Cavity cooling system and vapor deposition vacuum apparatus

Abstract

The present application relates to the technical fields of photovoltaic module manufacturing, and provides a cavity cooling system and a vapor deposition vacuum equipment, which comprises a cavity, a suction pump, a gas filling device, a gas feeding channel and a control valve assembly, the suction pump is connected with the cavity and used for sucking out the gas in the cavity; the gas outlet of the gas filling device is connected with the cavity and used for filling the inert gas into the cavity; one end of the gas feeding channel is connected with the gas outlet of the suction pump, and the other end of the gas feeding channel is connected with the gas inlet of the gas filling device; the cooling channel has a cooling medium, the cooling channel is connected with or in contact with the gas feeding channel and used for cooling the inert gas in the gas feeding channel through heat exchange; the control valve assembly comprises a first control valve used for controlling the communication between the suction pump and the cavity, a second control valve used for controlling the communication between the gas filling device and the cavity, and a third control valve used for controlling the communication between the gas feeding channel and the gas outlet of the suction pump. The present application realizes the recycling of the inert gas and improves the cooling efficiency of the cavity.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic module manufacturing, and in particular to a cavity cooling system and vapor deposition vacuum equipment. Background Art

[0002] Plasma chemical vapor deposition vacuum equipment used for large-scale manufacturing of photovoltaic modules includes main components such as a vacuum chamber and an electrode box. The electrode box contains multiple radio frequency electrodes for depositing solar cells. The preheated electrode box is placed in a vacuum chamber to complete the deposition of amorphous silicon thin-film solar cells in the vacuum chamber. After the deposition is completed, the electrode box is taken out and the chamber needs to be cooled.

[0003] In the existing technology, the commonly used cooling system is mainly used to cool the side plates and bottom plate of the cavity, but does not have the function of cooling the interior of the cavity. Usually, the cavity cover is opened for maintenance after natural cooling, which greatly limits the improvement of the production efficiency of the vapor deposition vacuum equipment. Summary of the Invention

[0004] The present invention provides a cavity cooling system and vapor deposition vacuum equipment, which are used to solve the defects of the prior art such as high waste of inert gas and low cavity cooling efficiency.

[0005] The present invention provides a cavity cooling system, comprising:

[0006] cavity;

[0007] a suction pump, comprising an air intake and an air outlet, wherein the air intake of the suction pump is connected to the cavity via a first pipeline and is used to extract the gas in the cavity;

[0008] an inflation device, wherein the gas outlet of the inflation device is connected to the cavity and is used to fill the cavity with inert gas;

[0009] an air supply channel, one end of the air supply channel being connected to the air outlet of the suction pump, the other end of the air supply channel being connected to the air inlet of the inflation device, the air supply channel being used to return the inert gas extracted by the suction pump to the inflation device;

[0010] a cooling channel, wherein a cooling medium is contained in the cooling channel, the cooling channel being connected to or in contact with the air supply channel and being used to cool the inert gas in the air supply channel by heat exchange;

[0011] The control valve assembly includes a first control valve for controlling the connection and disconnection between the suction pump and the cavity, a second control valve for controlling the connection and disconnection between the inflation device and the cavity, and a third control valve for controlling the connection and disconnection between the air supply channel and the suction pump outlet.

[0012] The cavity cooling system further comprises a cooling device, the cooling device comprises a cooling water pump, one end of the cooling channel is connected with the cooling water pump, and the other end is connected with a water inlet of the cavity.

[0013] The bottom and the inner wall around the cavity are embedded with cooling pipes, the starting end of the cooling pipe is connected with the water inlet of the cavity, and the end of the cooling pipe is connected with the water outlet of the cavity.

[0014] The cavity cooling system further comprises a cooling device, the cooling device comprises a cooling water pump, one end of the cooling channel is connected with the cooling water pump, and the other end is connected with a water inlet of the cavity.

[0015] The cavity cooling system further comprises a cooling device, the cooling device comprises a cooling water pump, one end of the cooling channel is connected with the cooling water pump, and the other end is connected with a water inlet of the cavity.

