among them, the exhaust port F of the bubbler is used as a normally open port for the exhaust of the IPA Bubbler. The exhaust port E of the tank body realizes the on-off of the exhaust of the drying tank Bath through the micro-cylinder module as the valve body DUMP4. The rotary baffle 22, rotary connecting rod 21 and the switch valve 9 of the rotary baffle arranged on the main body exhaust port G are used as the valve body DUMP3 to realize the pressure regulation of the main body Body. And the main circuit pressure regulation baffle 10 and the switch valve 9 arranged on the front connecting pipeline 7 are used as the valve body DUMP2 to realize the pressure regulation of the main circuit. The rotary cylinder module and the total circuit on-off baffle 6 on the middle gas regulation pipeline 3 are used as the valve body DUMP1 to realize the on-off of the total circuit. That is, the exhaust port F of the bubbler, the exhaust port E of the tank body and the main body exhaust port G are arranged on the outer shell 19, and are partially or fully converged as needed, and then discharged through the main circuit. Special valve bodies are arranged on the main circuit to realize pressure regulation and on-off control.

[0070] As Figure 5 shown, in the standby state, the valve body DUMP3 on the main body exhaust port G is half-open for ventilation. The exhaust port F of the bubbler is used as a normally open port to realize the exhaust of the isopropyl alcohol bubbler IPA Bubbler. The exhaust port E of the tank body is closed by using the valve body DUMP4. The drying tank is in a standby working state. The main circuit pressure regulation baffle 10 arranged on the front connecting pipeline 7 makes the valve body DUMP2 half-open to realize controllable ventilation, and the total circuit on-off baffle 6 is used to open the valve body DUMP1 for ventilation, so as to realize the continuous exhaust of the isopropyl alcohol bubbler and the main body.

[0071] As Figure 6 shown, when the drying tank is in the working state, the valve body DUMP3 on the main body exhaust port G is half-open for ventilation. The exhaust port F of the bubbler is used as a normally open port to realize the exhaust of the isopropyl alcohol bubbler. The exhaust port E of the tank body opens the valve body DUMP4 to realize the exhaust of the BATH exhaust port of the drying tank. The main circuit pressure regulation baffle 10 arranged on the front connecting pipeline 7 makes the valve body DUMP2 half-open to realize controllable exhaust, and the total circuit on-off baffle 6 is used to open the valve body DUMP1 to ventilate the total circuit, so as to realize the full operation of the drying tank, isopropyl alcohol bubbler and main body exhaust.

[0072] As Figure 7As shown, when the main body is in a positive pressure state, the valve body DUMP3 on the main body exhaust port G is closed, and the bubbler exhaust port F serves as a normally open port to realize the exhaust of the isopropyl alcohol bubbler. The tank exhaust port E opens the valve body DUMP4 to realize the exhaust of the BATH exhaust port of the drying tank. The main circuit pressure regulating baffle 10 provided on the front connecting pipe 7 makes the valve body DUMP2 open half-way to realize controllable exhaust. The main circuit on-off baffle 6 is used to open the valve body DUMP1 to realize the ventilation of the main circuit, so as to realize the exhaust of the isopropyl alcohol bubbler IPA Bubbler and the drying tank Bath.

[0073] As Figure 8 shown, in the shutdown state, the valve body DUMP3 on the main body exhaust port G is closed to achieve sealing, the bubbler exhaust port F is closed, the tank exhaust port E uses the valve body DUMP4 to close to achieve sealing, the main circuit pressure regulating baffle 10 is closed, and the main circuit on-off baffle 6 closes the valve body DUMP1 to achieve the closure of the main circuit. The exhaust of the drying tank, the isopropyl alcohol bubbler and the main body all stops, and gas entry is prevented.

[0074] There is no doubt that the above is only a limited implementation method of the multi-gas emission integrated module of this invention patent that can be used in the wafer drying system. In addition to this, there are also other similar structural forms and working processes. All in all, the protection scope of the present invention also includes other transformations and substitutions that are obvious to those skilled in the art.

