Micro-nano-arc measurement device and method for two-dimensional angle

Abstract

The present application provides a two-dimensional angle inspection device and method in micro-nano radian level. The device is composed of an angle generating device, a base, an angle measuring device, a driving module circuit board, a main control module circuit board, and a display and input module circuit board. The method uses two sets of driving devices and two autocollimators to expand the angle generating capacity and angle measuring capacity of the small-angle inspection instrument to the roll angle and pitch angle directions, so that the small-angle inspection instrument has the ability to generate two-dimensional standard angles. The present application improves the resolution of the angle measuring device to the micro-nano radian level, thus solving the problem of the small-angle inspection instrument lacking high resolution. The combination of the lead screw motor with large stroke and low displacement resolution and the piezoelectric ceramic with small stroke and high displacement resolution is used to achieve coarse positioning in a large stroke range and accurate compensation in a small range, respectively, so that the angle generating device has the advantage of generating micro-nano radian level small angles in the full stroke range.

Description

Technical Field

[0001] This invention belongs to the field of precision measurement technology, and in particular relates to a device and method for checking two-dimensional angles at the micro-nano arc level. Background Technology

[0002] Precision small-angle measuring instruments play a vital role in precision measurement technology, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing. However, due to the accumulation of errors during use, the measurement accuracy of these instruments will continuously decline. Therefore, regular verification and calibration of the instruments are necessary to meet the small-angle measurement requirements of these fields.

[0003] Professional metrology institutions are capable of verifying and calibrating precision small-angle measuring instruments, but sending instruments for verification incurs time costs, reduces the efficiency of instrument use, and cannot meet the needs of high-frequency verification and calibration in specific scenarios.

[0004] The small-angle measuring instrument boasts advantages such as a large measuring range, high resolution, and ease of operation, exhibiting outstanding overall performance. It can instantly complete the verification and calibration of various precision small-angle measuring instruments, and therefore has been widely used.

[0005] Traditional small-angle inspection instruments, such as Figure 1 As shown, the device includes a ribbed worktable 1, a worktable shaft 2, a worktable support 3, a drive device 4, a first positioning indicator 5, a second positioning indicator 6, and a base 7. The ribbed worktable 1 contacts the worktable support 3 via the worktable shaft 2 and, under the drive device 4, generates a one-dimensional pitch angle. Both the worktable support 3 and the drive device 4 are located on the base 7. The angle of deflection of the ribbed worktable 1 can be calculated by the difference in readings of the first positioning indicator 5 and the second positioning indicator 6, as well as the distance between their central axes. In this structure, the drive device 4 and the positioning indicators 5 and 6 can only generate and measure one-dimensional angles, and the small angle inspection instrument cannot inspect two-dimensional angles. The drive device 4 is usually a single motor; increasing the displacement resolution will reduce the stroke. To meet the stroke requirements, the motor resolution is limited to the micrometer level. The positioning indicators 5 and 6 have large measurement errors, making it difficult for the resolution of both the angle generating and measuring devices of the small angle inspection instrument to break through the bottleneck of the micro-nano arc level.

[0006] In summary, this device has the following three problems:

[0007] First, traditional small angle inspection instruments only use one set of drive devices to push the ribbed worktable, and the positioning indicators are only distributed in one direction. They do not have the ability to generate and measure two-dimensional angles, so they can only inspect one-dimensional angles.

[0008] Second, the angle measurement methods used by traditional small-angle inspection instruments have limited resolution, making it difficult to achieve high angle resolution at the micro-nano arc level.

[0009] Third, the traditional small angle tester has a contradiction between the stroke of the angle generating device and the resolution, and cannot realize the resolution of micro-nanoradian level in a large stroke range.

[0010] Therefore, the traditional small angle tester cannot check two-dimensional angles, the angle measurement device does not have high resolution, and the stroke of the angle generating device and the resolution cannot be considered. SUMMARY

[0011] The purpose of the present application is to solve the problems of the traditional small angle tester, which can only check one-dimensional angles, the angle measurement device does not have high resolution, and the stroke of the angle generating device and the resolution cannot be considered. A micro-nanoradian level two-dimensional angle checking device and method are proposed.

[0012] The method uses two sets of driving devices to form the angle generating device of the small angle tester, expands the motion degrees of freedom of the workbench to two directions of roll and pitch, and has angle measurement devices in the vertical direction of the two rotation axes to detect in real time. The angle generating device is controlled by closed-loop feedback to ensure the accuracy of the angle generation of the workbench. Experimental verification shows that the method can generate two-dimensional standard angles, and solves the problem that the small angle tester cannot check two-dimensional angles.

[0013] The method uses a collimator as an angle measurement device, which effectively improves the resolution of the angle measurement device. Experimental verification shows that the collimator can distinguish micro-nanoradian level small angle changes, and solves the problem that the small angle tester does not have high resolution.

[0014] At the same time, the method uses a micro-nanoradian level angle generating method based on macro-micro combined driving. The screw motor with large stroke and low displacement resolution is combined with the piezoelectric ceramic with small stroke and high displacement resolution to realize coarse positioning in a large stroke range and accurate compensation in a small range, respectively. The angle generating device can generate micro-nanoradian level small angles in the full stroke range, and solves the problem that the small angle tester cannot consider the large stroke and high resolution of the angle generating device.

[0015] Therefore, compared with the traditional small angle tester, the present application has the technical advantages of being able to check two-dimensional angles, the angle measurement resolution, and the angle generating resolution in a large stroke range reaching the micro-nanoradian level.

