Hatch locking device and chamber including the same

Abstract

The present invention discloses a hatch locking device and a chamber including the same. The hatch locking device according to an embodiment of the present invention includes a first connection mechanism connected to the hatch; and a second connection mechanism, which is matched with the first connection mechanism and connected to the hatch seat, wherein the first connection mechanism includes a connection unit and a locking unit; the connection unit is connected to the second connection mechanism to lock the hatch and the hatch seat; after the hatch and the hatch seat are locked, the locking unit moves the connection unit to lock the connection between the connection unit and the second connection mechanism, and presses the connection between the hatch and the hatch seat. The hatch locking device according to an embodiment of the present invention and the chamber including the same have a simple, efficient and reliable locking method.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and particularly to a hatch locking device and a chamber including the same. Background Art

[0002] At present, in semiconductor manufacturing, wafers need to go through a process flow consisting of hundreds of processes in sequence to produce the final product. In the specific manufacturing process, the required processes are completed with the cooperation of different chambers (such as reaction chambers, cleaning chambers, etc.).

[0003] For different chambers, there are different production environment requirements, but generally there is a requirement for airtightness. A hatch for accessing materials is provided on the chamber. How to ensure the sealing of the hatch while taking into account performance such as the convenience of hatch operation is an urgent problem to be solved.

[0004] Therefore, it is hoped that there can be a new hatch locking device and a chamber including the same, which can solve the above problems. Summary of the Invention

[0005] In view of the above problems, the purpose of the present invention is to provide a hatch locking device and a chamber including the same, so as to make the locking simple, efficient and reliable.

[0006] According to one aspect of the present invention, there is provided a hatch locking device, including: a first connection mechanism connected to the hatch; and a second connection mechanism matching with the first connection mechanism and connected to the hatch seat, wherein the first connection mechanism includes a connection unit and a locking unit; the connection unit is connected to the second connection mechanism to lock the hatch and the hatch seat; after the hatch and the hatch seat are locked, the locking unit moves the connection unit to lock the connection between the connection unit and the second connection mechanism, and presses the connection between the hatch and the hatch seat.

[0007] Optionally, the hatch body of the hatch seat is a cylinder; there are a plurality of the second connection mechanisms, and the plurality of the second connection mechanisms are arrayed on the outer side of the hatch body of the hatch seat; there are a plurality of the first connection mechanisms, corresponding to the plurality of the second connection mechanisms respectively.

[0008] Optionally, the hatch locking device further includes: guide rods respectively connected to the hatch and the hatch seat to limit the moving direction of the hatch relative to the hatch seat; a sealing ring located on the hatch and / or the hatch seat; after the hatch and the hatch seat are pressed together, the sealing ring is used for sealing.

[0009] Optionally, the connecting unit includes a connecting rod parallel to the contact surface between the hatch and the hatch seat; the connecting rod is located on one side of the first surface of the hatch and is used for connecting with the second connecting mechanism; the locking unit includes a driving device; the driving device is located on one side of the second surface of the hatch and is used to move the connecting rod, wherein the first surface and the second surface are oppositely arranged, and the distance between the first surface and the hatch seat is less than the distance between the second surface and the hatch seat.

[0010] Optionally, the connecting unit further includes a lifting rod, and the lifting rod is respectively connected to the connecting rod and the locking unit; the axis of the lifting rod is perpendicular to the contact surface between the hatch and the hatch seat.

[0011] Optionally, the locking unit further includes: a locking rod, which is respectively connected to the lifting rod and the driving device; the driving device drives the locking rod to move to drive the connecting rod to move.

[0012] Optionally, the driving device includes a cylinder; the locking unit further includes a support frame; the first end of the locking rod is connected to the first end of the support frame; the second end of the locking rod is connected to the first end of the cylinder; the second end of the cylinder is connected to the second end of the support frame; the support frame, the locking rod and the cylinder form a triangle; a sliding groove is provided on the locking rod, and the sliding groove is provided near the first end of the locking rod; at least a part of the lifting rod is located in the sliding groove to realize the connection between the lifting rod and the locking rod; during the process that the locking unit moves the connecting unit to lock the connection between the connecting unit and the second connecting mechanism, at least a part of the lifting rod slides in the sliding groove.

[0013] Optionally, the second connecting mechanism includes: a connecting component, which is matched with the connecting unit and is used for connecting the second connecting mechanism with the first connecting mechanism; a driving component, which is connected to the connecting component and is used to drive the connection between the connecting component and the connecting unit.