[0016] The cavity cooling system further comprises a cooling device, the cooling device comprises a cooling water pump, one end of the cooling channel is connected with the cooling water pump, and the other end is connected with a water inlet of the cavity.

[0017] The cavity cooling system further comprises a cooling device, the cooling device comprises a cooling water pump, one end of the cooling channel is connected with the cooling water pump, and the other end is connected with a water inlet of the cavity.

[0018] The cavity cooling system further comprises a cooling device, the cooling device comprises a cooling water pump, one end of the cooling channel is connected with the cooling water pump, and the other end is connected with a water inlet of the cavity.

[0019] The cavity cooling system further comprises a cooling device, the cooling device comprises a cooling water pump, one end of the cooling channel is connected with the cooling water pump, and the other end is connected with a water inlet of the cavity.

[0020] According to the cavity cooling system provided by the present invention, the inflation device includes an inflation tank and an air source, the inflation tank is connected to the cavity via a second pipeline, the second pipeline is provided with a second control valve, and the second connecting pipe and the air supply channel are connected to the inflation tank;

[0021] The gas filling tank is connected to the gas source via a third pipeline, and a fifth control valve is provided on the third pipeline.

[0022] The cavity cooling system provided by the present invention further includes an exhaust gas exhaust device, wherein the exhaust gas exhaust device is connected to the gas outlet of the suction pump via a fourth pipeline, and a sixth control valve is provided on the fourth pipeline;

[0023] The water outlet of the cavity is connected to a wastewater discharge device through a fifth pipeline, and the fifth pipeline is provided with a seventh control valve.

[0024] The present invention provides a cavity cooling system, comprising a cavity, a suction pump, an inflation device, an air supply channel, a cooling channel and a control valve assembly. The suction pump is connected to the cavity and is used to discharge the gas in the cavity, so that the cavity is in a vacuum state, so as to perform vapor deposition on the solar cell; the inflation device is connected to the cavity and can fill the cavity in a vacuum state with inert gas when the vapor deposition is completed, and cool the interior of the cavity by passing the inert gas. One end of the air supply channel is connected to the air outlet of the suction pump, and the other end of the air supply channel is connected to the inflation device. The air supply channel is connected to a cooling device, which is used to extract the inert gas in the cavity through the suction pump, cool it, and then send it into the inflation device, and can also realize the recycling of the inert gas, which not only saves costs, but also improves the cooling efficiency of the cavity by passing the gas to cool the interior of the cavity.

[0025] The present invention further provides a vapor deposition vacuum apparatus including the above-mentioned cavity cooling system. The derivation process of this beneficial effect is generally similar to the derivation process of the beneficial effect brought about by the above-mentioned cavity cooling system, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 It is a structural framework diagram of the cavity cooling system provided by an embodiment of the present invention.

[0028] Figure 2 It is a schematic structural diagram of the cooling pipe in the cavity provided by an embodiment of the present invention.

[0029] Figure 3 It is an exploded view of an air supply channel provided by one embodiment of the present invention.

[0030] Reference numerals:

[0031] 1. Cavity; 2. Suction pump;

[0032] 3. Heat exchange tube; 31. Air supply channel; 32. Cooling channel; 33. End joint; 34. First connecting tube; 35. Second connecting tube; 36. Annular groove;

[0033] 4. Cooling water pump; 5. Air filling tank; 6. Air source; 7. Exhaust gas discharge device; 8. Wastewater discharge device;

[0034] 10. Cooling pipe; 11. First pipeline; 12. Second pipeline; 13. Third pipeline; 14. Fourth pipeline; 15. Fifth pipeline; 16. Sixth pipeline.

[0035] 101. First control valve; 102. Second control valve; 103. Third control valve; 104. Fourth control valve; 105. Fifth control valve; 106. Sixth control valve; 107. Seventh control valve. DETAILED DESCRIPTION

[0036] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0037] The following combination Figures 1 to 3 A chamber cooling system and vapor deposition vacuum equipment provided in embodiments of the present invention are described.

[0038] This embodiment provides a cavity cooling system, such as Figure 1 As shown, it includes a cavity 1, a suction pump 2, an inflation device, an air supply channel 31, a cooling channel 32 and a control valve assembly.