[0016] The application is realized by the following technical scheme, the application proposes a micro-nano radian two-dimensional angle inspection device, which comprises a ribbed workbench, a workbench rotating shaft, a workbench support, a driving device (including a first piezoelectric ceramic, a first lead screw motor, a second piezoelectric ceramic and a second lead screw motor), a base, a first plane mirror, a second plane mirror, a first autocollimator, a second autocollimator, a driving module circuit board, a main control module circuit board and a display and input module circuit board; after the display and input module circuit board receives an angle calibration requirement, the main control module circuit board sends an angle generation requirement to the driving module circuit board, controls the angle generation device, and makes the ribbed workbench deflect in the rolling or pitching direction; the angle measurement device detects the deflection angle of the ribbed workbench in the two-dimensional direction in real time, and sends the measurement result back to the main control module circuit board; the main control module circuit board controls the angle generation device according to the angle measurement result, realizes closed-loop feedback compensation, and thus the device can generate standard angles in two dimensions.

[0017] The angle generation device is composed of the ribbed workbench, the workbench rotating shaft, the workbench support, the driving device (including the first piezoelectric ceramic, the first lead screw motor, the second piezoelectric ceramic and the second lead screw motor), the workbench rotating shaft is coaxial with the workbench support, the first piezoelectric ceramic is coaxial with the first lead screw motor, and the second piezoelectric ceramic is coaxial with the second lead screw motor; the positions of the workbench support and the first lead screw motor on the base are located on the same straight line parallel to the rolling angle rotating shaft, and the positions of the workbench support and the second lead screw motor on the base are located on the same straight line parallel to the pitching angle rotating shaft; the ribbed workbench is connected with the workbench support through the workbench rotating shaft and can deflect by a small angle in the rolling and pitching directions under the driving of the driving device.

[0018] The angle measurement device is composed of the first plane mirror, the second plane mirror, the first autocollimator and the second autocollimator; after the ribbed workbench deflects in the two-dimensional direction, the first autocollimator measures the rolling angle through the first plane mirror, and the second autocollimator measures the pitching angle through the second plane mirror, so that the angle measurement resolution of the system device is improved to the micro-nano radian level.

[0019] The first piezoelectric ceramic and the first lead screw motor and the second piezoelectric ceramic and the second lead screw motor respectively constitute two sets of macro-micro combined driving devices; after the first lead screw motor and the second lead screw motor with low displacement resolution and large stroke realize coarse positioning in a large stroke range, the first piezoelectric ceramic and the second piezoelectric ceramic with high displacement resolution and small stroke make accurate compensation under the closed-loop feedback of the angle measurement device, so that the device can generate a micro-nano radian angle in a large stroke range.

[0020] The angle generation device and the angle measurement device are located on the base, so as to reduce the influence of the environment on the system device.

[0021] The application further provides a micro-nano radian two-dimensional angle checking method realized on the micro-nano radian two-dimensional angle checking device.

[0022] Step a, a zero setting instruction is sent to the display and input module circuit board, so that the ribbed workbench is at zero position in the roll angle direction and the pitch angle direction, the instrument to be checked is placed on the ribbed workbench and the reading is zero set;

[0023] Step b, a roll angle generating instruction is sent to the display and input module circuit board, after the main control module circuit board receives the instruction, the total displacement h1 is generated by the driving module circuit board under the feedback of the first autocollimator measurement value, so that the ribbed workbench generates the standard angle required by the instrument to be checked in the roll angle direction, the roll angle reading of the recording device is s1, and the roll angle display value of the instrument to be checked is a1, a1-s1 is the roll angle indication error of the instrument to be checked at the test point; wherein s1=f1(h1), f1 represents a function;

[0024] Step c, step b is repeated to complete the indication error checking of all test points of the instrument to be checked in the roll angle direction;

[0025] Step d, a zero setting instruction is sent to the display and input module circuit board, so that the ribbed workbench is at zero position in the roll angle direction and the pitch angle direction again, and the reading of the instrument to be checked is zero set;

[0026] Step e, a pitch angle generating instruction is sent to the display and input module circuit board, after the main control module circuit board receives the instruction, the total displacement h2 is generated by the driving module circuit board under the feedback of the second autocollimator measurement value, so that the ribbed workbench generates the standard angle required by the instrument to be checked in the pitch angle direction, the pitch angle reading of the system device is s2, and the pitch angle display value of the instrument to be checked is a2, a2-s2 is the pitch angle indication error of the instrument to be checked at the test point; wherein s2=f2(h2), f2 represents a function;

[0027] Step f, step e is repeated to complete the indication error checking of all test points of the instrument to be checked in the pitch angle direction.

[0028] The application has the following beneficial effects:

[0029] 1. In view of the problem that the traditional small-angle tester can only check one-dimensional angle, the application proposes a two-dimensional angle checking method. The angle generating device composed of two sets of driving devices expands the motion degree of freedom of the workbench to two directions of roll and pitch, and the angle measurement device in the vertical axis direction of the two rotating shafts detects in real time, and the angle generating device is controlled by closed-loop feedback to ensure the accuracy of the angle generation of the workbench. Experimental verification shows that the method can generate two-dimensional standard angle, solving the problem that the small-angle tester cannot check two-dimensional angle.

[0030] 2. In view of the problem that the angle measurement device of the traditional small-angle tester does not have high resolution, the application uses a autocollimator as the angle measurement device, which not only effectively improves the resolution of the angle measurement device, but also expands the range. Experimental verification shows that the angle resolution of the autocollimator can reach the order of micro-nanoradian, solving the problem that the angle measurement device cannot detect small angle.

