An ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation

Abstract

The present invention provides an ultra-low-frequency, dual-degree-of-freedom, active and passive micro-vibration control device based on magnetic levitation. The device comprises a base, a magnetic levitation device, and a vibration damping device. The vibration damping device is located in the center of the top of the base, and the magnetic levitation device is located in the center of the top of the vibration damping device. The magnetic levitation device comprises a base plate, a baffle, an electromagnetic coil, and a permanent magnet. The system can achieve dual-degree-of-freedom vibration control in the vertical and horizontal directions, with a range of 0.1Hz to 150Hz, with high positioning accuracy and the ability to adjust stiffness. It can be adapted to various models of precision instruments, offering a wide range of applications and strong versatility.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor dedicated devices, in particular to an ultra-low frequency dual-degree-of-freedom active and passive micro-vibration prevention device based on magnetic levitation. Background Art

[0002] At present, the semiconductor industry is developing rapidly. The precision requirements of semiconductor production equipment are getting higher and higher. The equipment is becoming more and more sensitive to environmental requirements such as micro-vibration. A small amount of micro-vibration will reduce the output yield of the equipment or even cause the equipment to malfunction. Therefore, isolation of micro-vibration is becoming more and more important.

[0003] Due to their inherent properties, traditional vibration isolators are not ideal for isolating low-frequency vibrations, especially ultra-low-frequency vibrations. Furthermore, by introducing a negative stiffness mechanism into traditional vibration isolators, quasi-zero stiffness isolators are created, resulting in high static load-bearing capacity and low dynamic stiffness. These isolators can not only withstand the weight of the equipment without significant deformation, but also approach zero dynamic stiffness near the static equilibrium position, making them ideal passive vibration isolators. However, most passive quasi-zero stiffness isolators are designed for a single isolation target, and once the isolator is manufactured, its structural parameters cannot be changed. Therefore, when the isolation mass changes, such as when overload or underload occurs, the isolator loses its quasi-zero stiffness properties, resulting in reduced isolation performance and even inferior performance to linear isolation systems. This significantly limits their application. A small number of isolators can achieve quasi-zero stiffness under varying loads, but these suffer from the limitation that the isolation mass cannot be continuously varied, and the isolator can only maintain quasi-zero stiffness at a few specific masses, limiting its applicability. Summary of the Invention

[0004] The purpose of the present invention is to provide an ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation to solve the problems existing in the above-mentioned background technology.

[0005] The technical solution of the present invention is achieved as follows: an ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation, comprising a base, a magnetic levitation device and a vibration reduction device, wherein the vibration reduction device is located in the middle of the top of the base, the magnetic levitation device is located in the middle of the top of the vibration reduction device, the magnetic levitation device comprises a bottom plate, a baffle, an electromagnetic coil and a permanent magnet, baffles are vertically installed around the top of the bottom plate, a metal rubber is vertically installed in the middle of the top of the bottom plate, the top of the metal rubber is connected to a support plate, and electromagnetic wires are installed on the bottom of the support plate and on both sides of the metal rubber. Circle one, a permanent magnet one is installed at the vertical corresponding position below the electromagnetic coil one, a bottom support plate one is installed at the bottom of the permanent magnet one, vertical plates are installed vertically around the top of the bottom support plate one, a top plate is installed on the top of the vertical plate, side support plates are installed vertically around the outer sides of the vertical plates, a vertical support plate is vertically installed at the other end of the side support plate, a support rod is vertically connected to the middle of the inner side of the baffle, and a support plate two is vertically connected to the other end of the support rod, and permanent magnet two is installed at the upper and lower parts of the inner side of the vertical support plate, and the permanent magnet two The electromagnetic coil 2 is respectively installed at the upper and lower parts of the horizontal corresponding position and the support plate 2, and the vibration damping device includes a support plate 3, the bottom of the support plate 3 is connected to a support cylinder, and the bottom of the support cylinder is vertically installed with a bottom support plate 2, and connecting rods are respectively vertically installed on the left and right sides of the top of the bottom support plate 2, and the top of the connecting rod is vertically connected to the connecting plate, and a metal spring 1 is installed in the middle of the bottom of the connecting plate, and a guide rod is installed inside the metal spring 1, and a certain distance is left between the top of the guide rod and the connecting plate. The bottom of the guide rod is vertically connected to the middle of the top of the base, and a support seat is fixedly installed on the upper part of the guide rod, and the top of the support seat is fixedly connected to the metal spring 1, and a metal spring 2 is sleeved on the lower part of the guide rod, and a slider is slidably installed on the lower part of the guide rod, and the top two sides of the slider are connected to the bottom support plate 2, and the bottom of the slider is connected to the metal spring 2, and the bottom of the metal spring 2 is connected to the top of the base, and piezoelectric drivers are respectively installed between the bottom of the left and right sides of the bottom support plate 2 and the base, an acceleration sensor is also installed at the bottom of the top plate, a position sensor is installed at the bottom of the support plate 3, and a controller is also installed on the top of the base.

