Metal complex curved surface ultrasonic heat energy assisted chemical mechanical polishing equipment and process method

Abstract

The application provides a metal complex curved surface ultrasonic heat energy auxiliary chemical mechanical polishing equipment and process method. The equipment is composed of a crossbeam, a ram, an X-axis horizontal guide rail, a polishing equipment shell, a control system, a polishing device, a heat energy auxiliary device, an ultrasonic auxiliary device, a spindle box and a Z-axis vertical guide rail. The crossbeam is connected with the Z-axis vertical guide rail and the spindle box. The bottom end of the crossbeam is slidably connected to the ram. The polishing equipment shell contains the polishing device and the heat energy auxiliary device. The control system controls the states of the polishing device, the heat energy auxiliary device, the ultrasonic auxiliary device and the spindle box. The polishing device performs the chemical mechanical polishing process of a workpiece. The heat energy auxiliary device changes the polishing temperature in the chemical mechanical polishing process. The ultrasonic auxiliary device realizes the ultrasonic vibration of the spindle part. The Z-axis vertical guide rail is connected with the spindle box, and the spindle moves in the Z direction. The application is based on the chemical mechanical polishing principle and the coupling effect of multiple energy fields. The surface to be processed is simultaneously polished, the processing efficiency is high, and the uniformity is good.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of polishing equipment, in particular to a metal complex curved surface ultrasonic heat energy assisted chemical mechanical polishing equipment and process method. BACKGROUND

[0002] With the continuous development of manufacturing industry, more and more complex curved surface elements are widely used in aerospace, national defense and military industry, biological medicine and other fields. Because the machining requirements of such parts are high, polishing process is usually needed to improve the surface quality of the parts. At present, the precision polishing of complex curved surface is a recognized problem in manufacturing industry, and most of the complex curved surface parts in the industry mainly rely on manual polishing. This processing method is time-consuming and laborious, with high labor intensity and poor working environment. Moreover, the machining precision mainly depends on the operation level of the processing personnel, and the machining precision is difficult to guarantee. As a representative technology of ultra-precision machining, chemical mechanical polishing is widely used in the planarization treatment of high-end equipment parts such as chips, and its polishing precision can reach sub-nanometer level, showing great development potential in curved surface machining field. However, there are few chemical mechanical polishing equipment for complex curved surface at present, which seriously restricts the development of China's manufacturing industry. Therefore, the development of metal complex curved surface ultrasonic heat energy assisted chemical mechanical polishing equipment can significantly improve the polishing efficiency and quality, and has important significance for the polishing industry of metal complex curved surface. SUMMARY

[0003] In order to solve the problems existing in the polishing of metal complex curved surface, a metal complex curved surface ultrasonic heat energy assisted chemical mechanical polishing equipment and process method are provided according to the above technical problems. The technical means adopted by the present application is as follows:

[0004] A metal complex curved surface ultrasonic heat energy assisted chemical mechanical equipment, which is composed of a cross beam, a ram, an X-axis horizontal guide rail, a polishing equipment shell, a control system, a polishing device, a heat energy auxiliary device, an ultrasonic auxiliary device, a spindle box and a Z-axis vertical guide rail. The cross beam is used to connect the Z-axis vertical guide rail and the spindle box, and bears the acting force in the machining process of the spindle. The bottom end of the cross beam is slidingly connected to the ram, which drives the cross beam to move horizontally along the X-axis horizontal guide rail. The X-axis horizontal guide rail is installed on the polishing equipment shell. The polishing equipment shell is used to accommodate the polishing device and the heat energy auxiliary device. The control system is used to control the state of the polishing device, the heat energy auxiliary device, the ultrasonic auxiliary device and the spindle box to achieve the expected polishing effect. The polishing device is used for the chemical mechanical polishing process of the workpiece. The heat energy auxiliary device is used to change the polishing temperature in the chemical mechanical polishing process. The ultrasonic auxiliary device is used to realize the ultrasonic vibration of the spindle part. The Z-axis vertical guide rail is used to connect the spindle box to realize the movement of the spindle in the Z direction.