[0031] 3. In view of the problem that the stroke and resolution of the angle generating device of the traditional small-angle tester cannot be considered, the application uses a micro-nanoradian level angle generating method based on macro-micro combined driving. The screw motor with large stroke and low displacement resolution is combined with the piezoelectric ceramic with small stroke and high displacement resolution to realize coarse positioning in a large stroke range and accurate compensation in a small range, so that the angle generating device can generate micro-nanoradian level small angle in the full stroke, solving the problem that the angle generating device cannot consider large stroke and high resolution.

[0032] In addition, the application has the following technical advantages:

[0033] First, the two sets of driving devices, the workbench rotating shaft and the workbench form a three-point contact stable plane, improving the position repeatability of the workbench.

[0034] Second, when the macro-micro combined driving device of the application uses piezoelectric ceramic for accurate angle compensation, the piezoelectric ceramic has high displacement resolution and small step, which can drive the ribbed workbench to generate quasi-static motion, meeting the requirement of slow angle generation of the small-angle tester. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 is a structural schematic diagram of the traditional small-angle tester.

[0036] Figure 2a is a top view structural diagram of the first embodiment of the micro-nanoradian level two-dimensional angle checking device.

[0037] Figure 2b is a side view structural diagram of the first embodiment of the micro-nanoradian level two-dimensional angle checking device.

[0038] Figure 3ais the top view structural diagram of the micro-nano radian level two-dimensional angle inspection device of embodiment two of the present application.

[0039] Figure 3b is the side view structural diagram of the micro-nano radian level two-dimensional angle inspection device of embodiment two of the present application.

[0040] Figure 4a is the top view structural diagram of the micro-nano radian level two-dimensional angle inspection device of embodiment three of the present application.

[0041] Figure 4b is the side view structural diagram of the micro-nano radian level two-dimensional angle inspection device of embodiment three of the present application.

[0042] Figure 5a is the top view structural diagram of the micro-nano radian level two-dimensional angle inspection device of embodiment four of the present application.

[0043] Figure 5b is the side view structural diagram of the micro-nano radian level two-dimensional angle inspection device of embodiment four of the present application.

[0044] Figure 6 is the layout schematic diagram of the workbench rotating shaft 2 and the driving device 4 in embodiment four.

[0045] In the figure: 1 ribbed workbench, 2 workbench rotating shaft, 3 workbench support, 4 driving device (41 first piezoelectric ceramic, 42 first lead screw motor, 43 second piezoelectric ceramic, 44 second lead screw motor), 5 first positioning indicator, 6 second positioning indicator, 7 base, 8 first plane mirror, 9 second plane mirror, 10 first autocollimator, 11 second autocollimator, 12 driving module circuit board, 13 main control module circuit board, 14 display, input module circuit board. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application. Embodiment one

[0048] The present embodiment is a micro-nano radian level two-dimensional angle inspection device.

[0049] The micro-nano radian level two-dimensional angle inspection device of the present embodiment has a structural schematic diagram as shown in Figure 2a and Figure 2bThe angle inspection device is shown in the figure. The angle inspection device comprises a ribbed workbench 1, a workbench rotating shaft 2, a workbench support 3, a driving device 4 (a first piezoelectric ceramic 41, a first screw motor 42, a second piezoelectric ceramic 43, a second screw motor 44), a base 7, a first plane mirror 8, a second plane mirror 9, a first autocollimator 10, a second autocollimator 11, a driving module circuit board 12, a main control module circuit board 13 and a display and input module circuit board 14;

[0050] After the display and input module circuit board 14 receives the angle inspection requirement, the angle generation requirement is sent to the driving module circuit board 12 through the main control module circuit board 13, the angle generation device is controlled, the ribbed workbench 1 is deflected in the roll or pitch direction, the angle measurement device detects the deflection angle of the ribbed workbench 1 in the two-dimensional direction in real time, and the measurement result is sent back to the main control module circuit board 13; the main control module circuit board 13 controls the angle generation device according to the angle measurement result to realize closed-loop feedback compensation.

[0051] The angle generation device comprises the ribbed workbench 1, the workbench rotating shaft 2, the workbench support 3, the driving device 4 (the first piezoelectric ceramic 41, the first screw motor 42, the second piezoelectric ceramic 43, the second screw motor 44), the workbench rotating shaft 2 is coaxial with the workbench support 3, the first piezoelectric ceramic 41 is coaxial with the first screw motor 42, and the second piezoelectric ceramic 43 is coaxial with the second screw motor 44; the positions of the workbench support 3 and the first screw motor 42 on the base 7 are located on the same straight line parallel to the roll angle rotation axis, and the positions of the workbench support 3 and the second screw motor 44 on the base 7 are located on the same straight line parallel to the pitch angle rotation axis; the ribbed workbench 1 is connected with the workbench support 3 through the workbench rotating shaft 2 and can be deflected by a small angle in the roll and pitch directions under the pushing of the driving device 4.

[0052] The angle measurement device comprises the first plane mirror 8, the second plane mirror 9, the first autocollimator 10 and the second autocollimator 11; after the ribbed workbench 1 is deflected in the two-dimensional direction, the first autocollimator 10 measures the roll angle through the first plane mirror 8, and the second autocollimator 11 measures the pitch angle through the second plane mirror 9.

[0053] The first piezoelectric ceramic 41 and the first screw motor 42 and the second piezoelectric ceramic 43 and the second screw motor 44 respectively comprise two sets of macro-micro combined driving devices; after the first screw motor 42 and the second screw motor 44 with low displacement resolution and large stroke realize coarse positioning in a large stroke range, the first piezoelectric ceramic 41 and the second piezoelectric ceramic 43 with high displacement resolution and small stroke make accurate compensation under the closed-loop feedback of the angle measurement device.