[0014] Optionally, the connecting unit includes a connecting rod parallel to the contact surface between the hatch and the hatch seat; the connecting component includes a first connecting rod and a second connecting rod, and the first connecting rod and the second connecting rod are respectively used for connecting with the first end and the second end of the connecting rod; the driving component includes a driving cylinder; the driving cylinder is connected to the first connecting rod through a first transmission rod, and the driving cylinder is connected to the second connecting rod through a second transmission rod; the driving cylinder is used to drive the movement of the first connecting rod and the second connecting rod.

[0015] According to another aspect of the present invention, there is provided a chamber for use in semiconductor manufacturing. The chamber includes the hatch locking device as described above.

[0016] For the hatch locking device according to an embodiment of the present invention and the chamber including the same, the hatch and the hatch seat are locked through the connecting unit, and then the connecting unit is locked through the locking unit to compress the connection between the hatch and the hatch seat. The locking method is simple, efficient and reliable.

[0017] Furthermore, a plurality of first / second connection mechanisms are arrayed on the hatch / hatch seat. On the one hand, it ensures the reliability of locking, and on the other hand, it also ensures the balanced force after locking.

[0018] Furthermore, during the locking process, the driving device located on the second surface moves the connecting rod on one side of the first surface through the lifting rod. While tightening the first connection mechanism and the second connection mechanism, the driving device compresses the hatch and the hatch seat, and can achieve tightening and compression simultaneously, ensuring the quality of locking.

[0019] Furthermore, the setting of the positional relationship and connection relationship between the components in the first connection mechanism and the second connection mechanism ensures the stability of the connection locking and the balanced force.

[0020] Furthermore, using a cylinder to drive the movement of components to achieve locking and unlocking, the control method is simple and reliable. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Through the following description of the embodiments of the present invention with reference to the drawings, the above and other objects, features and advantages of the present invention will become clearer. In the drawings:

[0022] Figure 1 The structural schematic diagram of the hatch locking device according to an embodiment of the present invention is shown.

[0023] Figure 2 The schematic diagram of the closed state of the hatch locking device according to an embodiment of the present invention is shown.

[0024] Figure 3 The structural schematic diagram of the hatch seat and the second connection mechanism according to an embodiment of the present invention is shown.

[0025] Figure 4 The schematic diagram of the unlocked state of the first connection mechanism according to an embodiment of the present invention is shown.

[0026] Figure 5 The schematic diagram of the locked state of the first connection mechanism according to an embodiment of the present invention is shown.

[0027] Figure 6 The schematic diagram of the unlocked state of the second connection mechanism according to an embodiment of the present invention is shown.

[0028] Figure 7 Shows a schematic diagram of the locking state of the second connecting mechanism according to an embodiment of the present invention.

[0029] Figure 8 Shows a schematic diagram of the locking state of the hatch locking device according to an embodiment of the present invention. Detailed implementation manners

[0030] Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. In the respective drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, the various parts in the drawings are not drawn to scale. In addition, some well-known parts may not be shown in the drawings.

[0031] The specific implementation manners of the present invention will be further described in detail below in conjunction with the drawings and embodiments. Many specific details of the present invention are described below, such as the structure, material, size, processing technology and techniques of components, so as to understand the present invention more clearly. However, as those skilled in the art can understand, the present invention can be implemented without these specific details.

[0032] It should be understood that when describing the structure of a component, when a layer or a region is referred to as being "above" or "over" another layer or another region, it may mean directly above the other layer or another region, or there may be other layers or regions between it and the other layer or another region. And if the component is flipped, this layer or region will be "below" or "beneath" the other layer or region.

[0033] Figure 1 Shows a schematic diagram of the structure of the hatch locking device according to an embodiment of the present invention. Figure 1 Shows the open state of the hatch locking device. As Figure 1 shown, the hatch locking device according to an embodiment of the present invention includes a first connecting mechanism 100 and a second connecting mechanism 200.

[0034] Specifically, the first connecting mechanism 100 is connected to the hatch 10.

[0035] The second connecting mechanism 200 is matched with the first connecting mechanism 100 and is connected to the hatch seat 20.

[0036] The first connecting mechanism 100 includes a connecting unit 110 and a locking unit 120. The connecting unit 110 is connected to the second connecting mechanism 200 to lock the hatch 10 and the hatch seat 20. After the hatch 10 and the hatch seat 20 are locked, the locking unit 120 moves the connecting unit 110 to lock the connection between the connecting unit 110 and the second connecting mechanism 200, and presses the connection between the hatch 10 and the hatch seat 20.

