A calibration device for a particle inspection machine

Abstract

The present invention discloses a calibration device for a particle inspection machine, including a light source calibration frame assembly of the particle inspection machine. A plurality of light source calibration target assemblies and tightening assemblies are arranged on the light source calibration frame assembly of the particle inspection machine. The light source calibration target assemblies and the tightening assemblies are arranged on the light source calibration frame assembly of the particle inspection machine at intervals. The light source calibration target assemblies of the particle inspection machine form a multi-point light source calibration target structure on the light source calibration frame assembly of the particle inspection machine. The tightening assemblies form a tightening structure for the transmission belt to be transmitted between the light source calibration target assemblies of the particle inspection machine. When in use, during calibration, a plurality of light source calibration target assemblies of the particle inspection machine are arranged in a straight line on the light source calibration frame assembly of the particle inspection machine. At the same time, through the synchronous rotation of the plurality of light source calibration target assemblies of the particle inspection machine, the orientation of the calibration surface can be adjusted.

Description

Technical Field

[0001] The present invention belongs to the technical field of TFT-LCD glass substrate production, and particularly relates to a calibration device for a particle inspection machine. Background Art

[0002] Liquid crystal glass is also called electro-controlled liquid crystal glass, electro-controlled dimming glass, or dimming glass. It gets its name from the core material of the dimming glass - the liquid crystal film. Liquid crystal glass is a high-tech optoelectronic glass product formed by sandwich encapsulating the liquid crystal film through high temperature and high pressure. Users can control the arrangement of liquid crystal molecules by applying or not applying an electric current, thereby achieving the ultimate goal of controlling the transparent and opaque states of the glass. The liquid crystal film in the middle layer serves as the functional material of the dimming glass.

[0003] The prior art has the following problems: In the production of liquid crystal glass, it is necessary to detect whether there are stains, protruding particles, cracks, scratches, etc. on the surface, and to detect whether there are defects or other factors causing surface defects of the product. During the use of the particle inspection machine, it is usually necessary to calibrate it with a positioning mechanism for the particle inspection machine. However, during the calibration process of the existing positioning mechanism for calibrating the particle inspection machine, it is not easy to position it in a timely manner, resulting in easy deviation. Summary of the Invention

[0004] To solve the problems raised in the above background art, the present invention provides a calibration device for a particle inspection machine, which has the characteristic of convenient calibration.

[0005] To achieve the above object, the present invention provides the following technical solution: A calibration device for a particle inspection machine, including a calibration rack assembly for the particle inspection machine light source. A plurality of calibration target assemblies and tightening assemblies for the particle inspection machine light source are arranged on the calibration rack assembly for the particle inspection machine light source. The calibration target assemblies and tightening assemblies for the particle inspection machine light source are arranged on the calibration rack assembly for the particle inspection machine light source at intervals. The calibration target assemblies for the particle inspection machine light source form a multi-point light source calibration target structure on the calibration rack assembly for the particle inspection machine light source, and the tightening assemblies form a tightening structure for the transmission belt transmission between the calibration target assemblies for the particle inspection machine light source;

[0006] The calibration rack assembly for the particle inspection machine light source includes a calibration rack for the particle inspection machine light source. Two rotating shaft rods are rotatably arranged at the top of the calibration rack for the particle inspection machine light source. A driving gear is fixedly arranged at the top of each rotating shaft rod. An expansion arm rod is rotatably arranged between the two driving gears through a shaft pin. A front base plate is fixedly arranged at the front end of the calibration rack for the particle inspection machine light source. A waist-shaped hole for base plate installation is arranged on the front base plate. A rear top plate is fixedly arranged at the rear end of the calibration rack for the particle inspection machine light source. A guiding toothed plate is fixedly arranged on the rear top plate. A driving motor is arranged at the bottom of the calibration rack for the particle inspection machine light source.