[0054] The angle generation device and the angle measurement device are located on the base 7.

[0055] The inspection principle is as follows:

[0056] When the instrument to be inspected is calibrated for the roll angle, the main control module circuit board 13 sends a command to the drive module circuit board 12 to generate a standard angle s1 in the roll angle direction. The drive module circuit board 12 controls the second screw motor 44 to move in a large stroke range, so that the ribbed workbench 1 generates a roll angle close to s1.

[0057] Since the ribbed workbench 1 deflects the first plane mirror 8 in the pitch angle direction, the first autocollimator 10 can measure the roll angle generated by the ribbed workbench 1 in real time. The main control module circuit board 13 calculates the deviation value between the angle generated by the ribbed workbench 1 and the standard angle s1 according to the measurement value, and sends the deviation value to the drive module circuit board 12.

[0058] The drive module circuit board 12 controls the second piezoelectric ceramic 43 to make accurate compensation, so that the total displacement of the second piezoelectric ceramic 43 and the second screw motor 44 is h1. Since there is a relationship s1 = f1(h1), the angle generated by the ribbed workbench 1 in the roll angle direction at this time is the standard angle s1. Record the roll angle display value of the instrument to be calibrated as α1, and α1-s1 is the roll angle display error of the instrument to be calibrated at the inspection point.

[0059] When the instrument to be inspected is calibrated for the pitch angle, the main control module circuit board 13 sends a command to the drive module circuit board 12 to generate a standard angle s2 in the pitch angle direction. The drive module circuit board 12 controls the first screw motor 42 to move in a large stroke range, so that the ribbed workbench 1 generates a pitch angle close to s2.

[0060] Since the ribbed workbench 1 deflects the second plane mirror 9 in the pitch angle direction, the second autocollimator 11 can measure the pitch angle generated by the ribbed workbench 1 in real time. The main control module circuit board 13 calculates the deviation value between the angle generated by the ribbed workbench 1 and the standard angle s2 according to the measurement value, and sends the deviation value to the drive module circuit board 12.

[0061] The drive module circuit board 12 controls the first piezoelectric ceramic 41 to make accurate compensation, so that the total displacement of the first piezoelectric ceramic 41 and the first screw motor 42 is h2. Since there is a relationship s2 = f2(h2), the angle generated by the ribbed workbench 1 in the pitch angle direction at this time is the standard angle s2. Record the pitch angle display value of the instrument to be calibrated as α2, and α2-s2 is the pitch angle display error of the instrument to be calibrated at the inspection point.

[0062] The micro-nano arc measurement two-dimensional angle inspection method embodiment of the embodiment includes the following steps:

[0063] Step a, send a zero setting instruction to the display, input module circuit board 14, so that the ribbed workbench 1 is in zero position in both roll angle direction and pitch angle direction, place the instrument to be calibrated on the ribbed workbench 1 and set the zero reading;

[0064] Step b, send a roll angle generating instruction to the display, input module circuit board 14, after the main control module circuit board 13 receives the instruction, the drive module circuit board 12 controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator 10, so that the ribbed workbench 1 generates a standard angle required by the instrument to be calibrated in the roll angle direction, and the roll angle reading of the recording device is s1, and the roll angle display value of the instrument to be calibrated is α1, and α1-s1 is the roll angle indication error of the instrument to be calibrated at the test point; wherein s1=f1(h1), and f1 represents a function;

[0065] Step c, repeat step b to complete the indication error calibration of all test points of the instrument to be calibrated in the roll angle direction;

[0066] Step d, send a zero setting instruction to the display, input module circuit board 14, so that the ribbed workbench 1 is in zero position in both roll angle direction and pitch angle direction again, and set the indication of the instrument to be calibrated to zero;

[0067] Step e, send a pitch angle generating instruction to the display, input module circuit board 14, after the main control module circuit board 13 receives the instruction, the drive module circuit board 12 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator 11, so that the ribbed workbench 1 generates a standard angle required by the instrument to be calibrated in the pitch angle direction, and the pitch angle reading of the system device is s2, and the pitch angle display value of the instrument to be calibrated is α2, and α2-s2 is the pitch angle indication error of the instrument to be calibrated at the test point; wherein s2=f2(h2), and f2 represents a function;

[0068] Step f, repeat step e to complete the indication error calibration of all test points of the instrument to be calibrated in the pitch angle direction;

[0069] The innovation of the present application lies in that the angle generating device of the system device is composed of the first piezoelectric ceramic 41, the first lead screw motor 42, the second piezoelectric ceramic 43 and the second lead screw motor 44, the movement degree of freedom of the ribbed workbench 1 is expanded to two directions of roll and pitch, the angle measurement device is arranged in the vertical direction of the two rotating shafts to detect the angle of the angle generating device in real time, and the closed-loop feedback control is performed on the angle generating device, so that the accuracy of the angle generation of the ribbed workbench 1 is ensured. It is verified by experiments that the method can generate two-dimensional standard angles, and the problem that the system device cannot check two-dimensional angles is solved;

[0070] The first plane mirror 8, the second plane mirror 9, the first autocollimator 10 and the second autocollimator 11 are used as the angle measuring device, and the resolution of the angle measuring device is effectively improved. According to experiments, the angle resolution of the first autocollimator 10 and the second autocollimator 11 can reach the micro-nanoradian level, and the problem that the angle measuring device cannot detect a small angle is solved.