[0005] Further, the polishing device comprises a polishing shaft, a transmission component, a motor, a polishing cylinder and a support shell, wherein the polishing cylinder is a flanged cylinder structure, which is a container for chemical mechanical polishing process, and stores polishing liquid prepared by mixing abrasive particles, pH adjuster, oxidizing agent, complexing agent and other solvents in a certain proportion and composition. The polishing cylinder is connected with the support shell and is further positioned by a limiting heat-conducting partition to prevent the polishing cylinder from being positioned inaccurately or moving in position during processing. The polishing shaft is connected with the support shell and drives the rotation of the polishing cylinder under the driving of the transmission component, so that the polishing cylinder is rotated to a suitable position to facilitate the normal progress of subsequent chemical mechanical polishing process. The transmission component is composed of a belt wheel and a belt, which is used to transmit the torque input by the motor and drive the rotation of the polishing shaft. The motor is used to transmit the torque to the transmission component.

[0006] Further, the polishing device comprises at least one polishing cylinder, and when multiple polishing cylinders are provided, different polishing liquids are placed in the corresponding polishing cylinders to realize the function of one-time clamping and multiple polishing of the part.

[0007] Further, the thermal energy auxiliary device comprises a limiting heat-conducting partition, an infrared temperature measuring instrument and a heating device. The limiting heat-conducting partition is a metal cylinder with an inner diameter equal to the nominal size of the outer wall of the polishing cylinder for clearance fit, which is used to limit the position movement of the polishing cylinder during polishing. The outer wall of the partition is connected with the heating device. During polishing, the heat output by the heating device is uniformly transmitted to the outer wall of the polishing cylinder through the metal partition to change the temperature of the polishing liquid in the polishing cylinder. The infrared temperature measuring instrument is placed on the lower side of the polishing cylinder to monitor the temperature information of the polishing cylinder in real time and transmit the information to the control system. The control system feedback adjusts the output power of the heating device according to the expected temperature, so that the polishing environment is always near the expected temperature.

[0008] Further, the heating device comprises an electric resistance wire.

[0009] Further, the ultrasonic auxiliary device comprises an ultrasonic transducer, a polishing pressure head and an upper pressing piece. The rotation of the main shaft in the main shaft box drives the rotation of the polishing pressure head and the part around the Z-axis. The ultrasonic device is connected to the end of the main shaft box. The ultrasonic transducer converts the input electric power into ultrasonic mechanical vibration in the Z-axis direction, and transmits the vibration to the polishing pressure head and the part through an amplitude transformer to assist the chemical mechanical polishing process of the part with ultrasonic vibration. The straight rod part of the polishing pressure head has threads, and the upper pressing piece is screwed and tightly connected with the outer convex part of the polishing pressure rod to clamp the metal curved part and realize the clamping of the part.

[0010] Further, the control system is installed on the polishing equipment shell for controlling the normal operation of the ultrasonic auxiliary device, the polishing device and the thermal energy auxiliary device, the X-axis horizontal guide rail and the Z-axis vertical guide rail, in the single polishing mode, after polishing, the control system controls the spindle box spindle to automatically return to the three-dimensional origin, in the multiple polishing mode, the control system automatically controls the rotation and movement of the spindle box spindle and the polishing device in the polishing interval to realize the automatic switching of the polishing process. The automatic switching of the polishing process comprises: in the polishing process, the corresponding polishing cylinder remains stationary, the workpiece rotates around the Z-axis and ultrasonically vibrates along the Z-axis under the action of the spindle box spindle and the ultrasonic device; after completing the polishing, the control system controls the spindle box spindle to move along the Z-axis vertical guide rail, and the workpiece moves out of the polishing cylinder; the control system controls the transmission component to rotate to drive the center of the next polishing cylinder to rotate counterclockwise to the horizontal origin position; the control system controls the spindle box spindle to move along the Z-axis vertical guide rail to the position where the workpiece is completely immersed in the polishing liquid.

[0011] The application further discloses a process method of the metal complex curved surface ultrasonic thermal energy auxiliary chemical mechanical polishing equipment.