[0007] Preferably, the particle inspection machine light source calibration target assembly includes a particle inspection machine light source calibration target. A support arm rod is fixedly arranged at the bottom of the particle inspection machine light source calibration target. Two transmission belt pulleys are fixedly arranged at the top of the support arm rod, and a driven gear and a fixed bottom shaft platform are fixedly arranged at the bottom of the support arm rod;

[0008] The tightening assembly includes a support cross arm frame. Arm frame end platforms are fixedly arranged at both ends of the support cross arm frame. Outer support arm tubes are fixedly arranged on the arm frame end platforms. An inner support arm rod is telescopically arranged inside the outer support arm tube. An arm rod support end platform is fixedly arranged at the front end of the inner support arm rod. A tightening roller is rotatably arranged on the arm rod support end platform.

[0009] Preferably, the particle inspection machine light source calibration target assembly and the tightening assembly are arranged at intervals on the arm body of the telescopic arm rod. The fixed bottom shaft platform is rotatably arranged at the cross arm body in the center of the telescopic arm rod through a shaft pin. The middle part of the support cross arm frame is rotatably arranged at the cross arm body in the center of the telescopic arm rod through a shaft pin. The transmission belt is arranged at the transmission belt pulley on the particle inspection machine light source calibration target assembly. Multiple groups of particle inspection machine light source calibration target assemblies are connected in series rotationally through the transmission belt.

[0010] Preferably, the rear arm body of the telescopic arm rod is rotatably arranged on two driving gears through shaft pins. The two driving gears are meshed with each other, and the driving motor drives one driving gear to rotate.

[0011] Preferably, the driven gear on the particle inspection machine light source calibration target assembly is meshed with the guiding tooth plate on the rear end top seat plate. A meshing structure for walking is formed between the driven gear and the guiding tooth plate, and the driven gear meshes and walks inside the guiding tooth plate.

[0012] Preferably, tightening rollers are arranged at both ends of the support cross arm frame. The two tightening rollers are arranged on both sides of the transmission belt. A top push spring is arranged inside the outer support arm tube. An outer top structure is formed between the outer support arm tube and the inner support arm rod. The tightening roller forms an inner push rotation structure inside the arm frame end platform.

[0013] Preferably, the two tightening rollers respectively abut against both sides of the transmission belt. Through the top push of the tightening assembly, the transmission belt forms a self-tightening conveyor belt structure between two groups of particle inspection machine light source calibration target assemblies.

[0014] Preferably, the particle inspection machine light source calibration machine frame assembly is fixed on the reserved position of the particle inspection machine through fastening bolts and the base plate installation waist holes on the front end base plate. By driving one driving gear to rotate through the driving motor and the synchronous tooth movement of the two driving gears, the telescopic arm rod forms an outer expansion and rear retraction arm body structure.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: When the present invention is in use, the light source calibration rack assembly of the particle inspection machine is fixed on the reserved position of the particle inspection machine through fastening bolts and the base plate mounting waist holes on the front base plate. At this time, multiple groups of light source calibration target assemblies and tightening assemblies are provided on the light source calibration rack assembly of the particle inspection machine. The light source calibration target assemblies and tightening assemblies of the particle inspection machine are arranged at intervals on the light source calibration rack assembly of the particle inspection machine. The light source calibration target assemblies of the particle inspection machine form a multi-point light source calibration target structure on the light source calibration rack assembly of the particle inspection machine. The light source of the particle inspection machine is targeted and calibrated through multiple groups of light source calibration target assemblies of the particle inspection machine. In actual use, a driving gear is driven to rotate by a driving motor, and the synchronous tooth movement of the two driving gears causes the telescopic arm rod to form an outstretched and retracted arm body structure. By fully outstretching the telescopic arm rod, multiple groups of light source calibration target assemblies of the particle inspection machine form a linear multi-point calibration target position on the light source calibration rack assembly of the particle inspection machine. When calibrating, multiple groups of light source calibration target assemblies of the particle inspection machine are arranged in a straight line on the light source calibration rack assembly of the particle inspection machine. In actual use of the present invention, the number of groups of multiple groups of light source calibration target assemblies of the particle inspection machine is large. The light source calibration target assemblies and tightening assemblies of the particle inspection machine of the present invention are arranged at intervals on the arm body of the telescopic arm rod. The fixed bottom shaft platform is rotatably arranged at the cross arm body in the center of the telescopic arm rod through a shaft pin. The middle part of the support cross arm frame is rotatably arranged at the cross arm body in the center of the telescopic arm rod through a shaft pin. The conveyor belt is arranged at the conveyor belt pulley on the light source calibration target assembly of the particle inspection machine. Multiple groups of light source calibration target assemblies of the particle inspection machine are connected in series and rotated through the conveyor belt. At this time, the driven gear on the light source calibration target assembly of the particle inspection machine meshes with the guide tooth plate on the rear end top seat plate, and a walking meshing structure is formed between the driven gear and the guide tooth plate. The driven gear meshes and walks inside the guide tooth plate. In actual use, through this method, the synchronous rotation of multiple groups of light source calibration target assemblies of the particle inspection machine can be realized, and the orientation of the calibration surface can be adjusted. When not in use, multiple groups of light source calibration target assemblies of the particle inspection machine can be rotated synchronously and stacked together. Through this method, the volume of the device can be minimized, which is convenient for storage when idle. At the same time, tightening rollers are provided at both ends of the support cross arm frame. The two tightening rollers are arranged on both sides of the conveyor belt. A top push spring is arranged inside the outer support arm tube, and an outer top structure is formed between the outer support arm tube and the inner support arm rod. The tightening rollers form an inner push rotation structure inside the arm frame end platform. The two tightening rollers respectively abut against both sides of the conveyor belt. Through the top push of the tightening assembly, the conveyor belt forms a self-tightening conveyor belt structure between two groups of light source calibration target assemblies of the particle inspection machine. Through this structure, when the telescopic arm rod extends and retracts, the conveyor belt can always be in a tight structure between two groups of light source calibration target assemblies of the particle inspection machine, ensuring the actual use function of the conveyor belt between two groups of light source calibration target assemblies of the particle inspection machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a perspective view of the present invention;