[0071] Meanwhile, the micro-nanoradian level angle generating method based on macro-micro joint driving is used. The first screw motor 42 and the second screw motor 44 with large stroke and low displacement resolution are combined with the first piezoelectric ceramic 41 and the second piezoelectric ceramic 43 with small stroke and high displacement resolution, and the coarse positioning in a large stroke range and the accurate compensation in a small range are realized respectively, so that the angle generating device can generate a small angle of the micro-nanoradian level in the full stroke range, and the problem that the angle generating device cannot consider the large stroke and the high resolution is solved.

[0072] Therefore, compared with the conventional device, the present application has the technical advantages that the two-dimensional angle can be checked, the resolution of the angle measuring device is high, and the resolution of the angle generating device in the large stroke range can reach the micro-nanoradian level. Specific embodiment two

[0074] The present embodiment is a micro-nanoradian level two-dimensional angle checking device embodiment.

[0075] The micro-nanoradian level two-dimensional angle checking device of the present embodiment has a structure schematic diagram as shown in Figure 3a and Figure 3b .

[0076] On the basis of the specific embodiment one, the positions of the first screw motor 42 and the second screw motor 44 on the base 7 are located on the same straight line parallel to the pitch angle rotation axis, and the position of the workbench support 3 on the base 7 is located on the perpendicular bisector of the position connecting line of the first screw motor 42 and the second screw motor 44, as shown in Figure 3a and Figure 3b .

[0077] The micro-nanoradian level two-dimensional angle checking method embodiment of the present embodiment includes the following steps:

[0078] Step a, a zero setting instruction is sent to the display and input module circuit board 14, so that the ribbed workbench 1 is in zero position in the roll angle direction and the pitch angle direction, the instrument to be checked is placed on the ribbed workbench 1 and the zero setting is performed;

[0079] Step b, send the roll angle generating instruction to the display and input module circuit board 14, and the main control module circuit board 13 receives the instruction, and then the drive module circuit board 12 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 to generate the total displacement h1 under the feedback of the measurement value of the first autocollimator 10, controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate the total displacement h2, and makes the ribbed workbench 1 generate the standard angle required by the instrument to be tested at the detection point in the roll angle direction, records the roll angle reading of the device as s1, and records the roll angle display value of the instrument to be tested as α1, and α1-s1 is the indication error of the instrument to be tested at the detection point in the roll angle direction; wherein s1=f1(h1, h2), h1=f2(h2), and f1 and f2 represent two functions.

[0080] Step c, repeat step b to complete the indication error test of the instrument to be tested at all detection points in the roll angle direction.

[0081] Step d, send the zero adjustment instruction to the display and input module circuit board 14, so that the ribbed workbench 1 is again at zero in the roll angle direction and the pitch angle direction, and the indication of the instrument to be tested is adjusted to zero.

[0082] Step e, send the pitch angle generating instruction to the display and input module circuit board 14, and the main control module circuit board 13 receives the instruction, and then the drive module circuit board 12 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 and the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate the total displacement h3 under the feedback of the measurement value of the second autocollimator 11, so that the ribbed workbench 1 generates the standard angle required by the instrument to be tested at the detection point in the pitch angle direction, records the pitch angle reading of the system device as s2, and records the pitch angle display value of the instrument to be tested as α2, and α2-s2 is the indication error of the instrument to be tested at the detection point in the pitch angle direction; wherein s2=f3(h3), and f3 represents one function.

[0083] Step f, repeat step e to complete the indication error test of the instrument to be tested at all detection points in the pitch angle direction.

[0084] This embodiment is a micro-nanorad two-dimensional angle inspection device embodiment.

[0085] The micro-nanorad two-dimensional angle inspection device of this embodiment has a structural schematic diagram as shown in Figure 4a and Figure 4b .

[0086] On the basis of the specific embodiment one, the positions of the workbench support 3 and the first lead screw motor 42 on the base 7 are located on the same straight line parallel to the roll angle rotation axis, and the position of the second lead screw motor 44 on the base 7 is located on the perpendicular bisector of the line connecting the positions of the workbench support 3 and the first lead screw motor 42, as shown in Figure 4a andFigure 4b as shown.

[0087] The micro-nano radian level two-dimensional angle inspection method embodiment of the present embodiment comprises the following steps:

[0088] Step a, send a zero setting instruction to the display and input module circuit board 14, so that the ribbed workbench 1 is at zero in both the roll angle direction and the pitch angle direction, place the instrument to be inspected on the ribbed workbench 1 and set the zero reading;

[0089] Step b, send a roll angle generation instruction to the display and input module circuit board 14, after the main control module circuit board 13 receives the instruction, the drive module circuit board 12 controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator 10, so that the ribbed workbench 1 generates the standard angle required by the instrument to be inspected in the roll angle direction, record the roll angle reading of the system device as s1, and record the roll angle display value of the instrument to be inspected as α1, and α1-s1 is the indication error of the instrument to be inspected at the inspection point; wherein s1=f1(h1), and f1 represents a function;

[0090] Step c, repeat step b to complete the indication error inspection of all inspection points of the instrument to be inspected in the roll angle direction;

[0091] Step d, send a zero setting instruction to the display and input module circuit board 14, so that the ribbed workbench 1 is again at zero in both the roll angle direction and the pitch angle direction, and set the indication of the instrument to be inspected to zero;

[0092] Step e, send a pitch angle generation instruction to the display and input module circuit board 14, after the main control module circuit board 13 receives the instruction, the drive module circuit board 12 controls the first piezoelectric ceramic 41 and the first lead screw motor 42 to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator 11, and controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h3, so that the ribbed workbench 1 generates the standard angle required by the instrument to be inspected in the pitch angle direction, record the pitch angle reading of the device as s2, and record the pitch angle display value of the instrument to be inspected as α2, and α2-s2 is the indication error of the instrument to be inspected at the inspection point; wherein s2=f2(h2, h3), h2=f3(h3), and f2, f3 represent two functions;

[0093] Step f, repeat step e to complete the indication error inspection of all inspection points of the instrument to be inspected in the pitch angle direction; specific embodiment four

[0094] The micro-nano radian level two-dimensional angle inspection device embodiment of the present embodiment.

