Compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotation working condition

Abstract

The application discloses a compact swingable high-vacuum rotating device with a composite connecting mode suitable for a high-speed rotating working condition, which comprises a vacuum joint shell connected with a vacuum environment A and a vacuum joint mandrel connected with a vacuum environment B, the vacuum joint mandrel is inserted into the vacuum joint shell, and a magnetic fluid sealing assembly and a magnetic bearing are arranged between the vacuum joint shell and the vacuum joint mandrel. The application realizes small volume, strong interchangeability and adjustability of the rotating device, and can be simultaneously applied to high-vacuum and high-speed rotating working requirements.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of high vacuum technology, and particularly relates to a compact swingable high vacuum rotating device with a composite connection mode suitable for high-speed rotation. BACKGROUND

[0002] High vacuum technology is to complete industrial and scientific research work in a physical environment far below atmospheric pressure by using the physical environment of rare gas, and is widely used in many industries such as physical and chemical machines, metal materials, electronic appliances, automobiles and food.

[0003] In the medical and pharmaceutical industries, the rotation speed of some mechanical devices is >4000r / min, which is much higher than the common rotation speed of rotating machinery, and the working environment of the device is in a high vacuum state. In order to ensure the compactness of the whole equipment, the installation space of the parts is compressed, and the rotating device needs to be as small as possible in size while meeting the use performance, and the installation position is adjustable. Since industrial products require high interchangeability of the device to reduce the production and maintenance cost of the device, it is necessary for the rotating device to be suitable for multiple connection modes. SUMMARY

[0004] The application is proposed to solve the problem that the vacuum rotating device is suitable for high vacuum and high rotation speed working requirements, and the purpose is to provide a compact swingable high vacuum rotating device with a composite connection mode suitable for high-speed rotation.

[0005] The application is realized by the following technical solutions:

[0006] A compact swingable high vacuum rotating device with a composite connection mode suitable for high-speed rotation, comprising a vacuum joint shell and a vacuum joint shaft, the vacuum joint shaft is inserted into the vacuum joint shell, and a magnetic fluid sealing assembly and a plurality of magnetic bearings are arranged between the two; the vacuum joint shell is connected with a vacuum environment A; the vacuum joint shaft is connected with a vacuum environment B.

[0007] In the above technical solution, the vacuum joint shell comprises a shell connecting part, a transition part and a containing part connected in sequence, the containing part is in a cylindrical shape, the transition part is in a cylindrical shape, and a through hole is formed in the bottom of the containing part and the middle of the transition part, the shell connecting part is in a cylindrical shape, the outer edge of the open end forms a convex edge, a shell flange connecting port is arranged on the convex edge, and a shell KF interface connecting port is arranged inside the shell connecting part.

[0008] In the above technical solution, the vacuum joint shaft comprises a shaft connecting part and a shaft part, and a through hole is formed in the middle of the shaft part; the shaft connecting part is in a cylindrical shape, the outer edge of the open end forms a convex edge, a shaft flange connecting port is arranged on the convex edge, and a shaft KF interface connecting port is arranged inside the shaft connecting part.

[0009] In the technical scheme, the through holes on the components of the vacuum joint shell and the vacuum joint mandrel are coaxially arranged.

[0010] In the technical scheme, the end face of the connecting end of the vacuum joint shell forms a shell sealing groove, and the end face of the connecting end of the vacuum joint mandrel forms a mandrel sealing groove.

[0011] In the technical scheme, the magnetic fluid sealing assembly comprises two magnetic fluid assemblies and a permanent magnet arranged between the two magnetic fluid assemblies, the magnetic fluid assembly comprises a base and a magnetic medium, the outer side of the base is fixed to the inner wall of the vacuum joint shell, the inner side of the base forms a filling groove, and the magnetic medium is filled in the filling groove.

[0012] In the technical scheme, the groove bottom of the filling groove is in a wave shape composed of a plurality of arc-shaped components distributed along the axis of the base.

[0013] In the technical scheme, the permanent magnet is a micro strong magnetic permanent magnet.

[0014] In the technical scheme, the sealing assembly is arranged between a plurality of magnetic bearings.

[0015] In the technical scheme, the vacuum joint shell is externally sleeved with a circular ring type supporting block, and a connecting hole is formed on the supporting block.

[0016] The beneficial effects of the present application are:

[0017] The present application provides a compact swingable high vacuum rotating device with a composite connection mode suitable for high-speed rotation, which realizes small size, strong interchangeability and adjustability of the rotating device, and can be simultaneously applied to high vacuum and high speed rotation working requirements. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a structural schematic diagram of the present application;

[0019] Figure 2 is a structural schematic diagram of the connecting part of the vacuum joint shell in the present application;

[0020] Figure 3 is a structural schematic diagram of the connecting part of the vacuum joint mandrel in the present application;

[0021] Figure 4 is a structural schematic diagram of the magnetic fluid sealing assembly in the present application.