[0012] Step 1, the whole equipment is adjusted to a horizontal state;

[0013] Step 2, the control system controls the X-axis guide rail and the Z-axis guide rail to move the spindle box to a suitable position, prepares polishing liquid with different components as required and places the polishing liquid in the polishing cylinders respectively, and installs the polishing cylinders in the limiting heat insulation partition plate in a clockwise processing sequence;

[0014] Step 3, the control system controls the X-axis guide rail and the Z-axis guide rail to move the spindle box to a suitable position, tightly attaches the inner wall port part of the metal complex curved surface part to the inner side of the convex part of the polishing pressure head, installs the polishing pressure head and the upper pressing piece to the end of the ultrasonic transducer, and rotates the upper pressing piece until the part is pressed tightly;

[0015] Step 4, the control system controls the polishing device motor to start, drives the support body shell to rotate the polishing cylinder, and moves the polishing liquid polishing cylinder center to the nearest position of the control system, that is, the horizontal origin position;

[0016] Step 5, the control system origin position function is operated to move the spindle box spindle to the three-dimensional origin;

[0017] Step 6, the control system controls the spindle box to move along the Z-axis guide rail to completely immerse the part in the polishing liquid surface preset position;

[0018] Step 7, temperature, rotation speed and polishing time parameter information are set, and the equipment is started;

[0019] Step 8, after polishing is completed, the spindle box spindle returns to the three-dimensional origin position, the operation control system controls the spindle to move to the appropriate position along the X axis and the Z axis, the polishing pressure head is removed, the upper pressure piece is rotated, the complex curved surface part is taken out, and the polishing is completed.

[0020] Further, the polishing liquid includes grinding and polishing polishing liquid, rough polishing polishing liquid, fine polishing polishing liquid and super fine polishing polishing liquid, which are respectively placed in four polishing barrels.

[0021] The application provides a metal complex curved surface ultrasonic heat energy assisted chemical mechanical polishing equipment and process method, based on the chemical mechanical polishing principle and the multi-energy field coupling effect, the whole surface to be processed is simultaneously polished, the processing efficiency is high, the processing uniformity is good, and the precise polishing of complex parts can be realized; the application can process complex curved surface parts of different shapes, and has wide application range; the application has multiple polishing stations, and can realize one-time clamping and multiple polishing processes; the application replaces manual high-intensity polishing labor with automatic equipment, no dust is generated in the whole process, and the harm to the environment and operating personnel is greatly reduced. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor under the premise of the drawings.

[0023] Figure 1 It is a three-dimensional assembly schematic diagram of the device of the application.

[0024] Figure 2 It is a schematic diagram of the internal structure of the polishing device and the heat energy auxiliary device.

[0025] Figure 3 It is a schematic diagram of the external structure of the ultrasonic auxiliary device.

[0026] Figure 4 It is a schematic diagram of the structure of the polishing pressure head.

[0027] Figure 5 It is the original surface diagram of the polished workpiece before polishing in the embodiment.

[0028] Figure 6 It is the polishing effect diagram of the polished workpiece after polishing in the embodiment.

[0029] In the figure: 1, beam; 2, ram; 3, X-axis horizontal rail; 4, polishing equipment shell; 5, control system; 6, polishing device and thermal energy auxiliary device; 7, ultrasonic auxiliary device; 8, spindle box; 9, Z-axis vertical guide rail; 601, limiting heat-conducting partition; 602, infrared thermometer; 603, resistance wire; 604, polishing rotating shaft; 605, transmission component; 606, motor; 607, polishing cylinder; 608, support body shell; 701, ultrasonic transducer; 702, upper pressing piece; 703, metal complex curved surface part; 704, polishing pressing head; 7041, straight rod part of polishing pressing head; 7042, outward convex part of polishing pressing head. DETAILED DESCRIPTION