[0095] The micro-nano radian level two-dimensional angle inspection device of the present embodiment, a structural schematic diagram is asFigure 5a , Figure 5b and Figure 6 as shown.

[0096] On the basis of the first specific embodiment, the positions of the workbench support 3 and the first lead screw motor 42 on the base 7 are located on the same straight line parallel to the roll angle rotation axis, and the positions of the first lead screw motor 42 and the second lead screw motor 44 on the base 7 are located on the same straight line parallel to the pitch angle rotation axis, as shown in Figure 5a , Figure 5b and Figure 6 as shown.

[0097] or

[0098] On the basis of the first specific embodiment, the positions of the first lead screw motor 42 and the second lead screw motor 44 on the base 7 are located on the same straight line parallel to the roll angle rotation axis, and the positions of the workbench support 3 and the second lead screw motor 44 on the base 7 are located on the same straight line parallel to the pitch angle rotation axis, as shown in Figure 5a , Figure 5b and Figure 6 as shown.

[0099] The micro-nano radian level two-dimensional angle inspection method embodiment of the present embodiment comprises the following steps:

[0100] Step a, send a zero setting instruction to the display and input module circuit board 14, so that the ribbed workbench 1 is in zero position in the roll angle direction and the pitch angle direction, place the instrument to be inspected on the ribbed workbench 1 and set the zero reading;

[0101] Step b, send a roll angle generation instruction to the display and input module circuit board 14, and after the main control module circuit board 13 receives the instruction, the drive module circuit board 12 controls the second piezoelectric ceramic 43 and the second lead screw motor 44 to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator 10, so that the ribbed workbench 1 generates the standard angle required by the instrument to be inspected in the roll angle direction, and the roll angle reading of the recording device is s1, and the roll angle display value of the instrument to be inspected is α1, and α1-s1 is the roll angle indication error of the instrument to be inspected at the inspection point; wherein s1=f1(h1), f1 represents a function;

[0102] or

[0103] Send roll angle occurrence instruction to display, input module circuit board 14, master control module circuit board 13 receives instruction, and by drive module circuit board 12 under the feedback of the first autocollimator 10 measurement, control first piezoelectric ceramic 41, first lead screw motor 42 and second piezoelectric ceramic 43, second lead screw motor 44 all occur total displacement h1, make the ribbed workbench 1 in the roll angle direction occurs the standard angle required by the instrument to be tested, take the roll angle reading of the device as s1, and take the roll angle display value of the instrument to be tested as α1, α1-s1 is the roll angle indication error of the instrument to be tested at the test point;Wherein, s1=f1 (h1), f1 indicates a function;

[0104] Step c, repeat step b, complete the indication error detection of the instrument to be tested at all test points in the roll angle direction;

[0105] Step d, send zero adjustment instruction to display, input module circuit board 14, make the ribbed workbench 1 in the roll angle direction and the pitch angle direction again at zero, adjust the indication of the instrument to be tested;

[0106] Step e, send pitch angle occurrence instruction to display, input module circuit board 14, master control module circuit board 13 receives instruction, and by drive module circuit board 12 under the feedback of the second autocollimator 11 measurement, control first piezoelectric ceramic 41, first lead screw motor 42 and second piezoelectric ceramic 43, second lead screw motor 44 all occur total displacement h2, make the ribbed workbench 1 in the pitch angle direction occurs the standard angle required by the instrument to be tested, take the pitch angle reading of the device as s2, and take the pitch angle display value of the instrument to be tested as α2, α2-s2 is the pitch angle indication error of the instrument to be tested at the test point;Wherein, s2=f2 (h2), f2 indicates a function;

[0107] Or

[0108] Send pitch angle occurrence instruction to display, input module circuit board 14, master control module circuit board 13 receives instruction, and by drive module circuit board 12 under the feedback of the second autocollimator 11 measurement, control first piezoelectric ceramic 41, first lead screw motor 42 and second piezoelectric ceramic 43, second lead screw motor 44 all occur total displacement h2, make the ribbed workbench 1 in the pitch angle direction occurs the standard angle required by the instrument to be tested, take the pitch angle reading of the device as s2, and take the pitch angle display value of the instrument to be tested as α2, α2-s2 is the pitch angle indication error of the instrument to be tested at the test point;Wherein, s2=f2 (h2), f2 indicates a function;

[0109] Step f, repeat step e, complete the indication error detection of the instrument to be tested at all test points in the pitch angle direction.

[0110] The micro-nano radian two-dimensional angle inspection device and method are described in detail above, and the principles and implementation manners of the present application are described by using specific examples. The above examples are only used to help understand the method of the present application and its core idea. Meanwhile, for those skilled in the art, according to the idea of the present application, the specific implementation manners and application ranges will be changed, and the above description should not be understood as a limitation of the present application.