[0039] Among them, the suction pump 2 includes an air intake and an air outlet. The air intake of the suction pump 2 is connected to the cavity 1 and is used to extract the gas in the cavity 1 to make the cavity 1 in a vacuum state to provide vapor deposition conditions for solar cells.

[0040] The air outlet of the inflation device is connected to the cavity 1, and is used to fill the cavity 1 in a vacuum state with inert gas after the vapor deposition is completed. The interior of the cavity 1 is cooled by introducing inert gas such as nitrogen. It should be noted that air cannot be introduced to prevent oxidation of the internal components of the cavity 1.

[0041] One end of the air supply channel 31 is connected to the air outlet of the suction pump 2, and the other end of the air supply channel 31 is connected to the air inlet of the inflation device. The air supply channel 31 is used to return the inert gas extracted by the suction pump 2 to the inflation device.

[0042] The cooling channel 32 contains a cooling medium, and the cooling channel 32 is connected to or in contact with the air supply channel 31 , and is used to cool the inert gas in the air supply channel 31 through heat exchange.

[0043] The control valve assembly includes a first control valve 101 for controlling the connection and disconnection between the suction pump 2 and the cavity 1, a second control valve 102 for controlling the connection and disconnection between the inflation device and the cavity 1, and a third control valve 103 for controlling the connection and disconnection between the air supply channel 31 and the air outlet of the suction pump 2. By opening and closing each control valve, the connection and disconnection of the corresponding pipeline are completed, thereby realizing the vacuuming and breaking operations of the cavity 1.

[0044] It can be seen from the above scheme that compared with the prior art, the present invention sets an air supply channel 31 between the inflation device and the air outlet of the suction pump 2. After the vapor deposition in the cavity 1 is completed, the inflation device fills the cavity 1 with inert gas to break the vacuum, and the interior of the cavity 1 is cooled by the introduced inert gas such as nitrogen. The inert gas is then extracted by the suction pump 2 and sent into the air supply channel 31. The inert gas then enters the inflation device and is sent into the cavity 1. The inert gas in the air supply channel 31 is cooled by heat exchange through the cooling channel 32. This reciprocating cycle not only realizes the recycling of the inert gas and saves costs, but also improves the cooling efficiency of the cavity 1.

[0045] In this embodiment, a cooling device is also included, which includes a cooling water pump 4. One end of the cooling channel 32 is connected to the cooling water pump 4, and the other end is connected to the water inlet of the cavity 1; the cooling water pump 4 provides power to send the cooling medium into the cooling channel 32 so that it exchanges heat with the air supply channel 31, and cooling water can also be sent into the cavity 1. The cooling medium can be liquid nitrogen or other commonly used coolants.

[0046] Further, if Figure 2As shown, cooling pipes 10 are embedded in the bottom and surrounding inner walls of the cavity 1. The starting end of the cooling pipes 10 is connected to the water inlet of the cavity 1, and the end of the cooling pipes 10 is connected to the water outlet of the cavity 1. In this arrangement, the cooling pipes 10 provided in the cavity 1 cool the bottom plate and the surrounding side plates. Cooling water is introduced into the cooling pipes 10 in the cavity 1 by the cooling water pump 4. The cooling water flows along the cooling pipes 10 to cool the bottom plate and the surrounding side plates.

[0047] In some embodiments, interconnected water guide grooves are provided in the bottom plate and side plates of the cavity 1, and the water guide grooves are provided in a spiral shape in the bottom plate and the side plates to ensure uniform cooling of the entire plate. The water inlet and outlet of the cavity 1 are both connected to the water guide grooves, so that the cooling water flows along the water guide grooves to complete the cooling of the bottom plate and the surrounding side plates.

[0048] Furthermore, ventilation pipes are embedded in the bottom and surrounding inner walls of the cavity 1 , and both ends of the ventilation pipes are connected to the suction port of the suction pump 2 and the inflation device respectively.

[0049] With such an arrangement, since the bottom plate and the surrounding side plates in the cavity 1 are cooled by the cooling water in the cooling pipe 10, when inert gas is introduced into the ventilation pipe again, the cooled bottom plate and side plates can absorb the heat in the gas and cool the gas, thereby eliminating the need to cool the air supply channel 31.