[0006] Furthermore, the base has a circular structure.

[0007] Furthermore, the magnetic levitation device has an overall rectangular structure.

[0008] Furthermore, the bottom plate has a rectangular structure.

[0009] Furthermore, the bottom support plate 1, the bottom support plate 2, and the vertical support plate are all rectangular ring structures.

[0010] Furthermore, the metal rubber is inserted into the bottom support plate 1, the support rod is inserted into the vertical support plate, a gap is left between the vertical support plate and the baffle, and a gap is left between the bottom support plate 1 and the bottom plate.

[0011] Furthermore, the top of the support plate 3 is connected and fixed in the middle of the bottom of the base plate.

[0012] Furthermore, magnetic isolation plates are installed on the top of the top plate, the top of the side support plate, and the top of the vertical support plate, and the magnetic isolation plates are aluminum alloy plates.

[0013] Furthermore, the top of the top plate, the top of the side support plate, and the top of the vertical support plate are flush with the top of the baffle.

[0014] Furthermore, the controller is connected to the electromagnetic coil 1, the electromagnetic coil 2, the piezoelectric driver, the acceleration sensor, and the position sensor through cables.

[0015] The beneficial effects of the present invention are:

[0016] The invention achieves a levitated state in the vertical direction through the attraction of the electromagnetic coil and the permanent magnet. In the horizontal direction, two sets of magnetic devices are symmetrically arranged front to back and left to right. The magnetic repulsion between the electromagnetic coil and the permanent magnet enables the device to exhibit quasi-zero stiffness in the horizontal direction, thereby achieving an extremely low system natural frequency.

[0017] The present invention adjusts the stiffness of the device by adjusting the magnetic attraction between the electromagnetic coil 1 and the permanent magnet 1, and can be adapted to the load-bearing and stiffness requirements of different precision instruments.

[0018] When vibrating in the vertical direction, the present invention achieves the first step of vibration reduction by controlling the magnetic attraction between the first electromagnetic coil and the first permanent magnet through a controller, achieves the second step of vibration reduction by a parallel metal rubber, and achieves the third step of vibration reduction by a vibration reduction device. The vibration reduction process of the vibration reduction device is as follows: first, high-frequency vibration reduction is achieved by two mutually parallel metal springs 1 and 2, and then low-frequency vibration reduction is achieved by controlling the piezoelectric driver through the controller. The three-stage vibration reduction structure enables the system to achieve extremely high positioning accuracy; horizontal vibration reduction is achieved by controlling the magnitude of the magnetic repulsion between the second electromagnetic coil and the second permanent magnet;

[0019] The system of the present invention can realize vibration control of 0.1Hz~150Hz in two degrees of freedom in the vertical and horizontal directions, with high positioning accuracy. It also has the ability to adjust the stiffness and can be adapted to different types of precision instruments. It has a wide range of applications and strong versatility. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the present invention.

[0021] In the figure, 1-base, 2-magnetic levitation device, 201-bottom plate, 202-baffle, 203-metal rubber, 204-support plate 1, 205-electromagnetic coil 1, 206-permanent magnet 1, 207-bottom support plate 1, 208-vertical plate, 209-top plate, 210-side support plate, 211-vertical support plate, 212-permanent magnet 2, 213-support rod, 214-support plate 2, 215-electromagnetic coil 2, 3-vibration damping device, 301-support plate 3, 302-support cylinder, 303-bottom support plate 2, 304-connecting rod, 305-connecting plate, 306-metal spring 1, 307-guide rod, 308-support seat, 309-metal spring 2, 310-slider, 311-piezoelectric driver, 4-magnetic isolation plate, 5-acceleration sensor, 6-position sensor, 7-controller. Implementation Method