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0031] As shown in Figure 1 A metal complex curved surface ultrasonic thermal energy auxiliary chemical mechanical equipment is composed of a beam 1, a ram 2, an X-axis horizontal rail 3, a polishing equipment shell 4, a control system 5, a polishing device and thermal energy auxiliary device 6, an ultrasonic auxiliary device 7, a spindle box 8, and a Z-axis vertical guide rail 9. The beam 1 is used to connect the Z-axis vertical guide rail 9 and the spindle box 8 and bear the acting force in the spindle machining process. The bottom end of the beam 1 is slidingly connected to the ram 2, and the ram 2 is used to drive the beam 1 to move horizontally along the X-axis horizontal rail 3. The X-axis horizontal rail 3 is used to realize the movement of the beam 1 in the X direction. The polishing equipment shell 4 is used to accommodate the polishing device and thermal energy auxiliary device 6. The control system 5 is used to control the states of the polishing device and thermal energy auxiliary device 6, the ultrasonic auxiliary device 7, and the spindle box 8 to achieve the expected polishing effect. The polishing device 6 is used to perform the chemical mechanical polishing process of a workpiece. The thermal energy auxiliary device 6 is used to change the polishing temperature in the chemical mechanical polishing process. The ultrasonic auxiliary device 7 is used to realize the ultrasonic vibration of the spindle part. The Z-axis vertical guide rail 9 is used to connect the spindle box 8 and realize the movement of the spindle in the Z direction.

[0032] As shown in Figure 2As shown, the polishing device 6 further includes a polishing shaft 604, a transmission component 605, a motor 606, a polishing cylinder 607, and a support shell 608. The polishing cylinder 607 is a flanged cylindrical structure, serving as the container for the chemical mechanical polishing process. It stores a polishing liquid prepared by mixing abrasive particles, pH adjuster, oxidant, complexing agent, and other solvents in a specific ratio. The polishing cylinder 607 is connected to the support shell 608 and further positioned by a limiting and heat-conducting partition 601 to prevent inaccurate positioning or movement during processing. The polishing shaft 604 is connected to the support shell 608 and, driven by the transmission component 605, rotates the polishing cylinder 607 to a suitable position for the subsequent chemical mechanical polishing process. The transmission component 605, composed of pulleys and a belt, transmits the torque input from the motor 606 and drives the rotation of the polishing shaft. The motor 606 supplies torque to the transmission component.

[0033] The polishing device 6 of this equipment includes four polishing cylinders 607, which can be configured with different polishing liquids (grind polishing, coarse polishing, fine polishing, and ultra-fine polishing liquids) and placed in the polishing cylinders 607 respectively, realizing the function of multiple polishing of parts in a single clamping. The polishing cylinders 607 of this equipment are designed to be detachable for easy cleaning and preparation of polishing liquids.

[0034] like Figure 2 As shown, the thermal auxiliary device 6 includes a limiting heat-conducting partition 601, an infrared thermometer 602, and a resistance wire 603. The limiting heat-conducting partition 601 is a 2mm thick metal cylinder with an inner diameter identical to the nominal size of the outer wall of the polishing cylinder, forming a clearance fit. It is used to restrict the positional movement of the polishing cylinder 608 during the polishing process. The outer wall of the partition 601 is connected to the heating resistance wire 603. During polishing, the resistance wire 603 is energized and heated, and the heat is evenly transferred to the outer wall of the polishing cylinder 607 through the metal partition 601, thereby changing the temperature of the polishing liquid inside the polishing cylinder 607. The heat energy will, to a certain extent, affect the chemical reaction rate and material properties of the parts in chemical mechanical polishing, thus improving the polishing effect. The infrared thermometer 602 is placed under the polishing cylinder 607 to monitor the temperature information of the polishing cylinder in real time and transmit this information to the control system 5. The control system 5 adjusts the heating resistance wire 603 according to the expected temperature, adjusting the temperature by changing the energizing power of the resistance wire 603, so that the polishing environment always fluctuates within a small range near the expected temperature.

[0035] like Figure 3As shown, further, the ultrasonic auxiliary device 7 includes an ultrasonic transducer 701, a polishing pressure head 704, an upper pressing plate 702, and a part 703. The rotation of the main shaft in the main shaft box 8 drives the rotation of the polishing pressure head 704 and the part 703 around the Z axis. The ultrasonic device 7 is connected to the end of the main shaft box 8, wherein the ultrasonic transducer 701 converts the input electric power into ultrasonic mechanical vibration in the Z axis direction, and transmits the vibration to the polishing pressure head 704 and the part 703 through an amplitude transformer, so as to assist the chemical mechanical polishing process of the part with ultrasonic vibration. Figure 4 As shown, the straight rod part 7041 of the polishing pressure head is threaded, and the upper pressing plate 702 is screwed with the outer convex part 7042 of the polishing rod to jointly clamp the metal curved part 703, so as to realize the clamping of the part 703. The mechanical action of the ultrasonic wave can promote the emulsification of the liquid, the liquefaction of the gel, and the dispersion of the solid, promote the uniform dispersion of the abrasive grains in the polishing liquid, and reduce the polishing defects caused by the uneven dispersion of the abrasive grains. At the same time, a large number of bubbles will be generated when the ultrasonic wave acts on the polishing liquid, and the continuous rupture of the bubbles near the part 703 will generate local high pressure, so as to increase the number of scratches per unit time and the instantaneous scratching force between the abrasive grains and the part 703, and improve the polishing effect. The polishing pressure head 704 and the upper pressing plate 702 of the equipment can be designed in different shapes to meet the clamping requirements of different parts 703, thereby greatly improving the applicability of the equipment.