[0017] Figure 2 is a perspective view of the present invention from another perspective;

[0018] Figure 3 is an exploded view of the present invention;

[0019] Figure 4 is a perspective view of the light source calibration rack assembly of the particle inspection machine of the present invention;

[0020] Figure 5 is a perspective view of the light source calibration target assembly of the particle inspection machine of the present invention;

[0021] Figure 6 is a perspective view of the tightening assembly of the present invention;

[0022] In the figure: 100, light source calibration rack assembly of the particle inspection machine; 101, light source calibration rack of the particle inspection machine; 102, rotating shaft rod; 103, driving gear; 104, driving motor; 105, front base plate; 106, waist-shaped holes for base plate installation; 107, rear top seat plate; 108, guiding toothed plate; 109, telescopic arm rod; 200, light source calibration target assembly of the particle inspection machine; 201, light source calibration target of the particle inspection machine; 202, support arm rod; 203, conveyor belt; 204, driven gear; 205, fixed bottom shaft platform; 300, tightening assembly; 301, support cross arm frame; 302, end platform of the arm frame; 303, outer support arm tube; 304, inner support arm rod; 305, support end platform of the arm rod; 306, tightening roller; 400, conveyor belt. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0024] Please refer to Figure 1-6, the present invention provides the following technical solution: A calibration device for a particle inspection machine, including a particle inspection machine light source calibration frame assembly 100, on which multiple groups of particle inspection machine light source calibration target assemblies 200 and tightening assemblies 300 are arranged. The particle inspection machine light source calibration target assemblies 200 and the tightening assemblies 300 are arranged at intervals on the particle inspection machine light source calibration frame assembly 100. The particle inspection machine light source calibration target assemblies 200 form a multi-point light source calibration target structure on the particle inspection machine light source calibration frame assembly 100, and the tightening assemblies 300 form a pressing structure for the transmission of the conveyor belt 400 between the particle inspection machine light source calibration target assemblies 200;

[0025] The particle inspection machine light source calibration frame assembly 100 includes a particle inspection machine light source calibration frame 101. At the top of the particle inspection machine light source calibration frame 101, two rotating shaft rods 102 are rotatably arranged. At the top of the rotating shaft rods 102, driving gears 103 are fixedly arranged. Between the two driving gears 103, a telescopic arm rod 109 is rotatably arranged through a shaft pin. At the front end of the particle inspection machine light source calibration frame 101, a front base plate 105 is fixedly arranged. On the front base plate 105, a base plate mounting waist hole 106 is arranged. At the rear end of the particle inspection machine light source calibration frame 101, a rear end top plate 107 is fixedly arranged. On the rear end top plate 107, a guide tooth plate 108 is fixedly arranged. At the bottom of the particle inspection machine light source calibration frame 101, a driving motor 104 is arranged.