[0022] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the embodiments. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] like Figure 1As shown, an ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation includes a base 1, a magnetic levitation device 2 and a vibration reduction device 3, wherein the vibration reduction device 3 is located in the middle of the top of the base 1, and the magnetic levitation device 2 is located in the middle of the top of the vibration reduction device 3. The magnetic levitation device 2 includes a bottom plate 201, a baffle 202, an electromagnetic coil 205 and a permanent magnet 206. Baffles 202 are vertically installed on all four sides of the top of the bottom plate 201, a metal rubber 203 is vertically installed in the middle of the top of the bottom plate 201, a support plate 204 is connected to the top of the metal rubber 203, an electromagnetic coil 205 is installed on the bottom of the support plate 204 and on both sides of the metal rubber 203, and an electromagnetic coil 205 is vertically installed below the electromagnetic coil 205. Permanent magnets 206 are installed at the corresponding positions, and a bottom support plate 207 is installed at the bottom of the permanent magnet 206. Vertical plates 208 are installed vertically around the top of the bottom support plate 207. A top plate 209 is installed on the top of the vertical plate 208. Side support plates 210 are installed vertically around the outer sides of the vertical plates 209. A vertical support plate 211 is vertically installed at the other end of the side support plate 210. A support rod 213 is vertically connected to the middle of the inner side of the baffle 202. The other end of the support rod 213 is vertically connected to a support plate 214. Permanent magnets 212 are installed at the upper and lower parts of the inner side of the vertical support plate 211. The horizontal corresponding position of the permanent magnet 212 and the support plate Electromagnetic coil 215 is installed on the upper and lower parts of the second 214 respectively, and the vibration reduction device 3 includes a support plate 301, and the bottom of the support plate 301 is connected to the support tube 302, and the bottom of the support tube 302 is vertically installed with a bottom support plate 2 303, and the left and right sides of the top of the bottom support plate 2 303 are respectively vertically installed, and the top of the connecting rod 304 is vertically connected to the connecting plate 305, and a metal spring 1 306 is installed in the middle of the bottom of the connecting plate 305, and a guide rod 307 is installed inside the metal spring 1 306, and a certain distance is left between the top of the guide rod 307 and the connecting plate 305, and the bottom of the guide rod 307 is vertically connected to the middle of the top of the base 1. A support seat 308 is fixedly installed on the top of the guide rod 307, and the top of the support seat 308 is fixedly connected to the metal spring 1 306. The lower part of the guide rod 307 is covered with a metal spring 2 309. The lower part of the guide rod 307 is slidably installed with a slider 310. The top two sides of the slider 310 are connected to the bottom support plate 2 303, and the bottom of the slider 310 is connected to the metal spring 2 309. The bottom of the metal spring 2 309 is connected to the top of the base 1. Piezoelectric drivers 311 are respectively installed between the bottom of the left and right sides of the bottom support plate 2 303 and the base 1. An acceleration sensor 5 is also installed at the bottom of the top plate 209, a position sensor 6 is installed at the bottom of the support plate 3 301, and a controller 7 is also installed on the top of the base 1.

[0024] The base 1 is a circular structure.

[0025] The magnetic levitation device 2 has an overall rectangular structure.

[0026] The bottom plate 201 has a rectangular structure.

[0027] The bottom support plate 1 207 , the bottom support plate 2 303 , and the vertical support plate 211 are all rectangular ring structures.

[0028] The metal rubber 203 is inserted into the bottom support plate 207 , and the support rod 213 is inserted into the vertical support plate 211 . A gap is left between the vertical support plate 211 and the baffle 202 , and a gap is left between the bottom support plate 207 and the bottom plate 201 .

[0029] The top of the support plate 301 is connected and fixed to the middle of the bottom of the base plate 201.

[0030] Magnetic isolation plates 4 are installed on the top of the top plate 209 , the top of the side support plate 210 , and the top of the vertical support plate 211 . The magnetic isolation plates 4 are aluminum alloy plates.

[0031] The top of the top plate 209 , the top of the side support plate 210 , and the top of the vertical support plate 211 are flush with the top of the baffle 202 .

[0032] The controller 7 is connected to the electromagnetic coil 1 205 , the electromagnetic coil 2 215 , the piezoelectric driver 311 , the acceleration sensor 5 , and the position sensor 6 via cables.