[0036] The X-axis horizontal guide rail 3 is used to stably move the cross beam 1 and its connecting components along the X-axis direction, so as to provide the X-direction freedom degree for the main shaft to move to a suitable position for clamping, disassembling, and polishing the workpiece 703.

[0037] The Z-axis vertical guide rail 9 is connected to the cross beam 1, and the main shaft box 8 is connected thereto to realize the free movement in the Z direction, so as to facilitate the movement of the main shaft to a suitable position for clamping, disassembling, and polishing the workpiece 703.

[0038] The control system 5 is installed on the housing of the polishing equipment and is used to control the normal operation of the ultrasonic auxiliary device 7, the polishing device and the thermal auxiliary device 6, the X-axis horizontal guide rail 3, and the Z-axis vertical guide rail 9. In the single polishing mode, after polishing is completed, the control system 5 controls the spindle box 8 spindle to automatically return to the three-dimensional origin; in the multiple polishing mode, the control system 5 automatically controls the rotation and movement of the spindle box 8 spindle and the polishing device 6 during the polishing interval to realize the automatic switching of polishing processes. The automatic switching of the polishing process includes: during the polishing process, the corresponding polishing cylinder 607 remains stationary, and the workpiece 703 rotates around the Z-axis and vibrates ultrasonically along the Z-axis under the action of the spindle box 8 spindle and ultrasonic device 7; after the polishing is completed, the control system 5 controls the spindle box 8 spindle to move along the Z-axis vertical guide rail 9, and the workpiece 703 is removed from the polishing cylinder 607; the control system 5 controls the transmission component 605 to rotate, driving the center of the next polishing cylinder 607 to rotate counterclockwise (about 90°) to the horizontal origin position; the control system 5 controls the spindle box 8 spindle to move along the Z-axis vertical guide rail 9 until the polishing liquid surface completely submerges the workpiece; at this point, the automatic switching of one polishing process is completed.

[0039] As an optional implementation, the bottom of the polishing equipment housing is also provided with feet for leveling the device.

[0040] The workpiece 703 used in this embodiment is as follows: Figure 5 As shown, this is a copper kettle with a complex curved surface. The overall horizontal dimension of the kettle is approximately 100mm. Before polishing, the surface was severely oxidized, blackened, and of poor quality. After polishing using this embodiment, the oxide layer on the entire surface of the copper kettle was uniformly removed, as shown... Figure 6 As shown, the copper kettle has a distinct metallic luster and a smooth surface without any black spots. Therefore, this embodiment demonstrates excellent polishing performance for complex curved metal surfaces.

[0041] This invention also discloses a process method for ultrasonic thermal energy-assisted chemical mechanical polishing equipment for complex curved metal surfaces, comprising the following steps:

[0042] Step 1: Adjust the four feet to level the entire device.

[0043] Step 2: Control system 5 controls X-axis guide rail 3 and Z-axis guide rail 9 to move spindle box 8 to a suitable position, disassemble and remove four polishing cylinders 607 and clean them; prepare grinding and polishing liquid, coarse polishing liquid, fine polishing liquid and ultra-fine polishing liquid and place them in the four polishing cylinders 607 respectively; install the polishing cylinders 607 in the limiting heat-conducting partition 601 in a clockwise processing order.