[0050] like Figure 3 As shown, the cooling channel 32 and the air supply channel 31 are integrated in the heat exchange tube 3 , the cooling channel 32 is arranged at the center of the heat exchange tube 3 , and multiple air supply channels 31 are arranged around the outside of the cooling channel 32 .

[0051] In some embodiments, the cross-sectional area of ​​the cooling channel 32 may be larger than the cross-sectional area of ​​the air supply channel 31 to improve cooling efficiency.

[0052] It should be noted that the heat exchange tube 3 should be made of a material with good thermal conductivity, and can be a metal tube such as a steel tube. The cross-sections of the cooling channel 32 and the air supply channel 31 are circular holes, and of course they can also be other shapes.

[0053] Furthermore, end fittings 33 are provided at both ends of the heat exchange tube 3. A pair of end fittings 33 are respectively sealedly connected to the two ends of the heat exchange tube 3. A first connecting tube 34 is provided in the middle of the end fittings 33. The first end of the first connecting tube 34 is sealedly connected to the cooling channel 32. The first connecting tube 34 and the cooling channel 32 can be plugged into each other. The second end of the first connecting tube 34 can be connected to the cooling water pump 4 or the water inlet of the cavity 1 through the first pipeline 11. The fourth control valve 104 is provided on the first pipeline 11. In other words, the heat exchange tube 3 is connected between the cooling water pump 4 and the water inlet of the cavity 1 through the first connecting tubes 34 at both ends, so that the cooling medium flows through the heat exchange tube 3 before entering the cavity 1.

[0054] Specifically, an annular groove 36 is provided in the end joint 33, and each air supply channel 31 is connected to the annular groove 36. A second connecting pipe 35 connected to the annular groove 36 is provided on the outside of the end joint 33, and multiple second connecting pipes 35 can be provided. The multiple second connecting pipes 35 are evenly distributed on the outer circumferential surface of the end joint 33. The multiple second connecting pipes 35 at each end of the heat exchange tube 3 are connected in parallel, and the second connecting pipes 35 at both ends of the heat exchange tube 3 are respectively connected to the air outlet of the suction pump 2 and the inflation device.

[0055] With this arrangement, the heat exchange tube 3 can simultaneously transport inert gas and cooling water, and only the cooling device of the system itself is used to achieve water cooling of the inert gas, thereby eliminating the need for an additional cooling device, saving costs and improving production efficiency.

[0056] In other embodiments, the air supply channel 31 is arranged in the cooling channel 32, and the two can be coaxially arranged, and the two ends of the cooling channel 32 are closed, that is, the two ends of the cooling channel 32 are sealed, and a cover plate can be provided at both ends of the cooling channel 32, and the cover plate is sealed and connected to the air supply channel 31 to close the space between the cooling channel 32 and the air supply channel 31 to form a cooling cavity. By providing interfaces at both ends of the cooling cavity, the interfaces at both ends of the cooling cavity are respectively connected to the cooling water pump 4 and the water inlet of the cavity 1, or connected to the first pipeline 11. When the cooling water pump 4 provides cooling water to the cavity 1, the cooling water enters the cooling cavity through the interface, and then flows out from the interface at the other end after the cooling cavity is filled. In this process, the inert gas in the internal air supply channel 31 is cooled, thereby ensuring that the inert gas entering the cavity 1 is a low-temperature gas, thereby improving the cooling effect on the cavity 1.

[0057] Of course, in other embodiments, the cooling channel 32 and the gas feeding channel 31 can also be interchanged in position, i.e. the cooling channel 32 is arranged in the gas feeding channel 31, and the two ends of the cooling channel 32 are connected to the first pipeline 11, the two ends of the gas feeding channel 31 are closed, and the space between the gas feeding channel 31 and the cooling channel 32 forms a gas cavity, and the two interfaces of the gas cavity are connected to the gas charging device and the gas outlet of the suction pump 2 respectively, when the cooling water pump 4 supplies cooling water to the cooling pipe, the cooling water enters the cooling channel 32, and the inert gas enters from the interface at one end of the gas cavity and then flows out from the interface at the other end after the gas cavity is filled, and in this process, the inert gas in the gas feeding channel 31 can also be cooled to achieve the above-mentioned effect.