[0037] In an alternative embodiment of the present invention, the connecting unit 110 includes a connecting rod 111 parallel to the contact surface between the hatch door 10 and the hatch seat 20. The connecting rod 111 is located on one side of the first surface 11 of the hatch door 10 and is used for connection with the second connecting mechanism 200. The locking unit 120 includes a driving device. The driving device is located on one side of the second surface 12 of the hatch door 10 and is used to move the connecting rod. Among them, the first surface 11 and the second surface 12 are oppositely arranged, and the distance between the first surface 11 and the hatch seat 20 is less than the distance between the second surface 12 and the hatch seat 20.

[0038] Figure 2 The schematic diagram of the closed state of the hatch door locking device according to an embodiment of the present invention is shown. As Figure 2 shown, when the hatch door locking device according to an embodiment of the present invention is in the closed state, the first connecting mechanism 100 corresponds (matches) to the second connecting mechanism 200 to facilitate subsequent locking of the hatch door 10 and the hatch seat 20.

[0039] In an alternative embodiment of the present invention, the hatch door locking device further includes a guide rod (not shown in the figure). The guide rod is respectively connected to the hatch door 10 and the hatch seat 20 to limit the moving direction of the hatch door 10 relative to the hatch seat 20. Under the limitation of the guide rod, the opening and closing of the hatch door 10 and the hatch seat 20 have a fixed path. Of course, mechanisms such as hinges and multi-link mechanisms can also be used to replace the guide rod.

[0040] In an alternative embodiment of the present invention, the hatch door locking device further includes a sealing ring. The sealing ring is located on the hatch door 10 and / or the hatch seat 20. After the hatch door 10 and the hatch seat 20 are pressed together, the sealing ring is used for further sealing (of the hatch door locking device). The sealing ring is usually arranged on the surface where the hatch door 10 and the hatch seat 20 are in contact.

[0041] Figure 3 The schematic diagram of the structure of the hatch seat and the second connecting mechanism according to an embodiment of the present invention is shown. As Figure 3 shown, the hatch body 21 of the hatch seat 20 is a cylinder, and the hatch body 21 is, for example, the part directly in contact with the hatch door 10.

[0042] There are multiple second connecting mechanisms 200, and the multiple second connecting mechanisms 200 are arrayed on the outer side of the hatch body 21 of the hatch seat 20. There are multiple first connecting mechanisms 100 (not shown in the figure), and the multiple first connecting mechanisms 100 respectively correspond to the multiple second connecting mechanisms 200.

[0043] Figure 4 The schematic diagram of the unlocking state of the first connecting mechanism according to an embodiment of the present invention is shown. Figure 5 The schematic diagram of the locking state of the first connecting mechanism according to an embodiment of the present invention is shown. Combining Figures 1 to 5As shown, the first connection mechanism 100 according to an embodiment of the present invention includes a connection unit 110 and a locking unit 120. The first connection mechanism 100 is, for example, a tensioning mechanism.

[0044] Specifically, the connection unit 110 includes a connecting rod 111 and a lifting rod 112. The lifting rod 112 is respectively connected to the connecting rod 111 and the locking unit 120. The connecting rod 111 is parallel to the contact surface between the hatch 10 and the hatch seat 20. The axis of the lifting rod 112 is perpendicular to the contact surface between the hatch 10 and the hatch seat 20. The arrangement of the connecting rod 111 and the lifting rod 112 ensures uniform force when the hatch locking device is locked, thus improving the locking effect.

[0045] The locking unit 120 includes a locking rod 121 and a driving device 122. The locking rod 121 is respectively connected to the lifting rod 112 and the driving device 122. The driving device 122 drives the locking rod 121 to move to drive the connecting rod 111 to move.

[0046] Optionally, the locking unit 120 further includes a support frame 123, and the driving device 122 includes a cylinder. The first end of the locking rod 121 is connected to the first end of the support frame 123, the second end of the locking rod 121 is connected to the first end of the driving device (cylinder) 122, and the second end of the driving device (cylinder) 122 is connected to the second end of the support frame 123. The support frame 123, the locking rod 121, and the driving device (cylinder) 122 form a triangle. Optionally, a through hole is provided on the support frame 123, and the lifting rod 112 is connected to the locking rod 121 through the through hole.