[0044] Step 3, the control system 5 controls the X-axis guide rail 3 and the Z-axis guide rail 9 to move the spindle box 8 to the appropriate position, tightly attach the inner wall port part of the metal complex curved surface copper pot 703 to the inner side of the outer convex part 7042 of the polishing pressure head, install the polishing pressure head 704 and the upper pressing piece 702 to the end of the ultrasonic transducer 701, and rotate the upper pressing piece 702 until the copper pot 703 is pressed.

[0045] Step 4, the control system 5 controls the polishing device motor 606 to start, drives the support body shell 608 to rotate the polishing cylinder 607, and moves the polishing liquid polishing cylinder 607 at the center to the position closest to the control system 5, i.e. the horizontal origin position.

[0046] Step 5, operate the control system 5 origin position function to move the spindle of the spindle box 8 to the three-dimensional origin.

[0047] Step 6, the control system 5 controls the spindle box 8 to move along the Z-axis guide rail 9 to completely immerse the copper pot part 703 in the polishing liquid at a position about 5mm above the liquid surface.

[0048] Step 7, set the temperature, rotation speed, polishing time and other parameter information, select the multiple polishing mode, select 4 times of polishing, and start the equipment.

[0049] Step 8, after polishing, the spindle of the spindle box 8 returns to the three-dimensional origin position, the control system 5 is operated to control the spindle to move to the appropriate position along the X-axis and the Z-axis, the polishing pressure head 704 is removed, the upper pressing piece 702 is rotated, the complex curved surface copper pot 703 is taken out, and the polishing is completed.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not limited thereto; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A metal complex curved surface ultrasonic heat energy assisted chemical mechanical polishing equipment, characterized in that, The utility model discloses a polishing device and heat energy auxiliary device, ultrasonic auxiliary device, spindle box, Z axis vertical guide rail are connected, realize the movement of the spindle Z direction, the polishing device includes polishing rotation axis, transmission part, motor, polishing cylinder and support body shell, wherein polishing cylinder is the flanging cylinder structure, is the container of chemical mechanical polishing process, stores the polishing liquid that is prepared by abrasive, pH regulator, oxidant, complexing agent and other solvent according to certain proportion and component in the inside, polishing cylinder is connected with support body shell, and is positioned further by spacing heat conduction partition, prevents the inaccuracy of polishing cylinder positioning or the position movement in the processing process, polishing rotation axis is connected with support body shell, drives the rotation of polishing cylinder under the drive of transmission part, makes polishing cylinder rotate to the appropriate position, so that the normal progress of subsequent chemical mechanical polishing process, transmission part is composed of pulley and belt, is used for transmitting the torque of motor input and driving the rotation of polishing rotation axis, and the motor is used for conveying the torque of transmission part. The utility model discloses a polishing device and heat energy auxiliary device, ultrasonic auxiliary device, spindle box, Z axis vertical guide rail are connected, realize the movement of the spindle Z direction, the polishing device includes polishing rotation axis, transmission part, motor, polishing cylinder and support body shell, wherein polishing cylinder is the flanging cylinder structure, is the container of chemical mechanical polishing process, stores the polishing liquid that is prepared by abrasive, pH regulator, oxidant, complexing agent and other solvent according to certain proportion and component in the inside, polishing cylinder is connected with support body shell, and is positioned further by spacing heat conduction partition, prevents the inaccuracy of polishing cylinder positioning or the position movement in the processing process, polishing rotation axis is connected with support body shell, drives the rotation of polishing cylinder under the drive of transmission part, makes polishing cylinder rotate to the appropriate position, so that the normal progress of subsequent chemical mechanical polishing process, transmission part is composed of pulley and belt, is used for transmitting the torque of motor input and driving the rotation of polishing rotation axis, and the motor is used for conveying the torque of transmission part. The utility model discloses a polishing device and heat energy auxiliary device, ultrasonic auxiliary device, spindle box, Z axis vertical guide rail are connected, realize the movement of the spindle Z direction, the polishing device includes polishing rotation axis, transmission part, motor, polishing cylinder and support body shell, wherein polishing cylinder is the flanging cylinder structure, is the container of chemical mechanical polishing process, stores the polishing liquid that is prepared by abrasive, pH regulator, oxidant, complexing agent and other solvent according to certain proportion and component in the inside, polishing cylinder is connected with support body shell, and is positioned further by spacing heat conduction partition, prevents the inaccuracy of polishing cylinder positioning or the position movement in the processing process, polishing rotation axis is connected with support body shell, drives the rotation of polishing cylinder under the drive of transmission part, makes polishing cylinder rotate to the appropriate position, so that the normal progress of subsequent chemical mechanical polishing process, transmission part is composed of pulley and belt, is used for transmitting the torque of motor input and driving the rotation of polishing rotation axis, and the motor is used for conveying the torque of transmission part. The utility model discloses a polishing device and heat energy auxiliary device, ultrasonic auxiliary device, spindle box, Z axis vertical guide rail are connected, realize the movement of the spindle Z direction, the polishing device includes polishing rotation axis, transmission part, motor, polishing cylinder and support body shell, wherein polishing cylinder is the flanging cylinder structure, is the container of chemical mechanical polishing process, stores the polishing liquid that is prepared by abrasive, pH regulator, oxidant, complexing agent and other solvent according to certain proportion and component in the inside, polishing cylinder is connected with support body shell, and is positioned further by spacing heat conduction partition, prevents the inaccuracy of polishing cylinder positioning or the position movement in the processing process, polishing rotation axis is connected with support body shell, drives the rotation of polishing cylinder under the drive of transmission part, makes polishing cylinder rotate to the appropriate position, so that the normal progress of subsequent chemical mechanical polishing process, transmission part is composed of pulley and belt, is used for transmitting the torque of motor input and driving the rotation of polishing rotation axis, and the motor is used for conveying the torque of transmission part. The polishing device comprises four polishing cylinders respectively configured with grinding and polishing polishing liquid, rough polishing polishing liquid, fine polishing polishing liquid and super-fine polishing polishing liquid, so as to realize the function of one-time clamping and multiple polishing of the part.