[0058] It should be noted that the arrangement of the gas feeding channel 31 and the cooling channel 32 includes but is not limited to the above-mentioned structure, and of course, this is only an example and does not limit the scope of protection.

[0059] Optionally, a cooling box is further included, the cooling box is provided with a refrigerant, the gas feeding channel 31 is arranged in the cooling box, the cooling channel 32 is arranged outside the gas feeding channel 31, and the two ends of the cooling box are provided with connecting holes for the cooling channel 32 and the gas feeding channel 31 to enter and exit. In this way, the inert gas in the gas feeding channel 31 can also be cooled, and the gas feeding channel 31 does not need to be provided with a complex structure.

[0060] In this embodiment, the gas charging device includes a gas charging tank 5 and a gas source 6, the gas charging tank 5 is connected to the cavity 1 through the second pipeline 12, the second pipeline 12 is provided with a second control valve 102, the gas charging tank 5 is connected to the gas source 6 through the third pipeline 13, and the third pipeline 13 is provided with a fifth control valve 105. The end of the gas feeding channel 31 away from the suction pump 2 is connected to the gas charging tank 5, or is connected to the fourth pipeline 14 between the fifth control valve 105 and the gas charging tank 5. The second connecting pipe 35 and the interfaces of the gas cavity are also connected to the fourth pipeline 14 between the fifth control valve 105 and the gas charging tank 5.

[0061] In this way, the gas source 6 can supplement the gas to the gas charging tank 5 in time, so as to avoid the influence of the cooling effect of the cavity 1 due to insufficient gas.

[0062] This embodiment also includes an exhaust gas discharge device 7, which is connected to the outlet of the suction pump 2 via a fourth pipeline 14. A sixth control valve 106 is provided on the fourth pipeline 14. An air supply channel 31 is provided in parallel with the fourth pipeline 14. In other words, one end of the air supply channel 31 may be connected to the fourth pipeline 14 between the suction pump 2 and the sixth control valve 106. When the chamber 1 is operating normally, the exhaust gas discharge device 7 treats the gas extracted from the chamber 1 to meet emission standards and prevent pollution to the outside air.

[0063] Furthermore, the water outlet of the cavity 1 is connected to the wastewater discharge device 8 via a fifth pipeline 15, and the fifth pipeline 15 is provided with a seventh control valve 107. The suction pump 2 is connected to the cavity 1 via a sixth pipeline 16, and the first control valve 101 is provided on the sixth pipeline 16.

[0064] In this way, the liquid discharged from the cavity 1 is treated by setting up a wastewater discharge device 8 to remove impurities and harmful components therein so that it meets the industrial wastewater discharge standards. Among them, the tail gas discharge device 7 and the wastewater discharge device 8 are existing technologies and will not be repeated here.

[0065] The following provides a method for using a cavity cooling system, which is applied to the cavity cooling system of the present invention, comprising:

[0066] Step 1: Close the corresponding control valves on the first pipeline 11, the second pipeline 12, the third pipeline 13, the fifth pipeline 15 and the air supply channel 31, and open the corresponding control valves on the sixth pipeline 16 and the fourth pipeline 14;

[0067] Step 2: Turn on the suction pump 2 to evacuate the cavity 1, and extract the gas in the cavity 1 through the sixth pipeline 16 and the fourth pipeline 14 to discharge it to the exhaust device 7;

[0068] Step 3: Open the corresponding control valves on the first pipeline 11 and the fifth pipeline 15, and start the cooling water pump 4. The cooling water enters the cooling pipes 10 on the side panels and the bottom panel of the chamber 1 through the first pipeline 11, and finally flows from the outlet of the chamber 1 to the wastewater discharge device 8.

[0069] Step 4: After the vapor deposition in the chamber 1 is completed, the control valve on the fourth pipeline 14 is closed, and the control valve on the second pipeline 12 is opened. Inert gas is supplied to the vacuum chamber 1 through the gas filling tank 5 and then pumped out through the suction pump 2, thereby cooling the interior of the chamber 1 by the gas.