Claims

1. A multi-gas emission integrated module that can be used in a wafer drying system. In the wafer drying system, there is a main body, a drying tank, and an isopropyl alcohol bubbler. It is characterized in that, The multi-gas emission integrated module is arranged in the wafer drying system, and its structure includes: The slot exhaust port is connected to the drying slot through a pipeline, and an exhaust on-off baffle is arranged therein. The main body exhaust port is openly arranged in the main body, and a main body pressure regulating baffle is arranged therein. The bubbler exhaust port is connected to the isopropyl alcohol bubbler through a pipeline. The outer shell, the slot exhaust port, the main body exhaust port and the bubbler exhaust port are respectively arranged on the outer shell. A cylinder is arranged in the outer shell, and the cylinder is connected to the exhaust on-off baffle. A micro-cylinder module for blocking gas is arranged in the outer shell. The micro-cylinder module includes a main body outer shell, a cylinder, a barrier sheet, a mounting plate, a module outer shell and a circular support plate. The main body outer shell is fixed on the inner wall of the outer shell through the mounting plate. The cylinder is arranged in the main body outer shell. The cylinder is a thin cylinder. The complete outer shell is formed by the main body outer shell and the module outer shell to enclose the thin cylinder. The output end of the thin cylinder extends out of the outside of the module outer shell and is connected to the circular support plate. The circular support plate is closely connected to the barrier sheet. The circular support plate and the barrier sheet form an exhaust on-off baffle for opening and closing the slot exhaust port. The front connecting pipeline, one end of which is connected to the air outlet of the outer shell, and the other end is connected to the middle air regulating pipeline. A main circuit pressure regulating baffle is arranged in the front connecting pipeline. The middle air regulating pipeline, the intake end of which is connected to the front connecting pipeline, and the outlet end is connected to the discharge pipeline. A rotary cylinder module is arranged thereon. The rotary cylinder module is connected to the total circuit on-off baffle arranged in the middle air regulating pipeline. The discharge pipeline, the air outlet end of the discharge pipeline extends out of the wafer drying system and is connected to the exhaust conveying pipeline of the factory service end.

2. The multi-gas emission integrated module that can be used in a wafer drying system according to claim 1, wherein At least one annular gasket is arranged between the discharge pipeline and the middle air regulating pipeline. The annular gasket is made of fluorocarbon rubber.

3. The multi-gas emission integrated module that can be used in a wafer drying system according to claim 1, wherein The rotary cylinder module includes a rotary cylinder, a baffle connecting rod and a rotary cylinder outer shell. The output end of the rotary cylinder is connected to the baffle connecting rod. The baffle connecting rod extends into the middle air regulating pipeline and is connected to the total circuit on-off baffle. The rotary cylinder outer shell covers the outside of the rotary cylinder.

4. The multi-gas emission integrated module as claimed in claim 1, which can be used in a wafer drying system, is characterized in that, The main circuit pressure regulating baffle in the front connecting pipeline is connected to a rotary baffle connecting rod. One end of the rotary baffle connecting rod extends out of the outside of the front connecting pipeline and is connected to a rotary baffle switch valve.

5. The multi-gas emission integrated module as claimed in claim 1, which can be used in a wafer drying system, is characterized in that At least one annular gasket is arranged between the front connecting pipeline and the air outlet of the outer shell. The annular gasket is made of fluorocarbon rubber.

6. The multi-gas emission integrated module as claimed in claim 1, which can be used in a wafer drying system, is characterized in that, A main body pressure regulating baffle is arranged in the main body exhaust port. The main body pressure regulating baffle is connected to a rotary baffle connecting rod. One end of the rotary baffle connecting rod extends out of the outside of the front connecting pipeline and is connected to a rotary baffle switch valve.

7. The multi-gas emission integrated module as claimed in claim 1, which can be used in a wafer drying system, is characterized in that The upper part of the outer shell is provided with an openable upper shell. The bubbler exhaust port and the main body exhaust port are arranged on the upper shell. The slot exhaust port is arranged on the side wall of the outer shell.

8. The multi-gas emission integrated module according to claim 1, which can be used in a wafer drying system, is characterized in that, A support plate member is arranged at the bottom of the outer shell. The outer shell is fixed on the main body through the support plate member.

9. The multi-gas emission integrated module according to claim 1, which can be used in a wafer drying system, is characterized in that An interface for installing an exhaust on-off sensor is further arranged on the slot exhaust port. An interface for installing a factory service exhaust pressure sensor is further arranged on the discharge pipeline.

10. The multi-gas emission integrated module as claimed in claim 1, which can be used in a wafer drying system, is characterized in that, Its working states include a standby state, a tank working state, a main body positive pressure state, and a shutdown state, where: In the standby state, the main body exhaust port serves as a normally open ventilation port, the bubbler exhaust port is semi-open to achieve the exhaust of the isopropyl alcohol bubbler, the tank exhaust port is closed, and the continuous exhaust of the isopropyl alcohol bubbler and the main body is achieved; In the tank working state, the main body exhaust port serves as a normally open ventilation port, the bubbler exhaust port is semi-open to achieve the exhaust of the isopropyl alcohol bubbler, the tank exhaust port is open, the main circuit pressure regulating baffle is semi-open, and the total circuit on-off baffle is open, so that the exhaust of the tank, the isopropyl alcohol bubbler, and the main body all operate; In the main body positive pressure state, the main body exhaust port serves as a normally open ventilation port, the bubbler exhaust port is closed, the tank exhaust port is open, the main circuit pressure regulating baffle is semi-open, and the total circuit on-off baffle is open, so as to achieve the exhaust of the tank and the main body; In the shutdown state, the main body exhaust port is blocked, the bubbler exhaust port is closed, the tank exhaust port is closed, the main circuit pressure regulating baffle is closed, and the total circuit on-off baffle is closed. The exhaust of the tank, the isopropyl alcohol bubbler, and the main body all stops, and gas entry is prevented.

11. A wafer drying system, characterized in that, The multi-gas emission integrated module according to any one of claims 1-10 is provided in the wafer drying system.

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