2. The metal complex surface ultrasonic heat energy assisted chemical mechanical polishing apparatus of claim 1, wherein The heating device comprises a resistance wire.

3. The metal complex surface ultrasonic heat energy assisted chemical mechanical polishing apparatus of claim 1, wherein The control system is installed on the polishing equipment shell and is used for controlling the normal operation of the ultrasonic auxiliary device, the polishing device and the thermal energy auxiliary device, the X-axis horizontal guide rail and the Z vertical guide rail; in the single polishing mode, the control system controls the spindle box spindle to automatically return to the three-dimensional origin after polishing; in the multiple polishing mode, the control system automatically controls the rotation and movement of the spindle box spindle and the polishing device in the polishing interval, so as to realize the automatic switching of the polishing process.

4. A process method based on the metal complex surface ultrasonic heat energy assisted chemical mechanical polishing equipment according to any one of claims 1-3, characterized in that, The method comprises the following steps: Step 1, adjust the whole device to a horizontal state; Step 2, the control system controls the X-axis guide rail and the Z-axis guide rail to move the spindle box to a suitable position, prepares polishing liquid with different components as required and places the polishing liquid in each polishing cylinder respectively; the polishing cylinders are installed in the limiting heat insulation partition in the clockwise processing sequence; Step 3, the control system controls the X-axis guide rail and the Z-axis guide rail to move the spindle box to a suitable position, tightly presses the inner wall port part of the metal complex curved surface part against the outer convex part of the inner side of the polishing pressure head, installs the polishing pressure head and the upper pressing piece to the end of the ultrasonic transducer, and rotates the upper pressing piece until the part is pressed; Step 4, the control system controls the polishing device motor to start, drives the support body shell to rotate the polishing cylinder, and moves the grinding and polishing polishing liquid polishing cylinder center to the position closest to the control system, i.e. the horizontal origin position; Step 5, operate the control system origin position function to move the spindle box spindle to the three-dimensional origin; Step 6, the control system controls the spindle box to move along the Z-axis guide rail to completely immerse the part in the polishing liquid surface preset position; Step 7, set the temperature, rotation speed and polishing time parameter information, and start the equipment; Step 8, after polishing is completed, the spindle box spindle returns to the three-dimensional origin position, the control system controls the spindle to move to a suitable position along the X-axis and the Z-axis, the polishing pressure head is removed, the upper pressing piece is rotated, the complex curved surface part is taken out, and the polishing is completed.

Images