Claims

1. A micro- and nano-arc measurement two-dimensional angle inspection device, characterized in that, The system includes an angle generating device, a base (7), an angle measuring device, a drive module circuit board (12), a main control module circuit board (13), and a display and input module circuit board (14). After receiving the angle verification request, the display and input module circuit board (14) sends the angle generating request to the drive module circuit board (12) through the main control module circuit board (13), causing the ribbed worktable (1) to deflect in the roll or pitch direction. The angle measuring device detects the deflection angle of the ribbed worktable (1) in the two-dimensional direction in real time and sends the measurement result back to the main control module circuit board (13). The main control module circuit board (13) controls the angle generating device according to the angle measurement result to realize closed-loop feedback compensation. The angle generating device consists of a ribbed worktable (1), a worktable rotating shaft (2), a worktable support (3), and a driving device (4). The driving device (4) includes a first piezoelectric ceramic (41), a first lead screw motor (42), a second piezoelectric ceramic (43), and a second lead screw motor (44). The worktable rotating shaft (2) is coaxial with the worktable support (3), the first piezoelectric ceramic (41) is coaxial with the first lead screw motor (42), and the second piezoelectric ceramic (43) is coaxial with the second lead screw motor (44). 44) Coaxial; The positions of the worktable support (3) and the first lead screw motor (42) on the base (7) are both on the same straight line parallel to the roll angle rotation axis, and the positions of the worktable support (3) and the second lead screw motor (44) on the base (7) are both on the same straight line parallel to the pitch angle rotation axis; The ribbed worktable (1) is connected to the worktable support (3) through the worktable shaft (2), and can rotate at small angles in both roll and pitch directions under the push of the drive device (4); The angle measuring device consists of a first plane mirror (8), a second plane mirror (9), a first autocollimator (10), and a second autocollimator (11); after the ribbed worktable (1) deflects in the two-dimensional direction, the first autocollimator (10) measures the roll angle through the first plane mirror (8), and the second autocollimator (11) measures the pitch angle through the second plane mirror (9); The first piezoelectric ceramic (41) and the first lead screw motor (42), and the second piezoelectric ceramic (43) and the second lead screw motor (44) respectively form two sets of macro-micro joint drive devices; after the first lead screw motor (42) and the second lead screw motor (44) achieve coarse positioning within a large stroke range, the first piezoelectric ceramic (41) and the second piezoelectric ceramic (43) perform precise compensation under the closed-loop feedback of the angle measuring device; Both the angle generating device and the angle measuring device are located on the base (7).

2. The micro-nano arc-scale two-dimensional angle inspection device according to claim 1, characterized in that, The first lead screw motor (42) and the second lead screw motor (44) are both located on the same straight line parallel to the pitch angle rotation axis on the base (7), and the worktable support (3) is located on the vertical bisector of the line connecting the positions of the first lead screw motor (42) and the second lead screw motor (44) on the base (7).

3. The micro-nano arc-scale two-dimensional angle inspection device according to claim 1, characterized in that, The positions of the worktable support (3) and the first lead screw motor (42) on the base (7) are both located on the same straight line parallel to the roll angle rotation axis. The position of the second lead screw motor (44) on the base (7) is located on the perpendicular bisector of the line connecting the positions of the worktable support (3) and the first lead screw motor (42).

4. The micro-nano arc-scale two-dimensional angle inspection device according to claim 1, characterized in that, The workbench support (3) and the first lead screw motor (42) are both located on the same straight line parallel to the roll angle rotation axis on the base (7). The first lead screw motor (42) and the second lead screw motor (44) are both located on the same straight line parallel to the pitch angle rotation axis on the base (7). or The first lead screw motor (42) and the second lead screw motor (44) are both located on the same straight line parallel to the roll angle rotation axis on the base (7), and the worktable support (3) and the second lead screw motor (44) are both located on the same straight line parallel to the pitch angle rotation axis on the base (7).

5. A method for inspecting two-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level two-dimensional angle inspection device of claim 1, characterized in that, Includes the following steps: Step a: Send a zeroing command to the display and input module circuit board (14) so ​​that the ribbed worktable (1) is at zero in both the roll angle and pitch angle directions. Place the instrument to be tested on the ribbed worktable (1) and zero the reading. Step b: Send a roll angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10), so that the ribbed worktable (1) generates the standard angle required for the test instrument in the roll angle direction. Record the roll angle reading of the device as s1, and at the same time record the roll angle display value of the test instrument as α1. α1-s1 is the roll angle indication error of the test instrument at the test point; where s1=f1(h1), f1 represents a function; Step c: Repeat step b to complete the verification of the indication error of all test points of the instrument under test in the roll angle direction; Step d: Send a zeroing command to the display and input module circuit board (14) to make the ribbed worktable (1) return to the zero position in the roll angle direction and pitch angle direction, and zero the reading of the instrument to be tested. Step e: Send a pitch angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator (11), so that the ribbed worktable (1) generates the standard angle required for the instrument to be tested in the pitch angle direction. Record the pitch angle reading of the device as s2, and at the same time record the pitch angle display value of the instrument to be tested as α2. α2-s2 is the pitch angle indication error of the instrument to be tested at the test point; where s2=f2(h2), f2 represents a function; Step f, repeat step e, to complete the calibration of the indication error of all test points of the instrument under test in the pitch direction.