[0022] Among them:

[0023] 1 vacuum joint shell 2 magnetic bearing

[0024] 3 magnetic fluid sealing assembly 4 vacuum joint mandrel

[0025] 5. Shell flange connection port; 6. Shell sealing groove

[0026] 7. Housing KF interface connection port; 8. Mandrel flange connection port

[0027] 9. Mandrel sealing groove; 10. Mandrel KF interface connection port

[0028] 11. Arc-shaped magnetic medium filling groove; 12. Magnetic medium

[0029] 13 Permanent magnet 14 Support block.

[0030] For those skilled in the art, other related figures can be obtained from the above figures without any creative effort. Detailed Implementation

[0031] To enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0032] like Figures 1-3 As shown, a compact swingable high vacuum rotating device with a composite connection method suitable for high-speed rotating conditions includes a vacuum connector housing 1 connected to a vacuum environment A and a vacuum connector mandrel 4 connected to a vacuum environment B. One end of the vacuum connector mandrel 4 is inserted into the vacuum connector housing 1, and a magnetic fluid sealing assembly 3 and at least one magnetic bearing 2 are provided between the two.

[0033] The vacuum connector housing 1 includes a housing connecting part, a transition part, and a receiving part connected in sequence. The receiving part is cylindrical, and the transition part is cylindrical. A through hole is formed between the bottom of the receiving part and the middle of the transition part. The housing connecting part is cylindrical, and a raised edge is formed on the outer edge of the open end. A housing flange connection port 5 is formed on the raised edge. A housing KF interface connection port 7 is provided inside the housing connecting part. The KF interface connection port 7 is connected to the aforementioned through hole.

[0034] The vacuum connector mandrel 4 includes a mandrel connecting part and a mandrel part, with a through hole formed in the middle of the mandrel part; the mandrel connecting part is cylindrical, with a raised edge formed on the outer edge of the open end, and the raised edge forms a mandrel flange connection port 8; a mandrel KF interface connection port 10 is provided inside the mandrel connecting part, and the KF interface connection port 10 communicates with the aforementioned through hole.

[0035] The through holes on the components of the vacuum connector housing 1 and the vacuum connector mandrel 4 are arranged coaxially.

[0036] In this embodiment, both the vacuum connector housing 1 and the vacuum connector spindle 4 are equipped with a flange connection port and a KF interface connection port, so that both ends of this high vacuum rotary device have two types of connection interfaces, enabling a composite connection method.

[0037] In this embodiment, the end face of the connecting end of the vacuum connector housing 1 forms a housing sealing groove 6; the end face of the connecting end of the vacuum connector spindle 4 forms a spindle sealing groove 9. The housing sealing groove 6 and the spindle sealing groove 9 are used in conjunction with a sealing ring to ensure the vacuum sealing effect between the vacuum connector housing 1 and the vacuum connector spindle 4 and the sealing environment.

[0038] like Figure 4 As shown, the magnetic fluid sealing assembly 3 achieves dynamic sealing in the middle of the high-vacuum rotating device. The magnetic fluid sealing assembly 3 includes two magnetic fluid components and a permanent magnet 13 disposed between the two magnetic fluid components. Each magnetic fluid component includes a substrate and a magnetic medium 12. The outer side of the substrate is fixed to the inner wall of the vacuum connector housing 1, and a filling groove 11 is formed on the inner side of the substrate. The magnetic medium 12 fills the filling groove 11. The outer wall of the vacuum connector mandrel 4 forms a receiving groove corresponding to the position of the filling groove 11. Both the substrate and the permanent magnet 13 are annular.

[0039] The bottom of the filling groove 11 is arc-shaped. In this embodiment, the bottom of the filling groove 11 is a wave-like shape composed of multiple arcs evenly distributed along the axis of the substrate. The arc-shaped groove design expands the filling space of the magnetic medium, increases the filling volume of the magnetic medium 12, and improves the reliability of the dynamic seal.

[0040] In this embodiment, the permanent magnet 13 is a miniature strong magnetic permanent magnet. This permanent magnet has a smaller volume while having the same magnetic properties, making the overall volume of the magnetic fluid sealing assembly 3 smaller and the volume of this high vacuum rotating device more compact, which can be used in situations where the installation space is limited.

[0041] In this embodiment, two magnetic bearings 2 are provided, and the magnetic fluid sealing assembly 3 is disposed between the two magnetic bearings 2. The magnetic bearings 2 are selected for vacuum environments, which realize the rotational support between the vacuum connector mandrel 4 and the vacuum connector housing 1, ensuring the high-speed stability of the rotation system.