[0047] A sliding groove 1211 is provided on the locking rod 121. The sliding groove 1211 is provided near the first end of the locking rod 121. At least a part of the lifting rod 112 is located in the sliding groove 1211 to realize the connection between the lifting rod 112 and the locking rod 121. During the process of the locking unit 120 moving the connection unit 110 to lock the connection unit 110 with the second connection mechanism 200, at least a part of the lifting rod 112 slides in the sliding groove 1211. The setting of the sliding groove 1211 ensures that during the movement of the lifting rod 112, it is only stressed in the direction perpendicular to the contact surface between the hatch 10 and the hatch seat 20, thus ensuring the locking quality.

[0048] Figure 6 The schematic diagram of the unlocking state of the second connection mechanism according to an embodiment of the present invention is shown. Figure 7 The schematic diagram of the locking state of the second connection mechanism according to an embodiment of the present invention is shown. Combined Figures 1 to 7 As shown, the second connection mechanism 200 according to an embodiment of the present invention includes a connection component 210 and a driving component 220. The second connection mechanism 200 is, for example, a double-hook mechanism.

[0049] Specifically, the connecting component 210 is matched with the connecting unit 110 for connecting the second connecting mechanism 200 and the first connecting mechanism 100.

[0050] The driving component 220 is connected to the connecting component 210 for driving the connection between the connecting component 210 and the connecting unit 110.

[0051] Optionally, the connecting unit 110 includes a connecting rod 111 parallel to the contact surface between the hatch 10 and the hatch seat 20. Both ends of the connecting rod 111 are located on both sides of the lifting rod 112 respectively. The connecting component 210 includes a first connecting rod 211 and a second connecting rod 212. The first connecting rod 211 and the second connecting rod 212 are respectively used for connecting with the first end and the second end of the connecting rod 111. Optionally, connection holes are provided on the first connecting rod 211 and / or the second connecting rod 212, and the diameter of the connection holes is greater than or equal to the diameter of the connecting rod 111. During connection, the connection holes of the first connecting rod 211 and / or the second connecting rod 212 are sleeved on the connecting rod 111.

[0052] The driving component 220 includes a driving cylinder 221. The driving cylinder 221 is connected to the first connecting rod 211 through a first transmission rod 222. The driving cylinder 221 is connected to the second connecting rod 212 through a second transmission rod 223. The driving cylinder 221 is used to drive the movement of the first connecting rod 211 and the second connecting rod 212. The first transmission rod 222 and the first connecting rod 211 form a linkage mechanism for example. The second transmission rod 223 and the second connecting rod 212 form a linkage mechanism for example.

[0053] Figure 8 The schematic diagram of the locked state of the hatch locking device according to an embodiment of the present invention is shown. In combination with Figures 1 to 8 As shown, in the locked state of the hatch locking device according to an embodiment of the present invention, the hatch 10 and the hatch seat 20 are in direct contact. The first connecting mechanism 100 and the second connecting mechanism 200 are connected, and the driving device 122 in the first connecting mechanism 100 drives the locking rod 121 to pull up the lifting rod 112 (in actual use, the position change when the lifting rod 112 is pulled up is not Figure 1 、 Figure 8 as large as the position change shown. The pulling distance of the lifting rod 112 can be set according to actual needs), so as to lock the connection between the connecting rod 111 (the first connecting mechanism 100) and the first connecting rod 211 / second connecting rod 212 (the second connecting mechanism 200), and press the connection between the hatch 10 and the hatch seat 20.

[0054] In combination with Figures 1 to 8 As shown, the working process of the hatch locking device is described. During the locking process, first move the hatch 10 to make the hatch 10 approach the hatch seat 20, and the hatch locking device changes from the open state ( Figure 1as shown) into a closed state ( Figure 2 as shown). When the hatch locking device is in the closed state, the corresponding chamber (such as a vacuum chamber) is closed. At this time, the driving device (cylinder) 122 is in the retracted state, the connecting rod 111 is in the extended position, and the first connecting rod 211 and the second connecting rod 212 are in the open state.

[0055] Then, the driving cylinder 221 drives the first connecting rod 211 and the second connecting rod 212 to move, and further drives the first connecting rod 211 and the second connecting rod 212 to move, so that the first connecting rod 211 is connected to the first end of the connecting rod 111, and the second connecting rod 212 is connected to the second end of the connecting rod 111 (double hook closed), realizing the locking of the hatch 10 and the hatch seat 20.

[0056] After the hatch 10 and the hatch seat 20 are locked, the driving device (cylinder) 122 extends, and the lifting rod 112 is pulled upward by the lever of the locking rod 121, so that the first connecting rod 211 and the second connecting rod 212 are pulled through the connecting rod 111, and the hatch 10 and the hatch seat 20 are pressed tightly.