6. A method for inspecting two-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level two-dimensional angle inspection device of claim 2, characterized in that, Includes the following steps: Step a: Send a zeroing command to the display and input module circuit board (14) so ​​that the ribbed worktable (1) is at zero in both the roll angle and pitch angle directions. Place the instrument to be tested on the ribbed worktable (1) and zero the reading. Step b: Send a roll angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10), and controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h2, so that the ribbed worktable (1) generates the standard angle required for the test instrument in the roll angle direction. Record the roll angle reading of the device as s1, and at the same time record the roll angle display value of the test instrument as α1. α1-s1 is the roll angle indication error of the test instrument at the test point; where s1=f1(h1,h2), h1=f2(h2), f1 and f2 represent two functions; Step c: Repeat step b to complete the verification of the indication error of all test points of the instrument under test in the roll angle direction; Step d: Send a zeroing command to the display and input module circuit board (14) to make the ribbed worktable (1) return to the zero position in the roll angle direction and pitch angle direction, and zero the reading of the instrument to be tested. Step e: Send a pitch angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to generate a total displacement h3 under the feedback of the measurement value of the second autocollimator (11), so that the ribbed worktable (1) generates the standard angle required for the instrument to be tested in the pitch angle direction. Record the pitch angle reading of the device as s2, and at the same time record the pitch angle display value of the instrument to be tested as α2. α2-s2 is the pitch angle indication error of the instrument to be tested at the test point; where s2=f3(h3), f3 represents a function; Step f, repeat step e, to complete the calibration of the indication error of all test points of the instrument under test in the pitch direction.

7. A method for inspecting two-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level two-dimensional angle inspection device of claim 3, characterized in that, Includes the following steps: Step a: Send a zeroing command to the display and input module circuit board (14) so ​​that the ribbed worktable (1) is at zero in both the roll angle and pitch angle directions. Place the instrument to be tested on the ribbed worktable (1) and zero the reading. Step b: Send a roll angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10), so that the ribbed worktable (1) generates the standard angle required for the test instrument in the roll angle direction. Record the roll angle reading of the device as s1, and at the same time record the roll angle display value of the test instrument as α1. α1-s1 is the roll angle indication error of the test instrument at the test point; where s1=f1(h1), f1 represents a function; Step c: Repeat step b to complete the verification of the indication error of all test points of the instrument under test in the roll angle direction; Step d: Send a zeroing command to the display and input module circuit board (14) to make the ribbed worktable (1) return to the zero position in the roll angle direction and pitch angle direction, and zero the reading of the instrument to be tested. Step e: Send a pitch angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator (11), and controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h3, so that the ribbed worktable (1) generates the standard angle required for the instrument to be tested in the pitch angle direction. Record the pitch angle reading of the device as s2, and at the same time record the pitch angle display value of the instrument to be tested as α2. α2-s2 is the pitch angle indication error of the instrument to be tested at the test point; where s2=f2(h2,h3), h2=f3(h3), f2 and f3 represent two functions; Step f, repeat step e, to complete the calibration of the indication error of all test points of the instrument under test in the pitch direction.

8. A method for checking two-dimensional angles at the micro-nano arc level, implemented on the micro-nano arc-level two-dimensional angle checking device of claim 4, characterized in that, Includes the following steps: Step a: Send a zeroing command to the display and input module circuit board (14) so ​​that the ribbed worktable (1) is at zero in both the roll angle and pitch angle directions. Place the instrument to be tested on the ribbed worktable (1) and zero the reading. Step b: Send a roll angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the second piezoelectric ceramic (43) and the second lead screw motor (44) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10), so that the ribbed worktable (1) generates the standard angle required for the test instrument in the roll angle direction. Record the roll angle reading of the device as s1, and at the same time record the roll angle display value of the test instrument as α1. α1-s1 is the roll angle indication error of the test instrument at the test point; where s1=f1(h1), f1 represents a function; or A roll angle generation command is sent to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to generate a total displacement h1 under the feedback of the measurement value of the first autocollimator (10). This causes the ribbed worktable (1) to generate the standard angle required for the test instrument in the roll angle direction. The roll angle reading of the device is recorded as s1, and the roll angle display value of the test instrument is recorded as α1. α1-s1 is the roll angle indication error of the test instrument at the test point. Wherein, s1=f1(h1), and f1 represents a function. Step c: Repeat step b to complete the verification of the indication error of all test points of the instrument under test in the roll angle direction; Step d: Send a zeroing command to the display and input module circuit board (14) to make the ribbed worktable (1) return to the zero position in the roll angle direction and pitch angle direction, and zero the reading of the instrument to be tested. Step e: Send a pitch angle generation command to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the first piezoelectric ceramic (41), the first lead screw motor (42), the second piezoelectric ceramic (43), and the second lead screw motor (44) to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator (11), so that the ribbed worktable (1) generates the standard angle required for the instrument to be tested in the pitch angle direction. Record the pitch angle reading of the device as s2, and at the same time record the pitch angle display value of the instrument to be tested as α2. α2-s2 is the pitch angle indication error of the instrument to be tested at the test point; where s2=f2(h2), f2 represents a function; or A pitch angle generation command is sent to the display and input module circuit board (14). After receiving the command, the main control module circuit board (13) controls the first piezoelectric ceramic (41) and the first lead screw motor (42) to generate a total displacement h2 under the feedback of the measurement value of the second autocollimator (11), so that the ribbed worktable (1) generates the standard angle required for the instrument to be tested in the pitch angle direction. The pitch angle reading of the device is recorded as s2, and the pitch angle display value of the instrument to be tested is recorded as α2. α2-s2 is the pitch angle indication error of the instrument to be tested at the test point; where s2=f2(h2), f2 represents a function; Step f, repeat step e, to complete the calibration of the indication error of all test points of the instrument under test in the pitch direction.

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