[0033] During installation, the precision instrument is installed on the top plate 209. According to the load-bearing and stiffness requirements of the precision instrument, the controller 7 controls the strength of the magnetic field of the electromagnetic coil 205, thereby controlling the magnitude of the magnetic attraction between the electromagnetic coil 205 and the permanent magnet 20206 to meet the load-bearing requirements of the precision instrument, so that the precision instrument is in a suspended state in the vertical direction and the stiffness in the horizontal direction approaches zero.

[0034] During operation, the precision instrument generates vibration, and the vibration signal is collected by the acceleration sensor 5 and the position sensor 6, and the vibration signal is transmitted to the controller 7; in the vertical direction, the controller 7 first controls the strength of the magnetic field of the electromagnetic coil 1 205 to achieve the first step of vibration reduction, and at the same time, the second step of vibration reduction is achieved through the parallel metal rubber 203, and the third step of vibration reduction is achieved through the vibration reduction device 3. The vibration reduction process of the vibration reduction device 3 is: first, high-frequency vibration reduction is achieved through two mutually parallel metal springs 1 306 and metal spring 2 309, and then the piezoelectric driver 311 is controlled by the controller 7 to achieve low-frequency vibration reduction; in the horizontal direction, the magnetic field strength of the electromagnetic coil 2 215 is controlled by the controller 7 to control the magnitude of the magnetic repulsion between the electromagnetic coil 2 215 and the permanent magnet 2 212, thereby achieving horizontal vibration reduction.

[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A magnetic levitation-based ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device, comprising a base, a magnetic levitation device and a vibration reduction device, characterized in that: The vibration reduction device is located in the middle of the top of the base, and the magnetic levitation device is located in the middle of the top of the vibration reduction device. The magnetic levitation device includes a bottom plate, a baffle, an electromagnetic coil and a permanent magnet. Baffles are vertically installed on all four sides of the top of the bottom plate, a metal rubber is vertically installed in the middle of the top of the bottom plate, and the top of the metal rubber is connected to a support plate. An electromagnetic coil is installed on the bottom of the support plate and on both sides of the metal rubber. A permanent magnet is installed at the vertical corresponding position below the electromagnetic coil. A bottom support plate is installed at the bottom of the permanent magnet. Vertical plates are vertically installed on all four sides of the top of the bottom support plate. A top plate is installed on the top of the vertical plate. Side support plates are vertically installed on all four sides of the outer side of the vertical plate. A vertical support plate is vertically installed at the other end of the side support plate. A support rod is vertically connected to the middle of the inner side of the baffle, and the other end of the support rod is vertically connected to a support plate two. Permanent magnets two are respectively installed on the upper and lower parts of the inner side of the vertical support plate, and electromagnetic coils two are respectively installed at the horizontal corresponding position of the permanent magnet two and the upper and lower parts of the support plate two. The top of described sliding panel also is provided with an interlocking structure, and the interlocking structure of described sliding panel also is provided with an interlocking structure, and the interlocking structure of described sliding panel is connected with the interlocking structure of described sliding panel and the interlocking structure of described sliding panel.

2. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The base is a circular structure.

3. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The magnetic levitation device has a rectangular structure as a whole.

4. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The bottom plate is in a rectangular structure.

5. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The bottom support plate 1, the bottom support plate 2 and the vertical support plate are all rectangular ring structures.

6. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The metal rubber is inserted into the bottom support plate 1, the support rod is inserted into the vertical support plate, a gap is left between the vertical support plate and the baffle, and a gap is left between the bottom support plate 1 and the bottom plate.

7. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The top of the support plate 3 is connected and fixed in the middle of the bottom of the base plate.

8. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: Magnetic isolation plates are installed on the top of the top plate, the top of the side support plate, and the top of the vertical support plate. The magnetic isolation plates are aluminum alloy plates.

9. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The top of the top plate, the top of the side support plate, and the top of the vertical support plate are flush with the top of the baffle.

10. The ultra-low frequency dual-degree-of-freedom active and passive anti-micro-vibration device based on magnetic levitation according to claim 1, characterized in that: The controller is connected to the electromagnetic coil 1, the electromagnetic coil 2, the piezoelectric driver, the acceleration sensor, and the position sensor through cables.

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