[0057] The hatch locking device can be unlocked by operating in reverse order of the locking process.

[0058] According to another aspect of the present invention, a chamber is provided. The chamber is used in the manufacture of semiconductors, such as a reaction chamber or a cleaning chamber in semiconductor production equipment. The chamber includes the hatch locking device as described above. When the hatch 10 of the hatch locking device is in the open state, materials enter and exit the chamber through the hatch seat 20. When the hatch 10 of the hatch locking device is in the locked state, the chamber is sealed.

[0059] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the presence of additional identical elements in the process, method, article or device including the element.

[0060] As described above with reference to the embodiments of the present invention, these embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. Obviously, many modifications and variations can be made according to the above description. These embodiments are selected and specifically described in this specification in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can make good use of the present invention and its modifications based on the present invention. The present invention is only limited by the claims and their full scope and equivalents.

Claims

1. A hatch locking device, comprising: A first connection mechanism connected to the hatch; And A second connection mechanism, which is matched with the first connection mechanism and connected to the hatch seat, Wherein, the first connection mechanism includes a connection unit and a locking unit; The connection unit is connected to the second connection mechanism to lock the hatch and the hatch seat; After the hatch and the hatch seat are locked, the locking unit moves the connection unit to lock the connection between the connection unit and the second connection mechanism, and presses the connection between the hatch and the hatch seat; The connection unit includes a connecting rod parallel to the contact surface of the hatch and the hatch seat; the connecting rod is located on one side of the first surface of the hatch and is used for connecting with the second connection mechanism; The locking unit includes a driving device; the driving device is located on one side of the second surface of the hatch and is used for moving the connecting rod.

2. The hatch locking device according to claim 1, wherein, The hatch body of the hatch seat is a cylinder; There are multiple second connection mechanisms, and the multiple second connection mechanisms are arrayed on the outside of the hatch body of the hatch seat; There are multiple first connection mechanisms, which respectively correspond to the multiple second connection mechanisms.

3. The hatch locking device according to claim 1, wherein, The hatch locking device further includes: Guide rods, which are respectively connected to the hatch and the hatch seat to limit the moving direction of the hatch relative to the hatch seat; Sealing rings, located on the hatch and / or the hatch seat; after the hatch and the hatch seat are pressed, the sealing rings are used for sealing.

4. The hatch locking device according to claim 1, wherein, The first surface and the second surface are oppositely arranged, and the distance between the first surface and the hatch seat is less than the distance between the second surface and the hatch seat.

5. The hatch locking device according to claim 4, wherein, The connection unit further includes a lifting rod, and the lifting rod is respectively connected to the connecting rod and the locking unit; the axis of the lifting rod is perpendicular to the contact surface of the hatch and the hatch seat.

6. The hatch locking device according to claim 5, wherein, The locking unit further includes: A locking rod, which is respectively connected to the lifting rod and the driving device; the driving device drives the locking rod to move to drive the connecting rod to move.

7. The hatch locking device according to claim 6, wherein, The driving device includes a cylinder; the locking unit further includes a support frame; The first end of the locking rod is connected to the first end of the support frame; the second end of the locking rod is connected to the first end of the cylinder; the second end of the cylinder is connected to the second end of the support frame; the support frame, the locking rod and the cylinder form a triangle; A sliding groove is provided on the locking rod, and the sliding groove is provided near the first end of the locking rod; at least a part of the lifting rod is located in the sliding groove to realize the connection between the lifting rod and the locking rod; During the process that the locking unit moves the connection unit to lock the connection between the connection unit and the second connection mechanism, at least a part of the lifting rod slides in the sliding groove.

8. The hatch locking device according to claim 1, wherein, The second connection mechanism includes: ​ ​ 9. The hatch locking device according to claim 8, wherein, The connecting unit includes a connecting rod parallel to the contact surface between the hatch and the hatch seat; The connecting member includes a first connecting rod and a second connecting rod, and the first connecting rod and the second connecting rod are respectively used for connecting with the first end and the second end of the connecting rod; The driving member includes a driving cylinder; the driving cylinder is connected to the first connecting rod through a first transmission rod, and the driving cylinder is connected to the second connecting rod through a second transmission rod; the driving cylinder is used to drive the movement of the first connecting rod and the second connecting rod.

10. A chamber, applied to the manufacture of semiconductors, the chamber includes the hatch locking device according to any one of claims 1-9.

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