[0070] Step 5: Open the control valve on the air supply channel 31 to allow the inert gas extracted from the cavity 1 by the suction pump 2 to be cooled through the air supply channel 31 and then sent into the gas filling tank 5 to achieve the recycling of the inert gas.

[0071] Furthermore, step 4 includes the following situations:

[0072] ① The inert gas directly enters the cavity 1, absorbs heat and is pumped out through the suction pump 2.

[0073] ② Inert gas does not enter cavity 1:

[0074] By embedding ventilation pipes in the bottom and surrounding inner walls of the cavity 1, since the bottom plate and surrounding side plates in the cavity 1 are cooled by the cooling water in the cooling pipe 10, when inert gas is introduced into the ventilation pipe, the cooled bottom plate and side plates can absorb heat from the gas and cool the gas. The two ends of the ventilation pipe are respectively connected to the second pipe 12 and the sixth pipe 16. Since the inert gas is cooled by the bottom plate and the side plates, the cooling efficiency of the inside of the cavity 1 can be improved compared with the state at normal temperature; and in this case, there is no need to cool the inert gas entering the cavity 1 in advance.

[0075] ③ Part of the inert gas enters chamber 1, and part enters the ventilation duct. The gas in second pipeline 12 is divided into two paths, one entering chamber 1 and the other entering the ventilation duct. Finally, the two gas paths are combined into sixth pipeline 16. This method can significantly improve the cooling efficiency of chamber 1.

[0076] In this embodiment, since the air supply channel 31 and the cooling channel 32 are arranged differently, step five specifically includes the following situations:

[0077] ① The inert gas delivered by the suction pump 2 first enters the air supply channel 31 of the heat exchange tube 3 through the second connecting pipe 35 of the end joint 33, and then passes through the end joint 33 at the other end of the air supply channel 31 and returns to the charging tank 5 through the second connecting pipe 35; in this process, the first pipeline 11 enters the cooling channel 32 through the first connecting pipe 34, thereby cooling the inert gas in the air supply channel 31. After the cooled inert gas enters the cavity 1 again, it can speed up the cooling time of the cavity 1 and improve efficiency.

[0078] ② The inert gas delivered by the suction pump 2 enters the air supply channel 31. A cooling chamber is set on the outside of the air supply channel 31. The first pipeline 11 is connected to the cooling chamber at both ends of the air supply channel 31. The cooling water fills the cooling chamber and then enters the cavity 1 to achieve cooling from the outside to the inside. In this process, the cooling of the inert gas in the inner air supply channel 31 is completed.

[0079] ③ The inert gas delivered by the suction pump 2 enters the air cavity formed between the air supply channel 31 and the inner cooling pipe. The first pipeline 11 is connected to both ends of the cooling pipe to achieve cooling from the inside to the outside. The cooling water flows through the cooling pipe and then enters the cavity 1. In this process, the inert gas in the outer air cavity is cooled.

[0080] An embodiment of the present invention further provides a vapor deposition vacuum device, comprising the above-mentioned cavity cooling system.

[0081] The above-mentioned vapor deposition vacuum equipment adopts the above-mentioned cavity cooling system, which can reduce costs, improve cooling efficiency, and thus improve production efficiency when performing a vapor deposition process on solar cells.