[0042] In this embodiment, in order to adjust the relative position of the high vacuum rotating device and the vacuum systems at both ends and ensure connection accuracy and stability, a circular support block 14 is sleeved on the outside of the vacuum connector housing 1. The support block 14 is combined with the external Y-shaped support frame to enable the high vacuum rotating device to rotate around the Z-axis, thereby realizing the adjustment of the relative position between the device and the vacuum systems at both ends.

[0043] The high-vacuum rotating device is used for connecting two vacuum environments, and is used as a connecting transition device of the two vacuum environments, and has a flange connection structure and a KF interface connection structure, so that the device is connected in a manner, and a supporting block is arranged outside a vacuum joint shell, so that the device has a swing function, and the whole vacuum system has an automatic centering function; a dynamic seal adopts a magnetic fluid sealing principle, and a special permanent magnet is used, so that the permanent magnet has a smaller volume under the condition of the same magnetic force, so that the whole volume of the high-vacuum rotating device can be more compact, and the high-vacuum rotating device can be applied to a place with smaller installation space; and a support of a vacuum joint core shaft adopts a magnetic bearing suitable for a vacuum environment, so that the high-vacuum rotating device has a high-speed rotating performance.

[0044] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0045] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise specified and limited, the meaning of "a plurality of" is two or more.

[0046] In the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0047] The applicant declares that the above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and those skilled in the art should understand that any change or replacement within the technical scope disclosed by the present application can be easily thought of by any person skilled in the art, and falls within the protection scope and disclosure scope of the present application.

Claims

1. A compact swingable high vacuum rotary device with a composite connection mode suitable for high speed rotary operation, characterized in that: The vacuum joint includes a vacuum joint shell (1) and a vacuum joint spindle (4), the vacuum joint spindle (4) is inserted into the vacuum joint shell (1), and a magnetic fluid sealing assembly (3) and a plurality of magnetic bearings (2) are arranged between the vacuum joint spindle (4) and the vacuum joint shell (1); the vacuum joint shell (1) is connected with a vacuum environment A; the vacuum joint spindle (4) is connected with a vacuum environment B; The vacuum joint shell (1) includes a shell connecting part, a transition part and a containing part connected in sequence, the containing part is in a cylindrical shape, the transition part is in a columnar shape, a through hole is formed in the bottom of the containing part and the middle of the transition part and is in communication with each other, the shell connecting part is in a cylindrical shape, a convex edge is formed on the outer edge of the open end, and a shell flange connecting port (5) is arranged on the convex edge; a shell KF interface connecting port (7) is arranged inside the shell connecting part; The vacuum joint spindle (4) includes a spindle connecting part and a spindle part, a through hole is formed in the middle of the spindle part; the spindle connecting part is in a cylindrical shape, a convex edge is formed on the outer edge of the open end, a spindle flange connecting port (8) is arranged on the convex edge, and a spindle KF interface connecting port (10) is arranged inside the spindle connecting part.

2. The compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotary working condition according to claim 1, characterized in that: The through holes on the components of the vacuum joint shell (1) and the vacuum joint spindle (4) are coaxially arranged.

3. The compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotary working condition according to claim 1, characterized in that: An end face of the connecting end of the vacuum joint shell (1) forms a shell sealing groove (6); an end face of the connecting end of the vacuum joint spindle (4) forms a spindle sealing groove (9).

4. The compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotary working condition according to claim 1, characterized in that: The magnetic fluid sealing assembly (3) includes two magnetic fluid assemblies and a permanent magnet (13) arranged between the two magnetic fluid assemblies, the magnetic fluid assembly includes a base and a magnetic medium (12), the outer side of the base is fixed to the inner wall of the vacuum joint shell (1), the inner side of the base forms an arc-shaped magnetic medium filling groove (11), and the magnetic medium (12) is filled in the arc-shaped magnetic medium filling groove (11).

5. The compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotary working condition according to claim 4, characterized in that: The groove bottom of the arc-shaped magnetic medium filling groove (11) is in a wave shape composed of a plurality of arcs uniformly distributed along the axis of the base.

6. The compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotary working condition according to claim 4, characterized in that: The permanent magnet (13) is a micro strong magnetic permanent magnet.

7. The compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotary working condition according to claim 4, characterized in that: The magnetic fluid sealing assembly (3) is arranged between the plurality of magnetic bearings (2).

8. The compact swingable high vacuum rotary device with composite connection mode suitable for high speed rotary working condition according to claim 1, characterized in that: A supporting block (14) in a circular ring shape is sleeved outside the vacuum joint shell (1), and a connecting hole is formed in the supporting block (14).

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