[0026] In this embodiment, preferably, the particle inspection machine light source calibration target assembly 200 includes a particle inspection machine light source calibration target 201. At the bottom of the particle inspection machine light source calibration target 201, a support arm rod 202 is fixedly arranged. At the top of the support arm rod 202, two conveyor belt pulleys 203 are fixedly arranged. And at the bottom of the support arm rod 202, a driven gear 204 and a fixed bottom shaft platform 205 are fixedly arranged;

[0027] The tightening assembly 300 includes a support cross arm frame 301. At both ends of the support cross arm frame 301, arm frame end platforms 302 are fixedly arranged. On the arm frame end platforms 302, outer support arm tubes 303 are fixedly arranged. Inside the outer support arm tubes 303, inner support arm rods 304 are telescopically arranged. At the front end of the inner support arm rods 304, an arm rod support end platform 305 is fixedly arranged. On the arm rod support end platform 305, a tightening roller 306 is rotatably arranged.

[0028] In this embodiment, preferably, the light source calibration target assembly 200 and the tightening assembly 300 of the particle inspection machine are arranged at intervals on the arm body of the telescopic arm rod 109. The fixed bottom shaft platform 205 is rotatably arranged at the cross-arm body in the center of the telescopic arm rod 109 through a shaft pin. The middle part of the supporting cross-arm frame 301 is rotatably arranged at the cross-arm body in the center of the telescopic arm rod 109 through a shaft pin. The conveyor belt 400 is arranged at the conveyor belt pulley 203 on the light source calibration target assembly 200 of the particle inspection machine. Multiple groups of light source calibration target assemblies 200 of the particle inspection machine are connected in series and rotationally through the conveyor belt 400.

[0029] In this embodiment, preferably, the rear end arm body of the telescopic arm rod 109 is rotatably arranged on two driving gears 103 through shaft pins. The two driving gears 103 are meshed with each other, and the driving motor 104 drives one driving gear 103 to rotate.

[0030] In this embodiment, preferably, the driven gear 204 on the light source calibration target assembly 200 of the particle inspection machine is meshed with the guide tooth plate 108 on the rear end top seat plate 107. A walking meshing structure is formed between the driven gear 204 and the guide tooth plate 108, and the driven gear 204 meshes and walks inside the guide tooth plate 108.

[0031] In this embodiment, preferably, tightening rollers 306 are arranged at both ends of the supporting cross-arm frame 301. The two tightening rollers 306 are arranged on both sides of the conveyor belt 400. A top push spring is arranged inside the outer support arm tube 303. An outer top structure is formed between the outer support arm tube 303 and the inner support arm rod 304. The tightening roller 306 forms an inner push and rotation structure inside the arm frame end platform 302.

[0032] In this embodiment, preferably, the two tightening rollers 306 respectively abut against both sides of the conveyor belt 400. Through the top push of the tightening assembly 300, the conveyor belt 400 forms a self-tightening conveyor belt structure between two groups of light source calibration target assemblies 200 of the particle inspection machine.

[0033] In this embodiment, preferably, the light source calibration machine frame assembly 100 of the particle inspection machine is fixed on the reserved position of the particle inspection machine through fastening bolts and the base plate mounting waist holes 106 on the front end base plate 105. By driving one driving gear 103 to rotate through the driving motor 104 and the synchronous tooth movement of the two driving gears 103, the telescopic arm rod 109 forms an outstretched and retracted arm body structure.