[0082] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A cavity cooling system, characterized in that: include: Cavity (1); A suction pump (2) comprising an air intake and an air outlet, wherein the air intake of the suction pump (2) is connected to the cavity (1) and is used to extract the gas in the cavity (1); an inflation device, the gas outlet of the inflation device being connected to the cavity (1) and being used for filling the cavity (1) with an inert gas; an air supply channel (31), one end of the air supply channel (31) being connected to the air outlet of the suction pump (2), and the other end of the air supply channel (31) being connected to the air inlet of the inflation device, and the air supply channel (31) being used to return the inert gas extracted by the suction pump (2) to the inflation device; a cooling channel (32), wherein a cooling medium is contained in the cooling channel (32), the cooling channel (32) being connected to or in contact with the air supply channel (31) and being used to cool the inert gas in the air supply channel (31) by heat exchange; A control valve assembly, comprising a first control valve (101) for controlling the connection and disconnection between the suction pump (2) and the cavity (1), a second control valve (102) for controlling the connection and disconnection between the inflation device and the cavity (1), and a third control valve (103) for controlling the connection and disconnection between the air delivery channel (31) and the air outlet of the suction pump (2); A cooling device, the cooling device includes a cooling water pump (4), one end of the cooling channel (32) is connected to the cooling water pump (4), and the other end is connected to the water inlet of the cavity (1); a ventilation pipe is embedded in the bottom and the inner walls around the cavity (1), and the two ends of the ventilation pipe are respectively connected to the suction port of the suction pump (2) and the inflation device.

2. The cavity cooling system according to claim 1, characterized in that: A cooling pipe (10) is embedded in the bottom and surrounding inner walls of the cavity (1), the starting end of the cooling pipe (10) is connected to the water inlet of the cavity (1), and the end of the cooling pipe (10) is connected to the water outlet of the cavity (1).

3. The cavity cooling system according to claim 2, characterized in that: The cooling channel (32) and the air supply channel (31) are integrated and arranged in the heat exchange tube (3); the cooling channel (32) is arranged at the center of the heat exchange tube (3); and a plurality of the air supply channels (31) are arranged around the outside of the cooling channel (32).

4. The cavity cooling system according to claim 3, characterized in that: It also includes end joints (33), a pair of the end joints (33) are respectively sealed and connected to the two ends of the heat exchange tube (3); a first connecting pipe (34) is provided in the middle of the end joints (33), a first end of the first connecting pipe (34) is sealed and connected to the cooling channel (32), a second end of the first connecting pipe (34) is connected to the cooling water pump (4) or the water inlet of the cavity (1) through a first pipeline (11), and a fourth control valve (104) is provided on the first pipeline (11); An annular groove (36) is provided in the end joint (33), and each of the air supply channels (31) is communicated with the annular groove (36). A second connecting pipe (35) is provided on the outside of the end joint (33) and is communicated with the annular groove (36). The second connecting pipes (35) located at both ends of the heat exchange tube (3) are respectively communicated with the air outlet of the suction pump (2) and the inflation device.

5. The cavity cooling system according to claim 2, characterized in that: The air supply channel (31) is arranged in the cooling channel (32), and both ends of the cooling channel (32) are closed. The space between the cooling channel (32) and the air supply channel (31) forms a cooling cavity, and the two ends of the cooling cavity are respectively connected to the cooling water pump (4) and the water inlet of the cavity (1) through a first pipeline (11).

6. The cavity cooling system according to claim 2, characterized in that: The invention also includes a cooling box, wherein a refrigerant is provided in the cooling box, the air supply channel (31) is arranged in the cooling box, the cooling channel (32) is arranged on the outside of the air supply channel (31), and connecting holes for the cooling channel (32) and the air supply channel (31) to enter and exit are reserved at both ends of the cooling box.

7. The cavity cooling system according to claim 4, characterized in that: The inflation device comprises an inflation tank (5) and an air source (6); the inflation tank (5) is connected to the cavity (1) via a second pipeline (12); the second pipeline (12) is provided with a second control valve (102); the second connecting pipe (35) and the air supply channel (31) are connected to the inflation tank (5); The gas filling tank (5) is connected to the gas source (6) via a third pipeline (13), and a fifth control valve (105) is provided on the third pipeline (13).

8. The cavity cooling system according to claim 1, characterized in that: It also includes an exhaust gas discharge device (7), the exhaust gas discharge device (7) is connected to the gas outlet of the suction pump (2) via a fourth pipeline (14), and a sixth control valve (106) is provided on the fourth pipeline (14); The water outlet of the cavity (1) is connected to a wastewater discharge device (8) via a fifth pipeline (15), and the fifth pipeline (15) is provided with a seventh control valve (107).

9. A vapor deposition vacuum device, characterized in that: The cavity cooling system comprises the cavity cooling system according to any one of claims 1 to 8.

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