[0034] Working principle and usage process of the present invention: When the present invention is in use, the light source calibration rack assembly 100 of the particle inspection machine is fixed on the reserved position of the particle inspection machine through fastening bolts and the base plate installation waist holes 106 on the front base plate 105. At this time, multiple groups of light source calibration target assemblies 200 and tightening assemblies 300 are provided on the light source calibration rack assembly 100 of the particle inspection machine. The light source calibration target assemblies 200 and the tightening assemblies 300 are arranged at intervals on the light source calibration rack assembly 100 of the particle inspection machine. The light source calibration target assemblies 200 of the particle inspection machine form a multi-point light source calibration target structure on the light source calibration rack assembly 100 of the particle inspection machine. The light source of the particle inspection machine is targeted and calibrated through multiple groups of light source calibration target assemblies 200 of the particle inspection machine. During actual use, a driving gear 103 is driven to rotate by a driving motor 104, and the synchronous tooth movement of the two driving gears 103 causes the telescopic arm rod 109 to form an outstretched and retracted arm body structure. Through the complete outstretching of the telescopic arm rod 109, multiple groups of light source calibration target assemblies 200 of the particle inspection machine form a linear multi-point calibration target position on the light source calibration rack assembly 100 of the particle inspection machine. When calibrating, multiple groups of light source calibration target assemblies 200 of the particle inspection machine are arranged in a straight line on the light source calibration rack assembly 100 of the particle inspection machine. During actual use of the present invention, the number of groups of multiple groups of light source calibration target assemblies 200 of the particle inspection machine is large. The light source calibration target assemblies 200 and the tightening assemblies 300 of the present invention are arranged at intervals on the arm body of the telescopic arm rod 109. The fixed bottom shaft platform 205 is rotatably arranged at the cross arm body in the center of the telescopic arm rod 109 through a shaft pin. The middle part of the support cross arm frame 301 is rotatably arranged at the cross arm body in the center of the telescopic arm rod 109 through a shaft pin. The conveyor belt 400 is arranged at the conveyor belt pulley 203 on the light source calibration target assembly 200 of the particle inspection machine. Multiple groups of light source calibration target assemblies 200 of the particle inspection machine are connected in series and rotated through the conveyor belt 400. At this time, the driven gear 204 on the light source calibration target assembly 200 of the particle inspection machine meshes with the guide tooth plate 108 on the rear end top seat plate 107, and a walking meshing structure is formed between the driven gear 204 and the guide tooth plate 108. The driven gear 204 meshes and walks inside the guide tooth plate 108. During actual use, through this method, the synchronous rotation of multiple groups of light source calibration target assemblies 200 of the particle inspection machine can be realized, and the orientation of the calibration surface can be adjusted. When not in use, multiple groups of light source calibration target assemblies 200 of the particle inspection machine can be rotated synchronously and folded and leaned against each other. Through this method, the volume of the device can be minimized, which is convenient for storage when idle. At the same time, tightening rollers 306 are provided at both ends of the support cross arm frame 301. The two tightening rollers 306 are arranged on both sides of the conveyor belt 400. A top push spring is arranged inside the outer support arm tube 303, and an outer top structure is formed between the outer support arm tube 303 and the inner support arm rod 304. The tightening rollers 306 form an inner push rotation structure inside the arm frame end platform 302.Two tightening rollers 306 are respectively abutted against both sides of the conveyor belt 400. Through the pushing of the tightening assembly 300, the conveyor belt 400 forms a self-tightening conveyor belt structure between the two groups of particle inspection machine light source calibration target assemblies 200. With this structure, when the telescopic arm 109 extends and retracts, the conveyor belt 400 can always be in a tightened structure between the two groups of particle inspection machine light source calibration target assemblies 200, ensuring the actual use function of the conveyor belt 400 between the two groups of particle inspection machine light source calibration target assemblies 200.

[0035] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A calibration device for a particle inspection machine, comprising a particle inspection machine light source calibration frame assembly (100), characterized in that: multiple groups of particle inspection machine light source calibration target assemblies (200) and tightening assemblies (300) are arranged on the particle inspection machine light source calibration frame assembly (100), the particle inspection machine light source calibration target assemblies (200) and the tightening assemblies (300) are arranged on the particle inspection machine light source calibration frame assembly (100) at intervals, the particle inspection machine light source calibration target assemblies (200) form a multi-point light source calibration target structure on the particle inspection machine light source calibration frame assembly (100), and the tightening assemblies (300) form a tightening structure for the transmission of a conveyor belt (400) between the particle inspection machine light source calibration target assemblies (200); The particle inspection machine light source calibration frame assembly (100) includes a particle inspection machine light source calibration frame (101), two rotating shaft rods (102) are rotatably arranged at the top of the particle inspection machine light source calibration frame (101), a driving gear (103) is fixedly arranged at the top of the rotating shaft rod (102), a telescopic arm rod (109) is rotatably arranged between the two driving gears (103) through a shaft pin, a front end base plate (105) is fixedly arranged at the front end of the particle inspection machine light source calibration frame (101), a base plate mounting waist hole (106) is arranged on the front end base plate (105), a rear end top seat plate (107) is fixedly arranged at the rear end of the particle inspection machine light source calibration frame (101), a guiding toothed plate (108) is fixedly arranged on the rear end top seat plate (107), and a driving motor (104) is arranged at the bottom of the particle inspection machine light source calibration frame (101); The particle inspection machine light source calibration target assembly (200) includes a particle inspection machine light source calibration target (201), a support arm rod (202) is fixedly arranged at the bottom of the particle inspection machine light source calibration target (201), two conveyor belt pulleys (203) are fixedly arranged at the top of the support arm rod (202), and a driven gear (204) and a fixed bottom shaft platform (205) are fixedly arranged at the bottom of the support arm rod (202); The tightening assembly (300) includes a support cross arm frame (301), arm frame end platforms (302) are fixedly arranged at both ends of the support cross arm frame (301), an outer support arm tube (303) is fixedly arranged on the arm frame end platform (302), an inner support arm rod (304) is telescopically arranged inside the outer support arm tube (303), an arm rod support end platform (305) is fixedly arranged at the front end of the inner support arm rod (304), and a tightening roller (306) is rotatably arranged on the arm rod support end platform (305).

2. A calibration device for a particle inspection machine according to claim 1, characterized in that: The light source calibration target assembly (200) and the tightening assembly (300) of the particle inspection machine are arranged at intervals on the arm body of the telescopic arm rod (109). The fixed bottom shaft platform (205) is rotatably arranged at the cross arm body in the center of the telescopic arm rod (109) through a shaft pin. The middle part of the support cross arm frame (301) is rotatably arranged at the cross arm body in the center of the telescopic arm rod (109) through a shaft pin. The conveyor belt (400) is arranged at the conveyor belt pulley (203) on the light source calibration target assembly (200) of the particle inspection machine. Multiple groups of the light source calibration target assemblies (200) of the particle inspection machine are connected in series and rotated through the conveyor belt (400).

3. The calibration device for a particle inspection machine according to claim 1, characterized in that: The rear arm body of the telescopic arm rod (109) is rotatably arranged on two driving gears (103) through a shaft pin. The two driving gears (103) are meshed with each other, and the driving motor (104) drives one driving gear (103) to rotate.

4. The calibration device for a particle inspection machine according to claim 1, characterized in that: The driven gear (204) on the light source calibration target assembly (200) of the particle inspection machine is meshed with the guiding tooth plate (108) on the rear end top seat plate (107). A meshing structure for walking is formed between the driven gear (204) and the guiding tooth plate (108), and the driven gear (204) meshes and walks inside the guiding tooth plate (108).

5. The calibration device for a particle inspection machine according to claim 1, characterized in that: Both ends of the support cross arm frame (301) are provided with tightening rollers (306). The two tightening rollers (306) are arranged on both sides of the conveyor belt (400). A top push spring is arranged inside the outer support arm tube (303). An outer top structure is formed between the outer support arm tube (303) and the inner support arm rod (304). The tightening roller (306) forms an inner push and rotation structure inside the arm frame end platform (302).

6. The calibration device for a particle inspection machine according to claim 1, characterized in that: The two tightening rollers (306) respectively abut against both sides of the conveyor belt (400). Through the top push of the tightening assembly (300), the conveyor belt (400) forms a self-tightening conveyor belt structure between two groups of light source calibration target assemblies (200) of the particle inspection machine.

7. The calibration device for a particle inspection machine according to claim 1, characterized in that: The light source calibration machine frame assembly (100) of the particle inspection machine is fixed on the reserved position of the particle inspection machine through fastening bolts and the base plate installation waist holes (106) on the front end base plate (105). By driving one driving gear (103) to rotate through the driving motor (104), the synchronous tooth movement of the two driving gears (103) enables the telescopic arm rod (109) to form an outer expansion and retraction arm body structure.

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